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CN107727233B - Spectrograph - Google Patents

Spectrograph Download PDF

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Publication number
CN107727233B
CN107727233B CN201711025176.2A CN201711025176A CN107727233B CN 107727233 B CN107727233 B CN 107727233B CN 201711025176 A CN201711025176 A CN 201711025176A CN 107727233 B CN107727233 B CN 107727233B
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China
Prior art keywords
mirror
grating
concave
ccd
reflecting mirror
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CN201711025176.2A
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CN107727233A (en
Inventor
康建梅
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Zolix Instruments Co ltd
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Zolix Instruments Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/40Measuring the intensity of spectral lines by determining density of a photograph of the spectrum; Spectrography

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

The invention provides a spectrograph, and relates to the technical field of spectrum analysis. The spectrograph comprises a first concave reflecting mirror, a plane reflecting mirror, a dichroic mirror, a first grating, a second concave reflecting mirror, a first CCD, a second grating, a third concave reflecting mirror and a second CCD; after the incident light is collimated by the first concave reflecting mirror, the incident light is reflected to the dichroic mirror by the plane reflecting mirror; the short wave infrared band light reaching the dichroic mirror is transmitted through the dichroic mirror, projected to the first grating, diffracted by the first grating, reaches the second concave reflecting mirror, and reflected to the first CCD by the second concave reflecting mirror; the ultraviolet visible near infrared band light reaching the dichroic mirror is reflected to the second grating through the dichroic mirror, and after being diffracted by the second grating, reaches the third concave mirror, and is reflected to the second CCD through the third concave mirror.

Description

Spectrograph
Technical Field
The invention relates to the technical field of spectrum analysis, in particular to a spectrograph.
Background
In atomic emission spectrometry, a light source is used to split the composite light into spectral lines with different wavelengths after a sample is excited, and the spectral lines are recorded by a photosensitive plate. In the field of optical research, spectrographs are widely used. There are many small focal length spectrometers on the market in the Original Equipment Manufacturer (OEM) version, the band range of which has ultraviolet visible (UV-VIS) band and visible near infrared (VIS-NIR) band, but spectrometers with a spectrum range covering the ultraviolet short wave infrared (UV-SWIR) band are also difficult to realize. Although manufacturers continue to push out UV-SWIR spectrographs in recent years, the optical elements adopted in the scheme have high processing difficulty coefficients and high cost, and cannot achieve the effect of mass production.
For example, as shown in fig. 1, a UV-SWIR spectrograph currently being commercially available has an incident light 101 reaching a spherical collimator 103 through a slit member 102; after being collimated and projected by the spherical collimating mirror 103, the light is reflected to the dichroic mirror 104 by the back surface of the slit component 102; at the dichroic mirror 104, the light 105 of the short-wave infrared light passes through the dichroic mirror 104, the short-wave infrared grating 106 and a group of first refractive lens groups 107 and then is converged on the short-wave infrared focal plane detector 108; while at the dichroic mirror 104, near infrared and visible band light 109 is reflected by the dichroic mirror 104, passes through a visible near infrared grating 110 and a set of second refractive lenses 111, and is focused on a visible near infrared focal plane detector 112. The spectrograph solution shown in fig. 1 suffers from a number of drawbacks, such as: ① The slit part 102 needs to be perforated in the center position, and a high reflection film needs to be plated on the back surface, so that the processing difficulty is high and the cost is high; ② The short-wave infrared grating 106 and the visible near infrared grating 110 generally adopt a transmission grating mode, and the transmission grating has higher processing difficulty; ③ The spectrograph shown in fig. 1 adopts a transmission light path structure, has wide spectrum input and large chromatic aberration, and needs to adopt achromatic lens groups such as the first refractive lens group 107 and the second refractive lens group 111, thereby increasing the cost of components.
It can be seen that the implementation of the UV-SWIR spectrograph in the prior art requires a relatively high level of processing difficulty and cost.
Disclosure of Invention
The embodiment of the invention provides a spectrograph to solve the problems of high difficulty in required processing technology and high cost in the implementation of a UV-SWIR spectrograph in the prior art.
In order to achieve the above purpose, the invention adopts the following technical scheme:
A spectrograph comprises a first concave reflector, a plane reflector, a dichroic mirror, a first grating, a second concave reflector, a first CCD, a second grating, a third concave reflector and a second CCD;
After the incident light is collimated by the first concave reflecting mirror, the incident light is reflected to the dichroic mirror by the plane reflecting mirror;
the short wave infrared band light reaching the dichroic mirror is transmitted through the dichroic mirror, projected to the first grating, diffracted by the first grating, reaches the second concave reflecting mirror, and reflected to the first CCD by the second concave reflecting mirror;
The ultraviolet visible near infrared band light reaching the dichroic mirror is reflected to the second grating through the dichroic mirror, and after being diffracted by the second grating, reaches the third concave mirror, and is reflected to the second CCD through the third concave mirror.
Specifically, the first grating and the second grating are plane reflection gratings.
Specifically, the first CCD and the second CCD are scientific research grade refrigeration type CCD.
Specifically, the first concave mirror, the plane mirror, the dichroic mirror, the first grating, the second concave mirror, the first CCD, the second grating, the third concave mirror and the second CCD are packaged in a whole machine packaging structure.
The spectrograph provided by the embodiment of the invention adopts a classical reflection type C-T structure, namely, the first concave reflecting mirror and the second concave reflecting mirror are respectively used as a collimating mirror and an imaging mirror, the first grating is used as a dispersion element, the first concave reflecting mirror and the third concave reflecting mirror are respectively used as a collimating mirror and an imaging mirror, and the second optical grating is used as a dispersion element, so that the structure of the spectrograph is simple, the cost can be effectively controlled, the processing difficulty of an optical element is reduced, and the problem of higher cost caused by adopting an achromatic lens group to eliminate chromatic aberration scheme is avoided. Meanwhile, the first grating, the second concave reflecting mirror, the first CCD (charge coupled device) and the second grating, the third concave reflecting mirror and the second CCD are combined to form a spectrometer structure with the same two sides, the dichroic mirror is matched for splitting light, and the first grating and the second light of the two wave bands are matched for deleting light, so that wide spectrum shooting can be realized under the condition of not changing resolution.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained according to these drawings without inventive faculty for a person skilled in the art.
FIG. 1 is a schematic diagram of a prior art UV-SWIR spectrometer;
FIG. 2 is a schematic diagram of a spectrograph according to an embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 2, an embodiment of the present invention provides a spectrograph 20, which includes a first concave mirror 201, a planar mirror 202, a dichroic mirror 203, a first grating 204, a second concave mirror 205, a first CCD206, a second grating 207, a third concave mirror 208, and a second CCD209. Among them, a CCD (Charge-Coupled Device) is a detection element, or called a Charge Coupled element.
As shown in fig. 2, the incident light 30 (whose wavelength band ranges from 300nm to 1700 nm) is collimated by the first concave mirror 201, and then reflected by the plane mirror 202 to the dichroic mirror 203.
The incident light 30 can be divided into short wave infrared band light (i.e., UV-SWIR in the band range of 1050nm to 1700 nm) and ultraviolet visible near infrared band light (i.e., UV-VIS and VIS-NIR in the band range of 300nm to 1050 nm).
Thus, the short-wave infrared band light reaching the dichroic mirror passes through the dichroic mirror 203, is projected onto the first grating 204, is diffracted by the first grating 204, reaches the second concave mirror 205, and is reflected by the second concave mirror 205 to the first CCD 206.
The light in the uv-vis near-ir band reaching the dichroic mirror is reflected by the dichroic mirror 203 to the second grating 207, diffracted by the second grating 207, reaches the third concave mirror 208, and is reflected by the third concave mirror 208 to the second CCD 209.
In this way, the signals obtained by the first CCD206 and the second CCD209 are subjected to data processing, and the signals obtained by the two CCDs are combined, so that a broad spectrum test can be implemented, and the specific process is not described here.
It should be noted that, in the embodiment of the present invention, the transmittance of the dichroic mirror 203 for light with the wavelength range of 1050nm to 1700nm may reach 90%, and the reflectance for light with the wavelength range of 300nm to 1050nm may reach 90%, and the dichroic mirror 203 may improve the light flux of the full-band spectrum.
Specifically, the first grating 204 and the second grating 207 are planar reflection gratings. So that the first concave mirror and the second concave mirror serve as a collimating mirror and an imaging mirror, respectively, and the first grating serves as a dispersive element to form a classical reflective C-T structure (Czerny-Turner, cherni-Turner optical path structure). The first concave reflecting mirror and the third concave reflecting mirror are respectively used as a collimating mirror and an imaging mirror, the second optical grating is used as a dispersion element, and a classical reflection type C-T structure is formed, so that the spectrograph has a simple structure, the cost can be effectively controlled, and the signal to noise ratio of the spectrograph is improved.
Specifically, the first CCD206 and the second CCD209 are scientific research grade refrigeration CCDs. The scientific research-grade refrigeration type CCD can reduce the temperature of a CCD chip, so that the CCD chip is very suitable for acquiring very weak light images, and the overall signal-to-noise ratio of a spectrograph is improved.
Specifically, as shown in fig. 2, the first concave mirror 201, the planar mirror 202, the dichroic mirror 203, the first grating 204, the second concave mirror 205, the first CCD206, the second grating 207, the third concave mirror 208, and the second CCD209 are packaged in a complete package structure 210. Through the whole machine packaging structure 210, the problem that two relatively independent spectrometers respectively belonging to the first CCD206 and the second CCD209 are separated and inconvenient in use can be avoided.
The spectrograph provided by the embodiment of the invention adopts a classical reflection type C-T structure, namely, the first concave reflecting mirror and the second concave reflecting mirror are respectively used as a collimating mirror and an imaging mirror, the first grating is used as a dispersion element, the first concave reflecting mirror and the third concave reflecting mirror are respectively used as a collimating mirror and an imaging mirror, and the second optical grating is used as a dispersion element, so that the structure of the spectrograph is simple, the cost can be effectively controlled, the processing difficulty of an optical element is reduced, and the problem of higher cost caused by adopting an achromatic lens group to eliminate chromatic aberration scheme is avoided. Meanwhile, the first grating, the second concave reflecting mirror, the first CCD (charge coupled device) and the second grating, the third concave reflecting mirror and the second CCD are combined to form a spectrometer structure with the same two sides, the dichroic mirror is matched for splitting light, and the first grating and the second light of the two wave bands are matched for deleting light, so that wide spectrum shooting can be realized under the condition of not changing resolution. Thus, the embodiment of the invention can realize a compact high-resolution wide-spectrum spectrograph.
The principles and embodiments of the present invention have been described in detail with reference to specific examples, which are provided to facilitate understanding of the method and core ideas of the present invention; meanwhile, as those skilled in the art will have variations in the specific embodiments and application scope in accordance with the ideas of the present invention, the present description should not be construed as limiting the present invention in view of the above.

Claims (4)

1. The spectrograph is characterized by comprising a first concave reflecting mirror, a plane reflecting mirror, a dichroic mirror, a first grating, a second concave reflecting mirror, a first CCD, a second grating, a third concave reflecting mirror and a second CCD;
After the incident light is collimated by the first concave reflecting mirror, the incident light is reflected to the dichroic mirror by the plane reflecting mirror;
the short wave infrared band light reaching the dichroic mirror is transmitted through the dichroic mirror, projected to the first grating, diffracted by the first grating, reaches the second concave reflecting mirror, and reflected to the first CCD by the second concave reflecting mirror;
The ultraviolet visible near infrared band light reaching the dichroic mirror is reflected to the second grating through the dichroic mirror, and after being diffracted by the second grating, reaches the third concave mirror, and is reflected to the second CCD through the third concave mirror.
2. The spectrograph of claim 1, wherein the first grating and the second grating are both planar reflective gratings.
3. The spectrograph of claim 1, wherein the first and second CCDs are scientific grade refrigeration CCDs.
4. The spectrograph of claim 1, wherein the first concave mirror, the planar mirror, the dichroic mirror, the first grating, the second concave mirror, the first CCD, the second grating, the third concave mirror, and the second CCD are packaged in a single package.
CN201711025176.2A 2017-10-27 2017-10-27 Spectrograph Active CN107727233B (en)

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CN111811650B (en) * 2020-07-29 2024-08-16 中国科学院西安光学精密机械研究所 C-T type structure imaging system based on holographic concave grating

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CN207366081U (en) * 2017-10-27 2018-05-15 北京卓立汉光仪器有限公司 Spectrograph

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US5394237A (en) * 1992-11-10 1995-02-28 Geophysical & Enviromental Research Corp. Portable multiband imaging spectrometer
JP2008510964A (en) * 2004-08-19 2008-04-10 ヘッドウォール フォトニクス,インコーポレイテッド Multichannel, multispectral imaging spectrometer
US7330258B2 (en) * 2005-05-27 2008-02-12 Innovative Technical Solutions, Inc. Spectrometer designs
CN101551272A (en) * 2009-05-22 2009-10-07 中国科学院上海技术物理研究所 Double-spectral convex spherical imaging spectrometer
US9291501B2 (en) * 2012-07-26 2016-03-22 Raytheon Company High efficiency multi-channel spectrometer
CN103557940A (en) * 2013-10-24 2014-02-05 杭州远方光电信息股份有限公司 Spectrograph
CN104501956B (en) * 2014-12-30 2016-07-13 华中科技大学 An ultra-broadband image correlation detection device and detection method
KR20160143969A (en) * 2015-06-05 2016-12-15 한국항공우주연구원 Spectroscopic instrument using plane mirror and lens

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