CN107907531A - Method and device for measuring surface hardness of material - Google Patents
Method and device for measuring surface hardness of material Download PDFInfo
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- CN107907531A CN107907531A CN201711284327.6A CN201711284327A CN107907531A CN 107907531 A CN107907531 A CN 107907531A CN 201711284327 A CN201711284327 A CN 201711284327A CN 107907531 A CN107907531 A CN 107907531A
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- 239000000463 material Substances 0.000 title claims abstract description 168
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- 238000004458 analytical method Methods 0.000 claims abstract description 13
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- 238000007542 hardness measurement Methods 0.000 abstract description 8
- 239000000203 mixture Substances 0.000 abstract description 2
- 239000002131 composite material Substances 0.000 description 17
- 239000000523 sample Substances 0.000 description 16
- 239000011810 insulating material Substances 0.000 description 11
- 230000005540 biological transmission Effects 0.000 description 10
- 239000012212 insulator Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 7
- 230000032683 aging Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000005611 electricity Effects 0.000 description 5
- 229920002379 silicone rubber Polymers 0.000 description 5
- 230000005461 Bremsstrahlung Effects 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000002536 laser-induced breakdown spectroscopy Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000005070 sampling Methods 0.000 description 4
- 229920000260 silastic Polymers 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
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Abstract
The invention discloses a method and a device for measuring surface hardness of a material, relates to the technical field of material hardness measurement, and aims to solve the problems that the existing material hardness measurement is inconvenient, the measurement time is slow, and the measurement precision is restricted by the experience and the technical level of a measurer. The method for measuring the surface hardness of the material comprises the following steps: s1, irradiating the surface of the first material by using first pulse laser to acquire a laser plasma spectrum of the first material; s2, obtaining an atomic spectrum of a first analysis element from the laser plasma spectrum, and calculating the temperature of the laser plasma according to the atomic spectrum of the first analysis element, wherein the first analysis element is one of the first material composition elements; s3, determining the surface hardness of the first material based on the functional relationship between the surface hardness of the same material as the first material and the laser plasma temperature. The method can be used for measuring the surface hardness of the material.
Description
Technical field
The present invention relates to material hardness field of measuring technique, more particularly to a kind of measuring method of material surface hardness and survey
Measure device.
Background technology
The good external insulation state of ultra-high-tension power transmission line is the important leverage of safe operation of power system.Eighties of last century 90 years
Since generation, composite insulating material (such as silastic material) is widely used in external insulation field, is largely used in electric system, outside
The resistance to pollution flashover ability of insulator arrangement just significantly improves.Composite insulating material is mainly used for making composite insulator, makes respectively
Kind insulating composite coating (such as RTV, English full name Room Temperature Vulcanizing room temperature vulcanized silicone rubbers apply
Material) and the various casings of making etc..
Composite insulating material is influenced to occur old among During Process of Long-term Operation be subject to factors such as electric field, temperature, humidity
Change phenomenon, the hydraulic performance decline of composite insulating material is caused, so as to threaten the safe and stable operation of transmission line of electricity.Therefore, for
Transmission line of electricity composite insulating material surface service state, which carries out assessment, to have great importance.
Wherein, the hardness of composite insulating material is exactly to assess a performance indicator of its surface service state.With silicon rubber
Exemplified by material, the molecular chemistry key of the silastic material such as composite insulator occurs under the effect of the factors such as light, heat, mechanicals efforts
Fracture, generates free radicals, and free radical can react to each other, and generates " inorganic silicon ", or separates out bulky grain, this can cause material
Hardness increases, so that material loses original intensity and elasticity and aging occurs.Therefore, the hardness of silastic material is passed through
Situation of change can assess the degree of aging of silastic material, so by its degree of aging come to its surface service state into
Row assessment.
At present, most of existing composite insulating material hardness measurement is carried out with instruments such as Shore durometers, still
This measurement means are suitable for carrying out in laboratory after sampling, if with instruments such as Shore durometers to ultra-high-tension power transmission line
The composite insulating material of shaft tower etc. measures, then needs when high voltage transmission line powers off, gauger climbs on shaft tower and carries out
Measurement, so not only inconvenient, time of measuring is slow, and the precision measured is also limited, it is necessary to experience dependent on survey crew
And technical merit.
The content of the invention
The embodiment of the present invention provides a kind of measuring method and measuring device of material surface hardness, can solve existing
The problem of material hardness measurement is inconvenient, time of measuring is slow and the experience and technical merit of measurement accuracy subject restrict.
To reach above-mentioned purpose, in a first aspect, an embodiment of the present invention provides a kind of measuring method of material surface hardness,
Comprise the following steps:S1, the surface with first the first material of pulsed laser irradiation, obtain the laser plasma of first material
Body spectrum;S2, the atom spectrum for obtaining from the spectrum of laser plasma the first analytical element, according to the described first analysis
The atom spectrum of element calculates laser plasma temperature, wherein, the first analytical element is the first material component
In one kind;S3, basis and the letter between the case hardness and laser plasma temperature of the material of first material identical
Number relation determines the case hardness of first material.
The measuring method of material surface hardness provided in an embodiment of the present invention can be applied to long-range, the powered material to scene
Expect that (such as composite insulating material) surface carries out the case hardness of hardness measurement, rapidly judgement material, obtain accurate material
Superficial hardness number, so as to assess the operating status of material, to replace the material of aging in time, avoids because material is run
Hydraulic performance decline influences the stable operation of transmission line of electricity.Compared to existing hardness measurement method, material provided in an embodiment of the present invention
Expect the measuring method of case hardness, have without especially sampling, directly irradiate detected materials surface with pulsed laser beam,
And it is easy to operate, shaft tower etc. is climbed to without gauger, can be completed in the certain distance of detected materials surface, can be real
Now long-range measurement, and the advantages of analyze speed fast (whole analytic processes are no more than 30s), high certainty of measurement, and it is not tested
The experience and technical merit of amount person restricts, can be to multiple insulation of shaft tower during power transmission line charging operation or interruption maintenance
Multiple full skirts of substring and single branch insulator carry out analysis judgement.
Second aspect, the embodiment of the present invention additionally provide a kind of measuring device of material surface hardness, including laser, poly-
Focus lens, spectrometer and computer equipment, the condenser lens are located at the laser and send on the path of laser, the light
Spectrometer is connected with the computer equipment, and the spectrometer is used for the emission spectrum for catching laser plasma, and will be caught
The emission spectrum for the laser plasma caught is sent to the computer equipment;The computer equipment is used for from the spectrometer
The atom spectrum of the first analytical element is obtained in the emission spectrum of the plasma caught, according to first analytical element
Atom spectrum calculates the laser plasma temperature;Then, it is hard according to the surface of the material with first material identical
Functional relation between degree and the laser plasma temperature determines the case hardness of first material.
The measuring device of material surface hardness provided in an embodiment of the present invention, when measuring the first material surface hardness, swashs
Light device emission pulse laser, exposes to the surface of the first material (treating scleroscopic material) after the focusing of condenser lens, the
One material surface is excited to produce plasma, and after plasma decay, spectrometer captures the emission spectrum of plasma, spectrum
Emission spectrum is converted into electric signal by optical signal and reaches computer equipment by instrument, and the processing by computer equipment finally determines
The case hardness of first material.What the technical problem and beneficial effect that the measuring device is solved were provided with first aspect
The technical problem and beneficial effect that measuring method is solved are identical, and details are not described herein.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is attached drawing needed in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, without creative efforts, can be with
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the flow chart of the measuring method of material surface hardness provided in an embodiment of the present invention;
Fig. 2 is the case hardness that material is established in the measuring method of material surface hardness provided in an embodiment of the present invention with swashing
The flow chart of the functional relation of optical plasma temperature;
Fig. 3 is the Boltzmann plan drawn according to emission spectrum;
Fig. 4 is material surface hardness and the function relation curve of laser plasma temperature;
Fig. 5 is the structure diagram of the measuring device of material surface hardness provided in an embodiment of the present invention.
Embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work
Embodiment, belongs to the scope of protection of the invention.
Term " first ", " second " be only used for description purpose, and it is not intended that instruction or imply relative importance or
The implicit quantity for indicating indicated technical characteristic.Thus, " first " is defined, the feature of " second " can be expressed or imply
Ground includes one or more this feature.In the description of the present invention, unless otherwise indicated, " multiple " be meant that two or
Two or more.
Laser induced breakdown spectroscopy method (Laser-induce Breakdown Spectroscopy, abbreviation LIBS) is
A kind of remote analysis method, laser focuses on a certain position to be measured in surface of measurement sample, when the energy density of laser pulse is big
When sample breakdown threshold value, you can plasma is produced, emission spectrum when plasma dissipates can be captured by spectrometer,
So as to obtain spectrum of laser plasma, the spectral information of sample is obtained.Based on this special plasma Ablation Technique, lead to
The often sampling in atomic emission spectrum technology independently, atomization, excite three steps can be by pulsed laser excitation source
Once realize.The emission of ions line of continuous bremsstrahlung and inner element is produced in energy of plasma degenerative process, is led to
Fiber spectrometer collection spectral emissions signal is crossed, the corresponding feature peak intensity of element can be used for determining for sample in analysis of spectra
Property and quantitative analysis.LIBS technologies are highly suitable for carrying out long-range constituent content detection.Laser induced breakdown spectroscopy
There are obvious matrix effect, its analysis precision is vulnerable to the influence of material for testing physical chemistry characteristic, such as particle size, surface
Influencing each other between roughness, sample moisture content and component.
Embodiment 1
Referring to Fig. 1, an embodiment of the present invention provides a kind of measuring method of material surface hardness, comprise the following steps:
S1, the surface with first the first material of pulsed laser irradiation, obtain the spectrum of laser plasma of the first material,
Wherein, the first material is exactly to treat scleroscopic material, and the first material can be metal material or nonmetallic
Material (such as composite insulating material), is not specifically limited herein;Spectrum of laser plasma is the first pulsed laser irradiation
The emission spectrum of plasma caused by one material surface;
S2, the atom spectrum for obtaining from spectrum of laser plasma the first analytical element, according to the first analytical element
Atom spectrum calculates laser plasma temperature,
Wherein, the first analytical element is one kind in the first material component, and the first analytical element can be the first material
The characteristic element of material, characteristic element here is the element for referring to react its main performance, is usually that the material is relatively similar
Material is exclusive, for example, for silicon rubber composite material, its characteristic element is C and Si, can select two kinds of elements of C and Si
In one kind as the first analytical element;Laser plasma temperature refers to the surface institute of first the first material of pulsed laser irradiation
The temperature of the plasma of generation;
S3, basis and the functional relation between the case hardness and laser plasma temperature of the material of the first material identical
Determine the case hardness of the first material.
The measuring method of material surface hardness provided in an embodiment of the present invention can be applied to long-range, the powered material to scene
Expect that (such as composite insulating material) surface carries out the case hardness of hardness measurement, rapidly judgement material, obtain accurate material
Superficial hardness number, so as to assess the operating status of material, to replace the material of aging in time, avoids because material is run
Hydraulic performance decline influences the stable operation of transmission line of electricity.Compared to existing hardness measurement method, material provided in an embodiment of the present invention
Expect the measuring method of case hardness, have without especially sampling, directly irradiate detected materials surface with pulsed laser beam,
And it is easy to operate, shaft tower etc. is climbed to without gauger, in detected materials surface certain distance (such as within 10m)
It can complete, it can be achieved that long-range measurement, and the advantages of analyze speed fast (whole analytic processes are no more than 30s), measurement accuracy
Height, and the experience of subject and technical merit do not restrict, can be right during power transmission line charging operation or interruption maintenance
Multiple full skirts of multiple insulator chains of shaft tower and single branch insulator carry out analysis judgement.
In the measuring method shown in Fig. 1, laser is calculated according to the atom spectrum of the first analytical element in step s 2
The method of plasma temperature is not unique, such as can be sharp to calculate by drawing Boltzmann (Boltzmann) planar process
Optical plasma temperature, specifically, step S2 comprise the following steps:
S21, the spectrum according to the laser plasma obtained in step S1, determine a plurality of atom of the first analytical element
Spectral line;
The fitting of a plurality of atomic spectral line corresponding coordinate points, be in line by S22,
Wherein, the corresponding coordinate points of every atomic spectral line are (Ek, ln (Ikiλki/gkAki)), in coordinate (Ek, ln (Ikiλki/
gkAki)) in, for the intensity of emission spectrum, λkiFor wavelength, gkFor the degeneracy of upper energy level, AkiFor transition probability, EkFor excitation state
Energy;Ek、Iki、λki、Aki、gkEnergy level in k representatives in middle subscript, i represent lower energy level;And the slope value L of straight line and
The temperature T of the laser plasma of one material meets the following formula:L=-1/mT, in formula, m is Boltzmann constant;
After fitting a straight line is completed, according to formula L=-1/mT, it is possible to try to achieve the laser plasma of the first material
Temperature T.
It should be noted that:ln(Ikiλki/gkAki) and EkBetween meet the following formula:
In above-mentioned formula, h is Planck's constant, and c is light beam, and N (T), U (T) are respectively plasma electron number density
On the function and partition function of temperature, wherein, it is constant under N (T), U (T) same experiment parameter;It can be obtained by formula, because becoming
Measure ln (Ikiλki/gkAki) and independent variable EkMeet linear function relation, the slope of the linear function is -1/mT, that is, basis
Coordinate points (Ek, ln (Ikiλki/gkAki)) slope of straight line that is fitted is -1/mT.
In the step s 21, the selection criteria of the atomic spectral line of the first analytical element is:Intensity is high, selected every original
Sub- spectral line is nearby without the atomic spectral line of other high intensity;Excited energy gap is as far as possible big, corresponding to reduce atomic spectral line
Error caused by coordinate points are excessively intensive;Give up excessive spectral line, the linearity of institute's fitting a straight line is reached more than 0.99 as far as possible,
Reduce the uncertainty for the temperature T values for calculating laser plasma.
In step S22, the corresponding coordinate points of a plurality of atomic spectral line can be obtained by following steps:Obtaining the first analysis
After a plurality of atomic spectral line of element, every atomic spectral line is identified, for example, can according to the parameter of atomic spectral line (such as
Core wavelength, strength characteristics value etc., these parameters can obtain on spectrogram) it is identified, atomic spectral line is identified
Afterwards, then in conjunction with atom spectrum standard and technical data library (NIST), it is every that the first analytical element is obtained from technical data library
Parameters corresponding to bar atomic spectral line, such as Iki、λki、gk、AkiDeng can be obtained by according to these parameter values checked in
Coordinate points (E corresponding to first atomic spectral line of analytical element everyk, ln (Ikiλki/gkAki))。
Calculate outside laser plasma temperature except through drawing Boltzmann (Boltzmann) planar process, also may be used
To calculate laser plasma temperature by Boltzmann Double-Line Method.But compare Boltzmann Double-Line Method, Boltzmann plane
The optional spectral line of method is more, and (such as element silicon, its whole atomic spectral line have tens, and Boltzmann Double-Line Method is 2 spectrums of selection
Line is calculated, and Boltzmann planar process can select 5,6 etc.), lasing ion temperature computational accuracy is controllable, finally
The measurement accuracy of the first material surface hardness can be improved.
After the spectrum of laser plasma of each first material is obtained, a plurality of atomic spectra of the first analytical element is chosen
Before line, it is also necessary to the spectrum of the laser plasma of the first material is normalized, can so reduce measuring instrument
Influence of device (such as spectrometer) parameter fluctuation to spectrum of laser plasma intensity, to improve the precision of measurement result.
Referring to Fig. 2, in step s3, with the case hardness and laser plasma temperature of the material of the first material identical it
Between functional relation can be obtained by following steps:
N1, measure hardness number X of the sample of multiple second materials compositions at position to be measuredi(i in subscript, which is represented, to be treated
The number that location is put),
Wherein, the second material and the first material use material identical or the manufacturer of the second material and model with
First material identical;The superficial hardness number of second material can be measured using Shore durometer, can also use nano impress
Instrument measures, and is herein not specifically limited;
N2, the position to be measured for irradiating with the second pulse laser each sample respectively, obtain each sample respectively treats location
Put the spectrum of laser plasma at place;
Wherein, the arrange parameter of the second pulse laser and the first pulse laser may be the same or different, herein also not
It is specifically limited;
N3, the atom spectrum for obtaining from the spectrum of laser plasma acquired in step N2 the second analytical element, according to
The atom spectrum of second analytical element calculates the laser plasma temperature Y at the position to be measured of each sample respectivelyi,
Wherein, the second analytical element is one kind in the second material component, and the second analytical element can be the second material
The characteristic element of material;In order to reduce influence of the different analytical elements to laser plasma temperature, the second analytical element and first
Analytical element is identical;
N4, the hardness number X according to multiple samples at position to be measurediWith laser plasma temperature Yi, establish the second material
Case hardness and laser plasma temperature between functional relation.
The method of laser plasma temperature is calculated according to the atom spectrum of the second analytical element in step N3 with before
The method for calculating laser plasma temperature in text according to the atom spectrum of the first analytical element is identical, and details are not described herein.
Repeat the above steps N1~N4 for different materials, to establish the case hardness of different materials and laser plasma
The database of functional relation between temperature, then in measurement afterwards, which need to only be measured according to the functional relation
Laser plasma temperature be obtained with the superficial hardness number of the material.
Illustrate the embodiment of the present invention to measure on the 500kV transmission lines of electricity of somewhere exemplified by the case hardness of insulator below
The elaboration process of functional relation between the case hardness and laser plasma temperature of middle material:
To multiple and different operation time limits or different operation region composite insulator umbrella skirts (by silicon rubber composite material system
Into) be sampled, after the pretreatment such as over cleaning, the hard of position to be measured is measured using measuring instrument (such as nano-hardness tester)
Angle value;Then, each position to be measured is irradiated with pulse laser, to obtain its emission spectrum;To the transmitting light obtained
Spectrum carries out area normalization processing, and the atomic spectral line for selecting six intensity of element silicon larger and being influenced from adjacent spectral line, leads to
Access technical data library (NIST) is crossed, obtains the relevant parameter of six atomic spectral lines of element silicon, other atomic spectral lines carry out
Reasonably give up, the coordinate points (E corresponding to six atomic spectral lines is obtained then according to the data in table 1k, ln (Ikiλki/
gkAki)), as shown in figure 3, six coordinate points fittings are in line, the Boltzmann plan of silicon atom spectral line is obtained, by this
The slope of straight line obtains the temperature of the plasma of each sample, as shown in figure 4, according to the sample surfaces hardness number measured and
With corresponding plasma temperature value, the functional relation between the case hardness of material and laser plasma temperature is determined.By
Fig. 4 understands that, when silicon rubber aging is to after to a certain degree, hardness and plasma temperature are one-to-one conic section pass
System, can utilize the curve to calculate the hardness number of other positions to be measured.
Table 1 Si elements, six atomic spectral line parameter lists
Between the acquisition shown in Fig. 2 and the case hardness and laser plasma temperature of the material of the first material identical
In the method for functional relation, only there can be a position to be measured in a sample, it is possible to have multiple positions to be measured.Compare
One sample only has a position to be measured, when a sample has multiple positions to be measured, can obtain broader data
Region, so that the functional relation between the case hardness for the second material established and laser plasma temperature is closer to truly
Situation.
Between the acquisition shown in Fig. 2 and the case hardness and laser plasma temperature of the material of the first material identical
In the method for functional relation, the operation time limit of at least two is different in multiple samples.Since the different operation time limits is to material
The hardness on surface can have a great impact, and therefore, the operation time limit of at least two is different in multiple samples, can further open up
Wide data area, to obtain laser plasma temperature during the second material different hardness, make the case hardness of the second material with
Functional relation between laser plasma temperature is closer to truth.
Wherein, the service life after the operation time limit refers to the material in equipment, for example, made of the material absolutely
Edge substring be installed on shaft tower on after service life be exactly the material the operation time limit.
When being measured to the first material, when particularly actual field measures, the surface of material unavoidably has dirt
Dirty, debris, if directly measured, filth etc. can influence final measurement result, in order to make measurement result be influenced from filth etc.,
Step S1 includes repeatedly irradiating the same position of the first material with the first pulse laser, is taken second place using second or second
After irradiate obtained data as effective measurement data.The preceding irradiation several times of first pulse laser is in order to which filth etc. is clear
Remove, so as to ensure that irradiation the data obtained influences from filth etc. several times below.
Wherein, the irradiation number of the first pulse laser refers to the umber of pulse of the first pulse laser.
Embodiment 2
Referring to Fig. 5, an embodiment of the present invention provides a kind of measuring device of material surface hardness, including laser 1 (such as
Adjust Q nanosecoud pulse lasers), condenser lens 2, spectrometer 3 and computer equipment 4, condenser lens 2 be located at laser 1 and sent
On the path of laser, spectrometer 3 is connected with computer equipment 4, and spectrometer 3 is used for the transmitting light for catching laser plasma
Spectrum, and the emission spectrum of the laser plasma caught is sent to computer equipment 4;Computer equipment 4 is used for from spectrum
The atom spectrum of the first analytical element is obtained in the emission spectrum for the plasma that instrument 3 is caught, according to the first analytical element
Atom spectrum calculates laser plasma temperature;Then, according to the case hardness and laser of the material with the first material identical
Functional relation between plasma temperature determines the case hardness of the first material.
When measuring the first material surface hardness, 1 emission pulse laser of laser, shines after the focusing of condenser lens 2
The surface of the first material (scleroscopic material being treated, in Fig. 5 shown in label a) is incident upon, the first material surface is excited to produce plasma
Body (in Fig. 5 shown in label b), after plasma decay, spectrometer 3 captures the emission spectrum of plasma, and spectrometer 3 will be sent out
Penetrate spectrum to be converted into electric signal by optical signal and reach computer equipment 4, the processing by computer equipment 4 finally determines first
The case hardness of material.
Wherein, emission spectrum electric signal is converted into by optical signal can be by the charge coupling device in spectrometer 3
(Charge-coupled Device abbreviation CCD) is completed;Spectrometer 3 can be fiber spectrometer 3, catch plasma
Emission spectrum is completed by the fibre-optical probe 31 being connected with spectrometer 3, the reachable number meter Yuan of receipts electrical distance of fibre-optical probe 31,
To adapt to measure at a distance.
The technical problem and beneficial effect that the measuring device is solved with measuring method is solved in embodiment 1 skill
Art problem and beneficial effect are identical, and details are not described herein.
In order to improve radiation response of the pulse laser to the first material surface, material surface provided in an embodiment of the present invention is hard
The measuring device of degree further includes beam expander (not shown), and beam expander is located at laser 1 and sends on the path of laser, and
Between laser 1 and condenser lens 2.The parallel laser light beam that laser 1 is sent is extended to larger put down by beam expander
Row output laser beam, so that pulsed laser beam is focused on to obtain smaller by condenser lens 2, so as to improve pulse laser to the first material
The radiation response on surface is expected, to adapt to the irradiation to the first material surface at a distance.
After the first material surface is subject to the irradiation of pulse laser to produce plasma, it will send bremsstrahlung and hair
Spectrum two types spectral signal is penetrated, the former is background signal, and the latter is required spectral signal.Over time,
Bremsstrahlung can gradually weaken with emission spectrum, but reduce must be slower than bremsstrahlung for emission spectrum, therefore, at a time
The maximum of a signal-to-background ratio will occur, at this time spectra collection best results.In order to collect light in the maximum of signal-to-background ratio
Spectrum, computer equipment 4 are connected with laser 1, and computer equipment 4 can send triggering command to laser 1, and laser 1 can root
According to the instruction received, to launch laser, 4 one signals of computer equipment are returned in pulse laser light extraction moment, when passing through
Between t (be usually 1 microseconds) delay after, computer equipment 4 is sent to spectrometer 3 to be received optical signal and carries out Data Collection point
Analysis.Just start to receive light due to have passed through spectrometer 3 after time t, signal-to-background ratio at this moment compared with it is initial when it is big, can obtain preferable
Spectral collection effect, and then have laid a good foundation for follow-up spectrum analysis with processing.
More than, it is only embodiment of the invention, but protection scope of the present invention is not limited thereto, and it is any to be familiar with
Those skilled in the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all be covered
Within protection scope of the present invention.Therefore, protection scope of the present invention should be subject to scope of the claims.
Claims (10)
1. a kind of measuring method of material surface hardness, it is characterised in that comprise the following steps:
S1, the surface with first the first material of pulsed laser irradiation, obtain the spectrum of laser plasma of first material;
S2, the atom spectrum for obtaining from the spectrum of laser plasma the first analytical element, according to first analysis elements
The atom spectrum of element calculates laser plasma temperature, wherein, the first analytical element is in the first material component
One kind;
S3, basis and the functional relation between the case hardness and laser plasma temperature of the material of first material identical
Determine the case hardness of first material.
2. the measuring method of material surface hardness according to claim 1, it is characterised in that step S3 includes following step
Suddenly:
According to the spectrum of the laser plasma obtained in step S2, a plurality of atomic spectra of first analytical element is determined
Line;
The corresponding coordinate points fitting of a plurality of atomic spectral line is in line,
Wherein, the corresponding coordinate points of every atomic spectral line are (Ek, ln (Ikiλki/gkAki)), in coordinate (Ek, ln (Ikiλki/
gkAki)) in, IkiFor the intensity of emission spectrum, λkiFor wavelength, gkFor the degeneracy of upper energy level, AkiFor transition probability, EkFor excitation
State energy;And the slope value L of the straight line and the temperature T of the laser plasma of first material meet the following formula:L
=-1/mT, in the formula, m is Boltzmann constant.
3. the measuring method of material surface hardness according to claim 2, it is characterised in that obtaining first material
Spectrum of laser plasma after, it is further comprising the steps of before a plurality of atomic spectral line for choosing first analytical element:
The spectrum of the laser plasma of first material is normalized.
4. the measuring method of material surface hardness according to claim 1, it is characterised in that with first material identical
Material case hardness and laser plasma temperature between functional relation obtained by following steps:
N1, measure the hardness number of sample that multiple second materials are formed at position to be measured, wherein, second material with it is described
The material identical that first material uses;
N2, the position to be measured for irradiating with the second pulse laser each sample respectively, obtain treating for each sample respectively
Location puts the spectrum of laser plasma at place;
N3, the atom spectrum for obtaining from the spectrum of laser plasma acquired in step N2 the second analytical element, according to described
The atom spectrum of second analytical element calculates the laser plasma temperature at the position to be measured of each sample, institute respectively
The second analytical element is stated as one kind in the second material component;
N4, hardness number and laser plasma temperature according to multiple samples at position to be measured, establish second material
Functional relation between the case hardness and laser plasma temperature of material.
5. the measuring method of material surface hardness according to claim 4, it is characterised in that have on the same sample
There are multiple positions to be measured.
6. the measuring method of material surface hardness according to claim 4 or 5, it is characterised in that in multiple samples,
The operation time limit of at least two is different.
7. according to the measuring method of material surface hardness according to any one of claims 1 to 5, it is characterised in that step S1
Including repeatedly being irradiated to the same position of first material with the first pulse laser, after second or second
Obtained data are irradiated as effective measurement data.
8. a kind of measuring device of material surface hardness, it is characterised in that including laser, condenser lens, spectrometer and calculating
Machine equipment, the condenser lens are located at the laser and send on the path of laser,
The spectrometer is connected with the computer equipment, and the spectrometer is used for the transmitting light for catching laser plasma
Spectrum, and the emission spectrum of the laser plasma caught is sent to the computer equipment;
The computer equipment is used to obtain the first analysis elements from the emission spectrum for the plasma that the spectrometer is caught
The atom spectrum of element, the laser plasma temperature is calculated according to the atom spectrum of first analytical element;Then, root
Determined according to the functional relation between the case hardness of the material of first material identical and the laser plasma temperature
The case hardness of first material.
9. the measuring device of material surface hardness according to claim 8, it is characterised in that beam expander is further included, it is described
Beam expander is located at the laser and sends on the path of laser, and between the laser and the condenser lens.
10. the measuring device of material surface hardness according to claim 8, it is characterised in that the computer equipment with
The laser is connected, and the computer equipment can send triggering command to the laser, and the laser can be according to connecing
Received described instruction, to launch laser.
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