CN107991509B - Layer structure mass block, manufacturing method thereof, acceleration sensor and manufacturing method thereof - Google Patents
Layer structure mass block, manufacturing method thereof, acceleration sensor and manufacturing method thereof Download PDFInfo
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- CN107991509B CN107991509B CN201711391940.8A CN201711391940A CN107991509B CN 107991509 B CN107991509 B CN 107991509B CN 201711391940 A CN201711391940 A CN 201711391940A CN 107991509 B CN107991509 B CN 107991509B
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- 230000001133 acceleration Effects 0.000 title claims abstract description 49
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 32
- 239000000463 material Substances 0.000 claims abstract description 27
- 206010070834 Sensitisation Diseases 0.000 claims description 10
- 230000008313 sensitization Effects 0.000 claims description 10
- 238000002360 preparation method Methods 0.000 claims description 8
- 238000010030 laminating Methods 0.000 claims description 6
- 239000000956 alloy Substances 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 description 9
- 230000006978 adaptation Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000002131 composite material Substances 0.000 description 4
- 229910017390 Au—Fe Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- WVBBLATZSOLERT-UHFFFAOYSA-N gold tungsten Chemical compound [W].[Au] WVBBLATZSOLERT-UHFFFAOYSA-N 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000004881 precipitation hardening Methods 0.000 description 2
- 229910000601 superalloy Inorganic materials 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention relates to the field of sensing equipment, and discloses a layer structure mass block, a manufacturing method thereof, an acceleration sensor and a manufacturing method thereof. The layer structure mass block comprises at least two layers, wherein the two layers are stacked in the thickness direction; at least two of the sheets are made of materials having different coefficients of thermal expansion. The overall coefficient of thermal expansion of the layered structure mass can be determined by the thickness and coefficient of thermal expansion of each of the sheets, thus facilitating the skilled artisan to produce a layered structure mass from two or more existing materials to achieve the desired coefficient of thermal expansion without having to rely on searching for a single material or preparing alloy materials to approach the desired coefficient of thermal expansion. The manufacturing method of the acceleration sensor comprises the steps of manufacturing the layer structure mass block with the comprehensive thermal expansion coefficient equal to the expected expansion coefficient through the manufacturing method, and then assembling the layer structure mass block with other elements to obtain the acceleration sensor.
Description
Technical Field
The invention relates to the field of sensing equipment, in particular to a layer structure mass block and a manufacturing method thereof, an acceleration sensor and a manufacturing method thereof.
Background
The acceleration sensor works in a wide temperature area, and the range of the acceleration impact born by the sensor changes along with the change of the temperature due to the action of the temperature. If the whole structure of the sensor becomes loose along with the rise of temperature, the range of the sensor when working at high temperature becomes smaller, and when the sensor is overscaled due to larger impact, the sensor may fall off and other failure conditions occur. So in order to ensure the stability of the sensor performance along with the temperature change, the thermal stability of the overall structure of the sensor is important.
The mass block is one of the core components of the acceleration sensor, and is required to have a large mass so as to generate a large inertial force, and in a limited space of the sensor, the mass block often occupies a large space. The thermal expansion coefficient of the mass has a significant impact on the thermal fit of the overall structure. When designing an acceleration sensor operating in a certain temperature range, considering the thermal adaptation problem of the overall structure, the possibility of changing these parts to solve the thermal adaptation problem is considered to be very small, because the geometric dimensions of other parts are relatively small and the material characteristics are highly required, as a functional material, so that a significant mass is generally considered to be affected. When the problem of the thermal adaptation of the integral structure is calculated, the size and the thermal expansion coefficient of the functional material are determined, and the size of the mass block is determined, so that the optimal thermal expansion coefficient of the mass block can be calculated according to the size and the thermal expansion coefficient of the mass block, and the good thermal adaptation of the integral structure is achieved.
For a certain coefficient of thermal expansion, the corresponding material is determined and is required to meet the high temperature operating environment (such as the common high temperature acceleration sensor operating temperature 260 ℃, 480 ℃, 648 ℃, 800 ℃ + etc.), while the density meets the design requirements. Such materials are difficult to find. For the design and manufacture of certain types of sensors, it is almost impossible to de-formulate such an alloy material. Thus, the mass block commonly adopted at present is a single alloy material with high-temperature resistant density, and the thermal adaptation problem of the integral structure and the accurate thermal expansion coefficient of the material are not considered. Such an acceleration sensor is poorly thermally adaptable.
Disclosure of Invention
It is an object of the present invention to provide a layered mass which has a good thermal fit.
Another object of the present invention is to provide a method for manufacturing a layered mass, which can conveniently satisfy the required thermal expansion performance of the layered mass.
Another object of the present invention is to provide a method for manufacturing an acceleration sensor, which can manufacture an acceleration sensor with good overall thermal adaptability.
It is still another object of the present invention to provide an acceleration sensor having a good thermal adaptability.
Embodiments of the present invention are implemented as follows:
a layered mass for disposition in an acceleration sensor, the layered mass comprising:
at least two sheets stacked in a thickness direction; at least two sheets are made of materials with different thermal expansion coefficients, so that the comprehensive thermal expansion coefficient of the layer structure mass block in the thickness direction is as follows:
wherein L is i For the thickness of the ith sheet layer, phi i (T) is the thermal expansion coefficient in the thickness direction of the ith sheet layer at T temperature Total (S) Is the integrated thermal expansion coefficient of the layer structure mass block.
In one embodiment of the invention:
at least two sheets are made of materials with different densities, so that the overall density of the layer structure mass block is as follows:
wherein ρ is i (T) is the density of the ith sheet at T temperature, V i For the volume of the ith layer ρ Total (S) Is the integrated density of the layer structure mass block.
In one embodiment of the invention:
the layer structure mass block comprises two layers, wherein the two layers are a first layer and a second layer, the first layer is made of FeCrNi-based precipitation hardening superalloy, and the second layer is made of tungsten gold.
In one embodiment of the invention:
the ratio of the thicknesses of the first sheet and the second sheet was 6:4.
In one embodiment of the invention:
the ratio of the volumes of the first sheet to the second sheet was 6:4.
The invention provides a manufacturing method of a layer structure mass block, which comprises the following steps:
laminating at least two sheets in the thickness direction, wherein the at least two sheets have different thermal expansion coefficients in the thickness direction, so that the comprehensive thermal expansion coefficient of the layered structure mass block is equal to a first preset expansion coefficient;
wherein, each sheet thermal expansion coefficient and the comprehensive thermal expansion coefficient satisfy the formula:wherein L is i For the thickness of the ith sheet layer, phi i (T) is the thermal expansion coefficient in the thickness direction of the ith sheet layer at T temperature Total (S) Is the integrated thermal expansion coefficient of the layer structure mass block.
In one embodiment of the invention:
at least two sheets are made of materials with different densities, so that the overall density of the layer structure mass block is as follows:and the comprehensive density is in a preset density range; wherein ρ is i (T) is the density of the ith sheet at T temperature, V i For the volume of the ith layer ρ Total (S) Is the integrated density of the layer structure mass block.
The invention provides a manufacturing method of an acceleration sensor, which comprises the following steps:
determining a first preset expansion coefficient of a mass block required by the acceleration sensor;
laminating at least two sheets in the thickness direction to obtain a layer structure mass block;
wherein at least two of the sheets have different coefficients of thermal expansion such that the combined coefficient of thermal expansion of the layered structure mass is equal to a first predetermined coefficient of expansion, i.e. Total (S) ＝φ Pre-preparation ；
Wherein phi is Total (S) Comprehensive thermal expansion of a layered massCoefficient of expansion phi Pre-preparation Is a first predetermined expansion coefficient.
In one embodiment of the invention:
assembling the stud, the sensitive element and the layer structure mass block together;
the first preset expansion coefficient, the thermal expansion coefficient of the stud, the thermal expansion coefficient of the sensing element and the comprehensive thermal expansion coefficient meet the formula:
wherein L is i For the thickness of the ith layer, L Stud bolt Is the dimension phi of the stud in the thickness direction of the layer structure mass block Stud bolt Is the thermal expansion coefficient of the stud at T temperature, L Sensitization of For the dimension of the sensor in the thickness direction of the layer-structured mass, phi Sensitization of Is the thermal expansion coefficient of the sensitive element at the temperature T.
The invention provides an acceleration sensor, which comprises the layer structure mass block.
The embodiment of the invention has the beneficial effects that:
the layer structure mass block for the acceleration sensor in the embodiment of the invention comprises at least two layers, wherein the two layers are stacked in the thickness direction; at least two of the sheets are made of materials having different coefficients of thermal expansion. The combined thermal expansion coefficient of the laminated mass is between the maximum thermal expansion coefficient and the minimum thermal expansion coefficient of each sheet, and can be determined by the thickness of each sheet and the thermal expansion coefficient, namelyThis facilitates the technician to make a layered mass from two or more materials available to achieve the desired coefficient of thermal expansion (first predetermined coefficient of expansion) without having to rely on searching for a single material or preparing an alloy material to approach the desired coefficient of thermal expansion. Thus the layer structure massThe heat adaptability is good.
The acceleration sensor of the embodiment of the invention adopts the layer structure mass block, when the acceleration sensor is manufactured, the optimal thermal expansion coefficient (namely the first preset expansion coefficient) required by the mass block of the acceleration sensor is determined, then the layer structure mass block is manufactured by laminating at least two layers with different thermal expansion coefficients in the thickness direction, and the comprehensive thermal expansion coefficient of the layer structure mass block is equal to the first preset expansion coefficient by adjusting the thickness of each layer and the selection of materials, so that the overall thermal adaptability of the acceleration sensor is better.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of a layer structure of a mass in accordance with an embodiment of the present invention;
FIG. 2 is a schematic diagram of a first view of a layer structure of a proof mass according to embodiment 1 of the present invention;
FIG. 3 is a schematic diagram of a second view of a layer structure of the mass according to embodiment 1 of the present invention;
FIG. 4 is a schematic diagram of a layer structure of a mass block in embodiment 2 of the present invention;
fig. 5 is a schematic diagram showing a partial structure of an acceleration sensor according to embodiment 1 of the present invention.
Icon: 10-layer structure mass block; 100-layer structure mass block; 110-a first ply; 120-a second ply; 200-layer structure mass block; 210-a first ply; 220-a second ply; 230-third ply; 300-an acceleration sensor; 310-stud; 320-a sensing element; 330-nut.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
The layered structure mass of the present invention, the method of manufacturing the same, the acceleration sensor, and the method of manufacturing the same are explained in detail below.
The sensor structure generates thermal expansion and contraction under the action of temperature, the thermal stability of the whole structure is considered for the acceleration sensor, and the change of a sensor sensitive element is almost impossible.
Fig. 1 is a schematic diagram of a layered structural mass 10 in accordance with an embodiment of the present invention. Referring to fig. 1, the present invention provides a layered structure mass block 10 and a manufacturing method thereof, wherein the manufacturing method of the layered structure mass block 10 includes:
at least two sheets are stacked in the thickness direction, and the at least two sheets have different thermal expansion coefficients in the thickness direction, so that the overall thermal expansion coefficient of the layered structure mass 10 is equal to a first preset expansion coefficient, i.e., a desired thermal expansion coefficient.
Considering the problem of thermal adaptation of the overall structure of the sensor, the thermal expansion of the individual parts in the thickness direction can be regarded as a linear expansion effect, and the thermal expansion equation of each sheet is:
for series superposition, the total thermal expansion effect is the summation of the thermal expansion effects of the single units, and the thermal expansion equation is as follows:
therefore, the thermal expansion coefficient of each sheet and the integrated thermal expansion coefficient satisfy the formula:
wherein L is i For the thickness of the ith layer, l Total (S) The expansion amount dl of the layered mass 10 per unit temperature in the thickness direction i Is the expansion amount of the ith sheet layer in the thickness direction per unit temperature phi i (T) is the thermal expansion coefficient in the thickness direction of the ith sheet layer at T temperature Total (S) Is the integrated thermal expansion coefficient of the layered mass 10.
By adopting the method, the comprehensive thermal expansion coefficient of the layered structure mass block 10 can be between the maximum thermal expansion coefficient and the minimum thermal expansion coefficient in each sheet, and the layered structure mass block 10 with different comprehensive thermal expansion coefficients can be selectively prepared by selecting the material and the thickness of each sheet, so that different thermal adaptation requirements can be met. The technician is avoided from searching for a material or preparing an alloy to meet the first predetermined expansion coefficient.
Further, the mass block in the acceleration sensor often needs to meet a certain density condition, so at least two sheets are made of materials with different densities, so that the overall density of the layer structure mass block 10 is as follows:and the comprehensive density is in a preset density range; wherein ρ is i (T) is the density of the ith sheet at T temperature, V i For the volume of the ith layer ρ Total (S) Is the overall density of the layer structure mass 10.
By adopting the method, the comprehensive density of the layer structure mass block 10 can be between the maximum density and the minimum density in each sheet, and the layer structure mass block 10 with different comprehensive densities can be selectively prepared by selecting the material and the thickness of each sheet, so as to meet different density requirements. Avoiding the need for the technician to find a material or make an alloy to meet the density requirements.
When manufacturing the layered structure mass 10, the layers of at least two materials may be preselected, and the thickness ratio between the layers is selected according to the thermal expansion coefficient and the density of each layer, so that the overall thermal expansion coefficient reaches a first preset expansion coefficient, and the overall density is within a preset density range. It should be understood that the maximum coefficient of thermal expansion in each sheet should be greater than the first predetermined coefficient of expansion, while the minimum coefficient of thermal expansion should be less than the first predetermined coefficient of expansion; the density was chosen in the same way.
Further, the sheets can be connected by bonding or bonding, or even directly overlapped.
The layered structure mass 10 in the embodiment of the present invention may be manufactured according to the above method, so that the overall thermal expansion coefficient of the layered structure mass reaches the first preset expansion coefficient, and the overall density is within the preset density range, so as to meet the use requirement.
The invention provides an acceleration sensor and a manufacturing method thereof, wherein the manufacturing method comprises the following steps:
1. a first preset expansion coefficient of a mass required by the acceleration sensor is determined. Further, in an acceleration sensor comprising a stud, a sensing element and a layered structure mass 10, the coefficient of thermal expansion of the mass required for the sensor satisfies the formula:
φ pre-preparation L＝L Stud bolt φ Stud bolt (T)-L Sensitization of φ Sensitization of (T)
Wherein L is Stud bolt Is the dimension of the stud in the thickness direction of the layered structure mass 10, phi Stud bolt Is the thermal expansion coefficient of the stud at T temperature, L Sensitization of For the dimensions of the sensor element in the thickness direction of the layer-structured mass 10, phi Sensitization of To the thermal expansion coefficient of the sensitive element at T temperature Pre-preparation For a first predetermined expansion coefficient (i.e., the intended expansion coefficient), L is the linear dimension of the mass (i.e., the thickness of the corresponding layer structure mass 10).
It should be appreciated that the method of determining the overall thermal expansion coefficient of the layered structure mass 10 will vary depending on the particular structure of the acceleration sensor, and only the applicable formulas for the mass in one type of acceleration sensor are given herein.
2. And then manufacturing the layer structure mass block 10 according to the first preset expansion coefficient: at least two sheets are stacked in the thickness direction to obtain the layered structure mass 10.
Wherein at least two of the sheets have different coefficients of thermal expansion such that the overall coefficient of thermal expansion of the layered structure mass 10 is equal to the first predetermined coefficient of expansion, and the overall thickness of the layered structure mass 10 is equal to L, i.eWherein phi is Total (S) Is the integrated thermal expansion coefficient, L, of the layer structure mass 10 i Is the thickness of the i-th sheet.
Therefore, the first preset expansion coefficient, the thermal expansion coefficient of the stud, the thermal expansion coefficient of the sensing element and the comprehensive thermal expansion coefficient satisfy the formula:
by adopting the preparation method of the layered structure mass block 10, the comprehensive thermal expansion coefficient of the layered structure mass block 10 is equal to the first preset expansion coefficient, the thickness proportion of each sheet is obtained, and the specific thickness of each sheet is determined, so that the total thickness is L.
In embodiments of the present invention, the sensing element may include a plurality of sensing elements, and the expansion effects of the plurality of linearly arranged sensing elements should be superimposed.
And then assembling the layer structure mass block 10 with sensitive elements, studs and the like to obtain the acceleration sensor.
Specific examples are set forth below.
Example 1
Fig. 2 is a schematic diagram of a first view of a layer structure of a mass 100 according to embodiment 1 of the present invention; fig. 3 is a schematic diagram of a second view of the middle layer structure mass 100 according to embodiment 1 of the present invention. Referring to fig. 2 and 3, the present embodiment provides a layer structure mass block 100 and a manufacturing method thereof, and an acceleration sensor and a manufacturing method thereof.
Fig. 5 is a schematic diagram showing a partial structure of an acceleration sensor 300 according to embodiment 1 of the present invention. Referring to fig. 5, in the present embodiment, the acceleration sensor 300 includes a mass 100, a stud 310, and a sensing element 320. The stud 310 penetrates the mass 100 and the sensing element 320 from the thickness direction, and is fastened by a nut 330. In the case where the thickness of the nut 330 is small relative to the mass 100 and the sensing element 320, the thermal expansion effect of the nut 330 may be negligible. In such a case, the acceleration sensor having a good thermal adaptability should satisfy the following formula:
φ pre-preparation L＝L Stud bolt φ Stud bolt (T)-L Sensitization of φ Sensitization of (T)
It should be appreciated that when the thickness dimension of the nut 330 is large, then the thermal expansion effect of the nut 330 should be considered when calculating the coefficient of thermal expansion of the layered mass 100.
According to the above formula, in case of obtaining parameters of the stud 310 and the sensing element 320 of a specific acceleration sensor 300, the thermal expansion coefficient is calculated to be 16.7E-6/K in case of 1cm thickness of the layered structure mass 100. The following details how the layered structure 100 is constructed to achieve a coefficient of thermal expansion of 16.7E-6/K at a thickness of 1 cm.
Referring to fig. 2 and 3, 2 sheets are selected to fabricate the layered structure mass 100 in this embodiment. Tool withThe layered structure 100 comprises a rectangular first sheet 110 and a rectangular second sheet 120, the first sheet 110 being of tungsten gold and having a density of 19.35g/cm 3 The thermal expansion coefficient is 7E-6/K; the second sheet 120 is FeCrNi-based precipitation hardening superalloy with a density of 7.85g/cm 3 The thermal expansion coefficient was 23.13E-6/K.
The two sheets have the same cross section perpendicular to the thickness direction, and thus can be completely overlapped, and the sheets are bonded together. It should be understood that in other embodiments of the present invention, the specific shape of the first sheet 110 and the second sheet 120 may not be limited, and may be circular, trapezoidal, triangular, etc. and may be different in size.
According to the formulaIt can be calculated that the thickness ratio of the first sheet 110 and the second sheet 120 is 4:6, and since the total thickness is set to 1cm, the first sheet 110 is 4mm and the second sheet 120 is 6mm. The overall thermal expansion coefficient of the layered mass 100 thus reaches the first predetermined expansion coefficient 16.7E-6/K. According to the formula->The calculated integrated density is 12.45g/cm 3 And the preset density range is greater than 10g/cm 3 And the density requirement is met.
The layered structure mass 100 is assembled with studs, sensing elements, and other elements to obtain the acceleration sensor of the present embodiment. The velocity sensor has a good thermal fit since the combined thermal expansion coefficient of the layered mass 100 meets the first predetermined expansion coefficient.
Example 2
Fig. 4 is a schematic structural diagram of a middle layer structure mass 200 according to embodiment 2 of the present invention. The present embodiment provides a layered structure mass 200 and a manufacturing method thereof, and the manufactured layered structure mass 200 needs to meet the first preset expansion coefficient and density requirements in embodiment 1.
In this example 3 plies were selected to make the layer structure qualityBlock 200. Specifically, the layered structure 200 comprises a rectangular first sheet 210, a second sheet 220, and a third sheet 230, the first sheet 210 being gold and having a density of 19.3g/cm 3 A thermal expansion coefficient of 14.2E-6/K; the second sheet 220 is iron and has a density of 7.8g/cm 3 A coefficient of thermal expansion of 12.2E-6/K; the third sheet 230 is manganese and has a density of 7.4g/cm 3 The thermal expansion coefficient is 23E-6/K. The three sheets are connected by means of bonding.
The thickness ratio of the first sheet layer 210 to the second sheet layer 220 is 1:1, so that the thermal expansion coefficient of the Au-Fe composite layer is 13.2E-6/K, and the composite density of the Au-Fe composite layer is 13.6g/cm 3 . By the same method as in example 1, it can be calculated that the overall thermal expansion coefficient of the layered structure mass 200 is 16.7E-6/K, reaching the first preset expansion coefficient, when the thickness ratio of the Au-Fe complex layer to the third sheet 230 is 0.643:0.357. Thus the thickness ratio of the first sheet 210, the second sheet 220, the third sheet 230 is 0.3215:0.3215:0.357, corresponding to thicknesses of 3.215mm, 3.215mm, and 3.57mm, respectively.
According to the formulaThe calculated composite density of the layered structure mass 200 was 11.35g/cm 3 Also satisfies more than 10g/cm 3 The density range is preset.
In summary, the layer structure mass block for the acceleration sensor in the embodiment of the present invention includes at least two layers, where the two layers are stacked in the thickness direction; at least two of the sheets are made of materials having different coefficients of thermal expansion. The combined thermal expansion coefficient of the laminated mass is between the maximum thermal expansion coefficient and the minimum thermal expansion coefficient of each sheet, and can be determined by the thickness of each sheet and the thermal expansion coefficient, namelyThis facilitates the technician to produce a layered mass from two or more materials available to achieve the desired coefficient of thermal expansion (a first predetermined coefficient of expansion) Rather than having to rely on finding a single material or preparing an alloy material to bring it close to the desired coefficient of thermal expansion. Therefore, the layer structure mass block has good thermal adaptability.
The acceleration sensor of the embodiment of the invention adopts the layer structure mass block, when the acceleration sensor is manufactured, the optimal thermal expansion coefficient (namely the first preset expansion coefficient) required by the mass block of the acceleration sensor is determined, then the layer structure mass block is manufactured by laminating at least two layers with different thermal expansion coefficients in the thickness direction, and the comprehensive thermal expansion coefficient of the layer structure mass block is equal to the first preset expansion coefficient by adjusting the thickness of each layer and the selection of materials, so that the overall thermal adaptability of the acceleration sensor is better.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (4)
1. A method of making a layered structure mass, comprising:
laminating at least two sheets in the thickness direction, wherein at least two sheets have different thermal expansion coefficients, so that the comprehensive thermal expansion coefficient of the layer structure mass block is equal to a first preset expansion coefficient;
wherein, each sheet thermal expansion coefficient and the comprehensive thermal expansion coefficient satisfy the formula:wherein L is i For the thickness of the ith sheet layer, phi i (T) is the thermal expansion coefficient in the thickness direction of the ith sheet layer at T temperature Total (S) Is the integrated thermal expansion coefficient of the layer structure mass block.
2. A method of making a layered structure mass according to claim 1, wherein:
the at least two sheets are made of materials with different densities, so that the overall density of the layer structure mass block is as follows:and the comprehensive density is in a preset density range; wherein ρ is i (T) is the density of the ith sheet layer at T temperature, V i For the volume of the i-th sheet, ρ Total (S) Is the integrated density of the layer structure mass block.
3. The manufacturing method of the acceleration sensor is characterized by comprising the following steps of:
determining the thermal expansion coefficient of a mass block required by the acceleration sensor, namely a first preset expansion coefficient;
laminating at least two sheets in the thickness direction to obtain a layer structure mass block;
wherein at least two of the sheets have different coefficients of thermal expansion such that the combined coefficient of thermal expansion of the layered structure mass is equal to the first predetermined coefficient of expansion, i.e., phi Total (S) ＝φ Pre-preparation ；
Wherein phi is Total (S) For the combined thermal expansion coefficient of the layer structure mass block phi Pre-preparation Is a first predetermined expansion coefficient.
4. A method of manufacturing an acceleration sensor according to claim 3, characterized in, that it comprises:
assembling the stud, the sensing element and the layer structure mass block together;
wherein, the first preset expansion coefficient, the thermal expansion coefficient of the stud, the thermal expansion coefficient of the sensing element and the comprehensive thermal expansion coefficient satisfy the formula:
wherein L is i For the thickness of the ith layer, L Stud bolt Is the dimension phi of the stud in the thickness direction of the layer structure mass block Stud bolt Is the thermal expansion coefficient of the stud at T temperature, L Sensitization of For the dimension of the sensor in the thickness direction of the layer structure mass block phi Sensitization of Is the thermal expansion coefficient of the sensitive element at the temperature T.
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