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CN107946407A - 一种新型独立驱动的薄膜分离机构 - Google Patents

一种新型独立驱动的薄膜分离机构 Download PDF

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CN107946407A
CN107946407A CN201711228899.2A CN201711228899A CN107946407A CN 107946407 A CN107946407 A CN 107946407A CN 201711228899 A CN201711228899 A CN 201711228899A CN 107946407 A CN107946407 A CN 107946407A
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thin film
separation mechanism
independently driven
driving mechanism
film separation
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魏民
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Zishi Energy Co ltd
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Beijing Chong Yu Technology Co Ltd
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Priority to CN201711228899.2A priority Critical patent/CN107946407A/zh
Publication of CN107946407A publication Critical patent/CN107946407A/zh
Priority to PCT/CN2018/092386 priority patent/WO2019105021A1/zh
Priority to US16/019,582 priority patent/US10529888B2/en
Priority to EP18180549.0A priority patent/EP3493246A1/en
Priority to TW107122541A priority patent/TW201926736A/zh
Priority to KR1020180075207A priority patent/KR20190063363A/ko
Priority to JP2018124711A priority patent/JP6621874B2/ja
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Abstract

本发明涉及太阳能电池技术领域，尤其涉及一种新型独立驱动的薄膜分离机构。该分离机构包括安装平台，安装平台的一侧设有多个用于分别吸附晶片底面的第一吸附组件，每个第一吸附组件对应于一个晶片，安装平台上设有多个用于分别吸附位于晶片顶面的薄膜的第二吸附组件，第一吸附组件和第二吸附组件一一对应，且吸附方向相反，每个第二吸附组件均连接一个驱动机构，且可在驱动机构的驱动下进行上下移动，各个驱动机构独立设置且均设于安装平台上。本发明将多个单独的分离机构集成到一起，成功实现了薄膜与晶片的分离，提高了产能；并且对应每片薄膜的分离机构都有独立的驱动机构，从而可根据工艺需要对分离失败的薄膜进行单独重复分离。

Description

一种新型独立驱动的薄膜分离机构
技术领域
本发明涉及太阳能电池技术领域，尤其涉及一种新型独立驱动的薄膜分离机构，更具体地，是可应用于一种专有的湿法刻蚀工艺——外延剥离系统中，可应用于大产能机台上，并可一次独立地将多片薄膜从衬底分离，在显著提高生产效率和设备利用率的同时，又能满足工艺的要求。
背景技术
目前，典型的湿法刻蚀工艺过程如图1所示，首先将装载带有聚合物薄膜的晶片(例如砷化镓晶片)放到特制的栏具内，然后使用机械手将栏具传输到工艺腔室内进行湿法刻蚀工艺，待工艺完成后再将栏具传输到卸载位以卸载刻蚀后的薄膜与晶片，随后使用分离机构对薄膜和晶片进行分离，最后将薄膜和晶片分别卸载至各自的卡塞里。
上述的薄膜与晶片分离环节，通常会用到外延剥离系统。外延剥离系统旨在将薄膜(例如薄的光伏膜)与生长的晶片(例如砷化镓基板)分离，该系统以贴合在晶片上的聚合物薄膜作为输入，并输出单独的晶片(例如砷化镓晶片)和粘贴到聚合物框架上的薄膜(例如光伏膜)。分离出的薄膜用于制备薄膜太阳能电池，分离出的晶片或衬底(例如砷化镓晶片)经过抛光和清洗后可重复使用多次，从而显著降低薄膜发电的成本。
以砷化镓太阳能电池生产线中的外延剥离设备为例，整个设备的瓶颈是如何快速可靠的完成薄膜与衬底的分离，为了获得较大产能，一般而言，主要有如下几种方法：
(1)使用两套或多套分离机械手，每个机械手一次分离一片薄膜；此方法有个明显确定就是占地空间大，尤其是对于转载薄膜与衬底的篮具尺寸要求较高，另外，多个机械手间的协调工作也比较复杂；
(2)一次卸载和分离多片薄膜，一般地会由一套分离驱动装置提供动力，从而同时分离多片薄膜。针对此方法，一个明显的缺点是：当分离过程中，出现有一片或若干片分离失败的情况时，整个系统的灵活性和容错性不高。具体地讲，如果工艺要求在第一次分离失败时，需要重试2～3次，那么对于已分离的薄膜和基板就会重复接触，而按照砷化镓薄膜的制作工艺，是应该尽可能避免此类情况的发生。
因此设计一台既可以实现大产能又是独立驱动的自动化薄膜分离机构就显得很有必要。
发明内容
(一)要解决的技术问题
本发明的目的是提供一种新型独立驱动的薄膜分离机构，其既可同时分离多片薄膜，又能独立驱动每片薄膜的分离，从而解决传统薄膜分离设备不能兼具实现大产能又能独立驱动的技术问题。
(二)技术方案
为了解决上述技术问题，本发明提供了一种新型独立驱动的薄膜分离机构，其包括安装平台，所述安装平台的一侧设有多个用于分别吸附晶片底面的第一吸附组件，每个所述第一吸附组件对应于一个所述晶片，所述安装平台上设有多个用于分别吸附位于所述晶片顶面的薄膜的第二吸附组件，所述第一吸附组件和第二吸附组件一一对应，且吸附方向相反，每个所述第二吸附组件均连接一个驱动机构，且可在所述驱动机构的驱动下进行上下移动，各个所述驱动机构独立设置且均设于所述安装平台上。
进一步地，各个所述第一吸附组件均位于同一平面上。
进一步地，各个所述第一吸附组件至少包括两个真空吸盘，相邻两个所述真空吸盘间隔设置，且分别通过机械臂设于安装平台的同一侧。优选的，所述机械臂为真空叉片。
进一步地，所述机械臂的顶面用于安装所述第一吸附组件，所述机械臂的端部与所述安装平台连接。
所述驱动机构的设置有两种方案：
第一种是：所述驱动机构包括连接杆、轴承、第一转轴和带有第二转轴的电机，所述轴承设于所述安装平台上，所述第一转轴穿过所述轴承并与所述轴承的内圈固定连接，所述连接杆一端与所述第二吸附组件连接，另一端固定套接于所述第一转轴的外围，所述第一转轴上套接有第一齿轮，所述第二转轴上套接有与所述第一齿轮啮合的第二齿轮。
进一步地，各个所述第一转轴均同轴。
进一步地，所述第一转轴与所述连接杆垂直。
第二种是：每个所述第二吸附组件均通过连接杆与所述驱动机构连接，所述连接杆一端与所述第二吸附组件连接，另一端固定套接于所述驱动机构的转轴外围，且所述连接杆在所述驱动机构的驱动下绕所述转轴进行转动。
进一步地，所述第一吸附组件和第二吸附组件均为真空吸盘，所述真空吸盘通过软管连接有真空发生器。
进一步地，所述薄膜分离机构还包括滑轨，所述安装平台可滑动地设于所述滑轨上。优选的，所述安装平台底部设有与所述滑轨配合滑动的滑槽。
(三)有益效果
本发明的上述技术方案具有以下有益效果：
1、本发明的薄膜分离机构，设置了第一吸附组件和第二吸附组件，每个第二吸附组件均连接一个驱动机构，且可在驱动机构的驱动下进行上下移动。使用时，先将第一吸附组件置于晶片底面，将第二吸附组件置于薄膜表面，利用第一吸附组件和第二吸附组件相反的吸力和驱动机构驱动第二吸附组件向上移动，使得薄膜逐渐从晶片上撕离。由于第一吸附组件和第二吸附组件为多组，因而该薄膜分离机构可进行多片薄膜的自动化分离，方便快捷，生产效率高，产能大。又由于各个驱动机构独立设置，使得每片薄膜的分离或重复分离可独立进行，彼此互不影响。因而解决了传统薄膜分离设备不能兼具实现大产能又能独立驱动的技术问题。该分离机构在进行薄膜分离时灵活性高，因而在太阳能电池制备领域具有很强的应用价值和推广意义。
2、本发明的各个所述第一吸附组件均位于同一平面上，因而移动一次安装平台可同时将各个机械臂同时置于晶片底部，从而进一步提高了工作效率。
3、本发明的驱动机构利用转轴驱动第二吸附组件转动，进一步提高了工作的自动化程度，而且结构简单，操作方便，易于安装和推广。
4、本发明设置的滑轨，可使安装平台和驱动机构在更大范围内自由移动，从而使得该分离机构可对更大范围内的薄膜进行分离，也便于对分离后的薄膜和晶片进行运输和进行下一步的清洗等处理，从而进一步提高了自动化程度，节省了人力。
附图说明
图1为目前典型的湿法刻蚀工艺过程示意图；
图2为本发明实施例所述薄膜分离机构的结构示意图；
图3为本发明实施例所述薄膜与晶片分离后的状态示意图；
图4为本发明实施例所述单独处理分离失败薄膜的状态示意图；
其中，1、第二吸附组件；2、第一吸附组件；3、第一转轴；4、轴承；5、电机；6、滑轨；7、安装平台；8、第一齿轮；9、分离后的晶片；10、分离后的薄膜；11、连接杆；12、第二转轴；13、第二齿轮；14、真空叉片；A、代表对分离失败的薄膜重新分离。
具体实施方式
下面结合附图和实施例对本发明的实施方式作进一步详细描述。以下实施例用于说明本发明，但不能用来限制本发明的范围。
在本发明的描述中，除非另有说明，“多个”的含义是两个或两个以上。术语“上”、“下”、“左”、“右”、“内”、“外”、“前端”、“后端”、“头部”、“尾部”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。此外，术语“第一”、“第二”、“第三”等仅用于描述目的，而不能理解为指示或暗示相对重要性。
在本发明的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连。对于本领域的普通技术人员而言，可以视具体情况理解上述术语在本发明中的具体含义。
如图2～图4所示，本实施例提供了一种新型独立驱动的薄膜分离机构，其包括安装平台7，安装平台7的一侧设有多个用于分别吸附晶片底面的第一吸附组件2，每个第一吸附组件2对应于一个晶片，安装平台7上设有多个用于分别吸附位于晶片顶面的薄膜的第二吸附组件1，第一吸附组件2和第二吸附组件1一一对应，且吸附方向相反，每个第二吸附组件1均连接一个驱动机构，且可在驱动机构的驱动下进行上下移动，各个驱动机构独立设置且均设于安装平台7上。
各个第一吸附组件2均位于同一平面上。各个第一吸附组件2均包括两个真空吸盘，相邻两个所述真空吸盘间隔设置，且分别通过真空叉片14设于安装平台7的同一侧；具体的，所述真空吸盘安装于真空叉片14的顶面，真空叉片14的端部与安装平台7连接。
驱动机构包括连接杆11、轴承4、第一转轴3和带有第二转轴12的电机5，轴承4设于安装平台7上，第一转轴3穿过轴承4并与轴承4的内圈固定连接，连接杆11一端与第二吸附组件1连接，另一端固定套接于第一转轴3的外围，第一转轴3上套接有第一齿轮8，第二转轴12上套接有与第一齿轮8啮合的第二齿轮13。本实施例中，第一转轴3与连接杆11垂直，且各个第一转轴3均同轴。
本实施例中，第二吸附组件1同第一吸附组件2一样，同样为真空吸盘，且真空吸盘通过软管连接有真空发生器。本实施例的薄膜分离机构还包括滑轨6，安装平台7可滑动地设于滑轨6上。具体的，安装平台7底部设有与滑轨6配合滑动的滑槽。
另外，本实施例的薄膜分离机构，其每次可处理的薄膜数量是两个以上，具体地需要和栏具中的列数一致，这样可以保证一次卸载一层工艺后的太阳能薄膜基板。而对于分离机构的驱动方式，并不局限于电机5，也可使用例如蜗轮蜗杆或旋转气缸等其他方式。
本实施例的新型独立驱动的薄膜分离机构的工作过程如下：每个电机5分别驱动各自的第二转轴12旋转，第二转轴12通过齿轮啮合带动第一转轴3转动，从而依次带动连接杆11和第二吸附组件1上下转动，并使第二吸附组件1与第一吸附组件2保持一定的角度(如10°)；整个安装平台7沿滑轨6移动至卸载位栏具(图中未示出)内，将真空叉片14插入晶片底部，以便第一吸附组件2吸附晶片；第二转轴12继续旋转，并带动第二吸附组件1继续向下移动，直至第二吸附组件1压紧工艺后的薄膜，并打开真空发生器，启动第一吸附组件2和第二吸附组件1的真空吸附功能；整个安装平台7继续沿滑轨6移动，将工艺后的薄膜晶片从栏具内取出，运动至分离位以进行薄膜分离；由于第一吸附组件2吸附晶片底面，第二吸附组件1吸附薄膜表面，第一吸附组件2和第二吸附组件1的吸附方向相反，电机5驱动第二转轴12反向旋转，最终依次带动连接杆11和第二吸附组件1反转，因而使得薄膜逐渐从晶片顶面撕离，最终该分离机构成功实现了薄膜10与晶片9的分离，如图3所示。
在分离过程中，当其中一片薄膜出现分离失败时，如图4所示左边第二片未成功分离，则可在程序中设定单独去分离第二片，如图4中的A部所示，可根据工艺或实际情况重复分离动作2～3次。在分离过程中，如果需要使用去离子水，则需要对电机5和齿轮部分进行特定的防护，比如在其正上方增设护板等。
由上可知，本实施例的薄膜分离机构，设置了第一吸附组件和第二吸附组件，每个第二吸附组件均连接一个驱动机构，且可在驱动机构的驱动下进行上下移动。使用时，先将第一吸附组件置于晶片底面，将第二吸附组件置于薄膜表面，利用第一吸附组件和第二吸附组件相反的吸力和驱动机构驱动第二吸附组件向上移动，使得薄膜逐渐从晶片上撕离。由于第一吸附组件和第二吸附组件为多组，因而该薄膜分离机构可进行多片薄膜的自动化分离，方便快捷，生产效率高，产能大。又由于各个驱动机构独立设置，使得每片薄膜的分离或重复分离可独立进行，彼此互不影响。因而解决了传统薄膜分离设备不能兼具实现大产能又能独立驱动的技术问题。该分离机构在进行薄膜分离时灵活性高，因而在太阳能电池制备领域具有很强的应用价值和推广意义。
本实施例的各个第一吸附组件均位于同一平面上，因而移动一次安装平台可同时将各个机械臂同时置于晶片底部，从而进一步提高了工作效率。本实施例的驱动机构利用转轴驱动第二吸附组件转动，进一步提高了工作的自动化程度，而且结构简单，操作方便，易于安装和推广。本实施例设置的滑轨，可使安装平台和驱动机构在更大范围内自由移动，从而使得该分离机构可对更大范围内的薄膜进行分离，也便于对分离后的薄膜和晶片进行运输和进行下一步的清洗等处理，从而进一步提高了自动化程度，节省了人力。
综上所述，本实施例的薄膜分离机构，将多个单独的分离机构集成到一起，成功实现了薄膜与晶片(例如砷化镓太阳能基板)的自动化分离，方便快捷，提高了产能；并且对应每片薄膜的分离机构都有独立的驱动机构，从而可根据工艺需要，对分离失败的薄膜进行单独重复分离和处理，且可任意设定对分离失败薄膜的处理次数，进而提高了薄膜分离的灵活性和容错性。而且该薄膜分离机构结构简单，易于操作和维护，便于推广，成本低，易于实现。
本发明的实施例是为了示例和描述而给出的，而并不是无遗漏的或者将本发明限于所公开的形式。很多修改和变化对于本领域的普通技术人员而言是显而易见的。选择和描述实施例是为了更好说明本发明的原理和实际应用，并且使本领域的普通技术人员能够理解本发明从而设计适于特定用途的带有各种修改的各种实施例。

Claims (10)

1.一种新型独立驱动的薄膜分离机构，其特征在于，包括安装平台，所述安装平台的一侧设有多个用于分别吸附晶片底面的第一吸附组件，每个所述第一吸附组件对应于一个所述晶片，所述安装平台上设有多个用于分别吸附位于所述晶片顶面的薄膜的第二吸附组件，所述第一吸附组件和第二吸附组件一一对应，且吸附方向相反，每个所述第二吸附组件均连接一个驱动机构，且可在所述驱动机构的驱动下进行上下移动，各个所述驱动机构独立设置且均设于所述安装平台上。
2.根据权利要求1所述的新型独立驱动的薄膜分离机构，其特征在于，各个所述第一吸附组件均位于同一平面上。
3.根据权利要求2所述的新型独立驱动的薄膜分离机构，其特征在于，各个所述第一吸附组件至少包括两个真空吸盘，相邻两个所述真空吸盘间隔设置，且分别通过机械臂设于安装平台的同一侧。
4.根据权利要求3所述的新型独立驱动的薄膜分离机构，其特征在于，所述机械臂的顶面用于安装所述第一吸附组件，所述机械臂的端部与所述安装平台连接。
5.根据权利要求1～4任一项所述的新型独立驱动的薄膜分离机构，其特征在于，所述驱动机构包括连接杆、轴承、第一转轴和带有第二转轴的电机，所述轴承设于所述安装平台上，所述第一转轴穿过所述轴承并与所述轴承的内圈固定连接，所述连接杆一端与所述第二吸附组件连接，另一端固定套接于所述第一转轴的外围，所述第一转轴上套接有第一齿轮，所述第二转轴上套接有与所述第一齿轮啮合的第二齿轮。
6.根据权利要求5所述的新型独立驱动的薄膜分离机构，其特征在于，各个所述第一转轴均同轴。
7.根据权利要求5所述的新型独立驱动的薄膜分离机构，其特征在于，所述第一转轴与所述连接杆垂直。
8.根据权利要求1～4任一项所述的新型独立驱动的薄膜分离机构，其特征在于，每个所述第二吸附组件均通过连接杆与所述驱动机构连接，所述连接杆一端与所述第二吸附组件连接，另一端固定套接于所述驱动机构的转轴外围，且所述连接杆在所述驱动机构的驱动下绕所述转轴进行转动。
9.根据权利要求1所述的新型独立驱动的薄膜分离机构，其特征在于，所述第一吸附组件和第二吸附组件均为真空吸盘，所述真空吸盘通过软管连接有真空发生器。
10.根据权利要求1所述的新型独立驱动的薄膜分离机构，其特征在于，还包括滑轨，所述安装平台可滑动地设于所述滑轨上。
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