CN107843384A - Vacuum gauge tube for quartz film sheet - Google Patents
Vacuum gauge tube for quartz film sheet Download PDFInfo
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- CN107843384A CN107843384A CN201610832513.8A CN201610832513A CN107843384A CN 107843384 A CN107843384 A CN 107843384A CN 201610832513 A CN201610832513 A CN 201610832513A CN 107843384 A CN107843384 A CN 107843384A
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- 239000010453 quartz Substances 0.000 title claims abstract description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 239000010409 thin film Substances 0.000 claims abstract description 28
- 239000000919 ceramic Substances 0.000 claims abstract description 27
- 239000010408 film Substances 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 13
- 238000005259 measurement Methods 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims abstract description 9
- 239000003990 capacitor Substances 0.000 claims description 5
- 238000003466 welding Methods 0.000 claims description 4
- 229910000856 hastalloy Inorganic materials 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 abstract description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 4
- 239000010931 gold Substances 0.000 abstract description 4
- 229910052737 gold Inorganic materials 0.000 abstract description 4
- 238000007747 plating Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000008859 change Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
本发明涉及半导体制造技术领域，具体涉及一种石英薄膜片真空规管。一种石英薄膜片真空规管，包括：外壳，所述外壳包括上盖实体和底座；薄膜片，所述薄膜片将所述外壳内部空间分为真空空间和被测空间；所述薄膜片表面镀有一层镀金；陶瓷极板，所述陶瓷极板固定设置在所述真空空间内，所述陶瓷极板与所述薄膜片平行相对的那一表面设有一片金属片；所述陶瓷极板上设有过孔，所述过孔将所述金属片的电信号引入所述陶瓷极板的上表面；第一电极柱和第二电极柱，与外部电容测量电路相连。本发明中采用石英材料的薄膜片作为可变电极，具有应力次数高、稳定性高的优点，满足半导体设备的需求。
The invention relates to the technical field of semiconductor manufacturing, in particular to a quartz thin film vacuum gauge. A quartz thin-film vacuum gauge, comprising: a housing, the housing includes an upper cover entity and a base; a thin-film, which divides the internal space of the housing into a vacuum space and a measured space; the surface of the thin-film Plated with a layer of gold plating; ceramic pole plate, the ceramic pole plate is fixedly arranged in the vacuum space, and a metal sheet is provided on the surface of the ceramic pole plate parallel to the film sheet; the ceramic pole plate A via hole is provided on the via hole, and the electrical signal of the metal sheet is introduced into the upper surface of the ceramic plate through the via hole; the first electrode column and the second electrode column are connected with an external capacitance measurement circuit. In the present invention, a thin film of quartz material is used as the variable electrode, which has the advantages of high stress times and high stability, and meets the requirements of semiconductor equipment.
Description
技术领域technical field
本发明涉及半导体制造技术领域，具体涉及一种石英薄膜片真空规管。The invention relates to the technical field of semiconductor manufacturing, in particular to a quartz thin film vacuum gauge.
背景技术Background technique
随着工业的进一步发展，真空技术越来越重要。真空规管是一种度量真空度的传感器，广泛应用于半导体工艺设备中。现有技术中绝对型全电容薄膜片真空规管的原理是：薄膜片会在其两侧压力差下产生形变，导致可变电容的电容值发生改变，经过电容测量电路及数据处理可以计算真空度。它的测量是直接反映了真空压力的变化值与气体成分无关。但是，目前绝对型全电容薄膜片真空规管的薄膜片主要采用金属薄膜片，有容易被腐蚀和应力次数低的缺点。With the further development of industry, vacuum technology is becoming more and more important. A vacuum gauge is a sensor that measures vacuum and is widely used in semiconductor process equipment. The principle of the absolute full-capacitance film vacuum gauge in the prior art is that the film will deform under the pressure difference on both sides, resulting in a change in the capacitance value of the variable capacitor, and the vacuum gauge can be calculated through the capacitance measurement circuit and data processing. Spend. Its measurement directly reflects the change of vacuum pressure and has nothing to do with gas composition. However, at present, the diaphragm of absolute full-capacitance diaphragm vacuum gauge is mainly made of metal diaphragm, which has the disadvantages of being easily corroded and having low stress times.
发明内容Contents of the invention
本发明的目的在于提供一种石英薄膜片真空规管，所述真空规管测量精度高、应力次数高、稳定性高，适用于半导体工艺设备中真空测量。The object of the present invention is to provide a quartz film vacuum gauge, which has high measurement accuracy, high stress times and high stability, and is suitable for vacuum measurement in semiconductor process equipment.
为了达到上述目的，本发明采用的技术方案为：In order to achieve the above object, the technical scheme adopted in the present invention is:
一种石英薄膜片真空规管，包括：A quartz thin film vacuum gauge, comprising:
外壳，所述外壳包括上盖实体和底座，所述上盖实体和底座焊接连接；所述底座上设有底座延伸气孔；The outer shell, the outer shell includes an upper cover entity and a base, and the upper cover entity and the base are welded and connected; the base is provided with base extension air holes;
薄膜片，所述薄膜片的材质为石英材料，所述薄膜片固定设置在所述外壳内部，并将所述外壳内部空间分为真空空间和被测空间；所述薄膜片表面镀有一层镀金；Thin film, the material of the thin film is quartz material, the thin film is fixed inside the housing, and the internal space of the housing is divided into a vacuum space and a measured space; the surface of the thin film is coated with a layer of gold-plated ;
陶瓷极板，所述陶瓷极板固定设置在所述真空空间内，所述陶瓷极板与所述薄膜片平行相对的那一表面设有一片金属片；所述陶瓷极板上设有过孔，所述过孔将所述金属片的电信号引入所述陶瓷极板的上表面；A ceramic pole plate, the ceramic pole plate is fixedly arranged in the vacuum space, a metal sheet is provided on the surface of the ceramic pole plate parallel to the film sheet; a via hole is provided on the ceramic pole plate , the via hole introduces the electrical signal of the metal sheet into the upper surface of the ceramic plate;
第一电极柱，所述第一电极柱一端与外部电容测量电路相接，另一端穿过所述外壳在所述真空空间与所述陶瓷极板的上表面相接；A first electrode column, one end of the first electrode column is connected to the external capacitance measurement circuit, and the other end passes through the shell and connects to the upper surface of the ceramic plate in the vacuum space;
第二电极柱，所述第二电极柱一端与所述外部电容测量电路相连，另一端穿过所述外壳在所述真空空间内与所述薄膜片表面的镀金焊接；A second electrode column, one end of the second electrode column is connected to the external capacitance measurement circuit, and the other end passes through the shell and is welded to the gold-plated surface of the thin film in the vacuum space;
其中，所述薄膜片作为可变电极，所述陶瓷极板作为固定电极，所述可动电极与所述固定电极组成一可变电容器。Wherein, the thin film is used as a variable electrode, the ceramic plate is used as a fixed electrode, and the movable electrode and the fixed electrode form a variable capacitor.
上述方案中，所述上盖实体顶部设有顶部延伸腔体，所述顶部延伸腔体与所述真空空间相连通，所述顶部延伸腔体内装有吸气剂。In the above solution, a top extension cavity is provided on the top of the upper cover body, the top extension cavity communicates with the vacuum space, and a getter is installed in the top extension cavity.
上述方案中，所述薄膜片的厚度为120微米。In the above solution, the thickness of the film sheet is 120 microns.
上述方案中，所述薄膜片的表面镀有一层厚的镀金。In the above scheme, the surface of the film sheet is coated with a layer of thick gilt.
上述方案中，所述外壳的材质为哈氏合金。In the above solution, the material of the shell is Hastelloy.
上述方案中，所述上盖实体和所述底座焊接连接。In the above solution, the upper cover entity is welded to the base.
上述方案中，所述薄膜片与所述外壳通过焊接固定连接。In the above solution, the membrane sheet is fixedly connected to the housing by welding.
上述方案中，所述上盖实体的顶部中心设有抽气口。In the above solution, the top center of the upper cover entity is provided with an air suction port.
与现有技术相比，本发明的有益效果是：Compared with prior art, the beneficial effect of the present invention is:
本发明中提供的真空规管中，薄膜片作为可变电极，镀有主电极的陶瓷极板作为固定电极，二者组成可变电容器，薄膜片在其两侧真空空间和被测空间的气压差下发生形变而产生电容的变化，由电极柱接入的外部电容测量电路将电容变化转换为电信号，从而测量出被测空间的真空度；本发明中采用石英材料的薄膜片作为可变电极，具有应力次数高、稳定性高的优点。In the vacuum gauge provided in the present invention, the film is used as a variable electrode, and the ceramic plate coated with the main electrode is used as a fixed electrode. The two form a variable capacitor. The pressure of the vacuum space on both sides of the film and the measured space The capacitance changes due to deformation under the difference, and the external capacitance measurement circuit connected by the electrode column converts the capacitance change into an electrical signal, thereby measuring the vacuum degree of the measured space; in the present invention, a thin film of quartz material is used as a variable The electrode has the advantages of high stress times and high stability.
附图说明Description of drawings
图1为本发明实施例提供的真空规管的结构示意图。Fig. 1 is a schematic structural diagram of a vacuum gauge provided by an embodiment of the present invention.
图2为本发明实施例提供的真空规管的剖视图。Fig. 2 is a cross-sectional view of the vacuum gauge provided by the embodiment of the present invention.
具体实施方式Detailed ways
为了更好的理解上述技术方案，下面将结合说明书附图以及具体的实施方式对上述技术方案进行详细的说明。In order to better understand the above-mentioned technical solution, the above-mentioned technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.
如图1和图2所示，本发明实施例提供一种石英薄膜片真空规管，包括：外壳，所述外壳的材质为哈氏合金；所述外壳包括上盖实体1和底座2，所述上盖实体1和底座2焊接连接；所述底座2上设有底座延伸气孔3；薄膜片4，所述薄膜片4的材质为石英材料，所述薄膜片4通过焊接固定设置在所述外壳内部，并将所述外壳内部空间分为真空空间和被测空间；所述薄膜片4的厚度为120微米，所述薄膜片4表面镀有一层厚的镀金；陶瓷极板5，所述陶瓷极板5固定设置在所述真空空间内，所述陶瓷极板5与所述薄膜片4平行相对的那一表面设有一片金属片；所述陶瓷极板5上设有过孔，所述过孔将所述金属片的电信号引入所述陶瓷极板的上表面；第一电极柱6，所述第一电极柱6一端与外部电容测量电路相接，另一端穿过所述外壳在所述真空空间与所述陶瓷极板5的上表面相接；第二电极柱7，所述第二电极柱7一端与所述外部电容测量电路相连，另一端穿过所述外壳在所述真空空间内与所述薄膜片4表面的镀金焊接；其中，所述薄膜片4作为可变电极，所述陶瓷极板5作为固定电极，所述可动电极与所述固定电极组成一可变电容器。As shown in Figures 1 and 2, an embodiment of the present invention provides a vacuum gauge for a quartz thin film, including: a housing, the material of which is Hastelloy; the housing includes an upper cover entity 1 and a base 2, the The upper cover entity 1 and the base 2 are welded and connected; the base 2 is provided with a base extending air hole 3; a film sheet 4, the material of the film sheet 4 is quartz material, and the film sheet 4 is fixedly arranged on the described film sheet 4 by welding. The inside of the shell, and the internal space of the shell is divided into a vacuum space and a measured space; the thickness of the thin film 4 is 120 microns, and the surface of the thin film 4 is coated with a layer of Thick gold plating; ceramic pole plate 5, said ceramic pole plate 5 is fixedly arranged in said vacuum space, said ceramic pole plate 5 is provided with a sheet of metal on the surface parallel to said film sheet 4; The ceramic pole plate 5 is provided with a via hole, and the via hole introduces the electric signal of the metal sheet into the upper surface of the ceramic pole plate; the first electrode column 6, one end of the first electrode column 6 is connected to the external capacitance measurement The circuit is connected, and the other end passes through the shell and connects with the upper surface of the ceramic pole plate 5 in the vacuum space; the second electrode column 7, one end of the second electrode column 7 is connected to the external capacitance measurement circuit The other end passes through the shell and is welded with the gold plating on the surface of the membrane sheet 4 in the vacuum space; wherein, the membrane sheet 4 is used as a variable electrode, and the ceramic plate 5 is used as a fixed electrode. The movable electrode and the fixed electrode form a variable capacitor.
本实施例中，所述上盖实体1顶部设有顶部延伸腔体9，所述顶部延伸腔体9与所述真空空间相连通，所述顶部延伸腔体9内装有吸气剂，用于吸收所述真空空间中的残余气体，确保真空空间的真空度，并防止真空焊接时材料的漏气。In this embodiment, the top of the upper cover entity 1 is provided with a top extension cavity 9, the top extension cavity 9 communicates with the vacuum space, and the top extension cavity 9 is equipped with a getter for Absorb the residual gas in the vacuum space, ensure the vacuum degree of the vacuum space, and prevent material leakage during vacuum welding.
本实施例中，所述上盖实体1的顶部中心还设有抽气口8，用于将外壳内的真空空间抽真空。In this embodiment, the top center of the upper cover entity 1 is also provided with an air extraction port 8 for evacuating the vacuum space in the casing.
本实施例在用于测量真空度时，将真空规管的底座延伸气孔2伸入待测的腔体中，待测气体通过底座延伸气孔2进入外壳内的被测空间，薄膜片在两侧两个空间的气压差下产生形变，进而产生电容的变化，由电极柱接入的外部电容测量电路将采集到的电容变化转换为电信号，再通过运算放大器将电信号放大，经过A/D转换后进行数字信号处理，最终得到待测真空度空间的真空度的结果显示。When this embodiment is used to measure the degree of vacuum, the base extension air hole 2 of the vacuum gauge is inserted into the cavity to be measured, and the gas to be measured enters the measured space in the housing through the base extension air hole 2, and the film is on both sides. Under the air pressure difference between the two spaces, deformation occurs, which in turn produces a change in capacitance. The external capacitance measurement circuit connected to the electrode column converts the collected capacitance change into an electrical signal, and then amplifies the electrical signal through an operational amplifier, and passes through the A/D After the conversion, digital signal processing is carried out, and finally the result display of the vacuum degree of the vacuum degree space to be measured is obtained.
本发明的优点如下：The advantages of the present invention are as follows:
1、本发明中的薄膜片采用石英材质，具有应力次数高、耐高温、热膨胀系数低、稳定性高等优点。1. The film sheet in the present invention is made of quartz material, which has the advantages of high stress times, high temperature resistance, low thermal expansion coefficient, and high stability.
2、本发明中的外壳结构具有减震功能，能防止石英薄膜片破损。2. The shell structure in the present invention has a shock-absorbing function and can prevent damage to the quartz film.
3、本发明中的薄膜片上的一层镀金，不但实现可以实现与第二电极柱的电连接，还可以防止漏气。3. A layer of gold plating on the thin film of the present invention not only realizes the electrical connection with the second electrode column, but also prevents air leakage.
以上所述的具体实施例，对本发明的目的、技术方案和有益效果进行了进一步详细说明，所应理解的是，以上所述仅为本发明的具体实施例而已，并不用于限制本发明，凡在本发明的精神和原则之内，所做的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。The specific embodiments described above have further described the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above descriptions are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.
Claims (8)
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610832513.8A CN107843384A (en) | 2016-09-19 | 2016-09-19 | Vacuum gauge tube for quartz film sheet |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610832513.8A CN107843384A (en) | 2016-09-19 | 2016-09-19 | Vacuum gauge tube for quartz film sheet |
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| CN110702301A (en) * | 2019-11-19 | 2020-01-17 | 川北真空科技(北京)有限公司 | A thin film vacuum gauge |
| CN114459670A (en) * | 2022-04-12 | 2022-05-10 | 季华实验室 | A capacitive film vacuum gauge |
| CN115386856A (en) * | 2022-10-19 | 2022-11-25 | 季华实验室 | Diamond thin film capacitor, manufacturing method thereof, vacuum gauge and manufacturing method thereof |
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Application publication date: 20180327 |