CN107863130B - Translational two-degree-of-freedom parallel flexible structure piezoelectric micromotion platform - Google Patents

Abstract

A translational two-degree-of-freedom parallel flexible structure piezoelectric micro-movement platform includes a fixed platform, a moving platform, a lateral motion mechanism and a longitudinal motion mechanism, and the motion mechanism in each direction is respectively composed of a respective displacement output unit, a displacement transmission unit and an auxiliary unit. Unit composition; the output end of the displacement output unit is connected with the rigid link of the displacement transmission unit; the displacement transmission unit and the auxiliary unit are respectively composed of their own rigid link and two sets of flexible thin plates, the first group of flexible thin plates is connected to the rigid link and the fixed link. The platform, the second group of flexible sheets is connected to the rigid link and the moving platform; the first group of flexible sheets of the lateral displacement transmission unit and the auxiliary unit are arranged in the longitudinal direction, and the second group of flexible sheets of the lateral displacement transmission unit and the auxiliary unit are arranged in the transverse direction. The invention has the advantages of compact structure, large working table, large displacement range, no displacement coupling, piezoelectric actuator will not fall off during assembly, and the sensor can be easily integrated into the platform.

Description

A piezoelectric micro-movement platform with two parallel translational two degrees of freedom flexible structure

technical field

The invention belongs to the technical field of micro/nano positioning, relates to a micro-displacement mechanism in a micro/nano positioning system, and in particular relates to a piezoelectric micro-movement platform with a parallel translational two-degree-of-freedom flexible structure.

Background technique

The flexible structure piezoelectric micro-movement platform is a micro-displacement mechanism that transmits displacement and force through a flexible structure that can generate elastic deformation. Because it has no hinges and bearings, it does not require assembly, there is no transmission gap, and no friction and wear are generated; due to the use of piezoelectric actuators, its displacement resolution can reach nanometer level, response time can reach millisecond level, and stiffness Large, small in size and strong in carrying capacity. Therefore, it is widely used in technical fields that require micro/nano positioning, such as precision machining and testing, optical fiber docking, micro-part assembly, and cell micro-manipulation. For example, in precision and ultra-precision machining, the micro-feed of the tool or the compensation of the machining error can be realized; in the precision measurement, the micro-adjustment of the sensor can be realized; in the scanning probe microscope, combined with the micro-scanning probe, It can measure the microstructure morphology; in the optical fiber docking, it can realize the precise alignment of two optical fibers with a diameter of several microns to ten microns; in the MEMS (micro-electromechanical system) assembly, combined with the micro clamp, Micro-shafts and micro-gears can be assembled into micro-components; in bioengineering, combined with micro-impact probes, corresponding components can be injected into cells or extracted from cells.

The translational two-degree-of-freedom flexible structure piezoelectric micro-movement platform has two structural forms: series type and parallel type. The tandem type is to produce a moving platform (inner platform) that can produce movement in another direction (such as y-direction) in the moving platform (outer platform) that produces movement in one direction (such as movement in the x-direction). This platform structure Compact, the internal and external moving platform has no coupling in motion (when the platform moves in one direction, there will be no parasitic displacement in the other direction), but the work surface is small, and it is difficult to install and preload the piezoelectric actuator used to drive the internal platform ;The parallel type uses the same moving platform to realize the movement in all directions. The structure and size of the entire flexible structure micro-moving platform in the x-direction are exactly the same as the structure and size in the y-direction, requiring less identification parameters, installation and preloading. Piezoelectric actuators are convenient, and their comprehensive performance is better than that of the series type. However, the existing parallel type is complex and not compact, with a small work surface and displacement coupling (when the platform moves in one direction, parasitic displacement will occur in the other direction).

CN201210477575.3 discloses a two-degree-of-freedom translation parallel high-bandwidth micro-movement platform, comprising a micro-movement platform body, a piezoelectric ceramic driver and a sensor fixture mounted on the micro-motion platform body, and a non-contact type Capacitive sensor, the main body of the micro-movement platform includes a working platform, a fixed frame, and two-stage driving branches and their corresponding two-stage auxiliary branches symmetrically distributed around the working platform in the mutually perpendicular x and y directions. The corresponding auxiliary branches are distributed in opposite directions; the two-level driving branches are the first-level driving branches and the second-level driving branches, and the two-level auxiliary branches are the first-level auxiliary branches and the second-level auxiliary branches, wherein: the first-level driving branches The two ends of the chain and the first-level auxiliary branch chain are fixedly connected with the fixed frame. The second-level driving branch chain and the second-level auxiliary branch chain include two flexible hinges with chamfered ends, and one end of the flexible hinge passes through the first-level driving branch chain. The protruding rectangular module in the middle of the first-level drive branch is connected, and the other end is fixed with the working platform; the first-level drive branch is pushed by the pressure actuator to deform in the x (or y) direction, so that the x (or y) direction is deformed. The primary auxiliary branch in the y (or x) direction, the secondary driving branch in the y (or x) direction, and the secondary auxiliary branch in the y (or x) direction produce coordinated deformation.

The disadvantages of this kind of micro-moving platform are: 1. The piezoelectric actuator is placed along the moving direction of the moving platform, which occupies a large space, the platform structure is not compact, and the work surface is small. 2. There is no structure for amplifying the output displacement of the piezoelectric actuator in the platform, and the output displacement of the working platform is small. 3. There is no structure in the platform to prevent the piezoelectric actuator from being affected by the torque of the pre-tightening screw when pre-tightening, so the piezoelectric actuator will be subjected to the torque of the pre-tightening screw during the pre-tightening process, so that the piezoelectric The actuator is fragile. 4. There is no structure for positioning both ends of the piezoelectric actuator in the platform, which causes the piezoelectric actuator to fall off easily during the assembly process. 5. The sensor is fixed on the fixed frame by the sensor clamp, which makes the platform structure huge, and the initial gap between the sensor probe and the measured surface is not easy to adjust.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide a translational two-degree-of-freedom parallel flexible structure with compact structure, large work surface, large displacement range, no parasitic displacement, piezoelectric actuator will not fall off during assembly process, and sensor can be easily integrated into the platform. Electric micro-movement platform.

A parallel translational two-degree-of-freedom flexible structure piezoelectric micro-movement platform, comprising a fixed platform, a moving platform, a lateral motion mechanism and a longitudinal motion mechanism, the moving platform is inside the fixed platform, and the upper surface of the moving platform protrudes from the upper surface of the fixed platform , the upper surface of the fixed platform protrudes from the upper surface of each motion mechanism, and the lower surface of the fixed platform protrudes from the lower surface of the moving platform and the lower surface of each motion mechanism; It consists of a transmission unit and an auxiliary unit. The displacement output unit uses a piezoelectric actuator as a power source. The displacement transmission unit and auxiliary unit in each direction are symmetrically distributed on the center line of the moving platform, and the displacement transmission unit is located between the displacement output unit and the moving platform.

It is characterized in that: the output end of the displacement output unit is connected with the rigid link of the displacement transmission unit; the displacement transmission unit and the auxiliary unit are respectively composed of their respective rigid links and two sets of flexible sheets, and the first group of flexible sheets is connected to the rigid link and the auxiliary unit. The fixed platform, the second group of flexible thin plates are connected to the rigid link and the moving platform; the first group of flexible thin plates of the lateral displacement transmission unit and the auxiliary unit are arranged in the longitudinal direction, and the second group of flexible thin plates of the lateral displacement transmission unit and the auxiliary unit are arranged in the transverse direction; The longitudinal displacement transmission unit and the first group of flexible sheets of the auxiliary unit are arranged in the transverse direction, and the longitudinal displacement transmission unit and the second group of flexible sheets of the auxiliary unit are arranged in the longitudinal direction.

Taking the lateral direction as the x direction and the longitudinal direction as the y direction, the lateral motion mechanism is the x-direction displacement output unit, the x-direction displacement transmission unit, and the x-direction auxiliary unit, and the longitudinal motion mechanism is the y-direction displacement output unit, the y-direction displacement transmission unit, and the y-direction displacement output unit. To the auxiliary unit; take the center of the moving platform as the coordinate origin, the center of the x-direction displacement output unit, the center of the x-direction displacement transmission unit rigid link, and the x-direction auxiliary unit rigid link The straight line formed by the center of the rigid link of the auxiliary unit is used as the x-axis, y The straight line connecting the center of the displacement output unit, the center of the rigid link of the y-direction displacement transmission unit, and the center of the rigid link of the y-direction auxiliary unit is used as the y-axis, the x-axis is the centerline of the moving platform in the y-direction, and the y-axis is the dynamic The midline of the platform in the x-direction.

Take the movement of only the x-direction displacement output unit as an example: when the y-direction displacement output unit does not act, the x-direction displacement output unit pushes the rigid link of the x-direction displacement transmission unit to translate, the moving platform translates, and the second group of flexible sheets maintains lateral translation. , and at the same time the first group of flexible sheets produces bending deformation to coordinate the displacement of the rigid link, and the x-direction displacement transmission unit and the x-direction auxiliary unit move in the same direction. At the same time, the y-direction displacement transmission unit and the second group of flexible sheets of the y-direction auxiliary unit are bent and deformed to coordinate the displacement of the moving platform. The rigid links of the y-direction displacement transmission unit and the y-direction auxiliary unit, the first group of flexible sheets When stationary, the y-direction displacement transmission unit and the y-direction auxiliary unit guide the movement of the moving platform along the x-direction, so that the moving platform only outputs displacement along the x-direction without coupling displacement in the y-direction.

When the y-direction displacement output unit acts simultaneously, the x-direction displacement output unit pushes the rigid link of the x-direction displacement transmission unit to translate along the x-direction, while the y-direction displacement output unit pushes the rigid link of the y-direction displacement transmission unit to translate along the y-direction , the moving platform outputs the composite displacement in the x and y directions. At this time, the first group of flexible thin plates of the x-direction displacement transmission unit and the x-direction auxiliary unit, the y-direction displacement transmission unit and the second group of flexible thin plates of the y-direction auxiliary unit are simultaneously bent and deformed along the x-direction to coordinate the x-direction displacement transmission. The displacement of the rigid link of the unit and the moving platform along the x-direction, the y-direction displacement transmission unit and the y-direction auxiliary unit guide the movement of the moving platform along the x-direction, which can eliminate the coupling displacement of the moving platform along the y-direction; the y-direction displacement transmission unit Together with the first group of flexible thin plates of the y-direction auxiliary unit, the x-direction displacement transmission unit and the second group of flexible thin plates of the x-direction auxiliary unit, bending deformation is generated along the y-direction at the same time, so as to coordinate the rigid link of the y-direction displacement transmission unit and the moving platform along the The displacement in the y direction, the x-direction displacement transmission unit and the x-direction auxiliary unit guide the movement of the moving platform along the y-direction, which can eliminate the coupling displacement of the moving platform along the x-direction.

Further, the second group of flexible thin plates has at least a pair of thin plates that are symmetrical along the moving platform, and the first group of flexible thin plates has at least a pair of thin plates that are symmetrical along the rigid link.

Further, the moving platform is provided with a groove for accommodating the second group of flexible thin plates, and the second group of flexible thin plates is located in the groove.

Further, an installation hole for installing the displacement sensor is arranged on the fixed platform, a through hole is arranged on the rigid link of the auxiliary unit, and the through hole is aligned with the installation hole. The displacement sensor is inserted into the installation hole and the through hole, and there are set screws on the fixed platform, and the set screw fixes the displacement sensor in the installation hole.

Further, the movement mechanism in each direction is aligned with an adjusting unit, the adjusting unit is located between the moving platform and the auxiliary unit, and the moving platform is provided with a threaded through hole for screwing the adjusting unit; the adjusting unit is composed of a rigid block and two flexible folding beams. Each flexible folding beam group consists of a pair of flexible folding beams symmetrically arranged along the rigid block. One end of the flexible folding beam is connected to the rigid block, and the other end is connected to the moving platform. The flexible folding beam is serpentine and the rigid blocks are aligned. The end face of the sensor probe is the measuring face. When adjusting the initial gap between the sensor probe and the measured surface, screw the adjusting screw into the threaded through hole to make it contact with the rigid block of the adjusting unit, and then push the rigid block, and the flexible folding beam group will elastically deform, making the rigid The measured surface on the block moves to one side of the rigid link in the auxiliary unit, so as to achieve precise adjustment of the initial gap between the displacement sensor probe and the measured surface.

Further, the displacement output unit is composed of a piezoelectric actuator and a displacement amplifying unit, and the displacement amplifying unit includes a pair of support arms, a first amplifying rod assembly and a second amplifying rod assembly; a piezoelectric actuator is arranged between the support arms, and the piezoelectric actuator The two ends of the actuator are respectively in contact with a support arm, the first amplifying rod assembly and the second amplifying rod assembly are symmetrically arranged on the center line of the piezoelectric actuator, and the first amplifying rod assembly and the second amplifying rod assembly respectively comprise a first side rod, Intermediate rod, second side rod, flexible sheet between first side rod and support arm, flexible sheet between first side rod and intermediate rod, flexible sheet between second side rod and intermediate rod, second side The flexible sheet between the rod and the support arm, the flexible sheet between the first side rod and the support arm and the flexible sheet between the first side rod and the middle rod are dislocated, and the flexible sheet between the second side rod and the middle rod The flexible sheet between the second side rod and the support arm is dislocated, and the flexible sheets at both ends of the middle rod are flush; the middle rod of the first amplifying rod assembly is connected to the fixed platform, and the middle rod of the second amplifying rod assembly is rigid with the displacement transmission mechanism The connecting rods are connected, the first side rod, the middle rod and the second side rod are rigid parts, and the flexible sheet is an elastic part. The flexible sheet between the first side rod and the support arm is misaligned with the flexible sheet between the first side rod and the middle rod, the flexible sheet between the second side rod and the middle rod and the flexible sheet between the second side rod and the support arm Dislocation of the flexible sheets means that the two flexible sheets are not in a straight line. The thin plates at both ends of the side rod are dislocated, so that the two lines of the two connection points of the thin plate and the side rod are oblique lines. The line segment of the two connection points of the thin plate and the side rod is regarded as the connecting rod, then the connecting rod formed by the first side rod , the connecting rod formed by the middle rod and the second side rod is in the shape of an arch bridge, and the connecting rod acts as a lever to amplify the output displacement of the piezoelectric actuator. In addition, the output displacement of the displacement amplifying unit is orthogonal to the deformation direction of the piezoelectric actuator, which reduces the overall size of the piezoelectric micro-motion platform. In addition, since the support arms on both sides of the displacement amplifying unit only output displacement along the axis direction of the piezoelectric actuator, the piezoelectric actuator is only subjected to pressure along its axis direction during preloading and operation, and will not be affected by torque, Bending moment and shear force.

When the piezoelectric actuator is stretched, the middle rod of the second amplifying rod assembly pulls the rigid link of the displacement transmission mechanism to translate in the direction close to the piezoelectric actuator, and the first side rod and the flexible sheets at both ends thereof and the second side rod and The flexible sheets at both ends constitute a displacement amplifying mechanism, which amplifies the output displacement of the piezoelectric actuator, and the flexible sheets are bent and deformed to adapt to the displacement of the first side rod, the middle rod and the second side rod.

Further, the support arm is provided with a positioning side block and a positioning bottom block, the positioning side block and the positioning bottom block are both centered with the support arm, the positioning side block encloses the positioning bottom block, and the positioning side block and the positioning bottom block protrude from the bottom block. On the inner side of the support arm, the area inside the side stop is positioned to allow the end of the piezoelectric actuator to be inserted, and the bottom stop is positioned against the end of the piezoelectric actuator. The positioning side stop and the positioning bottom stop precisely define the position of the piezoelectric actuator, and the positioning bottom stop prevents the piezoelectric actuator from detaching from the support arm, so that the piezoelectric actuator does not fall off during the assembly process.

Further, the platform has an upper outer cover, an upper inner cover and a lower cover. The upper outer cover plate seals the rigid link and the first group of flexible thin plates of the fixed platform, the displacement transmission unit and the auxiliary unit, and is fixed with the fixed platform by screws; the upper inner cover plate seals the moving platform, the displacement transmission unit and the auxiliary unit. The second group of flexible sheets and adjustment units are fixed to the moving platform by screws. The upper inner cover and the moving platform are provided with a plurality of screw holes for mounting the bearing objects; Fixed with fixed platform.

The advantages of the present invention are:

1) The piezoelectric actuator is placed perpendicular to the moving direction of the moving platform and occupies a small space; at the same time, the displacement transmission unit in a certain direction can not only transmit the displacement to the moving platform, but also opposite the moving platform together with the auxiliary unit in this direction. The movement in the other direction is guided, that is, the displacement transmission unit and the auxiliary unit in one direction are also the guiding mechanism in the other direction; also, the displacement transmission unit, the auxiliary unit and the adjustment unit are embedded in the fixed platform and the moving platform. All make the overall structure of the platform simple and compact, and the table top of the moving platform is large.

2) The displacement amplifying unit can amplify the input displacement of the piezoelectric actuator by 3 to 5 times, thereby increasing the output displacement range of the moving platform.

3) Because the moving platform is guided by the displacement transmission unit and auxiliary unit in another direction when outputting micro-displacement in one direction, the micro-displacement of the moving platform in this direction is strictly linear micro-displacement, and will not occur in other directions. Coupling displacement, so that the motion accuracy of the moving platform is greatly improved, and the measurement results of the displacement sensor (such as a capacitive displacement sensor) can directly reflect the precise micro-displacement of the moving platform.

4) The piezoelectric actuator is accurately positioned in the displacement amplifying unit through the positioning side block and the positioning bottom block, so that the piezoelectric actuator will not fall off during the assembly process.

5) The piezoelectric actuator is only subjected to the pressure of the two support arms along its displacement output direction during the preloading and working process, and is not affected by the pulling force, shear force, bending moment and torque of the two support arms, so that it can be well Increase the service life of piezoelectric actuators.

6) Because the overall structure of the platform is simple and compact, and the layout of each part is reasonable, it provides enough structural space for the integration of displacement sensors (such as capacitive displacement sensors), so that the integration of displacement sensors (such as capacitive displacement sensors) becomes very easy. .

7) The adjustment of the initial gap is very convenient because of the use of an adjustment unit that can precisely adjust the initial gap between the sensor probe and the measured surface.

Description of drawings

Fig. 1 is the three-dimensional structure diagram of the present invention, wherein (a) does not include the upper outer cover, the upper inner cover, and the lower cover, and (b) includes the upper outer cover, the upper inner cover, and the lower cover. Top view, (c) is the bottom view when the upper outer cover, the upper inner cover and the lower cover are included.

Fig. 2 is the structure diagram of the platform of the present invention.

3 is a structural diagram of the displacement amplifying unit of the present invention, wherein (a) is a top view of the displacement amplifying unit, (b) is a cross-sectional view along A-A of (a), and (c) is a cross-sectional view along B-B of (a).

FIG. 4 is a structural diagram of the displacement transmission unit of the present invention.

FIG. 5 is a structural diagram of an auxiliary unit of the present invention.

FIG. 6 is a structural diagram of the adjustment unit of the present invention.

FIG. 7 is a schematic diagram of the assembly of the piezoelectric actuator of the present invention.

FIG. 8 is a three-dimensional structural diagram of the upper outer cover plate of the present invention.

FIG. 9 is a three-dimensional structural diagram of the upper inner cover plate of the present invention.

FIG. 10 is a three-dimensional structural diagram of the lower cover plate of the present invention.

Detailed ways

The present invention not only enables the movable platform to output linear micro-displacement only along the x or y direction, but also enables it to output linear micro-displacement along the x and y directions at the same time. The specific implementation is as follows.

A piezoelectric micro-movement platform with parallel two-degree-of-freedom parallel flexible structure, as shown in Figure 1, includes a table body, a piezoelectric actuator, an adjusting screw, an upper outer cover, an upper inner cover, a lower cover, a tightening screw.

The stage body (as shown in Figure 2) includes a fixed platform 1, a moving platform 2, an x-direction displacement amplifying unit 3, an x-direction displacement transmission unit 4, an x-direction auxiliary unit 5, an x-direction adjustment unit 6, and a y-direction displacement amplifying unit 7 , y-direction displacement transmission unit 8, y-direction auxiliary unit 9, y-direction adjustment unit 10 are integrated structures; the upper surface of the fixed platform 1 is lower than the upper surface of the moving platform 2, but higher than the x-direction displacement amplifying unit 3, x-direction displacement transmission unit 4, x-direction position auxiliary mechanism 5, x-direction adjustment unit 6, y-direction displacement amplification unit 7, y-direction displacement transmission unit 8, y-direction position auxiliary mechanism 9, y-direction adjustment unit 10 these eight mechanisms The lower surface of the fixed platform 1 is higher than the lower surface of the moving platform 2 and the x-direction displacement amplification unit 3, the x-direction displacement transmission unit 4, the x-direction position auxiliary mechanism 5, the x-direction adjustment unit 6, the y-direction displacement amplification unit Unit 7, y-direction displacement transmission unit 8, y-direction position assist mechanism 9, y-direction adjustment unit 10 are the lower surfaces of the eight mechanisms. The upper surface of the movable platform protrudes from the upper surface of the fixed platform, so that when the movable platform carries a workpiece whose area is larger than that of the movable platform, the workpiece does not rub against the fixed platform. The upper surface of the fixed platform protrudes from the upper surface of each motion mechanism, so that friction between the upper outer cover plate and each motion mechanism does not occur. The lower surface of the fixed platform protrudes from the lower surface of the movable platform and the lower surfaces of each motion mechanism, so that the lower cover plate and each motion mechanism do not rub.

There are countersunk holes 1-1-1, 1-1-2, 1-1-3, 1-1-4, vertical thread through holes 1-2-1, 1-2-2, 1- 2-3, 1-2-4, horizontal through holes 1-3-1, 1-3-2, vertical threaded holes 1-4-1, 1-4-2, 1-4-3, 1-4- 4. Countersunk head holes 1-1-1, 1-1-2, 1-1-3, 1-1-4 are combined with countersunk head screws to fix the table body; vertical threaded through holes 1-2-1, 1-2 -2, 1-2-3, 1-2-4 are combined with the set screws, and the upper outer cover and the lower cover are respectively fixed on the upper and lower surfaces of the fixed platform 2; horizontal through holes 1-3-1 , 1-3-2 respectively place the probes of the sensors (such as capacitive displacement sensors) used to measure the x, y output displacement of the moving platform 2; vertical threaded holes 1-4-1, 1-4-2 and the tight In combination with fixed screws, the sensor (such as capacitive displacement sensor) measuring the x-direction output displacement of the moving platform 2 is fixed on the fixed platform 1, and the vertical threaded holes 1-4-3 and 1-4-4 are Combined with screws, the probe for measuring the y-direction output displacement of the moving platform 2 (such as a capacitive displacement sensor) is fixed on the fixed platform 1 .

The moving platform 2 has vertical threaded holes 2-1-1 to 2-1-32, horizontal through holes 2-2-1, 2-2-2, and horizontal threaded through holes 2-3-1 and 2-3-2 . The vertical threaded holes 2-1-1, 2-1-2, 2-1-3, 2-1-4 are combined with the set screw A to fix the upper inner cover plate on the upper surface of the moving platform 2. Holes 2-1-5 to 2-1-32 are combined with set screws to fix bearing objects of different sizes on the moving platform 2; horizontal through holes 2-2-1 are used to assemble the x-direction piezoelectric actuator When entering the x-direction displacement amplifying unit, the actuating screw 20 (as shown in FIG. 7 , in the figure, the y-direction piezoelectric actuator is used to make the x-direction displacement amplifying unit produce elongation deformation along the driving direction of the x-direction piezoelectric actuator) is inserted. When the y-direction piezoelectric actuator is assembled into the y-direction displacement amplifying unit, the horizontal through hole 2-2-2 is used to make the y-direction displacement amplifying unit drive along the y-direction piezoelectric actuator. The actuating screw 20 (as shown in FIG. 7 ) produces an elongated deformation; the horizontal threaded through hole 2-3-1 is used to cooperate with the x-direction adjusting screw to realize the engagement and transmission with the x-direction adjusting screw.

The x-direction displacement amplifying unit 3 (as shown in Figure 3) is used to amplify the output displacement of the x-direction piezoelectric actuator 11, and it includes rigid support arms 3-1-1, 3-1-2, rigid first Side bars 3-2-1, 3-2-3, rigid second side bars 3-2-2, 3-2-4, rigid middle bars 3-4-1, 3-4-2, first Flexible sheets 3-3-3, 3-3-7 between one side rod and support arm, flexible sheets 3-3-1, 3-3-5 between first side rod and middle rod, second side Flexible sheets 3-3-2, 3-3-6 between rod and middle rod, flexible sheets 3-3-4, 3-3-8 between second side rod and support arm; rigid support arm 3 -1-1 has positioning side stop 3-1-1-1, 3-1-1-2, positioning bottom stop 3-1-1-3, rigid support arm 3-1-2 has positioning side stop 3-1-2-1, 3-1-2-2, positioning bottom stop 3-1-2-3; positioning side stop 3-1-1-1, 3-1-1-2, 3-1- 2-1 and 3-1-2-2 are used to accurately define the position of the x-direction piezoelectric actuator 11 along the direction of arrow ① in FIG. The central axes are coincident, so that the moving platform 2 only has a slight displacement along the x-direction, and at the same time, the x-direction piezoelectric actuator 11 is prevented from falling off during the assembly process; positioning bottom blocks 3-1-1-3, 3-1-2-3 It is used to accurately define the position of the x-direction piezoelectric actuator 12 along the direction of arrow ② in Figure 3, so that the x-direction piezoelectric actuator 12 will not fall off during the assembly process; connecting rods 3-2-1 and 3-2-2 , flexible sheet 3-3-1 and 3-3-2, 3-3-3 and 3-3-4, connecting rod 3-2-3 and 3-2-4, flexible sheet 3-3-5 and 3 -3-6, 3-3-7 and 3-3-8 have the same longitudinal centerline respectively (just because of the longitudinal centerline of the links 3-2-1 and 3-2-2, the flexible sheet 3-3 The longitudinal centerlines of -1 and 3-3-2, the longitudinal centerlines of flexible sheets 3-3-3 and 3-3-4 are not coincident, and the longitudinal centerlines of connecting rods 3-2-3 and 3-2-4 The centerlines, the longitudinal centerlines of the flexible sheets 3-3-5 and 3-3-6, and the longitudinal centerlines of the flexible sheets 3-3-7 and 3-3-8 do not overlap, so that the x-direction displacement amplifying unit 3 has Displacement amplification function), the longitudinal centerlines of flexible sheets 3-3-1 and 3-3-2 and the longitudinal centerlines of 3-3-3 and 3-3-4 to the connecting rods 3-2-1 and 3-2 The longitudinal centerline distances of -2 are the same, the longitudinal centerlines of the flexible sheets 3-3-5 and 3-3-6 and the longitudinal centerlines of 3-3-7 and 3-3-8 and to the connecting rod 3-2- 3 and 3-2-4 have the same distance between the longitudinal centerlines; the x-direction displacement amplifying unit 3 is respectively connected with the fixed platform 1 and the x-direction displacement transmission unit 4 through intermediate rods 3-4-1 and 3-4-2.

The x-direction displacement transmission unit 4 (as shown in Figure 4) is used to transmit the output displacement of the x-direction displacement amplifying unit 3 to the moving platform 2, so that the moving platform 2 generates micro-motion along the x-direction. It includes a rigid link 4-1 , the first group of flexible sheets 4-2-1, 4-2-2, the second group 4-2-3, 4-2-4; the x-direction displacement transmission unit 4 passes through the first group of flexible sheets 4-2-1 , 4-2-2 are connected with the fixed platform 1, and the x-direction displacement transmission unit 4 is connected with the moving platform 2 through the second group of flexible thin plates 4-2-3 and 4-2-4.

The x-direction auxiliary unit 5 (as shown in FIG. 5 ) is used to combine with the x-direction displacement transmission unit 4 to guide the output displacement of the moving platform 2 along the y-direction, so that the moving platform 2 is in the y-direction piezoelectric actuator 12 Driven, only output displacement along the y direction, without coupling displacement in other directions, it includes rigid link 5-1, the first group of flexible sheets 5-2-1, 5-2-2, the second group 5-2 -3, 5-2-4, through hole 5-3, through hole 5-3 is used to pass through the probe of the sensor (such as capacitive displacement sensor) that measures the output displacement of the movable platform 2 along the x-direction; the x-direction auxiliary unit 5 is connected to the fixed platform 1 through the first set of flexible thin plates 5-2-1 and 5-2-2, and the x-direction auxiliary unit 5 is connected to the moving platform through the second set of flexible thin plates 5-2-3 and 5-2-4. 2-phase connection.

The x-direction adjustment unit 6 (as shown in FIG. 6 ) can precisely adjust the sensor (such as a capacitive displacement sensor) probe used to measure the output displacement of the moving platform 2 along the x-direction and the measured The initial gap between the faces, which includes rigid blocks 6-1, flexible folding beams 6-2-1, 6-2-2, 6-2-3, 6-2-4; flexible folding beams 6-2-1 The upper right part of the 6-2-2, the lower right part of 6-2-3, the lower left part of 6-2-4 are connected with the moving platform 2, the lower left part of the flexible folding beam 6-2-1, the lower left part of the 6-2-4 - The lower right part of 2-2, the upper left part of 6-2-3, and the upper right part of 6-2-4 are connected with the rigid block 6-1 of the x-direction adjustment unit 6, and the rigid block 6-1 is opposite to the end face of the sensor for the measurement surface. When adjusting the initial gap between the probe of the x-direction displacement sensor (such as capacitive displacement sensor) and the measured surface (as shown in Figure 1 (a)), the x-direction horizontal threaded through hole 2 on the moving platform 2 -3-1 Screw in the x-direction adjusting screw 13 to make it contact with the rigid block 6-1 of the x-direction adjusting unit 6, and then push the rigid block 6-1, the flexible folding beams 6-2-1, 6-2- 2. The elastic deformation of 6-2-3 and 6-2-4 makes the measured surface on the rigid block 6-1 face the rigid link 5-1 in the x-direction auxiliary unit 5 (the x-direction displacement sensor can pass through it. ), so as to realize the precise adjustment of the initial gap between the x-direction displacement sensor probe and the x-direction measured surface.

The y-direction displacement amplifying unit 7 (as shown in Figure 3) is used to amplify the output displacement of the y-direction piezoelectric actuator 12, and it includes rigid support arms 7-1-1, 7-1-2, rigid first Side bars 7-2-1, 7-2-3, rigid second side bars 7-2-2, 7-2-4, rigid middle bars 7-4-1, 7-4-2, first Flexible sheets 7-3-3, 7-3-7 between one side rod and support arm, flexible sheets 7-3-1, 7-3-5 between first side rod and middle rod, second side Flexible sheets 7-3-2, 7-3-6 between rod and middle rod, flexible sheets 7-3-4, 7-3-8 between second side rod and support arm; rigid support arm 7 -1-1, there are positioning side stop 7-1-1-1, 7-1-1-2, positioning bottom stop 7-1-1-3 on support arm 7-1-1, support arm 7-1- 2, there are positioning side stop 7-1-2-1, 7-1-2-2, positioning bottom stop 7-1-2-3; positioning side stop 7-1-1-1, 7-1-1- 2. 7-1-2-1 and 7-1-2-2 are used to accurately define the position of the y-direction piezoelectric actuator 12 along the direction of arrow ① in FIG. Coincide with the central axis of the displacement amplifying unit 7, so that the moving platform 2 only produces a slight displacement along the y-direction, and at the same time avoid the y-direction piezoelectric actuator 12 from falling off during the assembly process; positioning the bottom stops 7-1-1-3, 7 -1-2-3 is used to accurately define the position of the y-direction piezoelectric actuator 12 along the direction of arrow ② in Figure 3, so that the y-direction piezoelectric actuator 12 will not fall off during the assembly process; connecting rod 7-2-1 And 7-2-2, flexible sheet 7-3-1 and 7-3-2, 7-3-3 and 7-3-4, connecting rod 7-2-3 and 7-2-4, flexible sheet 7 -3-5 and 7-3-6, 7-3-7 and 7-3-8 have the same longitudinal centerline respectively (exactly due to the longitudinal centerline of links 7-2-1 and 7-2-2 , the longitudinal centerlines of the flexible sheets 7-3-1 and 7-3-2, the misalignment of the longitudinal centerlines of the flexible sheets 7-3-3 and 7-3-4, and the connecting rods 7-2-3 and 7 - Longitudinal centerlines of 2-4, longitudinal centerlines of flexible sheets 7-3-5 and 7-3-6, and longitudinal centerlines of flexible sheets 7-3-7 and 7-3-8 are not coincident such that y The displacement amplifying unit 7 has a displacement amplifying function), the longitudinal centerlines of the flexible sheets 7-3-1 and 7-3-2 and the longitudinal centerlines of 7-3-3 and 7-3-4 to the connecting rod 7-2 -1 and 7-2-2 have the same distance between the longitudinal centerlines, the longitudinal centerlines of the flexible sheets 7-3-5 and 7-3-6 and the longitudinal centerlines of 7-3-7 and 7-3-8 and the The distance between the longitudinal centerlines of the connecting rods 7-2-3 and 7-2-4 is the same; Unit 8 is connected.

The y-direction displacement transmission unit 8 (as shown in Figure 4) is used to transmit the output displacement of the y-direction displacement amplifying unit 7 to the moving platform 2, so that the moving platform 2 generates micro-motion along the y-direction, which includes a rigid link 8-1 , the first group of flexible sheets 8-2-1, 8-2-2, the second group 8-2-3, 8-2-4; the y-direction displacement transmission unit 8 passes through the first group of flexible sheets 8-2-1 , 8-2-2 are connected with the fixed platform 1, and the y-direction displacement transmission unit 8 is connected with the moving platform 2 through the second group of flexible thin plates 8-2-3 and 8-2-4.

The y-direction auxiliary unit 9 (as shown in FIG. 5 ) is used to combine with the y-direction displacement transmission unit 8 to guide the output displacement of the moving platform 2 along the x-direction, so that the moving platform 2 is in the x-direction piezoelectric actuator 11. Driven, only output displacement along the x-direction, without coupling displacement in other directions, it includes rigid link 9-1, the first group of flexible sheets 9-2-1, 9-2-2, the second group 9-2 -3, 9-2-4, through hole 9-3, through hole 9-3 is used to pass through the probe of the sensor (such as capacitive displacement sensor) that measures the output displacement of the moving platform 2 along the y direction; the y direction auxiliary unit 9 is connected to the fixed platform 1 through the first set of flexible thin plates 9-2-1 and 9-2-2, and the y-direction auxiliary unit 9 is connected to the moving platform through the second set of flexible thin plates 9-2-3 and 9-2-4. 2-phase connection.

The y-direction adjustment unit 10 (as shown in FIG. 6 ) can precisely adjust the sensor (such as a capacitive displacement sensor) probe used to measure the output displacement of the moving platform 2 along the y-direction and the measured The initial gap between the surfaces, which includes rigid blocks 10-1, flexible folding beams 10-2-1, 10-2-2, 10-2-3, 10-2-4; flexible folding beams 10-2-1 The upper right of the 10-2-2, the upper left of 10-2-2, the lower right of 10-2-3, and the lower left of 10-2-4 are connected to the moving platform 2, and the lower left of the flexible folding beam 10-2-1, 10 - The lower right part of 2-2, the upper left part of 10-2-3, and the upper right part of 10-2-4 are connected with the rigid block 10-1 of the y-direction adjustment unit 10; When the initial gap between the sensor) probe and the measured surface (as shown in Figure 1(a)), screw the y-direction adjusting screw 14 into the y-direction horizontal threaded through hole 2-3-2 on the moving platform 2 , make it contact with the rigid block 10-1 of the y-direction adjustment unit 10, and then push the rigid block 10-1, the flexible folding beams 10-2-1, 10-2-2, 10-2-3, 10-2 -4 Elastic deformation occurs, so that the measured face on the rigid block 10-1 moves to the side of the rigid link 9-1 in the y-direction auxiliary unit 9 (the y-direction displacement sensor can pass through), so as to realize the y-direction displacement Precise adjustment of the initial gap between the sensor head and the y-direction measured surface.

Piezoelectric actuators are divided into x-direction piezoelectric actuators 11 and y-direction piezoelectric actuators 12. Under the action of driving voltage, they respectively drive x- and y-direction displacement amplifying units to output displacement; x-direction piezoelectric actuators 11 The two end faces are in contact with the inner faces of the positioning side blocks 3-1-1-1, 3-1-1-2, 3-1-2-1, 3-1-2-2 of the x-direction displacement amplifying unit 3 respectively. , the bottom surface of which is in contact with the positioning bottom blocks 3-1-1-3 and 3-1-2-3 of the x-direction displacement amplifying unit 3; The inner sides of the positioning side blocks 7-1-1-1, 7-1-1-2, 7-1-2-1, 7-1-2-2 are in contact, and their bottom surfaces are in contact with the y-direction displacement amplifying unit 7 The positioning bottom stops 7-1-1-3 and 7-1-2-3 are in contact; when the x, y piezoelectric actuator is assembled into the x, y displacement amplifying unit (with the y piezoelectric actuator Take the assembly as an example, as shown in Figure 7), fix the table body and the positioning block 19, make the actuating screw 20 pass through the threaded through hole on the positioning block 19, and push the rigid link in the displacement transmission unit to amplify the displacement The unit is elongated and deformed along the driving direction of the piezoelectric actuator, so that the piezoelectric actuator is assembled into the displacement amplifying unit. After the assembly is completed, the positioning block 19 and the actuating screw 20 are removed to make the piezoelectric actuator elastic in the displacement amplifying unit. Under the action of the restoring force, the two ends of the piezoelectric actuator are compressed, so as to achieve the purpose of preloading the piezoelectric actuator.

The upper outer cover 15 (as shown in FIG. 8 ) is used to close the upper surface of the fixed platform 1, the upper surface of the x-direction displacement amplifying unit 3, the rigid link 4-1 of the x-direction displacement transmission unit 4 and the first group of flexible The upper surfaces of the thin plates 4-2-1 and 4-2-2, the rigid link 5-1 of the x-direction auxiliary unit 5 and the upper surfaces of the first group of flexible thin plates 5-2-1 and 5-2-2, the y The upper surface of the displacement amplifying unit 7, the rigid link 8-1 of the y-direction displacement transmission unit 8 and the upper surface of the first group of flexible sheets 8-2-1 and 8-2-2, the rigidity of the y-direction auxiliary unit 9 The upper surface of the connecting rod 9-1 and the first group of flexible thin plates 9-2-1 and 9-2-2 to prevent dust from falling in, and at the same time make the flexible structure micro-moving platform more beautiful; there are cones on the upper outer cover plate 15 Countersunk holes 15-1-1, 15-1-2, 15-1-3, 15-1-4, through holes 15-2-1, 15-2-2, 15-2-3, 15- 2-4; Conical countersunk holes 15-1-1, 15-1-2, 15-1-3, 15-1-4 from the upper surface of the fixed platform 1 and the vertical threaded through holes on the fixed platform 1 respectively 1-2-1, 1-2-2, 1-2-3, 1-2-4 are aligned and combined with the set screws 18-1, 18-2, 18-3, 18-4, The upper outer cover plate 15 is fixed on the upper surface of the fixed platform 1; -4-1, 1-4-2, 1-4-3, 1-4-4 are aligned, and then pass the probe used to fasten the x and y direction sensors (such as capacitive displacement sensors).

The upper inner cover 16 (as shown in FIG. 9 ) is used to close the upper surface of the moving platform 2, the upper surfaces of the second group of flexible thin plates 4-2-3 and 4-2-4 of the x-direction displacement transmission unit 4, To the upper surfaces of the second group of flexible sheets 5-2-3 and 5-2-4 of the auxiliary unit 5, the upper surface of the x-direction adjustment unit 6, and the second group of flexible sheets 8-2- of the y-direction displacement transmission unit 8 3. The upper surface of 8-2-4, the second group of flexible sheets 9-2-3 and 9-2-4 of the y-direction auxiliary unit 9, and the upper surface of the y-direction adjustment unit 10 to prevent dust from falling At the same time, the flexible structure micro-moving platform is more beautiful; the upper inner cover plate 16 has conical countersunk holes 16-1-1, 16-1-2, 16-1-3, 16-1-4, through holes 16-2-1～16-2-28; conical countersunk holes 16-1-1, 16-1-2, 16-1-3, 16-1-4 are respectively connected to the upper surface of the moving platform 2 Vertical threaded holes 2-2-1, 2-2-2, 2-2-3, 2-2-4 are aligned and set screws 18-5, 18-6, 18-7, 18-8 In combination, the upper inner cover plate 16 is fixed on the upper surface of the moving platform 2; 32 are aligned.

The lower cover 17 (as shown in Figure 10 ) is used to close the lower surfaces of the fixed platform 1 and the moving platform 2, as well as the x-direction displacement amplifying unit 3, the x-direction displacement transmission unit 4, the x-direction auxiliary unit 5, and the x-direction adjustment unit 6 , y-direction displacement amplifying unit 7, y-direction displacement transmission unit 8, y-direction auxiliary unit 9, y-direction adjustment unit 10, the lower surfaces of these eight mechanisms to prevent dust from falling in, and at the same time make the flexible structure micro-moving platform more beautiful; There are conical countersunk holes 17-1, 17-2, 17-3, 17-4 on the lower cover plate 17; The lower surfaces of 1 are respectively aligned with the vertical threaded through holes 1-2-1, 1-2-2, 1-2-3, 1-2-4 on the fixed platform 1, and are aligned with the set screws 18-9, 18-10, 18-11 and 18-12 are combined to fix the lower cover 17 on the lower surface of the fixed platform 1 .

As shown in Fig. 1(a), only the x-direction piezoelectric actuator 11 stretches under the action of the driving voltage, and pushes the rigid support arms 3-1-1 and 3-1-2 of the x-direction displacement amplifying unit 3 to the two directions. side movement, so that the middle rod 3-4-2 of the x-direction displacement amplifying unit 3 is displaced along the x-direction, and the displacement is transmitted to the moving platform 2 through the x-direction displacement transmission unit 4. The unit 9 guides the platform 2 along the x-direction, so that the movable platform 2 produces a strict linear micro-displacement along the x-direction, but does not generate coupling displacement in the y-direction.

As shown in Fig. 1(a), only the y-direction piezoelectric actuator 12 stretches under the action of the driving voltage, and pushes the rigid blocks 6-1-1 and 6-1-2 of the y-direction displacement amplifying unit 7 to move to both sides , make the middle rod 7-4-2 of the y-direction displacement amplifying unit 7 output displacement along the y-direction, and the displacement is transmitted to the moving platform 2 through the y-direction displacement transmission unit 8. Because the x-direction displacement transmission unit 4 and the x-direction auxiliary mechanism 5 With the guiding action of the platform 2 along the y-direction, the moving platform 2 produces a strict linear micro-displacement along the y-direction without generating coupling displacement along the x-direction.

As shown in Fig. 1(a), when a driving voltage is applied to the x-direction piezoelectric actuator 9 and the y-direction piezoelectric actuator 10 at the same time, the moving platform 2 produces a strict linear micro-displacement along the x-direction and the y-direction at the same time, and No coupling displacement occurs.

The content described in the embodiments of the present specification is only an enumeration of the realization forms of the inventive concept, and the protection scope of the present invention should not be regarded as limited to the specific forms stated in the embodiments, and the protection scope of the present invention also extends to those skilled in the art. Equivalent technical means that can be conceived by a person based on the inventive concept.

Claims (7)

1. A piezoelectric micro-movement platform with a parallel translational two-degree-of-freedom flexible structure, including a fixed platform, a moving platform, a lateral motion mechanism and a longitudinal motion mechanism, the moving platform is inside the fixed platform, and the upper surface of the moving platform protrudes beyond the fixed platform. The upper surface, the upper surface of the fixed platform protrudes from the upper surface of each motion mechanism, the lower surface of the fixed platform protrudes from the lower surface of the moving platform and the lower surface of each motion mechanism; the motion mechanisms in each direction are respectively driven by their respective displacement output units. , the displacement transmission unit and the auxiliary unit are composed. The displacement output unit uses the piezoelectric actuator as the power source. The displacement transmission unit and the auxiliary unit in each direction are symmetrically distributed with the center line of the moving platform. The displacement transmission unit is located between the displacement output unit and the moving platform. It is characterized in that: the output end of the displacement output unit is connected with the rigid link of the displacement transmission unit; the displacement transmission unit and the auxiliary unit are composed of their respective rigid links and two sets of flexible sheets, and the first group of flexible sheets is connected to the rigid link. The rod and the fixed platform, the second set of flexible thin plates are connected to the rigid link and the moving platform; the first set of flexible thin plates of the lateral displacement transmission unit and the auxiliary unit are arranged in the longitudinal direction, and the second set of flexible thin plates of the lateral displacement transmission unit and the auxiliary unit are arranged in the lateral direction setting; the first group of flexible sheets of the longitudinal displacement transmission unit and the auxiliary unit are arranged in the transverse direction, and the longitudinal displacement transmission unit and the auxiliary unit The second group of flexible thin plates is longitudinally arranged; the movement mechanism in each direction is aligned with an adjusting unit, the adjusting unit is located between the moving platform and the auxiliary unit, and the moving platform is provided with a threaded through hole for screwing the adjusting unit; the adjusting unit is made of rigid The block and two flexible folding beam groups, each flexible folding beam group is composed of a pair of flexible folding beams symmetrically arranged along the rigid block, one end of the flexible folding beam is connected with the rigid block, and the other end is connected with the moving platform. Serpentine, the end face of the rigid block aligned with the sensor probe is the measurement face. 2 . The piezoelectric micro-movement platform of parallel translation with two degrees of freedom parallel flexible structure as claimed in claim 1 , wherein the first group of flexible thin plates at least has a pair of thin plates symmetrical along the moving platform, and the second group of flexible thin plates has at least one pair of thin plates that are symmetrical along the moving platform. 3 . A pair of thin plates symmetrical along the rigid link. 3 . The piezoelectric micro-movement platform with parallel two-degree-of-freedom parallel flexible structure according to claim 2 , wherein the movable platform is provided with a groove for accommodating the first group of flexible sheets, and the first group of flexible sheets is located in the groove. 4 . 4. The piezoelectric micro-movement platform of parallel translation with two degrees of freedom parallel flexible structure as claimed in claim 3, characterized in that: the fixed platform is provided with a mounting hole for installing the displacement sensor, and the rigid link of the auxiliary unit is provided with a through hole, The through holes are aligned with the mounting holes. 5. The piezoelectric micro-movement platform of parallel translation with two degrees of freedom parallel flexible structure according to one of claims 1-4, characterized in that: the displacement output unit is composed of a piezoelectric actuator and a displacement amplifying unit, and the displacement amplifying unit includes a For the support arm, the first amplifying rod assembly and the second amplifying rod assembly; a piezoelectric actuator is arranged between the supporting arms, and both ends of the piezoelectric actuator are respectively in contact with one supporting arm, the first amplifying rod assembly and the second amplifying rod assembly The components are symmetrically arranged on the center line of the piezoelectric actuator, and the first amplifying rod assembly and the second amplifying rod assembly respectively comprise a first side rod, a middle rod, a second side rod, a flexible thin plate between the first side rod and the support arm, The flexible sheet between the first side rod and the middle rod, the flexible sheet between the second side rod and the middle rod, the flexible sheet between the second side rod and the support arm, the flexible sheet between the first side rod and the support arm The flexible sheet between the thin plate and the first side rod and the middle rod is misaligned, the flexible sheet between the second side rod and the intermediate rod and the flexible sheet between the second side rod and the support arm are misaligned, and the flexible sheets at both ends of the intermediate rod are aligned. flat; the middle rod of the first amplifying rod assembly is connected with the fixed platform, the middle rod of the second amplifying rod assembly is connected with the rigid link of the displacement transmission mechanism, the first side rod, the middle rod and the second side rod are rigid parts, flexible The thin plate is an elastic part; the flexible thin plate between the first side bar and the support arm is dislocated from the flexible thin plate between the first side bar and the middle bar, and the flexible thin plate between the second side bar and the middle bar and the second side bar and the The dislocation of the flexible sheets between the support arms means that the two flexible sheets are not in a straight line; the sheets at both ends of the side rod are misaligned, so that the two lines of the two connection points between the sheet and the side rod are oblique lines, connecting the sheet to the side rod The line segment of the two connecting points is regarded as a connecting rod, then the connecting rod formed by the first side rod, the connecting rod formed by the middle rod and the second side rod is in the shape of an arch bridge, and the connecting rod acts as a lever to amplify the output displacement of the piezoelectric actuator. 6. The piezoelectric micro-motion platform of parallel translation with two degrees of freedom parallel flexible structure as claimed in claim 5, characterized in that: the support arm is provided with a positioning side block and a positioning bottom block, and the positioning side block and the positioning bottom block are both connected with the support arm. The arm is centered, the positioning side block encloses the positioning bottom block, the positioning side block and the positioning bottom block protrude from the inner side of the support arm, the area inside the positioning side block allows the end of the piezoelectric actuator to be placed, and the positioning bottom block stop against the end of the piezo actuator. 7. The piezoelectric micro-movement platform with parallel two-degree-of-freedom parallel flexible structure according to claim 6, characterized in that: the platform has an upper outer cover, an upper inner cover and a lower cover; the upper outer cover seals the fixed The platform, the rigid link of the displacement transmission unit and the auxiliary unit and the second group of flexible thin plates are fixed with the fixed platform by screws; the upper inner cover plate seals the moving platform, the displacement transmission unit and the first group of flexible thin plates of the auxiliary unit, adjustment The upper inner cover plate and the moving platform are provided with a plurality of screw holes for installing bearing objects; the lower cover plate seals the bottom of the platform and is fixed to the fixed platform by screws.

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