CN108017271B - OVD (over-the-counter lamp) strip-shaped blowlamp device, OVD rod making system and use method thereof - Google Patents
OVD (over-the-counter lamp) strip-shaped blowlamp device, OVD rod making system and use method thereof Download PDFInfo
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- CN108017271B CN108017271B CN201711470721.9A CN201711470721A CN108017271B CN 108017271 B CN108017271 B CN 108017271B CN 201711470721 A CN201711470721 A CN 201711470721A CN 108017271 B CN108017271 B CN 108017271B
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
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Abstract
The invention relates to an OVD strip-shaped blowtorch device and an OVD rod making system and a use method thereof, wherein the OVD strip-shaped blowtorch device comprises a first strip-shaped blowtorch used for spraying raw material mixed gas, a second strip-shaped blowtorch used for spraying fuel gas and a third strip-shaped blowtorch used for spraying oxygen, which are arranged in parallel, each of the first strip-shaped blowtorch, the second strip-shaped blowtorch and the third strip-shaped blowtorch respectively comprises a strip-shaped slit nozzle and a gas diffusion structure which are communicated with each other, the tail end of the gas diffusion structure is communicated with a corresponding gas source, the middle part of the gas diffusion structure is provided with n-level gas buffer diffusion cavities, and the n-level gas buffer diffusion cavities are used for making the gas pressure inside each strip-shaped blowtorch uniform when in operation, wherein n is more than or equal to 3. The OVD strip-shaped blowtorch device and the OVD rod making system and the application method thereof can meet the requirement of high deposition rate, and have the advantages of reducing scrapping at two ends, no need of moving lamps and the like.
Description
Technical Field
The invention relates to the technical field of optical fiber preparation, in particular to an OVD (optical fiber) strip-shaped blowtorch device, an OVD rod making system and a use method thereof.
Background
The mainstream preparation technology of the optical fiber preform comprises PCVD (Philips, netherlands), MCVD (AT in the united states)&T), OVD (Coring, USA), VAD (NT, japan)&T) and APVD (Alcatel, france), wherein the OVD (outside tube vapor deposition) method was developed by Corning company in the beginning of the 70 th century for preparing a preform core rod, and was also widely used for preparing an overclad through technological development. The chemical reaction mechanism of the OVD process is a flame hydrolysis process, i.e. gaseous halides (SiCl 4 Etc.) to produce a large amount of nano-sized 'loose body' powder by reaction of oxyhydrogen flame or methane flame, gradually depositing a layer of powder on the core rod along with the reciprocating movement of the rod body along the blast burner until the powder becomes a prefabricated rod loose body with a preset size and shape, sintering and preserving the loose body after the deposition in a high-temperature electric furnace to finally obtain a transparent and glassy prefabricated rod, wherein the sintering temperature is generally about 1500 ℃, and He and Cl are continuously introduced into the furnace 2 The gas can remove impurities in the rod body.
The advantages of the OVD method for preparing the 'loose body' preform are mainly that the deposition rate is high, the deposition efficiency is high, the sleeve used for preparing the preform at present is mainly prepared by adopting the OVD method, silicon dioxide 'loose body' powder is deposited on a target rod, then the silicon dioxide 'loose body' powder is sintered into transparent glass, the target rod is taken out to obtain a cylindrical glass tube (Cylinder), and the cylindrical glass tube can be subjected to mechanical deep processing and stretching to obtain a core rod with accurate geometric dimension which can be matched with various core rods. The deposition rate can reach 200g/min along with the improvement and perfection of the blast lamp, and the average deposition efficiency can reach 60%. The most important improvement and optimization of the improved process is that only one blast lamp is used for preparing the optical fiber preform by the OVD method, the process is developed into two or more blast lamps in one row, and the deposition efficiency is greatly improved by developing a single group of blast lamps into one or two rows of blast lamps. The uniformity of flame can be improved by optimizing the structure of the blast lamp, so that the silicon dioxide loose powder is distributed more uniformly on the rod body, the requirement of the prefabricated rod on the accurate distribution of refractive index is met, the deposition efficiency can be improved, the flow direction of the optimized blast lamp gas is smoother, the flame conflict is avoided, the residual silicon dioxide particles on the surface of the blast lamp are avoided, and the residual silicon dioxide particles are seriously accumulated to possibly cause unsmooth blast lamp gas and unstable flame. The development of ribbon lamp apparatus, which directly increases the spray length and increases the deposition rate, however, entails difficulties such as difficult flame control, poor uniformity, etc., and related studies in U.S. Pat. nos. 5211732, 6047564, 4203553, 6837076, etc., have introduced different ribbon lamp designs, wherein corning incorporated patent US5211732 designs a row of multiple nozzle torches, which are significantly faster than single and single set lamps deposition rates and increase the effective length of loose preforms as the torch spacing is reduced. Heraeus patent US6047564 also describes a row of combination lamps which reduce the variation in surface temperature of the rod by changing the rotational speed of the target rod and the reciprocating speed of the burner, improve the rod spray point temperature by changing the burner flame, and reduce the rod spray point temperature variation by changing the burner and target rod distance. The three groups of nozzles designed in patent US4203553 are angled, the middle nozzle supplies flame, the two side nozzles supply silicon tetrachloride raw material, and the designer solves the defect of silicon dioxide residue on the surface of the burner but cannot be applied to the preparation of longer preforms because the length of the burner is only 15 cm. The corning company patent US6837076 discloses a broad-faced torch using a set of buffer grids to disperse gas molecules, a grid gas outlet for the nozzle, a high purity quartz glass for the burner assembly, a microstructure of the lamp body providing converging loose bodies to a predetermined size, and a microstructure controlling the fuel gas and the reaction precursor to produce an optical fiber preform.
The OVD method with a single blast lamp has simple process, relatively uniform deposition density, but low deposition rate. Adding one lamp to multiple lamps or a row of torch control factors is relatively complex, significantly increasing deposition efficiency, but reducing the relative effective length of the loose body deposition rod. The design of the planar blowtorch adopts a micropore structure to solve the problems of gas uniformity and the like, and the technical difficulty of manufacturing a longer loose body rod with the length of more than 1 meter is not solved. A novel ribbon-shaped blowtorch is designed for an OVD method for preparing the optical fiber preform, and the blowtorch not only meets the requirement of high deposition rate, but also has the advantages of reducing scrapping of two ends, no need of moving lamps and the like.
Disclosure of Invention
The invention aims to solve at least one of the problems, and provides an OVD strip-shaped blowtorch device, an OVD rod making system and a use method thereof.
According to one aspect of the present invention, there is provided an OVD strip burner apparatus comprising a first strip burner for emitting a raw material mixture, a second strip burner for emitting a fuel gas and a third strip burner for emitting oxygen gas arranged in parallel, each of the first strip burner, the second strip burner and the third strip burner comprising a strip slit nozzle and a gas diffusion structure which are communicated with each other, the ends of the gas diffusion structures being communicated with corresponding gas sources, the middle of the gas diffusion structure being provided with n-stage gas buffer diffusion chambers for equalizing the gas pressure inside each strip burner in operation, wherein n is not less than 3.
The n-level gas buffer diffusion cavities comprise n gas buffer channels and a split layer used for communicating two adjacent gas buffer pipelines, the gas buffer channels and the split layer are alternately arranged in the height direction of the n-level gas diffusion cavities, the width of each gas buffer channel is larger than the thickness of each split layer, and the volumes of the n gas buffer channels are sequentially reduced along the direction from the gas source to the strip slit nozzle.
The OVD strip-shaped burner device further comprises a fourth strip-shaped burner for jetting barrier gas and a fifth strip-shaped burner for jetting oxygen, the number of the second strip-shaped burner, the third strip-shaped burner, the fourth strip-shaped burner and the fifth strip-shaped burner is two, and the arrangement sequence is a fifth strip-shaped burner a, a second strip-shaped burner a, a third strip-shaped burner a, a fourth strip-shaped burner a, a first strip-shaped burner, a fourth strip-shaped burner b, a third strip-shaped burner b, a second strip-shaped burner b and a fifth strip-shaped burner b at a time.
The air outlet angles of the first strip-shaped blowtorch and the two fourth strip-shaped blowlamps are kept consistent, and the air outlet angles of the two third strip-shaped blowlamps, the two second strip-shaped blowlamps and the two fifth strip-shaped blowlamps are respectively deviated to the direction of the first strip-shaped blowtorch at relative angles of 2-8 degrees.
The raw material mixed gas comprises raw material vapor and auxiliary gas, the raw material vapor comprises at least one of silicon-based material vapor or germanium-based material vapor, the auxiliary gas comprises at least one of hydrogen, methane or oxygen, the fuel gas comprises hydrogen and methane, and the barrier gas comprises inert gas.
The OVD strip-shaped blowtorch device further comprises a cooling liquid channel, and the cooling liquid channel is arranged at one side, close to the strip-shaped slit nozzle, between every two adjacent strip-shaped blowtorches.
The gas buffer channels are circular pipelines, and the diameters of the pipelines of the n gas buffer channels are sequentially reduced along the direction from the gas source to the strip slit nozzle; the height of the gas buffer diffusion chamber is 1-2 meters, n=3.
According to a second aspect of the present invention, there is provided an OVD rod making system including the OVD strip lamp apparatus, comprising a reaction chamber, the OVD strip lamp apparatus, a target rod transmission and weight testing system, an exhaust system for controlling a pressure difference in the reaction chamber, a control feedback system, a movable camera, an infrared temperature sensor and a target rod, the OVD strip lamp apparatus, the target rod transmission and weight testing system, the movable camera, the infrared temperature sensor and the target rod being all located in the reaction chamber, the movable camera and the infrared temperature sensor controlling and adjusting a raw material feed amount and an air intake amount of the OVD strip lamp apparatus and an exhaust amount of the exhaust system by the control feedback system, thereby controlling a surface uniformity, a shape and a size of the loose rod.
According to a third aspect of the present invention there is provided an OVD rod making method comprising the steps of:
a predetermined manufacturing program of the loose preform is inputted into the control feedback system.
The ribbon burner generates a uniform ribbon flame, the reaction precursor undergoes a high-temperature flame hydrolysis reaction to obtain white powdery silicon dioxide, and the white powdery silicon dioxide is sprayed on the rotating central target rod.
The infrared temperature sensing sensor scans the temperature of the spraying point of the loose preform at any time, and when the temperature difference exceeds the allowable error range, the flame size is finely adjusted by changing the air inflow.
The movable camera scans the appearance of the loose preform at any time, and when the difference between the size and uniformity of the preform and the preset size exceeds the allowable error range, the appearance of the loose preform is finely adjusted by changing the feeding amount and the air inflow.
The invention has the following beneficial effects:
1. the blast lamp does not need to reciprocate, and interval scrapping is reduced to the greatest extent. Because the shape of the blast lamp is a whole strip-shaped blast lamp, the blast lamp fully covers the effective length of the whole core rod, and therefore, the scrapping caused by the blast lamp can be reduced to the greatest extent.
2. The design of the n-level gas buffer channel of the blast lamp has better flame consistency and better outer diameter uniformity of the deposited loose rod. Unlike conventional torch feed systems, conventional torches are individually mass flow controllers and deposition recipes to control individual torches, which theoretically cannot be compensated for after defects in the outer diameter of the loose rod due to the torches and the like.
3. The design principle is simple, and equipment stability is better, maintains the convenience. The CCD camera, the weight testing system and the blast lamp are in linkage complementation, so that deposited loose rods are good in uniformity, and the equipment stability and later maintenance are convenient due to the fact that mass flow controllers are used less.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to designate like parts throughout the figures. In the drawings:
FIG. 1 shows a schematic deposition diagram of a plurality of torches of a general embodiment;
FIG. 2 shows a schematic deposition diagram of a row of torches of a conventional embodiment;
fig. 3 shows a cross-sectional view of an OVD ribbon torch apparatus according to a first embodiment of the present invention;
fig. 4 shows a cross-sectional view of an OVD ribbon torch apparatus according to a second embodiment of the present invention;
fig. 5 shows a top view of an OVD ribbon torch apparatus according to an embodiment of the invention;
fig. 6 shows a cross-sectional view of an OVD ribbon torch apparatus according to a third embodiment of the invention;
fig. 7 shows a schematic diagram of an OVD rod making system of an OVD ribbon torch apparatus according to an embodiment of the invention.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
The early OVD method is to deposit one optical fiber preform, the control factors are relatively few, the deposition rate is low, the deposition density is relatively uniform, and the deposition rate is greatly improved by improving and optimizing a group or a row of strip-shaped combined torches, as shown in fig. 1 and 2, the effective deposition lengths of a plurality of torches and a row of torches are as follows:
effective length (multiple torches) =l- (n-1) ×d
Total length (multiple torches) =l+ (n-1) d
Effective rate (multiple torches) = [ L- (n-1) d ]/[ l+ (n-1) d ]
Effective length (row of torches) = (n-1) ×d
Total length (one row of torches) = (n+1) ×d
Effective rate (one row of blowlamps) = (n-1)/(n+1)
The effective rate of the deposition length of a row of torches increases with the increase of the number of the torches, and the effective rate is close to 1 assuming that the number of the torches n is infinite, so that the number of the torches n can be considered to be infinite on a certain length if the torches are made into a strip-shaped slit, the effective rate of the deposition length is greatly increased, and a novel strip-shaped torch is designed by applying the innovation point. The blast lamp comprises a strip-shaped slit air outlet, and the length of the strip-shaped slit nozzle of the blast lamp exceeds 1 meter, so that the uniformity of air of the air outlet is required for guaranteeing the uniformity of flame, and the patent designs a three-level gas buffer diffusion device which basically meets the requirement that the air pressure of the air at the air outlet is relatively stable on the length of 1-2 meters.
As described above, the present patent describes a novel band-shaped OVD burner apparatus with which a loose silica porous preform can be rapidly and efficiently prepared. The technology can be used for preparing single-mode communication optical fibers and multimode optical fibers, and can be used for preparing a core layer and a cladding layer of a preform rod or independently preparing components of the preform rod. When the device is used for preparing the core layer of the prefabricated rod, the loose core layer of the loose body comprises evenly mixed silicon dioxide powder with higher purity, adulterant powder such as germanium dioxide and the like, and when the outer cladding layer is deposited, the loose body is generally silicon dioxide powder with higher purity. In addition, when used to prepare bend loss insensitive single mode fiber g.657a, the refractive index profile of the profile can be varied according to the loose rod requirements.
As shown in fig. 3, a burner apparatus may be used to produce a silica soot mass by flame hydrolysis to deposit a soot preform, the burner apparatus comprising a plurality of ribbon-shaped burners, each ribbon-shaped burner consisting essentially of five sections, sections 210, 211, 212, 213, 214, 215, 216, 217, 218 being a burner first stage gas buffer channel, sections 219, 220, 221, 222, 223, 224, 225, 226, 227 being a burner second stage gas buffer channel, sections 228, 229, 230, 231, 232, 233, 234, 235, 236 being a third stage gas buffer channel, section 205 being a silicon-based feedstock vapor and oxygen mixture ribbon slit nozzle, sections 204, 206 being an inert gas group gas barrier ribbon slit nozzle, sections 203, 207 being a burner internal oxygen ribbon slit nozzle, sections 202, 208 being a hydrogen or methane fuel gas ribbon slit nozzle, and sections 201, 209 being burner external oxygen ribbon slit nozzles. The silicon-based feedstock vapor and oxygen mixture may pass sequentially through components 232, 223, 214, 205, inert gases such as argon may pass sequentially through components 231, 222, 213, 204 and sequentially through components 233, 224, 215, 206, internal oxygen may pass sequentially through components 230, 220, 211, 202 and sequentially through components 234, 225, 216, 207, and hydrogen or methane gas may pass sequentially through components 229, 220, 211, 202 and 235, 226, 217, 208. The number of the gas buffer channels of each blast burner of the blast burner device is n, and the gas buffer channels can be adjusted according to the specific depth and the deposition requirement of the blast burner, and n is more than or equal to 3 under the general condition.
In this embodiment, n=3, the three-stage gas buffer channel design not only reduces the number of gas flow controllers but also makes the torch device designed by the aerodynamic concept easier to maintain and maintain. In addition, the length of the strip-shaped blowtorch can be about 1-2 meters, and the pressure uniformity of the air outlet is very challenging to keep on the distance of 1-2 meters. The material for preparing the blast lamp can be aluminum alloy or titanium alloy, and part of the blast lamp can be high-purity quartz glass.
Reactant or fuel and oxygen material enter the gas diffusion structure through the material inlet and further enter n-level gas buffer diffusion cavities, each n-level gas buffer diffusion cavity comprises a flow dividing layer and n gas buffer channels, the flow dividing layer is of a three-dimensional cavity structure and can effectively diffuse gas molecules, wherein the volumes (228, 229, 230, 231, 232, 233, 234, 235, 236) of the first gas buffer channels of three gas buffer channels are larger than those of the second gas buffer channels (219, 220, 221, 222, 223, 224, 225, 226, 227) of the third gas buffer channels (210, 211, 212, 213, 214, 215, 216, 217, 218).
The OVD strip lamp apparatus includes a first strip lamp, a second strip lamp, a third strip lamp, a fourth strip lamp, and a fifth strip lamp arranged in parallel. Wherein the first strip torch comprises parts 232, 223, 214, 205, the silicon-based raw material vapor and oxygen gas mixture can sequentially pass through the parts 232, 223, 214, 205, and the proportion of the silicon-based raw material vapor and the oxygen gas mixture is controlled by a liquid flowmeter and a gas flowmeter which are arranged in a gas diffusion structure of the first strip torch; the fourth strip-shaped blowlamps are two, and each of the fourth strip-shaped blowlamps comprises parts 231, 222, 213 and 204 and parts 233, 224, 215 and 206, and inert gases such as argon can sequentially pass through the parts 231, 222, 213 and 204 and sequentially pass through the parts 233, 224, 215 and 206; the third strip burner is two and comprises parts 230, 220, 211, 203 and 234, 225, 216, 207 respectively, and internal oxygen can sequentially pass through parts 230, 220, 211, 203 and 234, 225, 216, 207; the second ribbon burner is two and includes components 229, 220, 211, 202 and components 235, 226, 217, 208, respectively, through which hydrogen or methane gas may pass sequentially through components 229, 220, 211, 202 and 235, 226, 217, 208.
After the silicon-based raw material and oxygen are mixed, the mixed gas passes through the primary secondary gas buffer channel body and the shunt diffusion layer to the tertiary gas buffer channel, the pressure of the gas on the same cross section is uniform, and finally the gas is uniformly sprayed out of the strip slit nozzle 205. The ribbon slit nozzles 202, 208 are configured to receive fuel gas such as hydrogen through three stages of gas buffer channels and three stages of split diffusion layers as described above, and ultimately react with oxygen to produce substantial amounts of heat and sufficient water vapor. The sprayed gaseous silicon tetrachloride and other reaction precursors generate loose particles through flame hydrolysis reaction (see formulas 1 and 2) and deposit the loose particles on a central target rod rotating at a certain speed. The inert gas such as argon gas sprayed from the strip slit nozzles 204 and 206 has the function of maintaining the track raw material from being disturbed, and protecting the loose gas flow from being deposited around the slit 205, and the oxygen gas sprayed from the strip slit nozzles 201 and 209 is used as a reactant of fuel gas and can protect the flame from being disturbed by the change of the external environment gas flow.
Hydrolysis reaction:
formula 1: siCl 4 +O 2 +2H 2 ＝SiO 2 +4HCl
Formula 2: geCl 4 +O 2 +2H 2 ＝GeO 2 +4HCl
Fig. 5 shows a top plan view of the band slit nozzles 201, 202, 203, 204, 205, 206, 207, 208 and 209. The length of the blast lamp can be selected according to the effective length of the core rod, so that the problems of high water peak and the like caused by rod connection are avoided.
Fig. 4 is another embodiment of the present technology, which optimizes the details of the burner and adds a cooling fluid channel for protecting the temperature of the burner, wherein the circulation channels 311, 313, 315, 317, 319, 321, 323, 325, 327 can be constant temperature circulating water or other constant temperature cooling fluid, and the constant temperature cooling fluid can keep the burner body in a proper temperature range, so as to prevent the flame uniformity from being deteriorated due to slit deformation caused by the rapid increase of the long-time working temperature of the burner. The stability of the air inlet of the optimized blowtorch is superior to that of the blowtorch, the self-adjusting function is achieved, and the gas buffering channel is more convenient for practical operation.
Fig. 6 shows further optimized torch surfaces with the relative positions and angles of the ribbon slit nozzles 204, 205, 206 maintained, and the ribbon slit nozzles 201, 202, 203, 207, 208, 209 respectively being offset from the center line by a relative angle of about 2-8 °, such channel designs would produce converging flames that would facilitate hydrolysis reactions, resulting in undispersed bulk fluid that would tend to be ineffective for deposition on a rotating target rod due to temperature dip without tackiness. After optimization, constant temperature cooling liquid channels 510 and 511 are further added, so that the blowtorch can work in a reasonable temperature range (110-200 ℃).
The burner device is applied to a horizontal OVD method for preparing an optical fiber preform, as shown in FIG. 7, which is a schematic diagram of a rod preparation platform, and comprises a burner device 604, a target rod transmission and weight testing system 603, an air exhausting system 601, a control feedback system 608, a movable CCD camera 605, an infrared temperature sensing sensor 606 and a material gas pipeline 607, wherein the material gas pipeline 607 is a material gas source of each strip slit nozzle of the burner, and the multi-pipeline supply can adjust the flame uniformity through feedback.
Firstly, a preset rod program is input into a control feedback system, a strip-shaped torch generates uniform strip-shaped flame, and reaction precursors such as silicon tetrachloride and the like are subjected to high-temperature flame hydrolysis reaction (see hydrolysis reaction formulas 1 and 2) to obtain white loose silicon dioxide with a certain temperature, and the white loose silicon dioxide is sprayed on a rotating central target rod 602. The exhaust system control 601 keeps the relative pressure difference of the reaction cavity (not shown in the figure) between-600 and-1400 pa, and a CCD high-speed photographic instrument 605 and an infrared temperature sensing sensor 606 are embedded on one side of the blast lamp.
When no abnormality occurs in the preform 5, the preform is operated according to a predetermined program, if a dimensional defect occurs in the preform, the control feedback system 608 adjusts the feed amount, the air intake amount, and the exhaust air to fine-tune the apparent dimensions, and the infrared temperature sensing sensor 606 scans the temperature of the spray point of the preform at all times, and fine-tunes the flame size by changing the air intake amount once a temperature difference exceeds an allowable error range occurs.
The ribbon-shaped blowtorch and the combined feedback system of size, temperature and the like can prepare the optical fiber preform with uniform outer diameter and large size. The length of the blast lamp is equal to that of the prefabricated rod, so that the blast lamp does not need to be moved, and the scrapping of two ends caused by moving the blast lamp back and forth is reduced.
The present invention is not limited to the above-mentioned embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present invention are intended to be included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (7)
1. The OVD strip-shaped blowlamp device is characterized by comprising a first strip-shaped blowlamp, a second strip-shaped blowlamp and a third strip-shaped blowlamp, wherein the first strip-shaped blowlamp, the second strip-shaped blowlamp and the third strip-shaped blowlamp are arranged in parallel and are used for spraying raw material mixed gas, the first strip-shaped blowlamp, the second strip-shaped blowlamp and the third strip-shaped blowlamp respectively comprise strip-shaped slit nozzles and gas diffusion structures which are mutually communicated, the tail ends of the gas diffusion structures are communicated with corresponding gas sources, n-level gas buffer diffusion cavities are arranged in the middle of the gas diffusion structures, and the n-level gas buffer diffusion cavities are used for enabling the gas pressure in each strip-shaped blowlamp to be uniform during operation, wherein n is more than or equal to 3;
the n-level gas buffer diffusion cavity comprises n gas buffer channels and a flow dividing layer used for communicating two adjacent gas buffer pipelines, the gas buffer channels and the flow dividing layer are alternately arranged in the height direction of the n-level gas diffusion cavity, the width of the gas buffer channels is larger than the thickness of the flow dividing layer, and the volumes of the n gas buffer channels are sequentially reduced along the direction from an air source to the strip slit nozzle;
the gas buffer channels are circular pipelines, and the diameters of the pipelines of the n gas buffer channels are sequentially reduced along the direction from the gas source to the strip slit nozzle;
the height of the gas buffer diffusion cavity is 1-2 meters, and n=3.
2. The OVD ribbon burner apparatus of claim 1, wherein,
the OVD strip-shaped blowlamp device further comprises a fourth strip-shaped blowlamp used for spraying barrier gas and a fifth strip-shaped blowlamp used for spraying oxygen, the number of the second strip-shaped blowlamp, the third strip-shaped blowlamp, the fourth strip-shaped blowlamp and the fifth strip-shaped blowlamp are two, and the arrangement sequence is a fifth strip-shaped blowlamp a, a second strip-shaped blowlamp a, a third strip-shaped blowlamp a, a fourth strip-shaped blowlamp a, a first strip-shaped blowlamp, a fourth strip-shaped blowlamp b, a third strip-shaped blowlamp b, a second strip-shaped blowlamp b and a fifth strip-shaped blowlamp b.
3. The OVD ribbon burner apparatus of claim 2, wherein,
the air outlet angles of the first strip-shaped blast lamp and the two fourth strip-shaped blast lamps are kept consistent, and the air outlet angles of the two third strip-shaped blast lamps, the two second strip-shaped blast lamps and the two fifth strip-shaped blast lamps are respectively deviated to the direction of the first strip-shaped blast lamp at relative angles of 2-8 degrees.
4. The OVD ribbon burner apparatus of claim 2, wherein,
the feedstock mixture gas includes a feedstock vapor including at least one of a silicon-based material vapor or a germanium-based material vapor, and an assist gas including at least one of hydrogen, methane, or oxygen, and the fuel gas includes hydrogen and methane, and the barrier gas includes an inert gas.
5. The OVD ribbon burner apparatus of claim 1, wherein,
the OVD strip-shaped blowtorch device further comprises a cooling liquid channel, and the cooling liquid channel is arranged at one side, close to the strip-shaped slit nozzle, between every two adjacent strip-shaped blowtorches.
6. An OVD rod making system comprising the OVD strip lamp apparatus according to any one of claims 1 to 5, characterized by comprising a reaction chamber, the OVD strip lamp apparatus, a target rod transmission and weight test system, an exhaust system for controlling pressure difference in the reaction chamber, a control feedback system, a movable camera, an infrared temperature sensor and a target rod, wherein the OVD strip lamp apparatus, the target rod transmission and weight test system, the movable camera, the infrared temperature sensor and the target rod are all located in the reaction chamber, and the movable camera and the infrared temperature sensor control and regulate raw material feeding amount and air inflow of the OVD strip lamp apparatus and exhaust amount of the exhaust system through the control feedback system, thereby controlling uniformity, shape and size of loose preforms.
7. A method of OVD rod making using the OVD rod making system of claim 6, comprising the steps of:
inputting a predetermined manufacturing program of the loose preform in the control feedback system;
the strip-shaped blast lamp generates uniform strip-shaped flame, the reaction precursor generates high-temperature flame hydrolysis reaction to obtain white powdery silicon dioxide, and the white powdery silicon dioxide is sprayed on the rotating central target rod;
the infrared temperature sensing sensor scans the temperature of the spraying point of the loose preform at any time, and when the difference between the temperature and the control temperature exceeds the allowable error range, the flame size is finely adjusted by changing the air inflow;
the movable camera scans the appearance of the loose preform at all times, and when the differences between the size and uniformity of the preform and the preset size exceed the allowable error range, the appearance of the preform is finely tuned by changing the feed amount and the air inflow.
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| CN110342808B (en) * | 2019-07-15 | 2021-09-21 | 富通集团（嘉善）通信技术有限公司 | Manufacturing process of optical fiber preform |
| CN111517633B (en) * | 2020-04-27 | 2024-07-23 | 通鼎互联信息股份有限公司 | Use method of high-speed deposition device for overcladding loose body of optical fiber preform |
| CN112624599A (en) * | 2020-12-07 | 2021-04-09 | 江苏亨通光导新材料有限公司 | Control device and control method for uniform density of multi-deposition blowtorch |
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| CN113248133B (en) * | 2021-05-31 | 2021-09-17 | 中天科技精密材料有限公司 | Optical fiber preform manufacturing equipment and manufacturing method of optical fiber preform using same |
| CN116081938B (en) * | 2023-02-17 | 2024-08-20 | 长飞光纤光缆股份有限公司 | Blowtorch for external vapor deposition method |
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