CN108046808B - A kind of Si3N4 gradient material and preparation method thereof - Google Patents
A kind of Si3N4 gradient material and preparation method thereof Download PDFInfo
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- 239000000463 material Substances 0.000 title claims abstract description 62
- 238000002360 preparation method Methods 0.000 title claims abstract description 25
- 229910052581 Si3N4 Inorganic materials 0.000 title abstract description 22
- 239000011812 mixed powder Substances 0.000 claims abstract description 123
- 238000005245 sintering Methods 0.000 claims abstract description 123
- 239000000843 powder Substances 0.000 claims abstract description 62
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- 238000005121 nitriding Methods 0.000 claims abstract description 27
- 229910052765 Lutetium Inorganic materials 0.000 claims abstract description 8
- 229910052769 Ytterbium Inorganic materials 0.000 claims abstract description 8
- 229910052746 lanthanum Inorganic materials 0.000 claims abstract description 8
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 8
- 229910052688 Gadolinium Inorganic materials 0.000 claims abstract description 7
- 239000000203 mixture Substances 0.000 claims abstract description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 64
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 63
- 238000000034 method Methods 0.000 claims description 15
- 238000009694 cold isostatic pressing Methods 0.000 claims description 13
- 239000002245 particle Substances 0.000 claims description 8
- 238000003825 pressing Methods 0.000 claims description 6
- 238000000465 moulding Methods 0.000 claims description 5
- 238000001272 pressureless sintering Methods 0.000 claims description 5
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052684 Cerium Inorganic materials 0.000 abstract description 6
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- 229910052691 Erbium Inorganic materials 0.000 abstract description 6
- 229910052693 Europium Inorganic materials 0.000 abstract description 6
- 229910052689 Holmium Inorganic materials 0.000 abstract description 6
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- 229910052777 Praseodymium Inorganic materials 0.000 abstract description 6
- 229910052772 Samarium Inorganic materials 0.000 abstract description 6
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- 238000000748 compression moulding Methods 0.000 abstract 1
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Abstract
Description
技术领域technical field
本发明涉及Si3N4陶瓷材料技术领域,更具体地说,是涉及一种Si3N4梯度材料及其制备方法。The invention relates to the technical field of Si 3 N 4 ceramic materials, and more particularly, to a Si 3 N 4 gradient material and a preparation method thereof.
背景技术Background technique
Si3N4陶瓷材料作为一种结构材料,具有优异的力学性能,如高硬度、高强、耐磨、耐高温等优异性能,可广泛应用于轴承、高速切削刀具、装甲等方面;但在极高温以及高速切削等恶劣条件下仍然容易磨损,寿命有限,所以需要对表面进一步增强,加强其使用可靠性,对于Si3N4陶瓷材料通常可进行制备梯度材料或者运用PVD、CVD技术对其性能进行进一步改善。As a structural material, Si 3 N 4 ceramic material has excellent mechanical properties, such as high hardness, high strength, wear resistance, high temperature resistance and other excellent properties, and can be widely used in bearings, high-speed cutting tools, armor, etc.; Under harsh conditions such as high temperature and high-speed cutting, it is still easy to wear and has a limited life. Therefore, it is necessary to further strengthen the surface to enhance its reliability. For Si 3 N 4 ceramic materials, gradient materials can usually be prepared or PVD and CVD technology can be used for their performance. make further improvements.
对于PVD、CVD技术,往往存在涂层太薄防护效果不佳这一缺陷;并且, PVD、CVD技术还存在基体与涂层之间结合力不足的问题,而对不导电材料运用PVD、CVD技术时,还需要对材料表面覆盖一层导电层,再对其进行涂层处理,而基体与导电层之间又存在结合力不足的问题。因此,对于Si3N4陶瓷材料更多采用制备梯度材料对其性能进行进一步改善。For PVD and CVD technology, there is often a defect that the coating is too thin and the protective effect is not good; in addition, PVD and CVD technology also has the problem of insufficient bonding force between the substrate and the coating, while the use of PVD and CVD technology for non-conductive materials When it is necessary to cover the surface of the material with a conductive layer, and then carry out coating treatment, there is a problem of insufficient bonding force between the substrate and the conductive layer. Therefore, for Si 3 N 4 ceramic materials, more gradient materials are used to further improve their properties.
目前,Si3N4梯度材料的制备主要是通过将原料成分甚至组成相差很大的材料烧结为一体,实现表层与硬度具有不同的性能;但是由于表层与芯部材料在成分、结构上的差别,使得两者的结合力较弱,有的甚至在烧结过程中都会出现表层与芯部的脱离,这极大地弱化了Si3N4梯度材料的应用。At present, the preparation of Si 3 N 4 gradient materials is mainly by sintering the raw materials and even the materials with very different compositions into one, so that the surface layer and hardness have different properties; however, due to the difference in composition and structure between the surface layer and the core material , which makes the bonding force between the two weak, and some even have the separation of the surface layer and the core during the sintering process, which greatly weakens the application of Si 3 N 4 gradient materials.
发明内容SUMMARY OF THE INVENTION
有鉴于此,本发明的目的在于提供一种Si3N4梯度材料及其制备方法,采用本发明提供的制备方法得到的Si3N4梯度材料具有极强的结合力,且力学性能得到改善。In view of this, the purpose of the present invention is to provide a Si 3 N 4 gradient material and a preparation method thereof. The Si 3 N 4 gradient material obtained by the preparation method provided by the present invention has extremely strong binding force and improved mechanical properties .
本发明提供了一种Si3N4梯度材料的制备方法,包括以下步骤:The invention provides a preparation method of Si 3 N 4 gradient material, comprising the following steps:
a)提供混合粉体A和混合粉体B;a) Provide mixed powder A and mixed powder B;
所述混合粉体A包括Si粉、TiO2粉和烧结助剂,其中,烧结助剂由摩尔比小于等于1的Al2O3和Re2O3组成;所述混合粉体B包括Si、TiO2和烧结助剂,其中,烧结助剂由摩尔比大于1的Al2O3和Re2O3组成;The mixed powder A includes Si powder, TiO 2 powder and a sintering aid, wherein the sintering aid is composed of Al 2 O 3 and Re 2 O 3 with a molar ratio of less than or equal to 1; the mixed powder B includes Si, TiO 2 and a sintering aid, wherein the sintering aid is composed of Al 2 O 3 and Re 2 O 3 with a molar ratio greater than 1;
所述Re选自Sc、Y、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、 Ho、Er、Tm、Yb或Lu;The Re is selected from Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb or Lu;
b)将所述混合粉体A和混合粉体B交替铺设形成多层结构,经压制成型,得到坯体;b) alternately laying the mixed powder A and the mixed powder B to form a multi-layer structure, and pressing and molding to obtain a green body;
c)将步骤b)得到的坯体氮化后烧结,得到Si3N4梯度材料。c) Nitriding and sintering the green body obtained in step b) to obtain a Si 3 N 4 gradient material.
优选的,步骤a)中所述Si粉的纯度大于等于95%,粒径小于等于100μm;所述TiO2粉的纯度大于等于98%,粒径小于等于10μm。Preferably, in step a), the purity of the Si powder is greater than or equal to 95%, and the particle size is less than or equal to 100 μm; the purity of the TiO 2 powder is greater than or equal to 98%, and the particle size is less than or equal to 10 μm.
优选的,步骤a)中所述混合粉体A中Si粉和TiO2粉的质量分数比为 (60%~99%):(1%~40%),Si3N4和烧结助剂的摩尔比为(80%~95%): (5%~20%);Preferably, the mass fraction ratio of Si powder and TiO 2 powder in the mixed powder A in step a) is (60%-99%): (1%-40%), and the ratio of Si 3 N 4 to sintering aid is The molar ratio is (80%~95%): (5%~20%);
所述混合粉体B中Si粉和TiO2粉的质量分数比为(60%~99%): (1%~40%),Si3N4和烧结助剂的摩尔比为(80%~95%):(5%~20%)。The mass fraction ratio of Si powder and TiO2 powder in the mixed powder B is (60%~99%): (1%~40%), and the molar ratio of Si3N4 and sintering aid is (80%~ 40 %) 95%): (5%~20%).
优选的,步骤a)中混合粉体A中的烧结助剂由摩尔比为1:1的Al2O3和Re2O3组成;Preferably, the sintering aid in the mixed powder A in step a) is composed of Al 2 O 3 and Re 2 O 3 with a molar ratio of 1:1;
混合粉体B中的烧结助剂由摩尔比为(2~3):1的Al2O3和Re2O3组成。The sintering aid in the mixed powder B is composed of Al 2 O 3 and Re 2 O 3 in a molar ratio of (2-3):1.
优选的,步骤b)中所述多层结构为三层结构;所述三层结构按照混合粉体B-混合粉体A-混合粉体B的排列方式组成。Preferably, the multi-layer structure in step b) is a three-layer structure; the three-layer structure is composed of the arrangement of mixed powder B-mixed powder A-mixed powder B.
优选的,步骤b)中所述压制成型的方式为冷等静压成型;所述冷等静压成型的压力为100MPa~300MPa,时间为1min~10min。Preferably, the pressing method in step b) is cold isostatic pressing; the pressure of the cold isostatic pressing is 100 MPa to 300 MPa, and the time is 1 min to 10 min.
优选的,步骤c)中所述氮化的温度为1250℃~1600℃,时间为0.5h~24h。Preferably, the nitriding temperature in step c) is 1250°C to 1600°C, and the time is 0.5h to 24h.
优选的,步骤c)中所述烧结的方式为无压烧结、10MPa~50MPa的气压烧结或10MPa~50MPa的SPS烧结。Preferably, the sintering method in step c) is pressureless sintering, gas pressure sintering at 10 MPa to 50 MPa, or SPS sintering at 10 MPa to 50 MPa.
优选的,步骤c)中所述烧结的温度为1600℃~2000℃,时间为0.5h~24h。Preferably, the sintering temperature in step c) is 1600°C to 2000°C, and the time is 0.5h to 24h.
本发明还提供了一种Si3N4梯度材料,由上述技术方案所述的制备方法制备得到。The present invention also provides a Si 3 N 4 gradient material, which is prepared by the preparation method described in the above technical solution.
本发明提供了一种Si3N4梯度材料的制备方法,包括以下步骤:a)提供混合粉体A和混合粉体B;所述混合粉体A包括Si粉、TiO2粉和烧结助剂,其中,烧结助剂由摩尔比小于等于1的Al2O3和Re2O3组成;所述混合粉体B 包括Si、TiO2和烧结助剂,其中,烧结助剂由摩尔比大于1的Al2O3和Re2O3组成;所述Re选自Sc、Y、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、 Ho、Er、Tm、Yb或Lu;b)将所述混合粉体A和混合粉体B交替铺设形成多层结构,经压制成型,得到坯体;c)将步骤b)得到的坯体氮化后烧结,得到Si3N4梯度材料。与现有技术相比,本发明通过相变实现了Si3N4梯度材料的制备,具体通过控制烧结助剂中Al2O3和Re2O3配比,在氮化阶段实现β- 氮化硅/α-氮化硅的控制,得到的梯度层结合力强,从而使得到的Si3N4梯度材料具有极强的结合力,并且力学性能得到改善。The present invention provides a preparation method of Si 3 N 4 gradient material, comprising the following steps: a) providing mixed powder A and mixed powder B; the mixed powder A includes Si powder, TiO 2 powder and sintering aid , wherein the sintering aid consists of Al 2 O 3 and Re 2 O 3 with a molar ratio of less than or equal to 1; the mixed powder B includes Si, TiO 2 and a sintering aid, wherein the sintering aid consists of a molar ratio greater than 1 composed of Al 2 O 3 and Re 2 O 3 ; the Re is selected from Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb or Lu b) alternately laying the mixed powder body A and the mixed powder body B to form a multi-layer structure, and pressing and molding to obtain a green body; c) nitriding and sintering the green body obtained in step b) to obtain Si 3 N 4 Gradient material. Compared with the prior art, the present invention realizes the preparation of Si 3 N 4 gradient material through phase transformation, and specifically by controlling the ratio of Al 2 O 3 and Re 2 O 3 in the sintering aid, β-nitrogen is realized in the nitriding stage. With the control of silicon oxide/α-silicon nitride, the obtained gradient layer has strong binding force, so that the obtained Si 3 N 4 gradient material has extremely strong binding force and improved mechanical properties.
另外,本发明提供的制备方法能够根据需求对梯度层厚度进行控制;工艺简单、成本低。In addition, the preparation method provided by the present invention can control the thickness of the gradient layer according to requirements; the process is simple and the cost is low.
附图说明Description of drawings
图1为本发明实施例1中氮化后材料表面层的XRD图谱;Fig. 1 is the XRD pattern of the surface layer of the material after nitridation in Example 1 of the present invention;
图2为本发明实施例1中氮化后材料内部中间层的XRD图谱;Fig. 2 is the XRD pattern of the inner intermediate layer of the material after nitridation in Example 1 of the present invention;
图3为本发明实施例1制备得到的Si3N4梯度材料表面层的断面SEM照片;FIG. 3 is a cross-sectional SEM photo of the surface layer of the Si 3 N 4 gradient material prepared in Example 1 of the present invention;
图4为本发明实施例1制备得到的Si3N4梯度材料表面层的抛光腐蚀面SEM 照片;Fig. 4 is the SEM photograph of the polished corrosion surface of the surface layer of the Si 3 N 4 gradient material prepared in Example 1 of the present invention;
图5为本发明实施例1制备得到的Si3N4梯度材料内部中间层的断面SEM照片;5 is a cross-sectional SEM photograph of the inner intermediate layer of the Si 3 N 4 gradient material prepared in Example 1 of the present invention;
图6为本发明实施例1制备得到的Si3N4梯度材料内部中间层的抛光腐蚀面 SEM照片。FIG. 6 is a SEM photograph of the polished and corroded surface of the inner intermediate layer of the Si 3 N 4 gradient material prepared in Example 1 of the present invention.
具体实施方式Detailed ways
下面将结合本发明实施例,对本发明的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions of the present invention will be clearly and completely described below with reference to the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
本发明提供了一种Si3N4梯度材料的制备方法,包括以下步骤:The invention provides a preparation method of Si 3 N 4 gradient material, comprising the following steps:
a)提供混合粉体A和混合粉体B;a) Provide mixed powder A and mixed powder B;
所述混合粉体A包括Si粉、TiO2粉和烧结助剂,其中,烧结助剂由摩尔比小于等于1的Al2O3和Re2O3组成;所述混合粉体B包括Si、TiO2和烧结助剂,其中,烧结助剂由摩尔比大于1的Al2O3和Re2O3组成;The mixed powder A includes Si powder, TiO 2 powder and a sintering aid, wherein the sintering aid is composed of Al 2 O 3 and Re 2 O 3 with a molar ratio of less than or equal to 1; the mixed powder B includes Si, TiO 2 and a sintering aid, wherein the sintering aid is composed of Al 2 O 3 and Re 2 O 3 with a molar ratio greater than 1;
所述Re选自Sc、Y、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、 Ho、Er、Tm、Yb或Lu;The Re is selected from Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb or Lu;
b)将所述混合粉体A和混合粉体B交替铺设形成多层结构,经压制成型,得到坯体;b) alternately laying the mixed powder A and the mixed powder B to form a multi-layer structure, and pressing and molding to obtain a green body;
c)将步骤b)得到的坯体氮化后烧结,得到Si3N4梯度材料。c) Nitriding and sintering the green body obtained in step b) to obtain a Si 3 N 4 gradient material.
本发明首先提供混合粉体A和混合粉体B。在本发明中,所述混合粉体 A包括Si粉、TiO2粉和烧结助剂,其中,烧结助剂由摩尔比小于等于1的Al2O3和Re2O3组成,优选由摩尔比为1:1的Al2O3和Re2O3组成;所述混合粉体B 包括Si、TiO2和烧结助剂,其中,烧结助剂由摩尔比大于1的Al2O3和Re2O3组成,优选由摩尔比为(2~3):1的Al2O3和Re2O3组成。The present invention first provides mixed powder A and mixed powder B. In the present invention, the mixed powder A includes Si powder, TiO 2 powder and a sintering aid, wherein the sintering aid is composed of Al 2 O 3 and Re 2 O 3 with a molar ratio of less than or equal to 1, preferably a molar ratio of Al 2 O 3 and Re 2 O 3 It is composed of Al 2 O 3 and Re 2 O 3 in a ratio of 1:1; the mixed powder B includes Si, TiO 2 and a sintering aid, wherein the sintering aid consists of Al 2 O 3 and Re 2 with a molar ratio greater than 1 The composition of O 3 is preferably composed of Al 2 O 3 and Re 2 O 3 in a molar ratio of (2-3):1.
在本发明中,所述Si粉的纯度优选大于等于95%,更优选为95%~100%;所述Si粉的粒径优选小于等于100μm,更优选为<100μm。在本发明中,所述 TiO2粉的纯度优选大于等于98%,更优选为98%~100%;所述TiO2粉的粒径优选小于等于10μm,更优选为<10μm。本发明对所述Si粉和TiO2粉的来源没有特殊限制,采用本领域技术人员熟知的市售商品即可。In the present invention, the purity of the Si powder is preferably greater than or equal to 95%, more preferably 95% to 100%; the particle size of the Si powder is preferably less than or equal to 100 μm, more preferably <100 μm. In the present invention, the purity of the TiO 2 powder is preferably greater than or equal to 98%, more preferably 98%-100%; the particle size of the TiO 2 powder is preferably less than or equal to 10 μm, more preferably <10 μm. In the present invention, there is no special restriction on the sources of the Si powder and TiO 2 powder, and commercially available products well known to those skilled in the art can be used.
在本发明中,所述混合粉体A中Si粉和TiO2粉的质量分数比优选为 (60%~99%):(1%~40%),更优选为(85%~95%):(5%~15%)。在本发明中,所述混合粉体B中Si粉和TiO2粉的质量分数比优选为(60%~99%): (1%~40%),更优选为(85%~95%):(5%~15%)。在本发明优选的实施例中,所述混合粉体A和所述混合粉体B中Si粉和TiO2粉的质量分数比相同。In the present invention, the mass fraction ratio of Si powder and TiO 2 powder in the mixed powder A is preferably (60%-99%): (1%-40%), more preferably (85%-95%) : (5% to 15%). In the present invention, the mass fraction ratio of Si powder and TiO 2 powder in the mixed powder B is preferably (60%-99%): (1%-40%), more preferably (85%-95%) : (5% to 15%). In a preferred embodiment of the present invention, the mass fraction ratio of Si powder and TiO 2 powder in the mixed powder A and the mixed powder B is the same.
在本发明中,所述烧结助剂由Al2O3和Re2O3组成;其中,所述Re选自 Sc、Y、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb 或Lu,优选为Y、La、Yb或Lu。本发明对所述烧结助剂的来源没有特殊限制,采用本领域技术人员熟知的市售Re2O3粉与Al2O3粉混合而成。在本发明中,所述Re2O3粉的纯度优选大于等于99.9%;所述Al2O3粉的纯度优选大于等于95%,更优选为95%~100%。In the present invention, the sintering aid is composed of Al 2 O 3 and Re 2 O 3 ; wherein, the Re is selected from Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb , Dy, Ho, Er, Tm, Yb or Lu, preferably Y, La, Yb or Lu. In the present invention, there is no special limitation on the source of the sintering aid, which is obtained by mixing commercially available Re 2 O 3 powder and Al 2 O 3 powder well known to those skilled in the art. In the present invention, the purity of the Re 2 O 3 powder is preferably greater than or equal to 99.9%; the purity of the Al 2 O 3 powder is preferably greater than or equal to 95%, more preferably 95% to 100%.
在本发明中,所述混合粉体A中Si3N4和烧结助剂的摩尔比优选为 (80%~95%):(5%~20%),更优选为(90%~93%):(7%~10%)。在本发明中,所述混合粉体B中Si3N4和烧结助剂的摩尔比优选为(80%~95%): (5%~20%),更优选为(90%~93%):(7%~10%)。在本发明优选的实施例中,所述混合粉体A和所述混合粉体B中Si3N4和烧结助剂的摩尔比相同。在本发明中,Si3N4按照Si粉完全氮化进行计算。In the present invention, the molar ratio of Si 3 N 4 and sintering aid in the mixed powder A is preferably (80%-95%): (5%-20%), more preferably (90%-93%) ): (7%~10%). In the present invention, the molar ratio of Si 3 N 4 and sintering aid in the mixed powder B is preferably (80%-95%): (5%-20%), more preferably (90%-93%) ): (7%~10%). In a preferred embodiment of the present invention, the molar ratio of Si 3 N 4 and sintering aid in the mixed powder A and the mixed powder B is the same. In the present invention, Si 3 N 4 is calculated based on the complete nitridation of Si powder.
在本发明中,所述混合粉体A和所述混合粉体B均属于 Si-TiO2-Al2O3-Re2O3混合粉体。在本发明中,所述Si-TiO2-Al2O3-Re2O3混合粉体的制备过程优选具体为:In the present invention, both the mixed powder A and the mixed powder B belong to the Si-TiO 2 -Al 2 O 3 -Re 2 O 3 mixed powder. In the present invention, the preparation process of the Si-TiO 2 -Al 2 O 3 -Re 2 O 3 mixed powder is preferably as follows:
将Si粉、TiO2粉和烧结助剂进行配料,以乙醇为溶剂,以Si3N4球为球磨介质,在行星式球磨机上混合6h~10h,干燥后得到Si-TiO2-Al2O3-Re2O3混合粉体。根据烧结助剂中Al2O3和Re2O3的摩尔比不同,分别得到混合粉体A 和混合粉体B;其中,所述混合粉体A中,烧结助剂由摩尔比小于等于1的 Al2O3和Re2O3组成,优选由摩尔比为1:1的Al2O3和Re2O3组成;所述混合粉体B中,烧结助剂由摩尔比大于1的Al2O3和Re2O3组成,优选由摩尔比为 (2~3):1的Al2O3和Re2O3组成。The Si powder, TiO 2 powder and sintering aid are mixed with ethanol as the solvent and Si 3 N 4 balls as the ball milling medium, mixed on a planetary ball mill for 6h to 10h, and dried to obtain Si-TiO 2 -Al 2 O 3 -Re 2 O 3 mixed powder. According to the different molar ratios of Al 2 O 3 and Re 2 O 3 in the sintering aid, mixed powder A and mixed powder B are obtained respectively; wherein, in the mixed powder A, the molar ratio of the sintering aid is less than or equal to 1 It is composed of Al 2 O 3 and Re 2 O 3 , preferably composed of Al 2 O 3 and Re 2 O 3 with a molar ratio of 1:1; in the mixed powder B, the sintering aid is composed of Al with a molar ratio greater than 1 It is composed of 2 O 3 and Re 2 O 3 , preferably Al 2 O 3 and Re 2 O 3 in a molar ratio of (2-3):1.
得到所述混合粉体A和所述混合粉体B后,本发明将所述混合粉体A和混合粉体B交替铺设形成多层结构,经压制成型,得到坯体。在本发明中,所述交替铺设的方式优选采用本领域技术人员熟知的依次在成型模具中铺设混合粉体A-混合粉体B-混合粉体A,以此类推;或依次在成型模具中铺设混合粉体B-混合粉体A-混合粉体B,以此类推。After the mixed powder A and the mixed powder B are obtained, the present invention lays the mixed powder A and the mixed powder B alternately to form a multi-layer structure, and then press-molded to obtain a green body. In the present invention, the alternate laying method preferably adopts the method known to those skilled in the art to sequentially lay mixed powder A-mixed powder B-mixed powder A in the forming mold, and so on; or sequentially laying mixed powder A in the forming mold Lay mixed powder B-mixed powder A-mixed powder B, and so on.
在本发明中,所述多层结构优选为三层结构;所述三层结构优选按照混合粉体B-混合粉体A-混合粉体B的排列方式组成。In the present invention, the multi-layer structure is preferably a three-layer structure; the three-layer structure is preferably composed of an arrangement of mixed powder B-mixed powder A-mixed powder B.
在本发明中,所述压制成型的方式优选为冷等静压成型;所述冷等静压成型的压力优选为100MPa~300MPa,更优选为200MPa;所述冷等静压成型的时间优选为1min~10min,更优选为5min。In the present invention, the press forming method is preferably cold isostatic pressing; the pressure of the cold isostatic pressing is preferably 100MPa-300MPa, more preferably 200MPa; the time of the cold isostatic pressing is preferably 1 min to 10 min, more preferably 5 min.
得到所述坯体后,本发明将得到的坯体氮化后烧结,得到Si3N4梯度材料。本发明对所述氮化的方法没有特殊限制,采用本领域技术人员熟知的在氮气中进行反应的技术方案即可。在本发明中,所述氮化的温度优选为1250℃~1600℃,更优选为1300℃~1450℃;所述氮化的时间优选为0.5h~24h,更优选为2h~4h。本发明通过控制Al2O3-Re2O3中Al2O3和Re2O3配比,在氮化阶段实现β-氮化硅/α-氮化硅的控制,当氮化后全为β-氮化硅时,烧结得到等轴状氮化硅;当氮化后为两相共存的α-氮化硅和β-氮化硅时,烧结得到长柱状氮化硅。After the green body is obtained, in the present invention, the obtained green body is nitrided and then sintered to obtain a Si 3 N 4 gradient material. The present invention does not have a special limitation on the nitriding method, and the technical solution of carrying out the reaction in nitrogen gas well known to those skilled in the art can be adopted. In the present invention, the nitriding temperature is preferably 1250°C-1600°C, more preferably 1300°C-1450°C; the nitriding time is preferably 0.5h-24h, more preferably 2h-4h. The invention realizes the control of β-silicon nitride/α-silicon nitride in the nitriding stage by controlling the ratio of Al 2 O 3 and Re 2 O 3 in Al 2 O 3 -Re 2 O 3 , When it is β-silicon nitride, equiaxed silicon nitride is obtained by sintering; when α-silicon nitride and β-silicon nitride coexist in two phases after nitridation, sintering obtains long columnar silicon nitride.
在本发明中,所述烧结的方式优选为无压烧结、10MPa~50MPa的气压烧结或10MPa~50MPa的SPS烧结,更优选为无压烧结、10MPa的气压烧结、 30MPa的气压烧结、50MPa的气压烧结或50MPa的SPS烧结。本发明优选在氮气气氛下进行烧结,所述氮气的压强优选为0.5atm~1.5atm,更优选为1atm。In the present invention, the sintering method is preferably pressureless sintering, pressure sintering at 10 MPa to 50 MPa, or SPS sintering at 10 MPa to 50 MPa, more preferably pressureless sintering, pressure sintering at 10 MPa, pressure sintering at 30 MPa, and pressure at 50 MPa Sintering or 50MPa SPS sintering. In the present invention, the sintering is preferably carried out in a nitrogen atmosphere, and the pressure of the nitrogen is preferably 0.5 atm to 1.5 atm, more preferably 1 atm.
在本发明中,所述烧结的温度优选为1600℃~2000℃,更优选为1600℃~1900℃;所述烧结的时间优选为0.5h~24h,更优选为2h~4h。In the present invention, the sintering temperature is preferably 1600°C-2000°C, more preferably 1600°C-1900°C; the sintering time is preferably 0.5h-24h, more preferably 2h-4h.
本发明还提供了一种Si3N4梯度材料,由上述技术方案所述的制备方法制备得到。本发明提供的Si3N4梯度材料中的梯度层结合力强,并且能够根据需求对梯度层厚度进行控制。同时,所述Si3N4梯度材料力学性能得到改善,其相对密度大于98%,硬度为19GPa~25GPa,断裂韧性为 12MPa·m1/2~14MPa·m1/2,抗弯强度为1200MPa~1400MPa。The present invention also provides a Si 3 N 4 gradient material, which is prepared by the preparation method described in the above technical solution. The gradient layer in the Si 3 N 4 gradient material provided by the present invention has strong binding force, and the thickness of the gradient layer can be controlled according to requirements. At the same time, the mechanical properties of the Si 3 N 4 gradient material are improved, the relative density is greater than 98%, the hardness is 19GPa-25GPa, the fracture toughness is 12MPa·m 1/2 ~14MPa·m 1/2 , and the flexural strength is 1200MPa ~1400MPa.
本发明提供了一种Si3N4梯度材料的制备方法,包括以下步骤:a)提供混合粉体A和混合粉体B;所述混合粉体A包括Si粉、TiO2粉和烧结助剂,其中,烧结助剂由摩尔比小于等于1的Al2O3和Re2O3组成;所述混合粉体B 包括Si、TiO2和烧结助剂,其中,烧结助剂由摩尔比大于1的Al2O3和Re2O3组成;所述Re选自Sc、Y、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、 Ho、Er、Tm、Yb或Lu;b)将所述混合粉体A和混合粉体B交替铺设形成多层结构,经压制成型,得到坯体;c)将步骤b)得到的坯体氮化后烧结,得到Si3N4梯度材料。与现有技术相比,本发明通过相变实现了Si3N4梯度材料的制备,具体通过控制烧结助剂中Al2O3和Re2O3配比,在氮化阶段实现β- 氮化硅/α-氮化硅的控制,得到的梯度层结合力强,从而使得到的Si3N4梯度材料具有极强的结合力,并且力学性能得到改善。The present invention provides a preparation method of Si 3 N 4 gradient material, comprising the following steps: a) providing mixed powder A and mixed powder B; the mixed powder A includes Si powder, TiO 2 powder and sintering aid , wherein the sintering aid consists of Al 2 O 3 and Re 2 O 3 with a molar ratio of less than or equal to 1; the mixed powder B includes Si, TiO 2 and a sintering aid, wherein the sintering aid consists of a molar ratio greater than 1 composed of Al 2 O 3 and Re 2 O 3 ; the Re is selected from Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb or Lu b) alternately laying the mixed powder body A and the mixed powder body B to form a multi-layer structure, and pressing and molding to obtain a green body; c) nitriding and sintering the green body obtained in step b) to obtain Si 3 N 4 Gradient material. Compared with the prior art, the present invention realizes the preparation of Si 3 N 4 gradient material through phase transformation, and specifically by controlling the ratio of Al 2 O 3 and Re 2 O 3 in the sintering aid, β-nitrogen is realized in the nitriding stage. With the control of silicon oxide/α-silicon nitride, the obtained gradient layer has strong binding force, so that the obtained Si 3 N 4 gradient material has extremely strong binding force and improved mechanical properties.
另外,本发明提供的制备方法能够根据需求对梯度层厚度进行控制;工艺简单、成本低。In addition, the preparation method provided by the present invention can control the thickness of the gradient layer according to requirements; the process is simple and the cost is low.
为了进一步说明本发明,下面通过以下实施例进行详细说明。本发明以下实施例所用的Y2O3粉、Yb2O3粉、Gd2O3粉、La2O3粉和Lu2O3粉均由北京泛德辰科技有限公司提供,所用的其他原料均为市售商品;其中,Y2O3粉、 Yb2O3粉、Gd2O3粉、La2O3粉和Lu2O3粉的纯度均为99.9%,Al2O3粉的纯度为95%~100%,Si粉的纯度为95%~100%,粒径为<100μm,TiO2粉的纯度为 98%~100%,粒径为<10μm。In order to further illustrate the present invention, the following examples are used for detailed description. The Y 2 O 3 powder, Yb 2 O 3 powder, Gd 2 O 3 powder, La 2 O 3 powder and Lu 2 O 3 powder used in the following examples of the present invention are all provided by Beijing Fandechen Technology Co., Ltd. The raw materials are all commercially available products; among them, the purity of Y 2 O 3 powder, Yb 2 O 3 powder, Gd 2 O 3 powder, La 2 O 3 powder and Lu 2 O 3 powder are all 99.9%, Al 2 O 3 powder The purity of TiO2 powder is 95%~100%, the purity of Si powder is 95%~100%, the particle size is <100μm, the purity of TiO2 powder is 98%~100%, and the particle size is <10μm.
实施例1Example 1
(1)混合粉体A配方:Si:TiO2的质量分数比为95%:5%,控制Si3N4:烧结助剂的摩尔比为93%:7%配料,其中,Si3N4按照Si粉完全氮化进行计算;烧结助剂由摩尔比为1:1的Al2O3和Y2O3组成;(1) The formula of mixed powder A: the mass fraction ratio of Si:TiO 2 is 95%:5%, and the molar ratio of Si 3 N 4 : sintering aid is controlled to be 93%: 7% of the ingredients, wherein Si 3 N 4 Calculated according to the complete nitridation of Si powder; the sintering aid is composed of Al 2 O 3 and Y 2 O 3 with a molar ratio of 1:1;
混合粉体B配方:Si:TiO2的质量分数比为95%:5%,控制Si3N4:烧结助剂的摩尔比为93%:7%配料,其中,Si3N4按照Si粉完全氮化进行计算;烧结助剂由摩尔比为2.5:1的Al2O3和Y2O3组成;Mixed powder B formula: the mass fraction ratio of Si:TiO 2 is 95%: 5%, and the molar ratio of Si 3 N 4 : sintering aid is controlled to be 93%: 7 % . Complete nitriding is calculated; the sintering aid consists of Al 2 O 3 and Y 2 O 3 in a molar ratio of 2.5:1;
以Si粉和TiO2粉为原料,以Al2O3粉和Y2O3粉为烧结助剂,分别按照上述配方将Si粉、TiO2粉和烧结助剂进行配料,以乙醇为溶剂,以Si3N4球为球磨介质,在行星式球磨机上混合8h,干燥后得到Si-TiO2-Al2O3-Y2O3混合粉体。Using Si powder and TiO 2 powder as raw materials, using Al 2 O 3 powder and Y 2 O 3 powder as sintering aids, respectively according to the above formula, the Si powder, TiO 2 powder and sintering aid are prepared, and ethanol is used as a solvent, Si 3 N 4 balls were used as the ball milling medium, mixed on a planetary ball mill for 8 hours, and dried to obtain a Si-TiO 2 -Al 2 O 3 -Y 2 O 3 mixed powder.
(2)将步骤(1)得到Si-TiO2-Al2O3-Y2O3混合粉体按照混合粉体B-混合粉体A-混合粉体B的排列方式组成三层结构,经200MPa保持300s冷等静压,得到坯体。(2) The Si-TiO 2 -Al 2 O 3 -Y 2 O 3 mixed powder obtained in step (1) is formed into a three-layer structure according to the arrangement of mixed powder B-mixed powder A-mixed powder B. Cold isostatic pressing at 200MPa for 300s to obtain a green body.
(3)将步骤(2)得到的坯体在1400℃下氮化2h,再进行无压烧结,烧结气氛为1atm氮气,在1800℃下保温2h,得到Si3N4梯度材料。(3) Nitriding the green body obtained in step (2) at 1400° C. for 2 hours, and then performing pressureless sintering, the sintering atmosphere is 1 atm nitrogen, and maintaining the temperature at 1800° C. for 2 hours to obtain a Si 3 N 4 gradient material.
对本发明实施例1制备得到的Si3N4梯度材料进行XRD分析,结果参见图 1~2所示;其中,图1为本发明实施例1中氮化后材料表面层的XRD图谱,图2 为本发明实施例1中氮化后材料内部中间层的XRD图谱。由图1~2可知,Al2O3: Y2O3的摩尔比大于1时,得到单相β-氮化硅,Al2O3:Y2O3的摩尔比不大于1时,得到两相共存的α-氮化硅和β-氮化硅。XRD analysis was performed on the Si 3 N 4 gradient material prepared in Example 1 of the present invention, and the results are shown in FIGS. 1 to 2 ; wherein, FIG. 1 is the XRD pattern of the surface layer of the material after nitridation in Example 1 of the present invention, and FIG. 2 This is the XRD pattern of the inner intermediate layer of the material after nitridation in Example 1 of the present invention. It can be seen from Figures 1 to 2 that when the molar ratio of Al 2 O 3 : Y 2 O 3 is greater than 1, single-phase β-silicon nitride is obtained, and when the molar ratio of Al 2 O 3 : Y 2 O 3 is not greater than 1, the Two-phase coexistence of α-silicon nitride and β-silicon nitride.
对本发明实施例1制备得到的Si3N4梯度材料进行扫描电镜分析,结果参见图3~6所示;其中,图3为本发明实施例1制备得到的Si3N4梯度材料表面层的断面SEM照片,图4为本发明实施例1制备得到的Si3N4梯度材料表面层的抛光腐蚀面SEM照片,图5为本发明实施例1制备得到的Si3N4梯度材料内部中间层的断面SEM照片,图6为本发明实施例1制备得到的Si3N4梯度材料内部中间层的抛光腐蚀面SEM照片。由图3~4可知,由于实施例1制备得到的Si3N4梯度材料表面层只有单相β-氮化硅存在,因此烧结后形貌全部呈等轴状晶;由图5~6可知,由于实施例1制备得到的Si3N4梯度材料内部中间层为两相共存的α-氮化硅和β-氮化硅,因此烧结后得到具有自增韧的长柱状晶。Scanning electron microscope analysis was performed on the Si 3 N 4 gradient material prepared in Example 1 of the present invention, and the results are shown in FIGS. 3 to 6 ; wherein, FIG. 3 is the surface layer of the Si 3 N 4 gradient material prepared in Example 1 of the present invention. SEM photo of the cross section, FIG. 4 is the SEM photo of the polished corrosion surface of the surface layer of the Si 3 N 4 gradient material prepared in Example 1 of the present invention, and FIG. 5 is the inner intermediate layer of the Si 3 N 4 gradient material prepared in Example 1 of the present invention Figure 6 is the SEM photo of the polished and corroded surface of the inner intermediate layer of the Si 3 N 4 gradient material prepared in Example 1 of the present invention. It can be seen from Figures 3-4 that since the surface layer of the Si 3 N 4 gradient material prepared in Example 1 only has single-phase β-silicon nitride, the morphology after sintering is all equiaxed crystals; it can be seen from Figures 5-6 , because the inner intermediate layer of the Si 3 N 4 gradient material prepared in Example 1 is α-silicon nitride and β-silicon nitride with two phases coexisting, so long columnar crystals with self-toughening are obtained after sintering.
上述表征过程中,断面的获取方法是:采用万能试验机对抗弯样品进行强度测试,万能试验机将样品压断后,对样品表层断面进行SEM分析;抛光腐蚀的具体过程为:将样品从中间切开后,对中间层面进行抛光处理后,采用等离子刻蚀设备,采用28W的功率腐蚀80s,腐蚀后对样品表面进行SEM分析。In the above characterization process, the method of obtaining the cross section is: use a universal testing machine to test the strength of the bending sample, and after the universal testing machine breaks the sample, carry out SEM analysis on the surface section of the sample; the specific process of polishing corrosion is: the sample is removed from the middle. After incision, after polishing the middle layer, plasma etching equipment was used, and the power of 28W was used to corrode for 80s. After corrosion, the surface of the sample was analyzed by SEM.
经检测,本发明实施例1制备得到的Si3N4梯度材料的相对密度为99%,硬度为19GPa,断裂韧性为12MPa·m1/2,抗弯强度为1200MPa。After testing, the relative density of the Si 3 N 4 gradient material prepared in Example 1 of the present invention is 99%, the hardness is 19 GPa, the fracture toughness is 12 MPa·m 1/2 , and the flexural strength is 1200 MPa.
实施例2Example 2
(1)混合粉体A配方:Si:TiO2的质量分数比为90%:10%,控制Si3N4:烧结助剂的摩尔比为90%:10%配料,其中,Si3N4按照Si粉完全氮化进行计算;烧结助剂由摩尔比为1:1的Al2O3和Yb2O3组成;(1) The formula of mixed powder A: the mass fraction ratio of Si:TiO 2 is 90%: 10%, and the molar ratio of Si 3 N 4 : sintering aid is controlled to be 90%: 10% ingredients, wherein, Si 3 N 4 Calculated according to the complete nitridation of Si powder; the sintering aid is composed of Al 2 O 3 and Yb 2 O 3 with a molar ratio of 1:1;
混合粉体B配方:Si:TiO2的质量分数比为90%:10%,控制Si3N4:烧结助剂的摩尔比为90%:10%配料,其中,Si3N4按照Si粉完全氮化进行计算;烧结助剂由摩尔比为3:1的Al2O3和Yb2O3组成;Mixed powder B formula: the mass fraction ratio of Si:TiO 2 is 90%: 10%, and the molar ratio of Si 3 N 4 : sintering aid is controlled to be 90%: 10 % . Complete nitriding is calculated; the sintering aid consists of Al 2 O 3 and Yb 2 O 3 in a molar ratio of 3:1;
以Si粉和TiO2粉为原料,以Al2O3粉和Yb2O3粉为烧结助剂,分别按照上述配方将Si粉、TiO2粉和烧结助剂进行配料,以乙醇为溶剂,以Si3N4球为球磨介质,在行星式球磨机上混合8h,干燥后得到Si-TiO2-Al2O3-Yb2O3混合粉体。Using Si powder and TiO 2 powder as raw materials, using Al 2 O 3 powder and Yb 2 O 3 powder as sintering aids, respectively according to the above formula, the Si powder, TiO 2 powder and sintering aid are prepared, and ethanol is used as a solvent, Si 3 N 4 balls were used as ball milling media, mixed on a planetary ball mill for 8 hours, and dried to obtain Si-TiO 2 -Al 2 O 3 -Yb 2 O 3 mixed powder.
(2)将步骤(1)得到Si-TiO2-Al2O3-Yb2O3混合粉体按照混合粉体B-混合粉体A-混合粉体B的排列方式组成三层结构,经200MPa保持300s冷等静压,得到坯体。(2) The Si-TiO 2 -Al 2 O 3 -Yb 2 O 3 mixed powder obtained in step (1) is formed into a three-layer structure according to the arrangement of mixed powder B-mixed powder A-mixed powder B. Cold isostatic pressing at 200MPa for 300s to obtain a green body.
(3)将步骤(2)得到的坯体在1375℃下氮化4h,再进行10MPa的气压烧结,烧结气氛为1atm氮气,在1900℃下保温4h,得到Si3N4梯度材料。(3) Nitriding the green body obtained in step (2) at 1375°C for 4h, and then performing gas pressure sintering at 10MPa, the sintering atmosphere is 1 atm nitrogen, and maintaining the temperature at 1900°C for 4h to obtain a Si 3 N 4 gradient material.
经检测,本发明实施例2制备得到的Si3N4梯度材料的相对密度为99%,硬度为23GPa,断裂韧性为14MPa·m1/2,抗弯强度为1400MPa。After testing, the relative density of the Si 3 N 4 gradient material prepared in Example 2 of the present invention is 99%, the hardness is 23GPa, the fracture toughness is 14MPa·m 1/2 , and the flexural strength is 1400MPa.
实施例3Example 3
(1)混合粉体A配方:Si:TiO2的质量分数比为85%:15%,控制Si3N4:烧结助剂的摩尔比为90%:10%配料,其中,Si3N4按照Si粉完全氮化进行计算;烧结助剂由摩尔比为1:1的Al2O3和Yb2O3组成;(1) The formula of mixed powder A: the mass fraction ratio of Si:TiO 2 is 85%: 15%, and the molar ratio of Si 3 N 4 : sintering aid is controlled to be 90%: 10% of ingredients, in which, Si 3 N 4 Calculated according to the complete nitridation of Si powder; the sintering aid is composed of Al 2 O 3 and Yb 2 O 3 with a molar ratio of 1:1;
混合粉体B配方:Si:TiO2的质量分数比为85%:15%,控制Si3N4:烧结助剂的摩尔比为90%:10%配料,其中,Si3N4按照Si粉完全氮化进行计算;烧结助剂由摩尔比为3:1的Al2O3和Yb2O3组成;Mixed powder B formula: the mass fraction ratio of Si:TiO 2 is 85%: 15%, and the molar ratio of Si 3 N 4 : sintering aid is controlled to be 90%: 10 % . Complete nitriding is calculated; the sintering aid consists of Al 2 O 3 and Yb 2 O 3 in a molar ratio of 3:1;
以Si粉和TiO2粉为原料,以Al2O3粉Yb2O3粉为烧结助剂,分别按照上述配方将Si粉、TiO2粉和烧结助剂进行配料,以乙醇为溶剂,以Si3N4球为球磨介质,在行星式球磨机上混合8h,干燥后得到Si-TiO2-Al2O3-Yb2O3混合粉体。Using Si powder and TiO 2 powder as raw materials, and Al 2 O 3 powder Yb 2 O 3 powder as sintering aid, the Si powder, TiO 2 powder and sintering aid were separately prepared according to the above formula, and ethanol was used as a solvent. Si 3 N 4 balls are ball milling media, mixed on a planetary ball mill for 8 hours, and dried to obtain Si-TiO 2 -Al 2 O 3 -Yb 2 O 3 mixed powder.
(2)将步骤(1)得到Si-TiO2-Al2O3-Yb2O3混合粉体按照混合粉体B-混合粉体A-混合粉体B的排列方式组成三层结构,经200MPa保持300s冷等静压,得到坯体。(2) The Si-TiO 2 -Al 2 O 3 -Yb 2 O 3 mixed powder obtained in step (1) is formed into a three-layer structure according to the arrangement of mixed powder B-mixed powder A-mixed powder B. Cold isostatic pressing at 200MPa for 300s to obtain a green body.
(3)将步骤(2)得到的坯体在1375℃下氮化4h,再进行50MPa的SPS烧结,烧结气氛为1atm氮气,在1700℃下保温4h,得到Si3N4梯度材料。(3) Nitriding the green body obtained in step (2) at 1375°C for 4h, and then sintering at 50MPa with SPS, the sintering atmosphere is 1 atm nitrogen, and keeping at 1700°C for 4h to obtain a Si 3 N 4 gradient material.
经检测,本发明实施例3制备得到的Si3N4梯度材料的相对密度为99%,硬度为25GPa,断裂韧性为14MPa·m1/2,抗弯强度为1400MPa。After testing, the relative density of the Si 3 N 4 gradient material prepared in Example 3 of the present invention is 99%, the hardness is 25GPa, the fracture toughness is 14MPa·m 1/2 , and the flexural strength is 1400MPa.
实施例4Example 4
(1)混合粉体A配方:Si:TiO2的质量分数比为90%:10%,控制Si3N4:烧结助剂的摩尔比为90%:10%配料,其中,Si3N4按照Si粉完全氮化进行计算;烧结助剂由摩尔比为1:1的Al2O3和Gd2O3组成;(1) The formula of mixed powder A: the mass fraction ratio of Si:TiO 2 is 90%: 10%, and the molar ratio of Si 3 N 4 : sintering aid is controlled to be 90%: 10% ingredients, wherein, Si 3 N 4 Calculated according to the complete nitridation of Si powder; the sintering aid is composed of Al 2 O 3 and Gd 2 O 3 with a molar ratio of 1:1;
混合粉体B配方:Si:TiO2的质量分数比为90%:10%,控制Si3N4:烧结助剂的摩尔比为90%:10%配料,其中,Si3N4按照Si粉完全氮化进行计算;烧结助剂由摩尔比为3:1的Al2O3和Gd2O3组成;Mixed powder B formula: the mass fraction ratio of Si:TiO 2 is 90%: 10%, and the molar ratio of Si 3 N 4 : sintering aid is controlled to be 90%: 10 % . Complete nitriding is calculated; the sintering aid consists of Al 2 O 3 and Gd 2 O 3 in a molar ratio of 3:1;
以Si粉和TiO2粉为原料,以Al2O3粉和Gd2O3粉为烧结助剂,分别按照上述配方将Si粉、TiO2粉和烧结助剂进行配料,以乙醇为溶剂,以Si3N4球为球磨介质,在行星式球磨机上混合8h,干燥后得到Si-TiO2-Al2O3-Gd2O3混合粉体。Using Si powder and TiO 2 powder as raw materials, using Al 2 O 3 powder and Gd 2 O 3 powder as sintering aids, respectively according to the above formula, the Si powder, TiO 2 powder and sintering aid are compounded, and ethanol is used as a solvent, Si 3 N 4 balls were used as ball milling media, mixed on a planetary ball mill for 8 hours, and dried to obtain Si-TiO 2 -Al 2 O 3 -Gd 2 O 3 mixed powder.
(2)将步骤(1)得到Si-TiO2-Al2O3-Gd2O3混合粉体按照混合粉体B-混合粉体A-混合粉体B的排列方式组成三层结构,经200MPa保持300s冷等静压,得到坯体。(2) The Si-TiO 2 -Al 2 O 3 -Gd 2 O 3 mixed powder obtained in step (1) is formed into a three-layer structure according to the arrangement of mixed powder B-mixed powder A-mixed powder B. Cold isostatic pressing at 200MPa for 300s to obtain a green body.
(3)将步骤(2)得到的坯体在1450℃下氮化2h,再进行30MPa的气压烧结,烧结气氛为1atm氮气,在1800℃下保温4h,得到Si3N4梯度材料。(3) Nitriding the green body obtained in step (2) at 1450°C for 2h, then performing gas pressure sintering at 30MPa, the sintering atmosphere is 1 atm nitrogen, and maintaining the temperature at 1800°C for 4h to obtain a Si 3 N 4 gradient material.
经检测,本发明实施例4制备得到的Si3N4梯度材料的相对密度为99%,硬度为22GPa,断裂韧性为13MPa·m1/2,抗弯强度为1300MPa。After testing, the relative density of the Si 3 N 4 gradient material prepared in Example 4 of the present invention is 99%, the hardness is 22GPa, the fracture toughness is 13MPa·m 1/2 , and the flexural strength is 1300MPa.
实施例5Example 5
(1)混合粉体A配方:Si:TiO2的质量分数比为92%:8%,控制Si3N4:烧结助剂的摩尔比为90%:10%配料,其中,Si3N4按照Si粉完全氮化进行计算;烧结助剂由摩尔比为1:1的Al2O3和La2O3组成;(1) The formula of mixed powder A: the mass fraction ratio of Si:TiO 2 is 92%:8%, and the molar ratio of Si 3 N 4 : sintering aid is controlled to be 90%: 10% ingredients, wherein, Si 3 N 4 Calculated according to the complete nitridation of Si powder; the sintering aid is composed of Al 2 O 3 and La 2 O 3 with a molar ratio of 1:1;
混合粉体B配方:Si:TiO2的质量分数比为92%:8%,控制Si3N4:烧结助剂的摩尔比为90%:10%配料,其中,Si3N4按照Si粉完全氮化进行计算;烧结助剂由摩尔比为2.5:1的Al2O3和La2O3组成;Mixed powder B formula: the mass fraction ratio of Si:TiO 2 is 92%: 8%, and the molar ratio of Si 3 N 4 : sintering aid is controlled to be 90%: 10 % . Complete nitriding is calculated; the sintering aid consists of Al 2 O 3 and La 2 O 3 in a molar ratio of 2.5:1;
以Si粉和TiO2粉为原料,以Al2O3粉和La2O3粉为烧结助剂,分别按照上述配方将Si粉、TiO2粉和烧结助剂进行配料,以乙醇为溶剂,以Si3N4球为球磨介质,在行星式球磨机上混合8h,干燥后得到Si-TiO2-Al2O3-La2O3混合粉体。Using Si powder and TiO 2 powder as raw materials, using Al 2 O 3 powder and La 2 O 3 powder as sintering aids, respectively according to the above formula, the Si powder, TiO 2 powder and sintering aid are prepared, and ethanol is used as a solvent, Si 3 N 4 balls were used as the ball milling medium, mixed on a planetary ball mill for 8 hours, and dried to obtain a Si-TiO 2 -Al 2 O 3 -La 2 O 3 mixed powder.
(2)将步骤(1)得到Si-TiO2-Al2O3-La2O3混合粉体按照混合粉体B-混合粉体A-混合粉体B的排列方式组成三层结构,经200MPa保持300s冷等静压,得到坯体。(2) The Si-TiO 2 -Al 2 O 3 -La 2 O 3 mixed powder obtained in step (1) is formed into a three-layer structure according to the arrangement of mixed powder B-mixed powder A-mixed powder B. Cold isostatic pressing at 200MPa for 300s to obtain a green body.
(3)将步骤(2)得到的坯体在1400℃下氮化2h,再进行30MPa的气压烧结,烧结气氛为1atm氮气,在1700℃下保温4h,得到Si3N4梯度材料。(3) Nitriding the green body obtained in step (2) at 1400° C. for 2 hours, and then performing gas pressure sintering at 30 MPa, the sintering atmosphere is 1 atm nitrogen, and maintaining the temperature at 1700° C. for 4 hours to obtain a Si 3 N 4 gradient material.
经检测,本发明实施例5制备得到的Si3N4梯度材料的相对密度为99%,硬度为23GPa,断裂韧性为14MPa·m1/2,抗弯强度为1400MPa。After testing, the relative density of the Si 3 N 4 gradient material prepared in Example 5 of the present invention is 99%, the hardness is 23 GPa, the fracture toughness is 14 MPa·m 1/2 , and the flexural strength is 1400 MPa.
实施例6Example 6
(1)混合粉体A配方:Si:TiO2的质量分数比为90%:10%,控制Si3N4:烧结助剂的摩尔比为90%:10%配料,其中,Si3N4按照Si粉完全氮化进行计算;烧结助剂由摩尔比为1:1的Al2O3和Lu2O3组成;(1) The formula of mixed powder A: the mass fraction ratio of Si:TiO 2 is 90%: 10%, and the molar ratio of Si 3 N 4 : sintering aid is controlled to be 90%: 10% ingredients, wherein, Si 3 N 4 Calculated according to the complete nitridation of Si powder; the sintering aid is composed of Al 2 O 3 and Lu 2 O 3 with a molar ratio of 1:1;
混合粉体B配方:Si:TiO2的质量分数比为90%:10%,控制Si3N4:烧结助剂的摩尔比为90%:10%配料,其中,Si3N4按照Si粉完全氮化进行计算;烧结助剂由摩尔比为3:1的Al2O3和Lu2O3组成;Mixed powder B formula: the mass fraction ratio of Si:TiO 2 is 90%: 10%, and the molar ratio of Si 3 N 4 : sintering aid is controlled to be 90%: 10 % . Complete nitriding is calculated; the sintering aid consists of Al 2 O 3 and Lu 2 O 3 in a molar ratio of 3:1;
以Si粉和TiO2粉为原料,以Al2O3粉和Lu2O3粉为烧结助剂,分别按照上述配方将Si粉、TiO2粉和烧结助剂进行配料,以乙醇为溶剂,以Si3N4球为球磨介质,在行星式球磨机上混合8h,干燥后得到Si-TiO2-Al2O3-Lu2O3混合粉体。Using Si powder and TiO 2 powder as raw materials, using Al 2 O 3 powder and Lu 2 O 3 powder as sintering aids, respectively according to the above formula, the Si powder, TiO 2 powder and sintering aid are prepared, and ethanol is used as a solvent, Si 3 N 4 balls were used as the ball milling medium, mixed on a planetary ball mill for 8 hours, and dried to obtain a Si-TiO 2 -Al 2 O 3 -Lu 2 O 3 mixed powder.
(2)将步骤(1)得到Si-TiO2-Al2O3-Lu2O3混合粉体按照混合粉体B-混合粉体A-混合粉体B的排列方式组成三层结构,经200MPa保持300s冷等静压,得到坯体。(2) The Si-TiO 2 -Al 2 O 3 -Lu 2 O 3 mixed powder obtained in step (1) is formed into a three-layer structure according to the arrangement of mixed powder B-mixed powder A-mixed powder B. Cold isostatic pressing at 200MPa for 300s to obtain a green body.
(3)将步骤(2)得到的坯体在1300℃下氮化4h,再进行50MPa的气压烧结,烧结气氛为1atm氮气,在1600℃下保温4h,得到Si3N4梯度材料。(3) Nitriding the green body obtained in step (2) at 1300°C for 4h, and then performing gas pressure sintering at 50MPa, the sintering atmosphere is 1 atm nitrogen, and maintaining the temperature at 1600°C for 4h to obtain a Si 3 N 4 gradient material.
经检测,本发明实施例6制备得到的Si3N4梯度材料的相对密度为99%,硬度为25GPa,断裂韧性为12MPa·m1/2,抗弯强度为1200MPa。After testing, the relative density of the Si 3 N 4 gradient material prepared in Example 6 of the present invention is 99%, the hardness is 25GPa, the fracture toughness is 12MPa·m 1/2 , and the flexural strength is 1200MPa.
所公开的实施例的上述说明,使本领域专业技术人员能够实现或使用本发明。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的,本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下,在其它实施例中实现。因此,本发明将不会被限制于本文所示的这些实施例,而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。The above description of the disclosed embodiments enables any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
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CN109970454A (en) * | 2019-03-20 | 2019-07-05 | 广东工业大学 | Method for inhibiting phase transition of silicon nitride by transition metal oxide and silicon nitride ceramic prepared therefrom |
CN110483062A (en) * | 2019-08-21 | 2019-11-22 | 广东工业大学 | A kind of high-performance silicon nitride ceramics and its preparation method and application |
CN114835501B (en) * | 2022-05-19 | 2023-06-23 | 广东工业大学 | Silicon nitride-based textured gradient material and preparation method and application thereof |
CN115124353B (en) * | 2022-07-15 | 2023-01-24 | 中材高新氮化物陶瓷有限公司 | Layered composite ceramic cylindrical roller and preparation method thereof |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0603787A2 (en) * | 1992-12-23 | 1994-06-29 | Hoechst Aktiengesellschaft | High temperature resistant silicon nitride ceramic and method of making it |
EP0669295A1 (en) * | 1994-02-28 | 1995-08-30 | Honda Giken Kogyo Kabushiki Kaisha | Silicon nitride reaction - sintered body and method and apparatus for producing same |
JPH0848568A (en) * | 1994-08-04 | 1996-02-20 | Honda Motor Co Ltd | Production of ceramic sintered body |
US20060003885A1 (en) * | 1997-10-31 | 2006-01-05 | Ceramtec Ag Innovative Ceramic Engineering | Silicon nitride ceramic with a high mechanical stability at room temperature and above |
CN100486931C (en) * | 2007-06-07 | 2009-05-13 | 西北第二民族学院 | Liquid phase sintering process of high strength and high toughness SiN ceramic |
CN104909765A (en) * | 2015-06-01 | 2015-09-16 | 广东工业大学 | A low-cost and rapid method for preparing high-performance Si3N4 ceramic balls |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5663876A (en) * | 1979-10-23 | 1981-05-30 | Kobe Steel Ltd | Manufacture of silicon nitride sintered body |
CN101531521A (en) * | 2008-12-29 | 2009-09-16 | 中国地质大学(北京) | Fe/Mo-Sialon-based ceramic composite material with resistance to high temperature, erosion and wear and preparation method thereof |
CN101486578B (en) * | 2009-02-27 | 2011-08-17 | 山东大学 | Silicon nitride based nano complex gradient function ceramic tool material and preparation thereof |
CN101817684B (en) * | 2010-03-25 | 2012-08-15 | 西安交通大学 | A method for coating h-BN coating on the surface of porous Si3N4 substrate |
CN102320170B (en) * | 2010-07-08 | 2013-09-11 | 山东大学 | Gradient nanometer composite ceramic cutter material and preparation method thereof |
CN104163633A (en) * | 2014-07-04 | 2014-11-26 | 广东工业大学 | A low-cost and rapid method for preparing Si3N4 ceramics with high thermal conductivity |
CN106904977B (en) * | 2017-03-20 | 2020-09-25 | 广东工业大学 | A method for preparing surface-hard-core-tough Si3N4 ceramic material by two-step sintering method |
CN108046808B (en) * | 2018-01-05 | 2020-08-11 | 广东工业大学 | A kind of Si3N4 gradient material and preparation method thereof |
-
2018
- 2018-01-05 CN CN201810010141.XA patent/CN108046808B/en active Active
- 2018-06-29 WO PCT/CN2018/093666 patent/WO2019134354A1/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0603787A2 (en) * | 1992-12-23 | 1994-06-29 | Hoechst Aktiengesellschaft | High temperature resistant silicon nitride ceramic and method of making it |
EP0669295A1 (en) * | 1994-02-28 | 1995-08-30 | Honda Giken Kogyo Kabushiki Kaisha | Silicon nitride reaction - sintered body and method and apparatus for producing same |
JPH0848568A (en) * | 1994-08-04 | 1996-02-20 | Honda Motor Co Ltd | Production of ceramic sintered body |
US20060003885A1 (en) * | 1997-10-31 | 2006-01-05 | Ceramtec Ag Innovative Ceramic Engineering | Silicon nitride ceramic with a high mechanical stability at room temperature and above |
CN100486931C (en) * | 2007-06-07 | 2009-05-13 | 西北第二民族学院 | Liquid phase sintering process of high strength and high toughness SiN ceramic |
CN104909765A (en) * | 2015-06-01 | 2015-09-16 | 广东工业大学 | A low-cost and rapid method for preparing high-performance Si3N4 ceramic balls |
Non-Patent Citations (2)
Title |
---|
Effect ofTiO2 additives on nitridation of Si powders;weiming guo;《materials letters》;20160419;第177卷;第61-63页 * |
Sialon-Si3N4梯度纳米复合陶瓷刀具的研制及高速切削性能研究;郑光明;《中国学术期刊(光盘版)工程科技Ⅰ辑》;20121215;B022-53 * |
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Denomination of invention: A Si3N4gradient material and its preparation method Granted publication date: 20200811 Pledgee: National Development Bank of China Jilin branch Pledgor: JILIN CHANGYU TETAO NEW MATERIAL TECHNOLOGY CO.,LTD. Registration number: Y2024220000108 |