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CN108227079A - A kind of high-precision N-bit adjustable light delays - Google Patents

A kind of high-precision N-bit adjustable light delays Download PDF

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Publication number
CN108227079A
CN108227079A CN201611149460.6A CN201611149460A CN108227079A CN 108227079 A CN108227079 A CN 108227079A CN 201611149460 A CN201611149460 A CN 201611149460A CN 108227079 A CN108227079 A CN 108227079A
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optical
delay
optical switch
output
input
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李冰
严亭
赖龙斌
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Shanghai Telecom Photon Integration Technology Co Ltd
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Shanghai Telecom Photon Integration Technology Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/32Optical coupling means having lens focusing means positioned between opposed fibre ends
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The present invention provides a kind of high-precision N bit adjustable light delays, are mainly made of optical switch chip, collimator lens array, free space time delay module, input-output optical fiber pigtail, pedestal.Wherein optical switch chip is integrated for the array of multiple optical switch elements, and free space time delay module realizes the integration of multistage delay unit, and the efficient coupling of the two is realized by lens array, ps grades of step-lengths, the adjustable light delay of 10 more than bit finally can be achieved.The present invention have many advantages, such as delay precision it is high, with it is roomy, small, light-weight, be easy to technique realization, be very suitable for the application in the fields such as Optical Controlled Phased Array Antenna system, particularly airborne, spaceborne radar.

Description

一种高精度N-bit可调光延时器A high-precision N-bit dimmable delayer

技术领域technical field

本发明涉及光电器件技术领域,特别涉及一种高精度可调谐光延时器。The invention relates to the technical field of optoelectronic devices, in particular to a high-precision tunable optical delayer.

背景技术Background technique

在相控阵雷达系统中,传统电域相控阵天线的移相器配置和微波信号频率有关,这使其瞬时带宽很窄。为实现相控阵雷达的大瞬时带宽,应采用真延时(True Time Delay)技术来代替电域移相器。传统的TTD是由波导或同轴电缆构成,这种对微波信号直接延迟的方法受电回路密度的限制,所构造的时延网络体积庞大而笨重、信号损耗高,无论在性能还是工程上都不具备实用性。将微波信号调制到光上,用光波导做延时回路,即光学真延时技术(OTTD),器件具有体积小、重量轻、带宽大、传输稳定、无相互辐射干扰的优势,是微波光子学的重要研究领域。In a phased array radar system, the configuration of the phase shifter of the traditional electrical domain phased array antenna is related to the frequency of the microwave signal, which makes the instantaneous bandwidth very narrow. In order to realize the large instantaneous bandwidth of the phased array radar, the technology of True Time Delay should be used instead of the electric domain phase shifter. The traditional TTD is composed of waveguide or coaxial cable. This method of directly delaying the microwave signal is limited by the density of the electrical circuit. The time delay network constructed is bulky and heavy, and the signal loss is high. Both in terms of performance and engineering. Not practical. The microwave signal is modulated onto the light, and the optical waveguide is used as the delay circuit, that is, the optical true delay technology (OTTD). The device has the advantages of small size, light weight, wide bandwidth, stable transmission, and no mutual radiation interference. It is a microwave photon important field of study.

为使天线扫描方向可调,光延时器必须延时长度可调;而为保证天线扫描角度的高分辨率,光延时器的调谐步长应足够小。为满足高波段雷达应用,对于步进式可调光延时器,延时步进一般需达到ps量级,此时可认为这是一种“准连续”的可调光延时器。In order to make the scanning direction of the antenna adjustable, the delay length of the optical delayer must be adjustable; and in order to ensure the high resolution of the antenna scanning angle, the tuning step of the optical delayer should be small enough. In order to meet the high-band radar application, for the step-by-step dimmable delayer, the delay step generally needs to reach the ps level. At this time, it can be considered as a "quasi-continuous" dimmable delayer.

目前可调光延时器的实现方案有多种,主要包括“光开关+延迟线”、光学谐振腔、啁啾光栅、光子晶体等。光学谐振腔、啁啾光栅、光子晶体这些方案可以实现光延时的连续调谐,但都属谐振结构,光信号延迟的性能受限于谐振结构本身固有的延迟-带宽积,它们的带宽都比较窄,不能满足宽带雷达的应用需求。“光开关+延迟线”方案可以实现大带宽,但属于步进式可调光延时技术,为了满足高波段雷达应用,它必须延时步长足够小,延时精度足够高。At present, there are many implementation schemes for the adjustable optical delay device, mainly including "optical switch + delay line", optical resonant cavity, chirped grating, photonic crystal, etc. Optical resonators, chirped gratings, and photonic crystals can achieve continuous tuning of optical delay, but they all belong to resonant structures. The performance of optical signal delay is limited by the inherent delay-bandwidth product of the resonant structure itself, and their bandwidths are relatively Narrow, can not meet the application requirements of broadband radar. The "optical switch + delay line" scheme can achieve large bandwidth, but it is a step-by-step adjustable optical delay technology. In order to meet high-band radar applications, it must have a sufficiently small delay step and a sufficiently high delay accuracy.

“光开关+光纤延时”方案是经典的步进式可调光延时技术,但受光纤加工精度限制,延时精度只能做到0.01ns左右,仅适合S波段等低频段应用,且受分立光纤器件的体积重量限制,器件很难实现集成化和小型化,限制了它在机载/星载等领域的应用。The "optical switch + fiber delay" solution is a classic step-by-step adjustable optical delay technology, but due to the limitation of optical fiber processing accuracy, the delay accuracy can only be about 0.01ns, which is only suitable for low-frequency band applications such as S-band, and Limited by the volume and weight of discrete optical fiber devices, it is difficult to achieve integration and miniaturization of the device, which limits its application in airborne/spaceborne and other fields.

一种新兴技术是“光开关+光波导延时”片上集成的可调光延时技术,其延时精度可达到0.1ps以下,可满足高波段雷达应用的延时精度要求,但它在工艺实现上还存在一些问题。若采用亚微米级的小尺寸波导制作,有波导光传输损耗较大、芯片与光纤的耦合效率较低、延时路径精确控制困难、以及芯片性能对工艺敏感性高等问题;若采用微米级的大尺寸波导,波导的弯曲半径则较大,可实现的延时器bit数较少,不能满足应用需求。此外,片上集成的多bit光延时器,由于材料折射率的温度相关性,温度变化导致的延时变化量很容易与延时步进相当甚至超出延时步进,因而器件必须要有温控措施。总之,目前片上集成的“光开关+光波导延时”可调光延时技术离实用化还存在较远距离。An emerging technology is the on-chip adjustable optical delay technology of "optical switch + optical waveguide delay". Its delay accuracy can reach below 0.1 ps, which can meet the delay accuracy requirements of high-band radar applications. There are still some problems in implementation. If submicron-scale small-sized waveguides are used, there are problems such as large waveguide optical transmission loss, low coupling efficiency between chips and optical fibers, difficulty in precise control of delay paths, and high sensitivity of chip performance to process; For large-sized waveguides, the bending radius of the waveguide is relatively large, and the number of bits of the delayer that can be realized is small, which cannot meet the application requirements. In addition, for the multi-bit optical delayer integrated on the chip, due to the temperature dependence of the refractive index of the material, the delay variation caused by the temperature change is easily equal to or even exceeds the delay step, so the device must have a temperature control measures. In short, the current on-chip integrated "optical switch + optical waveguide delay" dimmable delay technology is still far from being practical.

发明内容Contents of the invention

本发明的目的就是针对现有技术的不足,提出一种高精度可调光延时器,它的延时调谐步长可达1ps,延时精度可达0.1ps,同时具有带宽大、体积小、调谐速度快、易于工艺实现等优点,能够满足光控相控阵宽带雷达的应用需求。The purpose of the present invention is to address the deficiencies of the prior art, and propose a high-precision dimmable delayer, whose delay tuning step length can reach 1ps, and the delay accuracy can reach 0.1ps, and has large bandwidth and small size at the same time. , fast tuning speed, easy process implementation and other advantages, can meet the application requirements of optically controlled phased array broadband radar.

本发明公开的技术方案如下:The technical scheme disclosed by the present invention is as follows:

采用二进制“光开关+光延时”拓扑结构,器件主要由光开关芯片、准直透镜阵列、自由空间延时模块、输入输出光纤Pigtail、底座组成。对于N-bit可调光延时器,光开关芯片需包含N+1个光开关单元,自由空间延时模块需构造出N个自由空间延时单元,各级延时单元包含两个延时通道,分别与光开关单元的两个输入/输出口相连,每一级延时单元中两个延时通道的延时长度差呈2倍关系递增。光信号由光纤输入,经第1个光开关单元时进行延时路径选择,选择进入第1级延时单元的某个延时通道,再经第2个光开关单元选择第2级延时通道,依次类推,直至经过第N级延时通道,然后经过第N+1个光开关单元切换至输出端,光信号经延时后从光纤输出。Using binary "optical switch + optical delay" topology, the device is mainly composed of optical switch chip, collimating lens array, free space delay module, input and output optical fiber Pigtail, and base. For an N-bit adjustable optical delayer, the optical switch chip needs to contain N+1 optical switch units, and the free space delay module needs to construct N free space delay units, and the delay units at each level include two delay units The channels are respectively connected to the two input/output ports of the optical switch unit, and the delay length difference between the two delay channels in each stage of delay unit increases by a factor of 2. The optical signal is input by the optical fiber, and the delay path is selected when passing through the first optical switch unit, and a certain delay channel entering the first-level delay unit is selected, and then the second-level delay channel is selected through the second optical switch unit , and so on, until passing through the Nth delay channel, and then switching to the output end through the N+1th optical switch unit, and the optical signal is output from the optical fiber after being delayed.

所述的光开关可以利用电光效应、热光效应、等离子色散效应等实现“开”、“关”状态控制,可以基于硅基SOI(Silicon On Insulator)材料、有机聚合物材料等。光开关芯片有两种可能构成:一种是N+1个光开关单元全是2×2光开关;另一种是第1个、第N+1个光开关是1×2光开关,其余全是2×2光开关。光开关芯片中所有光开关单元并列排布构成阵列。为便于透镜阵列加工,光开关阵列的输入/输出波导一般呈等间距分布,或呈最小间距的整数倍分布。The optical switch can use electro-optic effect, thermo-optic effect, plasma dispersion effect, etc. to realize "on" and "off" state control, and can be based on silicon-based SOI (Silicon On Insulator) materials, organic polymer materials, etc. The optical switch chip has two possible configurations: one is that the N+1 optical switch units are all 2×2 optical switches; the other is that the first and N+1th optical switches are 1×2 optical switches, and the rest All 2×2 optical switches. All the optical switch units in the optical switch chip are arranged side by side to form an array. In order to facilitate the processing of the lens array, the input/output waveguides of the optical switch array are generally distributed at equal intervals, or at integer multiples of the minimum interval.

为增加回波损耗,可以对芯片输入/输出波导端面进行垂直或水平斜抛光处理,也可在芯片设计时使输入/输出光波导与芯片端面法线成一定倾斜角度。In order to increase the return loss, the end face of the input/output waveguide of the chip can be polished vertically or horizontally, and the input/output optical waveguide and the normal line of the end face of the chip can also be inclined at a certain angle during chip design.

所述的自由空间延时模块包括两个部分,分别置于光开关芯片的两端,相邻延时单元分别位于两部分延时模块中。每个延时单元由两个延时路径组成,两个路径的延时之差随级数呈2倍递增。每个延时路径由两个反射镜实现光路折返,从而送入下一级光开关。通过对反射镜位置设计来实现延时长度设计,所有反射镜通过高精度贴片和胶粘合工艺贴合于带位置刻线的基板上构成一体化的延时模块。The free space delay module includes two parts, which are respectively placed at both ends of the optical switch chip, and the adjacent delay units are respectively located in the two parts of the delay module. Each delay unit is composed of two delay paths, and the delay difference between the two paths increases by 2 times with the number of stages. Each time-delay path is turned back by two reflectors, so as to be sent to the next-level optical switch. The design of the delay length is achieved by designing the position of the mirrors. All the mirrors are attached to the substrate with position markings through high-precision patch and glue bonding process to form an integrated delay module.

所述的透镜阵列采用等间距透镜设计,其间距等于光开关输入/输出端的最小间距。透镜阵列的所有透镜焦距可以设计为相同,也可以设计为非均匀焦距的透镜阵列,以使各透镜的耦合效率与相应光程更匹配,这取决于耦合效率与工艺复杂度的权衡。The lens array adopts equidistant lens design, and the distance thereof is equal to the minimum distance between the input/output ends of the optical switch. All lenses of the lens array can be designed with the same focal length, or a lens array with non-uniform focal length, so that the coupling efficiency of each lens can better match the corresponding optical path, which depends on the trade-off between coupling efficiency and process complexity.

所述的输入输出光纤pigtail是带自聚焦透镜的光纤尾纤,自聚焦透镜与准直透镜阵列、芯片波导耦合,通过光纤实现光信号的输入输出。The input and output optical fiber pigtail is a fiber pigtail with a self-focusing lens. The self-focusing lens is coupled with a collimating lens array and a chip waveguide, and the input and output of optical signals are realized through the optical fiber.

所述的底座是为了实现光开关芯片、准直透镜阵列、自由空间延时模块、输入输出光纤Pigtail等部件的最佳耦合光路及可靠固定连接而设计的基底安装平台,它应选择热膨胀系数较低的材料,其机械结构也应具有较低的温度敏感性。光开关芯片、准直透镜阵列、反射镜及衬底、输入输出光纤Pigtail等部件与底座通过胶水固化粘结在一起,保持相对位置的固定。准直透镜阵列位于光开关芯片的两侧,对芯片波导出射光斑准直。输入输出光纤Pigtail通过胶水粘结固定在反射镜的基板上与准直透镜耦合。The base is a base mounting platform designed for optimal coupling optical paths and reliable fixed connections of components such as optical switch chips, collimating lens arrays, free space delay modules, input and output optical fiber Pigtails, etc. Low material, its mechanical structure should also have low temperature sensitivity. Optical switch chips, collimating lens arrays, mirrors and substrates, input and output optical fiber pigtails and other components are bonded together with the base through glue curing to keep their relative positions fixed. The collimating lens array is located on both sides of the optical switch chip, and collimates the light spots emitted by the waveguide of the chip. The input and output optical fiber Pigtail is fixed on the substrate of the reflector by glue bonding and coupled with the collimating lens.

本发明的优点在于:与传统“光开关+光纤延时”可调光延时器相比,延时步长和延时精度大幅度改进,并且体积小,重量轻,使其在光控相控阵雷达系统,特别是机载、星载雷达领域的应用性很强;与片上集成的“光开关+光波导延时”可调光延时器相比,工艺可行性强得多,并且光延时长度不受温度变化的影响。The advantages of the present invention are: compared with the traditional "optical switch + optical fiber delay" adjustable optical delay device, the delay step and delay accuracy are greatly improved, and the volume is small and the weight is light, so that it can be used in the optical control phase Controlled array radar systems, especially in the field of airborne and spaceborne radars, have strong applicability; compared with the on-chip integrated "optical switch + optical waveguide delay" adjustable optical delay device, the process feasibility is much stronger, and The optical delay length is not affected by temperature changes.

附图说明Description of drawings

图1是本发明采用的可调光延时拓扑结构示意图。Fig. 1 is a schematic diagram of the topology structure of the adjustable light delay used in the present invention.

图2是本发明公开的9-bit光延时器示例的结构示意图。Fig. 2 is a schematic structural diagram of an example of a 9-bit optical delay device disclosed in the present invention.

图3是本发明公开的光开关阵列排布示意图。Fig. 3 is a schematic diagram of the arrangement of the optical switch array disclosed in the present invention.

图4是本发明公开的芯片光波导端面垂直斜抛光处理示意图。Fig. 4 is a schematic diagram of the vertical oblique polishing process on the end face of the chip optical waveguide disclosed in the present invention.

图5是本发明公开的芯片光波导端面水平斜抛光示例一示意图。Fig. 5 is a schematic diagram of Example 1 of the horizontal oblique polishing of the end surface of the chip optical waveguide disclosed in the present invention.

图6是本发明公开的芯片光波导端面水平斜抛光示例二示意图。Fig. 6 is a schematic diagram of Example 2 of the horizontal oblique polishing of the end face of the chip optical waveguide disclosed in the present invention.

图7是本发明公开的芯片光波导倾斜设计示意图。Fig. 7 is a schematic diagram of the inclined design of the chip optical waveguide disclosed in the present invention.

图8是本发明公开的自由空间单元延时路径示例一的示意图。FIG. 8 is a schematic diagram of Example 1 of a delay path of a free-space unit disclosed in the present invention.

图9是本发明公开的自由空间单元延时路径示例二的示意图。FIG. 9 is a schematic diagram of Example 2 of the free-space unit delay path disclosed in the present invention.

图10是本发明公开的透镜阵列示意图。Fig. 10 is a schematic diagram of a lens array disclosed in the present invention.

图11是本发明公开的底座平台结构示意图。Fig. 11 is a schematic structural view of the base platform disclosed by the present invention.

具体实施方式Detailed ways

下面通过具体实施例并结合附图对本发明进行详细地说明:Below by specific embodiment and in conjunction with accompanying drawing, the present invention is described in detail:

本发明提出了一种“光开关+自由空间光延时”的新型可调光延时器,其采用二进制拓扑结构。如图1所示,各级光延时单元有两条延时通道,两者延时长度之差分别为ΔL、2ΔL、4ΔL……2n-1ΔL,其中n为延时器的bit数,ΔL为延时器的调谐步长。图中第1、第N+1个光开关也可以用2×2光开关替代。The invention proposes a novel adjustable optical delay device of "optical switch + free space optical delay", which adopts a binary topology structure. As shown in Figure 1, the optical delay units at all levels have two delay channels, and the difference between the delay lengths of the two is ΔL, 2ΔL, 4ΔL...2 n-1 ΔL, where n is the number of bits of the delayer , ΔL is the tuning step of the delayer. The 1st and N+1th optical switches in the figure can also be replaced by 2×2 optical switches.

图2给出了一个本发明公开的9-bit光延时器示例的结构示意图。图中1为光开关芯片,由10个2×2光开关阵列构成,2为准直透镜阵列,3为反射镜,4为反射镜基底平台,5为输入/输出光纤Pigtail。如图2所示,2×2光开关单元可以实现“直通”、“交叉”两种传输状态切换,通过每一级光开关单元的状态切换实现延时通道选择。一系列反射镜与基底平台构成两个自由空间光延时模块,分别位于光开关芯片两侧。光开关芯片和自由空间光延时模块通过准直透镜阵列实现高效耦合。输入/输出光纤Pigtail通过准直透镜分别耦合至第1级与最后1级光开关单元的输出端。由此,对于本例的9-bit光延时器,通过控制每一级光开关单元的传输状态控制,即可实现以ΔL为步长、29步数的可调延时。FIG. 2 shows a schematic structural diagram of an example of a 9-bit optical delay device disclosed by the present invention. In the figure, 1 is an optical switch chip, which is composed of 10 2×2 optical switch arrays, 2 is a collimating lens array, 3 is a mirror, 4 is a mirror base platform, and 5 is an input/output optical fiber Pigtail. As shown in Figure 2, the 2×2 optical switch unit can switch between two transmission states of "straight-through" and "crossover", and realize the delay channel selection through the state switching of each level of optical switch unit. A series of reflectors and a substrate platform constitute two free-space optical delay modules, which are respectively located on both sides of the optical switch chip. The optical switch chip and the free-space optical delay module realize efficient coupling through a collimating lens array. The input/output optical fiber Pigtail is respectively coupled to the output ends of the first-stage and last-stage optical switch units through a collimating lens. Thus, for the 9-bit optical delayer in this example, by controlling the transmission state control of each stage of optical switch unit, an adjustable delay with ΔL as the step size and 29 steps can be realized.

光开关阵列排布如图3所示。图中间距a为同一个2×2光开关单元两个输入/输出波导的中心距,间距b为相邻光开关单元的相邻输入/输出波导的中心距。为便于准直透镜阵列加工,所有光开关单元应等间距排布,且图中间距a和b应满足整数倍关系,其中较小的间距即为透镜阵列中相邻透镜的中心距。本例中给出了一种最简单的情况,即a=b,也等于透镜阵列的相邻透镜中心距。本发明并不对光开关的控制机制、芯片材料作任何限制,如控制机制可以是热光效应、电光效应、等离子色散效应、MEMS等,芯片材料可以是硅(含SOI)、有机聚合物等。本例中采用SOI材料,基于等离子色散效应的关开关技术。The layout of the optical switch array is shown in Figure 3. The spacing a in the figure is the center-to-center distance between two input/output waveguides of the same 2×2 optical switch unit, and the spacing b is the center-to-center distance between adjacent input/output waveguides of adjacent optical switch units. In order to facilitate the processing of the collimating lens array, all optical switch units should be arranged at equal intervals, and the intervals a and b in the figure should satisfy the integer multiple relationship, wherein the smaller interval is the center-to-center distance of adjacent lenses in the lens array. The simplest case is given in this example, that is, a=b, which is also equal to the center-to-center distance of adjacent lenses of the lens array. The present invention does not impose any restrictions on the control mechanism and chip material of the optical switch. For example, the control mechanism can be thermo-optic effect, electro-optic effect, plasma dispersion effect, MEMS, etc., and the chip material can be silicon (including SOI), organic polymer, etc. In this example, SOI material is used, and the switching technology based on the plasma dispersion effect is adopted.

为增加回波损耗,芯片波导的入射光与芯片端面法线可设计有一定的角度,称为倾斜入射,为使该倾斜入射光高效率地耦合入芯片光波导,光波导与芯片端面法线也应保持一定角度。该倾斜角度有多种实现方案,包括对芯片端面的垂直斜抛光、水平斜抛光,或在芯片设计时就使光波导与芯片端面法线保持该倾斜角度。In order to increase the return loss, the incident light of the chip waveguide and the normal line of the chip end surface can be designed to have a certain angle, which is called oblique incidence. An angle should also be maintained. There are various implementation schemes for the inclination angle, including vertical oblique polishing and horizontal oblique polishing of the chip end face, or maintaining the inclination angle between the optical waveguide and the normal line of the chip end face during chip design.

图4给出了一种对光开关芯片的波导端面进行垂直斜抛光处理示例的示意图。图中1为芯片衬底材料,2为芯片光波导层,3为芯片垂直斜抛光角度,4为透镜阵列,图中点划线标出了入射光斑的轮廓示意。本例中垂直斜抛光处理是上窄下宽式倾斜,也可上宽下窄式斜抛光处理。可对与透镜阵列耦合的芯片两个端面均进行垂直斜抛光处理,也可只对与输入/输出光纤耦合的芯片端面进行垂直斜抛光处理。Fig. 4 shows a schematic diagram of an example of performing vertical oblique polishing on the end face of the waveguide of the optical switch chip. In the figure, 1 is the chip substrate material, 2 is the optical waveguide layer of the chip, 3 is the vertical oblique polishing angle of the chip, and 4 is the lens array. In this example, the vertical oblique polishing treatment is inclined at the top narrow at the bottom and wide at the bottom, or it can be obliquely polished at the top wide and narrow at the bottom. Both end faces of the chip coupled with the lens array can be processed with vertical oblique polishing, and only the end face of the chip coupled with the input/output optical fiber can be processed with vertical oblique polishing.

图5给出了一种对光开关芯片的波导端面进行水平斜抛光处理示例的示意图。图中1为芯片,2为透镜阵列,3为芯片中光波导,4为芯片水平斜抛光角度,图中点划线标出了光路示意。可对与透镜阵列耦合的芯片两个端面均进行水平斜抛光处理,也可只对与输入/输出光纤耦合的芯片端面进行水平斜抛光处理。FIG. 5 shows a schematic diagram of an example of performing horizontal oblique polishing on the end face of the waveguide of the optical switch chip. In the figure, 1 is the chip, 2 is the lens array, 3 is the optical waveguide in the chip, and 4 is the horizontal oblique polishing angle of the chip. The dotted line in the figure indicates the optical path. The two end faces of the chip coupled with the lens array can be horizontally inclined polished, and only the end face of the chip coupled with the input/output optical fiber can be horizontally inclined polished.

图6给出了另一种对光开关芯片的波导端面进行水平斜抛光处理示例的示意图。图中1为芯片,2为透镜阵列,3为芯片中光波导,4为芯片水平斜抛光角度,图中点划线标出了光路示意。芯片抛光方式与图5所示的示例相同,只是本例中透镜阵列的各个透镜单元采用倾斜式设计,因此耦合至自由空间的光路有所不同。FIG. 6 is a schematic diagram of another example of performing horizontal oblique polishing on the end face of the waveguide of the optical switch chip. In the figure, 1 is the chip, 2 is the lens array, 3 is the optical waveguide in the chip, and 4 is the horizontal oblique polishing angle of the chip. The dotted line in the figure indicates the optical path. The chip polishing method is the same as the example shown in Figure 5, except that the individual lens units of the lens array in this example are designed in a tilted manner, so the optical path coupled to the free space is different.

图7给出了一种芯片光波导倾斜设计示例的示意图。图中1为芯片,2为透镜阵列,3为芯片中光波导,图中点划线标出了光路示意。本示例未对芯片进行斜抛光处理,而在芯片设计时使输入/输出光波导与芯片端面法线成一定倾斜角度。本例中芯片两端光波导均进行了倾斜设计,也可只对与输入/输出光纤耦合的一端进行倾斜光波导设计。Fig. 7 shows a schematic diagram of an example of a chip optical waveguide tilt design. In the figure, 1 is a chip, 2 is a lens array, and 3 is an optical waveguide in the chip, and the dotted lines in the figure indicate the optical path. In this example, the chip is not subjected to oblique polishing treatment, but the input/output optical waveguide and the normal line of the chip end face form a certain oblique angle during chip design. In this example, the optical waveguides at both ends of the chip are tilted, and only the end coupled with the input/output optical fiber can be tilted.

图8给出了一种自由空间单元延时路径示例的示意图。其中一个光延时回路为:光信号经第i个(1≤i≤N)光开关单元的上路输出端输出,通过透镜耦合至自由空间,经过自由空间光延时模块的反射镜实现光路反折,再通过透镜耦合至第i+1个光开关单元的下路输出端。另一个光延时回路为:光信号从第i个光开关的下路输出端输出,通过自由空间光延时模块中光路反折后耦合输入至第i+1个光开关的上路输入端。为简便起见,本实例设定所有反射镜与入射光线成45°角。如图所示,4个对称放置的反射镜构成了两条光路,其光程分别为L1、L2,L1与L2的光程差即该级延时单元的可调延时长度。如前所述,相邻级延时单元的可调延时长度呈2倍递增。在设计中,对各级延时单元L1与L2的光程差需精确控制使之满足二进制递增要求,而对L1或L2的绝对长度无需严格控制。L1和L2孰长孰短并不重要,只要工艺可实现即可。本例给出一种较简单的示例,即每一级延时单元均是L2较L1长。Fig. 8 shows a schematic diagram of an example of a free-space unit delay path. One of the optical delay loops is: the optical signal is output through the upper output end of the i-th (1≤i≤N) optical switch unit, coupled to the free space through the lens, and the optical path reflection is realized through the mirror of the free space optical delay module. folded, and then coupled to the drop output end of the i+1th optical switch unit through a lens. Another optical delay loop is: an optical signal is output from the drop output end of the i-th optical switch, and coupled to the add input end of the i+1-th optical switch after passing through the optical path in the free-space optical delay module. For simplicity, this example assumes that all reflectors are at a 45° angle to the incident light. As shown in the figure, four symmetrically placed mirrors form two optical paths, and their optical paths are L1 and L2 respectively. The optical path difference between L1 and L2 is the adjustable delay length of the delay unit at this stage. As mentioned above, the adjustable delay lengths of adjacent delay units increase by 2 times. In the design, the optical path difference of the delay units L1 and L2 at each stage needs to be precisely controlled to meet the requirement of binary increment, but the absolute length of L1 or L2 does not need to be strictly controlled. The length of L1 and L2 is not important, as long as the process can be realized. This example gives a relatively simple example, that is, each stage of delay unit is L2 longer than L1.

图9给出了另一种自由空间单元延时路径示例的示意图。其中一个光延时回路为:光信号经第i个光开关单元的上路输出端输出,通过透镜耦合至自由空间,经过自由空间光延时模块的反射镜实现光路反折,再通过透镜耦合至第i+1个光开关单元的上路输出端。另一个光延时回路为:光信号从第i个光开关的下路输出端输出,通过自由空间光延时模块中光路反折后耦合输入至第i+1个光开关的下路输入端。FIG. 9 shows a schematic diagram of another example of a free-space unit delay path. One of the optical delay loops is: the optical signal is output through the upper output end of the i-th optical switch unit, coupled to the free space through the lens, and the optical path is refracted through the mirror of the free space optical delay module, and then coupled to the The add output end of the i+1th optical switch unit. Another optical delay loop is: the optical signal is output from the drop output end of the i-th optical switch, and is coupled to the drop input end of the i+1-th optical switch after passing through the optical path in the free space optical delay module. .

图10是本发明公开的准直透镜阵列示意图。如图10所示,准直透镜在同一方向上按一定间距排列,透镜间距与波导芯片通道的间距相对应。与光开关芯片波导间距相对应,图10给出了一种中心距均匀分布的透镜阵列示例。所有透镜中心轴线在排列方向上相互平行,透镜的球面在同一侧,非球面在另一侧。透镜阵列的所有透镜焦距可以设计为相同,也可以设计为非均匀焦距的透镜阵列,以使各透镜的耦合效率与相应光程更匹配,这取决于耦合效率与工艺复杂度的权衡。对于所有透镜焦距相同的透镜阵列设计,因为不同透镜所对应的光程不同,而光程不等时耦合效率也不同。为使最大光程与最小光程的耦合效率差异足够小,透镜的光斑直径应选择足够大。Fig. 10 is a schematic diagram of a collimator lens array disclosed in the present invention. As shown in FIG. 10 , the collimating lenses are arranged at a certain distance in the same direction, and the distance between the lenses corresponds to the distance between the channels of the waveguide chip. Corresponding to the waveguide pitch of the optical switch chip, FIG. 10 shows an example of a lens array with uniform center-to-center distances. The central axes of all the lenses are parallel to each other in the arrangement direction, the spherical surface of the lens is on the same side, and the aspheric surface is on the other side. All lenses of the lens array can be designed with the same focal length, or a lens array with non-uniform focal length, so that the coupling efficiency of each lens can better match the corresponding optical path, which depends on the trade-off between coupling efficiency and process complexity. For the lens array design with the same focal length of all lenses, because different lenses correspond to different optical lengths, and the coupling efficiency is also different when the optical lengths are not equal. In order to make the coupling efficiency difference between the maximum optical path and the minimum optical path small enough, the spot diameter of the lens should be selected large enough.

图11是本发明公开的底座平台结构示意图。如图11所示,1为平台底座,2为光开关阵列芯片,3为准直透镜阵列,4为自由空间光延时模块。底座平台可采用金属或非金属材质,平台中间为波导芯片放置区,两端分别为透镜阵列放置区和自由空间延时模块放置区。各个区域保持面平行,各个面根据波导芯片、透镜阵列和延时模块高度的差异在高度有所不同,目的是为了保持芯片光波导中心与透镜中心、反射镜中心组成的光路共面。为使整体器件的温度稳定性更高,光开关芯片、自由空间光延时模块、透镜阵列宜选择相同的基底材料,或者热膨胀率相近的材料。Fig. 11 is a schematic structural view of the base platform disclosed by the present invention. As shown in FIG. 11 , 1 is a platform base, 2 is an optical switch array chip, 3 is a collimating lens array, and 4 is a free-space optical delay module. The base platform can be made of metal or non-metal material. The center of the platform is the waveguide chip placement area, and the two ends are respectively the lens array placement area and the free space delay module placement area. The planes of each area are kept parallel, and the heights of each plane are different according to the height difference of the waveguide chip, lens array and delay module. In order to make the temperature stability of the overall device higher, the optical switch chip, the free space optical delay module, and the lens array should choose the same substrate material, or materials with similar thermal expansion rates.

以上实施方式对本发明进行了详细说明,本领域中普通技术人员可根据上述说明对本发明做出种种变化例。因而,实施方式中的某些细节不应构成对本发明的限定,本发明将以所附权利要求书界定的范围作为本发明的保护范围。The above embodiments have described the present invention in detail, and those skilled in the art can make various changes to the present invention according to the above description. Therefore, some details in the embodiments shall not be construed as limiting the present invention, and the scope of the present invention shall be defined by the appended claims as the protection scope of the present invention.

Claims (15)

1.一种高精度N-bit(N≥1)可调光延时器,主要由光开关芯片、自由空间光延时模块、透镜阵列、输入/输出光纤Pigtail、底座组成,其特征在于:1. A high-precision N-bit (N≥1) adjustable optical delay device, mainly composed of an optical switch chip, a free space optical delay module, a lens array, an input/output optical fiber Pigtail, and a base, is characterized in that: a)所述N-bit可调光延时器包含N级可调光延时单元,每个光延时单元包含2个光延时回路,2个光延时回路的光程差即构成该光延时单元的可调光延时长度。所述N个可调光延时单元的光程差满足20ΔL、21ΔL……2N-1ΔL关系,其中ΔL表示可调光延时步长。a) The N-bit adjustable optical delay device includes N-level adjustable optical delay units, each optical delay unit includes 2 optical delay circuits, and the optical path difference of the 2 optical delay circuits constitutes the Adjustable light delay length of the light delay unit. The optical path difference of the N adjustable light delay units satisfies the relationship of 2 0 ΔL, 2 1 ΔL...2 N-1 ΔL, where ΔL represents the step size of the adjustable light delay. b)所述光开关芯片包括N+1个光开关单元,N+1个光开关单元由上至下并列排布,其中与输入光纤相耦合连接的为第1个光开关单元,与输出光纤相耦合连接的为第N+1个光开关单元,所述第1个光开关单元为2×2或1×2光开关,所述第N+1个光开关单元为2×2或2×1光开关,其余N-1个光开关单元均为2×2光开关。b) The optical switch chip includes N+1 optical switch units, and the N+1 optical switch units are arranged side by side from top to bottom, wherein the first optical switch unit is coupled to the input optical fiber, and the first optical switch unit is connected to the output optical fiber The N+1th optical switch unit is coupled and connected, the first optical switch unit is a 2×2 or 1×2 optical switch, and the N+1th optical switch unit is a 2×2 or 2×2 optical switch unit 1 optical switch, and the remaining N-1 optical switch units are all 2×2 optical switches. c)所述2×2光开关包括2个输入端和2个输出端,分别为上路输入端、下路输入端、上路输出端、下路输出端,1×2光开关包括1个输入端和2个输出端,其中2个输出端分别为上路输出端、下路输出端,2×1光开关包括2个输入端和1个输出端,其中2个输入端分别为上路输入端、下路输入端。所述上路指2个输入端或输出端中靠近上侧的端口,下路指2个输入端或输出端中靠近下侧的端口。c) The 2×2 optical switch includes 2 input terminals and 2 output terminals, which are respectively the upper input terminal, the lower input terminal, the upper channel output terminal, and the lower channel output terminal, and the 1×2 optical switch includes 1 input terminal and 2 output terminals, of which the 2 output terminals are respectively the upper channel output terminal and the lower channel output terminal. road input. The upper path refers to a port near the upper side among the two input ends or output ends, and the lower path refers to a port near the lower side among the two input ends or output ends. d)所述第i级(1≤i≤N)可调光延时单元的2个光延时回路,其回路构造方式是,其中一个光延时回路中的光信号经第i个光开关单元的某个输出端输出,通过透镜耦合至自由空间,经过自由空间光延时模块的反射镜实现光路反折,再通过透镜耦合至第i+1个光开关单元的某个输入端,另一个光延时回路中的光信号从第i个光开关的另一个输出端输出,通过自由空间光延时模块中光路反折后耦合输入至第i+1个光开关的另一个输入端。d) The two optical delay loops of the i-th stage (1≤i≤N) adjustable optical delay unit, the circuit construction method is that the optical signal in one of the optical delay loops passes through the i-th optical switch An output terminal of the unit is output, coupled to the free space through a lens, and the optical path is refracted through the mirror of the free space optical delay module, and then coupled to an input terminal of the i+1th optical switch unit through the lens, and the other The optical signal in an optical delay loop is output from the other output end of the i-th optical switch, and is coupled to the other input end of the i+1-th optical switch after passing through the optical path in the free-space optical delay module. e)所述自由空间光延时由两部分光延时模块组成,分别置于光开关芯片的两侧,各级光延时单元间插设置于两部分延时模块中。e) The free space optical delay is composed of two optical delay modules, which are respectively placed on both sides of the optical switch chip, and the optical delay units of all levels are interleaved in the two delay modules. f)所述光延时模块由一系列反射镜与衬底材料构成,通过反射镜排布设计实现各级可调光延时长度。f) The optical delay module is composed of a series of reflectors and substrate materials, and the adjustable optical delay lengths at various levels are realized through the arrangement design of the reflectors. g)所述的光开关芯片光输入/输出波导与自由空间光延时模块,两者通过透镜阵列进行耦合。g) The optical input/output waveguide of the optical switch chip and the free-space optical delay module are coupled through a lens array. h)所述光开关芯片、自由空间光延时模块、透镜阵列、输入/输出光纤Pigtail等部件,通过所述的底座机械结构来实现彼此间最佳耦合及相对位置固定。h) The optical switch chip, the free space optical delay module, the lens array, the input/output optical fiber Pigtail and other components are optimally coupled to each other and fixed relative to each other through the mechanical structure of the base. 2.如权利要求1所述的第i级可调光延时单元,其特征在于:其中一个光延时回路中的光信号经第i个光开关单元的上路输出端输出,通过透镜耦合至自由空间,经过自由空间光延时模块的反射镜实现光路反折,再通过透镜耦合至第i+1个光开关单元的下路输入端,另一个光延时回路中的光信号从第i个光开关的下路输出端输出,通过自由空间光延时模块中光路反折后耦合输入至第i+1个光开关的上路输入端。2. The i-th stage adjustable optical delay unit according to claim 1, characterized in that: the optical signal in one of the optical delay loops is output through the upper output end of the i-th optical switch unit, and is coupled to In the free space, the optical path is refracted through the mirror of the free space optical delay module, and then coupled to the lower input end of the i+1th optical switch unit through the lens, and the optical signal in the other optical delay circuit is transmitted from the i The output of the drop output port of the first optical switch is coupled to the top input port of the i+1th optical switch after the optical path in the free space optical delay module is reflected. 3.如权利要求1所述的第i级可调光延时单元,其特征在于:其中一个光延时回路中的光信号经第i个光开关单元的上路输出端输出,通过透镜耦合至自由空间,经过自由空间光延时模块的反射镜实现光路反折,再通过透镜耦合至第i+1个光开关单元的上路输入端,另一个光延时回路中的光信号从第i个光开关的下路输出端输出,通过自由空间光延时模块中光路反折后耦合输入至第i+1个光开关的下路输入端。3. The i-th stage adjustable optical delay unit according to claim 1, characterized in that: the optical signal in one of the optical delay loops is output through the upper output end of the i-th optical switch unit, and is coupled to In the free space, the optical path is refracted through the mirror of the free space optical delay module, and then coupled to the upper input end of the i+1th optical switch unit through the lens, and the optical signal in the other optical delay circuit is transmitted from the ith The output of the drop output end of the optical switch is coupled to the drop input end of the i+1th optical switch after the optical path in the free-space optical delay module is refracted. 4.如权利要求1所述的光延时单元,其延时回路可由相邻的光开关单元+自由空间延时来构造,也可以由间隔的光开关单元+自由空间延时来构造。4. The optical delay unit according to claim 1, wherein the delay circuit can be constructed by adjacent optical switch units + free space delay, or by spaced optical switch units + free space delay. 5.如权利要求1所述的N级可调光延时单元,只需构成如权利要求1所述的N个长度不等的光程差,但对各级光延时单元构造光程差的先后顺序并不限制。5. The N-level adjustable optical delay unit as claimed in claim 1 only needs to form the optical path differences of N lengths unequal as claimed in claim 1, but the optical path differences are constructed for all levels of optical delay units The order of precedence is not limited. 6.如权利要求1所述的光开关芯片,可以利用热光效应、电光效应、等离子色散效应、或MEMS物理机制实现,可以基于硅、有机聚合物材料实现。6. The optical switch chip according to claim 1, which can be realized by thermo-optic effect, electro-optic effect, plasma dispersion effect, or MEMS physical mechanism, and can be realized based on silicon or organic polymer materials. 7.如权利要求1所述的光开关芯片,其特征在于:通过对芯片波导端面进行垂直斜抛光处理以增加回波损耗。7. The optical switch chip according to claim 1, wherein the return loss is increased by performing vertical oblique polishing on the end face of the waveguide of the chip. 8.如权利要求1所述的光开关芯片,其特征在于:通过对芯片波导端面进行水平斜抛光处理以增加回波损耗。8. The optical switch chip according to claim 1, wherein the waveguide end face of the chip is polished horizontally to increase the return loss. 9.如权利要求1所述的光开关芯片,其特征在于:设计使芯片输入/输出波导与芯片端面法线成一定角度倾斜。9. The optical switch chip according to claim 1, characterized in that: the input/output waveguide of the chip is designed to be inclined at a certain angle to the normal line of the end face of the chip. 10.如权利要求1所述的透镜阵列,其特征在于:各个透镜单元采用非均匀或均匀焦距。10. The lens array according to claim 1, wherein each lens unit adopts non-uniform or uniform focal length. 11.如权利要求1所述的自由空间延时模块,其特征在于:通过在衬底上刻蚀形成位置标线来实现反射镜的精确定位。11. The free-space time-delay module according to claim 1, wherein the accurate positioning of the reflector is realized by etching and forming position marking lines on the substrate. 12.如权利要求1所述的底座和自由空间延时模块衬底,其特征在于:避免选用温度敏感性材料和机械结构。12. The base and free-space delay module substrate according to claim 1, characterized in that temperature-sensitive materials and mechanical structures are avoided. 13.如权利要求1所述的输入/输出光纤Pigtail,其特征在于:是带自聚焦透镜的光纤尾纤。13. The input/output optical fiber pigtail according to claim 1, characterized in that it is an optical fiber pigtail with a self-focusing lens. 14.如权利要求8所述的光延时器,其特征在于:透镜阵列的各个透镜单元采用倾斜式设计。14. The optical delay device according to claim 8, wherein each lens unit of the lens array adopts an inclined design. 15.如权利要求9所述的光延时器,其特征在于:透镜阵列的各个透镜单元采用倾斜式设计。15. The optical delay device according to claim 9, characterized in that each lens unit of the lens array adopts an inclined design.
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