CN107999967B - A kind of large-scale three dimensional piece surface parallel laser lithography method and apparatus - Google Patents
A kind of large-scale three dimensional piece surface parallel laser lithography method and apparatus Download PDFInfo
- Publication number
- CN107999967B CN107999967B CN201711232827.5A CN201711232827A CN107999967B CN 107999967 B CN107999967 B CN 107999967B CN 201711232827 A CN201711232827 A CN 201711232827A CN 107999967 B CN107999967 B CN 107999967B
- Authority
- CN
- China
- Prior art keywords
- laser
- robot
- lithography
- scanning
- laser galvanometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001459 lithography Methods 0.000 title claims abstract description 124
- 238000000034 method Methods 0.000 title claims abstract description 25
- 238000012545 processing Methods 0.000 claims abstract description 46
- 238000003754 machining Methods 0.000 claims abstract description 19
- 239000012634 fragment Substances 0.000 claims abstract description 4
- 230000008569 process Effects 0.000 claims description 11
- 238000004458 analytical method Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 6
- 238000005457 optimization Methods 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 4
- 238000013499 data model Methods 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000000608 laser ablation Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000013307 optical fiber Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 238000010329 laser etching Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
- B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/361—Removing material for deburring or mechanical trimming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a kind of large-scale three dimensional piece surface parallel laser lithography method and apparatus, belong to industrial robot and laser galvanometer scanning manufacture field.Parallel laser lithography method provided by the invention, by the way that large-scale three dimensional piece surface is divided into multiple machining areas, each machining area distributes to a laser galvanometer scanning lithography robot in parallel laser lithography device, to realize the positioning of large-scale three dimensional piece surface fragment, subregion vibration mirror scanning high-precision parallel laser lithography.Device provided by the invention includes multiple laser galvanometer scanning lithographies robot and laser parallel lithography CAM system.The present invention, which is realized, can significantly improve the laser ablation processing efficiency of large-scale three dimensional piece surface in the case where taking into account machining accuracy to the high-precision parallel laser vibration mirror scanning lithography of large-scale three dimensional piece surface.
Description
Technical field
It is the invention belongs to industrial robot in advanced manufacturing field and field of laser processing, in particular to a kind of using multiple
The method and apparatus of laser galvanometer scanning lithography robot progress large-scale three dimensional piece surface parallel laser lithography.
Background technique
Laser advanced manufacturing technology has the characteristics that non-contact, high energy beam, mirror deflection scanning machining, by laser technology
The multi-axis NC Machine Tools or industrial robot being widely used with traditional field of machining combine can realize it is big
The three-dimensional laser processing system of scale complex workpiece surface.
Application No. is 201710029392 application for a patent for invention " the FSS radomes based on multiple degrees of freedom laser robot
Processing method and device ", by the way that optical fibre laser head to be installed to the end of industrial robot, using the included control of industrial robot
System control machine device people's three-dimensional motion processed, delivery fiber laser beam are realized to large scale 3 D workpiece surface FSS cellular construction
Laser ablation processing.The patent of invention " multirobot optical-fiber laser diced system " of application number 201310447904.4 devises one
Multirobot three-dimensional fiber laser cutting system of the kind with global trinocular vision positioning device, they are industrial by multiple six degree of freedoms
Robot handstand is installed on gantry frame, and a laser cutting head is installed on each robot end's hand.It is above-mentioned this kind of
Three-dimensional laser processing system based on industrial robot, hardware configuration is relatively simple, and control system is included using industrial robot
System, software and hardware is integrated to be easily achieved.It is disadvantageous in that, due to not using high-velocity scanning galvanometer device, process velocity is only
It is to be determined by robotic movement velocity, does not play the high efficiency advantage of laser galvanometer high speed deflection scanning processing.
A kind of patent of invention " mirror-vibrating laser three-dimensional scanning system " of Patent No. 200810197661.2, laser is shaken
Mirror, which is fixed in Z axis mobile mechanism, realizes laser spot in the flexible modulation of Z axis position, Lai Shixian vibration mirror scanning laser three-D
Three-dimension process.Chinese invention patent " the projection-type laser on a kind of free form surface that number of patent application is 201010115968.0
Lithographic method " devises tripleplane's formula laser etching system of+two axis of three axis numerically controlled machine deflection galvanometer, in data processing
When curve surface of workpiece projected to horizontal plane and then carry out layering processing, pass through the XYZ space that three axis numerically controlled machine adjusts laser head
Position navigates to each layer, and then vibration mirror scanning laser machines." one kind is applicable in the patent of invention of 102151984 A of Publication No. CN
In complex-curved laser processing and device ", devise the three coordinate laser incisings with standard numerically-controlled machine tool broaching tool interface
It loses processing head (including two axis laser galvanometers and Z axis), which is installed to the mark of 5-shaft linkage numerical control lathe
On quasi- broaching tool tool apron, become a standard cutter of five-axis machine tool, it may be convenient to be loaded on five-axis machine tool and complete to complexity
The 3D laser surface texture lithography of free form surface.
Currently, the 3 D complex curved surface laser ablation processing scheme based on vibration mirror scanning, is confined to shake using single laser
Scarnning mirror processing head is combined with multi-axis NC Machine Tools or industrial robot carries out complex-curved scanning plasma etching, and reason is
More cross discipline technologies such as system hardware structure is complicated, is related to Light Electrical software, spatial movement be combined with multi-spindle machining movement and
Optical scanner campaign, CAM software design development difficulty are big etc., current system still remained when processing large-scale three dimensional part plus
The long lower problem of efficiency between working hour.
Therefore, limit to for the needs and existing scheme of the processing of large-scale three dimensional piece surface laser ablation, need to develop one
Kind realizes the method and system of parallel laser scanning plasma etching using more laser galvanometer scanning lithographies robot.
Summary of the invention
The limitation of needs and the prior art for application, the present invention provides a kind of large-scale three dimensional piece surfaces to swash parallel
Photoengraving processing method and device, by using the robot cooperated realization large-scale three dimensional zero of multiple laser galvanometer scanning lithographies
Part surface parallel laser galvanometer lithography, can combine machining accuracy and processing efficiency, can really in engineering practice
Using.
To achieve the above object, according to one aspect of the present invention, a kind of 3 d part surface parallel laser quarter is provided
Lose processing method comprising following steps:
S1: multiple laser galvanometer scanning lithographies robot being arranged in around large-scale three dimensional part to be processed, more
The arrangement of a laser galvanometer scanning lithography robot meets following condition: laser galvanometer scanning lithography robot
Machining area combination be able to achieve all standing to large-scale three dimensional part work surface；
S2: according to each laser galvanometer scanning lithography processing of robots region by 3 d part work surface CAD
Model partition is located at a laser galvanometer scanning lithography processing of robots at multiple sections to be processed, each section to be processed
In range；
S3: measuring the anchor point on workpiece by laser galvanometer scanning lithography robot measuring tool, shakes in laser
Centering workpiece in scarnning mirror lithography robot coordinate system realizes the fragment positioning of processing curve；
S4: according to the 3 d part surface to be processed section of each laser galvanometer scanning lithography robot distribution
CAD digital-to-analogue and the anchor point in laser galvanometer scanning lithography robot coordinate system, analysis processing is each in CAM system swashs
Light vibration mirror scanning lithography robot work surface section curved surface data, work surface section is divided into again multiple
Smaller area, when guaranteeing that industrial robot is navigated to above each smaller area, laser galvanometer can be to the smaller area
Domain carries out complete lithography；
S5: according to step S4 generate each laser galvanometer scanning lithography processing of robots section on it is unprocessed more
Zonule calculates and generates laser galvanometer scanning lithography robot motion path and laser galvanometer scanning path, synchronous to carry out
Between laser galvanometer scanning lithography robot and between laser galvanometer scanning lithography robot and parts to be processed
The inspection of interference and collision and path optimization；
S6: according to the laser galvanometer scanning lithography robot motion path of acquisition, CAM system sends instructions to each
Robot control system, control robot deliver laser galvanometer scanning head to the smaller area to be processed on predetermined parts to be processed surface
Above domain；
S7: according to each laser galvanometer scanning lithography robot vibration mirror scanning machining path of acquisition, CAM system hair
It send to instruct and completes to add the parallel laser etching of the smaller area set on respective processing section to each laser galvanometer scanning head
Work；
S8: being repeated in step S4 and S7, until completing the process adding for each laser galvanometer scanning lithography robot
Work section.
The second aspect according to the invention provides a kind of 3 d part surface parallel laser lithography device,
Including multiple laser galvanometer scanning lithographies robot and a set of parallel laser lithography CAM system.
Further, each laser galvanometer scanning lithography robot is installed to one by a laser galvanometer scanning head
The end of the last joint arm of a industrial robot forms, multiple laser galvanometer scanning lithography Robots it is to be processed three
Part periphery arrangement is tieed up, so that the robot combined completion of multiple laser galvanometer scanning lithographies is to all standing of 3 d part surface
Processing.
Further, for industrial robot using rotation multi-joint industrial robot, amount of articulation is usually 5 or 6, empty
Between positioning accuracy reach um grades tens of.
Further, in the device of the invention and system, laser galvanometer scanning lithography robot number can basis
The size of processing part is adjusted, can be for 2,3,4,5 or more, multiple laser galvanometer scanning lithographies
Robot is combined with each other, so that machining area all standing 3 d part surface.
Further, laser galvanometer scanning head is matched using XY galvanometer, XY galvanometer cooperation Z axis dynamic focusing, XY galvanometer
One or more of Z axis motor vibration mirror scanning is closed, laser scanning positioning accuracy reaches um grades.
Further, powerful optical-fiber laser can imported into laser galvanometer etching head, miniature laser using optical fiber
It can be integrated with vibration mirror scanning head, reduce laser galvanometer etching head and external optical delivery connector, it can maximum limit
The Three-dimension process that degree plays multi-axis industrial robot is flexible.
Further, the spatial positioning accuracy of laser galvanometer scanning lithography robot is micro scale.
Further, parallel laser lithography CAM system is for controlling laser galvanometer scanning lithography robot.It should
It is connected between the control system that CAM system and industrial robot carry by data communication route, can be controlled by CAM system
Industrial robot, includes laser and galvanometer on laser galvanometer scanning head, and laser and galvanometer have with CAM system electrical respectively
Connection, can control laser galvanometer scanning head by CAM system, CAM system adds for realizing multiple laser galvanometer scannings etching
Work machine person cooperative work, to realize that the robot combined completion of multiple laser galvanometer scanning lithographies is complete to 3 d part surface
Covering processing.
Further, CAM system is also used to complete the analysis processing of curved surface three-dimensional data model to be processed, generates robot
Motion path and vibration mirror scanning lithography path, and the laser scanning completed to motion planning and robot control and vibration mirror scanning head is carved
Lose machining control.
Further, all laser scanning lithographies robot configures the same CAM system.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, can obtain down and show
Beneficial effect:
1, large-scale three dimensional part is realized using multiple laser galvanometer scanning lithographies robot the present invention provides a kind of
Surface parallel laser galvanometer lithography method and apparatus, by the way that multiple laser galvanometer scanning lithography Robots are to be added
The 3 d part periphery of work arranges that each laser galvanometer scanning lithography robot is responsible for processing the 3 d part in the orientation
Large-scale three dimensional parts list is realized positioned at multiple laser galvanometer scanning lithography machine person cooperative works of different direction in surface
The positioning of face fragment, Paralleled laser galvanometer lithography can significantly improve laser ablation in the case where guaranteeing machining accuracy
Processing efficiency.
2, a kind of large-scale three dimensional piece surface parallel laser galvanometer lithography device provided by the invention includes unified
CAM control system, function include: the analysis processing of large-scale three dimensional piece surface CAD data model, generate every group of industrial machine
People's motion path and laser galvanometer etch scan path, interference checking and path optimization；Pass through CAM system integrated control multiple groups work
Complex-curved laser galvanometer high-velocity scanning is completed in the parallel three-dimensional space motion of industry robot, control laser galvanometer etching head collaboration
Parallel lithography.CAM system not only may be implemented the Data Analysis Services of model but also can complete more set industrial robots and swash
Light vibration mirror scanning head isomery motion control has the function of higher level of integrated system, friendliness interface and perfect.
Detailed description of the invention
Fig. 1 large-scale three dimensional piece surface parallel laser lithography apparatus structure schematic diagram；
The single laser galvanometer scanning lithography robot architecture's schematic diagram of Fig. 2.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
The present invention provides a kind of method and apparatus of large-scale three dimensional piece surface parallel laser vibration mirror scanning lithography,
Central idea is arranged in multiple laser galvanometer scanning lithographies robot around large-scale three dimensional part to be processed, connection
Machining area is closed to realize to all standing of 3 d part surface.Each laser vibration is generated by laser parallel lithography CAM system
The motion path of scarnning mirror lithography robot and laser scanning etch path, and carry out interference checking and path optimization, so
Control laser galvanometer scanning lithography robot carries out parallel laser scanning plasma etching to 3 d part surface afterwards.
It is further described in detail with reference to the accompanying drawing.
Fig. 1 is the structural schematic diagram of the medium-and-large-sized 3 d part surface parallel laser lithography device of the embodiment of the present invention,
As shown in Figure 1, parallel laser vibration mirror scanning lithography device includes two laser galvanometer scanning lithography robots.Each
Laser galvanometer scanning lithography robot is by industrial robot (1 and 2 be respectively the first, second industrial robot in Fig. 1)
(3 and 4 be respectively first, the in Fig. 1 with the laser galvanometer scanning head that is mounted on the last one joint end of each industrial robot
Dual-laser vibration mirror scanning head) it constitutes.5,6 the first, second control system carried for industrial robot in Fig. 1,7 is simultaneously in Fig. 1
Row laser processing CAM system, sweeps with industrial robot the first, second control system 5 and 6 and the first, second laser galvanometer
Retouch first 3 has Communication Control to connect with 4.Each laser galvanometer scanning lithography robot is arranged in large-scale three dimensional to be processed
One orientation of part (in Fig. 1 shown in 8) is responsible for processing the 3 d part surface in the orientation.
CAM system sends instructions to industrial robot control system, and control industrial robot delivers laser galvanometer scanning head
3 d part surface is moved to, CAM system retransmits instruction and carries out laser scanning lithography to vibration mirror scanning head.It is multiple
The concurrent working of laser galvanometer scanning lithography robot can significantly improve the laser ablation processing effect of large-scale three dimensional piece surface
Rate.
Fig. 2 is the schematic diagram of single laser galvanometer scanning lithography robot in the embodiment of the present invention, as seen from the figure, figure
1 is industrial robot in 2, which is made of five rotary joint arms, and five rotary joint arms are respectively first, the
Two, third, the 4th and the 5th rotary joint arm J1, J2, J3, J4, J5, some industrial robots further include the 6th joint,
It is not drawn into Fig. 2.3 be laser galvanometer scanning head in Fig. 2, and laser galvanometer scanning head 3 includes scanning galvanometer 9 and optical fiber laser
10, the end of the 5th rotary joint arm J5 of industrial robot is assembled to by connecting rod 12.11 be laser galvanometer scanning head in Fig. 2
Electrical control signal line is connect by the electric wiring in joint arm with parallel laser Processing CAM system 7.
CAM system 7 carries control system 5 with industrial robot, and there is Communication Control to connect.13 shake in Fig. 2 for shown laser
The 3 d part surface section of scarnning mirror lithography processing of robots is CAM system according to the processing of robots coverage
It divides.14 be that can only to process breadth a spatial position according to laser scanning galvanometer (usually tens of squares smaller in Fig. 2
Centimetre) region the characteristics of, the zonule that section is divided into again, when industrial robot navigates to above the zonule, galvanometer
Complete lithography can be carried out to the zonule.
Multiple laser galvanometer scanning lithographies robot carries out large-scale three dimensional piece surface parallel laser lithography
Detailed step is as follows:
S1: multiple laser galvanometer scanning lithographies robot is arranged in around large-scale three dimensional part to be processed (such as
Shown in Fig. 1), the machining area combination of laser galvanometer scanning lithography robot must be realized to be processed to large-scale three dimensional part
The all standing on surface.
S2: according to each laser galvanometer scanning lithography processing of robots region by 3 d part work surface CAD
Model partition is located at a laser galvanometer scanning lithography processing of robots at multiple sections to be processed, each section to be processed
In range, as shown in 13 in Fig. 2.
S3: by laser galvanometer scanning lithography robot measuring tool, (contact probe or non-contact machine are regarded
Feel etc.) measurement workpiece on discrete location point, the centering workpiece in each laser galvanometer scanning lithography robot coordinate system.
S4: analysis handles each laser galvanometer scanning lithography robot coordinate system in CAM system (in Fig. 2 shown in 7)
Lower work surface section curved surface data, according to laser scanning galvanometer a spatial position can only process breadth it is smaller (usually
For several dozen square centimeters) region the characteristics of, section is divided into again multiple zonules (in Fig. 2 shown in 14), guarantee industrial machine
When device people is navigated to above each zonule, galvanometer can carry out complete lithography to the zonule.
S5: unprocessed cell on each laser galvanometer scanning lithography processing of robots section that selection S4 is generated
Domain calculates and generates laser galvanometer scanning lithography robot motion path and laser galvanometer scanning path, synchronous to carry out laser
Interference and collision between vibration mirror scanning lithography robot and between laser galvanometer scanning lithography robot and workpiece
Inspection and path optimization.
S6: according to the laser galvanometer scanning lithography robot motion path of acquisition, CAM system 7 sends instructions to machine
The control system (in Fig. 2 shown in 5) that device people carries, control robot (in Fig. 2 shown in 2) delivery galvanometer etching head (3 institute in Fig. 2
Show) it arrives above predetermined workpiece surface zonule to be processed (in Fig. 2 shown in 14).
S7: according to each laser galvanometer scanning lithography robot vibration mirror scanning machining path of acquisition, CAM system
(in Fig. 2 shown in 7) is sent instructions to laser galvanometer scanning head (in Fig. 2 shown in 3), and the cell set on section is processed in completion to it
The processing in domain (in Fig. 2 shown in 14).
S8: being repeated in step S5 and S7, until completing the process adding for each laser galvanometer scanning lithography robot
Work section.
The present invention is not limited solely to above-mentioned specific embodiment, such as can be each laser scanning lithography machine
People configures a CAM system, in another example generation robot motion path and vibration mirror scanning machining path can be offline before processing
It completes.These possible different embodiments only change the form of expression of some steps in the method for the present invention, but do not depart from
The substantive core category of parallel laser lithography method proposed by the present invention.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (6)
1. a kind of large-scale three dimensional piece surface parallel laser lithography method, which comprises the following steps:
S1: multiple laser galvanometer scanning lithographies robot being arranged in around large-scale three dimensional part to be processed, multiple to swash
The arrangement of light vibration mirror scanning lithography robot meets following condition: laser galvanometer scanning lithography robot adds
The combination of work area domain is able to achieve all standing to large-scale three dimensional part work surface；
S2: according to each laser galvanometer scanning lithography processing of robots region by 3 d part work surface CAD model
Multiple sections to be processed are divided into, each section to be processed is located at a laser galvanometer scanning lithography processing of robots range
It is interior；
S3: it is measured by each laser galvanometer scanning lithography robot measuring tool and is distributed in determining for each section on workpiece
Processing curve is realized in site, the centering workpiece work surface section in laser galvanometer scanning lithography robot coordinate system
Fragment positioning；
S4: according to the CAD number of the 3 d part surface to be processed section of each laser galvanometer scanning lithography robot distribution
Mould and the anchor point in laser galvanometer scanning lithography robot coordinate system, analysis handles each laser vibration in CAM system
Scarnning mirror lithography robot work surface section curved surface data, work surface section is divided into again multiple smaller
Region, when guaranteeing that industrial robot is navigated to above each smaller area, laser galvanometer can to the smaller area into
The complete lithography of row；
S5: unprocessed smaller area on each laser galvanometer scanning lithography processing of robots section generated according to step S4
Domain calculates and generates laser galvanometer scanning lithography robot motion path and laser galvanometer scanning path, synchronous to carry out laser
It is collided between vibration mirror scanning lithography robot and between laser galvanometer scanning lithography robot and parts to be processed
The inspection of interference and path optimization；
S6: according to the laser galvanometer scanning lithography robot motion path of acquisition, CAM system sends instructions to each machine
People's control system, control robot deliver on laser galvanometer scanning head to the smaller area to be processed on predetermined parts to be processed surface
Side；
S7: according to each laser galvanometer scanning lithography robot vibration mirror scanning machining path of acquisition, CAM system transmission refers to
Enable the parallel laser processing for completing to process it smaller area set on section to each laser galvanometer scanning head；
S8: being repeated in step S5 and S7, the processing piece until completing the process each laser galvanometer scanning lithography robot
Area.
2. a kind of 3 d part surface parallel laser lithography device for realizing method as described in claim 1, feature exist
In comprising multiple laser galvanometer scanning lithographies robot, each laser galvanometer scanning lithography robot is by one
A laser galvanometer scanning head is installed to the end composition of the last joint arm an of industrial robot, and multiple laser galvanometer scannings are carved
It loses machining robot to arrange along 3 d part periphery to be processed, so that multiple laser galvanometer scanning lithographies are robot combined
It completes to process all standing of 3 d part surface,
It further includes a large-scale three dimensional piece surface parallel laser lithography CAM system, and the CAM system is for playing control
Effect,
It is connected between the control system that the CAM system and industrial robot carry by data communication route, CAM system can be passed through
System control industrial robot,
It include laser and galvanometer on laser galvanometer scanning head, laser and galvanometer have electrical connection with CAM system respectively, with
Laser galvanometer scanning head can be controlled by CAM system,
CAM system is also used to realize multiple laser galvanometer scanning lithography machine person cooperative works, to realize multiple laser vibrations
Scarnning mirror lithography is robot combined to be completed to process all standing of 3 d part surface.
3. a kind of 3 d part surface parallel laser lithography device as claimed in claim 2, which is characterized in that industrial machine
Device artificially rotates multi-joint industrial robot, and amount of articulation is usually 5 or 6, and spatial positioning accuracy reaches um grades.
4. a kind of 3 d part surface parallel laser lithography device as claimed in claim 2, which is characterized in that laser vibration
Scarnning mirror head using XY galvanometer, XY galvanometer cooperation Z axis dynamic focusing, XY galvanometer cooperation one of Z axis motor vibration mirror scanning or
Person is a variety of.
5. a kind of 3 d part surface parallel laser lithography device as claimed in claim 4, which is characterized in that CAM system
System is also used to complete the analysis processing of curved surface three-dimensional data model to be processed, generates robot motion path and vibration mirror scanning etching
Machining path, and complete to control the laser scanning lithography of motion planning and robot control and vibration mirror scanning head.
6. a kind of 3 d part surface parallel laser lithography device as claimed in claim 4, which is characterized in that all to swash
Optical scanning lithography robot is controlled by the same CAM system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711232827.5A CN107999967B (en) | 2017-11-30 | 2017-11-30 | A kind of large-scale three dimensional piece surface parallel laser lithography method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711232827.5A CN107999967B (en) | 2017-11-30 | 2017-11-30 | A kind of large-scale three dimensional piece surface parallel laser lithography method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107999967A CN107999967A (en) | 2018-05-08 |
| CN107999967B true CN107999967B (en) | 2019-05-31 |
Family
ID=62055048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711232827.5A Active CN107999967B (en) | 2017-11-30 | 2017-11-30 | A kind of large-scale three dimensional piece surface parallel laser lithography method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107999967B (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7097984B2 (en) * | 2018-09-28 | 2022-07-08 | 株式会社牧野フライス製作所 | Laser processing machine |
| CN109108459A (en) * | 2018-10-18 | 2019-01-01 | 深圳市斯普莱特激光科技有限公司 | A kind of high degree of safety automatized three-dimensional laser process equipment |
| CN112719606A (en) * | 2020-12-10 | 2021-04-30 | 苏州铁人光学技术有限公司 | Layered processing technology of laser equipment |
| CN112743238A (en) * | 2020-12-10 | 2021-05-04 | 苏州铁人光学技术有限公司 | Technological method of texture embossing imprinter |
| EP4056309A1 (en) * | 2021-03-09 | 2022-09-14 | Bystronic Laser AG | Device and method for laser cutting a workpiece and producing workpiece parts |
| CN112666703B (en) * | 2021-03-18 | 2021-06-04 | 光量信息科技(宁波)有限公司 | Space curve joint positioning projection system and method based on multiple laser galvanometers |
| CN113791528B (en) * | 2021-10-21 | 2023-11-03 | 深圳大学 | Robot-based lithography apparatus and lithography method |
| CN114871585A (en) * | 2022-05-13 | 2022-08-09 | 南京航空航天大学 | A device and method for manufacturing a multi-laser coupled three-dimensional complex curved multi-scale structure |
| CN114939727A (en) * | 2022-05-23 | 2022-08-26 | 蔚来汽车科技(安徽)有限公司 | Laser surface treatment method and laser surface treatment station |
| US20230415272A1 (en) * | 2022-06-28 | 2023-12-28 | General Electric Company | System and method for forming slots in a coating present on a component |
| CN115647597A (en) * | 2022-10-26 | 2023-01-31 | 苏州迈为科技股份有限公司 | Laser etching device and laser etching method for display panel |
| CN116174915A (en) * | 2022-12-30 | 2023-05-30 | 南昌华勤电子科技有限公司 | Batch laser engraving method and system for multi-task workpieces |
| CN116038103B (en) * | 2023-01-17 | 2024-11-26 | 长沙昆仑精密科技有限公司 | A free-form surface multi-laser processing platform collaborative processing device and method |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5402364A (en) * | 1993-01-15 | 1995-03-28 | Sanyo Machine Works, Ltd. | Three dimensional measuring apparatus |
| JP2004046542A (en) * | 2002-07-11 | 2004-02-12 | Mitsubishi Heavy Ind Ltd | Model working method and model working system |
| KR20050058084A (en) * | 2003-12-11 | 2005-06-16 | 주식회사 제이엠피 | Recognition method of mold die shape |
| JP2007249281A (en) * | 2006-03-13 | 2007-09-27 | Mitsubishi Electric Corp | Cad/cam device, program for cad/cam device and cad/cam data editing method |
| CN101786200A (en) * | 2010-02-26 | 2010-07-28 | 华中科技大学 | Method for projection-type laser etching on free curved surface |
| CN101992582A (en) * | 2010-08-21 | 2011-03-30 | 大连交通大学 | Cooperative machining method for large sandwich component |
| CN102126082A (en) * | 2010-12-24 | 2011-07-20 | 陈乃奇 | Laser exposure cutter and laser-based three-dimensional direct exposure imaging method |
| JP2015208758A (en) * | 2014-04-25 | 2015-11-24 | 三菱電機株式会社 | Method of manufacturing sheet metal structure, and sheet metal structure |
| CN105354880A (en) * | 2015-10-15 | 2016-02-24 | 东南大学 | Line laser scanning-based sand blasting robot automatic path generation method |
| EP2998809A1 (en) * | 2013-05-15 | 2016-03-23 | Amada Holdings Co., Ltd. | Laser processing method and laser processing program creation device |
| JP5912499B2 (en) * | 2011-12-19 | 2016-04-27 | 株式会社 セントラルファインツール | Manufacturing method of mold for resin molding |
| CN105904097A (en) * | 2016-07-05 | 2016-08-31 | 深圳信息职业技术学院 | Method for engraving calligraphies and paintings on carriers by laser on basis of three-dimensional curved surfaces |
| CN106625657A (en) * | 2015-10-28 | 2017-05-10 | 发那科株式会社 | Robot system connecting CNC and robot controller through communication network |
| CN106997156A (en) * | 2017-03-27 | 2017-08-01 | 深圳市优盛科技有限公司 | The exposure method of high-precision line pattern is prepared on high radian 3 D stereo |
| CN206415882U (en) * | 2016-10-31 | 2017-08-18 | 华中科技大学 | A kind of increase and decrease material composite manufacture device of large format parts |
-
2017
- 2017-11-30 CN CN201711232827.5A patent/CN107999967B/en active Active
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5402364A (en) * | 1993-01-15 | 1995-03-28 | Sanyo Machine Works, Ltd. | Three dimensional measuring apparatus |
| JP2004046542A (en) * | 2002-07-11 | 2004-02-12 | Mitsubishi Heavy Ind Ltd | Model working method and model working system |
| KR20050058084A (en) * | 2003-12-11 | 2005-06-16 | 주식회사 제이엠피 | Recognition method of mold die shape |
| JP2007249281A (en) * | 2006-03-13 | 2007-09-27 | Mitsubishi Electric Corp | Cad/cam device, program for cad/cam device and cad/cam data editing method |
| CN101786200A (en) * | 2010-02-26 | 2010-07-28 | 华中科技大学 | Method for projection-type laser etching on free curved surface |
| CN101992582A (en) * | 2010-08-21 | 2011-03-30 | 大连交通大学 | Cooperative machining method for large sandwich component |
| CN102126082A (en) * | 2010-12-24 | 2011-07-20 | 陈乃奇 | Laser exposure cutter and laser-based three-dimensional direct exposure imaging method |
| JP5912499B2 (en) * | 2011-12-19 | 2016-04-27 | 株式会社 セントラルファインツール | Manufacturing method of mold for resin molding |
| EP2998809A1 (en) * | 2013-05-15 | 2016-03-23 | Amada Holdings Co., Ltd. | Laser processing method and laser processing program creation device |
| JP2015208758A (en) * | 2014-04-25 | 2015-11-24 | 三菱電機株式会社 | Method of manufacturing sheet metal structure, and sheet metal structure |
| CN105354880A (en) * | 2015-10-15 | 2016-02-24 | 东南大学 | Line laser scanning-based sand blasting robot automatic path generation method |
| CN106625657A (en) * | 2015-10-28 | 2017-05-10 | 发那科株式会社 | Robot system connecting CNC and robot controller through communication network |
| CN105904097A (en) * | 2016-07-05 | 2016-08-31 | 深圳信息职业技术学院 | Method for engraving calligraphies and paintings on carriers by laser on basis of three-dimensional curved surfaces |
| CN206415882U (en) * | 2016-10-31 | 2017-08-18 | 华中科技大学 | A kind of increase and decrease material composite manufacture device of large format parts |
| CN106997156A (en) * | 2017-03-27 | 2017-08-01 | 深圳市优盛科技有限公司 | The exposure method of high-precision line pattern is prepared on high radian 3 D stereo |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107999967A (en) | 2018-05-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107999967B (en) | A kind of large-scale three dimensional piece surface parallel laser lithography method and apparatus | |
| CN107824960B (en) | A kind of three-dimensional laser processing network system realization based on Five-axis numerical control milling machine | |
| CN108286949B (en) | Movable three-dimensional detection robot system | |
| CN108838551B (en) | A three-dimensional surface laser etching method | |
| Mineo et al. | Robotic path planning for non-destructive testing–A custom MATLAB toolbox approach | |
| CN101786200B (en) | Method for projection-type laser etching on free curved surface | |
| JP4083554B2 (en) | 3D model data generator | |
| CN105806251A (en) | Four-axis measuring system based on line laser sensor and measuring method thereof | |
| CN114460904B (en) | Digital twin system for gantry robot | |
| CN102151984A (en) | Laser machining method and device applicable for complicated curved surface | |
| CN102451953A (en) | Multi-functional laser processing manufacturing system | |
| KR20180093668A (en) | Apparatus for controlling laser scanner for working on 3d large-area continuously | |
| CN113427133A (en) | Laser equipment and method for guiding automatic processing based on three-dimensional vision online measurement | |
| CN109849019A (en) | A kind of multirobot processing method for turning round class formation part | |
| CN107097122A (en) | A kind of robot for independently grinding large-scale free form surface | |
| Suh et al. | Multiaxis machining with additional-axis NC system: theory and development | |
| CN204584869U (en) | Processing equipment for curved parts | |
| CN101362513A (en) | Cooperative control method for aircraft component pose adjustment based on three locators | |
| Zhang et al. | Online adaptive measurement and adjustment for flexible part during high precision drilling process | |
| CN109877851A (en) | A kind of mobile dual robot mirror image system of processing for the processing of weak rigid panels | |
| CN116572077A (en) | A method for measuring the normal direction of free-form surfaces with large curvature | |
| CN114346409B (en) | Real-time processing path generation system for three-dimensional scanning and verification | |
| CN111857042B (en) | Five-axis high-precision positioning control system based on PMAC and working method | |
| Kanda et al. | Tool Path Generation for Five-Axis Controlled Machining with Consideration of Structural Interference. | |
| CN112373016B (en) | Three-dimensional laminated modeling method, three-dimensional laminated modeling device, electronic device, and storage medium |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |