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CN107678170A - A kind of flexible varied angle slot array diffraction optical device realizes system - Google Patents

A kind of flexible varied angle slot array diffraction optical device realizes system Download PDF

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CN107678170A
CN107678170A CN201710984937.0A CN201710984937A CN107678170A CN 107678170 A CN107678170 A CN 107678170A CN 201710984937 A CN201710984937 A CN 201710984937A CN 107678170 A CN107678170 A CN 107678170A
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optical device
laser
diffractive optical
diffraction optical
varied angle
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CN107678170B (en
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乐孜纯
熊启源
阿纳托利·拉普查克
伊凡·高博夫
董文
付明磊
卢智易
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Zhejiang University of Technology ZJUT
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/48Laser speckle optics
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements

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Abstract

一种柔性变角度阵列衍射光学器件的实现系统,包括机械模块、电学控制模块和光学模块,所述光学模块包括激光器、校准透镜、光阑、柔性变角度阵列衍射光学器件、成像透镜、投影屏幕和CCD相机和计算机处理系统,所述激光器是可见光范围内的任意波长的单色激光器,所述激光器、校准透镜、光阑、柔性变角度阵列衍射光学器件和成像透镜位于同一光轴上;所述机械模块包括履带式传送装置;所述电学控制模块包括用于带动履带式传送装置转动进而带动柔性变角度阵列衍射光学器件实现履带式运动的驱动电机。本发明全波段散斑抑制效果好、运动方式简单、易于实现、且系统通用性、鲁棒性好、成本低廉。

A realization system of a flexible variable-angle array diffractive optical device, including a mechanical module, an electrical control module, and an optical module, and the optical module includes a laser, a calibration lens, an aperture, a flexible variable-angle array diffractive optical device, an imaging lens, and a projection screen and a CCD camera and a computer processing system, the laser is a monochromatic laser of any wavelength in the visible light range, the laser, the calibration lens, the diaphragm, the flexible variable-angle array diffractive optical device and the imaging lens are located on the same optical axis; The mechanical module includes a crawler conveyor; the electrical control module includes a drive motor for driving the crawler conveyor to rotate and then drive the flexible variable-angle array diffractive optical device to realize the crawler movement. The present invention has good full-band speckle suppression effect, simple movement mode, easy realization, system versatility, good robustness and low cost.

Description

一种柔性变角度阵列衍射光学器件的实现系统Realization system of a flexible variable-angle array diffractive optical device

技术领域technical field

本发明属于激光显示投影领域,尤其涉及一种柔性变角度阵列衍射光学器件的实现系统,采用运动式衍射光学器件进行激光散斑抑制的衍射光学器件实现系统。The invention belongs to the field of laser display projection, and in particular relates to a realization system of a flexible variable-angle array diffractive optical device, which uses a movable diffractive optical device to suppress laser speckle.

背景技术Background technique

激光投影显示系统因其所具备的色彩丰富、画面质量高、寿命长、可靠性高、功效高、能耗低等优点,受到越来越广泛的关注和欢迎。然而由于激光是高相干光,不可避免地会产生一种称为激光散斑的画面噪声。散斑表现为随机分布在激光光斑中的黑色斑点,其实质为信号的随机相干叠加,散斑的存在严重影响图像和信息的质量。在激光投影显示领域,散斑会使投影显示的画面质量下降,导致观看者产生疲倦和头晕眼花等症状,严重影响激光投影仪使用者的体验,成为制约激光投影显示系统和仪器发展的核心因素。因此,研发激光散斑抑制技术和器件十分必要。Laser projection display system is getting more and more attention and welcome because of its rich colors, high picture quality, long life, high reliability, high efficiency, low energy consumption and other advantages. However, since laser light is highly coherent light, a picture noise called laser speckle will inevitably be generated. Speckle appears as black spots randomly distributed in the laser spot, and its essence is the random coherent superposition of signals. The existence of speckle seriously affects the quality of images and information. In the field of laser projection display, speckle will degrade the image quality of projection display, cause viewers to experience symptoms such as fatigue and dizziness, seriously affect the experience of laser projector users, and become the core factor restricting the development of laser projection display systems and instruments . Therefore, it is necessary to develop laser speckle suppression technology and devices.

已有技术中对激光散斑抑制所采用的最常用的方法,是使用运动的衍射光学器件。多年来,研究者报道了多种衍射光学器件,包括常周期的光栅结构;基于伪随机编码、M序列编码、Barker码的微光学结构;基于Hadamard矩阵的微光学结构等等。激光束经过这些衍射光学器件形成了衍射光场,动态变化的衍射光场的叠加能够破坏激光的相干性,并进而起到抑制激光散斑的作用。为了形成动态变化的衍射光场的叠加,需要对衍射光学器件进行震动、线性位移、旋转运动等机械运动方式。然而这样的运动方式不仅机械部件和运行机构复杂、庞大,而且对激光投影显示仪器有冲击损害。另外,由于需要往复运动使得无法保证衍射光学器件处于匀速运动状态,因此散斑抑制效果也不够理想。上述已有技术中与本发明最接近的衍射光学器件及其实现系统,比如在《Hadamard speckle contrastreduction》(2004,Opt.Lett.29,11-13)一文中Jahja I.Trisnadi第一次采用了基于Hadamard矩阵结构的衍射光学器件并给出了实现方式;在《Full speckle suppression inlaser projectors using two Barker code-type diffractive optical elements》(2013,J.Opt.Soc.Am.A 30,22-31)一文中,Lapchuk等人采用两个基于Barker码结构的衍射光学器件并使其在垂直于光轴的平面,沿与水平面呈一定角度的方向运动,对全波段(既包括红、绿、蓝)激光进行了散斑抑制实验;乐孜纯、熊启源、董文和付明磊在中国发明专利《一种基于光学衍射元件的激光散斑抑制方法》(CN 106896520A)中提出使用运动的二元光学衍射元件来抑制激光散斑。The most commonly used method for laser speckle suppression in the prior art is to use a moving diffractive optical device. Over the years, researchers have reported a variety of diffractive optical devices, including constant-period grating structures; micro-optical structures based on pseudo-random codes, M-sequence codes, and Barker codes; micro-optical structures based on Hadamard matrices, etc. The laser beam passes through these diffractive optical devices to form a diffractive light field, and the superposition of the dynamically changing diffractive light field can destroy the coherence of the laser light, and then play a role in suppressing laser speckle. In order to form the superposition of dynamically changing diffractive light fields, it is necessary to perform mechanical motions such as vibration, linear displacement, and rotational motion on the diffractive optical device. However, such a movement mode is not only complex and bulky in mechanical parts and operating mechanism, but also has impact damage to the laser projection display instrument. In addition, due to the need for reciprocating motion, it is impossible to ensure that the diffractive optical device is in a state of uniform motion, so the effect of speckle suppression is not ideal. The diffractive optical device and its implementation system closest to the present invention in the above-mentioned prior art, for example, Jahja I.Trisnadi adopted for the first time in the article "Hadamard speckle contrastreduction" (2004, Opt. Diffractive optical device based on Hadamard matrix structure and the implementation method is given; in "Full speckle suppression inlaser projectors using two Barker code-type diffractive optical elements" (2013, J.Opt.Soc.Am.A 30,22-31) In a paper, Lapchuk et al. adopted two diffractive optical devices based on the Barker code structure and made them move in a direction at a certain angle to the horizontal plane on a plane perpendicular to the optical axis. Laser speckle suppression experiments were carried out; Le Zichun, Xiong Qiyuan, Dong Wen and Fu Minglei proposed the use of binary optics in motion in the Chinese invention patent "A laser speckle suppression method based on optical diffraction elements" (CN 106896520A) Diffractive elements to suppress laser speckle.

然而上述基于运动的衍射光学器件的现有技术方法,均存在缺陷。或是散斑抑制程度不够;或是不能进行全波段散斑抑制;或是结构设计的难度太大,系统容错性、鲁棒性、通用性很差,不能满足实际应用需求;或是需要往复式机械运动,对激光投影显示仪器机械冲击大、稳定性不好、结构复杂庞大、能耗高、功效低,并需在运动过程中改变速度导致散斑抑制效果不佳等等。However, the above-mentioned prior art methods based on motion diffractive optics all have drawbacks. Either the degree of speckle suppression is not enough; or full-band speckle suppression cannot be performed; or the structural design is too difficult, and the system's fault tolerance, robustness, and versatility are poor, which cannot meet the needs of practical applications; or it needs to reciprocate Type of mechanical movement has a large mechanical impact on the laser projection display instrument, poor stability, complex structure, high energy consumption, low efficiency, and the need to change the speed during the movement, resulting in poor speckle suppression effect and so on.

发明内容Contents of the invention

为了克服已有技术散斑抑制效果不够好、不能进行全波段散斑抑制、系统采用器件个数和种类多、运动部件复杂并对仪器有冲击损害、尺寸大、仪器结构复杂、能耗高、功效低等缺点,本发明提供一种全波段散斑抑制效果好、运动方式简单、易于实现、且系统通用性、鲁棒性好、成本低廉的柔性变角度阵列衍射光学器件的实现系统,采用柔性材料制作、通过变角度阵列衍射结构、构建可以无限匀速循环的履带式运动方式、用一套系统实现红、绿、蓝全波段激光散斑抑制。In order to overcome the insufficient effect of speckle suppression in the existing technology, the inability to perform full-band speckle suppression, the number and types of devices used in the system, the complexity of moving parts and impact damage to the instrument, large size, complex structure of the instrument, high energy consumption, However, due to the disadvantages of low efficacy and other disadvantages, the present invention provides a realization system of a flexible variable-angle array diffractive optical device with good full-band speckle suppression effect, simple movement mode, easy implementation, system versatility, good robustness, and low cost. Made of flexible materials, through the variable-angle array diffraction structure, a crawler-type movement mode that can circulate infinitely at a constant speed is constructed, and a system is used to achieve red, green, and blue full-band laser speckle suppression.

本发明解决其技术问题所采用的技术方案是:The technical solution adopted by the present invention to solve its technical problems is:

一种柔性变角度阵列衍射光学器件的实现系统,包括机械模块、电学控制模块和光学模块,所述光学模块包括激光器、校准透镜、光阑、柔性变角度阵列衍射光学器件、成像透镜、投影屏幕和CCD相机和计算机处理系统,所述激光器可以是可见光范围内的任意波长的单色激光器,所述激光器、校准透镜、光阑、柔性变角度阵列衍射光学器件和成像透镜位于同一光轴上;所述机械模块包括履带式传送装置;所述电学控制模块包括用于带动履带式传送装置转动进而带动柔性变角度阵列衍射光学器件实现履带式运动的驱动电机。A realization system of a flexible variable-angle array diffractive optical device, including a mechanical module, an electrical control module, and an optical module, and the optical module includes a laser, a calibration lens, an aperture, a flexible variable-angle array diffractive optical device, an imaging lens, and a projection screen and a CCD camera and a computer processing system, the laser can be a monochromatic laser of any wavelength in the visible light range, and the laser, calibration lens, diaphragm, flexible variable-angle array diffractive optics and imaging lens are located on the same optical axis; The mechanical module includes a crawler conveyor; the electrical control module includes a drive motor for driving the crawler conveyor to rotate and then drive the flexible variable-angle array diffractive optical device to realize the crawler movement.

进一步,所述机械模块包括机架、两根旋转立柱和弹簧,一根旋转立柱可左右平移且可旋转地套装在机架的一侧,所述弹簧一端与所述一根旋转立柱连接,所述弹簧的另一端固定在机架上;另一根旋转立柱可旋转地套装在机架的另一侧,所述另一根旋转立柱与驱动电机的输出轴传动连接,所述柔性变角度阵列衍射光学器件绕在所述两根旋转立柱上,所述弹簧的拉力使得柔性变角度阵列衍射光学器件始终处于拉伸状态。Further, the mechanical module includes a frame, two rotating columns and a spring, one rotating column can be translated left and right and rotatably set on one side of the frame, one end of the spring is connected to the one rotating column, the The other end of the spring is fixed on the frame; the other rotating column is rotatably set on the other side of the frame, and the other rotating column is connected with the output shaft of the drive motor, and the flexible variable angle array The diffractive optical device is wound on the two rotating columns, and the tension of the spring makes the flexible variable-angle array diffractive optical device always in a stretched state.

再进一步,所述驱动电机的输出轴上安装主动齿轮,所述另一根旋转立柱的外端安装被动齿轮,所述主动齿轮与所述被动齿轮啮合。当然,也可以是另外的传动方式。Still further, a driving gear is installed on the output shaft of the driving motor, a driven gear is installed on the outer end of the other rotating column, and the driving gear meshes with the driven gear. Of course, other transmission modes are also possible.

所述驱动电机为步进电机。The driving motor is a stepping motor.

所述光学模块可以但不限于包括红光激光器及其校准透镜、绿光激光器及其校准透镜、蓝光激光器及其校准透镜、透过红光反射绿光蓝光的分光片、透过红光绿光反射蓝光的分光片;所述红光激光器及其校准透镜、透过红光反射绿光蓝光的分光片、透过红光绿光反射蓝光的分光片、光阑、所述性变角度阵列衍射光学器件和成像透镜位于同一光轴上,且为主光轴,所述绿光激光器及其校准透镜、蓝光激光器及其校准透镜的光轴与主光轴垂直,所述绿光激光器发出的绿色激光通过透过红光反射绿光蓝光的分光片进入主光路,所述蓝光激光器发出的蓝色激光通过透过红光绿光反射蓝光的分光片进入主光路。The optical module may include, but is not limited to, a red laser and its calibration lens, a green laser and its calibration lens, a blue laser and its calibration lens, a spectroscopic sheet that transmits red light and reflects green light and blue light, and transmits red light and green light. A spectroscopic sheet that reflects blue light; the red laser and its calibration lens, a spectroscopic sheet that reflects green light and blue light through red light, a spectroscopic sheet that reflects blue light through red light and green light, an aperture, and the variable angle array diffraction The optical device and the imaging lens are located on the same optical axis and are on the main optical axis, the optical axes of the green laser and its collimating lens, the blue laser and its collimating lens are perpendicular to the main optical axis, and the green laser emitted by the green laser The laser light enters the main optical path through the spectroscopic sheet that transmits red light and reflects green light and blue light, and the blue laser light emitted by the blue laser enters the main optical path through the spectroscopic sheet that transmits red light and green light and reflects blue light.

所述柔性变角度阵列衍射光学器件制作在柔性材料上,由N组一维二元衍射光学结构首尾连接而成,所述一维二元衍射光学结构包括光栅结构和光学微结构,所述一维是指衍射光学结构为一维图案,所述二元是指因衍射光学结构深度所形成的光程差是二值化的。The flexible variable-angle array diffractive optical device is fabricated on a flexible material, and is composed of N groups of one-dimensional binary diffractive optical structures connected end to end. The one-dimensional binary diffractive optical structure includes a grating structure and an optical microstructure. The one Dimensional means that the diffractive optical structure is a one-dimensional pattern, and binary means that the optical path difference formed due to the depth of the diffractive optical structure is binarized.

所述一维二元衍射光学结构图案由参数T表示,所述参数T为光学微结构的最小单元宽度,所有光学微结构的宽度均用T的整数倍来表示,所述一维二元衍射光学结构图案的总宽度用T0表示;所述一维二元衍射光学结构的深度为h,所述一维二元衍射光学结构与X轴所夹倾角为θ0The one-dimensional binary diffractive optical structure pattern is represented by a parameter T, and the parameter T is the minimum unit width of the optical microstructure, and the width of all optical microstructures is represented by an integer multiple of T, and the one-dimensional binary diffractive The total width of the optical structure pattern is represented by T 0 ; the depth of the one-dimensional binary diffractive optical structure is h, and the inclination angle between the one-dimensional binary diffractive optical structure and the X axis is θ 0 .

所述光学微结构为基于伪随机序列的光学微结构、基于M序列的光学微结构或基于Barker码的光学微结构。The optical microstructure is an optical microstructure based on a pseudo-random sequence, an optical microstructure based on an M sequence or an optical microstructure based on a Barker code.

所述N是正整数,表示柔性变角度阵列衍射光学器件中所包含的阵列个数,N=1,2,3…∞,当N=1时,所述用于激光散斑抑制的柔性变角度阵列衍射光学器件为单个衍射光学器件,即衍射光学器件单元,每一个衍射光学器件单元中包括m个周期的结构参数相同的一维二元衍射光学结构图案;当N≧2时,所述用于激光散斑抑制的柔性变角度阵列衍射光学器件为包含N个阵列的衍射光学器件;所述阵列中的N个衍射光学器件单元一次性制作在单片柔性材料上,其阵列中的N个衍射光学器件单元内部的一维二元衍射光学结构图案相同或不相同,所述N组一维二元衍射光学结构首尾连接,沿着Y轴方向将第1组衍射光学结构的头与第N组衍射光学结构的尾相连。The N is a positive integer, representing the number of arrays contained in the flexible variable-angle array diffractive optical device, N=1, 2, 3...∞, when N=1, the flexible variable-angle used for laser speckle suppression The array diffractive optical device is a single diffractive optical device, that is, a diffractive optical device unit, and each diffractive optical device unit includes m periods of one-dimensional binary diffractive optical structure patterns with the same structural parameters; when N≧2, the The flexible variable-angle array diffractive optical device for laser speckle suppression is a diffractive optical device comprising N arrays; the N diffractive optical device units in the array are fabricated on a single piece of flexible material at one time, and the N arrays in the array The patterns of the one-dimensional binary diffractive optical structures inside the diffractive optical device unit are the same or different, and the N groups of one-dimensional binary diffractive optical structures are connected end to end, and the heads of the first group of diffractive optical structures and the Nth Group of Diffractive Optical Structures Tail Connected.

阵列中的N个衍射光学器件单元与X轴所夹倾角不同,表示为θ±i,其中θ±i=θ0±(N-1)2·Δθ±i·Δθ,Δθ表示相邻衍射光学器件单元与X轴所夹倾角的变化幅度。The N diffractive optical device units in the array are different from the inclination angle of the X axis, expressed as θ ±i , where θ ±i = θ 0 ±(N-1)2·Δθ±i·Δθ, Δθ represents the adjacent diffractive optical The change range of the tilt angle between the device unit and the X axis.

二元衍射光学结构的深度h与柔性材料的折射率有关,其范围在350nm至650nm。The depth h of the binary diffractive optical structure is related to the refractive index of the flexible material, which ranges from 350nm to 650nm.

所述柔性材料是指对包括红、绿、蓝光在内的可见光波段透明的、柔软可弯折的材料,所述柔性材料包括热塑性塑料或光刻胶材料。The flexible material refers to a material that is transparent to visible light bands including red, green, and blue light, soft and bendable, and includes thermoplastic or photoresist materials.

所述热塑性塑料包括聚对苯二甲酸乙二醇酯PET、聚氯乙烯PVC或聚碳酸酯PC。The thermoplastics include polyethylene terephthalate PET, polyvinyl chloride PVC or polycarbonate PC.

所述光刻胶材料包括聚二甲基硅氧烷PDMS或光敏聚酰亚胺光刻胶PSPI。The photoresist material includes polydimethylsiloxane PDMS or photosensitive polyimide photoresist PSPI.

本发明的技术构思是:通过在单片柔性材料上制作变角度阵列衍射光学器件,利用运动的衍射光学微结构来改变激光光束的相位分布,破坏激光的空间相干性,从而达到抑制散斑的效果。The technical idea of the present invention is to change the phase distribution of the laser beam by making a variable-angle array diffractive optical device on a single piece of flexible material, using the moving diffractive optical microstructure, and destroying the spatial coherence of the laser, thereby achieving the effect of suppressing speckle Effect.

进一步地,利用柔性材料的弯折,使得N组不同的一维二元衍射光学结构相互叠加,形成基于双面一维衍射光学微结构的二维光学编码;利用连续的履带式运动使得叠加的光学结构动态变化,以达到全波段激光散斑抑制的效果并提高激光散斑抑制率。Furthermore, by using the bending of the flexible material, N groups of different one-dimensional binary diffractive optical structures are superimposed on each other to form a two-dimensional optical code based on the double-sided one-dimensional diffractive optical microstructure; The optical structure changes dynamically to achieve the full-band laser speckle suppression effect and improve the laser speckle suppression rate.

更进一步,由于履带式传送是周而复始的,有效避免了往复式机械运动过程中运动速度的变化,减小了机械运动冲击造成的系统损伤和运动速度变化造成的干扰噪声。Furthermore, since the crawler transmission is repeated, it effectively avoids the change of the movement speed during the reciprocating mechanical movement, and reduces the system damage caused by the impact of the mechanical movement and the interference noise caused by the change of the movement speed.

再进一步地,通过发明变角度阵列结构,使得在仅需一维方向运动的情况下,实现了二维位移的技术效果。Furthermore, by inventing the variable-angle array structure, the technical effect of two-dimensional displacement is realized when only one-dimensional movement is required.

本发明的有益效果主要表现在:(1)采用柔性材料,使得履带式连续运动成为可能。(2)单片材料上制作多组衍射光学微结构,尺寸小、效率高。(3)利用柔性材料的弯折和履带式连续运动,使得N组不同的一维二元衍射光学结构相互叠加和动态变化,理论上可实现全波段激光散斑抑制。(4)通过发明变角度阵列结构,使得在仅需一维方向运动的情况下,实现了二维位移的技术效果。(5)采用履带式运动代替往复式机械运动,拥有更稳定的散斑抑制效果和更小的噪声干扰,也使得整个结构更加稳定。(6)整个散斑抑制系统包括了红、绿、蓝三色激光光源,硬件上实现全波段激光散斑抑制,且系统结构简单紧凑、稳定、通用性好、功效高、能耗低。The beneficial effects of the present invention are mainly manifested in: (1) The use of flexible materials makes crawler-type continuous movement possible. (2) Multiple groups of diffractive optical microstructures are fabricated on a single sheet material, with small size and high efficiency. (3) Using the bending of flexible materials and continuous crawler movement, N groups of different one-dimensional binary diffractive optical structures are superimposed and dynamically changed, theoretically achieving full-band laser speckle suppression. (4) By inventing the variable-angle array structure, the technical effect of two-dimensional displacement is realized when only one-dimensional movement is required. (5) The crawler movement is used instead of the reciprocating mechanical movement, which has a more stable speckle suppression effect and less noise interference, and also makes the whole structure more stable. (6) The entire speckle suppression system includes red, green, and blue laser light sources. The hardware realizes full-band laser speckle suppression, and the system structure is simple and compact, stable, good versatility, high efficiency, and low energy consumption.

附图说明Description of drawings

图1是本发明柔性变角度阵列衍射光学器件中衍射器件单元的示意图(光学微结构以M序列为例)。Fig. 1 is a schematic diagram of the diffractive device unit in the flexible variable-angle array diffractive optical device of the present invention (the optical microstructure is M sequence as an example).

图2是本发明柔性变角度阵列衍射光学器件的阵列排布示意图。Fig. 2 is a schematic diagram of the array arrangement of the flexible variable-angle array diffractive optical device of the present invention.

图3是本发明柔性变角度阵列衍射光学器件及其实现系统示意图,其中,1是红光激光器及其校准透镜;2是绿光激光器及其校准透镜;3是蓝光激光器及其校准透镜;4是透过红光反射绿光蓝光的分光片;5是透过红光绿光反射蓝光的分光片;6是光阑;7是本发明柔性变角度阵列衍射光学器件及其履带式传动装置;8是成像透镜;9是投影屏幕;10是CCD相机及其计算机处理系统。Fig. 3 is a schematic diagram of a flexible variable-angle array diffractive optical device and its realization system of the present invention, wherein, 1 is a red laser and its calibration lens; 2 is a green laser and its calibration lens; 3 is a blue laser and its calibration lens; 4 5 is a spectroscopic sheet that transmits red light and reflects green light and blue light; 5 is a spectroscopic sheet that transmits red light and green light and reflects blue light; 6 is an aperture; 7 is a flexible variable-angle array diffractive optical device and its crawler transmission device of the present invention; 8 is an imaging lens; 9 is a projection screen; 10 is a CCD camera and its computer processing system.

图4是本发明柔性变角度阵列衍射光学器件及其履带式传动装置以及传动方式示意图,其中,1是激光照射在本发明柔性变角度阵列衍射光学器件上的位置;2是两个实现履带式运动的旋转立柱;3是连接步进电机的齿轮;4是为本发明柔性变角度阵列衍射光学器件提供拉力的两个弹簧;5是控制本发明柔性变角度阵列衍射光学器件进行履带式运动的电学控制模块;6表示第二根旋转立柱与弹簧固定,使本发明柔性变角度阵列衍射光学器件一直处于拉伸状态。Fig. 4 is a schematic diagram of the flexible variable-angle array diffractive optical device of the present invention and its crawler-type transmission device and transmission mode, wherein, 1 is the position where the laser is irradiated on the flexible variable-angle array diffractive optical device of the present invention; 3 is the gear connected to the stepping motor; 4 is two springs that provide tension for the flexible variable-angle array diffractive optical device of the present invention; 5 is the track that controls the flexible variable-angle array diffractive optical device of the present invention to perform crawler movement The electrical control module; 6 indicates that the second rotating column is fixed with a spring, so that the flexible variable-angle array diffractive optical device of the present invention is always in a stretched state.

图5是本发明利用一维方向运动,实现二维位移效果的技术原理图。Fig. 5 is a technical principle diagram of realizing two-dimensional displacement effect by using one-dimensional direction movement in the present invention.

图6是本发明柔性变角度阵列衍射光学器件及其实现系统对红色激光进行散斑抑制的结果图,图6(a)散斑抑制前的光场分布,图6(b)散斑抑制后的光场分布。Fig. 6 is the result diagram of the speckle suppression of the red laser by the flexible variable-angle array diffractive optical device and its realization system of the present invention, Fig. 6 (a) the light field distribution before speckle suppression, Fig. 6 (b) after speckle suppression light field distribution.

图7是本发明柔性变角度阵列衍射光学器件及其实现系统对绿色激光进行散斑抑制的结果图,图7(a)散斑抑制前的光场分布,图7(b)散斑抑制后的光场分布。Fig. 7 is the result diagram of speckle suppression for green laser by the flexible variable-angle array diffractive optical device and its realization system of the present invention, Fig. 7(a) light field distribution before speckle suppression, Fig. 7(b) after speckle suppression light field distribution.

具体实施方式detailed description

下面结合附图对本发明作进一步描述。The present invention will be further described below in conjunction with the accompanying drawings.

参照图1~图7,一种柔性变角度阵列衍射光学器件的实现系统,包括机械模块、电学控制模块和光学模块,所述光学模块包括激光器、校准透镜、光阑、柔性变角度阵列衍射光学器件、成像透镜、投影屏幕和CCD相机和计算机处理系统,所述激光器可以是可见光范围内的任意波长的单色激光器,所述激光器、校准透镜、光阑、柔性变角度阵列衍射光学器件和成像透镜位于同一光轴上;所述机械模块包括履带式传送装置;所述电学控制模块包括用于带动履带式传送装置转动进而带动柔性变角度阵列衍射光学器件实现履带式运动的驱动电机。Referring to Figures 1 to 7, a realization system of a flexible variable-angle array diffractive optical device includes a mechanical module, an electrical control module, and an optical module. The optical module includes a laser, a calibration lens, an aperture, and a flexible variable-angle array diffractive optical device. device, imaging lens, projection screen and CCD camera and computer processing system, the laser can be a monochromatic laser of any wavelength in the visible light range, the laser, calibration lens, aperture, flexible variable-angle array diffractive optics and imaging The lenses are located on the same optical axis; the mechanical module includes a crawler conveyor; the electrical control module includes a driving motor for driving the crawler conveyor to rotate and then drive the flexible variable-angle array diffractive optical device to realize the crawler movement.

进一步,所述机械模块包括机架、两根旋转立柱和弹簧,一根旋转立柱可左右平移且可旋转地套装在机架的一侧,所述弹簧一端与所述一根旋转立柱连接,所述弹簧的另一端固定在机架上;另一根旋转立柱可旋转地套装在机架的另一侧,所述另一根旋转立柱与驱动电机的输出轴传动连接,所述柔性变角度阵列衍射光学器件绕在所述两根旋转立柱上,所述弹簧的拉力使得柔性变角度阵列衍射光学器件始终处于拉伸状态。Further, the mechanical module includes a frame, two rotating columns and a spring, one rotating column can be translated left and right and rotatably set on one side of the frame, one end of the spring is connected to the one rotating column, the The other end of the spring is fixed on the frame; the other rotating column is rotatably set on the other side of the frame, and the other rotating column is connected with the output shaft of the drive motor, and the flexible variable angle array The diffractive optical device is wound on the two rotating columns, and the tension of the spring makes the flexible variable-angle array diffractive optical device always in a stretched state.

再进一步,所述驱动电机的输出轴上安装主动齿轮,所述另一根旋转立柱的外端安装被动齿轮,所述主动齿轮与所述被动齿轮啮合。当然,也可以是另外的传动方式。Still further, a driving gear is installed on the output shaft of the driving motor, a driven gear is installed on the outer end of the other rotating column, and the driving gear meshes with the driven gear. Of course, other transmission modes are also possible.

所述驱动电机为步进电机。The driving motor is a stepping motor.

所述两根立柱的直径为4毫米;所述两根弹簧安装在一根旋转立柱上,所述电学控制模块,包括步进电机和驱动步进电机的控制器,所述控制器由事先编写的控制程序控制,主要控制参数为启动履带式传动、停止履带式传动以及履带式传动速度,所述履带式传动速度为100rpm/min。The diameter of the two columns is 4 millimeters; the two springs are installed on a rotating column, and the electrical control module includes a stepper motor and a controller for driving the stepper motor, and the controller is programmed in advance The control program control, the main control parameters are to start the crawler transmission, stop the crawler transmission and the speed of the crawler transmission, and the speed of the crawler transmission is 100rpm/min.

所述光学模块可以但不限于包括红光激光器及其校准透镜、绿光激光器及其校准透镜、蓝光激光器及其校准透镜、透过红光反射绿光蓝光的分光片、透过红光绿光反射蓝光的分光片、光阑、所述柔性变角度阵列衍射光学器件、成像透镜、投影屏幕、CCD相机及其计算机处理系统。所述红光激光器及其校准透镜、透过红光反射绿光蓝光的分光片、透过红光绿光反射蓝光的分光片、光阑、所述柔性变角度阵列衍射光学器件和成像透镜位于同一光轴上,且为主光轴,所述绿光激光器及其校准透镜、蓝光激光器及其校准透镜的光轴与主光轴垂直;所述绿光激光器发出的绿色激光通过透过红光反射绿光蓝光的分光片进入主光路,所述蓝光激光器发出的蓝色激光通过透过红光绿光反射蓝光的分光片进入主光路。The optical module may include, but is not limited to, a red laser and its calibration lens, a green laser and its calibration lens, a blue laser and its calibration lens, a spectroscopic sheet that transmits red light and reflects green light and blue light, and transmits red light and green light. A spectroscopic plate reflecting blue light, an aperture, the flexible variable-angle array diffractive optical device, an imaging lens, a projection screen, a CCD camera and a computer processing system thereof. The red laser and its calibration lens, the spectroscopic sheet that transmits red light and reflects green light and blue light, the spectroscopic sheet that transmits red light and green light and reflects blue light, the aperture, the flexible variable-angle array diffractive optical device and the imaging lens are located at On the same optical axis and the main optical axis, the optical axes of the green laser and its calibration lens, the blue laser and its calibration lens are perpendicular to the main optical axis; the green laser emitted by the green laser passes through the red light The spectroscopic sheet reflecting green light and blue light enters the main optical path, and the blue laser light emitted by the blue laser enters the main optical path through the spectroscopic sheet reflecting blue light through red light and green light.

当只打开红色激光器时,红色激光束通过透过红光反射绿光蓝光的分光片、透过红光绿光反射蓝光的分光片、光阑,正入射到本发明柔性变角度阵列衍射光学器件上,电学模块中的控制器驱动步进电机,步进电机带动机械模块中的履带式传送装置进行履带式运动,所述柔性变角度阵列衍射光学器件前后两层上的不同衍射光学微结构动态叠加,对红色激光束进行调制。所述投影屏幕记录激光投影成像并直接进行目视观察。所述CCD相机记录投影屏幕上的激光投影成像并输入计算机进行后续数据处理。When only the red laser is turned on, the red laser beam is incident on the flexible variable-angle array diffractive optical device of the present invention through the spectroscopic sheet that transmits red light and reflects green light and blue light, the spectroscopic sheet that transmits red light and green light reflects blue light, and the aperture Above, the controller in the electrical module drives the stepping motor, and the stepping motor drives the crawler conveyor in the mechanical module to perform crawler movement. The different diffractive optical microstructures on the front and rear layers of the flexible variable-angle array diffractive optical device dynamically superposition, modulating the red laser beam. The projection screen records laser projection images and allows direct visual observation. The CCD camera records the laser projection imaging on the projection screen and inputs it into a computer for subsequent data processing.

当只打开绿色激光器时,绿色激光束被透过红光反射绿光蓝光的分光片反射进入主光路,再通过透过红光绿光反射蓝光的分光片、光阑,正入射到本发明柔性变角度阵列衍射光学器件上,电学模块中的控制器驱动步进电机,步进电机带动机械模块中的履带式传送装置进行履带式运动,所述柔性变角度阵列衍射光学器件前后两层上的不同衍射光学微结构动态叠加,对绿色激光束进行调制。所述投影屏幕记录激光投影成像并直接进行目视观察。所述CCD相机记录投影屏幕上的激光投影成像并输入计算机进行后续数据处理。When only the green laser is turned on, the green laser beam is reflected into the main optical path by the beam splitter that transmits red light and reflects green light and blue light, and then enters the flexible On the variable-angle array diffractive optical device, the controller in the electrical module drives the stepping motor, and the stepping motor drives the crawler conveyor in the mechanical module to perform crawler movement. The front and rear layers of the flexible variable-angle array diffractive optical device Different diffractive optical microstructures are dynamically superimposed to modulate the green laser beam. The projection screen records laser projection images and allows direct visual observation. The CCD camera records the laser projection imaging on the projection screen and inputs it into a computer for subsequent data processing.

当只打开蓝色激光器时,蓝色激光束被透过红光绿光反射蓝光的分光片反射进入主光路,再通过光阑,正入射到本发明柔性变角度阵列衍射光学器件上,电学模块中的控制器驱动步进电机,步进电机带动机械模块中的履带式传送装置进行履带式运动,所述柔性变角度阵列衍射光学器件前后两层上的不同衍射光学微结构动态叠加,对蓝色激光束进行调制。所述投影屏幕记录激光投影成像并直接进行目视观察。所述CCD相机记录投影屏幕上的激光投影成像并输入计算机进行后续数据处理。When only the blue laser is turned on, the blue laser beam is reflected by the beam splitter that passes through the red light and green light and reflects the blue light into the main optical path, and then passes through the diaphragm and is incident on the flexible variable-angle array diffractive optical device of the present invention. The electrical module The controller in the system drives the stepping motor, and the stepping motor drives the crawler conveyor in the mechanical module to perform crawler movement. The different diffractive optical microstructures on the front and rear layers of the flexible variable-angle array diffractive optical device are dynamically superimposed, and the blue modulated laser beams. The projection screen records laser projection images and allows direct visual observation. The CCD camera records the laser projection imaging on the projection screen and inputs it into a computer for subsequent data processing.

当同时打开红色和绿色激光器时,红色激光束通过透过红光反射绿光蓝光的分光片,与被透过红光反射绿光蓝光的分光片反射进入主光路的绿色激光束混合形成黄色光,所述黄光透过红光绿光反射蓝光的分光片、光阑,正入射到本发明柔性变角度阵列衍射光学器件上,电学模块中的控制器驱动步进电机,步进电机带动机械模块中的履带式传送装置进行履带式运动,所述柔性变角度阵列衍射光学器件前后两层上的不同衍射光学微结构动态叠加,对黄光进行调制。所述投影屏幕记录激光投影成像并直接进行目视观察。所述CCD相机记录投影屏幕上的激光投影成像并输入计算机进行后续数据处理。When the red and green lasers are turned on at the same time, the red laser beam passes through the spectroscopic sheet that transmits red light and reflects green light and blue light, and mixes with the green laser beam that enters the main optical path reflected by the spectroscopic sheet that transmits red light and reflects green light and blue light to form yellow light. , the yellow light passes through the red light and green light and reflects the blue light through the beam splitter and the aperture, and is incident on the flexible variable angle array diffractive optical device of the present invention, the controller in the electrical module drives the stepping motor, and the stepping motor drives the mechanical The crawler conveyor in the module performs crawler movement, and the different diffractive optical microstructures on the front and rear layers of the flexible variable-angle array diffractive optical device are dynamically superimposed to modulate the yellow light. The projection screen records laser projection images and allows direct visual observation. The CCD camera records the laser projection imaging on the projection screen and inputs it into a computer for subsequent data processing.

当同时打开红色、绿色和蓝色激光器时,红色激光束通过透过红光反射绿光蓝光的分光片,与被透过红光反射绿光蓝光的分光片反射进入主光路的绿色激光束混合形成黄色光,所述黄光透过红光绿光反射蓝光的分光片,与被透过红光绿光反射蓝光的分光片反射进入主光路的蓝色激光束混合形成白光,所述白光再通过光阑,正入射到本发明柔性变角度阵列衍射光学器件上,电学模块中的控制器驱动步进电机,步进电机带动机械模块中的履带式传送装置进行履带式运动,所述柔性变角度阵列衍射光学器件前后两层上的不同衍射光学微结构动态叠加,对白光进行调制。所述投影屏幕记录激光投影成像并直接进行目视观察。所述CCD相机记录投影屏幕上的激光投影成像并输入计算机进行后续数据处理。When the red, green and blue lasers are turned on at the same time, the red laser beam passes through the spectroscopic sheet that reflects green and blue light through red light, and mixes with the green laser beam that is reflected by the spectroscopic sheet that reflects green and blue light through red light and enters the main optical path Yellow light is formed, and the yellow light passes through the spectroscopic sheet that reflects blue light through red light and green light, and is mixed with the blue laser beam reflected into the main optical path by the spectroscopic sheet that passes through red light and green light and reflects blue light to form white light, and the white light is then Through the aperture, it is incident on the flexible variable-angle array diffractive optical device of the present invention, the controller in the electrical module drives the stepping motor, and the stepping motor drives the crawler-type transmission device in the mechanical module to perform crawler movement. Different diffractive optical microstructures on the front and rear layers of the angular array diffractive optical device are dynamically superimposed to modulate white light. The projection screen records laser projection images and allows direct visual observation. The CCD camera records the laser projection imaging on the projection screen and inputs it into a computer for subsequent data processing.

本发明的柔性变角度阵列衍射光学微结构,制作在PDMS柔性材料上,由3组一维二元衍射光学结构首尾连接而成。所述一维二元衍射光学结构为基于M序列的光学微结构(参见附图1和附图2),其一维二元衍射光学结构图案由参数T表示,所述参数T为光学微结构的最小单元宽度,所有光学微结构的宽度均用T的整数倍来表示,所述一维二元衍射光学结构图案的总宽度用T0表示。所述一维二元衍射光学结构的深度为h、所述一维二元衍射光学结构与X轴所夹倾角为θ0The flexible variable-angle array diffractive optical microstructure of the present invention is made on PDMS flexible material, and is formed by connecting three groups of one-dimensional binary diffractive optical structures head to tail. The one-dimensional binary diffractive optical structure is an optical microstructure based on M sequence (see accompanying drawing 1 and accompanying drawing 2), and its one-dimensional binary diffractive optical structure pattern is represented by parameter T, and described parameter T is optical microstructure The minimum unit width of , the widths of all optical microstructures are represented by integer multiples of T, and the total width of the one-dimensional binary diffractive optical structure pattern is represented by T 0 . The depth of the one-dimensional binary diffractive optical structure is h, and the inclination angle between the one-dimensional binary diffractive optical structure and the X axis is θ 0 .

所述T参数为4微米,一维二元衍射光学结构深度h为400纳米,M序列编码为31位编码,即1111100110100100001010111011000。所述3组一维二元衍射光学结构与X轴所夹倾角分别为44.4°、45°、45.6°,采用胶粘剂粘结的方法,沿着Y轴方向将第1组衍射光学结构的头与第3组衍射光学结构的尾相连。The T parameter is 4 microns, the depth h of the one-dimensional binary diffractive optical structure is 400 nanometers, and the M sequence code is a 31-bit code, that is, 1111100110100100001010111011000. The inclination angles between the three groups of one-dimensional binary diffractive optical structures and the X-axis are 44.4°, 45°, and 45.6° respectively, and the head of the first group of diffractive optical structures and the The tail connection of the third group of diffractive optical structures.

参见附图1、附图3和附图5,所述柔性变角度阵列衍射光学器件沿Y轴弯折并首尾相连,形成履带式结构。所述履带式柔性变角度阵列衍射光学器件包括前后两层,每一层包含(N/2)组一维二元衍射光学微结构。当激光束照射到履带式柔性变角度阵列衍射光学器件上时,光束通过了前后两层柔性变角度阵列衍射光学微结构,尽管所述履带式柔性变角度阵列衍射光学器件中的N个一维二元衍射光学微结构均为一维结构,但前后两层柔性变角度阵列衍射光学微结构的叠加,使得原本的一维衍射光学器件变成了二维衍射光学器件。当进行履带式运动时,前后两层柔性变角度阵列衍射光学微结构以相同的运动速度、向相反方向运动,因此本发明柔性变角度阵列衍射光学器件,可以实现红、绿、蓝全波段激光散斑抑制。Referring to accompanying drawings 1, 3 and 5, the flexible variable-angle array diffractive optical device is bent along the Y axis and connected end to end to form a crawler structure. The crawler-type flexible variable-angle array diffractive optical device includes two layers, front and rear, and each layer contains (N/2) groups of one-dimensional binary diffractive optical microstructures. When the laser beam is irradiated on the crawler-type flexible variable-angle array diffractive optical device, the light beam passes through the front and rear two layers of flexible variable-angle array diffractive optical microstructures, although the N one-dimensional The binary diffractive optical microstructures are all one-dimensional structures, but the superposition of the front and rear flexible variable-angle array diffractive optical microstructures turns the original one-dimensional diffractive optical device into a two-dimensional diffractive optical device. When performing crawler movement, the front and rear flexible variable-angle array diffractive optical microstructures move at the same speed and in opposite directions. Therefore, the flexible variable-angle array diffractive optical device of the present invention can realize red, green, and blue full-band lasers. Speckle suppression.

再进一步,所述履带式柔性变角度阵列衍射光学器件固定在两根旋转立柱上,所述两根旋转立柱安装在一个基于齿轮传动的履带式传送装置上,所述两根旋转立柱中的一根上连接了两个弹簧,所述弹簧对旋转立柱施加拉力,使履带式柔性变角度阵列衍射光学器件始终处于拉伸状态。所述齿轮安装在旋转立柱的底部并由一个电学控制模块控制。所述电学控制模块,由步进电机驱动齿轮来控制所述柔性变角度阵列衍射光学器件进行连续的履带式运动。Still further, the crawler-type flexible variable-angle array diffractive optical device is fixed on two rotating columns, and the two rotating columns are installed on a crawler conveyor based on gear transmission, and one of the two rotating columns Two springs are connected to the root, and the springs exert tension on the rotating column, so that the crawler-type flexible variable-angle array diffractive optical device is always in a stretched state. The gears are mounted on the bottom of the rotating column and controlled by an electrical control module. The electrical control module is driven by a stepping motor to control the flexible variable angle array diffractive optical device to perform continuous crawler movement.

本发明一种柔性变角度阵列衍射光学器件的实现系统的工作原理如下:The working principle of the implementation system of a flexible variable-angle array diffractive optical device of the present invention is as follows:

1)散斑对比度SC计算公式:1) Calculation formula of speckle contrast SC:

其中σ是光强分布的标准差,是平均光强分布。大部分散斑抑制方法出发点都是使光强分布平均。where σ is the standard deviation of the light intensity distribution, is the average light intensity distribution. The starting point of most speckle reduction methods is to average the light intensity distribution.

2)本发明一种柔性变角度阵列衍射光学器件由N组一维二元衍射光学结构首尾连接而成。所述一维二元衍射光学结构包括但不限于光栅结构、基于伪随机序列的光学微结构、基于M序列的光学微结构、基于Barker码的光学微结构。以基于M序列的光学微结构为例,所述履带式柔性变角度阵列衍射光学器件抑制散斑的原理是:影响激光散斑抑制效果的基本因素有两个:运动过程中的运动方向和运动速度。用X轴方向和Y轴方向的线性位移来确定运动方向和运动速度对散斑抑制效果的影响,理论计算公式如下:2) A flexible variable-angle array diffractive optical device of the present invention is composed of N groups of one-dimensional binary diffractive optical structures connected end to end. The one-dimensional binary diffractive optical structures include but not limited to grating structures, optical microstructures based on pseudo-random sequences, optical microstructures based on M sequences, and optical microstructures based on Barker codes. Taking the optical microstructure based on M-sequence as an example, the principle of the crawler-type flexible variable-angle array diffractive optical device to suppress speckle is: there are two basic factors that affect the effect of laser speckle suppression: the direction of motion and the direction of motion during motion. speed. Use the linear displacement in the X-axis direction and the Y-axis direction to determine the influence of the motion direction and speed on the speckle suppression effect. The theoretical calculation formula is as follows:

其中D是人眼分辨率单元在屏幕上的投影宽度,x1,x2,y1,y2是激光束通过两块沿不同轴运动的二元衍射光学结构投影到屏幕上的坐标,H(x1,x2,y1,y2)和H(x1,x1,y1,y1)是由M序列二元光学衍射元件调制的屏幕平面处的激光束的自相关函数:Where D is the projection width of the human eye resolution unit on the screen, x 1 , x 2 , y 1 , y 2 are the coordinates where the laser beam is projected onto the screen through two binary diffractive optical structures moving along different axes, H(x 1 ,x 2 ,y 1 ,y 2 ) and H(x 1 ,x 1 ,y 1 ,y 1 ) are the autocorrelation functions of the laser beam at the screen plane modulated by the M-sequence binary optical diffraction elements :

其中Δt是人眼的曝光时间;V1是二元光学衍射元件图像在屏幕上沿Y轴方向的运动速度,V2是沿X轴方向的运动速度;T0是二元光学衍射元件一个周期内的最小单位长度;M是非零整数;T(x,y,V,t)是二元光学衍射元件的透射系数函数。Where Δt is the exposure time of the human eye; V 1 is the moving speed of the binary optical diffraction element image on the screen along the Y-axis direction, V 2 is the moving speed along the X-axis direction; T 0 is a period of the binary optical diffraction element The minimum unit length within ; M is a non-zero integer; T (x, y, V, t) is the transmission coefficient function of the binary optical diffraction element.

参见附图6,为本发明一种柔性变角度阵列衍射光学器件的实现系统,只打开红光激光器时的散斑抑制结果。参见附图7,为本发明一种柔性变角度阵列衍射光学器件的实现系统,只打开绿光激光器时的散斑抑制结果。Referring to FIG. 6 , it is the implementation system of a flexible variable-angle array diffractive optical device of the present invention, and the speckle suppression result when only the red laser is turned on. Referring to FIG. 7 , it is the implementation system of a flexible variable-angle array diffractive optical device of the present invention, and the speckle suppression result when only the green laser is turned on.

Claims (10)

1. a kind of flexible varied angle slot array diffraction optical device realizes system, it is characterised in that:It is described to realize that system includes machine Tool module, electricity control module and optical module, the optical module include laser, calibration lens, diaphragm, flexible varied angle Array diffraction optical device, imaging len, projection screen and CCD camera and computer processing system, the laser are visible The mono-colour laser of any wavelength in optical range, the laser, calibration lens, diaphragm, flexible varied angle slot array diffraction light Learn device and imaging len is located in same optical axis;
The mechanical module includes crawler type conveyer;The electricity control module includes being used to drive crawler type conveyer The motor for rotating and then driving flexible varied angle slot array diffraction optical device to realize crawler type motion.
2. a kind of flexible varied angle slot array diffraction optical device as claimed in claim 1 realizes system, it is characterised in that:Institute Stating mechanical module includes frame, two Rotary cloumns and spring, and Rotary cloumn left and right translation and can be rotatably sleeved on The side of frame, the spring one end are connected with a Rotary cloumn, and the other end of the spring is fixed in frame;Separately A piece Rotary cloumn is rotatably sleeved on the opposite side of frame, and the output shaft of another Rotary cloumn and motor passes Dynamic connection, the flexible varied angle slot array diffraction optical device are wound on two Rotary cloumns, and the pulling force of the spring makes Obtain flexible varied angle slot array diffraction optical device and be in extended state all the time.
3. a kind of flexible varied angle slot array diffraction optical device as claimed in claim 2 realizes system, it is characterised in that:Institute State and driving gear is installed on the output shaft of motor, the outer end installation driven gear of another Rotary cloumn, the master Moving gear engages with the driven gear.
4. a kind of flexible varied angle slot array diffraction optical device as described in one of claims 1 to 3 realizes system, its feature It is:The motor is stepper motor.
5. a kind of flexible varied angle slot array diffraction optical device as described in one of claims 1 to 3 realizes system, its feature It is:The optical module includes red laser and its calibration lens, green (light) laser and its calibration lens, blue laser And its calibration lens, the light splitting piece through reflection to red light green glow blue light, the light splitting piece through feux rouges green reflection blue light;It is described red Light laser and its calibration lens, the light splitting piece through reflection to red light green glow blue light, the light splitting through feux rouges green reflection blue light Piece, diaphragm, the property varied angle slot array diffraction optical device and imaging len are located in same optical axis, and are primary optical axis, described The optical axis of green (light) laser and its calibration lens, blue laser and its calibration lens is vertical with primary optical axis, the green laser The green laser that device is sent enters main optical path by the light splitting piece through reflection to red light green glow blue light, and the blue laser is sent Blue laser by entering main optical path through the light splitting piece of feux rouges green reflection blue light.
6. a kind of flexible varied angle slot array diffraction optical device as described in one of claims 1 to 3 realizes system, its feature It is:The flexible varied angle slot array diffraction optical device is produced on flexible material, by N group one-dimensional binary diffractive optical structures Head and the tail are formed by connecting, and the one-dimensional binary diffractive optical structure includes optical grating construction and optical microstructures, described one-dimensional to refer to spread out It is one-dimensional patterns to penetrate optical texture, and the binary refers to because the optical path difference that diffractive optical structure depth is formed is binaryzation.
7. a kind of flexible varied angle slot array diffraction optical device as claimed in claim 6 realizes system, it is characterised in that:Institute One-dimensional binary diffractive optical structure pattern is stated to be represented by parameter T, the parameter T be optical microstructures minimum unit width, institute The width for having optical microstructures represents that the overall width of the one-dimensional binary diffractive optical structure pattern is used with T integral multiple T0Represent;The depth of the one-dimensional binary diffractive optical structure is h, is inclined folded by the one-dimensional binary diffractive optical structure and X-axis Angle is θ0
8. a kind of flexible varied angle slot array diffraction optical device as claimed in claim 6 realizes system, it is characterised in that:Institute Optical microstructures are stated for the optical microstructures based on pseudo-random sequence, the optical microstructures based on M sequence or based on Barker code Optical microstructures.
9. a kind of flexible varied angle slot array diffraction optical device as claimed in claim 6 realizes system, it is characterised in that:Institute It is positive integer to state N, represents the array number included in flexible varied angle slot array diffraction optical device, N=1,2,3 ... ∞, works as N When=1, the flexible varied angle slot array diffraction optical device suppressed for laser speckle is single diffraction optical device, that is, is spread out Optical device unit is penetrated, the structural parameters identical one-dimensional binary that each diffraction optical device unit includes m cycle spreads out Penetrate optical texture pattern;As N≤2, the flexible varied angle slot array diffraction optical device suppressed for laser speckle is bag Diffraction optical device containing N number of array;N number of diffraction optical device unit in the array is disposably produced on monolithic flexibility material On material, the one-dimensional binary diffractive optical structure pattern inside N number of diffraction optical device unit in its array is identical or differs, N groups one-dimensional binary diffractive optical structure head and the tail connect, along Y direction by the head and N groups of the 1st group of diffractive optical structure The tail of diffractive optical structure is connected.
10. realizing system with a kind of flexible varied angle slot array diffraction optical device as claimed in claim 9, its feature exists In:N number of diffraction optical device unit in array is different from inclination angle folded by X-axis, is expressed as θ±i, wherein θ±i0±(N-1)/ 2 Δ θ ± i Δ θ, Δ θ represent neighboring diffraction optical device unit and the amplitude of variation at inclination angle folded by X-axis.
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JPS60230650A (en) * 1984-04-30 1985-11-16 Shimadzu Corp Formation of fine pattern
JPH07243870A (en) * 1994-03-08 1995-09-19 Ricoh Co Ltd Rotary encoder
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CN106842607A (en) * 2017-01-19 2017-06-13 浙江工业大学 What the laser speckle based on diffractive-optical element suppressed realizes system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60230650A (en) * 1984-04-30 1985-11-16 Shimadzu Corp Formation of fine pattern
JPH07243870A (en) * 1994-03-08 1995-09-19 Ricoh Co Ltd Rotary encoder
US20130088723A1 (en) * 2011-10-05 2013-04-11 Daniel Feldkhun Systems and methods for suppressing coherent structured illumination artifacts
CN106842607A (en) * 2017-01-19 2017-06-13 浙江工业大学 What the laser speckle based on diffractive-optical element suppressed realizes system

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