CN107941416A - Detect the connection terminal of vacuum - Google Patents
Detect the connection terminal of vacuum Download PDFInfo
- Publication number
- CN107941416A CN107941416A CN201711480093.2A CN201711480093A CN107941416A CN 107941416 A CN107941416 A CN 107941416A CN 201711480093 A CN201711480093 A CN 201711480093A CN 107941416 A CN107941416 A CN 107941416A
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- China
- Prior art keywords
- filament
- connection terminal
- vacuum
- helical
- housing
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The present invention relates to examine detection technique field, more particularly to a kind of connection terminal for detecting vacuum.It can be seen from the above technical scheme that the support terminals in the present invention are threaded through on housing and supporting item, it is ensured that in vibration, the helical filament and the first supporting mechanism synchronous vibration, prevent helical filament to be pulled off；Filament is helical structure, can effectively prevent from vibrating, avoid being pulled off, while adds contact area, reduces the length of whole device, has saved cost.
Description
Technical field
The present invention relates to examine detection technique field, more particularly to a kind of connection terminal for detecting vacuum.
Background technology
Vacuum meter also known as vacuum meter, are the instruments of measurement of vacuum or air pressure.Usually utilize gas under different air pressures
The change of certain physical effect carries out the measurement of air pressure.Pirani ga(u)ge is also referred to as resistance-type vacuum gauge, its operation principle is：Very
Reciprocal of duty cycle is different, and the air molecule number in unit volume is just different, and the ability (heat dissipation of heat is taken away for the resistance wire to generate heat
Ability) it is just different, wire temperature is just different, because the resistivity of resistance wire is the function of temperature, different vacuum
The difference of resistivity is just caused, then resistance is just different, and pressure drop of the electric current on resistance wire is just different, according to the change of voltage just
Atmospheric pressure, that is, measurement of vacuum can be conversed.Existing Pirani ga(u)ge uses the hot filament of linear pattern mostly, and
In measurement process, uncontrollable vibration is often had, the hot filament in vacuum meter can be had an impact, cause its fracture, so that
Influence detection.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of vacuum degree measurement precision is high, pressure change hair should it is rapid, can
Effectively resist the connection terminal of the detection vacuum of external vibration.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention to solve the technical problems is：
A kind of connection terminal for detecting vacuum, including the housing on object to be detected, are installed to housing
Direction on object to be measured keeps the first seal of the air-tightness on rear side of housing for front, is worn in the first seal
Equipped with support terminals, helical filament is connected with the support terminals, second seal, institute are run through in the front end of the support terminals
State second seal and be equipped with the supporting item for being used to support the helical filament.
As a further improvement on the present invention, the helical filament includes the first filament and the second filament, and described first is thin
Silk and the second filament are double-spiral structure, and first filament is connected by the 3rd filament with the second filament.
As a further improvement on the present invention, first filament and the second filament are connected with lead respectively, the lead
It is connected with the support terminals, the central shaft of the conveyor screw is parallel with support terminals.
As a further improvement on the present invention, the helical filament forms for the secondary winding body of filament, the secondary winding of filament
Body is made of winding body of 1 filament.
As a further improvement on the present invention, the supporting item is cylinder-like structure, it includes integrally formed supporting part
It is accommodated in connecting portion and by helical filament in supporting item, opening is offered on the connecting portion.
As a further improvement on the present invention, the supporting part is equipped with the hold assembly for being used for fixing helical filament, institute
Hold assembly is stated to be connected with the helical filament.
As a further improvement on the present invention, the housing outer surface is equipped with screw thread, the screw thread and object to be measured
Dock to produce vacuum-tight seal.
As a further improvement on the present invention, annular vibration component on the housing, the annular vibration component are arranged on
The front end of the housing.
As a further improvement on the present invention, the support terminals are equipped with reinforcement feature, and the reinforcement feature is rod-shaped
Structure, the reinforcement feature are vertical setting with the support terminals.
Present invention also offers a kind of vacuum pressure sensor, include the connection terminal of above-mentioned detection vacuum.
, can be with it can be seen from the above technical scheme that the support terminals in the present invention are threaded through on housing and supporting item
Ensure that, in vibration, the helical filament and the first supporting mechanism synchronous vibration, prevent helical filament to be pulled off；
Filament is helical structure, can effectively prevent from vibrating, avoid being pulled off, while adds contact area, is reduced
The length of whole device, has saved cost；
Helical filament carries temperature-compensating, improves the utilization rate of the energy so that and signal stabilization, vacuum degree measurement precision is high,
It is adapted to remote transmission signal；Helical filament thermal capacity is small at the same time so that helical filament becomes pressure during vacuum is detected
Changing hair should be rapid.External vibration can effectively be resisted
Brief description of the drawings
Fig. 1 is a kind of connection terminal structure diagram for detecting vacuum of the present invention.
Fig. 2 is the enlarged diagram in Fig. 1.
Description of reference numerals：1- housings, 11- first seals, 12- annular vibrations component, 13- screw threads, 2- support terminals,
21- reinforcement features, 3- supporting items, 31- second seals, 32- hold assemblies, 33- connecting portions, 34- helical filaments, 35- windings
Body, 4- control circuits, 5- spiral covers, 51- contacts
Embodiment
The invention will be further described with specific embodiment below in conjunction with the accompanying drawings, so that those skilled in the art can be with
More fully understand the present invention and can be practiced, but illustrated embodiment is not as a limitation of the invention.
Refering to Fig. 1, Fig. 2, a kind of connection terminal for detecting vacuum, including the housing 1 on object to be detected,
The first seal 11 of the air-tightness of the rear side of housing 1, institute are kept using the direction that housing 1 is installed on object to be measured as front
State and support terminals 2 are equipped with first seal 11, helical filament 34, the support terminals 2 are connected with the support terminals 2
Front end run through second seal 31, the second seal 31 is equipped with the supporting item 3 for being used to support the helical filament 34,
The total length part in the longitudinal direction of the helical filament 34 is housed in the supporting item 3, can be reduced because of helical filament
Measurement caused by the difference of 34 installations is uneven, while the heat that supporting item 3 can seize 34 compensation gas of helical filament, makes spiral shell
It is small to revolve 34 range of temperature of filament, ensures 34 performance of helical filament, it is detected stability more preferable.
The first seal 11 and second seal 31 are equipped with the through hole for being used for housing support terminals 2, the through hole
Insulator is equipped with, the support terminals 2 are threaded through on the insulator, and the first seal 11 and second seal 31 are divided
Housing 1, supporting item 3 are not hermetically sealed.
The direction that the housing 1 is installed on object to be measured is equipped with an openend, and the open end side stretches into be detected
In tested quantity space inside object, the gas in helical filament 34 and tested quantity space forms contact condition.On housing 1
One seal 11 plays the role of as the next door between the air outside tested quantity space and housing 1.
The solution of the present invention includes the first filament and the second filament, first filament and second for the helical filament 34
Filament is double-spiral structure, and first filament is connected by the 3rd filament with the second filament.
Helical filament 34 carries temperature-compensating, improves the utilization rate of the energy so that signal stabilization, vacuum degree measurement precision
Height, is adapted to remote transmission signal；34 thermal capacity of helical filament is small at the same time so that helical filament 34 is right during vacuum is detected
Pressure change hair should be rapid.
First filament and the second filament are connected with lead respectively, and the lead is connected with the support terminals 2, described
The central shaft of conveyor screw is parallel with support terminals 2.
The central shaft of the conveyor screw structural strength higher that may be such that helical filament 34 parallel with support terminals 2, stability is good,
Its performance is improved, while the influence of mechanical stress can be reduced.
Another program of the present invention is that the helical filament 34 is that the secondary winding body 35 of filament forms, the secondary winding body of filament
35 are made of winding body 35 of 1 filament.
The helical filament 34 forms for the secondary winding body 35 of filament, and the pitch coefficient of the winding body 35 of the filament is less than
The pitch coefficient of helical filament 34, and the ratio between minimum pitch of the helical filament 34 at inner ring and filament diameter >=1.5.
For helical filament 34, therefore the helical filament 34 that the secondary winding body 35 of filament forms can be in high temperature work
Still there is higher intensity, therefore even if the pitch coefficient of the winding body 35 of filament is less than the pitch system of helical filament 34 under condition
Number, helical filament 34 will not sagging deflections due to gravity under high-order operating mode.
The present invention can also solve helical filament 34 due to the use of intensity by increasing supporting point to helical filament 34 with this
The problem of deformation.
When the helical filament 34 used in above-mentioned two scheme adds filament heating power with object vacuum environment to be detected
Contact area, while 34 thermal capacity of helical filament is small so that helical filament 34 is during vacuum is detected to pressure change
Hair should be rapid, and detection time is short, precision higher, while enhances the filament service life, and the connection terminal service life is extended with this.
Helical filament 34 shortens filament preheating time, and filament, which is powered, to be started faster, less pumping fluid can be subject to pollute,
And it is not easily susceptible to the influence of mechanical stress (such as situations such as shaking), it is not easy to be broken, improve the performance of filament, avoid
Phenomena such as fracture of wire, occurs for filament, extends the service life of filament.
Helical filament 34 carries temperature-compensating, improves the utilization rate of the energy so that signal stabilization, vacuum degree measurement precision
Height, is adapted to remote transmission signal.
The supporting item 3 is cylinder-like structure, it includes integrally formed supporting part and connecting portion 33 and by helical filament
34 are accommodated in supporting item 3, and opening is offered on the connecting portion 33.
By opening up opening on supporting item 3, it may be such that helical filament 34 and the contact area of object to be detected increase, carry
High helical filament 34 should be rapid to pressure change hair, and detection time is short, precision higher, while enhances the filament service life.
Supporting item 3 can ensure that the helical filament 34 synchronously shakes with the first supporting mechanism in vibration for cylinder-like structure
It is dynamic, prevent helical filament 34 to be pulled off.
The supporting part is equipped with the hold assembly 32 for being used for fixing helical filament 34, the hold assembly 32 and the spiral shell
Rotation filament 34 connects.
1 outer surface of housing is equipped with screw thread 13, and the screw thread 13 is docked with object to be measured to produce vacuum tight
Sealing.
Screw thread 13 on housing 1 is docked with object to be measured to produce vacuum-tight seal, the vacuum-tight seal
Undertake the heat transfer from object to be measured to housing 1 so that the object to be measured is substantially positioned in identical with housing 1
Temperature, ensures that variable is essentially identical between the two so that accuracy of detection higher, institute's geodesic structure are more accurate.
Annular vibration component 12 on the housing 1, the annular vibration component 12 are arranged on the front end of the housing 1.
It is closer that the vibrating mass may be such that the screw thread 13 on housing 1 is docked with object to be measured, and sealing effect is more preferable,
Vibrating mass applies proper vibration dynamics to the connection terminal of the present invention at the same time, and helical filament 34 can be cleared up, and ensures to survey
The precision of examination.
The support terminals 2 are equipped with reinforcement feature 21, and the reinforcement feature 21 is rod-like structure, the reinforcement feature 21
It is vertical setting with the support terminals 2.
Support terminals 2 can be closely connected by reinforcement feature 21 with housing 1, it is ensured that in vibration, the helical filament
34 and the first supporting mechanism synchronous vibration, prevent helical filament 34 to be pulled off.
Control circuit 4 is electrically connected present invention also offers a kind of vacuum pressure sensor, including with connection terminal, it is described
Control circuit 4 is equipped with spiral cover 5, and the spiral cover 5 is equipped with flank, and spiral cover 5 may be such that contact 51 does not expose, and reduces volume,
Spiral cover 5 is internally provided with installation limit point at the same time, prevents setup error；Certainly, it is most important that, further include at least one present invention
The connection terminal of the detection vacuum.The configuration of said system, combines according to being actually needed, can be connecting pin
Sub or multiple connection terminal parallel forms
It can be seen from the above technical scheme that the support terminals 2 in the present invention are threaded through on housing 1 and supporting item 3, can
To ensure that the 34 and first supporting mechanism synchronous vibration of helical filament, prevents helical filament 34 to be pulled off in vibration；
Filament is helical structure, can effectively prevent from vibrating, avoid being pulled off, while adds contact area, is reduced
The length of whole device, has saved cost；
Helical filament 34 carries temperature-compensating, improves the utilization rate of the energy so that signal stabilization, vacuum degree measurement precision
Height, is adapted to remote transmission signal；34 thermal capacity of helical filament is small at the same time so that helical filament 34 is right during vacuum is detected
Pressure change hair should be rapid.
Embodiment described above is only to absolutely prove preferred embodiment that is of the invention and being lifted, protection model of the invention
Enclose not limited to this.The equivalent substitute or conversion that those skilled in the art are made on the basis of the present invention, in the present invention
Protection domain within.Protection scope of the present invention is subject to claims.
Claims (10)
1. a kind of connection terminal for detecting vacuum, it is characterised in that including the housing on object to be detected, with shell
The direction that body is installed on object to be measured keeps the first seal of the air-tightness on rear side of housing for front, and described first is close
Support terminals are equipped with sealing, helical filament is connected with the support terminals, the front end of the support terminals runs through second
Seal, the second seal are equipped with the supporting item for being used to support the helical filament.
2. the connection terminal of detection vacuum as claimed in claim 1, it is characterised in that the helical filament includes first
Filament and the second filament, first filament and the second filament are double-spiral structure, first filament by the 3rd filament with
Second filament connects.
3. the connection terminal of detection vacuum as claimed in claim 2, it is characterised in that first filament and second thin
Silk is connected with lead respectively, and the lead is connected with the support terminals, and the central shaft of the conveyor screw is parallel with support terminals.
4. the connection terminal of detection vacuum as claimed in claim 1, it is characterised in that the helical filament is filament two
Secondary winding body composition, the secondary winding body of filament are made of winding body of 1 filament.
5. the connection terminal of the detection vacuum as described in claim 1-4 is any, it is characterised in that the supporting item is circle
Tubular structure, it includes integrally formed supporting part and connecting portion and helical filament is accommodated in supporting item, the connecting portion
On offer opening.
6. the connection terminal of detection vacuum as claimed in claim 5, it is characterised in that the supporting part, which is equipped with, to be used for
The hold assembly of fixed helical filament, the hold assembly are connected with the helical filament.
7. the connection terminal of detection vacuum as claimed in claim 1, it is characterised in that the housing outer surface is equipped with
Screw thread, the screw thread are docked with object to be measured to produce vacuum-tight seal.
8. the connection terminal of detection vacuum as claimed in claim 1, it is characterised in that annular vibration portion on the housing
Part, the annular vibration component are arranged on the front end of the housing.
9. the connection terminal of detection vacuum as claimed in claim 1, it is characterised in that the support terminals, which are equipped with, to be added
Gu component, the reinforcement feature is rod-like structure, and the reinforcement feature is vertical setting with the support terminals.
10. a kind of vacuum pressure sensor, it is characterised in that include the connection terminal of the detection vacuum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711480093.2A CN107941416A (en) | 2017-12-29 | 2017-12-29 | Detect the connection terminal of vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711480093.2A CN107941416A (en) | 2017-12-29 | 2017-12-29 | Detect the connection terminal of vacuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107941416A true CN107941416A (en) | 2018-04-20 |
Family
ID=61937981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711480093.2A Pending CN107941416A (en) | 2017-12-29 | 2017-12-29 | Detect the connection terminal of vacuum |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107941416A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114720047A (en) * | 2022-04-19 | 2022-07-08 | 天津国科医工科技发展有限公司 | A Pirani sensor |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB321037A (en) * | 1928-10-04 | 1929-10-31 | William Holt | Improvements relating to thermionic valves or vacuum electric devices |
| DE3541178A1 (en) * | 1985-11-21 | 1987-05-27 | Leybold Heraeus Gmbh & Co Kg | MEASURING HEAD FOR A VACUUM METER |
| JPH07120339A (en) * | 1993-10-25 | 1995-05-12 | Ulvac Japan Ltd | Pirani gauge |
| KR20040025107A (en) * | 2002-09-18 | 2004-03-24 | 아남반도체 주식회사 | Hot cathode ion gage |
| CN101133308A (en) * | 2005-03-04 | 2008-02-27 | 英飞康有限责任公司 | Vacuum gauge |
| JP2010151622A (en) * | 2008-12-25 | 2010-07-08 | Canon Anelva Corp | Thermal conduction type vacuum gage, and vacuum processing device having vacuum container including the vacuum gage |
| WO2011099238A1 (en) * | 2010-02-12 | 2011-08-18 | 株式会社アルバック | Transducer-type vacuum gauge |
| CN102375001A (en) * | 2010-08-18 | 2012-03-14 | 横河电机株式会社 | Thermal conductivity detector and gas chromatograph using same |
| CN202363706U (en) * | 2011-11-22 | 2012-08-01 | 安徽华东光电技术研究所 | Novel coaxial energy feed-in terminal |
| CN106104245A (en) * | 2014-03-25 | 2016-11-09 | Mks 仪器公司 | Miniature resistance manometer |
| CN106153246A (en) * | 2015-05-15 | 2016-11-23 | 株式会社爱发科 | Pirani ga(u)ge |
| JP2016218050A (en) * | 2015-05-15 | 2016-12-22 | 株式会社アルバック | Pirani vacuum gage |
| CN208383383U (en) * | 2017-12-29 | 2019-01-15 | 李涛 | Detect the connection terminal of vacuum degree |
-
2017
- 2017-12-29 CN CN201711480093.2A patent/CN107941416A/en active Pending
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB321037A (en) * | 1928-10-04 | 1929-10-31 | William Holt | Improvements relating to thermionic valves or vacuum electric devices |
| DE3541178A1 (en) * | 1985-11-21 | 1987-05-27 | Leybold Heraeus Gmbh & Co Kg | MEASURING HEAD FOR A VACUUM METER |
| JPH07120339A (en) * | 1993-10-25 | 1995-05-12 | Ulvac Japan Ltd | Pirani gauge |
| KR20040025107A (en) * | 2002-09-18 | 2004-03-24 | 아남반도체 주식회사 | Hot cathode ion gage |
| CN101133308A (en) * | 2005-03-04 | 2008-02-27 | 英飞康有限责任公司 | Vacuum gauge |
| JP2010151622A (en) * | 2008-12-25 | 2010-07-08 | Canon Anelva Corp | Thermal conduction type vacuum gage, and vacuum processing device having vacuum container including the vacuum gage |
| WO2011099238A1 (en) * | 2010-02-12 | 2011-08-18 | 株式会社アルバック | Transducer-type vacuum gauge |
| CN102375001A (en) * | 2010-08-18 | 2012-03-14 | 横河电机株式会社 | Thermal conductivity detector and gas chromatograph using same |
| CN202363706U (en) * | 2011-11-22 | 2012-08-01 | 安徽华东光电技术研究所 | Novel coaxial energy feed-in terminal |
| CN106104245A (en) * | 2014-03-25 | 2016-11-09 | Mks 仪器公司 | Miniature resistance manometer |
| CN106153246A (en) * | 2015-05-15 | 2016-11-23 | 株式会社爱发科 | Pirani ga(u)ge |
| JP2016218050A (en) * | 2015-05-15 | 2016-12-22 | 株式会社アルバック | Pirani vacuum gage |
| CN208383383U (en) * | 2017-12-29 | 2019-01-15 | 李涛 | Detect the connection terminal of vacuum degree |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114720047A (en) * | 2022-04-19 | 2022-07-08 | 天津国科医工科技发展有限公司 | A Pirani sensor |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180420 |