CN108033270A - Glass substrate conveying device and its operating method and glass substrate transmission system - Google Patents
Glass substrate conveying device and its operating method and glass substrate transmission system Download PDFInfo
- Publication number
- CN108033270A CN108033270A CN201711182539.3A CN201711182539A CN108033270A CN 108033270 A CN108033270 A CN 108033270A CN 201711182539 A CN201711182539 A CN 201711182539A CN 108033270 A CN108033270 A CN 108033270A
- Authority
- CN
- China
- Prior art keywords
- glass substrate
- support plate
- conveying device
- drive shaft
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 title claims abstract description 130
- 239000000758 substrate Substances 0.000 title claims abstract description 121
- 230000005540 biological transmission Effects 0.000 title claims abstract description 42
- 238000011017 operating method Methods 0.000 title claims abstract description 9
- 230000007723 transport mechanism Effects 0.000 claims abstract description 36
- 230000007246 mechanism Effects 0.000 claims description 34
- 238000001514 detection method Methods 0.000 claims description 9
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims 1
- 238000012546 transfer Methods 0.000 abstract description 9
- 230000005571 horizontal transmission Effects 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000004140 cleaning Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention relates to glass substrate manufacture field, disclose a kind of glass substrate conveying device and its operating method and glass substrate transmission system, the device includes rack (1), drive shaft (4) and multiple transport mechanisms, each transport mechanism includes actuator (2), roller shaft (3), with support plate (5), multiple roller shafts are rotatablely equipped with each support plate, the roller (8) for transmitting glass substrate is provided with roller shaft, drive shaft turns are installed in rack, each roller shaft is installed with driven wheel (21), drive shaft is installed with multiple driving wheels (22), multiple driving wheels (22) are sequentially connected with the driven wheel (21) on multiple roller shafts (3) respectively, support plate is articulated with drive shaft, actuator is configured to drive support plate around drive shaft turns.The base plate transfer device of the application improves the transfer efficiency between the tilting transmission of glass substrate and horizontal transmission.
Description
Technical field
The present invention relates to glass substrate manufacture field, more particularly to a kind of glass substrate conveying device and its operating method
With glass substrate transmission system.
Background technology
At present, in base plate glass deep-processing process, transmitted more and more using tilting during glass cleaning, tilting
The superiority of transmission exactly can effectively prevent that each cleaning section from mutually going here and there water, improve cleaning performance, and the length of machine
Size can greatly reduce.In addition to cleaning machine, other manufacturing procedures are typically all to require horizontal transmission, so must just there is water
Flat pass send and tilt transmission between transmission transition and conversion process.But existing transmission transition apparatus needs very big interval empty
Between, and only wait after previous piece of glass substrate send out from transition apparatus completely, latter piece of glass substrate can just be opened
Beginning is transmitted, and work efficiency is not high.
The content of the invention
The purpose of the invention is to overcome the tilting transmission efficiency of glass substrate existing in the prior art is not high to ask
Topic, there is provided a kind of glass substrate conveying device with improve glass substrate tilting transmission horizontal transmission between transfer efficiency.
To achieve these goals, one aspect of the present invention provides a kind of glass substrate conveying device, the device include rack,
Drive shaft and multiple transport mechanisms, each transport mechanism include actuator, roller shaft and support plate, on each support plate
Multiple roller shafts are rotatablely equipped with, the roller for transmitting glass substrate, the drive shaft are provided with the roller shaft
It is rotatably installed in the rack, each roller shaft is installed with driven wheel, and the drive shaft is installed with multiple
Driving wheel, multiple driving wheels are sequentially connected with the driven wheel on multiple roller shafts respectively, and the support plate is hinged
In the drive shaft, the actuator is configured to drive the support plate around the drive shaft turns.
Preferably, the actuator includes cylinder, and the cylinder is articulated with the support plate by cylinder connector.
Preferably, cylinder connecting seat is provided with the lower surface of the support plate, the cylinder connector is articulated with the cylinder
Connecting seat.
Preferably, one end of the support plate is articulated with the drive shaft, and the actuator connects the other end of the support plate.
Preferably, axis of the axis of the drive shaft perpendicular to the roller shaft.
Preferably, the driving wheel and the driven wheel are the magnetic wheel worked in coordination.
Preferably, the glass substrate conveying device includes being used for the control device for controlling the actuator.
Preferably, the glass substrate conveying device be provided with the detection support plate whether the detection list of bearing glass substrate
Member, the control device are electrically connected with the detection unit.
Second aspect of the present invention provides a kind of operating method of glass substrate conveying device, which is
Glass substrate conveying device as described above, the operating method include：S1：Enter the supporting zone of the support plate in glass substrate
Before, the corresponding actuator of the support plate is controlled the support plate is in the first holding state；S2：In the glass substrate
Completely by after multiple support plate supports, the corresponding actuator of multiple support plates is controlled to make multiple support plates together
Around the drive shaft turns to the second holding state；S3：After the glass substrate leaves a support plate completely, control connects
The actuator for connecing the support plate turns to first holding state from second holding state.
Third aspect present invention provides a kind of glass substrate transmission system, which includes being sequentially connected
Grinding mechanism, wiper mechanism and package mechanism, the wiper mechanism includes glass substrate conveying device as described above, described
Grinding mechanism is located at the upstream of the glass substrate conveying device, and the package mechanism is located at the glass substrate conveying device
Downstream.
Preferably, the grinding mechanism includes grinding transmission device, and the grinding transmission device includes the be obliquely installed
One transport mechanism, the package mechanism include package conveying device, and the package conveying device includes horizontally disposed second and passes
Send mechanism, the support plate can turn to the first position concordant with first transport mechanism and with second transport mechanism
The concordant second place.
Through the above technical solutions, drive shaft turns drive driving wheel to rotate, driving wheel and then drive driven wheel rotation, from
And roller shaft is rotated, the glass substrate being arranged on roller shaft is driven by the roller of roller shaft and travels forward.In glass substrate
Into before transmission device, the support plate of first transport mechanism will driven member lift, filled so as to enter transmission in glass substrate
Postponing makes glass substrate run-off the straight, and with travelling forward for glass substrate, the support plate of subsequent transport mechanism lifts successively, makes
Obtain glass substrate to be always maintained at tilting, when the body of glass substrate is entirely located on roller, actuator is shunk so that glass
Glass substrate returns to horizontality.And after the glass substrate of horizontality leaves the support plate of first transport mechanism completely and under
One piece of glass substrate enters before transmission device, and the support plate of first transport mechanism again lift by driven member so that next piece into
Enter the glass substrate run-off the straight of transmission device, similarly, when the glass substrate of horizontality leaves other subsequent completely successively
During the support plate of transport mechanism, corresponding support plate driven member can also lift again so that glass substrate afterwards keeps tilting, and makes
The tilting transmission for obtaining glass substrate is continued for.The base plate transfer device that the application provides significantly improves glass substrate
Tilting transmits the transfer efficiency between horizontal transmission.
Brief description of the drawings
Fig. 1 is the schematic diagram of glass substrate conveying device according to the preferred embodiment of the present invention；
Fig. 2 is the schematic diagram at another visual angle of the glass substrate conveying device of Fig. 1；
Fig. 3 is the schematic diagram that glass crimping is transmitted on the glass substrate conveying device of Fig. 1.
Description of reference numerals
1- rack 2- actuator 3- roller shaft 4- drive shaft 5- support plate 6- cylinder connectors
7- cylinder connecting seat 8- roller 9- air cylinder base 21- driven wheel 22- driving wheels
Embodiment
The embodiment of the present invention is described in detail below in conjunction with attached drawing.It should be appreciated that this place is retouched
The embodiment stated is merely to illustrate and explain the present invention, and is not intended to limit the invention.
The present invention provides a kind of glass substrate conveying device, which includes rack 1, drive shaft 4 and multiple transport mechanisms,
Each transport mechanism includes actuator 2, roller shaft 3 and support plate 5, is rotatablely equipped with each support plate 5 multiple described
Roller shaft 3, the roller 8 for transmitting glass substrate is provided with the roller shaft 3, and the drive shaft 4 is rotatably installed in described
In rack 1, each roller shaft 3 is installed with driven wheel 21, and the drive shaft 4 is installed with multiple driving wheels 22,
Multiple driving wheels 22 are sequentially connected with the driven wheel 21 on multiple roller shafts 3 respectively, and the support plate 5 is articulated with
The drive shaft 4, the actuator 2 are configured to drive the support plate 5 to rotate around the drive shaft 4.
As depicted in figs. 1 and 2, actuator 2 is arranged between support plate 5 and rack 1, and the end of support plate 5, which is hinged on, to be arranged on
In drive shaft 4 in rack 1, the lifting of actuator 2 can drive support plate 5 to be rotated around drive shaft 4, so that support plate 5 inclines
Tiltedly.When drive shaft 4 rotate drive driving wheel 22 rotate, driving wheel 22 so drive driven wheel 21 rotate so that 3 turns of roller shaft
Dynamic, the glass substrate being arranged on roller shaft 3 is driven by the roller 8 of roller shaft and travels forward.Enter transmission in glass substrate to fill
Before putting, the support plate 5 of first transport mechanism will driven member 2 lift, so as to make glass after glass substrate enters transmission device
Glass substrate run-off the straight, with travelling forward for glass substrate, the support plate 5 of subsequent transport mechanism lifts successively so that glass
Substrate is always maintained at tilting, and when the body of glass substrate is entirely located on roller 8, actuator 2 is shunk so that glass base
Plate returns to horizontality.
As shown in figure 3, after the glass substrate of horizontality leaves support plate 5 of first transport mechanism completely and next
Block glass substrate enter transmission device before, the support plate 5 of first transport mechanism again lift by driven member 2 so that next piece into
Enter the glass substrate run-off the straight of transmission device.Similarly, when the glass substrate of horizontality leaves subsequent other completely successively
During the support plate 5 of transport mechanism, corresponding support plate 5 driven member 2 can also lift again so that glass substrate afterwards keeps inclining
Tiltedly so that the tilting transmission of glass substrate is continued for.
After leaving the support plate 5 of first transport mechanism due to lastblock glass substrate, next piece of glass substrate just can be into
Enter the transmission device, it is not necessary to which lastblock glass substrate leaves transmission device completely, so that the glass base that the application provides
Multiple base plate glass can be transmitted on substrate transfer device at the same time, the base plate transfer device that the application provides significantly improves glass base
Transfer efficiency between the tilting transmission and horizontal transmission of plate.
Wherein, one end of support plate 5 is articulated with drive shaft 4, and actuator 2 connects the other end of the support plate 5, so that branch
Plate 5 obtains the angle of inclination of bigger.Preferably, the axis of the drive shaft 4 perpendicular to the roller shaft 3 axis, such as Fig. 1 and
Shown in Fig. 2, one end of multiple roller shafts 3 is provided with driven wheel 22 and is passed so as to be formed with the driving wheel 21 in same root drive shaft 4
Motivation structure, the transmission mechanism can be worm gear mechanism or bevel gear mechanism etc..Preferably, the driving wheel 22 and described
Driven wheel 21 is the magnetic wheel worked in coordination, and selects magnetic wheel to be not required driving wheel 22 and driven wheel 21 to contact with each other, and magnetic force
The power transmission effect height of wheel, low noise, service life length.
Actuator 2 can select appropriate structure, it is preferable that the actuator 2 includes cylinder, and the cylinder passes through cylinder
Connector 6 is articulated with the support plate 5, and the cooperation free degree of articulated connection is higher, when cylinder extends or shrinks, cylinder connector 6
It can jack up or pull downward on upwards support plate 5 so that support plate 5 is filled between horizontality and heeling condition and changed.
And in order to make support plate 5 be at horizontality, the position where drive shaft 4 should be above actuator 2 and rack 1
The position of connection, as depicted in figs. 1 and 2, drive shaft 4 are located on the higher part of rack 1 so that branch of the support plate 5 in cylinder
Support effect is lower can to advance to one so that the position of support plate 5 holding level.
Wherein, cylinder connecting seat 7 is provided with the lower surface of the support plate 5, the cylinder connector 6 is articulated with the cylinder
Connecting seat 7.It should be noted that the actuator 2 of the application is not limited to select cylinder, oil cylinder, hydraulic cylinder can also be selected
Deng other lifting gears, these are within the protection domain of the application.
In order to be controlled to actuator 2, it is preferable that the glass substrate conveying device includes being used to control the driving
The control device of part 2.The control device can control the lifting of the actuator 2 of each transport mechanism according to demand, specially exist
When glass substrate steel enters transmission device (when glass substrate is had just enter on the support plate 5 of first transport mechanism), first biography is controlled
The 2 extended length A of actuator of mechanism is sent, as glass substrate travels forward in transmission device, controls subsequent transport mechanism
The extended length A successively of actuator 2, until when the body of glass substrate is entirely located on roller 8, control actuator 2 is shunk back
Enable to the state of support plate 5 holding level.When the glass substrate of horizontality leave completely first transport mechanism support plate 5 it
Afterwards, the 2 extended length A of actuator of first transport mechanism is controlled, so that the next piece of glass substrate for entering transmission device inclines
Tiltedly.
Wherein, in order to judge whether glass substrate leaves support plate 5, it is preferable that the glass substrate conveying device is provided with
Detect the support plate 5 whether the detection unit of bearing glass substrate, the control device is electrically connected with the detection unit, works as glass
When glass substrate leaves support plate 5, detection unit can be fed back to control unit so that control unit is controlled accordingly.
According to the second of the application aspect, the application provides a kind of operating method of glass substrate conveying device, the glass
Glass transporting substrates, device is set to glass substrate conveying device as described above, which includes：
S1：Before glass substrate enters the supporting zone of the support plate 5, the corresponding driving of the support plate 5 is controlled
Part 2 makes the support plate 5 be in the first holding state；S2：After the glass substrate is supported by multiple support plates 5 completely,
The corresponding actuator 2 of multiple support plates 5 is controlled multiple support plates 5 is turned to second around the drive shaft 4 together
Holding state；S3：After the glass substrate leaves support plate 5 completely, control connect the support plate 5 actuator 2 from
Second holding state turns to first holding state.Wherein, the first holding state and the second holding state can roots
According to needing to set, for example, the first holding state can be the state for the glass substrate run-off the straight that support plate 5 can make thereon, the
Two holding states can be the position for the glass substrate holding level that support plate 5 can make thereon.
According to the 3rd of the application the aspect, the application provides a kind of glass substrate transmission system, it is characterised in that the glass
Glass substrate transfer system includes sequentially connected grinding mechanism, wiper mechanism and package mechanism, and the wiper mechanism is included as above
The glass substrate conveying device, the grinding mechanism are located at the upstream of the glass substrate conveying device, the packing machine
Structure is located at the downstream of the glass substrate conveying device.
Wherein, glass substrate is horizontal transmission in grinding mechanism and package mechanism, glass substrate with horizontality from
Grind mechanism to enter in wiper mechanism, be heeling condition in the glass substrate conveying device of wiper mechanism, and with horizontality
Carry out the work such as packing into package mechanism.
Preferably, the grinding mechanism includes grinding transmission device, and the grinding transmission device includes the be obliquely installed
One transport mechanism, the package mechanism include package conveying device, and the package conveying device includes horizontally disposed second and passes
Send mechanism, the support plate 5 can turn to the first position concordant with first transport mechanism and with second conveyer
The concordant second place of structure.The support plate 5 can turn to the peak position concordant with the first transport mechanism so that glass
Substrate can enter in glass substrate conveying device from the first transport mechanism, the second transport mechanism of horizontality of the support plate 5
Concordantly, so that glass substrate can enter the second transport mechanism with horizontality from support plate 5.
The preferred embodiment of the present invention is described in detail above in association with attached drawing, still, the present invention is not limited thereto.At this
In the range of the technology design of invention, a variety of simple variants can be carried out to technical scheme.Including each particular technique
Feature is combined in any suitable manner.In order to avoid unnecessary repetition, the present invention is to various combinations of possible ways
No longer separately illustrate.But these simple variants and combination should equally be considered as content disclosed in this invention, belong to the present invention
Protection domain.
Claims (11)
1. a kind of glass substrate conveying device, it is characterised in that the device includes rack (1), drive shaft (4) and multiple conveyers
Structure, each transport mechanism include actuator (2), roller shaft (3) and support plate (5), are rotatablely installed on each support plate (5)
There are multiple roller shafts (3), the roller (8) for transmitting glass substrate, the drive shaft are provided with the roller shaft (3)
(4) it is rotatably installed in the rack (1), each roller shaft (3) is installed with driven wheel (21), the drive shaft
(4) be installed with multiple driving wheels (22), multiple driving wheels (22) respectively with it is described on multiple roller shafts (3)
Driven wheel (21) is sequentially connected, and the support plate (5) is articulated with the drive shaft (4), and the actuator (2) is configured to drive
The support plate (5) rotates around the drive shaft (4).
2. glass substrate conveying device according to claim 1, it is characterised in that the actuator (2) includes cylinder, institute
State cylinder and the support plate (5) is articulated with by cylinder connector (6).
3. glass substrate conveying device according to claim 2, it is characterised in that set on the lower surface of the support plate (5)
Cylinder connecting seat (7) is equipped with, the cylinder connector (6) is articulated with the cylinder connecting seat (7).
4. glass substrate conveying device according to claim 1, it is characterised in that one end of the support plate (5) is articulated with
The drive shaft (4), the actuator (2) connect the other end of the support plate (5).
5. glass substrate conveying device according to claim 1, it is characterised in that the axis of the drive shaft (4) is vertical
Axis in the roller shaft (3).
6. glass substrate conveying device according to claim 5, it is characterised in that the driving wheel (22) and described driven
Wheel (21) is the magnetic wheel worked in coordination.
7. glass substrate conveying device according to claim 1, it is characterised in that the glass substrate conveying device includes
For controlling the control device of the actuator (2).
8. glass substrate conveying device according to claim 7, it is characterised in that the glass substrate conveying device is set
Have the detection support plate (5) whether the detection unit of bearing glass substrate, the control device is electrically connected with the detection unit.
9. a kind of operating method of glass substrate conveying device, which is any one in claim 1-8
Glass substrate conveying device described in, it is characterised in that the operating method includes：
S1：Before glass substrate enters the supporting zone of the support plate (5), the corresponding driving of the support plate (5) is controlled
Part (2) makes the support plate (5) be in the first holding state；
S2：After the glass substrate is completely by multiple support plate (5) supports, control multiple support plates (5) corresponding
The actuator (2) makes multiple support plates (5) turn to the second holding state around the drive shaft (4) together；
S3：After the glass substrate leaves support plate (5) completely, control connect the support plate (5) actuator (2) from
Second holding state turns to first holding state.
10. a kind of glass substrate transmission system, it is characterised in that the glass substrate transmission system includes sequentially connected grinder
Structure, wiper mechanism and package mechanism, the wiper mechanism include the glass substrate transmission described in any one in claim 1-8
Device, the grinding mechanism are located at the upstream of the glass substrate conveying device, and the package mechanism is located at the glass substrate
The downstream of transmission device.
11. glass substrate transmission system according to claim 10, it is characterised in that the grinding mechanism includes grinding and passes
Device is sent, the grinding transmission device includes the first transport mechanism being obliquely installed, and the package mechanism includes packaging transmission dress
Put, the package conveying device includes horizontally disposed second transport mechanism, and the support plate (5) can turn to and described first
The concordant first position of transport mechanism and the second place concordant with second transport mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711182539.3A CN108033270A (en) | 2017-11-23 | 2017-11-23 | Glass substrate conveying device and its operating method and glass substrate transmission system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711182539.3A CN108033270A (en) | 2017-11-23 | 2017-11-23 | Glass substrate conveying device and its operating method and glass substrate transmission system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108033270A true CN108033270A (en) | 2018-05-15 |
Family
ID=62093923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711182539.3A Pending CN108033270A (en) | 2017-11-23 | 2017-11-23 | Glass substrate conveying device and its operating method and glass substrate transmission system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108033270A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109020172A (en) * | 2018-09-26 | 2018-12-18 | 东旭科技集团有限公司 | Bend glass hot bending shape system and bend glass hot bending shape method |
| CN109132552A (en) * | 2018-10-10 | 2019-01-04 | 东旭集团有限公司 | Transmission transition apparatus for glass substrate |
| CN109733885A (en) * | 2019-01-21 | 2019-05-10 | 彩虹（合肥）液晶玻璃有限公司 | Conveying equipment |
| CN110713007A (en) * | 2019-10-11 | 2020-01-21 | 中建材轻工业自动化研究所有限公司 | Glass conveyor |
| CN112896913A (en) * | 2021-01-15 | 2021-06-04 | 四川众友机械有限责任公司 | Material rack system for processing triple gear |
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| GB452381A (en) * | 1935-02-20 | 1936-08-20 | Pilkington Brothers Ltd | Improvements in and relating to apparatus for producing glass strip |
| JPH1187210A (en) * | 1997-09-02 | 1999-03-30 | Dainippon Screen Mfg Co Ltd | Substrate treatment equipment and substrate treatment method |
| CN1865097A (en) * | 2005-05-19 | 2006-11-22 | 大日本网目版制造株式会社 | Substrate conveying device |
| KR20110091149A (en) * | 2010-02-05 | 2011-08-11 | 세메스 주식회사 | Substrate transfer unit, substrate processing apparatus including same, and substrate transfer method using same |
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| CN203187090U (en) * | 2013-03-25 | 2013-09-11 | 芜湖东旭光电科技有限公司 | Horizontal transmission device of liquid crystal glass substrate |
| KR20140082879A (en) * | 2012-12-24 | 2014-07-03 | 주식회사 케이씨텍 | Supply for large area substrate with tilting |
| KR20160082165A (en) * | 2014-12-31 | 2016-07-08 | 주식회사 케이씨텍 | Device for transferring substrate |
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|---|---|---|---|---|
| GB452381A (en) * | 1935-02-20 | 1936-08-20 | Pilkington Brothers Ltd | Improvements in and relating to apparatus for producing glass strip |
| JPH1187210A (en) * | 1997-09-02 | 1999-03-30 | Dainippon Screen Mfg Co Ltd | Substrate treatment equipment and substrate treatment method |
| KR101160534B1 (en) * | 2004-06-03 | 2012-06-28 | 시바우라 메카트로닉스 가부시키가이샤 | Apparatus for carrying substrates |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109020172A (en) * | 2018-09-26 | 2018-12-18 | 东旭科技集团有限公司 | Bend glass hot bending shape system and bend glass hot bending shape method |
| CN109132552A (en) * | 2018-10-10 | 2019-01-04 | 东旭集团有限公司 | Transmission transition apparatus for glass substrate |
| CN109132552B (en) * | 2018-10-10 | 2023-12-05 | 日本电气硝子株式会社 | Transfer transition device for glass substrate |
| CN109733885A (en) * | 2019-01-21 | 2019-05-10 | 彩虹（合肥）液晶玻璃有限公司 | Conveying equipment |
| CN110713007A (en) * | 2019-10-11 | 2020-01-21 | 中建材轻工业自动化研究所有限公司 | Glass conveyor |
| CN112896913A (en) * | 2021-01-15 | 2021-06-04 | 四川众友机械有限责任公司 | Material rack system for processing triple gear |
| CN112896913B (en) * | 2021-01-15 | 2022-07-26 | 四川众友机械有限责任公司 | Material rack system for processing triple gear |
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