CN108122797A - A kind of 3D detection devices - Google Patents
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- CN108122797A CN108122797A CN201611073146.4A CN201611073146A CN108122797A CN 108122797 A CN108122797 A CN 108122797A CN 201611073146 A CN201611073146 A CN 201611073146A CN 108122797 A CN108122797 A CN 108122797A
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- H—ELECTRICITY
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- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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Abstract
The present invention provides a kind of 3D detection devices, including light source module, detecting module, referrer module and the first beam splitter, the light source module exports the light of at least three wavelength using a laser, the light of the light source module output generates detection light and reference light by the first beam splitter, the detection illumination is mapped to a tested surface and is reflected, the reference light is reflected after irradiating the referrer module, reference light through reflection and the detection light shape through reflection are at a certain angle, it is incident to the detecting module and forms interference fringe, the detecting module calculates the tested surface height according to the interference fringe.A kind of 3D detection devices provided by the invention using 1 laser, are adjusted and are divided by optical parameter, realize that the light of multi-wavelength exports simultaneously, escapable cost simultaneously reduces equipment volume, facilitates maintenance maintenance.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, more particularly to a kind of 3D detection devices.
Background technology
In semiconductor fabrication, in order to increase the yield of chip manufacturing, it is required for pair in entire potting process
The defects of chip carries out defects detection, and the equipment of early stage is concentrated mainly on chip surface 2D is detected, such as pollution, cut, particle
Deng.With the increase of process control needs, have increasing need for being detected chip surface 3D features, for example, height, thickness and
Hole depth etc..
At present industry realize the mode of chip surface 3D measurement mainly include laser triangulation, laser confocal and
Interference measuring instrument.Wherein triangulation may be employed laser line and be scanned, and greatly improve detection speed, but precision phase
To relatively low；Laser confocal and interference measuring instrument can obtain higher vertical resolution, but need to carry out vertical scanning, detection
It is less efficient, it is difficult to meet the needs of comprehensive Scanning Detction.
And in said program, to improve apparent height detection range, it usually needs multiple wavelength measure, corresponding
The multiple lasers of needs, for example with three independent lasers, the light source of three wavelength could be exported, additionally need to consider
Synchronization Control problem between laser, therefore the use of multiple lasers certainly will increase equipment cost and space, tie up simultaneously
Repair maintenance get up it is also inconvenient.
The above problem has become the problem of industry urgent need to resolve therefore.
The content of the invention
It is an object of the invention to provide a kind of 3D detection devices, need multiple laser to solve existing 3D detection devices
Device could export the problem of multiple wavelength light sources.
A kind of 3D detection devices, including light source module, detecting module, referrer module and the first beam splitter, the light source die
Block exports the light of at least three wavelength using a laser, and the light of the light source module output generates spy by the first beam splitter
Light and reference light are surveyed, the detection illumination is mapped to a tested surface and is reflected, and the reference light irradiates quilt after the referrer module
Reflection, the reference light through reflection and the detection light shape through reflection are at a certain angle, are incident to the detecting module and form interference
Striped, the detecting module calculate the tested surface height according to the interference fringe.
Optionally, the light source module includes spectrum groupware, optical parametric oscillator and optocoupler seaming element, the laser
The light of generation is after the spectrum groupware, and a part is reflected to form the first light beam, and another part is transmitted to form the light
The pumping source of parametric oscillator is learned, the pumping source forms flashlight and ideler frequency light after the optical parametric oscillator, described
First light beam, flashlight and ideler frequency light are incident to first beam splitter after optocoupler seaming element coupling.
Optionally, the light source module further includes frequency-doubling crystal and with frequency crystal, and the light that the laser generates is fundamental frequency
Light, the fundamental frequency light generate frequency doubled light, the fundamental frequency light and frequency doubled light by the frequency-doubling crystal and are produced by described and frequency crystal
Raw 3 frequency doubled lights, the spectrum groupware reflect the frequency doubled light as first light beam, transmit described in the 3 frequency doubled light conduct
Pumping source.
Optionally, which is characterized in that the light source module further includes frequency-doubling crystal, and the light that the laser generates is fundamental frequency
Light, the fundamental frequency light generate frequency doubled light by the frequency-doubling crystal, and the spectrum groupware reflects a part of frequency doubled light conduct
First light beam transmits frequency doubled light described in another part as the pumping source.
Optionally, the wavelength of the fundamental frequency light is 1064nm, and the wavelength of the frequency doubled light is 532nm, 3 frequency doubled light
Wavelength is 355nm, then the wavelength of first light beam is 532nm, and the wave-length coverage of the flashlight is 413nm-709nm, institute
The wave-length coverage for stating ideler frequency light is 709nm-2500nm.
Optionally, the wave-length coverage of the flashlight is preferably 630-650nm.
Optionally, the wavelength of the fundamental frequency light is 1064nm, and the wavelength of the frequency doubled light is 532nm, then first light
The wavelength of beam is 532nm, and the wave-length coverage of the flashlight is 670nm-1064nm, and the wave-length coverage of the ideler frequency light is
1064nm-2500nm。
Optionally, the wave-length coverage of the flashlight is preferably 790-810nm.
Optionally, the flashlight determines the resolution ratio R of the 3D detection devices：
R=λ1/ 2/SNR,
Wherein, SNR represents the signal-to-noise ratio of the 3D detection devices, λ1The wavelength of the flashlight.
Optionally, the interference fringe is made of several super-pixel, and the super-pixel includes multiple pixels, each pixel
Intensity of illumination such as following formula：
Wherein, x and y represents pixel coordinate；B1, B2 are that the transmission of the light beam of each wavelength in the optical path is related to reflection to B3
Coefficient, can pass through demarcate obtain；A1, A2 and A3 are the light beam of each wavelength and the relevant coefficient of tested surface reflectivity,Represent initial phase, I represents light intensity, and θ represents the reference light reflected through the referrer module and through to be measured
Angle between the detection light of face reflection.
Optionally, the intensity of illumination of several super-pixel is calculated using fft algorithm, solution obtains phase
AndAnd solve the height Z of the tested surface：
Wherein λ1For the wavelength of the flashlight.
Optionally, the synthetic wavelength λ of the light beam of the light source module outputsDetermine the vertical spy of the 3D detection devices
Survey scope Z0：
Z0=λs/2。
Optionally, object lens are further included, for amplifying the tested surface, the object lens are located at first beam splitter and described
Between tested surface.
Optionally, the referrer module includes speculum, in certain between the surface of the reflective mirror and the tested surface
Angle.
Optionally, the spectrum groupware is dichroic element.
Optionally, the spectrum groupware is semi-permeable and semi-reflecting mirror.
A kind of 3D detection devices provided by the invention using 1 laser, are adjusted and are divided by optical parameter, realized
Multi-wavelength exports simultaneously, and escapable cost simultaneously reduces equipment volume, facilitates maintenance maintenance.
Description of the drawings
Fig. 1 is a kind of schematic diagram of 3D detection devices provided by the present invention；
Fig. 2 is super-pixel schematic diagram；
Fig. 3 is the structure chart of the embodiment of the present invention one；
Fig. 4 is variation diagram of one investigative range of the embodiment of the present invention with signal light wavelength；
Fig. 5 is the structure chart of the embodiment of the present invention two；
Fig. 6 is variation diagram of two investigative range of the embodiment of the present invention with signal light wavelength.
Figure label：1- light source modules；4- referrer modules；6- detecting modules；7- tested surfaces；11- frequency-doubling crystals；12- and
Frequency crystal；13- optical parametric oscillators；14- spectrum groupwares；The first speculums of 15-；17- optocoupler seaming element；18- conducts optical fiber；
21- illuminates microscope group；The first beam splitters of 22-；31- object lens；41- lens；The second speculums of 42-；50- pipe mirrors；61- detectors；71-
Super-pixel；72- pixels；110- fundamental frequency lights；112- frequency doubled lights；113-3 frequency doubled lights；114- flashlights；115- ideler frequency lights；300- is visited
Survey light；400- reference lights.
Specific embodiment
3D detection devices proposed by the present invention are described in further detail below in conjunction with the drawings and specific embodiments.According to
Explanation and claims, advantages and features of the invention will become apparent from below.It should be noted that attached drawing use simplifies very much
Form and using non-accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Existing 3D detection devices need multiple lasers that could export the laser of multiple wavelength, occupy substantial amounts of place and
The device space, maintenance maintenance also having any problem property add many costs, and the present inventor passes through long-term research and experiment, research and development
A kind of new 3D detection devices are gone out, have solved the problems, such as above-mentioned.
A kind of 3D detection devices provided by the invention, including light source module, detecting module, referrer module and the first beam splitting
Device, the light source module export the light of at least three wavelength using laser, and the light of the light source module output is by the
One beam splitter generates detection light and reference light, and the detection illumination is mapped to a tested surface and is reflected, and the reference light irradiates institute
It is reflected after stating referrer module, the reference light through reflection and the detection light shape through reflection are at a certain angle, are incident to the spy
It surveys module and forms interference fringe, the detecting module calculates the tested surface height according to the interference fringe.The present invention provides
A kind of 3D detection devices, using 1 laser, adjusted and be divided by optical parameter, realize that the light of multi-wavelength exports simultaneously,
Escapable cost simultaneously reduces equipment volume, facilitates maintenance maintenance
Embodiment one
Fig. 1 is a kind of schematic diagram of 3D detection devices provided by the present invention, including light source module 1, object lens 31, with reference to mould
Block 4, detecting module 6, the first beam splitter 22, pipe mirror 50 and a laser (not identified in figure), the laser generate one
The light of wavelength, the light of one wavelength of the laser generation exports the light for multiple wavelength after the light source module, described
The light of multiple wavelength generates detection light 300 and reference light 400 by the first beam splitter 22, and the detection light 300 is after object lens 31
It is irradiated to through 31 amplified tested surface 7 of object lens, the reference light 400 enters referrer module 4,400 He of reference light through reflection
It detecting light 300 and enters detecting module 6 by pipe mirror 50, the detection light 300 and reference light 400 after the reflection have an angle theta,
So as to form interference fringe, tested surface height is obtained by the Phase-Resolved Analysis to the interference fringe.
The 3D detection devices further include illumination microscope group 21, and the light of light source module output enters first by illumination microscope group 21
Beam splitter 22.
The light source module 1 by the light source output of multiple specific wavelengths, the object lens 31 will detect light 300 be transmitted to it is to be measured
Face 7, the referrer module 4 reflect reference light 400, detection light 300 and reference light after the processing of detecting module 6 reflection
400。
The light source prioritizing selection coherence, the laser of good directionality, the wavelength of output light source depend on detection height
Scope Z0With resolution ratio R, for example, when light source module output wavelength be λ1、λ2And λ3When, parsing such as minor function：
Wherein, I represents light distribution
λ1Determine resolution ratio R=λ1/ 2/SNR, (SNR represents signal-to-noise ratio), synthetic wavelength
It determines vertical investigative range Z0=λs/2。
After detection light 300 and reference light 400 reflect, interference fringe is formed in detector surface, in order to solve single-point
, it is necessary to construct multiple super-pixel on detecting module, each super-pixel is made of vertical height z the pixel of m × n, such as Fig. 2 institutes
Show, many super-pixel 71 are constructed on the detecting module, and each super-pixel is made of pixel 72, pixel in each super-pixel
Signal meets following equation
Wherein x=1,2 ..., m；Y=1,2 ..., n represent pixel coordinate；B1、B2And B3It is each wavelength in reference path
Transmission and reflection related coefficient, can pass through demarcate obtain；A1、A2And A3It is that each wavelength and tested surface reflectivity are relevant unknown
Coefficient.
For the super-pixel of a m × n, m × n matrix equation can be obtained, by FFT (phase extraction) algorithm, is solved
Go out phaseAndThe height value z of sensing point can be obtained.
Wherein z represents tested surface height, λ1Represent signal light wavelength,Represent the phase of flashlight.
Embodiment two
Embodiment 2 is further illustrated for modules in embodiment 1.Specifically, the specific knot of the light source module
Structure is as shown in figure 3, include frequency-doubling crystal 11 and frequency crystal 12, optical parametric oscillator 13, spectrum groupware 14, the first speculum
15th, optocoupler seaming element 17 and conduction optical fiber 18, the laser machine (do not identify) generation wavelength 1064nm fundamental frequency lights 110, institute in figure
It states fundamental frequency light 110 and passes through the frequency doubled light 112 that 11 generation wavelength of frequency-doubling crystal is 532nm, the fundamental frequency light 110 and frequency doubled light 112
By being used as input light with 3 frequency doubled lights 113 that 12 generation wavelength of frequency crystal is 355nm, 3 frequency doubled light 113 and frequency doubled light 112
Road.
The input light path component 14 that is split divides for pumping source and the first light beam, spectrum groupware 14 described in the present embodiment
For dichroic element, the spectrum groupware 14 is pumping source through 3 frequency doubled lights 113, and the spectrum groupware 14 reflects frequency doubled light 112
For the first light beam, the pumping source enters optical parametric oscillator 13 and generates flashlight 114 and ideler frequency light 115, the flashlight
114 and ideler frequency light 115 into optocoupler seaming element 17, first light beam after the first speculum 15 into optical coupling component 17,
The flashlight 114,115 and first light beam of ideler frequency light are incident to the first beam splitting through optocoupler seaming element 17 into after conducting optical fiber 18
Device 22, the flashlight 114,115 and first light beam of ideler frequency light are as output light path.
In the present embodiment, the wavelength of the light source of laser input is fixed 1064nm, is split by dichroic element
Pumping source and the first light beam, the pumping source wavelength are 355nm, and the first light beam wavelength 532nm, the pumping source is through optics
Parametric oscillator generates flashlight and ideler frequency light, and the pumping source wavelength is λ0, a length of λ of signal light-wave1, ideler frequency optical wavelength is λ2,
Meet following relation：k0=k1+k2, wherein ki=2 π/λi, i=0,1,2, when pumping source wavelength is 355nm, the change of flashlight
Scope is changed as 413-709nm, the transformation range of ideler frequency light is 709-2500nm, further according to the formula described in embodiment 1, can be obtained
For investigative range with signal light wavelength change curve as shown in figure 4, abscissa represents the wavelength of flashlight, ordinate represents detection model
It encloses.As shown in Figure 4, when signal light wavelength takes 638.8nm, investigative range is up to 1694um.But since investigative range takes pole
During big value, the fluctuation of signal light wavelength can generate large effect to investigative range, it is therefore desirable to which the precision of wavelength is controlled
System, and in view of actual engineer application, the zone of reasonableness of signal light wavelength is 630nm-650nm, can so be obtained
The investigative range of more than 10um.
With continued reference to Fig. 3, the referrer module includes 41 and second speculum 42 of lens, and the detecting module includes detection
Device 61, the output light path generate detection light 300 and reference light 400 through the first beam splitter 22, and the detection light 300 is through object lens 31
Be irradiated to tested surface 7, the reference light 400 by into after lens 41 by 42 reflection of reflection, then using lens 41 after
Pipe mirror 50 is reflected by the first beam splitter 22, the pipe mirror 50 and object lens 31 are engaged, and detection light 300 and reference light 400 is made to exist
Interference fringe is formed on detector 601, so as to obtain the height value for solving sensing point.
Embodiment three
Embodiment 3 is the further explanation for modules in embodiment 1.Specifically, the light source module can be with
Be such as lower structure, as shown in figure 5, comprising frequency-doubling crystal 11, optical parametric oscillator 13, spectrum groupware 14, the first speculum 15,
Optocoupler seaming element 17 and conduction optical fiber 18, the laser machine (does not identify) fundamental frequency light 110 of generation wavelength 1064nm in figure, described
Fundamental frequency light 110 is used as input light by the frequency doubled light 112 that 11 generation wavelength of a frequency-doubling crystal is 532nm, the frequency doubled light 112
Road.
The input light path component 14 that is split divides for pumping source and the first light beam, spectrum groupware 14 described in the present embodiment
For semi-transparent semi-reflecting lens, the spectrum groupware 14 penetrates a part of frequency doubled light 112, and the frequency doubled light 112 of transmission is pumping source, described point
Another part frequency multiplication light reflection and being allowed to is become 3 frequency doubled lights by optical assembly 14, and 3 frequency doubled light is the first light beam, the pumping
Source enters optical parametric oscillator 13 and generates flashlight 114 and ideler frequency light 115, and the flashlight 114 and ideler frequency light 115 enter light
Coupling assembly 17, first light beam is after the first speculum 15 into optical coupling component 17, the flashlight 114, ideler frequency light
115 and first light beam through optocoupler seaming element 17 into being incident to the first beam splitter 22 after conduction optical fiber 18, the flashlight 114,
115 and first light beam of ideler frequency light is as output light path.
In the present embodiment, the wavelength of the light source of laser input is fixed 1064nm, is split by semi-transparent semi-reflecting lens
Pumping source and the first light beam, the pumping source wavelength are 532nm, and first light beam wavelength is 355nm, and the pumping source is through light
It learns parametric oscillator and generates flashlight and ideler frequency light, the pumping source wavelength is λ0, a length of λ of signal light-wave1, ideler frequency optical wavelength is
λ2, meet following relation：k0=k1+k2, wherein ki=2 π/λi, i=0,1,2, when pumping source wavelength is 532nm, flashlight
Transformation range is 670-1064nm, and the transformation range of ideler frequency light is 1064-2500nm, further according to the formula described in embodiment 1,
Investigative range can be obtained with signal light wavelength change curve as shown in fig. 6, abscissa represents the wavelength of flashlight, ordinate represents to visit
Survey scope.It will be appreciated from fig. 6 that when signal light wavelength takes 798.1nm, investigative range is up to 1061um.But due to investigative range
When taking maximum, the fluctuation of signal light wavelength can generate large effect to investigative range, it is therefore desirable to the precision of wavelength into
Row control.And in view of actual engineer application, the zone of reasonableness of signal light wavelength is 790nm-810nm, can so be obtained
Obtain the investigative range of more than 10um.
Detecting module and referrer module in this example in the same manner as in Example 2, are not carrying out extra elaboration here.
The present invention can utilize a laser, export the light sources of multiple wavelength, realize 3D detections, that is, saved cost and
The device space has been also convenient for maintenance maintenance.
For above-described embodiment by taking the device that a laser machine generates the light source of three different wave lengths as an example, those skilled in the art are easy
Expect be the light source for generating other multiple wavelength device also within protection scope of the present invention.
Above-described embodiment is by taking the light wave of laser input 1064nm wavelength as an example, it is contemplated that the light of other wavelength
Ripple is also within the protection domain of invention
Foregoing description is only the description to present pre-ferred embodiments, not to any restriction of the scope of the invention, this hair
Any change, the modification that the those of ordinary skill in bright field does according to the disclosure above content, belong to the protection of claims
Scope.
Claims (16)
1. a kind of 3D detection devices, which is characterized in that including light source module, detecting module, referrer module and the first beam splitter, institute
The light that light source module exports at least three wavelength using a laser is stated, the light of the light source module output passes through the first beam splitting
Device generates detection light and reference light, and the detection illumination is mapped to a tested surface and is reflected, and the reference light irradiates the reference
It is reflected after module, the reference light through reflection and the detection light shape through reflection are at a certain angle, are incident to the detecting module
Interference fringe is formed, the detecting module calculates the tested surface height according to the interference fringe.
2. a kind of 3D detection devices as described in claim 1, which is characterized in that the light source module includes spectrum groupware, light
Parametric oscillator and optocoupler seaming element are learned, the light that the laser generates is after the spectrum groupware, and a part is by reflection
Into the first light beam, another part is transmitted the pumping source to form the optical parametric oscillator, and the pumping source is through the optics
Flashlight and ideler frequency light are formed after parametric oscillator, first light beam, flashlight and ideler frequency light are through the optocoupler seaming element coupling
First beam splitter is incident to after conjunction.
3. a kind of 3D detection devices as claimed in claim 2, which is characterized in that the light source module further include frequency-doubling crystal and
With frequency crystal, the light that the laser generates is fundamental frequency light, and the fundamental frequency light generates frequency doubled light by the frequency-doubling crystal, described
Fundamental frequency light and frequency doubled light generate 3 frequency doubled lights by described and frequency crystal, and the spectrum groupware is reflected described in the frequency doubled light conduct
First light beam transmits 3 frequency doubled light as the pumping source.
4. a kind of 3D detection devices as claimed in claim 2, which is characterized in that the light source module further includes frequency-doubling crystal,
The light that the laser generates is fundamental frequency light, and the fundamental frequency light generates frequency doubled light, the spectrum groupware by the frequency-doubling crystal
A part of frequency doubled light is reflected as first light beam, transmits frequency doubled light described in another part as the pumping source.
5. a kind of 3D detection devices as claimed in claim 3, which is characterized in that the wavelength of the fundamental frequency light is 1064nm, institute
The wavelength of frequency doubled light is stated as 532nm, the wavelength of 3 frequency doubled light is 355nm, then the wavelength of first light beam is 532nm, institute
The wave-length coverage of flashlight is stated as 413nm-709nm, the wave-length coverage of the ideler frequency light is 709nm-2500nm.
6. a kind of 3D detection devices as claimed in claim 5, which is characterized in that the wave-length coverage of the flashlight is preferably
630-650nm。
7. a kind of 3D detection devices as claimed in claim 4, which is characterized in that the wavelength of the fundamental frequency light is 1064nm, institute
The wavelength of frequency doubled light is stated as 532nm, then the wavelength of first light beam is 532nm, and the wave-length coverage of the flashlight is
670nm-1064nm, the wave-length coverage of the ideler frequency light is 1064nm-2500nm.
8. a kind of 3D detection devices as claimed in claim 7, which is characterized in that the wave-length coverage of the flashlight is preferably
790-810nm。
9. a kind of 3D detection devices as described in claim 5 or 7, which is characterized in that the flashlight determines the 3D detections
The resolution ratio R of device：
R=λ1/ 2/SNR,
Wherein, SNR represents the signal-to-noise ratio of the 3D detection devices, λ1The wavelength of the flashlight.
10. a kind of 3D detection devices as claimed in claim 9, which is characterized in that the interference fringe is by several super-pixel structures
Into the super-pixel includes multiple pixels, the intensity of illumination such as following formula of each pixel：
Wherein, x and y represents pixel coordinate；B1、B2And B3It is the transmission in the optical path of the light beam of each wavelength and the relevant system of reflection
Number can be obtained by demarcating；A1、A2And A3It is light beam and the relevant coefficient of tested surface reflectivity of each wavelength,Table
Show initial phase, I represents light intensity, and θ represents the reference light through referrer module reflection and the detection through tested surface reflection
Angle between light.
11. a kind of 3D detection devices as claimed in claim 10, which is characterized in that calculated using fft algorithm several described super
The intensity of illumination of pixel, solution obtain phaseAndAnd solve the tested surface height Z：
Wherein λ1For the wavelength of the flashlight.
A kind of 12. 3D detection devices as described in claim 1, which is characterized in that the conjunction of the light beam of the light source module output
Into wavelength XsDetermine the vertical investigative range Z of the 3D detection devices0：
Z0=λs/2。
13. a kind of 3D detection devices as described in claim 1, which is characterized in that object lens are further included, it is described to be measured for amplifying
Face, the object lens are between first beam splitter and the tested surface.
14. a kind of 3D detection devices as described in claim 1, which is characterized in that the referrer module includes speculum, described
It is a certain included angle between the surface of reflective mirror and the tested surface.
15. a kind of 3D detection devices as claimed in claim 3, which is characterized in that the spectrum groupware is dichroic element.
16. a kind of 3D detection devices as claimed in claim 4, which is characterized in that the spectrum groupware is semi-permeable and semi-reflecting mirror.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108961234A (en) * | 2018-06-29 | 2018-12-07 | 中国科学院光电技术研究所 | Transmission element defect detection device and method based on multi-wavelength iterative algorithm |
| CN112485272A (en) * | 2020-12-14 | 2021-03-12 | 紫创(南京)科技有限公司 | Semiconductor detection device and detection method |
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