CN108231993B - Polarization method and application of piezoelectric electret material component - Google Patents
Polarization method and application of piezoelectric electret material component Download PDFInfo
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- CN108231993B CN108231993B CN201710174809.XA CN201710174809A CN108231993B CN 108231993 B CN108231993 B CN 108231993B CN 201710174809 A CN201710174809 A CN 201710174809A CN 108231993 B CN108231993 B CN 108231993B
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- 239000000463 material Substances 0.000 title claims abstract description 75
- 238000000034 method Methods 0.000 title claims abstract description 21
- 230000010287 polarization Effects 0.000 title claims description 22
- 229910052751 metal Inorganic materials 0.000 claims abstract description 93
- 239000002184 metal Substances 0.000 claims abstract description 93
- 238000002360 preparation method Methods 0.000 claims abstract description 8
- 239000002131 composite material Substances 0.000 claims description 26
- 239000007787 solid Substances 0.000 claims description 25
- 238000005520 cutting process Methods 0.000 claims description 13
- 239000000178 monomer Substances 0.000 claims description 8
- 230000005684 electric field Effects 0.000 abstract description 18
- 230000008021 deposition Effects 0.000 abstract description 3
- 238000010923 batch production Methods 0.000 abstract description 2
- 239000000428 dust Substances 0.000 abstract description 2
- 230000015556 catabolic process Effects 0.000 description 7
- 238000013329 compounding Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003252 repetitive effect Effects 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 description 1
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000026683 transduction Effects 0.000 description 1
- 238000010361 transduction Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
- H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
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Abstract
The invention provides a piezoelectric electret material component, which comprises a piezoelectric electret layer, a metal positive electrode layer and an insulating layer, wherein the piezoelectric electret layer, the metal positive electrode layer and the insulating layer are sequentially arranged; the metal positive electrode layer comprises a plurality of independent metal electrode units and connecting electrodes; the metal electrode units are repeatedly arranged; the connecting electrode is connected and conducted with all the metal electrode units. The piezoelectric electret material component has the advantages that the piezoelectric electret material component with electric fields in opposite directions is realized; the piezoelectric electret material component is prepared firstly and then is polarized, so that the probability of dust deposition on the surface of the material is reduced; simple structure, convenient preparation, simple process, high efficiency and suitability for batch production in factories.
Description
Technical Field
The invention relates to a polarization method and application of a piezoelectric electret material component.
Background
A piezoelectric transducer is a device that converts mechanical energy into electrical energy, or converts electrical energy into mechanical energy, the former being referred to as a sensor and the latter being referred to as an actuator. The core material in the piezoelectric transducer, namely the piezoelectric material, is a piezoelectric transduction material, and can realize conversion between mechanical energy and electric energy. Piezoelectric electret materials are a new generation of non-polar functional materials with piezoelectric properties that have grown up in recent years. The piezoelectric electret material needs to be polarized when permanent charges are stored in or on the surface of the piezoelectric electret material.
The polarization mechanism of the piezoelectric electret material is as follows: when an external electric field is applied to the piezoelectric electret material, when the electric field strength exceeds the breakdown threshold of gas, the gas in the piezoelectric electret material is ionized, and equal positive charges and equal negative charges (plasmas) are generated by ionization and are respectively deposited on the upper surface and the lower surface of the solid medium wall of the hole. Meanwhile, the plasma deposited on the same solid medium wall can form an inner electric field to weaken the strength of an outer electric field, the combined electric field of the inner electric field and the outer electric field is still larger than the breakdown field strength of the gas at the beginning, ionization continues to occur, the plasma with higher deposition density is deposited on the solid medium wall, so that the inner electric field is stronger and the combined electric field is weaker, finally, the combined electric field is lower than the breakdown field strength of the gas, and ionization stops. And after the ionization is stopped, removing the external power supply, breaking the electric field balance on the wall of the solid medium at the moment, wherein the electric field strength depends on the field intensity formed by the deposited charges, if the internal electric field is higher than the breakdown field intensity of the gas, carrying out secondary gas ionization, namely reverse breakdown, and neutralizing a part of the deposited charges by the plasma generated by the secondary ionization until the electric field formed by the residual deposited charges is lower than the breakdown threshold of the gas, and stopping the reverse breakdown. After the polarization is finished, positive charges and negative charges with certain densities exist on the upper surface and the lower surface of the solid medium wall respectively, and the density of the deposited charges is closely related to the piezoelectric activity of the piezoelectric electret material.
The piezoelectric electret material component is a semi-finished product and only has one layer of metal electrode, so that at least one layer of metal electrode layer is required to be added to be opposite to the metal electrode layer in actual use to form positive and negative signals. It is then trimmed in order to obtain the corresponding sensor, energy harvester or actuator. The device has specific specification and size, so when the piezoelectric electret material component is processed, the required specification of the device needs to be manufactured on the metal electrode layer in advance. In the prior art, a piezoelectric electret is generally compounded on a metal grounding layer, the metal grounding layer is an integral metal layer, the metal grounding layer is grounded, and then the piezoelectric electret is polarized. Because the polarization device releases unstable positive voltage, the polarization device basically adopts the released negative voltage to carry out polarization, a plurality of pairs of space charge dipoles are formed on the solid medium wall in the piezoelectric electret layer, positive charges are stored on the solid medium wall close to one side of the free surface, and negative charges are stored on the solid medium wall close to one side of the adjacent surface of the metal positive electrode layer in the piezoelectric electret layer. However, positive charges are often stored on the solid medium wall on the side adjacent to the metal electrode layer according to requirements, so that the requirements of the final product piezoelectric electret sensor are met. The metal electrode layer is inevitably wrapped up to prevent conduction with the ground layer, so that grounding cannot be realized.
Disclosure of Invention
The polarization method and the application of the piezoelectric electret material component have the advantages of simple structure, convenience in preparation, simple process and high efficiency, and are suitable for batch production in factories; to overcome the above-mentioned drawbacks of the prior art.
The invention provides a piezoelectric electret material component, which comprises a piezoelectric electret layer, a metal positive electrode layer and an insulating layer, wherein the piezoelectric electret layer, the metal positive electrode layer and the insulating layer are sequentially arranged; the metal positive electrode layer comprises a plurality of independent metal electrode units and connecting electrodes; the metal electrode units are repeatedly arranged; the connecting electrode is connected and conducted with all the metal electrode units.
Further, the present invention also provides a piezoelectric electret material component, which may further have the following features: each metal electrode unit is provided with at least one pin, and the connecting electrode is connected and conducted with the pin.
Further, the present invention also provides a piezoelectric electret material component, which may further have the following features: the connecting electrode is linear and is arranged on one side of the metal electrode unit and the pin.
Further, the present invention also provides a piezoelectric electret material component, which may further have the following features: the connecting electrode is square wave-shaped.
Further, the present invention also provides a piezoelectric electret material component, which may further have the following features: the width of the metal positive electrode layer is smaller than that of the insulating layer.
In addition, the invention provides a preparation method of the piezoelectric electret material component, wherein the metal positive electrode layer is prepared on the insulating layer; a piezoelectric electret layer is prepared on a metallic positive electrode layer.
In addition, the present invention provides a method for polarizing a piezoelectric electret material assembly, wherein the method comprises grounding a connection electrode in the piezoelectric electret material assembly and then polarizing the connection electrode.
Further, the present invention also provides a method for polarizing a piezoelectric electret material component, which may further have the following features: the polarization device releases negative voltage, a plurality of pairs of space charge dipoles are formed on the solid medium wall in the piezoelectric electret layer, positive charges are stored on the solid medium wall close to one side of the free surface, and negative charges are stored on the solid medium wall close to one side of the metal positive electrode layer adjacent to the other side in the piezoelectric electret layer.
In addition, the invention provides a method for preparing the piezoelectric electret sensor, wherein a composite layer is formed on a piezoelectric electret layer of the piezoelectric electret material component by combining a metal grounding layer and an insulating layer; cutting the composite layer into monomers; when cutting, the connecting electrode is cut off.
In addition, the invention provides a method for preparing the piezoelectric electret sensor, wherein a metal grounding layer and an insulating layer are compounded on a piezoelectric electret layer of the piezoelectric electret material component; on the insulating layer of the piezoelectric electret material component, a composite metal grounding layer and an insulating layer are arranged; forming a composite layer; cutting the composite layer into monomers; the monomer does not include the connection electrode.
Advantageous effects of the invention
The invention provides a piezoelectric electret material component, a preparation method and application thereof. Grounding and polarizing the metal electrode unit to realize a piezoelectric electret material component with electric fields in opposite directions; the piezoelectric electret material component is prepared firstly and then is polarized, so that the probability of dust deposition on the surface of the material is reduced.
Drawings
FIG. 1 is a front view of a composite layer of a piezoelectric electret sensor according to a first embodiment.
Fig. 2 is a front view of a piezoelectric electret material member according to the first embodiment.
Fig. 3 is a top view of the metal positive electrode layer and the insulating layer of the first embodiment.
Fig. 4 is a polarization state diagram of the piezoelectric electret material member of the first embodiment.
Fig. 5 is a front view of a piezoelectric electret sensor composite layer according to a second embodiment.
Fig. 6 is a front view of a piezoelectric electret material member according to a second embodiment.
Fig. 7 is a top view of the metal positive electrode layer and the insulating layer of example two.
Fig. 8 is a polarization state diagram of the piezoelectric electret material assembly of the second embodiment.
Detailed Description
The invention is further described with reference to the following figures and specific embodiments.
Example one
FIG. 1 is a front view of a composite layer of a piezoelectric electret sensor according to a first embodiment.
As shown in fig. 1, the composite layer of the piezoelectric electret sensor includes: the piezoelectric electret material component comprises an insulating layer 10, a metal grounding layer 20 and a piezoelectric electret material component 30 which are arranged in sequence.
Fig. 2 is a front view of a piezoelectric electret material member according to the first embodiment.
As shown in fig. 2, a piezoelectric electret material assembly 30 includes: a piezoelectric electret layer 31, a metallic positive electrode layer 32, and an insulating layer 33 are provided in this order.
Fig. 3 is a top view of the metal positive electrode layer and the insulating layer of the first embodiment.
As shown in fig. 3, the metal positive electrode layer 32 includes: a plurality of independent and repetitive metal electrode units 32-1, a connection electrode 32-2 and a pin 32-3 of each metal electrode unit. In this embodiment, each metal electrode unit 32-1 has a corresponding pin 32-3. The connection electrode 32-2 is formed in a straight line shape at one side of the metal electrode unit 32-1 and the pin 32-3. The connection electrode 32-2 is connected to each pin 32-3, thereby achieving connection to each metal electrode unit 32-1. The width of the metal positive electrode layer 32 is smaller than that of the insulating layer 33. A plurality of repeated metal electrode units 32-1 form an oblique angle of 1-89 degrees with one side or two sides of the piezoelectric electret material component 30, and the connecting electrodes 32-2 are parallel to one side or two sides of the piezoelectric electret material component 30.
The preparation method of the piezoelectric electret sensor comprises the following steps:
and step A, preparing a piezoelectric electret material component.
Step a-1, as shown in fig. 2 and 3, an aluminum foil or a copper foil is laminated on the insulating layer 33, and the excess aluminum foil or copper foil outside the patterns of the metal electrode unit 32-1, the connection electrode 32-2, and the pin 32-3 is etched away to form the metal positive electrode layer 32.
And step A-2, compounding the metal electrode layer 32 and the piezoelectric electret layer 31 after the step A-1 to form the piezoelectric electret material component 30.
In the compounding process, the metal electrode layer 32, the piezoelectric electret layer 31 and the insulating layer 33 are compounded together by a roll-to-roll production method.
Fig. 4 is a polarization state diagram of the piezoelectric electret material member of the first embodiment.
And B, polarizing the piezoelectric electret material component.
As shown in fig. 4, the piezoelectric electret material member 30 is placed under the polarization means 1. The metallic positive electrode layer 32 of the piezoelectric electret material member 30 is grounded through the connection electrode 32-2, thereby achieving grounding of each metallic electrode unit 32-1.
The free surface of the piezoelectric electret layer 31 faces the negative electric field line 2 released by the polarization device 1, a plurality of pairs of space charge dipoles are formed on the solid medium wall in the piezoelectric electret layer, positive charges are stored on the solid medium wall on the surface (upper surface of the solid medium wall in fig. 4) close to the free surface of the piezoelectric electret layer, and negative charges are stored on the solid medium wall on the surface (lower surface of the solid medium wall in fig. 4) close to the adjacent surface of the metal positive electrode layer in the piezoelectric electret layer.
And C, preparing a composite layer.
As shown in fig. 1, a composite layer is formed on the piezoelectric electret layer 31 of the piezoelectric electret material assembly 30, the composite metal ground layer 20 and the insulating layer 10.
And D, cutting and forming the piezoelectric electret sensor.
As shown in fig. 3, the connection electrode 32-2 is cut out by cutting at a position shown by a dotted line, and of course, the metal electrode unit 32-1 is cut into a single body. Then, the pin 32-3 of each metal electrode unit 32-1 monomer is subjected to terminal crimping to prepare the piezoelectric electret sensor.
When the piezoelectric electret material assembly 30 is finally formed into a piezoelectric electret sensor, at least two metal electrode layers need to be arranged, and if the piezoelectric electret sensor is cut, a short circuit of two metal layers is likely to exist on the vertical surface of the outer edge of the device. Therefore, it is necessary to ensure that the size of one of the metal electrode layers is smaller than the shape of the device to ensure that the two metal electrode layers are not short-circuited. However, the pin 32-3 is a part for electrically connecting the metal electrode, and the second or third metal electrode layer at the pin is not covered, so that there is no short circuit on the edge vertical surface during cutting, and therefore, the pin 32-3 is connected and conducted with the connection electrode 32-2, and the problem of possible short circuit of the multilayer metal electrode layer is completely avoided.
Example two
Fig. 5 is a front view of a piezoelectric electret sensor composite layer according to a second embodiment.
As shown in fig. 5, the composite layer of the piezoelectric electret sensor includes: the piezoelectric electret material component comprises an insulating layer 10, a metal grounding layer 20, a piezoelectric electret material component 30, a metal grounding layer 40 and an insulating layer 50 which are arranged in sequence.
Fig. 6 is a front view of a piezoelectric electret material member according to a second embodiment.
As shown in fig. 6, the piezoelectric electret material member 30 includes: a piezoelectric electret layer 31, a metal positive electrode layer 32, and an insulating layer 33 are provided in this order.
Fig. 7 is a top view of the metal positive electrode layer and the insulating layer of example two.
As shown in fig. 7, the metal positive electrode layer 32 includes: a plurality of independent and repetitive metal electrode units 32-1, a connection electrode 32-2 and a pin 32-3 of each metal electrode unit. In this embodiment, each metal electrode unit 32-1 has a corresponding pin 32-3. The connection electrode 32-2 is in a square wave shape, penetrates between the metal electrode units 32-1, and is connected and conducted with each pin 32-3, so that the connection and conduction with each metal electrode unit 32-1 are realized. The width of the metal positive electrode layer 32 is smaller than that of the insulating layer 33.
The preparation method of the piezoelectric electret sensor comprises the following steps:
and step A, preparing a piezoelectric electret material component.
Step a-1, as shown in fig. 6 and 7, prints silver paste on the insulating layer 33 to form a metal electrode unit 32-1, a connection electrode 32-2, and a pin 32-3 pattern, i.e., to form the metal positive electrode layer 32.
And step A-2, compounding the metal electrode layer 32 and the piezoelectric electret layer 31 after the step A-1 to form the piezoelectric electret material component 30.
In the compounding process, the metal electrode layer 32, the piezoelectric electret layer 31 and the insulating layer 33 are compounded together by a roll-to-roll production method.
Fig. 8 is a polarization state diagram of the piezoelectric electret material assembly of the second embodiment.
And B, polarizing the piezoelectric electret material component.
As shown in fig. 8, the piezoelectric electret material member 30 is placed under the polarization apparatus 1. The metallic positive electrode layer 32 of the electret material member 30 is grounded through the connection electrode 32-2, thereby achieving grounding of each metallic electrode unit 32-1.
The free surface of the piezoelectric electret layer 31 faces the negative electric field line 2 released by the polarization device 1, a plurality of pairs of space charge dipoles are formed on the solid medium wall in the piezoelectric electret layer, positive charges are stored on the solid medium wall on the surface (upper surface of the solid medium wall in fig. 8) close to the free surface of the piezoelectric electret layer, and negative charges are stored on the solid medium wall on the surface (lower surface of the solid medium wall in fig. 8) close to the adjacent surface of the metal positive electrode layer in the piezoelectric electret layer.
And C, preparing a composite layer.
As shown in fig. 5, a piezoelectric electret layer 31 of a piezoelectric electret material assembly is provided with a composite metal ground layer 20 and an insulating layer 10. A composite layer is formed on the insulating layer 33 of the piezoelectric electret material assembly 30, the composite metal ground layer 40 and the insulating layer 50.
And D, cutting and forming the piezoelectric electret sensor.
As shown in fig. 7, the metal electrode units 32-1 grouped into 5 are directly cut into a single body, which does not include the connection electrode 32-2 portion, as indicated by a dotted line. Then, the pin 32-3 of each metal electrode unit 32-1 monomer is subjected to terminal welding to prepare the piezoelectric electret sensor.
Of course, the cutting method of the piezoelectric electret sensor is not limited to the two methods described in the embodiments, as long as the cutting of the connection electrode 32-2 and the cutting of the metal electrode unit 32-1 into a single body are achieved.
The metal electrode unit 32-1 in the present invention is not limited to the above two embodiments, and may be a polygonal, circular, strip-shaped, or irregular image. Materials for piezoelectric electret layer 31 include, but are not limited to, PVDF, P (VDF + TrFE), PTFE, FEP, PP, PZT, ZnO, COC, PFA, PEN, PCTFE, PET, and composites of each other.
Claims (6)
1. A method for polarizing a piezoelectric electret material component, characterized by:
the piezoelectric electret material component comprises a piezoelectric electret layer, a metal positive electrode layer and an insulating layer which are sequentially arranged;
the metal positive electrode layer comprises a plurality of independent metal electrode units and connecting electrodes;
the metal electrode units are repeatedly arranged;
the connecting electrode is connected and conducted with all the metal electrode units;
each metal electrode unit is provided with at least one pin, and the connecting electrode is connected and conducted with the pin;
after the connecting electrode is grounded, polarization is carried out;
the polarization device releases negative voltage, and a plurality of pairs of space charge dipoles are formed on the solid medium wall in the piezoelectric electret layer;
the solid medium wall on the surface close to the adjacent surface of the metal positive electrode layer in the piezoelectric electret layer stores negative charges; and positive charges are stored on the solid medium wall on the other surface of the piezoelectric electret layer, namely the surface close to the free surface.
2. A method of poling a piezoelectric electret material assembly of claim 1 wherein:
wherein the connection electrode is linear and is arranged at one side of the metal electrode unit and the pin.
3. A method of poling a piezoelectric electret material assembly of claim 1 wherein:
wherein, the connecting electrode is square wave-shaped.
4. A method of poling a piezoelectric electret material assembly of claim 1 wherein:
wherein the width of the metal positive electrode layer is smaller than the width of the insulating layer.
5. A preparation method of a piezoelectric electret sensor is characterized by comprising the following steps:
the polarization method according to claim 1, wherein a composite metal ground layer and an insulating layer are formed on the piezoelectric electret layer of the piezoelectric electret material assembly to form a composite layer;
cutting the composite layer into monomers; when cutting, the connecting electrode is cut off.
6. A preparation method of a piezoelectric electret sensor is characterized by comprising the following steps:
the polarization method according to claim 1, wherein a composite metal ground layer and an insulating layer are formed on the piezoelectric electret layer of the piezoelectric electret material member; on the insulating layer of the piezoelectric electret material component, a composite metal grounding layer and an insulating layer; forming a composite layer;
cutting the composite layer into monomers; the monomer does not include the connecting electrode.
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| CN110595512B (en) * | 2019-09-24 | 2023-10-27 | 湖南科技大学 | A method of manufacturing a flexible piezoelectric sensor |
| CN112584290B (en) * | 2019-09-27 | 2022-07-26 | 华硕电脑股份有限公司 | actuator |
| TWI708473B (en) * | 2019-09-27 | 2020-10-21 | 華碩電腦股份有限公司 | Actuator |
| CN112129432A (en) * | 2020-09-15 | 2020-12-25 | 中国科学院深圳先进技术研究院 | A kind of preparation method of piezoelectric sensor and piezoelectric sensor |
| CN112993556A (en) * | 2021-02-05 | 2021-06-18 | 北京航空航天大学 | Small low-frequency transmitting-receiving integrated antenna and application |
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| DE19620826C2 (en) * | 1996-05-23 | 1998-07-09 | Siemens Ag | Piezoelectric bending transducer and method for its production |
| FI108986B (en) * | 1999-07-01 | 2002-04-30 | Emfitech Oy | Process for producing a sensor element and a sensor element |
| JP5057572B2 (en) * | 2007-11-16 | 2012-10-24 | パナソニック株式会社 | Manufacturing method of micro condenser microphone |
| US20120251858A1 (en) * | 2011-04-04 | 2012-10-04 | Rohm Co., Ltd. | Laminated type energy device, chip type energy device, energy device electrode structure and fabrication method of the laminated type energy device |
| CN103682081B (en) * | 2012-09-14 | 2017-07-11 | 纳米新能源（唐山）有限责任公司 | Piezo-electric electret thin film and preparation method thereof |
| CN104058364B (en) * | 2014-06-13 | 2016-03-23 | 杭州电子科技大学 | A kind of preparation method of patterned thin film electret |
| CN104347793B (en) * | 2014-08-06 | 2017-09-26 | 贝骨新材料科技（上海）有限公司 | Micropore piezo-electric electret thin film component volume to volume continuous polarization devices and methods therefor |
| CN105870319B (en) * | 2016-04-26 | 2019-03-05 | 贝骨新材料科技（上海）有限公司 | A kind of roll-to-roll manufacturing method of strip piezoelectric film sensor |
| CN105870316B (en) * | 2016-05-23 | 2018-07-24 | 武汉大学 | A kind of flexible piezoelectric energy harvester and preparation method thereof |
| CN106505147B (en) * | 2016-10-25 | 2019-08-06 | 中南大学 | A kind of miniature, flexible magnetoelectric composite material and preparation method thereof |
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Address after: Room 313, Building 4, 45 Songbei Road, Suzhou Industrial Park, Suzhou City, Jiangsu Province Applicant after: Suzhou Beibei New Material Technology Co., Ltd. Address before: 201499 First Building 2-1, 1599 Fengpu Avenue, Fengxian District, Shanghai Applicant before: New material technology (Shanghai) Co., Ltd. |
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