CN107829070A - Conductive structure and heating evaporation component - Google Patents

Abstract

The invention discloses a heat conduction structure, which comprises several heat conduction tubes, each of which is a tubular body with a hollow interior and an opening, and the outer walls of the plurality of heat conduction tubes are bonded and fixed to each other, and bonded together The cross-sectional shape in the radial direction of the plurality of heat pipes is a grid shape. The present invention also provides a heating evaporation component, including a crucible and the above-mentioned heat conduction structure, the shape and size of the heat conduction structure matches the crucible, the heat conduction structure is arranged in the crucible, and the outermost surface of the heat conduction structure The outer wall of the heat pipe is in contact with the inner wall of the crucible. The heat conduction structure and heating evaporation component provided by the present invention use multiple heat conduction tubes to form a heat conduction structure to form multiple sub-evaporators, which can reduce the interference between sub-evaporators, and can also quickly transfer the heat of the crucible wall adjacent to the heating source. The inside of the conductive crucible promotes the uniformity of the temperature field in the non-equilibrium state.

Description

Heat conduction structure and heating and evaporating components

technical field

The invention relates to the field of coating equipment, more specifically, to a heat conduction structure and a heating evaporation component.

Background technique

Evaporation coating is one of the technologies of vacuum PVD coating. Evaporation coating equipment is usually divided into vacuum chamber, vacuum acquisition system, thermal evaporation system, and electric control system. The thermal evaporation system consists of an evaporation container (evaporation crucible, evaporation boat, etc.), a resistance wire heater or other heating devices, a heat shielding system, and a heating temperature control system. The process puts the evaporation raw material in the crucible, and uses the heating mode in the vacuum environment to cause the coating raw material to undergo a solid-liquid-gas phase transition process. The evaporation raw material is heated above the melting point to generate evaporated gas at the liquid surface or directly evaporate from the solid state in the sublimation mode. Gas, which is ejected from the opening of the crucible or from the nozzle. The evaporated gas encounters a relatively low-temperature substrate in the vacuum chamber, and deposits on the surface of the substrate to form a thin film. Elemental thin films can be formed by evaporation process, and compound thin films can also be realized by co-evaporation. In practical production, evaporation coating can be divided into point source thermal evaporation, line source thermal evaporation, electron beam evaporation and so on.

During the thermal evaporation coating process, the resistance heater is usually placed on the side or bottom of the crucible (line source evaporation also needs to arrange heaters around the nozzle and nozzle). In theory, although the interior of the thermal field can be made to belong to a nearly closed thermal isolation system through multi-layer shielding, after a long time of preheating, the evaporation material can reach thermal equilibrium. However, since the evaporation process must set openings or nozzles to lead the evaporated raw material gas out of the heating area to erupt and reach the coating surface to realize the evaporation coating function, the actual process is in a non-thermal equilibrium state. There will be short-term temperature unevenness between the position, the position away from the heating source, and the position near the evaporating liquid surface. This temperature inhomogeneity can easily lead to boiling phenomenon, that is, bubbles are generated locally in the solution, rising to damage the liquid surface, and small droplets are likely to be splashed out of the crucible or nozzle structure in the process. The splashed droplets splash on the coating surface, which will cause serious quality damage to the coating surface. This splashing phenomenon is more serious in liquid evaporation process with poor thermal conductivity, large evaporation process and relatively large evaporation crucible structure.

Contents of the invention

The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a heat conduction structure capable of maintaining uniform distribution of temperature.

In order to achieve the above object, the present invention adopts the following technical solutions:

A heat conduction structure, comprising several heat conduction tubes, each of which is a tubular body with a hollow interior and an opening, the outer walls of the plurality of heat conduction tubes are attached and fixed to each other, and the said heat conduction tubes are attached and fixedly connected together The cross-sectional shapes in the radial direction of the plurality of heat pipes are in the shape of a grid.

Preferably, one end of each of the heat pipes is provided with the opening, and the ends of the several heat pipes provided with the opening are arranged flush with each other.

Preferably, both ends of each of the heat pipes are provided with the openings, and the two ends of the plurality of heat pipes are respectively flush.

Preferably, the cross-sectional shape of each of the heat pipes in the radial direction is any one of circular, quadrangular or hexagonal.

Preferably, the material of the heat pipe is at least one of copper, gold, silver, tantalum, molybdenum, tungsten, graphite, quartz, aluminum oxide, carbon fiber, pyrolytic boron nitride and silicon carbide.

The present invention also provides a heating evaporation assembly, including a crucible and any one of the above heat conduction structures, the shape and size of the heat conduction structure matches the crucible, the heat conduction structure is arranged in the crucible, and the heat conduction structure The outer wall of the heat pipe at the outermost structure is in contact with the inner wall of the crucible.

Preferably, the height of the heat conducting structure is one-third to four-fifths of the height of the crucible.

The heat conduction structure and heating evaporation component provided by the present invention use multiple heat conduction tubes to form a heat conduction structure to form multiple sub-evaporators. On the one hand, it can reduce the interference between the sub-evaporators. The heat of the crucible wall is quickly conducted to the inside of the crucible, which promotes the uniformity of the temperature field in the non-equilibrium state.

Description of drawings

FIG. 1 is a schematic diagram of a heat pipe according to an embodiment of the present invention.

FIG. 2 is a schematic diagram of a heat conduction structure of an embodiment of the present invention.

Fig. 3 is a schematic diagram of a heating and evaporating component according to an embodiment of the present invention.

Detailed ways

In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

As shown in FIG. 1, the heat conduction structure in this embodiment can be used in the field of evaporation coating. The heat conduction structure 30 includes several heat conduction pipes 10, wherein each heat conduction pipe 10 is a tubular body with a hollow interior and an opening 11. Several heat conduction pipes The outer walls 12 of 10 are bonded and fixed to each other to form a heat conduction structure 30 , and the cross-sectional shape in the radial direction of several heat pipes 10 bonded and fixed together is a grid shape. The heat pipe 10 is used to accommodate the material to be evaporated, and each heat pipe 10 is equivalent to a sub-evaporator. On the one hand, the isolation effect of the tube wall of the heat pipe 10 reduces the mutual disturbance between each sub-evaporator, and reduces the large range of convective disturbance, on the other hand, because the heat conduction tubes 10 are mutually thermally conductive, the heat of the crucible wall and bottom near the heating source can be quickly transferred to the inside of the crucible so that the heat of the crucible wall and bottom near the heating source can be The rapid conduction to the inside of the crucible and near the liquid surface promotes the uniformity of the temperature field in the non-equilibrium state. , to promote the uniformity of the temperature field in the non-equilibrium state.

Specifically, one end of each heat pipe 10 is provided with an opening 11 and the other end is closed, and one end of several heat pipes 10 with openings 11 is arranged flush, that is, the openings 11 of each heat pipe 10 are facing the same direction, and the opening 11 can be passed through. The material to be evaporated is assembled into the heat pipe 10 . Of course, in other embodiments, openings 11 are provided at both ends of each heat pipe 10 , and the two ends of several heat pipes 10 are respectively aligned.

As a preferred embodiment, the cross-sectional shape of the heat pipe 10 in the radial direction is circular, and correspondingly, the cross-sectional shape of the heat-conducting structure 30 formed by a plurality of heat pipes 10 closely fitting and connecting is roughly circular. Of course, in other embodiments, the cross-sectional shape of the heat pipe 10 in the radial direction can also be triangular, quadrilateral, and hexagonal, etc. .

Further, the heat pipes 10 are fixedly connected by welding.

Specifically, when selecting the material for the heat pipe 10, consider thermal conductivity, heat resistance, material compatibility, vacuum applicability, coefficient of thermal expansion, wettability with the evaporated solution, and ease of processing, so the material of the heat pipe 10 can be Choose metals with good thermal conductivity such as copper, gold, silver, tantalum, molybdenum, tungsten, etc.; or ceramic materials with strong corrosion resistance such as high-purity graphite, high-purity quartz, high-purity alumina, carbon fiber, pyrolytic boron nitride, carbonized silicon etc. Of course, metal and ceramics can also be combined to form a composite material. For example, metal is used to prepare the heat pipe 10, and a layer of ceramic film is formed on the surface of the heat pipe 10 by a coating process of vapor deposition; or a ceramic material is used to prepare the heat pipe 10. The coating process forms a metal thin film on the surface of the heat pipe 10 .

As shown in FIG. 2 , the present invention also discloses a heating and evaporating assembly. The heating and evaporating assembly includes a crucible 20 and the above-mentioned heat conducting structure 30. The shape and size of the heat conducting structure 30 match the crucible 20. The main body of the crucible 20 in this embodiment is A cylindrical structure with one end closed and the other open, the heat conduction structure 30 is arranged in the crucible 20, and the outer wall 12 of the heat conduction tube 10 at the outermost edge of the heat conduction structure 30 is in contact with the inner wall of the crucible 20, so that the heat of the side wall of the crucible 20 The heat conduction can be conducted quickly from the heat conduction pipe 10 of the outer circle to the heat conduction pipe 10 of the inner circle, so that the heat conduction structure 30 as a whole is evenly heated. In addition, the opening 11 of the heat pipe 10 faces the open end of the crucible body, and the heated and evaporated material is ejected from the opening 11 .

Further, the height of the heat conduction structure 30 matches the charging capacity of the crucible 20, specifically, the height of the heat conduction structure 30 is set to one-third to four-fifths of the height of the crucible 20, as a preferred embodiment, the height of the heat conduction structure 30 Set as two-thirds of the height of the crucible 20 .

In other embodiments, the main body of the crucible 20 can also be in other shapes, such as a rounded frustum whose diameter decreases from the upper end to the lower end. At this time, the heat conduction structure 30 can be composed of several heat conduction tubes 10 with different heights. The heat conduction tubes 10 located inside The heights to the heat conduction tubes 10 located on the outer ring decrease successively, and the upper end surfaces of each heat conduction tube 10 are even, so that the heat conduction structure 30 is roughly rounded and truncated.

The heat conduction structure and heating evaporation component provided by the present invention use multiple heat conduction tubes to form a heat conduction structure to form multiple sub-evaporators. On the one hand, it can reduce the interference between the sub-evaporators. The heat of the crucible wall is quickly conducted to the inside of the crucible, which promotes the uniformity of the temperature field in the non-equilibrium state.

The specific embodiments of the present invention have been described in detail above. Although some embodiments have been shown and described, those skilled in the art should understand that without departing from the principle and spirit of the present invention whose scope is defined by the claims and their equivalents Under the circumstances, these embodiments can be modified and improved, and these modifications and improvements should also be within the protection scope of the present invention.

Claims (8)

1. A heat-conducting structure, characterized in that, comprising several heat-conducting pipes (10), each of said heat-conducting pipes (10) is a hollow tubular body having an opening (11), said several heat-conducting pipes (10) The outer walls (12) of ) are attached and fixed to each other, and the cross-sectional shape in the radial direction of the plurality of heat pipes (10) attached and fixed together is a grid shape. 2. The heat conduction structure according to claim 1, characterized in that, one end of each heat conduction pipe (10) is provided with the opening (11), and the openings of the several heat conduction pipes (10) have One end of the opening (11) is set flush. 3. The heat conduction structure according to claim 1, characterized in that, the openings (11) are provided at both ends of each of the heat conduction pipes (10), and the two ends of the plurality of heat conduction pipes (10) ends are even. 4. The heat conduction structure according to claim 2 or 3, characterized in that, the cross-sectional shape in the radial direction of each of the heat conduction pipes (10) is any one of a circle, a quadrangle or a hexagon. 5. The heat conduction structure according to claim 2 or 3, characterized in that, the plurality of heat conduction pipes (10) are fixed by welding. 6. The heat conduction structure according to claim 1, characterized in that, the material of the heat conduction pipe (10) is copper, gold, silver, tantalum, molybdenum, tungsten, graphite, quartz, alumina, carbon fiber, pyrolytic nitrogen at least one of boron carbide and silicon carbide. 7. A heating evaporation assembly, characterized in that it comprises a crucible (20) and the heat conduction structure (30) according to any one of claims 1 to 6, the shape and size of the heat conduction structure (30) is the same as that of the crucible ( 20) matching, the heat conduction structure (30) is arranged in the crucible (20), and the outer wall (12) of the heat conduction tube (10) at the outermost periphery of the heat conduction structure (30) is in contact with the crucible (20) ) in contact with the inner wall. 8. The heating evaporation assembly according to claim 7, characterized in that, the height of the heat conducting structure (30) is one-third to four-fifths of the height of the crucible (20).