CN107943128B - A kind of multivariant voice coil vibration isolation vibration suppression structure and its control method - Google Patents
A kind of multivariant voice coil vibration isolation vibration suppression structure and its control method Download PDFInfo
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- 238000002955 isolation Methods 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims abstract description 24
- 230000001629 suppression Effects 0.000 title claims abstract description 17
- 230000007704 transition Effects 0.000 claims abstract description 43
- 238000009434 installation Methods 0.000 claims abstract description 14
- 238000013016 damping Methods 0.000 claims abstract description 10
- 239000012528 membrane Substances 0.000 claims abstract description 9
- 238000006073 displacement reaction Methods 0.000 claims description 23
- 230000033001 locomotion Effects 0.000 claims description 17
- 238000005259 measurement Methods 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 5
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910000906 Bronze Inorganic materials 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 239000010974 bronze Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 2
- 238000013519 translation Methods 0.000 claims description 2
- 229910052790 beryllium Inorganic materials 0.000 claims 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 18
- 238000010276 construction Methods 0.000 description 8
- 230000002093 peripheral effect Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 241000238631 Hexapoda Species 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 230000003319 supportive effect Effects 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D19/00—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
- G05D19/02—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means
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- Automation & Control Theory (AREA)
- Vibration Prevention Devices (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
本发明涉及一种多自由度音圈隔振抑振结构及其控制方法，以两个作动器组成隔振抑振结构，将安装平台和基座串联起来，每个作动器由两个音圈电机与两片膜簧组成；当启用上音圈电机时，可以在安装平台与作动器的过渡平台之间提供一个负刚度，与下部膜簧的正刚度串联起来，理论上可以使结构整体刚度趋于无穷大，从而抑制安装平台带来的直接干扰；当启动下音圈电机时，提供一个可变阻尼，使基座振动在传递到作动器过渡平台时就得到良好的隔离，减弱甚至消除由下部膜簧柔性引起的低频共振，从而大幅削弱基座宽带振动对安装平台上高精密设备的影响。
The invention relates to a multi-degree-of-freedom voice coil vibration isolation and vibration suppression structure and its control method. Two actuators are used to form the vibration isolation and vibration suppression structure, and the installation platform and the base are connected in series. Each actuator consists of two The voice coil motor is composed of two diaphragm springs; when the upper voice coil motor is enabled, a negative stiffness can be provided between the installation platform and the transition platform of the actuator, which can be connected in series with the positive stiffness of the lower diaphragm spring, theoretically enabling The overall rigidity of the structure tends to be infinite, thereby suppressing the direct interference caused by the installation platform; when the lower voice coil motor is activated, a variable damping is provided, so that the vibration of the base is well isolated when it is transmitted to the transition platform of the actuator, Weaken or even eliminate the low-frequency resonance caused by the flexibility of the lower membrane spring, thereby greatly reducing the influence of the broadband vibration of the base on the high-precision equipment on the installation platform.
Description
Technical field
The present invention relates to a kind of multivariant voice coil vibration isolation vibration suppression structure and its control methods, belong to active control technology
Field.
Background technique
With the high speed development of science and technology, highly sophisticated device equipment is more widely applied to aerospace field, with
Accordingly be then to be further increased to its mounting structure anti-vibration performance with anti-interference ability requirement, traditional passive vibration isolation knot
Structure gradually can not meet demand, and then active control technology comes into being.
In general, high-precision equipment and its mounting structure are needed in face of both sides disturbing factor, first is that equipment itself is brought
Direct interference, such as by weight of equipment change caused by perturbed force, self-contained gyro work when bring perturbed force；It is another
Kind then comes from the vibration interference that construction pedestals are transmitted to.If necessary to inhibit direct interference, Structure of need has higher
Rigidity, and if seat vibration is isolated, it is that Structure of need has higher flexibility.The demand of these two aspects often mutual lance
Shield can not get both, and can attend to one thing and lose sight of another.In addition, the disturbance in space environment, often multivariant, this also suggests that new
Demand.
Summary of the invention
The purpose of the present invention is to solve the above problem, overcome the shortcomings of the prior art can not vibration isolation vibration suppression simultaneously, mention
For a kind of multivariant voice coil vibration isolation vibration suppression structure and its control method, substantially weaken the vibration of pedestal bandwidth on mounting platform
Precision equipment influence.
The technology of the present invention solution: a kind of multivariant voice coil vibration isolation vibration suppression structure and its control method, installation are flat
It is together in series between platform and pedestal by two pairs of identical actuator, two actuator have a transition platform.Individually
Actuator is connected by two voice coil motors and two panels film spring group, and film spring plays the role of spring and hinge, is playing branch
In the case that support acts on, axial rigidity is not only provided, but also provide certain rotational angle, translation and rotation etc. can be isolated mostly certainly
By the vibrational perturbation spent.It generally speaking for structure, can be in mounting platform when enabling the upper voice coil motor of two actuator
A negative stiffness is provided between its respective transition platform, the positive rigidity provided with lower film spring is together in series, theoretically can be with
Structure overall stiffness is set to tend to be infinitely great, to inhibit direct interference.And when enabling the lower voice coil motor of two actuator, it can
As soon as making seat vibration obtain good isolation when being transmitted to each actuator transition platform to provide an adaptive damping, weaken
It even is eliminated the low-frequency resonance as caused by lower film spring flexibility, to substantially weaken the vibration of pedestal bandwidth to the precision on mounting platform
The influence of equipment.And the structure then can further constitute the platform of Hexapod configuration by assembling, play better vibration
Isolation/inhibition effect.
Specific structure are as follows: mounting platform and pedestal are together in series by the present invention using two actuator, each actuator packet
It includes: power section, support construction and measurement part；Support construction is convenient for it for providing and keeping power section original state
Movement, measurement part is for measuring the motion conditions of power section；
The power section includes: upper voice coil motor and lower voice coil motor in each actuator, the upper voice coil motor packet
Voice coil motor coil and upper voice coil motor magnet are included, the upper voice coil motor coil is fixedly connected with the operating bar, described
Upper voice coil motor magnet is fixedly connected with transition platform, and upper voice coil motor coil is located at the annular groove inside upper voice coil motor magnet
In, it is supported by film spring；Lower voice coil motor includes lower voice coil motor coil and lower voice coil motor magnet, lower voice coil motor line
Circle is fixedly connected with transition platform, and lower voice coil motor magnet is fixedly connected with the pedestal in external overall structure, lower voice coil motor
Coil is located in the annular groove inside lower voice coil motor magnet, is supported by film spring；
Support construction includes: transition platform, motor base, support column, operating bar, link block, indent, tabletting and film spring；
Each actuator is fixedly mounted on the base motor base；Four support columns are uniformly distributed with 90 ° of angle is mounted on motor bottom
On seat and transition platform, indent is installed on support column, film spring outer ring is fixedly mounted on respectively by motor base and mistake by tabletting
It crosses on platform；Film spring inner ring is by link block, respectively by lower voice coil motor coil and transition platform, upper voice coil motor coil and work
Lever is fixedly connected；Two actuator are fixedly connected by operating bar with mounting platform respectively；Film spring other than axial displacement is provided,
It also can be carried out the overturning of low-angle, to can be carried out the vibration isolating/vibration suppressing including the multiple freedom degrees for being translatable and rotating；Transition platform
It can the relative motion between mounting platform and pedestal under the movement of upper and lower voice coil motor；
Measurement portion point includes: relative displacement transducer, velocity sensor and sensor stand；Relative displacement transducer passes through
Sensor stand is mounted on operating bar；Velocity sensor is fixed on transition platform outer edge；The output of measurement part is supplied to
Peripheral control unit.
The voice coil motor is all made of the voice coil motor of model LA34-37-000A, in response to belt is roomy, without lag,
High reliablity.
The film spring is made of beryllium-bronze piece (QBe2) cut-flower, has preferable mechanical property.
The mounting platform, transition platform, pedestal, motor base, support column and operating bar are manufactured with 45 Steel materials, even
Block, indent, tabletting are connect using aluminium alloy manufacture.
The model CWY-D0-502 of the relative displacement transducer, the model CS-YD-004 of velocity sensor, measurement
Precision is high.
A kind of control method of multiple degrees of freedom voice coil vibration isolation vibration suppression structure of the present invention, comprising: upper voice coil electricity in each actuator
The control method of the control method of machine and lower voice coil motor:
The control method of the upper voice coil motor are as follows:
For upper voice coil motor, when mounting platform and each transition platform are interfered power and relative motion occur, two
In actuator operating bar be subjected to displacement, its relative displacement signal can be passed to peripheral control unit by relative displacement transducer, control
Into each actuator, upper voice coil motor coil output phase answers electric current to device processed after circuit computing, makes respective coiler part and magnetic
Relative motion occurs for body portion, and mounting platform and transition platform is finally made to generate stable relative displacement, provides and perturbed force
Equivalent negative stiffness；By the parameter of adjusting controller transmission function, it is equal to the size of negative stiffness provided by lower film spring just
Rigidity, so that overall stiffness be made to tend to be infinitely great；
The control method of lower voice coil motor specifically:
For lower voice coil motor, when pedestal vibrates, velocity sensor believes the speed of each actuator transition platform
Number pass to peripheral control unit, export electric current to lower voice coil motor after circuit computing, generate one it is proportional to speed
Electromagnetic damping power；By the size of adjusting controller parameter change damped coefficient, increase damping in the low-frequency range of vibrational perturbation
Coefficient inhibits resonance, and high band reduces damped coefficient and increases vibration rate of decay, to obtain good anti-vibration performance.
High frequency and low frequency in the present invention refer to oscillation physically, it is generally the case that by 6Hz vibrational perturbation below
It is defined as low frequency, the vibrational perturbation of 100Hz or more is defined as high frequency.
Of the invention is a little:
(1) the configuration of the present invention is simple, and voice coil motor is widely used, technology maturation, high reliablity.
(2) present invention can inhibit the multiple degrees of freedom vibration of direct interference and isolation from mounting platform from pedestal simultaneously
Dynamic, performance is comprehensive；
(3) present invention can guarantee structure in the vibration decaying speed of high band while decrease even is eliminated low-frequency resonance
Rate；
(4) present invention can be further combined use, form the vibration-isolating platform of Hexapod configuration, carry out more complicated
Using easy to use.
Detailed description of the invention
Fig. 1 is the three-dimensional front-view of structure of the invention；
Fig. 2 is that the three-dimensional of structure of the invention is axonometric drawing；
Fig. 3 is the 3-D view of single actuator of the invention, and wherein a is front view, and b is axonometric drawing；
Fig. 4 is the cross-sectional view of single actuator of the invention；
Fig. 5 is the structure diagram of film spring of the invention；
Fig. 6 is the control method schematic diagram of upper voice coil motor；
Fig. 7 is the control method schematic diagram of lower voice coil motor；
Fig. 8 is a kind of schematic diagram that combination of the invention constitutes Hexapod platform；
In figure:
1- power section 2- support construction part 3- measures part
Voice coil motor coil on voice coil motor 103- under the upper voice coil motor 102- of 101-
Voice coil motor magnet under voice coil motor coil 106- under the upper voice coil motor magnet 105- of 104-
201- mounting platform 202- transition platform 203- pedestal
204- motor base 205- support column 206- indent
207- tabletting 208- film spring 209- operating bar
210- link block 301- relative displacement transducer 302- velocity sensor
303- sensor stand
Specific embodiment
Below in conjunction with attached drawing and example, invention is further described in detail.
As shown in figure 1, figure 2, figure 3, figure 4 and figure 5, the present invention is a kind of multivariant voice coil vibration isolation vibration suppression structure, installation
It is together in series between platform and pedestal by two pairs of identical actuator.The structure of each actuator include power section 1,
Support construction part 2 and measurement part 3, support construction, convenient for its movement, are surveyed for providing and keeping power section original state
Amount part is for measuring the motion conditions of power section.
Power section 1 includes upper voice coil motor 101 and lower voice coil motor 102, and upper voice coil motor 101 includes upper voice coil motor
Coil 103 and upper voice coil motor magnet 104, upper voice coil motor coil 103 are solid by the screw of link block 210 and operating bar 209
Fixed connection, upper voice coil motor magnet 104 are fixedly connected with transition platform 202, and upper voice coil motor coil 103 is located at upper voice coil motor
In annular groove inside magnet 104, supported by film spring 208；Lower voice coil motor 102 includes lower voice coil motor coil 105
With lower voice coil motor magnet 106, lower voice coil motor coil 105 connects by the way that the screw of link block 210 and transition platform 202 are fixed
It connects, lower voice coil motor magnet 106 is fixedly connected by screw with pedestal 203, and lower voice coil motor coil 105 is located at lower voice coil motor
In annular groove inside magnet 106, supported by film spring 208.
Support construction part 2 includes transition platform 202, motor base 204, support column 205, indent 206, tabletting 207, film
Spring 208, operating bar 209 and link block 210.
Actuator is fixedly mounted on pedestal 203 by motor base 204 by screw；Four support columns 205 are with 90 ° of folder
Angle, which is uniformly distributed, to be mounted on motor base 204 and transition platform 202, is installed with screw；There is screw thread in 205 upper end of support column, twists
On indent 206,208 outer ring of film spring is fixedly mounted on motor base 204 and transition platform 202 respectively by tabletting 207；
208 inner ring of film spring is then by link block 210, respectively by lower voice coil motor coil 105 and transition platform 202, upper voice coil motor
Coil 103 is fixedly connected with operating bar 209, due to the design feature of film spring 208 itself, can be axially displaced and be mentioned
For certain reverse angle, the isolation of multi-freedom-degree vibration can be used；Operating bar 209 is then respectively by two actuator and mounting platform
201 are fixedly connected.
Measuring part 3 includes relative displacement transducer 301, velocity sensor 302 and sensor stand 303；Relative displacement
Sensor 301 is mounted on operating bar 209 by sensor stand 302；Velocity sensor 302 is screwed in transition
Platform outer edge.
Upper voice coil motor 101 and lower voice coil motor 102 are all made of the voice coil motor of model LA34-37-000A, are commercially available
Product is mainly made of magnet and coil two parts.The two is used by being nested, and can carry out linear relative movement.Its
Coil part can provide it suitable electric current with external circuits to realize desired movement.
Film spring 208 is made of beryllium-bronze piece (QBe2) cut-flower, as shown in figure 4, playing support transition platform 202 and operating bar
209 effect, while biggish axial rigidity being provided, so that actuator is can be carried out the rotation of certain angle.
Mounting platform 201, transition platform 202, pedestal 203, motor base 204, support column 205 and operating bar 209 are used
The manufacture of 45 Steel materials, link block, indent, tabletting are manufactured using aluminium alloy.Wherein mounting platform 201 is used to install equipment,
Pedestal 203 plays a supportive role.
Part of detecting 3 is mainly that external circuit control provides reference quantity and feedback quantity, relative displacement transducer 301 therein
For electric vortex type displacement sensor, model CWY-D0-502 is made of probe and fore-lying device two parts, passes through sensor stand
303 are mounted on operating bar 209, for measuring operating bar 209 along axial relative displacement.Velocity sensor 302 is uniaxial pressure
Electric-type velocity sensor, model CS-YD-004 are mounted on outside 202 lower surface of transition platform wherein there is internal screw thread by screw
Edge.
The present invention can inhibit the broadband vibration of direct interference and isolation from mounting platform 201 from pedestal 203 simultaneously
Dynamic, the course of work: when there is direct interference to act on mounting platform 201, the film spring that two panels plays a supportive role can deform production
Raw one, along axial decrement, provides a suitable electricity to upper voice coil motor coil 103 by control external circuit at this time
Stream, makes it generate relative motion with upper voice coil motor magnet 104, and the electromagnetic force that upper voice coil motor 101 provides will overcome upper membrane
The pressure of spring 208 makes operating bar 209 generate an elongation along axial, provides so-called negative stiffness.By adjusting external control
Device parameter makes the significantly small positive rigidity for being just equal to lower film spring 208 of its equivalent negative stiffness, and the elongation of operating bar 209 can be made rigid
Each 202 axial length reduction of actuator transition platform is compensated well, and whole stiffness at the end tends to be infinitely great.General effect is exactly that installation is flat
The absolute position of platform 201 is constant, and the transition platform 202 of two actuator is moved down along axial direction, is mounted on installation to ensure that
The equipment of platform 201 is not interfered by change in location.On the other hand, when pedestal 203 vibrates, peripheral control unit can be passed through
A suitable electric current is provided to lower voice coil motor coil 105, generates a variable electromagnetic damping power, is even disappeared to weaken
While except low-frequency resonance caused by lower film spring flexibility, also guarantee power structure in the vibration rate of decay of high band.Make in this way
Influence of 203 wide-band vibration of pedestal when being transmitted to mounting platform 201 is very small, to meet high-precision equipment to mounting structure
The requirement of anti-vibration performance.
Furthermore, it is possible to the use that is combined of the invention be formed Hexapod platform, if figure institute 8 shows, wherein being 1.
Multivariant voice coil vibration isolation vibration suppression structure of the invention, is 2. vibration isolation connecting platform, is 3. load connecting platform.Use three
Identical multivariant voice coil vibration isolation vibration suppression structure 1., at an angle distributing installation vibration isolation connecting platform 2.
On, 3. it is connected with load connecting platform, it is whole to realize vibration isolation vibration suppression function.
The control method of multiple degrees of freedom voice coil vibration isolating/vibration suppressing structure of the invention, the controlling party including upper voice coil motor 101
The control method of method and lower voice coil motor 102.
As shown in fig. 6, the control method of upper voice coil motor 101 specifically:
For upper voice coil motor 101, when mounting platform 201 is disturbed with each actuator transition platform 202 and phase occurs
When to movement, relative displacement signal is passed to peripheral control unit by relative displacement transducer 301, and controller is after circuit computing
Upward voice coil motor coil 103 exports electric current, makes coiler part and magnet part that relative motion occur, and finally make mounting platform
Platform 202 generates stable relative displacement between 201 and middle actuator, provides the equivalent negative stiffness corresponding to perturbed force.It can lead to
The parameter for overregulating controller transfer function makes the size of negative stiffness be equal to the positive rigidity that lower film spring provides, so that whole
Body rigidity tends to be infinitely great.
As shown in fig. 7, the control method of lower voice coil motor 102 specifically:
For lower voice coil motor 102, when pedestal 203 vibrates, velocity sensor 302 is by actuator transition platform
202 speed signal is transmitted to peripheral control unit, and controller exports electric current to lower voice coil motor coil 105 after circuit computing,
And generate an electromagnetic damping proportional to speed.The size of damped coefficient can be changed by adjusting controller parameter,
Suitably increase damped coefficient in low-frequency range and inhibit resonance, high band reduces damped coefficient and increases vibration rate of decay, to obtain
Obtain good anti-vibration performance.
Above embodiments are provided just for the sake of the description purpose of the present invention, and are not intended to limit the scope of the invention.This
The range of invention is defined by the following claims.It does not depart from spirit and principles of the present invention and the various equivalent replacements made and repairs
Change, should all cover within the scope of the present invention.
Claims (6)
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| CN108667206B (en) * | 2018-05-15 | 2019-07-12 | 北京控制工程研究所 | An Intelligent Flexible Actuator Based on Separated Double Membrane Spring |
| KR102601236B1 (en) * | 2018-11-30 | 2023-11-13 | 주식회사 씨케이머티리얼즈랩 | Wide band actuator |
| CN113588189A (en) * | 2021-08-04 | 2021-11-02 | 重庆大学 | Magnetic suspension type space full-freedom absolute pose sensing system |
| CN114233785A (en) * | 2021-11-30 | 2022-03-25 | 沈阳航天新光集团有限公司 | Dynamic vibration absorber |
| CN114608775B (en) * | 2022-03-15 | 2024-04-30 | 中国科学院长春光学精密机械与物理研究所 | Landing leg type multidimensional micro-vibration simulator based on coarse and fine level driving assembly |
| CN114967777B (en) * | 2022-05-04 | 2023-06-30 | 西北工业大学 | Ultra-static active vibration isolation platform and method based on voice coil actuator |
| CN115384807B (en) * | 2022-06-27 | 2025-01-10 | 中国空间技术研究院 | Active vibration-absorbing support rod and vibration reduction system with spatial accuracy maintenance capability |
| CN115208124B (en) * | 2022-09-16 | 2022-12-20 | 中国科学院宁波材料技术与工程研究所 | Precise motion platform integrated with active damping and control framework thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1089403A (en) * | 1996-09-10 | 1998-04-07 | Nikon Corp | Vibration control device |
| CN102394548B (en) * | 2011-09-22 | 2013-06-19 | 北京航空航天大学 | Voice coil vibration isolating/vibration suppressing structure and control method thereof |
| CN102820761A (en) * | 2012-07-30 | 2012-12-12 | 北京航空航天大学 | Voice coil actuator based on non-linear membrane spring |
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Effective date of registration: 20201202 Address after: Unit 905, unit 4, 9 / F, building 2, FengHao East Road, Haidian District, Beijing 100094 Patentee after: BEIJING WEIFEN HANGYU TECHNOLOGY Co.,Ltd. Address before: 100191 Haidian District, Xueyuan Road, No. 37, Patentee before: BEIHANG University |
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Effective date of registration: 20201222 Address after: 100086 No. 1107d-2, 11 / F, 8 caihefang Road, Haidian District, Beijing Patentee after: BEIJING HANGYU ZHENKONG TECHNOLOGY Co.,Ltd. Address before: Unit 905, unit 4, 9 / F, building 2, FengHao East Road, Haidian District, Beijing 100094 Patentee before: BEIJING WEIFEN HANGYU TECHNOLOGY Co.,Ltd. |