CN107894427B - Novel supporting platform and detection device for metal shade - Google Patents
Novel supporting platform and detection device for metal shade Download PDFInfo
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- CN107894427B CN107894427B CN201711373480.6A CN201711373480A CN107894427B CN 107894427 B CN107894427 B CN 107894427B CN 201711373480 A CN201711373480 A CN 201711373480A CN 107894427 B CN107894427 B CN 107894427B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/90—Investigating the presence of flaws or contamination in a container or its contents
- G01N21/9072—Investigating the presence of flaws or contamination in a container or its contents with illumination or detection from inside the container
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8809—Adjustment for highlighting flaws
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- General Health & Medical Sciences (AREA)
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- Physical Vapour Deposition (AREA)
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Abstract
The invention discloses a novel supporting platform and a detecting device of a metal shade, which comprise two air floating plates and a frame body for installing a light source, wherein the two air floating plates are respectively connected with two parallel side edges of the frame body; the air floatation plate is provided with a metal mask mounting part on the edge far away from the frame body, wherein one metal mask mounting part is provided with a photoelectric emitter, the other metal mask mounting part is provided with a photoelectric receiver, the photoelectric emitter and the photoelectric receiver are opposite to each other, and when any part of the metal mask is higher than the plane where the photoelectric emitter and the photoelectric receiver are located, the photoelectric emitter and the photoelectric receiver send out signals; the air floatation plate is characterized in that a plurality of air outlet holes are formed in the first surface of the air floatation plate facing the metal shade, at least one air inlet hole is formed in the second surface parallel to the first surface, and the air inlet holes and the air outlet holes are communicated with each other in the air floatation plate.
Description
Technical Field
The invention relates to the technical field of metal evaporation, in particular to a novel supporting platform and a novel detecting device for a metal mask.
Background
AMOLED (Active-matrix organic light emitting diode, commonly referred to as Active matrix organic light emitting diode or Active matrix organic light emitting diode) displays are considered to be a novel display technology behind liquid crystal displays (Liquid Crystal Display, LCD) by the industry with the advantages of light weight, active light emission, fast response speed, wide viewing angle, rich color, high brightness, low power consumption, high and low temperature resistance, etc., and AMOLED displays can be widely applied to terminal products such as smart phones, tablet computers, televisions, etc.
In the prior art, the deposition is performed by attaching an AMOLED substrate as a processing target to a deposition surface in a vacuum chamber, and when a metal mask for deposition is disposed between the deposition surface of the AMOLED substrate and a deposition source, the deposition source is heated to evaporate a deposition material, and the deposition material is attached to the surface of the AMOLED substrate through openings of the metal mask. For example, the AMOLED substrate may be fabricated by vapor deposition of an organic light emitting material using a Fine Metal Mask (FMM) including openings precisely aligned and consistent with the sub-pixel regions of the organic light emitting material to be vapor deposited, and bridges for preventing the organic light emitting material from being vapor deposited to other regions. When the red luminescent material is evaporated, the openings of the fine metal mask are opposite to the red sub-pixels, while the green sub-pixels and the blue sub-pixels are shielded by the mask, thus, the red luminescent material emitted from the evaporation source can be deposited only in the red sub-pixel region; after the evaporation of the red luminescent material is completed, the mask is shifted by a distance of one sub-pixel to enable the opening to be aligned with the sub-pixel of the other color, and the evaporation of the RGB three-primary-color material is completed in the similar way, so that a colorized pixel pattern is formed.
Evaporation is an important key process of AMOLED, and quality of metal mask is related to evaporation success rate, so detection of metal mask before evaporation is very important. Currently, the vapor deposition metal mask detection is to set up the edge of the metal mask and inspect the whole metal mask by using a CCD; however, because the metal mask has weight, the middle part is sunk and the edge of the metal grid has stronger reflection, so that the automatic optical detection benefit is not high, and the detection rate is often influenced by the false defect of metal reflection or the bad influence of optical distance focus.
In view of the above-mentioned drawbacks, the present inventors have actively studied and innovated to create a novel metal mask support platform and a novel metal mask detection device, which are more industrially valuable.
Disclosure of Invention
The invention aims to provide a novel supporting platform and a novel detecting device for a metal shade, which can compensate sagging amount of the metal shade caused by self weight and can control compensation degree.
To achieve the purpose, the invention adopts the following technical scheme:
a novel supporting platform of a metal shade comprises two air floatation plates and a frame body for installing a light source, wherein,
the two air floating plates are respectively connected with two parallel side edges of the frame body;
the air floatation plate is provided with a metal mask mounting part on the edge far away from the frame body, wherein one metal mask mounting part is provided with a photoelectric emitter, the other metal mask mounting part is provided with a photoelectric receiver, the photoelectric emitter and the photoelectric receiver are opposite to each other, the plane where the photoelectric emitter and the photoelectric receiver are positioned is in tension with the plane where the metal mask is in a horizontal state, and when any part of the metal mask is higher than the plane where the photoelectric emitter and the photoelectric receiver are positioned, the photoelectric emitter and the photoelectric receiver send out signals;
the air floatation plate is characterized in that a plurality of air outlet holes are formed in the first surface of the air floatation plate facing the metal shade, at least one air inlet hole is formed in the second surface parallel to the first surface, and the air inlet holes and the air outlet holes are communicated with each other in the air floatation plate.
Further, each air outlet hole is provided with an air nozzle.
Further, the air blowing amount of the air floating plate can blow up the metal mask by 30-70 um.
Further, the density of the air outlet holes on the air floating plate, which are close to the metal mask mounting piece, is m1, and the density of the air outlet holes on the air floating plate, which are close to the frame body, is m2, wherein m1 is less than m2.
Furthermore, the air bearing plate is made of ceramics.
Further, the air nozzle comprises an air nozzle body, external threads are arranged on the peripheral wall of the air nozzle body, and internal threads in threaded connection with the air nozzle body are arranged on the inner wall of each air outlet hole.
Further, the plurality of air outlet holes are arranged as closed air holes, the inner wall of the air floating plate is fixedly provided with an adjusting plate which is the same as the opening position of the air floating plate in a rotating mode, and the adjusting plate is rotated to realize full opening, half opening and full closing of the plurality of air outlet holes.
Further, the mounting piece is slidably disposed on the air floating plate to form bearing surfaces with different sizes.
Further, the side edge of the air floating plate connected with the frame body is provided with a dovetail groove along the extending direction of the side edge, and two sides of the frame body are provided with clamping blocks matched with the dovetail groove.
The detection device of the metal shade comprises the support platform of the metal shade and the detection unit, wherein the detection unit is arranged above the support platform and is used for detecting whether the metal shade has flaws or not.
The beneficial effects of the invention are as follows: the metal shade is supported by the air floatation plate and blown up, the sagging amount of the metal shade caused by the weight of the metal shade can be counteracted by the blown up height of the metal shade, and the blown up height of the metal shade is controlled by the photoelectric transmitter and the photoelectric receiver, so that the metal shade is prevented from arching up; in addition, the light source in the frame body is used as a backlight source, so that the influence of reflected light generated by the metal mask can be counteracted, the detection effect of the metal mask is ensured, and the evaporation success rate of the metal mask is greatly improved.
Drawings
FIG. 1 is a schematic view of a support platform for a metal mask according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the cooperation of an air bearing plate and an adjusting plate in the present invention;
fig. 3 is a schematic structural diagram of a metal mask detection device according to an embodiment of the present invention.
In the figure: 10-an air floating plate, 11-an air outlet hole, 12-an air inlet hole, 13-a dovetail groove, 14-an adjusting plate, 20-a frame body and 22-a clamping block, 30-mounting, 40-air nozzle, 50-light source, 60-CCD, 70-metal mask, 81-photo emitter, 82-photo emitter.
Detailed Description
The technical scheme of the invention is further described below by the specific embodiments with reference to the accompanying drawings.
As shown in fig. 1, the novel metal mask supporting platform of the invention comprises two ceramic air floating plates 10 and a frame body 20 for installing a light source, wherein the two air floating plates 10 are respectively connected with two parallel side edges of the frame body 20; the edge of the air floatation plate 10 far away from the frame body 20 is provided with metal mask installation pieces 30, one metal mask installation piece 30 is provided with a photoelectric emitter 81, the other metal mask installation piece 30 is provided with a photoelectric receiver 82, the photoelectric emitter 81 and the photoelectric receiver 82 are arranged opposite to each other, and when any part of the metal mask is higher than the plane where the photoelectric emitter 81 and the photoelectric receiver 82 are located, the photoelectric emitter 81 and the photoelectric receiver 82 send out signals; the first surface of the air floatation plate 10 facing the metal mask is provided with a plurality of air outlet holes 11, the second surface parallel to the first surface is provided with at least one air inlet hole 12, and the air inlet holes 12 and the air outlet holes 11 are mutually communicated in the air floatation plate 10. The gas is introduced from the gas inlet holes 12, and the gas is blown from each gas outlet hole 11 to the metal mask stretched on the two mounting pieces 30, and the metal mask is blown up to a certain height so as to offset the sagging of the metal mask due to the weight of the metal mask.
The invention controls the blowing height of the metal shade through the photoelectric emitter 81 and the photoelectric receiver 82, so as to avoid the metal shade from arching, and particularly, the plane where the photoelectric emitter 81 and the photoelectric receiver 82 are positioned is in a horizontal state and is in a same level with the plane where the metal shade is tensioned.
In order to ensure the blowing effect, the invention is provided with the air nozzles 40 on each air outlet hole 11, and the diameter of the air outlet of each air nozzle 40 can be adjusted according to the requirement.
The air blowing amount of the air bearing plate 10 can blow up the metal shade by 30-70 um, if the air blowing amount is too small, the sagging amount of the metal shade cannot be counteracted, and if the air blowing amount is too large, the metal shade can be arched.
Because the middle part of the metal shade is sunk and more prominent due to the weight of the metal shade, when the density of the air outlet holes 11 is set, the density of the air outlet holes 11 on the air floating plate 10, which are close to the metal shade mounting piece 30, is set as m1, the density of the air outlet holes 11 on the air floating plate 10, which are close to the frame body 20, is set as m2, and the air blowing amount of the middle part of the metal shade is more than the air blowing amount of the edge of the metal shade, so that the metal shade can be ensured to be in a horizontal state for detection.
In order to facilitate the detachable connection of the air bearing plate 10 and the frame body 20, the invention is provided with a dovetail groove 13 along the extending direction of the side edge of the air bearing plate 10 connected with the frame body 20, and two sides of the frame body 20 are provided with clamping blocks 22 matched with the dovetail groove 13.
In addition, in order to facilitate the installation of the air nozzle 40, the air nozzle 40 of the present invention includes an air nozzle body, an external thread is provided on the outer circumferential wall of the air nozzle body, and an internal thread is provided on the inner wall of the air outlet hole 11, which is in threaded connection with the air nozzle body. The detachable connection of the air nozzle 40 is achieved by means of a threaded connection.
In one embodiment, the mounting member 30 is slidably disposed on the air bearing plate 10 to form bearing surfaces with different sizes, so as to be suitable for supporting different size masks.
In a preferred embodiment, as shown in fig. 2, the plurality of air outlet holes 11 are configured as closable air holes, the adjusting plate 14 with the same position as the opening of the air bearing plate 10 is rotatably fixed on the inner wall of the air bearing plate 10, and the plurality of air outlet holes 11 can be fully opened, half opened and fully closed by rotating the adjusting plate 14. The adjusting plate 14 may be disposed only adjacent to the edge of the air bearing plate 10, and the air outlet hole 11 at the edge portion is in a half-open state by rotating the adjusting plate 14, so as to reduce the air outlet amount at the edge position and ensure the levelness of the metal mask. Further, the adjustment plate 14 is rotated so that the air outlet holes 11 of the edge portion are in a fully closed state, which can be used for support of a smaller-sized mask.
As shown in fig. 3, the present invention further provides a metal mask inspection apparatus, which comprises a metal mask support platform and inspection units 60, wherein, in particular, when in use, the metal mask 70 is mounted on two mounting members 30, an inspection unit 60 (such as a CCD) that moves synchronously is mounted on the metal mask 70 to align with the light source 50 in the frame 20, and then the air floating plate 10 is supplied with air, the metal mask 70 is blown up through the air floatation plate 10, real-time monitoring is carried out by utilizing the photoelectric emitter 81 and the photoelectric receiver 82, when the metal mask is blown up, the photoelectric emitter 81 and the photoelectric receiver 82 send out signals, the air blowing amount is adjusted, the metal mask is always ensured to be kept in a horizontal state, and then photographing detection can be carried out on the metal mask 70.
The technical principle of the present invention is described above in connection with the specific embodiments. The description is made for the purpose of illustrating the general principles of the invention and should not be taken in any way as limiting the scope of the invention. Other embodiments of the invention will be apparent to those skilled in the art from consideration of this specification without undue burden.
Claims (7)
1. A novel supporting platform of a metal shade is characterized by comprising two air floatation plates and a frame body for installing a light source, wherein,
the two air floating plates are respectively connected with two parallel side edges of the frame body;
the air floatation plate is provided with a metal mask mounting part on the edge far away from the frame body, wherein one metal mask mounting part is provided with a photoelectric emitter, the other metal mask mounting part is provided with a photoelectric receiver, the photoelectric emitter and the photoelectric receiver are opposite to each other, the plane where the photoelectric emitter and the photoelectric receiver are positioned is in tension with the plane where the metal mask is in a horizontal state, and when any part of the metal mask is higher than the plane where the photoelectric emitter and the photoelectric receiver are positioned, the photoelectric emitter and the photoelectric receiver send out signals;
the first surface of the air floating plate facing the metal shade is provided with a plurality of air outlet holes, the second surface parallel to the first surface is provided with at least one air inlet hole, and the air inlet holes and the air outlet holes are mutually communicated in the air floating plate;
an air nozzle is arranged on each air outlet hole;
the density of the air outlet holes on the air floating plate, which are close to the metal mask mounting piece, is m1, and the density of the air outlet holes on the air floating plate, which are close to the frame body, is m2, wherein m1 is less than m2;
the air nozzle comprises an air nozzle body, external threads are arranged on the peripheral wall of the air nozzle body, and internal threads in threaded connection with the air nozzle body are arranged on the inner wall of each air outlet hole.
2. The metal mask supporting platform according to claim 1, wherein the air blowing amount of the air floating plate can blow up the metal mask by 30-70 um.
3. The metal mask support platform of claim 1, wherein the air bearing plate is ceramic.
4. The metal mask supporting platform according to claim 1, wherein the plurality of air outlet holes are arranged as closed air holes, an adjusting plate with the same position as the opening position of the air floating plate is rotationally fixed on the inner wall of the air floating plate, and the plurality of air outlet holes are fully opened, semi-opened and fully closed by rotating the adjusting plate.
5. The metal mask support platform of claim 1, wherein the mounting members are slidably disposed on the air bearing plate to form bearing surfaces of different sizes.
6. The metal shade support platform of claim 1, wherein a dovetail groove is formed in the side edge of the air bearing plate connected with the frame body in the extending direction of the side edge, and clamping blocks matched with the dovetail groove are arranged on two sides of the frame body.
7. A metal mask detection device, comprising a metal mask support platform according to any one of claims 1-6 and a detection unit disposed above the support platform for checking whether a defect exists in the metal mask.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711373480.6A CN107894427B (en) | 2017-12-19 | 2017-12-19 | Novel supporting platform and detection device for metal shade |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711373480.6A CN107894427B (en) | 2017-12-19 | 2017-12-19 | Novel supporting platform and detection device for metal shade |
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| Publication Number | Publication Date |
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| CN107894427A CN107894427A (en) | 2018-04-10 |
| CN107894427B true CN107894427B (en) | 2024-04-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201711373480.6A Active CN107894427B (en) | 2017-12-19 | 2017-12-19 | Novel supporting platform and detection device for metal shade |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0726365A (en) * | 1993-07-12 | 1995-01-27 | Sony Corp | Material-flying device, thin film forming device and method for cleaning material-flying device |
| JP2003317955A (en) * | 2002-02-22 | 2003-11-07 | Semiconductor Energy Lab Co Ltd | Light emitting device, method of manufacturing the same, and method of operating manufacturing device |
| CN207798692U (en) * | 2017-12-19 | 2018-08-31 | 苏州精濑光电有限公司 | A kind of support platform and detection device of novel metal cover |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5414246B2 (en) * | 2008-11-19 | 2014-02-12 | 株式会社小糸製作所 | Vehicle headlamp |
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2017
- 2017-12-19 CN CN201711373480.6A patent/CN107894427B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0726365A (en) * | 1993-07-12 | 1995-01-27 | Sony Corp | Material-flying device, thin film forming device and method for cleaning material-flying device |
| JP2003317955A (en) * | 2002-02-22 | 2003-11-07 | Semiconductor Energy Lab Co Ltd | Light emitting device, method of manufacturing the same, and method of operating manufacturing device |
| CN207798692U (en) * | 2017-12-19 | 2018-08-31 | 苏州精濑光电有限公司 | A kind of support platform and detection device of novel metal cover |
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| CN107894427A (en) | 2018-04-10 |
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