CN107703329A - Vacuum holding structure for high-resolution quartz flexible accelerometer - Google Patents
Vacuum holding structure for high-resolution quartz flexible accelerometer Download PDFInfo
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- CN107703329A CN107703329A CN201710905553.5A CN201710905553A CN107703329A CN 107703329 A CN107703329 A CN 107703329A CN 201710905553 A CN201710905553 A CN 201710905553A CN 107703329 A CN107703329 A CN 107703329A
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- magnetic
- magnetic conduction
- conductive cover
- guiding loop
- permanent magnet
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- 239000010453 quartz Substances 0.000 title claims abstract description 40
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 40
- 230000005291 magnetic effect Effects 0.000 claims abstract description 115
- 238000003466 welding Methods 0.000 claims abstract description 15
- 235000014676 Phragmites communis Nutrition 0.000 claims abstract description 10
- 125000004122 cyclic group Chemical group 0.000 claims description 4
- 238000013461 design Methods 0.000 abstract description 6
- 239000000203 mixture Substances 0.000 abstract description 3
- 238000010276 construction Methods 0.000 abstract description 2
- 230000001133 acceleration Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 238000010943 off-gassing Methods 0.000 description 4
- 230000005484 gravity Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000010358 mechanical oscillation Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000000649 photocoagulation Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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Abstract
The present invention relates to a kind of vacuum holding structure for high-resolution quartz flexible accelerometer, including upper, lower magnetic guiding loop part, put part and connection ring, part is put by quartz pendulous reed, torquer coil and coil rack composition, on, lower magnetic guiding loop part is by magnetic guiding loop, cylindrical permanent magnet, magnetic conductive cover and magnetic conduction base composition, the bottom of magnetic guiding loop is coaxially mounted on magnetic conductive cover, the central coaxial of the magnetic conductive cover is made one and raised up and downward opening groove, the inside of the groove from top to bottom sequentially coaxially sets cylindrical permanent magnet and magnetic conduction base, the magnetic conduction base forms the cavity of closing together with magnetic conductive cover laser seal welding；Magnetic conduction ring component is installed using coaxial mirror image in pairs, and, pendulum part is fixedly mounted with therebetween by connection ring laser seal welding together.The present invention on existing quartz flexible accelerometer architecture basics by improving magnetic guiding loop modular construction, increase laser welded seal designs, and keeps the vacuum inside accelerometer, keeps stability of the accelerometer resolution ratio with the time.
Description
Technical field
The invention belongs to sensor technical field, especially a kind of vacuum for high-resolution quartz flexible accelerometer
Holding structure is a kind of suitable for high-resolution navigation system and the accelerometer measures element of gravity gradient instrument system.
Background technology
Quartz flexible accelerometer is a kind of sensor of differential capacitance type closed-loop high-precision, earliest by the gloomy Si Tan in the U.S.
Company succeeds in developing in nineteen seventies, and concrete structure has a detailed description in United States Patent (USP) (patent No. 4250757), it
Watch core structure as shown in Figure 1 and Figure 2, be domestic inertial navigation measurement at present and structure that guidance system generally uses be most simple
High-precision accelerometer.Fig. 1 is common quartz flexible accelerometer three-dimensional explosive view, and Fig. 2 is that common quartz flexible accelerates
Degree counts two-dimentional axle sectional view.It includes upper and lower magnetic conduction ring component 10, pendulum part 20 and connection ring 30.Magnetic guiding loop 11, cylinder are forever
Magnet 12, magnetic conduction cap 13 form magnetic conduction ring component 10.Quartz pendulous reed 21, torquer coil 22 and the composition pendulum part of coil rack 23
20.Magnetic conduction ring component 10 is installed using coaxial mirror image in pairs, cementing or spot welding 31 links together by connection ring 30, is led two
Pendulum part 20 is fixedly mounted between magnet ring part 10.
Quartz flexible accelerometer operation principle is：When product has the acceleration effect along sensitive direction of principal axis, due to not having
There is bonding force effect, quartz pendulous reed keeps original motion state, therefore relatively upper and lower torquer produces displacement, makes both sides flat board
Electric capacity forms capacitance difference.Differential capacitance sensor sensitivity arrives capacitance difference, produces an electric current proportional to capacitance difference.Electric current passes through
It is carried in after the processing such as servo circuit filtering, integration, amplification on torquer coil, current-carrying torquer coil is by torquer magnetic
Effect produce one with input acceleration direction identical electromagnetic force F, flexible quartz pendulous reed is returned to equilbrium position (both sides
Electric capacity is equal).Now the torque current in torquer coil reflects the size and Orientation of acceleration, detects on torquer coil
Electric current can calculate input acceleration, realize the measurement of acceleration.
High-resolution navigation system, gravity gradiometer system requirements accelerometer have the high-resolution of high stability, this
Require to keep condition of high vacuum degree inside quartz flexible accelerometer for a long time, make quartz pendulous reed work around without sink-float particle or
Molecule, the Brownian movement of particle or molecule is reduced to hitting the disturbance torque or thermal noise that bring to quartz pendulous reed.Reduce simultaneously
The mass change for the detection quality that particle erosion is brought.
The quartz flexible accelerometer main limitation of prior art exists：A vacuum is internally formed after accelerometer assembling
Cavity, cavity edge have certain leak rate using cementing, while internal different materials have the outgassing rate not waited, acceleration
Degree meter internal vacuum can deteriorate under long-term condition of work, can not keep for a long time.Table 1 is that high-resolution quartz flexible adds
Speedometer internal material outgassing rate contrasts.
The quartz flexible accelerometer internal material outgassing rate of table 1 contrasts
The maximum material of outgassing rate is powder metallurgy permanent magnet inside high-resolution quartz flexible accelerometer, seam be present
Gap and porosity, keep gas, can not exclude during vacuum exhaust it is clean, can be discharged to successively in the prolonged course of work plus
Inside speedometer, accelerometer air pressure inside produces change, causes resolution ratio and stability to reduce.
The main method that vacuum is kept at present has two kinds：1) suitable getter is used, but has the use time of certain limit
Number；2) accelerometer internal cavity is connected with vavuum pump all the time, but if vavuum pump is connected with accelerometer in real work,
Mechanical oscillation can be caused during work, reduce accelerometer precision.
The content of the invention
It is an object of the invention to make up the deficiencies in the prior art part, there is provided one kind adds for high-resolution quartz flexible
The vacuum holding structure of speedometer.
The purpose of the present invention is realized by following technological means：
A kind of vacuum holding structure for high-resolution quartz flexible accelerometer, including upper and lower magnetic conduction ring component, pendulum
Part and connection ring, pendulum part are made up of quartz pendulous reed, torquer coil and coil rack, it is characterised in that：Upper and lower magnetic guiding loop
Part forms by magnetic guiding loop, cylindrical permanent magnet, magnetic conductive cover and magnetic conduction base, and the bottom of magnetic guiding loop is coaxially mounted to magnetic conductive cover
On, the central coaxial of the magnetic conductive cover is made one and raised up and downward opening groove, the inside of the groove from top to bottom according to
Secondary to be coaxially disposed cylindrical permanent magnet and magnetic conduction base, the magnetic conduction base forms closing together with magnetic conductive cover laser seal welding
Cavity；Magnetic conduction ring component is installed using coaxial mirror image in pairs, and, pendulum part is fixedly mounted with by connection ring laser seal welding together
Therebetween.
Moreover, described magnetic guiding loop is cyclic structure, its central coaxial makes centre bore.
Moreover, being coaxially disposed magnetic conduction cap above cylindrical permanent magnet, the magnetic conduction cap is located at cylindrical permanent magnet and led
Between the inwall upper surface of magnetic lid groove.
The advantages and positive effects of the present invention are：
1st, magnetic guiding loop, magnetic conductive cover and magnetic conduction base of the invention replace the magnetic guiding loop of original structure and identical material, can expire
The demand of sufficient quartz flexible accelerometer working gas gap magnetic induction intensity.
2nd, the quartz flexible accelerometer designed by the present invention adds the design of sealing structure, upper and lower magnetic conduction ring component
By connection ring laser seal welding together, the leak rate after sealing is less than 1.1 × 10-10Pa·m3/ s, pendulum part are packed in it
Between, ensure that accelerometer extraneous gas will not enter；It is together with magnetic conductive cover and magnetic conduction base laser seal welding, permanent magnet is close
Close and, gas in itself gap will not be discharged to inside accelerometer by permanent magnet, and effectively inhibit permanent magnet goes out gas velocity
Rate, keep accelerometer internal vacuum stable, keep stability of the accelerometer resolution ratio with the time.
3rd, the quartz flexible accelerometer design of Sealing Structure designed by the present invention is simple, and process implementing is convenient, its vacuum
Degree is high, vacuum retention time length, suitable for systems such as high-resolution navigation system, gravity gradiometers.
4th, the present invention is a kind of design science, the vacuum for high-resolution quartz flexible accelerometer rational in infrastructure protects
Structure is held, the present invention is by improving magnetic guiding loop modular construction on existing quartz flexible accelerometer architecture basics, increasing and swash
Photocoagulation Seal Design, solve after quartz flexible accelerometer vacuumizes, the problem of air pressure inside changes with the deflation of material,
The vacuum inside accelerometer is kept, keeps stability of the accelerometer resolution ratio with the time.
Brief description of the drawings
Fig. 1 is current quartz flexible accelerometer three-dimensional explosive view；
Fig. 2 is current quartz flexible accelerometer two dimension axle sectional view；
Fig. 3 is the two-dimentional axle sectional view for the Novel quartz flexure accelerometers that the embodiment of the present invention one proposes；
Fig. 4 is the two-dimentional axle sectional view for the Novel quartz flexure accelerometers that the embodiment of the present invention two proposes.
In figure：10. magnetic conduction ring component；20. put part；30. connection ring；11. magnetic guiding loop；12. cylindrical permanent magnet；13.
Magnetic conduction cap；14. magnetic conductive cover；15. magnetic conduction base；16. laser seal welding；21. quartz pendulous reed；22. torquer coil；23. line
Ring framework；31. cementing or spot welding；32. laser seal welding.
Embodiment
Embodiments of the invention are described in detail below in conjunction with the accompanying drawings, wherein same or similar label represents phase from beginning to end
Same or similar element or the element with same or like function.It should be noted that the present embodiment is narrative, it is not
Limited, it is impossible to protection scope of the present invention is limited with this.
A kind of vacuum holding structure for high-resolution quartz flexible accelerometer, including upper and lower magnetic conduction ring component 10,
Put part 20 and connection ring 30.Pendulum part is made up of quartz pendulous reed 21, torquer coil 22 and coil rack 23.Upper and lower magnetic conduction
Ring component is cylindrical shape cylinder, and magnetic conduction ring component is installed using coaxial mirror image, existed by connection ring laser seal welding 32 in pairs
Together, the leak rate after sealing is less than 1.1 × 10-10Pa·m3/ s, pendulum part are fixedly mounted with therebetween.
The structure of the upper and lower magnetic conduction ring component of the present invention can be designed to two kinds of different forms, separately below to two kinds
Structure type is described：
Embodiment one：As shown in figure 3, upper and lower magnetic conduction ring component is by magnetic guiding loop 11, cylindrical permanent magnet 12, magnetic conduction cap
13rd, magnetic conductive cover 14 and magnetic conduction base 15 form, on the basis of magnetic conduction base, sequentially coaxially install cylindrical permanent magnet, magnetic conduction cap,
Magnetic conductive cover, magnetic guiding loop, form magnetic conduction ring component.Magnetic guiding loop is cyclic structure, and its central coaxial makes centre bore.The bottom of magnetic guiding loop
Portion is coaxially mounted on magnetic conductive cover, and the central coaxial of the magnetic conductive cover is made one and raised up and downward opening groove, magnetic conduction
The centre bore of ring and the groove of magnetic conductive cover are coaxially disposed.The inside of the groove from top to bottom sequentially coaxially sets magnetic conduction cap, cylinder
Shape permanent magnet and magnetic conduction base, magnetic conduction cap are arranged on the top of cylindrical permanent magnet, and magnetic conduction cap be located at cylindrical permanent magnet and
Between the inwall upper surface of magnetic conductive cover groove.The magnetic conduction base forms the chamber of closing together with magnetic conductive cover laser seal welding 16
Body, magnetic conduction cap and cylindrical permanent magnet are fixed in closed area.
Embodiment two：As shown in figure 4, upper and lower magnetic conduction ring component is by magnetic guiding loop 11, cylindrical permanent magnet 12, magnetic conductive cover
14 and magnetic conduction base 15 form, on the basis of magnetic conduction base, sequentially coaxially install cylindrical permanent magnet, magnetic conductive cover, magnetic guiding loop, structure
Into magnetic conduction ring component.Magnetic guiding loop is cyclic structure, and its central coaxial makes centre bore.The bottom of magnetic guiding loop is coaxially mounted to magnetic conduction
Cover, the central coaxial of the magnetic conductive cover is made one and raised up and downward opening groove, the centre bore and magnetic conduction of magnetic guiding loop
The groove of lid is coaxially disposed, and the inside of the groove from top to bottom sequentially coaxially sets cylindrical permanent magnet and magnetic conduction base, and this is led
Magnetic base forms the cavity of closing together with magnetic conductive cover laser seal welding 16, and cylindrical permanent magnet is fixed on closed area
It is interior.Magnetic conduction cap (being combined into one equivalent to magnetic conductive cover and magnetic conduction cap) is eliminated in this structure, has accordingly increased magnetic conductive cover groove
The wall thickness of upper surface (wall thickness is close with former magnetic conduction cap thickness).
Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
Understand and without departing from the principles and spirit of the present invention these embodiments are carried out with a variety of changes, modification, replaces and becomes
Type, such as permanent magnet of the present invention sealing, those skilled in the art can be more so as to design according to the inspiration of the present invention
Individual sealing structure mode, therefore, the scope of the present invention is by appended claims and its equivalent limits.
Claims (3)
1. a kind of vacuum holding structure for high-resolution quartz flexible accelerometer, including upper and lower magnetic conduction ring component, pendulum portion
Part and connection ring, pendulum part are made up of quartz pendulous reed, torquer coil and coil rack, it is characterised in that：Upper and lower magnetic conduction ring portion
Part forms by magnetic guiding loop, cylindrical permanent magnet, magnetic conductive cover and magnetic conduction base, and the bottom of magnetic guiding loop is coaxially mounted to magnetic conductive cover
On, the central coaxial of the magnetic conductive cover is made one and raised up and downward opening groove, the inside of the groove from top to bottom according to
Secondary to be coaxially disposed cylindrical permanent magnet and magnetic conduction base, the magnetic conduction base forms closing together with magnetic conductive cover laser seal welding
Cavity；Magnetic conduction ring component is installed using coaxial mirror image in pairs, and, pendulum part is fixedly mounted with by connection ring laser seal welding together
Therebetween.
2. a kind of vacuum holding structure for high-resolution quartz flexible accelerometer according to claim 1, it is special
Sign is：Described magnetic guiding loop is cyclic structure, and its central coaxial makes centre bore.
3. a kind of vacuum holding structure for high-resolution quartz flexible accelerometer according to claim 1, it is special
Sign is：Magnetic conduction cap is coaxially disposed above cylindrical permanent magnet, the magnetic conduction cap is located at cylindrical permanent magnet and magnetic conductive cover is recessed
Between the inwall upper surface of groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710905553.5A CN107703329B (en) | 2017-09-29 | 2017-09-29 | Vacuum for high-resolution quartz flexible accelerometer keeps structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710905553.5A CN107703329B (en) | 2017-09-29 | 2017-09-29 | Vacuum for high-resolution quartz flexible accelerometer keeps structure |
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| Publication Number | Publication Date |
|---|---|
| CN107703329A true CN107703329A (en) | 2018-02-16 |
| CN107703329B CN107703329B (en) | 2019-11-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710905553.5A Active CN107703329B (en) | 2017-09-29 | 2017-09-29 | Vacuum for high-resolution quartz flexible accelerometer keeps structure |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109085384A (en) * | 2018-10-29 | 2018-12-25 | 中国船舶重工集团公司第七0七研究所 | A kind of high stability quartz flexible accelerometer using Novel swing modular construction |
| CN109085383A (en) * | 2018-09-19 | 2018-12-25 | 中国船舶重工集团公司第七0七研究所 | A kind of novel pendulum-type accelerometer |
| CN109358208A (en) * | 2018-11-14 | 2019-02-19 | 陕西华燕航空仪表有限公司 | A kind of exoskeletal torquer microminiature quartz accelerometer |
| CN109490577A (en) * | 2018-12-21 | 2019-03-19 | 中国船舶重工集团公司第七0七研究所 | A kind of flexible static support accelerometer |
| CN115741583A (en) * | 2022-12-06 | 2023-03-07 | 中国船舶集团有限公司第七〇七研究所 | Quartz accelerometer sensitive watch core component assembling device capable of inhibiting harmful deformation |
| CN118501497A (en) * | 2024-07-16 | 2024-08-16 | 中国船舶集团有限公司第七〇七研究所 | All-quartz sensitive part for accelerometer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4250757A (en) * | 1979-11-05 | 1981-02-17 | Sundstrand Data Control, Inc. | Movable element with position sensing means for transducers |
| JPS6117959A (en) * | 1984-07-05 | 1986-01-25 | Japan Aviation Electronics Ind Ltd | Accelerometer |
| US5111694A (en) * | 1990-08-17 | 1992-05-12 | Sundstrand Corporation | Accelerometer with rebalance coil stress isolation |
| CN102043068A (en) * | 2010-11-05 | 2011-05-04 | 中国船舶重工集团公司第七○七研究所 | High-resolution accelerometer with on-line adjustable scale factors |
| CN102998481A (en) * | 2012-12-11 | 2013-03-27 | 中国船舶重工集团公司第七0七研究所 | Novel electromagnetic accelerometer structure |
| CN203455365U (en) * | 2013-09-09 | 2014-02-26 | 湖北三江航天红峰控制有限公司 | Impact-resistant quartz flexible accelerometer |
| EP2722676A1 (en) * | 2012-10-19 | 2014-04-23 | Honeywell International Inc. | Acceleration sensor with stress reduction components |
| CN106226555A (en) * | 2016-07-13 | 2016-12-14 | 高碑店市开拓精密仪器制造有限责任公司 | high temperature resistant quartz flexible accelerometer |
-
2017
- 2017-09-29 CN CN201710905553.5A patent/CN107703329B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4250757A (en) * | 1979-11-05 | 1981-02-17 | Sundstrand Data Control, Inc. | Movable element with position sensing means for transducers |
| JPS6117959A (en) * | 1984-07-05 | 1986-01-25 | Japan Aviation Electronics Ind Ltd | Accelerometer |
| US5111694A (en) * | 1990-08-17 | 1992-05-12 | Sundstrand Corporation | Accelerometer with rebalance coil stress isolation |
| CN102043068A (en) * | 2010-11-05 | 2011-05-04 | 中国船舶重工集团公司第七○七研究所 | High-resolution accelerometer with on-line adjustable scale factors |
| EP2722676A1 (en) * | 2012-10-19 | 2014-04-23 | Honeywell International Inc. | Acceleration sensor with stress reduction components |
| CN102998481A (en) * | 2012-12-11 | 2013-03-27 | 中国船舶重工集团公司第七0七研究所 | Novel electromagnetic accelerometer structure |
| CN203455365U (en) * | 2013-09-09 | 2014-02-26 | 湖北三江航天红峰控制有限公司 | Impact-resistant quartz flexible accelerometer |
| CN106226555A (en) * | 2016-07-13 | 2016-12-14 | 高碑店市开拓精密仪器制造有限责任公司 | high temperature resistant quartz flexible accelerometer |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109085383A (en) * | 2018-09-19 | 2018-12-25 | 中国船舶重工集团公司第七0七研究所 | A kind of novel pendulum-type accelerometer |
| CN109085384A (en) * | 2018-10-29 | 2018-12-25 | 中国船舶重工集团公司第七0七研究所 | A kind of high stability quartz flexible accelerometer using Novel swing modular construction |
| CN109358208A (en) * | 2018-11-14 | 2019-02-19 | 陕西华燕航空仪表有限公司 | A kind of exoskeletal torquer microminiature quartz accelerometer |
| CN109490577A (en) * | 2018-12-21 | 2019-03-19 | 中国船舶重工集团公司第七0七研究所 | A kind of flexible static support accelerometer |
| CN115741583A (en) * | 2022-12-06 | 2023-03-07 | 中国船舶集团有限公司第七〇七研究所 | Quartz accelerometer sensitive watch core component assembling device capable of inhibiting harmful deformation |
| CN118501497A (en) * | 2024-07-16 | 2024-08-16 | 中国船舶集团有限公司第七〇七研究所 | All-quartz sensitive part for accelerometer |
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| Publication number | Publication date |
|---|---|
| CN107703329B (en) | 2019-11-26 |
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