CN107859817B - Reaction force eliminates stage apparatus - Google Patents
Reaction force eliminates stage apparatus Download PDFInfo
- Publication number
- CN107859817B CN107859817B CN201610840651.0A CN201610840651A CN107859817B CN 107859817 B CN107859817 B CN 107859817B CN 201610840651 A CN201610840651 A CN 201610840651A CN 107859817 B CN107859817 B CN 107859817B
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- China
- Prior art keywords
- pedestal
- stroma
- reaction force
- unit
- main actuator
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Links
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 76
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical group C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 72
- 230000001133 acceleration Effects 0.000 claims description 14
- 230000035939 shock Effects 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 3
- 230000008030 elimination Effects 0.000 abstract description 4
- 238000003379 elimination reaction Methods 0.000 abstract description 4
- 230000003139 buffering effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000013016 damping Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/045—Allowing translations adapted to left-right translation movement
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Microscoopes, Condenser (AREA)
Abstract
A kind of reaction force elimination stage apparatus is set to the base unit of the base unit, a mobile microscope carrier unit, a reaction force comprising a base unit, one and eliminates unit and a control unit.The movement microscope carrier unit is movably arranged at the base unit, and the microscope carrier of the active stroma is connected including an active stroma, at least one main actuator for being used to drive the active stroma mobile and one.It includes the anti-driven part that at least one connects the main actuator that the reaction force, which eliminates unit, and at least one is connected to the reaction stroma between the anti-driven part and the base unit, the anti-driven part is used to drive reaction stroma movement, to reversely drive the main actuator mobile.The control unit is electrically connected each main actuator and each anti-driven part, and is used to control the main actuator and the drive mode of the anti-driven part.
Description
Technical field
The stage apparatus that the present invention relates to a kind of applied to industries such as machinery, electronics, photoelectricity and as carrying, measurement,
Stage apparatus is eliminated more particularly to a kind of reaction force.
Background technique
Refering to fig. 1, a kind of platform dress as disclosed in U.S. Patent number US6906786B2 and US7502103B2 Patent Case
9 are set, it is mainly removable comprising pedestal 91, the one mass balance pedestals being movably arranged on the pedestal 91 92, one
The microscope carrier being set on the mass balance pedestal 92 dynamicly 93, one be connected between the mass balance pedestal 92 and the microscope carrier 93 and
For the driving unit 94 and a bullet being connected between the pedestal 91 and the mass balance pedestal 92 for driving the microscope carrier 93 mobile
Spring damping group 95.Wherein, which drives generated reaction force in 93 moving process of microscope carrier that can impose on the matter
Gimballed base 92 is measured, quality of the mass balance pedestal 92 by its quality much larger than the microscope carrier 93 and the driving unit 94 is come
Acceleration amount of movement caused by operating for aforementioned reaction force to it is greatly reduced, the mass balance pedestal 92 is by aforementioned anti-
Displacement produced by active force effect then carries out buffering counteracting by the spring damping group 95.However, the shortcomings that above-mentioned stage apparatus 9
Being that the driving unit 94 drives reaction force caused by the microscope carrier 93 is all and directly to impact in the mass balance pedestal
92, it causes the stability of the mass balance pedestal 92 cannot keep and stablizes in high level, furthermore 92 weight of mass balance pedestal
Heavy and volume is big, and the whole volume size of the stage apparatus 9 is caused not reduce effectively, and improves interelement installation configuration
Degree of difficulty.
Summary of the invention
The purpose of the present invention is to provide one kind, and the reaction force of disadvantage described in prior art at least to be overcome to eliminate platform dress
It sets.
Reaction force of the invention eliminates stage apparatus, includes a base unit, a base unit, a mobile load
Platform unit, a reaction force eliminate unit and a control unit.
The base unit has a pedestal, which is set to the base unit, and is set to this including one
Pedestal and a shock insulation group being connected between the pedestal and the pedestal above pedestal.
The movement microscope carrier unit is movably arranged at the pedestal, and including an active stroma, at least one is used to drive
Move the mobile main actuator of the active stroma and a microscope carrier for connecting the active stroma.
It includes anti-driven part and at least one connection that at least one connects the main actuator that the reaction force, which eliminates unit,
Reaction stroma between the anti-driven part and the base unit, which is used to drive the reaction stroma mobile, thus instead
To drive, the main actuator is mobile.
The control unit is electrically connected the main actuator and the anti-driven part, and is used to control the main actuator and this is anti-driven
The main actuator can be read with respect to the active stroma and the anti-driven part with respect to reaction in the drive mode of part, the control unit
The location information of seat changed over time, and above-mentioned location information is processed into acceleration information.
When the main actuator generates acceleration movement relative to the active stroma, it is anti-driven which controls this
Part generates an active force in the direction opposite the acceleration direction for the main actuator, eliminates the acceleration to keep out.
Preferably, the movement microscope carrier unit further includes at least one secondary driving being connected between the microscope carrier and the active stroma
Part；The main actuator is used to that the active stroma is driven to move along a first direction, which is used to drive the microscope carrier edge
The second direction of one vertical first direction is mobile, which is used to that the reaction stroma is driven to move along the first direction
It is dynamic.
Preferably, the pedestal has the opposite bottom surface of the pedestal and a top surface for an opposite bottom surface；The pedestal
The top surface is recessed to be formed there are two being located at two opposite sides of left and right and setting groove along the cunning that the first direction extends, and protrudes out
It forms two and is located at the line rail that the cunning sets on the outside of groove and extends along the first direction；The prime seat tool has one to enclose
It to form one around defining and extends along the second direction and set the pedestal in space for the sliding cunning set of the microscope carrier and two are separately connected the seat
Two opposite sides of body and the cunning for being slidedly arranged on the pedestal respectively set the sliding block of groove；The main actuator of the movement microscope carrier unit
Quantity is two and is slidedly arranged on the line rail of the pedestal respectively, and is separately connected the sliding block of the active stroma.
Preferably, the movement microscope carrier unit further includes the gas bearing support group that an air bearing is set to the top surface of the pedestal,
The active stroma and the microscope carrier are all set to the gas bearing support group and float on the top face of the pedestal.
Preferably, the main actuator and the anti-driven part are distinctly a linear servo motor.
Preferably, it further includes that one is connected between the reaction stroma and the base unit that the reaction force, which eliminates unit,
Hank chain group.
Preferably, reaction force elimination unit further includes one and is connected between the reaction stroma and the first hinge group
Second hinge group.
The beneficial effects of the present invention are: unit is eliminated by the reaction force and keeps out elimination main actuator drive come instant
Reaction force caused by the active stroma is moved, the base unit is directed to so that above-mentioned reaction force be directed out, can have
Effect, which reduces above-mentioned reaction force, influences the directly impact of the pedestal, the stability of the pedestal is substantially improved.In addition, upper
State reaction force for the pedestal impact it is minimum in the case where, which need not then have the mass balance such as existing stage apparatus
The big quality of pedestal carrys out the above-mentioned reaction force of equalizing and buffering, therefore can effectively reduce the volume mass of the pedestal, to reduce platform
Degree of difficulty and the limitation of configuration are installed between device element.
Detailed description of the invention
Other features of the invention and effect will be clearly presented in the embodiment referring to schema, in which:
Fig. 1 is one side schematic view, illustrates the element composition aspect of an existing stage apparatus；
Fig. 2 is a perspective view of the first embodiment that reaction force of the present invention eliminates stage apparatus；
Fig. 3 is a top view of the first embodiment；
Fig. 4 is a front view of the first embodiment；
Fig. 5 is a schematic diagram, illustrates that a control unit of the first embodiment is electrically connected each main actuator, each secondary drive
Moving part and each anti-driven part；
Fig. 6 is a perspective view of the second embodiment that reaction force of the present invention eliminates stage apparatus；
Fig. 7 is a top view of the second embodiment；
Fig. 8 is a front view of the second embodiment.
Specific embodiment
Before the present invention is described in detail, it shall be noted that in the following description content, similar element is with identical
Number is to indicate.
Refering to Fig. 2, Fig. 3 and Fig. 4, reaction force of the present invention eliminates a first embodiment of stage apparatus, includes one
3, reaction forces of the mobile microscope carrier unit of the base unit 2, one of base unit 1, one eliminate unit 4 and a control is single
5 (see Fig. 5) of member.
The base unit 1 includes a pedestal 11 with the bottom surface 111 and a top surface 112 that are reversed, and
Two side extension blocks 12 for being respectively arranged at the left and right sides portion of the pedestal 11 and upwardly extending.
The base unit 2 is set to the base unit 1, and 112 top of top surface for being located at the pedestal 11 including one and
Pedestal 21 and a shock insulation group 22 being connected between the pedestal 21 and the pedestal 11 between the side extension block 12.The base
Seat 21 has the bottom surface 211 and a top surface 212 being reversed, and the bottom surface 211 of the pedestal 21 is with respect to the pedestal 11
The top surface 112, there are two the top surface 212 recess formation of the pedestal 21 is located at two opposite sides of left and right and along one first
The cunning that direction X (front-rear direction) extends sets groove 213, and protrude out to be formed two be located at the cunning set the outside of groove 213 and
The line rail 214 extended along first direction X.In the present embodiment, which has four for respectively corresponding the pedestal 21
The active shock isolating pedestal 221 of corner.
The movement microscope carrier unit 3 is movably arranged at the pedestal 21, and including the 31, actives of a gas bearing support group
33, microscope carriers 34 of stroma 32, two main actuators and two secondary actuators 35.31 air bearing of gas bearing support group is set to this
The top surface 212 of pedestal 21.The active stroma 32 is set to the gas bearing support group 31 and floats on the top surface 212 of the pedestal 21
Side, and to form what a second direction Y (left and right directions) along a vertical first direction X extended around defining with one
It slides the pedestal 321 for setting space 320 and two is separately connected two opposite side of left and right of the pedestal 321 and is slidedly arranged on the base respectively
The cunning of seat 21 sets the sliding block 322 of groove 213.The main actuator 33 is slidedly arranged on the line rail 214 of the pedestal 21 respectively,
And it is separately connected the sliding block 322 of the active stroma 32, and match for driving the active stroma 32 along first direction X
It is mobile.The microscope carrier 34 is set to the gas bearing support group 31 and floats on 212 top of top surface of the pedestal 21 and set sky positioned at the cunning
Between in 320.The pair actuator 35 is connected to the seat of two opposite side of front and back and the active stroma 32 of the microscope carrier 34
Between body 321, and match for driving the microscope carrier 34 to move along second direction Y.In the present embodiment, the gas bearing support group 31
With multiple four corners for respectively corresponding the microscope carrier 34, four corners of the pedestal 321 of the active stroma 32 and the master
The sliding block 322 of mover seat 32 and the sliding gas bearing support 311 for setting place of the pedestal 21, each gas bearing support 311 are an air axis
It holds, each main actuator 33 is a linear servo motor, and each pair actuator 35 is a linear servo motor.
The reaction force is eliminated unit 4 and is connected between the base unit 1 and the movement microscope carrier unit 3.The reaction force disappears
Except unit 4 include two anti-driven parts 41 for being respectively and fixedly connected with the main actuator 33 and two be connected to it is described anti-driven
Reaction stroma 42 between part 41 and the side extension block 12 of the base unit 1.The anti-driven part 41 is respectively intended to driving institute
It states reaction stroma 42 to move along first direction X, to reversely drive the main actuator 33 mobile respectively.In the present embodiment
In, each anti-driven part 41 is a linear servo motor.
Refering to Fig. 5, which is electrically connected each main actuator 33, each secondary actuator 35 and each anti-driven part 41, and uses
To control the drive mode of each main actuator 33, each secondary actuator 35 and each anti-driven part 41.Each master can be read in the control unit 5
Actuator 33 is with respect to the active stroma 32, each secondary actuator 35 opposite microscope carrier 34 and relatively each reaction stroma of each anti-driven part 41
42 location information changed over time, and above-mentioned location information is processed into speed and acceleration information.In the present embodiment,
The control unit 5 is a computer.
Refering to Fig. 2 and Fig. 5, one is generated relative to the active stroma 32 when each main actuator 33 drives the active stroma 32
When a acceleration along first direction X moves, which controls each anti-driven part 41 and each main actuator 33 is generated
The active force in the one contrary acceleration direction eliminates the acceleration to keep out, that is, keeps out and eliminate each main actuator 33
Drive the mobile generated reaction force of the active stroma 32.In detail, which can be immediately for the main actuator
Acceleration caused by 33 calculates out the drive mode for changing over time and being used for each anti-driven part 41, so that each anti-drive
Moving part 41 can generate the actuation such as spring (absorbing reaction force) and damping (fast convergence) immediately under above-mentioned drive mode
Effect.
Since each secondary actuator 35 drives the microscope carrier 34 to impose on the active stroma 32 produced by moving along second direction Y
Reaction force carries out buffering elimination by being set to the gas bearing support 311 of the sliding block 322 of the active stroma 32, can slow down
Above-mentioned reaction force directly influences the impact of the pedestal 21, therefore in the present embodiment, which eliminates unit 4
It must carry out keeping out and eliminate reaction force caused by the described main driving of actuator 33 active stroma 32.
It is noted that the main actuator 33 of the movement microscope carrier unit 3 and secondary actuator 35 are eliminated with the reaction force
The anti-driven part 41 of unit 4 and the quantity of reaction stroma 42 are not limited with above-mentioned, can be carried out according to different driving configuration needs
Adjustment variation, can be only one or three or more.
Via above description it is found that reaction force of the present invention eliminate stage apparatus by the reaction force eliminate unit 4 come
Immediately it keeps out and eliminates reaction force caused by each main driving of actuator 33 active stroma 32, so that above-mentioned reaction force is straight
It connects and is directed to the base unit 1 outward, above-mentioned reaction force, which can be effectively reduced, influences the direct impact of the pedestal 21, with big
Width promotes the stability of the pedestal 21.In addition, in the case where above-mentioned reaction force impacts minimum for the pedestal 21, the pedestal
21 need not have the big quality of the mass balance pedestal such as existing stage apparatus to come the above-mentioned reaction force of equalizing and buffering, therefore energy
The volume mass of the pedestal 21 is reduced, effectively to reduce degree of difficulty and the limitation of the installation configuration of stage apparatus interelement.
Refering to Fig. 6, Fig. 7 and Fig. 8, reaction force of the present invention eliminates a second embodiment of stage apparatus, generally phase
It is same as the first embodiment, the reaction force is different in and eliminates unit 4 and further include one and be connected to the reaction stroma 42
The first hinge group 43 between the side extension block 12 of the base unit 1 and one be connected to the reaction stroma 42 with should
The second hinge group 44 between first hinge group 43.The first hinge group 43 and the second hinge group 44 can assist described in transient absorption
Main actuator 33 drives reaction force caused by the active stroma 32, and provides the reaction force is maintained to eliminate unit 4 simultaneously
With the base unit 1 and the base unit 2 between the two in the rigid support of a fixed spacing.
In conclusion reaction force of the present invention eliminates stage apparatus, the purpose of the present invention can be reached really.
As described above, only the embodiment of the present invention is when cannot be limited the scope of implementation of the present invention with this, i.e., all
According to simple equivalent changes and modifications made by claims of the present invention and description, all still belong to the scope of the present invention.
Claims (7)
- It include a base unit, a base unit, a mobile microscope carrier list 1. a kind of reaction force eliminates stage apparatus Member, a reaction force eliminate unit and a control unit, which has a pedestal, base unit setting In the base unit, and the pedestal being set to above the pedestal including one and one are connected between the pedestal and the pedestal Shock insulation group, the movement microscope carrier unit are movably arranged at the pedestal, and including an active stroma, at least one is used to drive The mobile main actuator of the active stroma and one connect the microscope carrier of the active stroma, it is characterised in that:The reaction force eliminate unit include at least one connect the main actuator anti-driven part and at least one be connected to this Reaction stroma between anti-driven part and the base unit, which is used to drive the reaction stroma mobile, thus reversed band It is mobile to move the main actuator；AndThe control unit is electrically connected each main actuator and each anti-driven part, and is used to control the main actuator and the anti-driven part The main actuator can be read with respect to the active stroma and the anti-driven part with respect to the reaction stroma in drive mode, the control unit The location information changed over time, and above-mentioned location information is processed into acceleration information；When the main actuator generates acceleration movement relative to the active stroma, which controls the anti-driven part pair An active force in the direction opposite the acceleration direction is generated in the main actuator, eliminates the acceleration to keep out.
- 2. reaction force according to claim 1 eliminates stage apparatus, it is characterised in that: the movement microscope carrier unit further includes At least one is connected to the secondary actuator between the microscope carrier and the active stroma；The main actuator is used to drive the active stroma along one A first direction is mobile, which is used to that the microscope carrier is driven to move along the second direction of a vertical first direction, should Anti-driven part is used to that the reaction stroma is driven to move along the first direction.
- 3. reaction force according to claim 2 eliminates stage apparatus, it is characterised in that: there is the pedestal one relatively should The top surface of the bottom surface of pedestal and an opposite bottom surface；The top surface of the pedestal is recessed to be formed there are two being located at left and right two-phase It tosses about and portion and sets groove along the cunning that the first direction extends, and protrude out to form two and be located at the cunning and set on the outside of groove and edge The line rail that the first direction extends；The prime seat tool has one to extend along the second direction and around defining one for microscope carrier cunning If cunning set the pedestal in space and two are separately connected two opposite sides of the pedestal and are slidedly arranged on the cunning of the pedestal respectively If the sliding block of groove；The main actuator quantity of the movement microscope carrier unit is two and is slidedly arranged on the line rail of the pedestal respectively, And it is separately connected the sliding block of the active stroma.
- 4. reaction force according to claim 3 eliminates stage apparatus, it is characterised in that: the movement microscope carrier unit further includes One air bearing is set to the gas bearing support group of the top surface of the pedestal, and the active stroma and the microscope carrier are all set to the gas bearing support Group and the top face for floating on the pedestal.
- 5. reaction force according to claim 1 eliminates stage apparatus, it is characterised in that: the main actuator and this is anti-driven Part corresponds to a linear servo motor.
- 6. reaction force according to claim 1 eliminates stage apparatus, it is characterised in that: the reaction force eliminates unit also The first hinge group being connected between the reaction stroma and the base unit including one.
- 7. reaction force according to claim 6 eliminates stage apparatus, it is characterised in that: the reaction force eliminates unit also The second hinge group being connected between the reaction stroma and the first hinge group including one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610840651.0A CN107859817B (en) | 2016-09-22 | 2016-09-22 | Reaction force eliminates stage apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610840651.0A CN107859817B (en) | 2016-09-22 | 2016-09-22 | Reaction force eliminates stage apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107859817A CN107859817A (en) | 2018-03-30 |
| CN107859817B true CN107859817B (en) | 2019-08-09 |
Family
ID=61698648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610840651.0A Active CN107859817B (en) | 2016-09-22 | 2016-09-22 | Reaction force eliminates stage apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107859817B (en) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI230844B (en) * | 2002-06-07 | 2005-04-11 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
| US7502103B2 (en) * | 2006-05-31 | 2009-03-10 | Asml Netherlands B.V. | Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate |
| FR2986452B1 (en) * | 2012-02-06 | 2015-01-16 | Asbe Eng | SYSTEM FOR COMPENSATING A REACTION EFFORT PRODUCED BY A MOBILE TOOL |
| CN203565636U (en) * | 2013-06-26 | 2014-04-30 | 上汽通用五菱汽车股份有限公司 | Die mechanism preventing cracking of flanging of thick plate |
| JP6116095B2 (en) * | 2013-08-30 | 2017-04-19 | 本田技研工業株式会社 | Hydraulic tensioner device |
| CN103969013B (en) * | 2014-05-15 | 2016-04-27 | 无锡隆盛科技股份有限公司 | A kind of long duration test damping frock |
| JP2016075496A (en) * | 2014-10-02 | 2016-05-12 | セントラル硝子株式会社 | Strength measuring device |
-
2016
- 2016-09-22 CN CN201610840651.0A patent/CN107859817B/en active Active
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| CN107859817A (en) | 2018-03-30 |
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