CN107984101B - A kind of processing method of adjustment sheet class ceramic matric composite cutting - Google Patents
A kind of processing method of adjustment sheet class ceramic matric composite cutting Download PDFInfo
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- CN107984101B CN107984101B CN201711249390.6A CN201711249390A CN107984101B CN 107984101 B CN107984101 B CN 107984101B CN 201711249390 A CN201711249390 A CN 201711249390A CN 107984101 B CN107984101 B CN 107984101B
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- ceramic matric
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/60—Preliminary treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Laser Beam Processing (AREA)
Abstract
A kind of processing method of adjustment sheet class ceramic matric composite cutting, belongs to nozzle of aircraft engine tail adjustment sheet cutting processing technical field.This method comprises: the workpiece of adjustment sheet class ceramic matric composite is cleaned, drying；It is gripped using the tooling of femtosecond machining tool, uses the distance measuring sensor and CCD paraxonic detection system on femtosecond machining tool, positioning；Open dust-extraction unit；A cutting processing is carried out using femtosecond laser processing head part；Secondary cut processing is carried out using femtosecond laser galvanometer part, the adjustment sheet class ceramic matric composite after obtaining cutting processing.This method using femtosecond laser cut, solve traditional diamond-making technique low efficiency, it is at high cost, there are ceramic matric composite difficulty cutting, not can guarantee the flawless problem of finished surface.It is processed using this method, it is high-efficient, it is at low cost, reduce a large amount of cutter consumption.
Description
Technical field
The present invention relates to nozzle of aircraft engine tail adjustment sheet cutting processing technical fields, and in particular to a kind of adjustment sheet class
The processing method of ceramic matric composite cutting.
Background technique
Nozzle of aircraft engine tail is divided into adjustable type and non-adjustable type according to area of injection orifice, in order to make engine various
Good performance can be obtained under operating condition, the engine with reinforcing must use adjustable jet pipe, by changing spout face
To change operating condition, main Types have product: mostly adjusting chip, double adjusting chips, mobile coccygeal body formula and pneumatic adjustable type.Tradition
The material that adjustment sheet uses is titanium alloy, some adjustment sheet can occur to be broken completely after military service, and nowadays ceramic base is compound
Material becomes the main material of adjustment sheet, but the particular/special requirement because adjusting chip architecture, not using traditional processing means
It is able to satisfy requirement.
The principle of the processing of femtosecond laser is to absorb laser energy by non-linear absorption process, is formed in material internal
Gas ions, non-linear absorption process mainly passes through multiphoton ionization and avalanche ionization is realized.Then, when plasma density reaches
When certain critical value, material starts to absorb laser energy strongly, until material is removed.Its processing one pulse time is shorter, meaning
Taste act on workpiece time it is very short, heat is diffused into matrix not yet, is achieved in " cold working " of femtosecond laser.
Femtosecond laser processing is a non-linear, nonequilibrium process, have threshold effect obvious, minimization heat affected area,
Minimization re cast layer, the features such as controllability is high.
Currently, adding cutter cutting and length using traditional machine for such adjustment sheet ceramic matric composite processing current technology
Pulse laser cutting process method.Since the material integral hardness is larger, mechanical processing technique tool wear is serious at present, and is processing
The defects of being easy to produce burr, deformation layer, surface or sub-surface micro-crack in the process, causes workpiece quality to decline.Long pulse impulse
It is larger that light processes its power, causes heat affecting serious, and micro-crack is difficult to avoid that during retrofit.
Meanwhile in the trimming time comparative test of certain ceramic base composite material member, the wire cutting total time is about 90
Hour/part, low efficiency and surface roughness is poor；The Long Pulse LASER trimming total time is about 2 hours/part, and efficiency can expire
Sufficient production capacity demand, but heat affecting, than more serious, for especially marginal position there are serious melting trace, taper is larger, it is necessary to stay
There is the refine surplus of 1~1.5mm, increases by 10~15 times of workload to subsequent mill processing.
Presently, there are aiming at the problem that, propose using femtosecond laser processing technology to such adjustment sheet class ceramic base composite wood
Expect the scheme of cutting, to improve the machining accuracy of product, effectively avoid microdefect, meets batch production and require.
Summary of the invention
The object of the present invention is to provide a kind of processing methods of adjustment sheet class ceramic matric composite cutting, first will be ceramic
Based composites workpiece, which is placed in supersonic wave cleaning machine, to be cleaned, and ceramic matric composite piece-holder is fixed on machine using tooling
On bed.Using the distance measuring sensor and CCD paraxonic detection system of machine tool, tooling and workpiece are positioned, process equipment
In thousand grades of clean rooms, a cutting processing is carried out using processing head part, femtosecond laser galvanometer part is reused and carries out two
Secondary cutting processing, the part realize cutting finishing, achieve the purpose that the defects of removing re cast layer sheet, oxide layer, micro-crack.It should
Method is cut using femtosecond laser, solves that traditional diamond-making technique low efficiency, at high cost, there are ceramic matric composite difficulties to cut
It cuts, not can guarantee the flawless problem of finished surface.It is processed using this method, it is high-efficient, it is at low cost, reduce a large amount of knife
Tool consumption.
A kind of processing method of adjustment sheet class ceramic matric composite cutting provided by the invention, comprising the following steps:
Step 1, workpiece pre-processes
The workpiece of adjustment sheet class ceramic matric composite is cleaned, drying obtains pretreated workpiece；
Step 2, workpiece location and installation
(1) femtosecond machining tool is used, pretreated piece-holder is fixed in the mounting base of lathe using tooling；
(2) using the distance measuring sensor and CCD paraxonic detection system on femtosecond machining tool, to the tooling of clamping workpiece into
Row positioning, determines X, Y, Z-direction coordinate, according to the positional relationship of tooling and work pieces process initial position, compensates the coordinate value, directly
The initial position of pretreated workpiece is moved under laser Machining head；
Step 3, dedusting
Dust-extraction unit, and pass hull closure protective door are opened, is in femtosecond machining tool in thousand grades of clean rooms；
Step 4, a cutting processing
A cutting processing is carried out using femtosecond laser processing head part, during which adjustment laser processing power is 4-12W, single
Layer sweep time is 500-2000ms, and the single layer amount of feeding is 0.005-0.02mm, and end angle is 80-90 °, and the processing number of plies is 200-
800, realize Continuous maching, the adjustment sheet class ceramic matric composite after obtaining a cutting processing, wherein completion 30%~
50% overlapping rate；
Step 5, secondary cut is processed
The adjustment sheet class ceramic matric composite after cutting processing is carried out using femtosecond laser galvanometer part secondary
Cutting processing, during which adjustment laser processing power are 4-12W, and processing number is 1-10000 times, electric current 0.5-2A, and frequency is
10-100Hz, the adjustment sheet class ceramic matric composite after obtaining cutting processing.
In the step 1, the adjustment sheet class ceramic matric composite refers specifically to the aeroplane engine of CMC-SiC material
Tail efflux door.
In the step 1, the workpiece of adjustment sheet class ceramic matric composite is specially placed in ultrasound by the cleaning
In wave cleaning machine, cleaning solution uses the mixed liquor of alcohol and water, wherein by volume, alcohol: water=1:(5~10), ultrasound is clear
Wash 10-15min.
In the step 1, the drying is dried up using air gun.
In the step 2 (1), the clamping, method of clamping steps up for both ends.
In the step 2 (2), the CCD paraxonic detection system is charge-coupled device.
In the step 2 (2), the tooling of clamping workpiece is positioned, specially the locating rod of positioning tool, is realized
Positioning to tooling.
The purpose of the step 3, the dedusting is, guarantees that in laser processing procedure be not in pollution and material
The phenomenon that removing dross.
In the step 5, secondary cut is processed as cutting finishing, reaches removal re cast layer, oxide layer, micro-crack and lacks
Sunken purpose.
Of the present invention thousand grades of clean rooms are thousand grades of clean rooms (also known as dust free room or clean room), according to GB/
T16292-1996, air purity grade scale such as table 1:
Air purity grade scale in table 1GB/T16292-1996
A kind of processing method of adjustment sheet class ceramic matric composite cutting of the invention has compared with the existing technology
Beneficial effect are as follows:
1. the present invention passes through the location mechanism of clamping workpiece and femtosecond machining tool itself, guarantee that adjustment sheet class ceramic base is multiple
The workpiece of condensation material and the relative feed movement of femtosecond laser processing head.
2. in process, being in ultra-clean state always, guarantee pollution-free and dross in process.
3. the processing method that the present invention uses is that the compound femtosecond laser of processing head and femtosecond laser under galvanometer two-way adds
Work method, the pulsewidth of laser are short by 10-12s、10-15S magnitude, the injection of instantaneous energy, by adjustment sheet class ceramic matric composite
The action time of material direct boiling, femtosecond laser is short, so that energy is taken away rapidly in the form of plasma, energy comes not
And spread in material internal, it is the process of a cold working, may be regarded as no heat affected area.
4. processing method of the invention ensure that the surface quality after the cutting of adjustment sheet adjustment sheet class ceramic matric composite,
Wherein, in whole process, the removing method of material is carried out in the form evaporated and vaporized, no material damage, no melting
Phase, therefore without the formation of re cast layer and micro-crack；Due to instantaneously vaporizing, material flash evapn in gaseous form, material surface
There is no any splash, reduces the roughness on rapidoprint surface.
5. processing method of the invention realizes adjustment sheet class ceramic base by selection machined parameters and processing program establishment
Efficient, inexpensive batch production may be implemented in composite material cutting processing.Especially with respect to NC Milling method, swash
Light processing cost is only the 10% of numerical control mill cost, and efficiency is its 2 times or more.Meanwhile it ensure that adjustment sheet ceramic base composite wood
Expect processing quality, be suitable for batch production, there is huge potential benefit.
6. the present invention solves the cutting of ceramic matric composite difficulty, not can guarantee the flawless problem of finished surface, propose
A kind of process of new femtosecond laser cutting, guarantees the finishing of workpiece.Relative to Conventional machining methods, femtosecond swashs
Light processing is lost without cutter, processes complete part, the time can be controlled within 30h.It promotes processing efficiency and reaches 3 times
More than.
Detailed description of the invention
Fig. 1 is that the present invention is cut into single process pass to adjustment sheet class ceramic matric composite and surface quality SEM schemes；
Fig. 2 is that the super depth of field in the embodiment of the present invention 1 using workpiece after cutting processing of processing head part progress is micro-
Mirror figure；
Fig. 3 is that the super depth of field in the embodiment of the present invention 1 using the workpiece after the progress secondary cut processing of galvanometer part is micro-
Mirror figure.
Specific embodiment
Below with reference to embodiment, the present invention is described in further detail.
In following embodiment, the femtosecond machining tool used is 100 type femtosecond laser numerically-controlled machine tool of Microdrill.
In following embodiment, the processing dimension and shape of adjustment sheet class ceramic matric composite are shown in Table 2.
Each structural member processing dimension of 2 adjustment sheet of table and shape
| Serial number | Key dimension/mm | Shape | Cut lengths/mm |
| 1 | Upper bottom: 94；Bottom: 120.2；It is high by 76.5 | Approximate trapezoid | 380 |
| 2 | Upper bottom: 112.5；Bottom: 179；It is high by 203 | Approximate trapezoid | 686 |
| 3 | It is long: 494.5；It is wide: 114 | Approximate trapezoid | 1161 |
| 4 | Upper bottom: 26；Bottom: 100；It is high: 262 | Approximate trapezoid | 650 |
| 5 | Upper bottom；112 bottoms: 177 is high by 257.7 | Approximate trapezoid | 810 |
Embodiment 1
A kind of processing method of adjustment sheet class ceramic matric composite cutting, comprising the following steps:
Step 1, workpiece pre-processes
By in table 2, the workpiece of the adjustment sheet class ceramic matric composite of serial number 1 is placed in supersonic wave cleaning machine, cleaning solution
Using the mixed liquor of alcohol and water, wherein by volume, alcohol: water=1:10 is cleaned by ultrasonic 10-15min, is blown using air gun
It is dry, obtain pretreated workpiece；
In the step 1, the adjustment sheet class ceramic matric composite refers specifically to the aeroplane engine of CMC-SiC material
Tail efflux door.
Step 2, workpiece location and installation
(1) 100 type femtosecond machining tool of Microdrill is used, is fixed pretreated piece-holder using tooling
In the mounting base of lathe；Fixture should use the mode of two head clampings to be clamped.
(2) right using the locating rod of distance measuring sensor and CCD paraxonic detection system positioning tool on femtosecond machining tool
The tooling of clamping workpiece is positioned, and determines X, Y, Z-direction coordinate, according to the positional relationship of tooling and work pieces process initial position,
The coordinate value is compensated, directly the initial position of pretreated workpiece is moved under laser Machining head；
Step 3, dedusting
Dust-extraction unit, and pass hull closure protective door are opened, is in femtosecond machining tool in thousand grades of clean rooms, guarantees laser
The phenomenon that being not in pollution and material removal dross in process.
Step 4, a cutting processing
A cutting processing is carried out using femtosecond laser processing head part, during which adjustment laser processing power is 10W, selection
Four wedge processing heads set the Single Slice Mode time as 1500ms, and the single layer amount of feeding is 0.008mm, and end angle is 90 °, machined layer
Number is 500, and sets the aperture 90DEG of adjustment sheet, and process originates 20DEG, rotation speed 2400RPM, mould taper control amount 40mm,
Single hole processing is carried out, its SEM figure is shown in Fig. 1 after single hole processing.Travelling workpiece, each moving distance are 0.85mm, form 50%
Overlapping rate carries out Continuous maching again according to above-mentioned steps, and then completes unilateral processing, then by workpiece rotation predetermined angular,
The processing on second side is completed, until four edges are all completed to process, the adjustment sheet class ceramic base after obtaining a cutting processing is multiple
Condensation material；Super depth-of-field microscope figure using workpiece after cutting processing of processing head part progress is shown in Fig. 2.
Step 5, secondary cut is processed
The adjustment sheet class ceramic matric composite after cutting processing is carried out using femtosecond laser galvanometer part secondary
Cutting processing, during which adjustment laser machine the 12W under 100% state of power selection, and processing number is 500 times, electric current 2A, frequency
Rate is 20Hz, and sweep length is set as unilateral each dimensions length, and each edge is successively processed, the adjusting after obtaining cutting processing
Piece class ceramic matric composite is shown in Fig. 3 using the super depth-of-field microscope figure that galvanometer part carries out the workpiece after secondary cut processing.
Embodiment 2
A kind of processing method of adjustment sheet class ceramic matric composite cutting, comprising the following steps:
Step 1, workpiece pre-processes
By in table 2, the workpiece of the adjustment sheet class ceramic matric composite of serial number 2 is placed in supersonic wave cleaning machine, cleaning solution
Using the mixed liquor of alcohol and water, wherein by volume, alcohol: water=1:5 is cleaned by ultrasonic 15min, is dried up, obtained using air gun
To pretreated workpiece；
In the step 1, the adjustment sheet class ceramic matric composite refers specifically to the aeroplane engine of CMC-SiC material
Tail efflux door.
Step 2, workpiece location and installation
(1) 100 type femtosecond machining tool of Microdrill is used, is fixed pretreated piece-holder using tooling
In the mounting base of lathe；Fixture should use the mode of two head clampings to be clamped.
(2) right using the locating rod of distance measuring sensor and CCD paraxonic detection system positioning tool on femtosecond machining tool
The tooling of clamping workpiece is positioned, and determines X, Y, Z-direction coordinate, according to the positional relationship of tooling and work pieces process initial position,
The coordinate value is compensated, directly the initial position of pretreated workpiece is moved under laser Machining head；
Step 3, dedusting
Dust-extraction unit, and pass hull closure protective door are opened, is in femtosecond machining tool in thousand grades of clean rooms, guarantees laser
The phenomenon that being not in pollution and material removal dross in process.
Step 4, a cutting processing
A cutting processing is carried out using femtosecond laser processing head part, during which adjustment laser processing power is 11.4W, choosing
Four wedge processing heads are selected, set the Single Slice Mode time as 2000ms, the single layer amount of feeding is 0.005mm, and end angle is 90 °, processing
The number of plies is 800, and sets the aperture 90DEG of adjustment sheet, and process originates 20DEG, rotation speed 2400RPM, mould taper control amount
40mm carries out single hole processing, its SEM figure is shown in Fig. 1 after single hole processing.Travelling workpiece, each moving distance are 0.85mm, are formed
50% overlapping rate carries out Continuous maching again according to above-mentioned steps, and then completes unilateral processing, then provides workpiece rotation
Angle completes the processing on second side, until four edges are all completed to process, the adjustment sheet class ceramics after obtaining a cutting processing
Based composites；
Step 5, secondary cut is processed
The adjustment sheet class ceramic matric composite after cutting processing is carried out using femtosecond laser galvanometer part secondary
Cutting processing, during which adjustment laser machine the 12W under 100% state of power selection, and processing number is 1000 times, and electric current is
0.5A, frequency 10Hz, sweep length are set as unilateral each dimensions length, and each edge is successively processed, and obtain cutting processing
Adjustment sheet class ceramic matric composite afterwards.
Claims (8)
1. a kind of processing method of adjustment sheet class ceramic matric composite cutting, which comprises the following steps:
Step 1, workpiece pre-processes
The workpiece of adjustment sheet class ceramic matric composite is cleaned, drying obtains pretreated workpiece；
Step 2, workpiece location and installation
(1) femtosecond machining tool is used, pretreated piece-holder is fixed in the mounting base of lathe using tooling；
(2) using the distance measuring sensor and CCD paraxonic detection system on femtosecond machining tool, the tooling of clamping workpiece is determined
Position, determines X, Y, Z-direction coordinate, according to the positional relationship of tooling and work pieces process initial position, compensates the coordinate value, directly will be pre-
The initial position of treated workpiece is moved under laser Machining head；
Step 3, dedusting
Dust-extraction unit, and pass hull closure protective door are opened, is in femtosecond machining tool in thousand grades of clean rooms；
Step 4, a cutting processing
A cutting processing is carried out using femtosecond laser processing head part, during which adjustment laser processing power is 4-12W, and single layer is swept
Retouching the time is 500-2000ms, and the single layer amount of feeding is 0.005-0.02mm, and end angle is 80-90 °, and the processing number of plies is 200-800,
Realize Continuous maching, the adjustment sheet class ceramic matric composite after obtaining a cutting processing, wherein complete 30%~50%
Overlapping rate；
Step 5, secondary cut is processed
Secondary cut is carried out to the adjustment sheet class ceramic matric composite after a cutting processing using femtosecond laser galvanometer part
Processing, during which adjustment laser processing power are 4-12W, and processing number is 1-10000 times, electric current 0.5-2A, frequency 10-
100Hz, the adjustment sheet class ceramic matric composite after obtaining cutting processing.
2. the processing method of adjustment sheet class ceramic matric composite cutting as described in claim 1, which is characterized in that described
In step 1, the nozzle of aircraft engine tail that the adjustment sheet class ceramic matric composite refers specifically to CMC-SiC material is adjusted
Piece.
3. the processing method of adjustment sheet class ceramic matric composite cutting as described in claim 1, which is characterized in that described
In step 1, the workpiece of adjustment sheet class ceramic matric composite is specially placed in supersonic wave cleaning machine, clearly by the cleaning
Washing lotion uses the mixed liquor of alcohol and water, wherein by volume, alcohol: water=1:(5~10), it is cleaned by ultrasonic 10-15min.
4. the processing method of adjustment sheet class ceramic matric composite cutting as described in claim 1, which is characterized in that described
In step 1, the drying is dried up using air gun.
5. the processing method of adjustment sheet class ceramic matric composite cutting as described in claim 1, which is characterized in that described
In step 2 (1), the clamping, method of clamping steps up for both ends.
6. the processing method of adjustment sheet class ceramic matric composite cutting as described in claim 1, which is characterized in that described
In step 2 (2), the CCD paraxonic detection system is charge-coupled device.
7. the processing method of adjustment sheet class ceramic matric composite cutting as described in claim 1, which is characterized in that described
In step 2 (2), the tooling of clamping workpiece is positioned, specially the locating rod of positioning tool.
8. the processing method of adjustment sheet class ceramic matric composite cutting as described in claim 1, which is characterized in that described
In step 5, secondary cut is processed as cutting finishing.
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| CN114985963A (en) * | 2022-05-20 | 2022-09-02 | 深圳泰德激光技术股份有限公司 | Composite material cutting method, system, terminal device and medium |
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| KR100876502B1 (en) * | 2007-09-21 | 2008-12-31 | 한국정보통신대학교 산학협력단 | Substrate cutting device using microwave laser beam and cutting method |
| CN103143841B (en) * | 2013-03-08 | 2014-11-26 | 西北工业大学 | Method for hole machining with picosecond laser |
| US9620379B2 (en) * | 2013-03-14 | 2017-04-11 | Applied Materials, Inc. | Multi-layer mask including non-photodefinable laser energy absorbing layer for substrate dicing by laser and plasma etch |
| WO2016083609A2 (en) * | 2014-11-27 | 2016-06-02 | Siltectra Gmbh | Laser-based separation method |
| CN104607808B (en) * | 2014-12-11 | 2016-05-18 | 西北工业大学 | Utilize femtosecond laser to carry out the method for ceramic matric composite capillary processing |
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