CN108152200A - A kind of co-focusing imaging device and method for spectrum analysis - Google Patents
A kind of co-focusing imaging device and method for spectrum analysis Download PDFInfo
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- CN108152200A CN108152200A CN201611106786.0A CN201611106786A CN108152200A CN 108152200 A CN108152200 A CN 108152200A CN 201611106786 A CN201611106786 A CN 201611106786A CN 108152200 A CN108152200 A CN 108152200A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 77
- 238000010183 spectrum analysis Methods 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 title claims abstract description 14
- 239000006185 dispersion Substances 0.000 claims abstract description 13
- 230000003595 spectral effect Effects 0.000 claims abstract description 11
- 210000001747 pupil Anatomy 0.000 claims abstract description 9
- 238000007493 shaping process Methods 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000005286 illumination Methods 0.000 claims description 3
- 238000004458 analytical method Methods 0.000 claims description 2
- 230000005670 electromagnetic radiation Effects 0.000 claims description 2
- 230000005284 excitation Effects 0.000 claims description 2
- 238000005215 recombination Methods 0.000 claims description 2
- 230000006798 recombination Effects 0.000 claims description 2
- 230000021615 conjugation Effects 0.000 claims 1
- 238000009738 saturating Methods 0.000 claims 1
- 238000001228 spectrum Methods 0.000 abstract description 6
- 230000000903 blocking effect Effects 0.000 abstract description 3
- 230000003287 optical effect Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000010226 confocal imaging Methods 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 238000001237 Raman spectrum Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 230000008521 reorganization Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000009941 weaving Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
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Abstract
A kind of co-focusing imaging device and method for spectrum analysis place scanning galvanometer by the pupil location in the first telecentric imaging lens group, linear scan unit are placed in its imaging focal plane, to obtain the Confocal Images of sample；Meanwhile dispersing prism is placed in the pupil location of the second telecentric imaging lens group, the polychromatic light of linear scan unit will be passed through in the dispersion on the scanning direction of linear scan unit；Linear reflection mirror is placed in the second telecentric imaging lens group imaging focal plane, the blocking light identical with the monochromatic wavelength that light source emits enters third telecentric imaging lens group；Exposure can obtain the spectrum picture of a row sample to area array cameras every time, and all spectrum pictures are reassembled as including the Confocal Images of spectral information by computer according to the swing sequence of scanning galvanometer.
Description
Technical field
The present invention relates to a kind of co-focusing imaging device and method for spectrum analysis, more particularly to for sample three-dimensional
The spectrum analysis of co-focusing imaging.Present invention is mainly applied to dyeing and weaving industry, environmental science, biology, material science, macromolecules
Chemistry, catalysis, texture of coal research, petroleum industry, biomedicine, biochemistry, pharmacy, inorganic and Coordinative Chemistry basic research,
The research fields such as semi-conducting material, daily-use chemical industry.
Background technology
With the development that spectrum analysis is applied in RESEARCH ON CELL-BIOLOGY, there is an urgent need to high-resolution in acquisition by scientist
During Confocal Images, while obtain the spectral information in each site in image.But there was only the simple scan of point by point scanning at present
Confocal imaging system by dispersion element, can once obtain the spectrum picture in a site, and then point by point scanning sample is to obtain
The complete, Confocal Images with spectral information are taken, imaging takes very much.Therefore, simple scan confocal imaging system is difficult
Imaging is obtained to be applied to multiple spot.
And for the turntable confocal imaging system of multi-point scanning, due to the battle array that the pin hole of enormous amount is two-dimensional arrangements
Row, system can only gradually be penetrated the light of different wave length by filter elements such as liquid crystal filter mirrors, then be recombinated by computer, with
Obtain the complete, Confocal Images with spectral information.Therefore, it can be damaged for the turntable confocal imaging system of spectrum analysis
A large amount of optical signal is lost, spectral resolution is higher, and loss is bigger.
In addition, existing system all in light path with spectroscope coupled illumination light path and light path or with a piece of optical filtering
The light of mirror blocking light source transmitting enters light path.But existing manufacturing technology can not be by the bandwidth of spectroscope or optical filtering
Be contracted to the line width of laser, make electromagnetic radiation, with optical source wavelength similar in optical signal cannot be introduced into or can only partly enter inspection
Light path is surveyed, causes existing spectroanalysis instrument that can not differentiate and analyze the spectroscopic data of the wave band.For example, for Raman spectrum point
532nm the and 785nm lasers of analyzer, line width is better than 0.1nm, and best spectroscope or optical filtering are at 532nm
Bandwidth is only capable of reaching 3nm, and the bandwidth at 785nm can only can even reach 5nm.Therefore, using 532nm or 785nm laser
During as light source, using spectroscope or the spectroanalysis instrument of optical filtering light channel structure, 530.5~533.5 can not be differentiated and analyzed
The spectrum of nanometer or 782.5~787.5nm wave bands.
Invention content
The purpose of the present invention is a kind of co-focusing imaging device and method for spectrum analysis, by the first telecentricity
The pupil location of imaging lens group places scanning galvanometer, linear scan unit is placed in its imaging focal plane, to obtain sample
Confocal Images；Meanwhile dispersing prism is placed in the pupil location of the second telecentric imaging lens group, linear scan unit will be passed through
Polychromatic light in the dispersion on the scanning direction of linear scan unit；It is placed in the second telecentric imaging lens group imaging focal plane
Linear reflection mirror, the blocking light identical with the monochromatic wavelength that light source emits enter third telecentric imaging lens group；Area array cameras
Exposure can obtain the spectrum picture of a row sample every time, and computer is by all spectrum pictures according to the swing sequence weight of scanning galvanometer
Group is the Confocal Images comprising spectral information.
The purpose of the present invention is what is be achieved through the following technical solutions：
As shown in Figure 1, a kind of co-focusing imaging device and method for spectrum analysis, including：Light source 1, beam shaping
Device 2, linear reflection mirror 3, the first telecentric imaging lens group 7, scanning galvanometer 8, linear scan unit 6, the second telecentric imaging lens
Group 4, dispersing prism 5, third telecentric imaging lens group 9, microscope 10, area array cameras 11 and computer (not shown), feature
It is：
The monochromatic light that light source 1 emits is by beam shaping 2, linear reflection mirror 3, the second telecentric imaging lens group 4, dispersion
After prism 5, linear scan unit 6, the first telecentric imaging lens group 7, scanning galvanometer 8 and microscope 10, illumination excitation is located at aobvious
The sample 12 of the object lens focal plane of micro mirror 10；
First telecentric imaging lens group 7, the second telecentric imaging lens group 4, third telecentric imaging lens group 9, microscope 10
Object lens focal plane and area array cameras 11 be conjugated；
Linear scan unit 6 is located at the imaging focal plane of the first telecentric imaging lens group 7, in the time for exposure of area array cameras 11
Interior completion primary line scanning, scanning direction are vertical with the dispersion direction of dispersing prism 5；
The rotary shaft of scanning galvanometer 8 is parallel with the scanning direction of linear scan unit 6；
Dispersing prism 5 is located at the pupil location of the second telecentric imaging lens group 4, the secondary color optical dispersion that sample 12 is emitted；
Linear reflection mirror 3 is located at the imaging focal plane of the second telecentric imaging lens group 4, just stops that sample 12 is reflected or emitted
, the identical light of monochromatic wavelength emitted with light source 1；
Computer (not shown) is to control light source 1 to switch, linear scan unit 6 scans, scanning galvanometer 8 is swung, face battle array
11 machine of phase exposes and recombination, analysis image；
Linear scan unit 6 is slit, the light transmission pin hole of movement, the single-row light transmission pinhole array of movement and spatial modulation member
Any one in part；
The second scanning galvanometer 13 can be placed in the pupil location of third telecentric imaging lens group 9, to select imaging
Spectral band；
Can be there are one the shifter (not shown) controlled by computer (not shown), the monochromatic light emitted according to light source 1
Wavelength, move linear speculum 3 to corresponding position along 5 dispersion direction of dispersing prism；
The monochromatic light source 1 of multiple transmitting different wave lengths, the fixed threadiness of beam shaping 2 and position can be included
Speculum 3.
Advantages of the present invention is as follows：
1st, the present invention substitutes traditional color by placing linear reflection mirror in the imaging focal plane of the second telecentric imaging lens group
Mirror application is dissipated, can efficiently differentiate the spectral information close to optical source wavelength.
2nd, the present invention substitutes traditional color by placing linear reflection mirror in the imaging focal plane of the second telecentric imaging lens group
Mirror application is dissipated, loss of the dispersion mirror to detection wave band can be avoided, improve system sensitivity.
Description of the drawings
Fig. 1：The schematic diagram of the first embodiment of the present invention
Fig. 2：The schematic diagram of second of embodiment of the present invention
Fig. 3：The schematic diagram of the third embodiment of the present invention
Fig. 4 a~c：The structure and operating diagram of the linear scan unit of the present invention
Drawing explanation：
1 --- light source；2 --- beam shaping；3 --- linear reflection mirror；4 --- the first telecentric imaging lens group；
5 --- dispersing prism；6 --- linear scan unit；7 --- the second telecentric imaging lens group；8 --- scanning galvanometer；9 --- the
Three telecentric imaging lens groups；10 --- microscope；11 --- area array cameras；12 --- sample；13 --- the second scanning galvanometer.
Specific embodiment
The present invention is further described with reference to the accompanying drawings and examples.
Embodiment 1
Fig. 1 be it is related to the present invention the first for spectrum analysis co-focusing imaging device and method schematic diagram,
Operating mode is as follows：
Computer (not shown) control scanning galvanometer 8 stop at first position, then control light source 1 send out monochromatic light and
Area array cameras 11 exposes.Monochromatic light converges at linear reflection mirror 3 after beam shaping 2, and linear reflection mirror 3 is again by monochromatic light
Reflection after the second telecentric imaging lens group 4 and dispersing prism 5, is converged across linear scan unit 6, then using the
10 back lighting sample 12 of one telecentric imaging lens group 7, scanning galvanometer 8 and microscope.
The polychromatic light for reflecting and emitting positioned at the sample 12 of the object lens focal plane of microscope 10 is by microscope 10, the first telecentricity
Imaging lens group 7 and scanning galvanometer 8 pass through linear scan unit 6, the second telecentric imaging lens of directive group 4, positioned at microscope 10
The polychromatic light that reflects and emit of sample 12 of the non-focal plane of object lens then stopped by linear scan unit 6.
Across linear scan unit 6 polychromatic light by the second telecentric imaging lens group 4 object end mirror head collimation after by color
5 dispersion of prism is dissipated, it is burnt in the imaging of the second telecentric imaging lens group 4 using the picture end mirror head of the second telecentric imaging lens group 4
Into two dimensional image on face, wherein parallel with 6 scanning direction of linear scan unit is spatial information, swept with linear scan unit 6
Retouch direction it is vertical be spectral information.Moreover, the image identical with the monochromatic wavelength that light source 1 emits just is fallen in linear reflection
On mirror 3, it is impossible to reach third telecentric imaging lens group 9.Two dimensional image images in face battle array using third telecentric imaging lens group 9
Camera 11.
After 11 end exposure of area array cameras, then computer (not shown) record data control scanning galvanometer 8 to swing and stop
Only in the second position, then control that light source 1 sends out monochromatic light and area array cameras 11 exposes ... and so on, it completes to microscope
In the 10 object lens visual field sample imaging, then by computer (not shown) by all image reorganizations for comprising spectral information,
Complete Confocal Images.
Embodiment 2
Fig. 2 is the second related to the present invention co-focusing imaging device and method schematic diagram for being used for spectrum analysis,
It is as follows with the main distinction of embodiment 1：In the pupil location of telecentric imaging lens 9, one is placed by computer (not shown) control
Second scanning galvanometer 13 of system, by the swing of the second scanning galvanometer 13, the different-waveband for selecting area array cameras 11 that can receive
Light.
Embodiment 3
Fig. 3 be it is related to the present invention the third be used for spectrum analysis co-focusing imaging device and method schematic diagram,
It is as follows with the main distinction of embodiment 1：Multiple light sources 1, beam shaping 2 and linear reflection mirror 3 are set simultaneously.
Embodiment 4
The main distinction of itself and embodiment 1 is as follows：The different monochromatic light of transmitting may be selected in light source 1, and passes through one by counting
The shifter (not shown) of calculation machine (not shown) control, according to the monochromatic wavelength that light source 1 emits, along 5 dispersion of dispersing prism
Linear speculum 3 is moved to corresponding position in direction.
Claims (5)
1. a kind of co-focusing imaging device and method for spectrum analysis, including light source, beam shaping, linear reflection mirror,
First telecentric imaging lens group, scanning galvanometer, linear scan unit, the second telecentric imaging lens group, dispersing prism, third telecentricity
Imaging lens group, microscope, area array cameras and computer, it is characterised in that：
The monochromatic light of the light source transmitting is saturating by the beam shaping, the linear reflection mirror, second telecentric imaging
Microscope group, the dispersing prism, the linear scan unit, the first telecentric imaging lens group, the scanning galvanometer and described
After microscope, illumination excitation is positioned at the sample of the microscopical object lens focal plane；
It is the first telecentric imaging lens group, the second telecentric imaging lens group, the third telecentric imaging lens group, described
Microscopical object lens focal plane and area array cameras conjugation；
The linear scan unit is located at the imaging focal plane of the first telecentric imaging lens group, in the exposure of the area array cameras
Primary line scanning is completed in time, scanning direction is vertical with the dispersion direction of the dispersing prism；
The rotary shaft of the scanning galvanometer is parallel with the scanning direction of the linear scan unit；
The dispersing prism is located at the pupil location of the second telecentric imaging lens group, and the secondary color of the electromagnetic radiation is photochromic
It dissipates；
The linear reflection mirror is located at the imaging focal plane of the second telecentric imaging lens group, just stop sample reflection or
Transmitting, identical with the monochromatic wavelength of light source transmitting light；
The computer to control the light source switch, the linear scan unit scan, the scanning galvanometer swing, it is described
Area array cameras exposes and recombination, analysis image.
2. a kind of co-focusing imaging device and method for spectrum analysis according to claim 1, it is characterised in that：Institute
State linear scan unit be slit, the light transmission pin hole of movement, movement single-row light transmission pinhole array and spatial modulation element in
Any one.
3. a kind of co-focusing imaging device and method for spectrum analysis according to claim 2, it is characterised in that：
The pupil location of the third telecentric imaging lens group places the second scanning galvanometer, to select the spectral band of imaging.
4. a kind of co-focusing imaging device and method for spectrum analysis according to Claims 2 or 3, feature exist
In：There are one the shifter controlled by the computer, according to the monochromatic wavelength that the light source emits, along the dispersion rib
Mirror dispersion direction moves the linear reflection mirror to corresponding position.
5. a kind of spectral analysis device and method according to Claims 2 or 3, it is characterised in that：Comprising multiple transmittings not
The monochromatic light source of co-wavelength, the fixed linear reflection mirror of the beam shaping and position.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611106786.0A CN108152200A (en) | 2016-12-06 | 2016-12-06 | A kind of co-focusing imaging device and method for spectrum analysis |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201611106786.0A CN108152200A (en) | 2016-12-06 | 2016-12-06 | A kind of co-focusing imaging device and method for spectrum analysis |
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| CN108152200A true CN108152200A (en) | 2018-06-12 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113820690A (en) * | 2020-06-19 | 2021-12-21 | 华为技术有限公司 | A laser scanning system, laser radar and scanning method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6134002A (en) * | 1999-01-14 | 2000-10-17 | Duke University | Apparatus and method for the rapid spectral resolution of confocal images |
| US20040113059A1 (en) * | 2002-12-16 | 2004-06-17 | Olympus America Inc. | Confocal microscope |
| CN101795339A (en) * | 2010-01-25 | 2010-08-04 | 赖博 | Confocal optical scanner |
| CN202748305U (en) * | 2012-05-24 | 2013-02-20 | 赖博 | Confocal optical scanner |
| CN103776769A (en) * | 2012-10-19 | 2014-05-07 | 赖博 | Confocal optical scanner |
-
2016
- 2016-12-06 CN CN201611106786.0A patent/CN108152200A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6134002A (en) * | 1999-01-14 | 2000-10-17 | Duke University | Apparatus and method for the rapid spectral resolution of confocal images |
| US20040113059A1 (en) * | 2002-12-16 | 2004-06-17 | Olympus America Inc. | Confocal microscope |
| CN101795339A (en) * | 2010-01-25 | 2010-08-04 | 赖博 | Confocal optical scanner |
| CN202748305U (en) * | 2012-05-24 | 2013-02-20 | 赖博 | Confocal optical scanner |
| CN103776769A (en) * | 2012-10-19 | 2014-05-07 | 赖博 | Confocal optical scanner |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113820690A (en) * | 2020-06-19 | 2021-12-21 | 华为技术有限公司 | A laser scanning system, laser radar and scanning method |
| CN113820690B (en) * | 2020-06-19 | 2024-11-15 | 华为技术有限公司 | Laser scanning system, laser radar and scanning method |
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Application publication date: 20180612 |