CN108194844B - Deep ultraviolet light source for exciting fluorescent powder by electron beam - Google Patents
Deep ultraviolet light source for exciting fluorescent powder by electron beam Download PDFInfo
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- CN108194844B CN108194844B CN201711497368.3A CN201711497368A CN108194844B CN 108194844 B CN108194844 B CN 108194844B CN 201711497368 A CN201711497368 A CN 201711497368A CN 108194844 B CN108194844 B CN 108194844B
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- 238000010894 electron beam technology Methods 0.000 title claims abstract description 27
- 239000000843 powder Substances 0.000 title claims abstract description 27
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 35
- 239000010980 sapphire Substances 0.000 claims abstract description 35
- 239000000919 ceramic Substances 0.000 claims abstract description 32
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 229910000833 kovar Inorganic materials 0.000 claims abstract description 15
- 229910052751 metal Inorganic materials 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims abstract description 14
- 230000005284 excitation Effects 0.000 claims abstract description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 23
- 239000011230 binding agent Substances 0.000 claims description 7
- 229910000164 yttrium(III) phosphate Inorganic materials 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 abstract description 14
- 229910052753 mercury Inorganic materials 0.000 abstract description 14
- 238000011031 large-scale manufacturing process Methods 0.000 abstract description 6
- 230000008901 benefit Effects 0.000 abstract description 5
- 238000004659 sterilization and disinfection Methods 0.000 abstract description 4
- 239000011521 glass Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- UXBZSSBXGPYSIL-UHFFFAOYSA-K yttrium(iii) phosphate Chemical compound [Y+3].[O-]P([O-])([O-])=O UXBZSSBXGPYSIL-UHFFFAOYSA-K 0.000 description 3
- 238000005401 electroluminescence Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21K—NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE; LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE; LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL; LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATING ELEMENTS; LIGHT SOURCES NOT OTHERWISE PROVIDED FOR
- F21K2/00—Non-electric light sources using luminescence; Light sources using electrochemiluminescence
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
- A61L2/08—Radiation
- A61L2/10—Ultraviolet radiation
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2202/00—Aspects relating to methods or apparatus for disinfecting or sterilising materials or objects
- A61L2202/10—Apparatus features
- A61L2202/11—Apparatus for generating biocidal substances, e.g. vaporisers, UV lamps
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Epidemiology (AREA)
- Physics & Mathematics (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Luminescent Compositions (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Abstract
The invention relates to the field of ultraviolet light sources, in particular to a deep ultraviolet light source for exciting fluorescent powder by electron beams. The light source includes a phosphor screen, an electron gun, and a ceramic envelope, wherein: the fluorescent screen comprises a sapphire substrate and an ultraviolet fluorescent powder layer coated on the sapphire substrate; the electron gun is arranged in the ceramic shell, an electron beam generated by the electron gun faces the ultraviolet fluorescent powder layer, and the ultraviolet fluorescent powder layer emits deep ultraviolet light through the sapphire substrate under excitation of the electron beam; the fluorescent screen is matched and sealed with the ceramic shell through the kovar metal ring. Compared with the existing mercury lamp, UV-LED and the like, the ultraviolet light source of the embodiment of the application has the advantages of no pollution, low cost and easy large-scale production, and has wide application prospect in the field of sterilization and disinfection.
Description
Technical Field
The application relates to the field of ultraviolet light sources, in particular to a deep ultraviolet light source for exciting fluorescent powder by an electron beam.
Background
The deep ultraviolet light source is widely applied to the field of irradiation sterilization, the most commonly used deep ultraviolet light source is a mercury lamp at present, but the mercury lamp contains mercury, mercury pollution is easily caused in the production and use processes, ultraviolet light is generated in the gas discharge mode during the mercury lamp, the spectral line of the mercury lamp is a continuous spectrum of an ultraviolet region, the application efficiency is low, and meanwhile, the service life of the mercury lamp is short due to the fact that the electrode temperature is high during the operation of the mercury lamp.
The UV-LED has the characteristics of no mercury, energy conservation and portability, can replace an ultraviolet light source of a mercury lamp, but has low UV-LED conversion efficiency, and simultaneously has higher manufacturing cost and lower output power which limit the application in the field of sterilization and disinfection.
Disclosure of Invention
The embodiment of the application provides a deep ultraviolet light source of electron beam excited fluorescent powder, so as to provide a deep ultraviolet light source which is pollution-free, high in power and low in cost.
To achieve the above object, the embodiments of the present application provide a deep ultraviolet light source for electron beam excitation of phosphor, the light source including a phosphor screen, an electron gun, and a ceramic envelope, wherein:
the fluorescent screen comprises a sapphire substrate and an ultraviolet fluorescent powder layer coated on the sapphire substrate;
the electron gun is arranged in the glass shell, an electron beam generated by the electron gun faces the ultraviolet fluorescent powder layer, and the ultraviolet fluorescent powder layer emits deep ultraviolet light through the sapphire substrate under excitation of the electron beam;
the fluorescent screen is matched and sealed with the ceramic shell through the kovar metal ring.
The deep ultraviolet light source of an electron beam excited phosphor of claim 1, wherein the ultraviolet phosphor layer comprises a host material and active ions, the host material being yttrium phosphate.
Further, the activating ion is Bi2+，Pr3+Or Gd3+Any one of them.
Further, the electron beam generated by the electron gun excites the phosphor layer in a focused scan or area projection manner.
Further, the electron gun is a thermal emission electron gun or a field emission electron gun.
Furthermore, the working voltage of the electron gun is 5-20 kv.
Further, the ultraviolet phosphor layer is coated on the sapphire substrate by using aluminum oxide as a binder.
Further, the electron gun is matched and sealed with the ceramic shell through a kovar metal ring.
The deep ultraviolet light source that this application embodiment provided includes the fluorescent screen, electron gun and ceramic package, the electron gun fluorescent screen is all arranged in ceramic package, produce the phosphor powder in the electron beam arouses the fluorescent screen through the electron gun, thereby send the deep ultraviolet light, this application uses the sapphire as the light-emitting window, match through metal kovar ring and ceramic package and seal, thereby can easily realize large-scale production, and therefore, the cost is reduced, the sapphire is compared well with the glass radiating effect simultaneously, can show the light output that improves the light source, the light source of this application is pollution-free, and is low in cost, easily large-scale production.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without any creative effort.
FIG. 1 is a schematic diagram of a deep ultraviolet light source for electron beam excited phosphors according to an embodiment of the present application.
Detailed Description
In order to make those skilled in the art better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The following describes embodiments of the present application in further detail with reference to the accompanying drawings.
Referring to fig. 1, the deep ultraviolet light source of the electron beam excited phosphor of the embodiment of the present application includes an electron gun 1, a ceramic envelope 2, and a phosphor screen including a sapphire substrate 3 and an ultraviolet phosphor layer 4 coated on the sapphire substrate 3. Sapphire single crystal is preferred to the sapphire base that this application used, sapphire chemical property is stable, simultaneously have good transmissivity to the ultraviolet ray, the sapphire of more important thing comparison glass has better heat conductivity, this application embodiment uses the sapphire base as the light-emitting window of deep ultraviolet light source, because the good heat conductivity of sapphire, the base of the glass material of comparing in this application embodiment can use bigger energy to deactivate the phosphor powder and produce the deep ultraviolet light, thereby can show the luminous power that improves the light source in the unit area. The uv phosphor layer 4 used in the present embodiment comprises a matrix material, which is yttrium phosphate, and active ions, which are preferably Bi2+，Pr3+Or Gd3+Any one of them. The yttrium phosphate has low phonon energy and chemical stabilityQualitative advantage by doping with Bi2+，Pr3+Or Gd3+The ions can emit deep ultraviolet light with different wavelengths under the excitation of the electron beam. Ultraviolet phosphor layer 4 passes through aluminium oxide as the binder coating in the embodiment of this application on the sapphire substrate, the sapphire principal ingredients is aluminium oxide, can form the chemical bond with the aluminium oxide in the sapphire when using aluminium oxide as the binder and combine to improve the adhesion of phosphor powder, in the embodiment of this application, can pass through screen printing's mode coating on the sapphire substrate after mixing aluminium oxide binder and phosphor powder, then accomplish the coating after the heating and drying, furtherly, the aluminium oxide binder can be alumina sol.
In the embodiment of the present application, the electron gun 1 is disposed in the ceramic housing 2, protected by the ceramic housing 2, and can provide a required vacuum environment through the ceramic housing 2, the electron gun in the embodiment of the present application is a thermal emission electron gun or a field emission electron gun, and the working voltage of the electron gun is preferably 5kv to 20 kv; furthermore, the electron beam generated by the electron gun excites the phosphor layer in a focusing scanning or area projection manner, the electron beam generated by the electron gun 1 faces the ultraviolet phosphor layer 4, and the ultraviolet phosphor layer 4 emits deep ultraviolet light through the sapphire substrate under the excitation of the electron beam. In the deep ultraviolet light source in the prior art, a mercury lamp generates ultraviolet light by using a gas discharge mode, but mercury is extremely toxic and pollutes the environment, and meanwhile, the gas discharge mode has short service life and unmodulatable intensity; the other is a UV-LED deep ultraviolet lamp which generates deep ultraviolet light in an electroluminescence mode, the electroluminescence mode is limited by materials, on one hand, the UV-LED deep ultraviolet lamp only can emit light with specific wavelength, on the other hand, the conversion efficiency is low, the total light emitting power is low, and the application of the UV-LED deep ultraviolet lamp in the industry is limited. And the deep ultraviolet light source of this application is the mode production that excites phosphor powder through the electron gun, through arousing different phosphor powder, can produce the deep ultraviolet light of different wavelength, thereby can adjust luminous power through the operating voltage of adjustment electron gun simultaneously, thereby on the other hand this application uses the sapphire base as the light-emitting window, the absorption of glass to the deep ultraviolet light has been avoided, thereby the conversion efficiency of light source has been showing and has been improved, the embodiment of this application excites phosphor powder through the electron beam and produces the mode of deep ultraviolet light, long service life has, good stability, efficient advantage.
In the embodiment of the application, the fluorescent screen is matched and sealed with the ceramic shell 2 through the Kovar metal ring 5. In the embodiment of the application, the fluorescent screen takes sapphire as a substrate, the main component of the sapphire is alumina, and the alumina is one of the main components of the ceramic shell, so that the thermal expansion coefficients of the sapphire and the ceramic shell are matched, kovar metal is the most common sealing alloy in an electric vacuum element, and the kovar metal ring matched with the ceramic shell is used, so that the matching sealing of the fluorescent screen and the ceramic shell can be realized. In the embodiment of the application, the sapphire substrate and the ceramic shell are used, so that the light emitting power is improved, and meanwhile, the sapphire substrate and the ceramic shell are matched due to the comparison of thermal expansion coefficients, so that the sapphire substrate and the ceramic shell can be sealed and connected in a matching way through kovar metal, and a common glass shell hardly penetrates deep ultraviolet light; although the quartz glass shell is strong in ultraviolet transmittance, the processing difficulty is high, and the large-scale production cannot be realized; in the other method, common glass is used as a shell, and quartz glass is used as a light-emitting window, but the quartz glass has different thermal expansion coefficients from the common glass, so that the sealing difficulty is high. This application uses the sapphire base to be the light-emitting window, then can realize sealing-in with the matching of ceramic package with kovar metal ring, this kind of mode compare with the glass shell, easily reduce cost realizes large-scale production. The electron gun and the ceramic shell can also be matched and sealed through the kovar metal ring in the embodiment of the application.
Further, the light source further comprises a reflecting layer 6 coated on the phosphor layer in an evaporation manner, and a pure aluminum reflecting layer with a thickness of about 100nm is preferably selected, so that deep ultraviolet light generated after the phosphor is excited by an electron beam is emitted towards the light emitting surface in a concentrated manner, and light emitting loss caused by the emission of the deep ultraviolet light towards the inside of the light source is reduced.
The deep ultraviolet light source that this application embodiment provided includes fluorescent screen, electron gun and ceramic package, produces the phosphor powder in the electron beam arouses the fluorescent screen through the electron gun to send the deep ultraviolet light, sapphire base is the light-emitting window for this application, can show the luminous power who improves the light source, and the fluorescent screen matches through kovar metal ring and ceramic package and seals in simultaneously, easily reduction in production cost realizes scale production. Compared with the existing mercury lamp, UV-LED and the like, the ultraviolet light source of the embodiment of the application has the advantages of no pollution, low cost and easy large-scale production, and has wide application prospect in the field of sterilization and disinfection.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present application in further detail, and it should be understood that the above-mentioned embodiments are only examples of the embodiments of the present application and are not intended to limit the scope of the present application, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present application should be included in the scope of the present application.
Claims (4)
1. A deep ultraviolet light source for electron beam excitation of phosphors, said light source comprising a phosphor screen, an electron gun, and a ceramic envelope, wherein:
the fluorescent screen comprises a sapphire substrate and an ultraviolet fluorescent powder layer coated on the sapphire substrate; the ultraviolet fluorescent powder layer is formed by mixing an aluminum oxide binder and fluorescent powder and then coating the mixture on the sapphire substrate; the alumina binder is alumina sol;
the electron gun is arranged in the ceramic shell, an electron beam generated by the electron gun faces the ultraviolet fluorescent powder layer and excites the ultraviolet fluorescent powder layer in an area projection mode, and the ultraviolet fluorescent powder layer emits deep ultraviolet light through a sapphire substrate under excitation of the electron beam; the ultraviolet fluorescent powder layer is YPO4Pr phosphor layer, YPO4Bi phosphor layer or YPO4Any one of Gd fluorescent powder layers;
the fluorescent screen passes through kovar metal ring with ceramic package matching sealing-in will the fluorescent screen with ceramic package matching sealing-in kovar metal ring's internal surface with the fluorescent screen is connected, will the fluorescent screen with ceramic package matching sealing-in kovar metal ring's external surface with ceramic package is connected.
2. The deep ultraviolet light source for electron beam excited phosphors of claim 1, wherein the electron gun is a thermal emission electron gun or a field emission electron gun.
3. The deep ultraviolet light source for electron beam excited phosphors of claim 1, wherein the electron gun has an operating voltage of 5kv to 20 kv.
4. The source of claim 1, wherein said electron gun is matingly sealed to said ceramic envelope by a kovar ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711497368.3A CN108194844B (en) | 2017-12-31 | 2017-12-31 | Deep ultraviolet light source for exciting fluorescent powder by electron beam |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711497368.3A CN108194844B (en) | 2017-12-31 | 2017-12-31 | Deep ultraviolet light source for exciting fluorescent powder by electron beam |
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| CN108194844A CN108194844A (en) | 2018-06-22 |
| CN108194844B true CN108194844B (en) | 2022-02-25 |
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| CN112552900B (en) * | 2020-12-29 | 2023-12-22 | 东北师范大学 | Preparation method of ultraviolet light source based on up-conversion fluorescent powder light conversion |
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| JP2006079873A (en) * | 2004-09-08 | 2006-03-23 | National Institute For Materials Science | Deep UV solid state light emitting device |
| CN101438406A (en) * | 2004-11-19 | 2009-05-20 | 皇家飞利浦电子股份有限公司 | Light emitting device with inorganic housing |
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