CN107993942B - Manufacturing process of lead frame - Google Patents
Manufacturing process of lead frame Download PDFInfo
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- CN107993942B CN107993942B CN201711191549.3A CN201711191549A CN107993942B CN 107993942 B CN107993942 B CN 107993942B CN 201711191549 A CN201711191549 A CN 201711191549A CN 107993942 B CN107993942 B CN 107993942B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
- H01L21/4814—Conductive parts
- H01L21/4821—Flat leads, e.g. lead frames with or without insulating supports
- H01L21/4842—Mechanical treatment, e.g. punching, cutting, deforming, cold welding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49541—Geometry of the lead-frame
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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- Manufacturing & Machinery (AREA)
- Lead Frames For Integrated Circuits (AREA)
Abstract
Description
【技术领域】【Technical field】
本发明涉及引线框架制造工艺。The present invention relates to a lead frame manufacturing process.
【背景技术】【Background technique】
引线框架作为集成电路的芯片载体,是一种借助于键合材料(金丝、铝丝、铜丝)实现芯片内部电路引出端与外引线的电气连接,形成电气回路的关键结构件,它起到了和外部导线连接的桥梁作用,绝大部分的半导体集成块中都需要使用引线框架,是电子信息产业中重要的基础材料。As the chip carrier of integrated circuits, the lead frame is a key structural part that realizes the electrical connection between the lead-out end of the chip's internal circuit and the outer lead by means of bonding materials (gold wire, aluminum wire, copper wire) to form an electrical circuit. When it comes to the bridge function of connecting with external wires, most semiconductor integrated blocks need to use lead frames, which are important basic materials in the electronic information industry.
在现有技术中,引线框架的制造方法一般为模具冲压法或化学刻蚀法,部分引线框架内设置有多个引脚部,而所述引脚部一般为易变形的细长状,由于重力等作用,若不采取预防措施,在冲压的后续工序中很容易造成最终成品的不良率偏高。In the prior art, the manufacturing method of the lead frame is generally a mold stamping method or a chemical etching method, and a plurality of pins are arranged in some lead frames, and the pins are generally elongated and easily deformed. Due to gravity and other effects, if no preventive measures are taken, it is easy to cause a high defect rate of the final product in the subsequent stamping process.
【发明内容】【Content of invention】
为解决现有技术中引线框架的所述引脚部易变形造成产品制造过程中不良率偏高的问题,本发明通过优化制造过程中的冲压工序,保证引线框架的共面性,能大大降低由于所述引脚部变形造成的产品不良率。In order to solve the problem in the prior art that the pin portion of the lead frame is easily deformed and cause a relatively high defect rate in the product manufacturing process, the present invention ensures the coplanarity of the lead frame by optimizing the stamping process in the manufacturing process, which can greatly reduce the Product defect rate due to deformation of the lead portion.
本发明是通过以下技术方案实现的:The present invention is achieved through the following technical solutions:
引线框架的制造工艺,包括冲压工序,所述冲压工序包括将金属板材加工成框架本体,多个引脚部并排加工在所述框架本体内,将支撑部与多个所述引脚部末端相连,并在所述支撑部上加工至少两个支撑脚,将所述支撑脚一端连接所述支撑部,另一端连接所述框架本体。The manufacturing process of the lead frame includes a stamping process, the stamping process includes processing the metal sheet into a frame body, processing a plurality of pins side by side in the frame body, and connecting the support portion to the ends of the multiple pins , and at least two supporting feet are processed on the supporting part, and one end of the supporting feet is connected to the supporting part, and the other end is connected to the frame body.
如上所述的引线框架的制造工艺,所述冲压工序还包括,加工两个所述支撑脚,且分别加工在所述支撑部两端。According to the above-mentioned manufacturing process of the lead frame, the stamping process further includes: processing two of the supporting legs, and respectively processing the two ends of the supporting part.
如上所述的引线框架的制造工艺,进行所述冲压工序时,将所述支撑脚冲切成两端分别连接所述框架本体和所述支撑部的L形。In the above-mentioned manufacturing process of the lead frame, when performing the punching process, the supporting leg is punched into an L-shape with two ends connected to the frame body and the supporting portion respectively.
如上所述的引线框架的制造工艺,进行所述冲压工序时,包括在两个所述支撑脚之间加工连接部。In the manufacturing process of the above lead frame, when performing the stamping process, it includes processing the connecting portion between the two supporting legs.
如上所述的引线框架的制造工艺,加工所述连接部时,将所述连接部加工成两端分别连接两个所述支撑脚的矩形片状。In the above-mentioned manufacturing process of the lead frame, when processing the connecting portion, the connecting portion is processed into a rectangular piece whose two ends are respectively connected to the two supporting legs.
如上所述的引线框架的制造工艺,所述金属板材为铜带材。According to the above-mentioned manufacturing process of the lead frame, the metal sheet is a copper strip.
如上所述的引线框架的制造工艺,所述冲压工序后续工序为热处理工序、电镀工序、贴带工序、切脚工序、切断工序和包装工序。In the above-mentioned manufacturing process of the lead frame, the subsequent processes of the stamping process include a heat treatment process, an electroplating process, a tape attachment process, a leg cutting process, a cutting process and a packaging process.
如上所述的引线框架的制造工艺,所述切脚工序包括将所述支撑部切除。According to the above-mentioned manufacturing process of the lead frame, the leg cutting step includes cutting off the support portion.
如上所述的引线框架的制造工艺,所述电镀工序的镀层为镍、钯、金、银或其合金构成的组中的至少一种。In the above-mentioned manufacturing process of the lead frame, the plating layer in the electroplating process is at least one of the group consisting of nickel, palladium, gold, silver or alloys thereof.
与现有技术相比,本发明有如下优点:Compared with prior art, the present invention has following advantage:
本发明提供了引线框架的制造工艺,通过在所述冲压工序中,将多个所述引脚部并排加工在所述框架本体内,将所述支撑部与多个所述引脚部末端相连,并在所述支撑部上加工至少两个支撑脚,将所述支撑脚一端连接所述支撑部,另一端连接所述框架本体。使得所述引脚部在后续工序中能够得到有效的支撑,保证引线框架的共面性,大大降低由于所述引脚部变形造成的产品不良率。The present invention provides a manufacturing process of a lead frame. In the stamping process, a plurality of the lead parts are processed side by side in the frame body, and the support part is connected to the ends of the plurality of lead parts. , and at least two supporting feet are processed on the supporting part, and one end of the supporting feet is connected to the supporting part, and the other end is connected to the frame body. The lead part can be effectively supported in the subsequent process, the coplanarity of the lead frame can be ensured, and the defective rate of the product caused by the deformation of the lead part can be greatly reduced.
【附图说明】【Description of drawings】
为了更清楚地说明本发明实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings that need to be used in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention. For those skilled in the art, other drawings can also be obtained based on these drawings without creative effort.
图1为本发明优选实施例中的经过所述冲压工序后的工件图;Fig. 1 is the workpiece diagram after described stamping process in the preferred embodiment of the present invention;
图2为本发明优选实施例的所述引线框架成品图。Fig. 2 is a finished drawing of the lead frame according to the preferred embodiment of the present invention.
【具体实施方式】【Detailed ways】
为了使本发明所解决的技术问题、技术方案及有益效果更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the technical problems, technical solutions and beneficial effects solved by the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
本发明提供一种引线框架的制造工艺,如图2为本发明所述的引线框架制造工艺制造的引线框架成品,所述制造工艺包括冲压工序、热处理工序、电镀工序、贴带工序、切脚工序、切断工序和包装工序;The present invention provides a manufacturing process of a lead frame, as shown in Fig. 2 , the finished lead frame manufactured by the lead frame manufacturing process of the present invention, the manufacturing process includes a stamping process, a heat treatment process, an electroplating process, a tape-attaching process, and foot cutting process, cutting process and packing process;
如图1为本发明优选实施例中的经过所述冲压工序后的工件图,所述冲压工序包括将金属板材加工成框架本体1,具体地,所述金属板材为铜带材,多个引脚部12并排加工在所述框架本体1内,相邻两个引脚部12之间设有间隙,将所述支撑部13与多个所述引脚部12末端相连,并在所述支撑部13上加工至少两个支撑脚131,将所述支撑脚131一端连接所述支撑部13,另一端连接所述框架本体1。所述引脚部12为细长状的结构,上述加工工艺能够使得所述引脚部12在后续工序中能够得到有效的支撑,保证引线框架的共面性,即多个所述引脚部12能最大程度地与整个框架本体1保证在同一平面内,大大降低由于所述引脚部12变形造成的产品不良率。Figure 1 is a workpiece diagram after the stamping process in a preferred embodiment of the present invention, the stamping process includes processing the metal sheet into a frame body 1, specifically, the metal sheet is a copper strip, and a plurality of leads The feet 12 are processed side by side in the frame body 1, a gap is provided between two adjacent pins 12, the support 13 is connected to the ends of a plurality of the pins 12, and the support At least two supporting legs 131 are processed on the part 13, and one end of the supporting legs 131 is connected to the supporting part 13, and the other end is connected to the frame body 1. The pin portion 12 has a slender structure, and the above-mentioned processing technology can enable the pin portion 12 to be effectively supported in the subsequent process, ensuring the coplanarity of the lead frame, that is, a plurality of the pin portions 12 can be guaranteed to be in the same plane as the entire frame body 1 to the greatest extent, greatly reducing the product defect rate caused by the deformation of the pin portion 12 .
在本实施例中,在所述冲压工序中,所述支撑脚131数量具体加工两个,且分别加工在所述支撑部13两端。另外,进行所述冲压工序时,将所述支撑脚131冲切成两端分别连接所述框架本体1和所述支撑部13的L形,L形的支撑脚131切削性能更优,降低刃口制作难度;并在两个所述支撑脚131之间加工连接部,加工所述连接部时,将所述连接部加工成两端分别连接两个所述支撑脚131的矩形片状,进一步加强支撑脚131的支撑强度。In this embodiment, in the stamping process, two support feet 131 are processed, which are respectively processed at both ends of the support portion 13 . In addition, when performing the stamping process, the supporting legs 131 are punched into an L-shape whose two ends are respectively connected to the frame body 1 and the supporting portion 13. The L-shaped supporting legs 131 have better cutting performance and reduce the cutting edge. Difficulty in making the mouth; and process the connecting portion between the two supporting feet 131. When processing the connecting portion, the connecting portion is processed into a rectangular sheet whose two ends are respectively connected to the two supporting feet 131, further Strengthen the supporting strength of the supporting feet 131 .
所述热处理工序采用退火炉进行退火,降低硬度,改善切削加工性;消除残余应力,稳定尺寸,减少变形与裂纹倾向;细化晶粒,调整组织,消除组织缺陷。The heat treatment process uses an annealing furnace for annealing to reduce hardness and improve machinability; eliminate residual stress, stabilize dimensions, reduce deformation and crack tendency; refine grains, adjust structure, and eliminate structure defects.
所述电镀工序,其镀层为镍、钯、金、银或其合金构成的组中的至少一种。经过电镀,可以保证引线框架在封装工艺中的装片和键合性能,使芯片和焊接丝与引线框架形成良好的扩散焊接。In the electroplating process, the plating layer is at least one of the group consisting of nickel, palladium, gold, silver or alloys thereof. After electroplating, the chip loading and bonding performance of the lead frame in the packaging process can be guaranteed, so that chips and welding wires can form good diffusion welding with the lead frame.
所述贴带工序包括将保护带贴到上工序的工件中,以保护工件表面,保证表面质量。The tape attaching process includes attaching the protective tape to the workpiece in the previous process, so as to protect the surface of the workpiece and ensure the surface quality.
所述切脚工序包括将所述支撑部13切除。由于所述支撑部13是为了改善产品工艺性能,降低前工序中工件的变形率,提升产品最终的合格率,在所述切角工序中需将所述支撑部13切除,以形成最终的产品形状。The leg cutting process includes cutting off the support portion 13 . Since the support part 13 is to improve the product process performance, reduce the deformation rate of the workpiece in the previous process, and improve the final pass rate of the product, the support part 13 needs to be cut off in the corner cutting process to form the final product shape.
所述切脚工序的后续工序就是将前面连续冲压获得的多个引线框架切断成独立单体的切断工序,紧接是将引线框架成品进行包装的包装工序。The subsequent process of the leg cutting process is the cutting process of cutting the plurality of lead frames obtained by continuous stamping into independent monomers, followed by the packaging process of packaging the finished lead frames.
综上,本发明提供了引线框架的制造工艺,通过在所述冲压工序中,将多个所述引脚部12并排加工在所述框架本体1内,将所述支撑部13与多个所述引脚部12末端相连,并在所述支撑部13上加工至少两个支撑脚131,将所述支撑脚131一端连接所述支撑部13,另一端连接所述框架本体1。使得所述引脚部12在后续工序中能够得到有效的支撑,大大降低由于所述引脚部12变形造成的产品不良率。To sum up, the present invention provides a lead frame manufacturing process. In the stamping process, a plurality of the pin portions 12 are processed side by side in the frame body 1, and the support portion 13 and the plurality of The ends of the pin parts 12 are connected, and at least two supporting feet 131 are processed on the supporting part 13, and one end of the supporting feet 131 is connected to the supporting part 13, and the other end is connected to the frame body 1. This enables the pin portion 12 to be effectively supported in subsequent processes, greatly reducing the defective rate of products caused by the deformation of the pin portion 12 .
如上所述是结合具体内容提供的一种或多种实施方式,并不认定本发明的具体实施只局限于这些说明。凡与本发明的方法、结构等近似、雷同,或是对于本发明构思前提下做出若干技术推演,或替换都应当视为本发明的保护范围。The foregoing is one or more implementation modes provided in conjunction with specific content, and it is not considered that the specific implementation of the present invention is limited to these descriptions. Any approach or similarity to the method and structure of the present invention, or some technical deduction or replacement based on the concept of the present invention should be regarded as the scope of protection of the present invention.
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JPH06252330A (en) * | 1993-02-23 | 1994-09-09 | Dainippon Printing Co Ltd | Lead frame for wiring board |
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JP2959521B2 (en) * | 1997-05-21 | 1999-10-06 | 日本電気株式会社 | Semiconductor device manufacturing method, lead frame |
US6686258B2 (en) * | 2000-11-02 | 2004-02-03 | St Assembly Test Services Ltd. | Method of trimming and singulating leaded semiconductor packages |
US6797540B1 (en) * | 2002-11-18 | 2004-09-28 | National Semiconductor Corporation | Dap isolation process |
US7154165B2 (en) * | 2004-07-21 | 2006-12-26 | Linear Technology Corporation | Flashless lead frame with horizontal singulation |
JP2009194027A (en) * | 2008-02-12 | 2009-08-27 | Mitsui High Tec Inc | Method and apparatus for manufacturing matrix-like lead frame |
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