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CN107991233B - Extinction spectrum measuring device for noble metal nano array and sensing detection method thereof - Google Patents

Extinction spectrum measuring device for noble metal nano array and sensing detection method thereof Download PDF

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CN107991233B
CN107991233B CN201711061973.6A CN201711061973A CN107991233B CN 107991233 B CN107991233 B CN 107991233B CN 201711061973 A CN201711061973 A CN 201711061973A CN 107991233 B CN107991233 B CN 107991233B
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吴冠毅
周骏
王鹏
陈栋
张珠峰
王泓熹
姜涛
顾辰杰
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Dongying Ruigang Investment Service Co ltd
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Abstract

本发明公开一种贵金属纳米阵列消光光谱测量装置及其传感检测方法,其装置包括白光光源、光束提升器、显微组件、样品夹具、光信号采集器、光谱仪和计算机终端,白光光源发出的光束经光束提升器改变传播路径后入射至显微组件上,显微组件出射的聚焦光束入射至被测样品上,光信号采集器接收经被测样品透射的聚焦光束并传输给光谱仪,光谱仪输出光谱信号给计算机终端,计算机终端根据被测样品的消光光谱相对于贵金属纳米阵列的消光光谱的消光峰位置的变化,计算获得有机溶液的浓度;该装置能够对具有复杂结构、微米级尺寸大小的贵金属纳米阵列的消光光谱实现精确定位测量;利用该装置实现有机溶液浓度检测的过程简单,成本低,灵敏度高。

Figure 201711061973

The invention discloses a noble metal nano-array extinction spectrum measurement device and a sensing and detection method thereof. The device comprises a white light source, a beam lifter, a microscopic component, a sample holder, an optical signal collector, a spectrometer and a computer terminal. The beam is incident on the microscope assembly after changing the propagation path through the beam lifter. The focused beam emitted by the microscope assembly is incident on the sample to be tested. The optical signal collector receives the focused beam transmitted by the sample to be tested and transmits it to the spectrometer. The spectrometer outputs The spectral signal is sent to the computer terminal, and the computer terminal calculates and obtains the concentration of the organic solution according to the change of the extinction peak position of the extinction spectrum of the tested sample relative to the extinction spectrum of the noble metal nanoarray. The extinction spectrum of the noble metal nanoarray realizes precise positioning measurement; the process of realizing the concentration detection of organic solution by using the device is simple, the cost is low, and the sensitivity is high.

Figure 201711061973

Description

贵金属纳米阵列消光光谱测量装置及其传感检测方法Precious metal nanoarray extinction spectrum measurement device and sensing detection method thereof

技术领域technical field

本发明涉及一种有机溶液浓度的传感检测技术,尤其是涉及一种贵金属纳米阵列消光光谱测量装置以及利用其实现有机溶液浓度传感检测的方法。The invention relates to a sensing detection technology of organic solution concentration, in particular to a noble metal nano-array extinction spectrum measurement device and a method for realizing organic solution concentration sensing detection by using the same.

背景技术Background technique

众所周知,贵金属纳米粒子的消光特性对其自身的尺寸、形貌和环境介质具有强烈的依赖性。通过贵金属纳米粒子的消光光谱测量可以对其消光特性进行表征和分析。一般地,贵金属纳米粒子的消光光谱是通过测量贵金属纳米粒子的胶体溶液的吸收光谱得到的,而对于由贵金属纳米粒子自组装形成的贵金属纳米阵列或者由微纳刻蚀技术制备的贵金属纳米阵列的消光光谱,则需要同时测量贵金属纳米阵列的散射光谱和吸收光谱。目前,贵金属纳米阵列的散射光谱需要借助积分球进行测量,贵金属纳米阵列的吸收光谱则需要借助紫外可见近红外分光光度计进行测量,其中利用积分球的测量方法需要进行多步的光通量和光谱定标,利用紫外可见近红外分光光度计的测量方法需要自检、暗电流和基线校准等一系列步骤,故而这两种方法都存在测量耗时长、操作繁琐的不足,且积分球和紫外可见近红外分光光度计都只能测量样品的整体光谱特性,即无法对样品进行局部的精确定位测量,因而不适用于具有复杂结构的贵金属纳米阵列样品的消光光谱测量。It is well known that the extinction properties of noble metal nanoparticles are strongly dependent on their size, morphology, and environmental media. The extinction characteristics of noble metal nanoparticles can be characterized and analyzed by the measurement of extinction spectrum of noble metal nanoparticles. Generally, the extinction spectrum of noble metal nanoparticles is obtained by measuring the absorption spectrum of the colloidal solution of noble metal nanoparticles. Extinction spectroscopy requires simultaneous measurement of the scattering and absorption spectra of noble metal nanoarrays. At present, the scattering spectrum of noble metal nanoarrays needs to be measured with an integrating sphere, and the absorption spectrum of noble metal nanoarrays needs to be measured with an ultraviolet-visible-near-infrared spectrophotometer. The measurement method using integrating spheres requires multi-step luminous flux and spectral determination. The measurement method using the UV-Vis-NIR spectrophotometer requires a series of steps such as self-checking, dark current and baseline calibration. Therefore, these two methods have the shortcomings of long measurement time and cumbersome operation. Infrared spectrophotometers can only measure the overall spectral characteristics of the sample, that is, they cannot perform local precise localization measurement of the sample, so they are not suitable for the measurement of extinction spectra of noble metal nanoarray samples with complex structures.

另一方面,就有机溶液浓度的传感检测而言,目前有许多常用方法,例如:基于朗伯-比尔定律的吸收光谱方法、基于物质分离吸附原理的气/液相色谱法、基于分子电离技术的分子质谱法、基于光与物质非弹性散射的拉曼光谱检测法等。这些常用方法虽然能够有效实现有机溶液浓度的传感检测,但是也各自存在不足,如:基于朗伯-比尔定律的吸收光谱方法只适用于低浓度(<0.01mol/L)溶液的检测;基于物质分离吸附原理的气/液相色谱法和基于分子电离技术的分子质谱法的检测成本高;基于光与物质非弹性散射的拉曼光谱检测法易受荧光和光学系统参数的影响,检测精度不够理想。On the other hand, as far as the sensing and detection of organic solution concentration is concerned, there are many commonly used methods, such as: absorption spectroscopy method based on Lambert-Beer law, gas/liquid chromatography method based on the principle of substance separation and adsorption, molecular ionization based method Molecular mass spectrometry, Raman spectroscopy based on inelastic scattering of light and matter, etc. Although these common methods can effectively realize the sensing and detection of the concentration of organic solutions, they also have their own shortcomings. Gas/liquid chromatography based on the principle of substance separation and adsorption and molecular mass spectrometry based on molecular ionization technology have high detection costs; Raman spectroscopy based on inelastic scattering of light and matter is easily affected by fluorescence and optical system parameters. Not ideal.

因此,设计一种能够对微米级尺寸大小且具有复杂结构的贵金属纳米阵列的被测样品进行消光光谱精确测量的装置,并利用贵金属纳米阵列的消光光谱对其自身尺寸、形貌和环境介质强烈依赖的特性,开展有机溶液浓度的精确传感检测,具有重要的应用价值。Therefore, a device that can accurately measure the extinction spectrum of the measured sample of noble metal nanoarrays with micron-scale size and complex structure is designed, and the extinction spectrum of noble metal nanoarrays is strongly affected by its own size, morphology and environmental medium. It has important application value to carry out accurate sensing detection of organic solution concentration.

发明内容SUMMARY OF THE INVENTION

本发明所要解决的第一个技术问题是提供一种结构简单、操作方便的贵金属纳米阵列消光光谱测量装置,其能够对微米级尺寸大小且具有复杂结构的贵金属纳米阵列的被测样品实现精确定位测量。The first technical problem to be solved by the present invention is to provide a noble metal nano-array extinction spectrum measurement device with a simple structure and convenient operation, which can accurately locate the measured sample of the noble metal nano-array with a micron size and a complex structure. Measurement.

本发明所要解决的第二个技术问题是提供一种利用贵金属纳米阵列消光光谱测量装置实现有机溶液浓度传感检测的方法,其检测过程简单、检测成本低、检测灵敏度高。The second technical problem to be solved by the present invention is to provide a method for realizing organic solution concentration sensing detection by using a noble metal nanoarray extinction spectrum measuring device, which has simple detection process, low detection cost and high detection sensitivity.

本发明解决上述第一个技术问题所采用的技术方案为:一种贵金属纳米阵列消光光谱测量装置,其特征在于:包括白光光源、用于改变光束传播路径的光束提升器、显微组件、用于夹持住被测样品使被测样品水平放置的样品夹具、光信号采集器、光谱仪和计算机终端,所述的白光光源发出的光束经所述的光束提升器改变传播路径后入射至所述的显微组件上,所述的显微组件出射的聚焦光束入射至所述的被测样品上,所述的光信号采集器接收透射过所述的被测样品的聚焦光束,并传输聚焦光束给所述的光谱仪,所述的光谱仪输出光谱信号给所述的计算机终端。The technical solution adopted by the present invention to solve the above-mentioned first technical problem is: a noble metal nano-array extinction spectrum measuring device, which is characterized in that it includes a white light source, a beam lifter for changing the propagation path of the beam, a microscope assembly, a In the sample holder, optical signal collector, spectrometer and computer terminal that clamp the sample to be tested and place the sample horizontally, the beam emitted by the white light source is incident on the beam lifter after changing the propagation path. On the microscope assembly, the focused beam emitted by the microscope assembly is incident on the sample to be tested, and the optical signal collector receives the focused beam transmitted through the sample to be tested, and transmits the focused beam To the spectrometer, the spectrometer outputs a spectral signal to the computer terminal.

所述的光束提升器由竖直设置的第一支架及设置于所述的第一支架的下部的第一反射镜和设置于所述的第一支架的上部的第二反射镜组成,所述的白光光源发出的光束入射至所述的第一反射镜上,所述的第一反射镜反射的光束入射至所述的第二反射镜上,所述的第二反射镜反射的光束入射至所述的显微组件上。在此,光束提升器的作用是用来将光束从低位置提升到高位置,利用两个反射镜即可实现,光束提升器的结构简单,成本低,且操作方便。The beam lifter is composed of a vertically arranged first bracket, a first mirror arranged at the lower part of the first bracket, and a second reflection mirror arranged at the upper part of the first bracket. The light beam emitted by the white light source is incident on the first reflecting mirror, the light beam reflected by the first reflecting mirror is incident on the second reflecting mirror, and the light beam reflected by the second reflecting mirror is incident on the on the described microscope assembly. Here, the function of the beam lifter is to lift the light beam from a low position to a high position, which can be achieved by using two mirrors. The beam lifter has a simple structure, low cost and convenient operation.

所述的第一反射镜和所述的第二反射镜均与水平面呈45度角,所述的第一反射镜和所述的第二反射镜平行设置,所述的第一反射镜的反射面与所述的第二反射镜的反射面正对。在此,对第一反射镜和第二反射镜的安装位置进行限定,能够确保第一反射镜反射的光束全部被第二反射镜接收,第二反射镜反射的光束全部被显微组件接收。Both the first reflecting mirror and the second reflecting mirror are at an angle of 45 degrees with the horizontal plane, the first reflecting mirror and the second reflecting mirror are arranged in parallel, and the reflection of the first reflecting mirror The surface is directly opposite to the reflecting surface of the second reflecting mirror. Here, the installation positions of the first reflector and the second reflector are limited to ensure that all light beams reflected by the first reflector are received by the second reflector, and all light beams reflected by the second reflector are received by the microscope assembly.

所述的显微组件由竖直设置的第二支架、自上而下依次连接于所述的第二支架上的半透半反镜和物镜、连接于所述的第二支架上且位于所述的半透半反镜透射的光束的传播路径上的吸光板组成,所述的半透半反镜和所述的物镜位于所述的样品夹具的正上方,所述的光束提升器出射的光束入射至所述的半透半反镜上,所述的半透半反镜反射的光束入射至所述的物镜上,所述的物镜出射的聚焦光束入射至所述的被测样品上,所述的半透半反镜透射的光束入射至所述的吸光板上,所述的吸光板吸收所述的半透半反镜透射的光束。在此,先利用半透半反镜来改变来自第二反射镜反射的光束的传播路径,使半透半反镜反射的光束垂直入射至物镜上,而半透半反镜透射的光束入射至吸光板上,被吸光板吸收;然后由物镜对半透半反镜反射的光束进行聚焦,这种显微组件的结构简单且功能实现方便。The microscopic assembly consists of a vertically arranged second bracket, a semi-transparent mirror and an objective lens sequentially connected to the second bracket from top to bottom, connected to the second bracket and located on the second bracket. The light absorbing plate on the propagation path of the light beam transmitted by the half mirror is composed of the light absorbing plate, the half mirror and the objective lens are located directly above the sample holder, and the beam lifter exits the light absorbing plate. The light beam is incident on the half mirror, the beam reflected by the half mirror is incident on the objective lens, and the focused beam emitted by the objective lens is incident on the tested sample, The light beam transmitted by the half mirror is incident on the light absorption plate, and the light absorption plate absorbs the light beam transmitted by the half mirror. Here, first use the half mirror to change the propagation path of the light beam reflected from the second mirror, so that the light beam reflected by the half mirror is vertically incident on the objective lens, and the light beam transmitted by the half mirror is incident on the objective lens. The light absorbing plate is absorbed by the light absorbing plate; and then the light beam reflected by the half mirror is focused by the objective lens.

所述的半透半反镜与水平面呈45度角,所述的半透半反镜的反射面与所述的第二反射镜的反射面相对;所述的吸光板竖直设置与所述的半透半反镜呈45度角。在此,通过限制第二反射镜与半透半反镜的相对位置,能够确保第二反射镜反射的光束全部被半透半反镜接收;通过限制半透半反镜与吸光板的相对位置,能够确保半透半反镜透射的光束全部被吸光板吸收。The half-mirror and the horizontal plane are at an angle of 45 degrees, the reflection surface of the half-mirror is opposite to the reflection surface of the second reflection mirror; the light-absorbing plate is vertically arranged with the The transflective mirror is at a 45-degree angle. Here, by limiting the relative position of the second mirror and the half mirror, it can be ensured that all the light beams reflected by the second mirror are received by the half mirror; by limiting the relative position of the half mirror and the light absorbing plate , which can ensure that all the light beam transmitted by the half mirror is absorbed by the light absorbing plate.

所述的第二支架上还连接有CCD(Charge-coupled Device,电荷耦合元件)摄像机,所述的CCD摄像机位于所述的半透半反镜的正上方,所述的CCD摄像机的输出端与所述的计算机终端连接,所述的CCD摄像机获取通过所述的物镜观察到的所述的被测样品中的贵金属纳米阵列的形貌。在此,通过在物镜的正上方设置一个CCD摄像机,利用CCD摄像机来获取作为被测样品的贵金属纳米阵列的形貌,拓展了该装置的功能。The second bracket is also connected with a CCD (Charge-coupled Device, charge-coupled device) camera, the CCD camera is located directly above the half mirror, and the output end of the CCD camera is connected to the The computer terminal is connected, and the CCD camera acquires the morphology of the noble metal nanoarray in the tested sample observed through the objective lens. Here, a CCD camera is set directly above the objective lens, and the CCD camera is used to obtain the topography of the noble metal nanoarray as the sample to be tested, which expands the function of the device.

该贵金属纳米阵列消光光谱测量装置还包括用于调节所述的样品夹具的位置的第一三维位置调节装置,所述的第一三维位置调节装置由第一定位板、安装于所述的第一定位板上的第一三维位移平台、连接所述的第一三维位移平台与所述的样品夹具的第一连杆组成,通过所述的第一三维位移平台调节所述的样品夹具的位置使所述的被测样品位于所述的物镜的正下方。在此,利用第一三维位移平台来调节样品夹具的位置,使被测样品位于物镜的正下方,使得物镜出射的聚焦光束完全入射至被测样品上。The noble metal nano-array extinction spectrum measurement device further includes a first three-dimensional position adjusting device for adjusting the position of the sample holder, and the first three-dimensional position adjusting device consists of a first positioning plate, mounted on the first The first three-dimensional displacement platform on the positioning plate and the first connecting rod connecting the first three-dimensional displacement platform and the sample holder are composed, and the position of the sample holder is adjusted through the first three-dimensional displacement platform so that the The sample to be tested is located just below the objective lens. Here, the first three-dimensional displacement platform is used to adjust the position of the sample holder, so that the sample to be tested is located directly under the objective lens, so that the focused beam emitted by the objective lens is completely incident on the sample to be tested.

所述的光信号采集器由光纤探头夹具和由所述的光纤探头夹具夹持的光纤探头组成,所述的光纤探头竖直放置且其接收端位于所述的被测样品的正下方,所述的光纤探头接收透射过所述的被测样品的聚焦光束,所述的光纤探头的输出端通过传导光纤与所述的光谱仪的输入端连接,所述的光纤探头传输透射过所述的被测样品的聚焦光束给所述的光谱仪;The optical signal collector is composed of an optical fiber probe clamp and an optical fiber probe clamped by the optical fiber probe clamp. The optical fiber probe is placed vertically and its receiving end is located directly under the tested sample, so the optical fiber probe is placed vertically. The optical fiber probe receives the focused beam transmitted through the sample to be tested, the output end of the optical fiber probe is connected with the input end of the spectrometer through a conducting fiber, and the optical fiber probe transmits and transmits through the The focused beam of the test sample is given to the spectrometer;

该贵金属纳米阵列消光光谱测量装置还包括用于调节所述的光信号采集器的位置的第二三维位置调节装置,所述的第二三维位置调节装置由第二定位板、安装于所述的第二定位板上的第二三维位移平台、连接所述的第二三维位移平台与所述的光纤探头夹具的第二连杆组成,通过所述的第二三维位移平台调节所述的光纤探头夹具的位置使所述的光纤探头位于所述的被测样品的正下方且靠近所述的被测样品的下表面。在此,利用第二三维位移平台来调节光纤探头夹具的位置,使光纤探头位于被测样品的正下方且靠近被测样品的下表面,使光纤探头采集的信息更为准确。The noble metal nano-array extinction spectrum measurement device also includes a second three-dimensional position adjustment device for adjusting the position of the optical signal collector, and the second three-dimensional position adjustment device consists of a second positioning plate, mounted on the The second three-dimensional displacement platform on the second positioning plate is composed of a second connecting rod connecting the second three-dimensional displacement platform and the optical fiber probe fixture, and the optical fiber probe is adjusted through the second three-dimensional displacement platform The position of the fixture is such that the optical fiber probe is located directly below the sample to be tested and close to the lower surface of the sample to be tested. Here, the second three-dimensional displacement platform is used to adjust the position of the fiber optic probe fixture, so that the fiber optic probe is located directly below the sample to be tested and close to the lower surface of the sample to be tested, so that the information collected by the fiber optic probe is more accurate.

该贵金属纳米阵列消光光谱测量装置还包括底座,所述的白光光源和所述的光谱仪放置于所述的底座上,所述的第一支架的底部和所述的第二支架的底部分别与所述的底座固定连接,所述的第一定位板和所述的第二定位板分别与所述的底座固定连接。在此,利用底座将所有部件集中在一起,构成一个整体。The noble metal nanoarray extinction spectrum measurement device further includes a base, the white light source and the spectrometer are placed on the base, and the bottom of the first support and the bottom of the second support are respectively connected to the base. The base is fixedly connected, and the first positioning plate and the second positioning plate are respectively fixedly connected to the base. Here, the base is used to bring all the parts together to form a whole.

本发明解决上述第二个技术问题所采用的技术方案为:一种上述的贵金属纳米阵列消光光谱测量装置的传感检测方法,其特征在于:利用贵金属纳米阵列消光光谱测量装置进行有机溶液浓度的传感检测,具体包括以下步骤:The technical solution adopted by the present invention to solve the above-mentioned second technical problem is: a sensing and detection method of the above-mentioned noble metal nano-array extinction spectrum measuring device, characterized in that: the noble metal nano-array extinction spectrum measuring device is used to measure the concentration of the organic solution. Sensing detection, including the following steps:

①利用电子束刻蚀技术,在沉积有导电薄膜的导电玻璃上制备出具有特定图案的贵金属纳米阵列;然后将带有特定图案的贵金属纳米阵列的导电玻璃作为被测样品;①Using electron beam etching technology to prepare a precious metal nanoarray with a specific pattern on the conductive glass deposited with a conductive film; then use the conductive glass with a specific pattern of precious metal nanoarrays as the sample to be tested;

②开启白光光源;然后通过第二三维位移平台调节光纤探头夹具的位置,使光纤探头的接收端口位于物镜的焦平面,从而使得通过物镜和CCD摄像机在计算机终端自带的显示器中清晰显示出光纤探头的接收端口;再开启光谱仪,并设定信号采集参数;此时在白光光源开启状态下光谱仪输出的光谱信号为白光光源的光谱,记为I(λ),并传输给计算机终端,由计算机终端保存;其中,λ表示波长;②Turn on the white light source; then adjust the position of the optical fiber probe fixture through the second three-dimensional displacement platform, so that the receiving port of the optical fiber probe is located in the focal plane of the objective lens, so that the optical fiber can be clearly displayed on the monitor of the computer terminal through the objective lens and the CCD camera The receiving port of the probe; turn on the spectrometer again, and set the signal acquisition parameters; at this time, when the white light source is turned on, the spectral signal output by the spectrometer is the spectrum of the white light source, denoted as I(λ), and transmitted to the computer terminal, by the computer The terminal is saved; among them, λ represents the wavelength;

③通过第二三维位移平台调节光纤探头夹具的位置,使光纤探头竖直下移,下移光纤探头是为了让被测样品显示在焦平面上,由于导电玻璃很薄,因此一般光纤探头下移2cm即可;然后利用样品夹具夹持住被测样品,并使被测样品水平放置;接着通过第一三维位移平台调节样品夹具的位置,使被测样品中的贵金属纳米阵列位于物镜的焦平面,且确保通过物镜和CCD摄像机在计算机终端自带的显示器中清晰显示出被测样品中的贵金属纳米阵列图像;再通过第二三维位移平台调节光纤探头夹具的位置,使光纤探头位于被测样品的正下方,并使光纤探头的接收端口尽量接近被测样品的下表面;此时在白光光源开启状态下光谱仪输出的光谱信号为被测样品中的贵金属纳米阵列的透射光谱,记为T1(λ),并传输给计算机终端,由计算机终端保存;③Adjust the position of the fiber optic probe fixture through the second three-dimensional displacement platform, so that the fiber optic probe moves vertically downward. The purpose of moving the fiber optic probe downward is to make the sample under test display on the focal plane. Because the conductive glass is very thin, the fiber optic probe is generally moved downward. Then use the sample holder to hold the sample to be tested and place the sample horizontally; then adjust the position of the sample holder through the first three-dimensional displacement platform, so that the noble metal nanoarray in the sample to be tested is located in the focal plane of the objective lens , and ensure that the noble metal nanoarray image in the tested sample is clearly displayed on the monitor of the computer terminal through the objective lens and CCD camera; and then adjust the position of the fiber probe clamp through the second three-dimensional displacement platform, so that the fiber probe is located in the tested sample. and make the receiving port of the fiber probe as close as possible to the lower surface of the sample under test; at this time, the spectral signal output by the spectrometer when the white light source is turned on is the transmission spectrum of the noble metal nanoarray in the sample under test, denoted as T 1 (λ), and transmitted to the computer terminal, and saved by the computer terminal;

④关闭白光光源;将此时在白光光源关闭状态下光谱仪输出的光谱信号作为第一背景光谱,记为B1(λ),并传输给计算机终端,由计算机终端保存;4. Turn off the white light source; take the spectral signal output by the spectrometer when the white light source is turned off at this time as the first background spectrum, denoted as B 1 (λ), and transmit it to the computer terminal for storage by the computer terminal;

⑤计算机终端根据消光光谱的定义,利用公式E1(λ)=I(λ)-T1(λ)+B1(λ),计算得到被测样品中的贵金属纳米阵列的消光光谱E1(λ);⑤ According to the definition of extinction spectrum, the computer terminal calculates the extinction spectrum E 1 ( λ);

⑥取待测有机溶液,并滴加到被测样品中的贵金属纳米阵列上;然后将此时在白光光源关闭状态下光谱仪输出的光谱信号作为第二背景光谱,记为B2(λ),并传输给计算机终端,由计算机终端保存;⑥ Take the organic solution to be tested and add it dropwise to the noble metal nanoarray in the sample to be tested; then take the spectral signal output by the spectrometer when the white light source is turned off at this time as the second background spectrum, denoted as B 2 (λ), and transmitted to the computer terminal, and saved by the computer terminal;

⑦开启白光光源;此时在白光光源开启状态下光谱仪输出的光谱信号为滴加有待测有机溶液的贵金属纳米阵列的透射光谱,记为T2(λ),并传输给计算机终端,由计算机终端保存;⑦Turn on the white light source; at this time, when the white light source is turned on, the spectral signal output by the spectrometer is the transmission spectrum of the precious metal nanoarray with the organic solution to be tested dropwise added, denoted as T 2 (λ), and transmitted to the computer terminal, by the computer terminal save;

⑧计算机终端根据消光光谱的定义,利用公式E2(λ)=I(λ)-T2(λ)+B2(λ),计算得到滴加有待测有机溶液的贵金属纳米阵列的消光光谱E2(λ);⑧According to the definition of extinction spectrum, the computer terminal uses the formula E 2 (λ)=I(λ)-T 2 (λ)+B 2 (λ) to calculate and obtain the extinction spectrum of the noble metal nano-array with the organic solution to be tested dropwise added E 2 (λ);

⑨将E1(λ)作为参考光谱,再根据E2(λ)中的消光峰相对于E1(λ)中的消光峰的位置或强度的改变,得到待测有机溶液的浓度。⑨ Taking E 1 (λ) as the reference spectrum, and then according to the change of the position or intensity of the extinction peak in E 2 (λ) relative to the extinction peak in E 1 (λ), the concentration of the organic solution to be tested is obtained.

与现有技术相比,本发明的优点在于:Compared with the prior art, the advantages of the present invention are:

1)本发明的装置所采用的机械部件和光学元件少,使得该装置的结构更为简单,且容易实现。1) The device of the present invention adopts few mechanical parts and optical elements, which makes the structure of the device simpler and easier to realize.

2)本发明的装置使用时只需开启和关闭白光光源和光谱仪即可实现测量,操作简单,测量耗时短。2) The device of the present invention only needs to turn on and off the white light source and the spectrometer to realize the measurement, the operation is simple, and the measurement time is short.

3)本发明的装置直接利用光信号采集器接收透射过被测样品的聚焦光束来获得贵金属纳米阵列的消光光谱,检测过程快捷方便。3) The device of the present invention directly uses the optical signal collector to receive the focused beam transmitted through the sample to be tested to obtain the extinction spectrum of the noble metal nanoarray, and the detection process is fast and convenient.

4)本发明的装置利用物镜聚焦光束于被测样品的表面并且利用CCD摄像机清晰成像,因此可以实现微米尺度下多种贵金属纳米阵列结构的消光光谱的精确定位测量。4) The device of the present invention uses the objective lens to focus the light beam on the surface of the sample to be measured and uses the CCD camera to image clearly, so it can achieve precise positioning and measurement of the extinction spectra of various noble metal nanoarray structures at the micron scale.

5)利用本发明的装置实现有机溶液浓度的传感检测后,所用的贵金属纳米阵列清洗后可多次重复使用,降低了检测成本。5) After using the device of the present invention to realize the sensing detection of the concentration of the organic solution, the used noble metal nano-array can be reused for many times after cleaning, which reduces the detection cost.

6)利用贵金属纳米阵列消光光谱测量装置实现有机溶液浓度传感检测的方法,过程简单、检测成本低、检测灵敏度高。6) The method for realizing the organic solution concentration sensing detection by utilizing the noble metal nano-array extinction spectrum measuring device has the advantages of simple process, low detection cost and high detection sensitivity.

附图说明Description of drawings

图1为本发明的贵金属纳米阵列消光光谱测量装置的组成结构示意图;Fig. 1 is the composition structure schematic diagram of the noble metal nanoarray extinction spectrum measuring device of the present invention;

图2为本发明的贵金属纳米阵列消光光谱测量装置中的第一三维位置调节装置的组成结构示意图;2 is a schematic diagram of the composition and structure of a first three-dimensional position adjustment device in the noble metal nanoarray extinction spectrum measurement device of the present invention;

图3为本发明的贵金属纳米阵列消光光谱测量装置中的第二三维位置调节装置的组成结构示意图;3 is a schematic diagram of the composition and structure of the second three-dimensional position adjustment device in the noble metal nanoarray extinction spectrum measurement device of the present invention;

图4为金纳米粒子的直径为200纳米、高度为75纳米,金纳米粒子之间的间距为50纳米的具有周期结构的金纳米阵列的扫描电子显微镜照片;4 is a scanning electron microscope photograph of a gold nanoarray with a periodic structure, wherein the diameter of the gold nanoparticles is 200 nanometers, the height is 75 nanometers, and the spacing between the gold nanoparticles is 50 nanometers;

图5为实施例三中在金纳米阵列上分别滴加20微升浓度为20%、40%、60%和80%的乙醇溶液和滴加浓度为99.7%的无水乙醇后,获得的滴加有浓度为20%、40%、60%和80%的乙醇溶液和浓度为99.7%的无水乙醇的金纳米阵列的消光光谱;Figure 5 shows the droplets obtained after dropping 20 microliters of 20%, 40%, 60% and 80% ethanol solutions and 99.7% absolute ethanol dropwise onto the gold nanoarrays in Example 3, respectively. Extinction spectra of gold nanoarrays added with 20%, 40%, 60% and 80% ethanol solutions and 99.7% absolute ethanol;

图6为实施例三中不同浓度的乙醇溶液及无水乙醇的浓度响应曲线图;Fig. 6 is the concentration response curve diagram of different concentrations of ethanol solution and absolute ethanol in embodiment three;

图7为实施例四中在金纳米阵列上分别滴加20微升浓度为5mg/L、10mg/L、15mg/L、20mg/L和25mg/L的恩氟沙星溶液后,获得的滴加有浓度为5mg/L、10mg/L、15mg/L、20mg/L和25mg/L的恩氟沙星溶液的金纳米阵列的消光光谱;Figure 7 shows the droplets obtained after dripping 20 microliters of enrofloxacin solutions with concentrations of 5 mg/L, 10 mg/L, 15 mg/L, 20 mg/L and 25 mg/L on the gold nanoarray in Example 4. Extinction spectra of gold nanoarrays added with enrofloxacin solutions at concentrations of 5 mg/L, 10 mg/L, 15 mg/L, 20 mg/L and 25 mg/L;

图8为实施例四中不同浓度的恩氟沙星溶液的浓度响应曲线图;Fig. 8 is the concentration response curve diagram of the enrofloxacin solution of different concentrations in embodiment four;

图9为金纳米粒子的直径为200纳米、高度为75纳米,金纳米粒子之间的间距为100纳米的具有周期结构的金纳米阵列的扫描电子显微镜照片;FIG. 9 is a scanning electron microscope photograph of a gold nanoarray with a periodic structure, wherein the diameter of the gold nanoparticles is 200 nanometers, the height is 75 nanometers, and the distance between the gold nanoparticles is 100 nanometers;

图10为实施例五中在金纳米阵列上分别滴加20微升浓度为20%、40%、60%和80%的乙醇溶液和滴加浓度为99.7%的无水乙醇后,获得的滴加有浓度为20%、40%、60%和80%的乙醇溶液和浓度为99.7%的无水乙醇的金纳米阵列的消光光谱;Figure 10 shows the droplets obtained after dropping 20 microliters of 20%, 40%, 60%, and 80% ethanol solutions and 99.7% absolute ethanol dropwise onto the gold nanoarrays in Example 5, respectively. Extinction spectra of gold nanoarrays added with 20%, 40%, 60% and 80% ethanol solutions and 99.7% absolute ethanol;

图11为实施例五中不同浓度的乙醇溶液及无水乙醇的浓度响应曲线图;Fig. 11 is the concentration response curve diagram of different concentrations of ethanol solution and absolute ethanol in Example 5;

图12为实施例六中在金纳米阵列上分别滴加20微升浓度为5mg/L、10mg/L、15mg/L、20mg/L和25mg/L的恩氟沙星溶液后,获得的滴加有浓度为5mg/L、10mg/L、15mg/L、20mg/L和25mg/L的恩氟沙星溶液的金纳米阵列的消光光谱;Figure 12 shows the droplets obtained after dripping 20 microliters of enrofloxacin solutions with concentrations of 5 mg/L, 10 mg/L, 15 mg/L, 20 mg/L and 25 mg/L on the gold nanoarray in Example 6. Extinction spectra of gold nanoarrays added with enrofloxacin solutions at concentrations of 5 mg/L, 10 mg/L, 15 mg/L, 20 mg/L and 25 mg/L;

图13为实施例六中不同浓度的恩氟沙星溶液的浓度响应曲线图。Fig. 13 is the concentration response curve diagram of different concentrations of enrofloxacin solution in Example 6.

具体实施方式Detailed ways

以下结合附图实施例对本发明作进一步详细描述。The present invention will be further described in detail below with reference to the embodiments of the accompanying drawings.

实施例一:Example 1:

本实施例提出的一种贵金属纳米阵列消光光谱测量装置,如图1所示,其包括白光光源2、用于改变光束传播路径的光束提升器3、显微组件4、用于夹持住被测样品使被测样品水平放置的样品夹具5、光信号采集器6、光谱仪7和计算机终端8,白光光源2发出的光束经光束提升器3改变传播路径后入射至显微组件4上,显微组件4出射的聚焦光束入射至被测样品9上,光信号采集器6接收透射过被测样品9的聚焦光束,并传输聚焦光束给光谱仪7,光谱仪7输出光谱信号给计算机终端8。A noble metal nanoarray extinction spectrum measurement device proposed in this embodiment, as shown in FIG. 1 , includes a white light source 2, a beam lifter 3 for changing the beam propagation path, a microscopic component 4, a The sample holder 5, the optical signal collector 6, the spectrometer 7 and the computer terminal 8 are placed horizontally on the sample to be tested. The light beam emitted by the white light source 2 is incident on the microscope assembly 4 after changing the propagation path through the beam lifter 3, and the display is displayed. The focused beam emitted by the micro-component 4 is incident on the tested sample 9 , and the optical signal collector 6 receives the focused beam transmitted through the tested sample 9 and transmits the focused beam to the spectrometer 7 , and the spectrometer 7 outputs a spectral signal to the computer terminal 8 .

在此具体实施例中,光束提升器3由竖直设置的第一支架31及设置于第一支架31的下部的第一反射镜32和设置于第一支架31的上部的第二反射镜33组成,白光光源2发出的光束入射至第一反射镜32上,第一反射镜32反射的光束入射至第二反射镜33上,第二反射镜33反射的光束入射至显微组件4上;光束提升器3的作用是用来将光束从低位置提升到高位置,利用两个反射镜即可实现,光提升器的结构简单,成本低,且操作方便。In this specific embodiment, the beam lifter 3 consists of a first bracket 31 arranged vertically, a first mirror 32 arranged at the lower part of the first bracket 31 and a second mirror 33 arranged at the upper part of the first bracket 31 Composition, the light beam emitted by the white light source 2 is incident on the first reflecting mirror 32, the light beam reflected by the first reflecting mirror 32 is incident on the second reflecting mirror 33, and the light beam reflected by the second reflecting mirror 33 is incident on the microscope assembly 4; The function of the beam lifter 3 is to lift the light beam from a low position to a high position, which can be achieved by using two mirrors. The light lifter has a simple structure, low cost and convenient operation.

在此具体实施例中,第一反射镜32和第二反射镜33均与水平面呈45度角,第一反射镜32和第二反射镜33平行设置,第一反射镜32的反射面与第二反射镜33的反射面正对;对第一反射镜32和第二反射镜33的安装位置进行限定,能够确保第一反射镜32反射的光束全部被第二反射镜33接收,第二反射镜33反射的光束全部被显微组件4接收。In this specific embodiment, both the first reflecting mirror 32 and the second reflecting mirror 33 are at an angle of 45 degrees with the horizontal plane, the first reflecting mirror 32 and the second reflecting mirror 33 are arranged in parallel, and the reflecting surface of the first reflecting mirror 32 is parallel to the first reflecting mirror 32 and the second reflecting mirror 33. The reflecting surfaces of the two reflecting mirrors 33 are facing each other; the installation positions of the first reflecting mirror 32 and the second reflecting mirror 33 are limited to ensure that all the light beams reflected by the first reflecting mirror 32 are received by the second reflecting mirror 33 and the second reflecting mirror 33 All the light beams reflected by the mirror 33 are received by the microscope assembly 4 .

在此具体实施例中,显微组件4由竖直设置的第二支架41、自上而下依次连接于第二支架41上的半透半反镜42和物镜43、连接于第二支架41上且位于半透半反镜42透射的光束的传播路径上的吸光板44组成,半透半反镜42和物镜43位于样品夹具5的正上方,光束提升器3出射的光束入射至半透半反镜42上,半透半反镜42反射的光束入射至物镜43上,物镜43出射的聚焦光束入射至被测样品9上,半透半反镜42透射的光束入射至吸光板44上,吸光板44吸收半透半反镜42透射的光束;先利用半透半反镜42来改变来自第二反射镜33反射的光束的传播路径,使半透半反镜42反射的光束垂直入射至物镜43上,而半透半反镜42透射的光束入射至吸光板44上,被吸光板44吸收;然后由物镜43对半透半反镜42反射的光束进行聚焦,这种显微组件4的结构简单且功能实现方便。In this specific embodiment, the microscope assembly 4 is composed of a vertically arranged second bracket 41 , a half mirror 42 and an objective lens 43 sequentially connected to the second bracket 41 from top to bottom, and connected to the second bracket 41 It consists of a light absorbing plate 44 on the upper part and located on the propagation path of the light beam transmitted by the half mirror 42; the half mirror 42 and the objective lens 43 are located directly above the sample holder 5; On the half mirror 42 , the beam reflected by the half mirror 42 is incident on the objective lens 43 , the focused beam emitted by the objective lens 43 is incident on the tested sample 9 , and the beam transmitted by the half mirror 42 is incident on the light absorbing plate 44 , the light absorbing plate 44 absorbs the light beam transmitted by the half mirror 42; first, the half mirror 42 is used to change the propagation path of the light beam reflected from the second mirror 33, so that the light beam reflected by the half mirror 42 is vertically incident to the objective lens 43, and the light beam transmitted by the half mirror 42 is incident on the light absorbing plate 44 and absorbed by the light absorbing plate 44; then the light beam reflected by the half mirror 42 is focused by the objective lens 43. 4 has a simple structure and convenient function realization.

在此具体实施例中,半透半反镜42与水平面呈45度角,半透半反镜42的反射面与第二反射镜33的反射面相对;吸光板44竖直设置与半透半反镜42呈45度角;通过限制第二反射镜33与半透半反镜42的相对位置,能够确保第二反射镜33反射的光束全部被半透半反镜42接收;通过限制半透半反镜42与吸光板44的相对位置,能够确保半透半反镜42透射的光束全部被吸光板44吸收。In this specific embodiment, the half mirror 42 is at an angle of 45 degrees to the horizontal plane, and the reflective surface of the half mirror 42 is opposite to the reflective surface of the second mirror 33; The mirror 42 is at an angle of 45 degrees; by limiting the relative position of the second mirror 33 and the half mirror 42, it can be ensured that all the light beams reflected by the second mirror 33 are received by the half mirror 42; The relative position of the half mirror 42 and the light absorbing plate 44 can ensure that all the light beams transmitted by the half mirror 42 are absorbed by the light absorbing plate 44 .

在此具体实施例中,第二支架41上还连接有CCD(Charge-coupled Device,电荷耦合元件)摄像机45,CCD摄像机45位于半透半反镜42的正上方,CCD摄像机45的输出端与计算机终端8连接,CCD摄像机45获取通过物镜43观察到的被测样品9中的贵金属纳米阵列的形貌;通过在物镜43的正上方设置一个CCD摄像机45,利用CCD摄像机45来获取作为被测样品9的贵金属纳米阵列的形貌,拓展了该装置的功能。In this specific embodiment, the second bracket 41 is also connected with a CCD (Charge-coupled Device, charge-coupled device) camera 45, the CCD camera 45 is located directly above the half mirror 42, and the output end of the CCD camera 45 is connected to the The computer terminal 8 is connected, and the CCD camera 45 obtains the appearance of the noble metal nanoarray in the tested sample 9 observed through the objective lens 43; by setting a CCD camera 45 directly above the objective lens 43, the CCD camera 45 is used to obtain the measured data. The morphology of the noble metal nanoarrays of sample 9 extends the functionality of the device.

在此具体实施例中,光信号采集器6如图3所示,其由光纤探头夹具64和由光纤探头夹具64夹持的光纤探头65组成,光纤探头65竖直放置且其接收端位于被测样品9的正下方,光纤探头65接收透射过被测样品9的聚焦光束,光纤探头65的输出端通过传导光纤66与光谱仪7的输入端连接,光纤探头65传输透射过被测样品9的聚焦光束给光谱仪7。In this specific embodiment, the optical signal collector 6 is shown in FIG. 3 , which is composed of a fiber probe clamp 64 and a fiber probe 65 clamped by the fiber probe clamp 64. The fiber probe 65 is placed vertically and its receiving end is located at the Just below the test sample 9, the fiber probe 65 receives the focused beam transmitted through the test sample 9, the output end of the fiber probe 65 is connected to the input end of the spectrometer 7 through the conducting fiber 66, and the fiber probe 65 transmits the light transmitted through the test sample 9. Focus the beam to the spectrometer 7 .

实施例二:Embodiment 2:

本实施例提出的一种贵金属纳米阵列消光光谱测量装置是对实施例一的装置的进一步改进,如图2和图3所示,即其还包括用于调节样品夹具5的位置的第一三维位置调节装置和用于调节光信号采集器6的位置的第二三维位置调节装置及底座1(参见图1),第一三维位置调节装置由第一定位板51、安装于第一定位板51上的第一三维位移平台52、连接第一三维位移平台52与样品夹具5的第一连杆53组成,通过第一三维位移平台52中的第一测微丝杆521、第二测微丝杆522和第三测微丝杆523调节样品夹具5的位置使被测样品9位于物镜43的正下方;第二三维位置调节装置由第二定位板61、安装于第二定位板61上的第二三维位移平台62、连接第二三维位移平台62与光纤探头夹具64的第二连杆63组成,通过第二三维位移平台62中的第一测微丝杆621、第二测微丝杆622和第三测微丝杆623调节光纤探头夹具64的位置使光纤探头65位于被测样品9的正下方且靠近被测样品9的下表面;白光光源2和光谱仪7放置于底座1上,第一支架31的底部和第二支架41的底部分别与底座1固定连接,第一定位板51和第二定位板61分别与底座1固定连接。A noble metal nanoarray extinction spectrum measurement device proposed in this embodiment is a further improvement to the device of the first embodiment, as shown in FIG. 2 and FIG. The position adjusting device, the second three-dimensional position adjusting device and the base 1 for adjusting the position of the optical signal collector 6 and the base 1 (see FIG. 1 ). The first three-dimensional displacement platform 52 and the first connecting rod 53 connecting the first three-dimensional displacement platform 52 and the sample holder 5 are composed of the first micrometer screw 521 and the second micrometer wire in the first three-dimensional displacement platform 52. The rod 522 and the third micrometer screw 523 adjust the position of the sample holder 5 so that the measured sample 9 is located directly under the objective lens 43; The second three-dimensional displacement platform 62 and the second connecting rod 63 connecting the second three-dimensional displacement platform 62 and the optical fiber probe fixture 64 are composed of the first micrometer screw 621 and the second micrometer screw in the second three-dimensional displacement platform 62 . 622 and the third micrometer screw 623 adjust the position of the optical fiber probe clamp 64 so that the optical fiber probe 65 is located directly below the measured sample 9 and is close to the lower surface of the measured sample 9; the white light source 2 and the spectrometer 7 are placed on the base 1, The bottom of the first bracket 31 and the bottom of the second bracket 41 are fixedly connected to the base 1 respectively, and the first positioning plate 51 and the second positioning plate 61 are fixedly connected to the base 1 respectively.

在此,利用第一三维位移平台52来调节样品夹具5的位置,使被测样品9位于物镜43的正下方,使得物镜43出射的聚焦光束完全入射至被测样品9上;利用第二三维位移平台62来调节光纤探头夹具64的位置,使光纤探头65位于被测样品9的正下方且靠近被测样品9的下表面,使光纤探头65采集的信息更为准确;利用底座1将所有部件集中在一起,构成一个整体。Here, the first three-dimensional displacement platform 52 is used to adjust the position of the sample holder 5, so that the tested sample 9 is located directly below the objective lens 43, so that the focused beam emitted by the objective lens 43 is completely incident on the tested sample 9; Displace the platform 62 to adjust the position of the optical fiber probe fixture 64, so that the optical fiber probe 65 is located directly below the tested sample 9 and close to the lower surface of the tested sample 9, so that the information collected by the optical fiber probe 65 is more accurate; The parts are grouped together to form a whole.

在上述实施例一和实施例二中,白光光源2采用现有的氙灯光源或溴钨灯光源或现有技术的其他白光光源;样品夹具5采用现有的能够稳定可靠夹持住物品的夹持设备;光谱仪7采用现有技术;计算机终端8采用现有技术,带有显示器,计算机终端8中安装有现有的光谱仪控制软件、现有的图像处理软件和现有的贵金属纳米阵列消光光谱的计算软件,计算机终端8通过光谱仪7控制软件控制光谱仪7采集信号并对光谱仪7输出的光谱信号进行处理,计算机终端8再通过贵金属纳米阵列消光光谱的计算软件计算得到贵金属纳米阵列的消光光谱,计算机终端8通过图像处理软件对CCD摄像机45获取的贵金属纳米阵列进行处理;第一三维位移平台52和第二三维位移平台62均采用现有的三维位移平台,具有三个测微丝杆;光纤探头夹具64采用现有的能够稳定可靠夹持住物品的夹持设备;光纤探头65采用多模塑料光纤或现有技术的其他介质光纤。In the above-mentioned first and second embodiments, the white light source 2 adopts the existing xenon light source or bromine tungsten light source or other white light source in the prior art; The spectrometer 7 adopts the existing technology; the computer terminal 8 adopts the existing technology, with a display, and the existing spectrometer control software, the existing image processing software and the existing noble metal nanoarray extinction spectrum are installed in the computer terminal 8 The computer terminal 8 controls the spectrometer 7 to collect signals through the spectrometer 7 control software and processes the spectral signal output by the spectrometer 7, and the computer terminal 8 calculates the extinction spectrum of the noble metal nanoarray through the calculation software of the extinction spectrum of the noble metal nanoarray, The computer terminal 8 processes the precious metal nanoarrays acquired by the CCD camera 45 through image processing software; the first three-dimensional displacement platform 52 and the second three-dimensional displacement platform 62 both use existing three-dimensional displacement platforms, and have three micrometer screw rods; The probe clamp 64 adopts the existing clamping device capable of stably and reliably clamping the object; the optical fiber probe 65 adopts the multi-mode plastic optical fiber or other medium optical fibers in the prior art.

实施例三:Embodiment three:

本实施例提出了一种利用实施例二的贵金属纳米阵列消光光谱测量装置实现乙醇溶液浓度传感检测的方法,其包括以下步骤:This embodiment proposes a method for sensing and detecting the concentration of an ethanol solution by using the noble metal nanoarray extinction spectrum measuring device of the second embodiment, which includes the following steps:

①利用现有的电子束刻蚀技术,在沉积有导电薄膜的导电玻璃上制备出具有周期结构的金纳米阵列,金纳米粒子是直径为200纳米、高度为75纳米的纳米圆柱,金纳米粒子之间的间距为50纳米,其扫描电子显微镜(SEM)照片如图4所示;然后将带有金纳米阵列的导电玻璃作为被测样品。①Using the existing electron beam etching technology, a gold nanoarray with periodic structure is prepared on the conductive glass deposited with the conductive film. The gold nanoparticle is a nano cylinder with a diameter of 200 nanometers and a height of 75 nanometers. The spacing between them is 50 nanometers, and the scanning electron microscope (SEM) picture is shown in Figure 4; then the conductive glass with gold nanoarrays is used as the tested sample.

在此,导电玻璃可选用沉积有导电薄膜的玻璃基片,或者是沉积有导电薄膜的有机玻璃基片,导电薄膜是ITO(Indium-Tin Oxide,氧化铟锡)薄膜,或者是FTO(SnO2:F,即掺氟二氧化锡)薄膜;贵金属材料为金或银。Here, the conductive glass can be a glass substrate deposited with a conductive film, or a plexiglass substrate deposited with a conductive film, and the conductive film is an ITO (Indium-Tin Oxide, indium tin oxide) film, or FTO (SnO2: F, namely fluorine-doped tin dioxide) thin film; the precious metal material is gold or silver.

②开启白光光源;然后通过第二三维位移平台调节光纤探头夹具的位置,使光纤探头的接收端口位于物镜的焦平面,从而使得通过物镜和CCD摄像机在计算机终端自带的显示器中清晰显示出光纤探头的接收端口;再开启光谱仪,并设定信号采集参数,如设定积分时间为1秒;此时在白光光源开启状态下光谱仪输出的光谱信号为白光光源的光谱,记为I(λ),并传输给计算机终端,由计算机终端保存;其中,λ表示波长。②Turn on the white light source; then adjust the position of the optical fiber probe fixture through the second three-dimensional displacement platform, so that the receiving port of the optical fiber probe is located in the focal plane of the objective lens, so that the optical fiber can be clearly displayed on the monitor of the computer terminal through the objective lens and the CCD camera The receiving port of the probe; turn on the spectrometer again, and set the signal acquisition parameters, such as setting the integration time to 1 second; at this time, when the white light source is turned on, the spectral signal output by the spectrometer is the spectrum of the white light source, denoted as I(λ) , and transmitted to the computer terminal, and saved by the computer terminal; among them, λ represents the wavelength.

③通过第二三维位移平台调节光纤探头夹具的位置,使光纤探头竖直下移,下移光纤探头是为了让被测样品显示在焦平面上,由于导电玻璃很薄,因此一般光纤探头下移2cm即可;然后利用样品夹具夹持住被测样品,并使被测样品水平放置;接着通过第一三维位移平台调节样品夹具的位置,使被测样品中的金纳米阵列位于物镜的焦平面,且确保通过物镜和CCD摄像机在计算机终端自带的显示器中清晰显示出被测样品中的金纳米阵列图像;再通过第二三维位移平台调节光纤探头夹具的位置,使光纤探头位于被测样品的正下方,并使光纤探头的接收端口尽量接近被测样品的下表面;此时在白光光源开启状态下光谱仪输出的光谱信号为被测样品中的金纳米阵列的透射光谱,记为T1(λ),并传输给计算机终端,由计算机终端保存。③Adjust the position of the fiber optic probe fixture through the second three-dimensional displacement platform, so that the fiber optic probe moves vertically downward. The purpose of moving the fiber optic probe downward is to make the sample under test display on the focal plane. Because the conductive glass is very thin, the fiber optic probe is generally moved downward. Then use the sample holder to hold the sample to be tested and place the sample horizontally; then adjust the position of the sample holder through the first three-dimensional displacement platform, so that the gold nanoarray in the sample to be tested is located in the focal plane of the objective lens , and ensure that the gold nanoarray image in the tested sample is clearly displayed on the monitor of the computer terminal through the objective lens and the CCD camera; and then adjust the position of the fiber probe clamp through the second three-dimensional displacement platform, so that the fiber probe is located in the tested sample. and make the receiving port of the fiber probe as close as possible to the lower surface of the sample under test; at this time, the spectral signal output by the spectrometer when the white light source is turned on is the transmission spectrum of the gold nanoarray in the sample under test, denoted as T 1 (λ), and transmitted to the computer terminal, and saved by the computer terminal.

④关闭白光光源;将此时在白光光源关闭状态下光谱仪输出的光谱信号作为第一背景光谱,记为B1(λ),并传输给计算机终端,由计算机终端保存。④ Turn off the white light source; take the spectral signal output by the spectrometer when the white light source is off at this time as the first background spectrum, denoted as B 1 (λ), and transmit it to the computer terminal and save it by the computer terminal.

⑤计算机终端根据消光光谱的定义,利用公式E1(λ)=I(λ)-T1(λ)+B1(λ),计算得到被测样品中的金纳米阵列的消光光谱E1(λ)。⑤ According to the definition of extinction spectrum, the computer terminal uses the formula E 1 (λ)=I(λ)-T 1 (λ)+B 1 (λ) to calculate the extinction spectrum E 1 ( λ).

⑥用移液枪移取20微升的乙醇溶液作为待测有机溶液,并滴加到被测样品中的金纳米阵列上;然后将此时在白光光源关闭状态下光谱仪输出的光谱信号作为第二背景光谱,记为B2(λ),并传输给计算机终端,由计算机终端保存。Pipette 20 microliters of ethanol solution as the organic solution to be tested, and add it dropwise to the gold nanoarray in the tested sample; then use the spectral signal output by the spectrometer when the white light source is turned off at this time as the first Two background spectra, denoted as B 2 (λ), are transmitted to the computer terminal and saved by the computer terminal.

⑦开启白光光源;此时在白光光源开启状态下光谱仪输出的光谱信号为滴加有待测有机溶液的金纳米阵列的透射光谱,记为T2(λ),并传输给计算机终端,由计算机终端保存。⑦Turn on the white light source; at this time, when the white light source is turned on, the spectral signal output by the spectrometer is the transmission spectrum of the gold nanoarray with the organic solution to be tested dropwise added, denoted as T 2 (λ), and transmitted to the computer terminal, by the computer Terminal saves.

⑧计算机终端根据消光光谱的定义,利用公式E2(λ)=I(λ)-T2(λ)+B2(λ),计算得到滴加有待测有机溶液的金纳米阵列的消光光谱E2(λ)。⑧According to the definition of extinction spectrum, the computer terminal uses the formula E 2 (λ)=I(λ)-T 2 (λ)+B 2 (λ) to calculate and obtain the extinction spectrum of the gold nanoarray with the organic solution to be tested dropwise added E 2 (λ).

⑨将E1(λ)作为参考光谱,再根据E2(λ)中的消光峰相对于E1(λ)中的消光峰的位置或强度的改变,得到待测有机溶液的浓度。⑨ Taking E 1 (λ) as the reference spectrum, and then according to the change of the position or intensity of the extinction peak in E 2 (λ) relative to the extinction peak in E 1 (λ), the concentration of the organic solution to be tested is obtained.

图5给出了实施例三中在金纳米阵列上分别滴加20微升浓度为20%、40%、60%和80%的乙醇溶液和滴加浓度为99.7%的无水乙醇后,获得的滴加有浓度为20%、40%、60%和80%的乙醇溶液和浓度为99.7%的无水乙醇的金纳米阵列的消光光谱。不同浓度的乙醇溶液是通过将纯度大于99.99%的乙醇用去离子水配置而成的。从图5中可以看出,随着乙醇溶液的浓度的增加,消光光谱的消光峰的位置随之红移。Figure 5 shows the results obtained after dropping 20 microliters of 20%, 40%, 60% and 80% ethanol solutions and 99.7% absolute ethanol dropwise onto the gold nanoarrays in Example 3, respectively. The extinction spectra of gold nanoarrays with 20%, 40%, 60% and 80% ethanol solutions and 99.7% absolute ethanol added dropwise. Ethanol solutions of different concentrations are prepared by mixing ethanol with a purity greater than 99.99% with deionized water. It can be seen from Figure 5 that with the increase of the concentration of the ethanol solution, the position of the extinction peak of the extinction spectrum shifts red.

图6给出了实施例三中不同浓度的乙醇溶液及无水乙醇的浓度响应曲线图。在获得滴加有乙醇溶液的金纳米阵列的消光光谱后,根据图6即可得到滴加的乙醇溶液的浓度。Figure 6 shows the concentration response curves of ethanol solutions of different concentrations and absolute ethanol in Example 3. After obtaining the extinction spectrum of the gold nanoarray with the ethanol solution added dropwise, the concentration of the dropwise ethanol solution can be obtained according to FIG. 6 .

实施例四:Embodiment 4:

本实施例提出了一种利用实施例二的贵金属纳米阵列消光光谱测量装置实现恩氟沙星溶液浓度传感检测的方法,其包括以下步骤:This embodiment proposes a method for sensing and detecting the concentration of enrofloxacin solution by utilizing the noble metal nanoarray extinction spectrum measuring device of the second embodiment, which includes the following steps:

①利用现有的电子束刻蚀技术,在沉积有导电薄膜的导电玻璃上制备出具有周期结构的金纳米阵列,金纳米粒子是直径为200纳米、高度为75纳米的纳米圆柱,金纳米粒子之间的间距为50纳米,其扫描电子显微镜(SEM)照片如图4所示;然后将带有金纳米阵列的导电玻璃作为被测样品。①Using the existing electron beam etching technology, a gold nanoarray with periodic structure is prepared on the conductive glass deposited with the conductive film. The gold nanoparticle is a nano cylinder with a diameter of 200 nanometers and a height of 75 nanometers. The spacing between them is 50 nanometers, and the scanning electron microscope (SEM) picture is shown in Figure 4; then the conductive glass with gold nanoarrays is used as the tested sample.

在此,导电玻璃可选用沉积有导电薄膜的玻璃基片,或者是沉积有导电薄膜的有机玻璃基片,导电薄膜是ITO(Indium-Tin Oxide,氧化铟锡)薄膜,或者是FTO(SnO2:F,即掺氟二氧化锡)薄膜;贵金属材料为金或银。Here, the conductive glass can be a glass substrate deposited with a conductive film, or a plexiglass substrate deposited with a conductive film, and the conductive film is an ITO (Indium-Tin Oxide, indium tin oxide) film, or FTO (SnO2: F, namely fluorine-doped tin dioxide) thin film; the precious metal material is gold or silver.

②开启白光光源;然后通过第二三维位移平台调节光纤探头夹具的位置,使光纤探头的接收端口位于物镜的焦平面,从而使得通过物镜和CCD摄像机在计算机终端自带的显示器中清晰显示出光纤探头的接收端口;再开启光谱仪,并设定信号采集参数,如设定积分时间为1秒;此时在白光光源开启状态下光谱仪输出的光谱信号为白光光源的光谱,记为I(λ),并传输给计算机终端,由计算机终端保存;其中,λ表示波长。②Turn on the white light source; then adjust the position of the optical fiber probe fixture through the second three-dimensional displacement platform, so that the receiving port of the optical fiber probe is located in the focal plane of the objective lens, so that the optical fiber can be clearly displayed on the monitor of the computer terminal through the objective lens and the CCD camera The receiving port of the probe; turn on the spectrometer again, and set the signal acquisition parameters, such as setting the integration time to 1 second; at this time, when the white light source is turned on, the spectral signal output by the spectrometer is the spectrum of the white light source, denoted as I(λ) , and transmitted to the computer terminal, and saved by the computer terminal; among them, λ represents the wavelength.

③通过第二三维位移平台调节光纤探头夹具的位置,使光纤探头竖直下移,下移光纤探头是为了让被测样品显示在焦平面上,由于导电玻璃很薄,因此一般情况下可使光纤探头下移2cm就够了;然后利用样品夹具夹持住被测样品,并使被测样品水平放置;接着通过第一三维位移平台调节样品夹具的位置,使被测样品中的金纳米阵列位于物镜的焦平面,且确保通过物镜和CCD摄像机在计算机终端自带的显示器中清晰显示出被测样品中的金纳米阵列图像;再通过第二三维位移平台调节光纤探头夹具的位置,使光纤探头位于被测样品的正下方,并使光纤探头的接收端口尽量接近被测样品的下表面;此时在白光光源开启状态下光谱仪输出的光谱信号为被测样品中的金纳米阵列的透射光谱,记为T1(λ),并传输给计算机终端,由计算机终端保存。③Adjust the position of the optical fiber probe fixture through the second three-dimensional displacement platform, so that the optical fiber probe moves down vertically. The purpose of moving the optical fiber probe down is to display the tested sample on the focal plane. Because the conductive glass is very thin, it can be used in general. It is enough to move the optical fiber probe down by 2cm; then use the sample holder to hold the sample to be tested and place the sample horizontally; then adjust the position of the sample holder through the first three-dimensional displacement platform, so that the gold nanoarrays in the sample are tested. It is located in the focal plane of the objective lens, and ensures that the gold nanoarray image in the tested sample can be clearly displayed on the monitor of the computer terminal through the objective lens and the CCD camera; then adjust the position of the fiber probe clamp through the second three-dimensional displacement platform, so that the fiber The probe is located directly under the sample to be tested, and the receiving port of the fiber optic probe is as close as possible to the lower surface of the sample to be tested; at this time, the spectral signal output by the spectrometer when the white light source is turned on is the transmission spectrum of the gold nanoarray in the sample to be tested. , denoted as T 1 (λ), and transmitted to the computer terminal and saved by the computer terminal.

④关闭白光光源;将此时在白光光源关闭状态下光谱仪输出的光谱信号作为第一背景光谱,记为B1(λ),并传输给计算机终端,由计算机终端保存。④ Turn off the white light source; take the spectral signal output by the spectrometer when the white light source is off at this time as the first background spectrum, denoted as B 1 (λ), and transmit it to the computer terminal and save it by the computer terminal.

⑤计算机终端根据消光光谱的定义,利用公式E1(λ)=I(λ)-T1(λ)+B1(λ),计算得到被测样品中的金纳米阵列的消光光谱E1(λ)。⑤ According to the definition of extinction spectrum, the computer terminal uses the formula E 1 (λ)=I(λ)-T 1 (λ)+B 1 (λ) to calculate the extinction spectrum E 1 ( λ).

⑥用移液枪移取20微升的恩氟沙星溶液作为待测有机溶液,并滴加到被测样品中的金纳米阵列上;然后将此时在白光光源关闭状态下光谱仪输出的光谱信号作为第二背景光谱,记为B2(λ),并传输给计算机终端,由计算机终端保存。Pipette 20 microliters of enrofloxacin solution as the organic solution to be tested, and add it dropwise to the gold nanoarray in the tested sample; The signal is taken as the second background spectrum, denoted as B 2 (λ), and transmitted to the computer terminal and stored by the computer terminal.

⑦开启白光光源;此时在白光光源开启状态下光谱仪输出的光谱信号为滴加有待测有机溶液的金纳米阵列的透射光谱,记为T2(λ),并传输给计算机终端,由计算机终端保存。⑦Turn on the white light source; at this time, when the white light source is turned on, the spectral signal output by the spectrometer is the transmission spectrum of the gold nanoarray with the organic solution to be tested dropwise added, denoted as T 2 (λ), and transmitted to the computer terminal, by the computer Terminal saves.

⑧计算机终端根据消光光谱的定义,利用公式E2(λ)=I(λ)-T2(λ)+B2(λ),计算得到滴加有待测有机溶液的金纳米阵列的消光光谱E2(λ)。⑧According to the definition of extinction spectrum, the computer terminal uses the formula E 2 (λ)=I(λ)-T 2 (λ)+B 2 (λ) to calculate and obtain the extinction spectrum of the gold nanoarray with the organic solution to be tested dropwise added E 2 (λ).

⑨将E1(λ)作为参考光谱,再根据E2(λ)中的消光峰相对于E1(λ)中的消光峰的位置或强度的改变,得到待测有机溶液的浓度。⑨ Taking E 1 (λ) as the reference spectrum, and then according to the change of the position or intensity of the extinction peak in E 2 (λ) relative to the extinction peak in E 1 (λ), the concentration of the organic solution to be tested is obtained.

图7给出了实施例四中在金纳米阵列上分别滴加20微升浓度为5mg/L、10mg/L、15mg/L、20mg/L和25mg/L的恩氟沙星溶液后,获得的滴加有浓度为5mg/L、10mg/L、15mg/L、20mg/L和25mg/L的恩氟沙星溶液的金纳米阵列的消光光谱。不同浓度的恩氟沙星溶液是通过将纯度大于或等于98%(HPLC)的恩氟沙星粉末用分析纯的乙醇溶液配置而成的。从图7中可以看出,随着恩氟沙星溶液的浓度的增加,消光光谱中的消光峰的位置发生红移且峰强增强。Figure 7 shows that in Example 4, 20 microliters of enrofloxacin solutions with concentrations of 5 mg/L, 10 mg/L, 15 mg/L, 20 mg/L and 25 mg/L were added dropwise to the gold nanoarray, respectively. The extinction spectra of gold nanoarrays dropwise with enrofloxacin solutions at concentrations of 5 mg/L, 10 mg/L, 15 mg/L, 20 mg/L and 25 mg/L. Enrofloxacin solutions of different concentrations were prepared by formulating enrofloxacin powder with a purity greater than or equal to 98% (HPLC) with analytically pure ethanol solution. It can be seen from Figure 7 that with the increase of the concentration of enrofloxacin solution, the position of the extinction peak in the extinction spectrum is red-shifted and the peak intensity is enhanced.

图8给出了实施例四中不同浓度的恩氟沙星溶液的浓度响应曲线图。在获得滴加有恩氟沙星溶液的金纳米阵列的消光光谱后,根据图8即可得到滴加的恩氟沙星溶液的浓度。Figure 8 shows the concentration response curve diagram of different concentrations of enrofloxacin solution in Example 4. After obtaining the extinction spectrum of the gold nanoarray with the enrofloxacin solution added dropwise, the concentration of the dropwise enrofloxacin solution can be obtained according to FIG. 8 .

实施例五:Embodiment 5:

本实施例提出了一种利用实施例二的贵金属纳米阵列消光光谱测量装置实现乙醇溶液浓度传感检测的方法,其具体步骤与实施例三实现乙醇溶液浓度传感检测的方法的具体步骤相同,不同之处仅在于:所采用的具有周期结构的金纳米阵列不同,在本实施例中,金纳米粒子是直径为200纳米、高度为75纳米的纳米圆柱,金纳米粒子之间的间距为100纳米,其扫描电子显微镜(SEM)照片如图9所示。This embodiment proposes a method for sensing and detecting the concentration of an ethanol solution by using the noble metal nanoarray extinction spectrum measuring device of the second embodiment. The specific steps are the same as the specific steps of the method for implementing the sensing and detection of the concentration of an ethanol solution in the third embodiment. The only difference is that the gold nano-arrays with periodic structure are different. In this embodiment, the gold nanoparticles are nano cylinders with a diameter of 200 nanometers and a height of 75 nanometers, and the distance between the gold nanoparticles is 100 nanometers. nanometer, and its scanning electron microscope (SEM) photo is shown in Figure 9.

图10给出了实施例五中在金纳米阵列上分别滴加20微升浓度为20%、40%、60%和80%的乙醇溶液和滴加浓度为99.7%的无水乙醇后,获得的滴加有浓度为20%、40%、60%和80%的乙醇溶液和浓度为99.7%的无水乙醇的金纳米阵列的消光光谱。不同浓度的乙醇溶液是通过将纯度大于99.99%的乙醇用去离子水配置而成的。从图10中可以看出,随着乙醇溶液的浓度的增加,消光光谱的消光峰的位置随之红移;并且发现实施例五中的消光光谱的消光峰的位置的变化量远小于实施例三中的消光光谱的消光峰的位置的变化量,这与实施例五中的金纳米阵列的粒子间距增大导致的局域表面等离子体共振(LSPR)减弱有关。Figure 10 shows that in Example 5, 20 microliters of ethanol solutions with a concentration of 20%, 40%, 60% and 80% and anhydrous ethanol with a concentration of 99.7% were added dropwise on the gold nanoarrays, respectively. The extinction spectra of gold nanoarrays with 20%, 40%, 60% and 80% ethanol solutions and 99.7% absolute ethanol added dropwise. Ethanol solutions of different concentrations are prepared by mixing ethanol with a purity greater than 99.99% with deionized water. As can be seen from Figure 10, with the increase of the concentration of the ethanol solution, the position of the extinction peak of the extinction spectrum shifted to red; and it was found that the variation of the position of the extinction peak of the extinction spectrum in Example 5 was much smaller than that of the Example The change in the position of the extinction peak of the extinction spectrum in Example 3 is related to the weakening of the localized surface plasmon resonance (LSPR) caused by the increase in the particle spacing of the gold nanoarray in Example 5.

图11给出了实施例五中不同浓度的乙醇溶液及无水乙醇的浓度响应曲线图。在获得滴加有乙醇溶液的金纳米阵列的消光光谱后,根据图11即可得到滴加的乙醇溶液的浓度。Figure 11 shows the concentration response curves of ethanol solutions of different concentrations and absolute ethanol in Example 5. After obtaining the extinction spectrum of the gold nanoarray with the ethanol solution added dropwise, the concentration of the dropwise ethanol solution can be obtained according to FIG. 11 .

实施例六:Embodiment 6:

本实施例提出了一种利用实施例二的测量贵金属纳米阵列消光光谱的装置实现恩氟沙星溶液浓度传感检测的方法,其具体步骤与实施例四实现恩氟沙星溶液浓度传感检测的方法的具体步骤相同,不同之处仅在于:所采用的具有周期结构的金纳米阵列不同,在本实施例中,金纳米粒子是直径为200纳米、高度为75纳米的纳米圆柱,金纳米粒子之间的间距为100纳米,其扫描电子显微镜(SEM)照片如图9所示。This embodiment proposes a method for sensing and detecting the concentration of enrofloxacin solution by using the device for measuring the extinction spectrum of noble metal nanoarrays in the second embodiment. The specific steps of the method are the same, the only difference is that the gold nano-arrays with periodic structure are different. In this embodiment, the gold nanoparticles are nano cylinders with a diameter of 200 nm and a height of 75 The spacing between the particles is 100 nm, and the scanning electron microscope (SEM) photograph thereof is shown in FIG. 9 .

图12给出了实施例六中在金纳米阵列上分别滴加20微升浓度为5mg/L、10mg/L、15mg/L、20mg/L和25mg/L的恩氟沙星溶液后,获得的滴加有浓度为5mg/L、10mg/L、15mg/L、20mg/L和25mg/L的恩氟沙星溶液的金纳米阵列的消光光谱。不同浓度的恩氟沙星溶液是通过将纯度大于或等于98%(HPLC)的恩氟沙星粉末用分析纯的乙醇溶液配置而成的。从图12中可以看出,随着恩氟沙星的溶液浓度的增加,消光光谱中的消光峰的位置红移且峰强增强;并且发现实施例六中的消光光谱中的消光峰的位置以及峰强的变化量远小于实施例四中的消光光谱中的消光峰的位置以及峰强的变化量,这与实施例六中的金纳米阵列的粒子间距增大导致的局域表面等离子体共振(LSPR)减弱有关。Figure 12 shows that in Example 6, 20 microliters of enrofloxacin solutions with concentrations of 5 mg/L, 10 mg/L, 15 mg/L, 20 mg/L and 25 mg/L were added dropwise to the gold nanoarray, respectively. The extinction spectra of gold nanoarrays dropwise with enrofloxacin solutions at concentrations of 5 mg/L, 10 mg/L, 15 mg/L, 20 mg/L and 25 mg/L. Enrofloxacin solutions of different concentrations were prepared by formulating enrofloxacin powder with a purity greater than or equal to 98% (HPLC) with analytically pure ethanol solution. As can be seen from Figure 12, as the solution concentration of enrofloxacin increases, the position of the extinction peak in the extinction spectrum is red-shifted and the peak intensity is enhanced; and it is found that the position of the extinction peak in the extinction spectrum in Example 6 And the variation of the peak intensity is much smaller than the position of the extinction peak and the variation of the peak intensity in the extinction spectrum in Example 4, which is different from the localized surface plasmon caused by the increase in the particle spacing of the gold nanoarray in Example 6. Resonance (LSPR) weakened.

图13给出了实施例六中不同浓度的恩氟沙星溶液的浓度响应曲线图。在获得滴加有恩氟沙星溶液的金纳米阵列的消光光谱后,根据图13即可得到滴加的恩氟沙星溶液的浓度。Figure 13 shows the concentration response curve diagram of different concentrations of enrofloxacin solution in Example VI. After obtaining the extinction spectrum of the gold nanoarray with the enrofloxacin solution added dropwise, the concentration of the dropwise enrofloxacin solution can be obtained according to FIG. 13 .

Claims (1)

1.一种贵金属纳米阵列消光光谱测量装置的传感检测方法,贵金属纳米阵列消光光谱测量装置包括白光光源、用于改变光束传播路径的光束提升器、显微组件、用于夹持住被测样品使被测样品水平放置的样品夹具、光信号采集器、光谱仪和计算机终端,所述的白光光源发出的光束经所述的光束提升器改变传播路径后入射至所述的显微组件上,所述的显微组件出射的聚焦光束入射至所述的被测样品上,所述的光信号采集器接收透射过所述的被测样品的聚焦光束,并传输聚焦光束给所述的光谱仪,所述的光谱仪输出光谱信号给所述的计算机终端;所述的光束提升器由竖直设置的第一支架及设置于所述的第一支架的下部的第一反射镜和设置于所述的第一支架的上部的第二反射镜组成,所述的白光光源发出的光束入射至所述的第一反射镜上,所述的第一反射镜反射的光束入射至所述的第二反射镜上,所述的第二反射镜反射的光束入射至所述的显微组件上;所述的第一反射镜和所述的第二反射镜均与水平面呈45度角,所述的第一反射镜和所述的第二反射镜平行设置,所述的第一反射镜的反射面与所述的第二反射镜的反射面正对;所述的显微组件由竖直设置的第二支架、自上而下依次连接于所述的第二支架上的半透半反镜和物镜、连接于所述的第二支架上且位于所述的半透半反镜透射的光束的传播路径上的吸光板组成,所述的半透半反镜和所述的物镜位于所述的样品夹具的正上方,所述的光束提升器出射的光束入射至所述的半透半反镜上,所述的半透半反镜反射的光束入射至所述的物镜上,所述的物镜出射的聚焦光束入射至所述的被测样品上,所述的半透半反镜透射的光束入射至所述的吸光板上,所述的吸光板吸收所述的半透半反镜透射的光束;所述的半透半反镜与水平面呈45度角,所述的半透半反镜的反射面与所述的第二反射镜的反射面相对;所述的吸光板竖直设置与所述的半透半反镜呈45度角;所述的第二支架上还连接有CCD摄像机,所述的CCD摄像机位于所述的半透半反镜的正上方,所述的CCD摄像机的输出端与所述的计算机终端连接,所述的CCD摄像机获取通过所述的物镜观察到的所述的被测样品中的贵金属纳米阵列的形貌;该贵金属纳米阵列消光光谱测量装置还包括用于调节所述的样品夹具的位置的第一三维位置调节装置,所述的第一三维位置调节装置由第一定位板、安装于所述的第一定位板上的第一三维位移平台、连接所述的第一三维位移平台与所述的样品夹具的第一连杆组成,通过所述的第一三维位移平台调节所述的样品夹具的位置使所述的被测样品位于所述的物镜的正下方;所述的光信号采集器由光纤探头夹具和由所述的光纤探头夹具夹持的光纤探头组成,所述的光纤探头竖直放置且其接收端位于所述的被测样品的正下方,所述的光纤探头接收透射过所述的被测样品的聚焦光束,所述的光纤探头的输出端通过传导光纤与所述的光谱仪的输入端连接,所述的光纤探头传输透射过所述的被测样品的聚焦光束给所述的光谱仪;该贵金属纳米阵列消光光谱测量装置还包括用于调节所述的光信号采集器的位置的第二三维位置调节装置,所述的第二三维位置调节装置由第二定位板、安装于所述的第二定位板上的第二三维位移平台、连接所述的第二三维位移平台与所述的光纤探头夹具的第二连杆组成,通过所述的第二三维位移平台调节所述的光纤探头夹具的位置使所述的光纤探头位于所述的被测样品的正下方且靠近所述的被测样品的下表面;该贵金属纳米阵列消光光谱测量装置还包括底座,所述的白光光源和所述的光谱仪放置于所述的底座上,所述的第一支架的底部和所述的第二支架的底部分别与所述的底座固定连接,所述的第一定位板和所述的第二定位板分别与所述的底座固定连接;其特征在于:利用贵金属纳米阵列消光光谱测量装置进行有机溶液浓度的传感检测,具体包括以下步骤:1. A sensing detection method for a noble metal nanoarray extinction spectrum measuring device, the noble metal nanoarray extinction spectrum measuring device comprises a white light source, a beam lifter for changing the beam propagation path, a microscopic component, a The sample is a sample holder, an optical signal collector, a spectrometer and a computer terminal where the sample to be tested is placed horizontally, and the light beam emitted by the white light source is incident on the microscope assembly after changing the propagation path through the beam lifter, The focused beam emitted by the microscope assembly is incident on the sample to be tested, the optical signal collector receives the focused beam transmitted through the sample to be tested, and transmits the focused beam to the spectrometer, The spectrometer outputs spectral signals to the computer terminal; the beam lifter is composed of a vertically arranged first bracket, a first reflector arranged at the lower part of the first bracket, and a first mirror arranged in the The upper part of the first bracket is composed of a second reflector, the light beam emitted by the white light source is incident on the first reflector, and the light beam reflected by the first reflector is incident on the second reflector The light beam reflected by the second reflecting mirror is incident on the microscope assembly; the first reflecting mirror and the second reflecting mirror are both at a 45 degree angle to the horizontal plane, and the first reflecting mirror and the second reflecting mirror are at an angle of 45 degrees to the horizontal plane. The reflecting mirror and the second reflecting mirror are arranged in parallel, and the reflecting surface of the first reflecting mirror is directly opposite to the reflecting surface of the second reflecting mirror; The bracket, the semi-transparent mirror and the objective lens sequentially connected to the second bracket from top to bottom, connected to the second bracket and located on the propagation path of the light beam transmitted by the half-mirror It is composed of a light absorbing plate on the top of the glass, the half mirror and the objective lens are located directly above the sample holder, and the light beam emitted by the beam lifter is incident on the half mirror, The beam reflected by the half mirror is incident on the objective lens, the focused beam emitted by the objective lens is incident on the tested sample, and the beam transmitted by the half mirror is incident on the On the light-absorbing plate, the light-absorbing plate absorbs the light beam transmitted by the half-mirror; the half-mirror is at an angle of 45 degrees with the horizontal plane, and the reflection of the half-mirror The surface is opposite to the reflective surface of the second reflector; the light-absorbing plate is vertically arranged at a 45-degree angle to the half-mirror; the second bracket is also connected with a CCD camera, so The CCD camera is located just above the half mirror, the output end of the CCD camera is connected with the computer terminal, and the CCD camera obtains the The morphology of the noble metal nanoarray in the sample to be tested; the noble metal nanoarray extinction spectrum measurement device further includes a first three-dimensional position adjustment device for adjusting the position of the sample holder, and the first three-dimensional position adjustment device is composed of A first positioning plate, a first three-dimensional displacement platform mounted on the first positioning plate, and a first connecting rod connecting the first three-dimensional displacement platform and the sample holder, through the first three-dimensional displacement platform 3D displacement platform adjustment The position of the sample holder described in the section makes the sample to be tested located directly under the objective lens; the optical signal collector is composed of a fiber probe clamp and a fiber probe clamped by the fiber probe clamp, The fiber probe is placed vertically and its receiving end is located directly below the sample to be tested. The fiber probe receives the focused beam transmitted through the sample to be tested, and the output end of the fiber probe passes through the sample. The conducting fiber is connected to the input end of the spectrometer, and the fiber probe transmits the focused beam transmitted through the sample to be tested to the spectrometer; the noble metal nanoarray extinction spectrum measuring device also includes a device for adjusting the The second three-dimensional position adjustment device for the position of the optical signal collector, the second three-dimensional position adjustment device is composed of a second positioning plate, a second three-dimensional displacement platform mounted on the second positioning plate, and connecting the second positioning plate. The second three-dimensional displacement platform is composed of the second connecting rod of the optical fiber probe fixture, and the position of the optical fiber probe fixture is adjusted through the second three-dimensional displacement platform so that the optical fiber probe is located in the measured fiber probe. directly below the sample and close to the lower surface of the sample to be tested; the noble metal nano-array extinction spectrum measuring device also includes a base, the white light source and the spectrometer are placed on the base, and the first The bottom of a bracket and the bottom of the second bracket are respectively fixedly connected to the base, and the first positioning plate and the second positioning plate are respectively fixedly connected to the base; it is characterized in that: The sensing and detection of the concentration of organic solutions by using a noble metal nanoarray extinction spectrum measurement device specifically includes the following steps: ①利用电子束刻蚀技术,在沉积有导电薄膜的导电玻璃上制备出具有特定图案的贵金属纳米阵列;然后将带有特定图案的贵金属纳米阵列的导电玻璃作为被测样品;①Using electron beam etching technology to prepare a precious metal nanoarray with a specific pattern on the conductive glass deposited with a conductive film; then use the conductive glass with a specific pattern of precious metal nanoarrays as the sample to be tested; ②开启白光光源;然后通过第二三维位移平台调节光纤探头夹具的位置,使光纤探头的接收端口位于物镜的焦平面,从而使得通过物镜和CCD摄像机在计算机终端自带的显示器中清晰显示出光纤探头的接收端口;再开启光谱仪,并设定信号采集参数;此时在白光光源开启状态下光谱仪输出的光谱信号为白光光源的光谱,记为I(λ),并传输给计算机终端,由计算机终端保存;其中,λ表示波长;②Turn on the white light source; then adjust the position of the optical fiber probe fixture through the second three-dimensional displacement platform, so that the receiving port of the optical fiber probe is located in the focal plane of the objective lens, so that the optical fiber can be clearly displayed on the monitor of the computer terminal through the objective lens and the CCD camera The receiving port of the probe; turn on the spectrometer again, and set the signal acquisition parameters; at this time, when the white light source is turned on, the spectral signal output by the spectrometer is the spectrum of the white light source, denoted as I(λ), and transmitted to the computer terminal, by the computer The terminal is saved; among them, λ represents the wavelength; ③通过第二三维位移平台调节光纤探头夹具的位置,使光纤探头竖直下移;然后利用样品夹具夹持住被测样品,并使被测样品水平放置;接着通过第一三维位移平台调节样品夹具的位置,使被测样品中的贵金属纳米阵列位于物镜的焦平面,且确保通过物镜和CCD摄像机在计算机终端自带的显示器中清晰显示出被测样品中的贵金属纳米阵列图像;再通过第二三维位移平台调节光纤探头夹具的位置,使光纤探头位于被测样品的正下方,并使光纤探头的接收端口尽量接近被测样品的下表面;此时在白光光源开启状态下光谱仪输出的光谱信号为被测样品中的贵金属纳米阵列的透射光谱,记为T1(λ),并传输给计算机终端,由计算机终端保存;③Adjust the position of the optical fiber probe fixture through the second three-dimensional displacement platform, so that the optical fiber probe moves down vertically; then use the sample fixture to clamp the sample to be tested, and place the measured sample horizontally; then adjust the sample through the first three-dimensional displacement platform The position of the fixture is so that the precious metal nanoarray in the tested sample is located in the focal plane of the objective lens, and the image of the precious metal nanoarray in the tested sample is clearly displayed on the monitor of the computer terminal through the objective lens and the CCD camera; The 2D and 3D displacement platform adjusts the position of the fiber probe fixture, so that the fiber probe is located directly under the sample to be tested, and the receiving port of the fiber probe is as close as possible to the lower surface of the sample to be tested; at this time, when the white light source is turned on, the spectrum output by the spectrometer is The signal is the transmission spectrum of the noble metal nanoarray in the tested sample, denoted as T 1 (λ), and transmitted to the computer terminal, where it is stored; ④关闭白光光源;将此时在白光光源关闭状态下光谱仪输出的光谱信号作为第一背景光谱,记为B1(λ),并传输给计算机终端,由计算机终端保存;4. Turn off the white light source; take the spectral signal output by the spectrometer when the white light source is turned off at this time as the first background spectrum, denoted as B 1 (λ), and transmit it to the computer terminal for storage by the computer terminal; ⑤计算机终端根据消光光谱的定义,利用公式E1(λ)=I(λ)-T1(λ)+B1(λ),计算得到被测样品中的贵金属纳米阵列的消光光谱E1(λ);⑤ According to the definition of extinction spectrum, the computer terminal calculates the extinction spectrum E 1 ( λ); ⑥取待测有机溶液,并滴加到被测样品中的贵金属纳米阵列上;然后将此时在白光光源关闭状态下光谱仪输出的光谱信号作为第二背景光谱,记为B2(λ),并传输给计算机终端,由计算机终端保存;⑥ Take the organic solution to be tested and add it dropwise to the noble metal nanoarray in the sample to be tested; then take the spectral signal output by the spectrometer when the white light source is turned off at this time as the second background spectrum, denoted as B 2 (λ), and transmitted to the computer terminal, and saved by the computer terminal; ⑦开启白光光源;此时在白光光源开启状态下光谱仪输出的光谱信号为滴加有待测有机溶液的贵金属纳米阵列的透射光谱,记为T2(λ),并传输给计算机终端,由计算机终端保存;⑦Turn on the white light source; at this time, when the white light source is turned on, the spectral signal output by the spectrometer is the transmission spectrum of the precious metal nanoarray with the organic solution to be tested dropwise added, denoted as T 2 (λ), and transmitted to the computer terminal, by the computer terminal save; ⑧计算机终端根据消光光谱的定义,利用公式E2(λ)=I(λ)-T2(λ)+B2(λ),计算得到滴加有待测有机溶液的贵金属纳米阵列的消光光谱E2(λ);⑧According to the definition of extinction spectrum, the computer terminal uses the formula E 2 (λ)=I(λ)-T 2 (λ)+B 2 (λ) to calculate and obtain the extinction spectrum of the noble metal nano-array with the organic solution to be tested dropwise added E 2 (λ); ⑨将E1(λ)作为参考光谱,再根据E2(λ)中的消光峰相对于E1(λ)中的消光峰的位置或强度的改变,得到待测有机溶液的浓度。⑨ Taking E 1 (λ) as the reference spectrum, and then according to the change of the position or intensity of the extinction peak in E 2 (λ) relative to the extinction peak in E 1 (λ), the concentration of the organic solution to be tested is obtained.
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