CN107664646A - A kind of full-automatic open defect check device and method - Google Patents
A kind of full-automatic open defect check device and method Download PDFInfo
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- CN107664646A CN107664646A CN201610608413.7A CN201610608413A CN107664646A CN 107664646 A CN107664646 A CN 107664646A CN 201610608413 A CN201610608413 A CN 201610608413A CN 107664646 A CN107664646 A CN 107664646A
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- 230000007547 defect Effects 0.000 title claims abstract description 95
- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000007689 inspection Methods 0.000 claims abstract description 105
- 230000007246 mechanism Effects 0.000 claims abstract description 28
- 239000011521 glass Substances 0.000 claims description 68
- 239000000758 substrate Substances 0.000 claims description 67
- 230000033001 locomotion Effects 0.000 claims description 18
- 230000001360 synchronised effect Effects 0.000 claims description 16
- 230000004075 alteration Effects 0.000 claims description 9
- 230000007723 transport mechanism Effects 0.000 claims description 9
- 239000003086 colorant Substances 0.000 claims description 6
- 230000003595 spectral effect Effects 0.000 claims description 6
- 230000009466 transformation Effects 0.000 claims description 6
- 238000000844 transformation Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 4
- 239000000969 carrier Substances 0.000 claims description 2
- -1 by the camera Substances 0.000 claims 1
- 239000004047 hole gas Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000003116 impacting effect Effects 0.000 description 5
- 208000037656 Respiratory Sounds Diseases 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention discloses a kind of full-automatic open defect check device and method, the device includes microscope carrier support, the frame-type microscope carrier above the microscope carrier support and the lamp source above the frame-type microscope carrier, the frame-type microscope carrier is provided with least one set of defect inspection mechanism, the defect inspection mechanism includes the slide rail located at the frame-type microscope carrier edge, the expansion link being vertical on the slide rail, and horizontal camera group, porous gas blow pipe and light tube group on the expansion link, the adjustable angle of camera in the camera group.The present invention improves production efficiency, has saved cost of labor, improve the automaticity and product quality of producing line without relying on manual operation and judgement.
Description
Technical field
The present invention relates to the open defect inspection of flat display field, and in particular to a kind of full-automatic open defect inspection dress
Put and method.
Background technology
In the TFT (Thin Film Transistor, thin film transistor (TFT)) or CF (Colour of flat display field
Filter, colored filter) in manufacturing process, made for each layer of technique and be required for carrying out defect inspection.Wherein defect
It is divided into microdefect and open defect, for microdefect, AOI (Automatic optic is used in producing line
Inspection, automatic optics inspection) checked automatically, and open defect includes Mura (color is uneven), crackle and unfilled corner
Chipping etc., so far still by the way of hand inspection.
Existing open defect checks equipment as shown in figure 1, mainly including：Microscope carrier support 1 ', frame-type microscope carrier 2 ', fix
Inspecting lamp 3 ' and hand-held inspecting lamp 4 ', after glass substrate (Glass) enters equipment, the band dynamic frame tye of microscope carrier support 1 ' microscope carrier 2 ' revolves
Turn to make glass substrate tilt certain angle, then manually open fixed inspecting lamp, the whole face property of substrate is carried out by human eye
The uneven inspection of color, then carries out the inspection of hand-hold lamp fitting irradiation, respectively the edge and positive and negative with white light and green glow to substrate
Checked, when checking foreign matter, manually hold air gun and it is purged, used when checking defect and manually remembered
Record, inspection finish rear artificial work and judge that glass substrate glass is sent to clip as defined in system according to result of determination, carry out
Next processing procedure.But use this inspection equipment to rely on hand inspection and judgement, and the subjective determination ability of people, decision-making ability
Product quality and yield will be directly affected with speed.
Have started into box and module set section substitute people to aobvious using complete-automatic check equipment in flat display field at present
The inspection of display screen curtain, so as to reduce influence of the subjective differences because of people to product quality, while reduce the management cost of people.
The feasibility checked simultaneously in fully-automatic equipment using high-resolution camera its open defect has obtained actually testing
Card.But due to being that display screen is checked into box and module set section, and TFT or CF inspection is the inspection for glass large substrates
Look into, so the structure of equipment is different, and check that principle is also different because of the feature difference of checked product, therefore can not
It is applicable.
The content of the invention
The present invention is directed to the above-mentioned problems in the prior art, there is provided one kind can effectively reduce cost of labor, improve
Full-automatic the open defect check device and method of automaticity and product quality.
In order to solve the above-mentioned technical problem, the technical scheme is that：A kind of full-automatic open defect check device, bag
Include microscope carrier support, the frame-type microscope carrier above the microscope carrier support and the lamp source above the frame-type microscope carrier, institute
State frame-type microscope carrier and be provided with least one set of defect inspection mechanism, the defect inspection mechanism includes being located at the frame-type microscope carrier
The slide rail at edge, the expansion link being vertical on the slide rail, and it is horizontal camera group on the expansion link, porous
Gas blow pipe and light tube group, the adjustable angle of camera in the camera group.
Further, the frame-type microscope carrier is provided with two, corresponding with two microscope carrier supports respectively, two frames
A rotation microscope carrier and transport mechanism corresponding with the rotation microscope carrier are additionally provided between posture microscope carrier.
Further, the slide rail in the defect inspection mechanism is provided with two, and it is relative to be divided into the frame-type microscope carrier
On two sides, the camera group and porous gas blow pipe are located therein corresponding to a slide rail on expansion link, and the light tube group is set
In corresponding to another slide rail on expansion link.
Further, the camera group and porous gas blow pipe are on same root expansion link.
Further, the expansion link of the camera group and porous gas blow pipe is set to be provided with two, respectively positioned at setting institute
State the both sides of the expansion link of light tube group..
Further, the slide rail in the defect inspection mechanism is provided with one, located at wherein the one of the frame-type microscope carrier
On bar side.
Further, the slide rail is provided with two expansion links, and the camera group and porous gas blow pipe are located therein one
On root expansion link, the light tube group is on another expansion link.
Further, the slide rail is provided with three expansion links, and the light tube group is located on a middle expansion link,
The camera group and porous gas blow pipe are equipped with the expansion link of both sides.
Further, the transport mechanism is manipulator, located at the side of the rotation microscope carrier.
Further, the microscope carrier support and frame-type microscope carrier are respectively equipped with one, and the frame-type microscope carrier is provided with two
Group defect inspection mechanism, is respectively arranged on two orthogonal sides of the frame-type microscope carrier.
Further, the slide rail in the defect inspection mechanism is provided with one, and the slide rail is provided with two expansion links, institute
State camera group and porous gas blow pipe is located therein on an expansion link, the light tube group is on another expansion link.
Further, the slide rail is provided with three expansion links, and the light tube group is located on a middle expansion link,
The camera group and porous gas blow pipe are equipped with the expansion link of both sides.
Further, cross bar, the shooting are additionally provided with expansion link corresponding with the camera group and porous gas blow pipe
Head group and porous gas blow pipe are respectively arranged on the both sides of the cross bar length direction, and some cameras in the camera group are along institute
The length direction for stating cross bar is horizontally disposed with.
Further, the light tube group includes the different fluorescent tube of at least two colors.
The present invention also provides a kind of inspection method of full-automatic open defect check device, comprises the following steps：
S1：Glass substrate is placed in one on a frame-type microscope carrier, opens the lamp source above frame-type microscope carrier, microscope carrier branch
Frame band dynamic frame tye microscope carrier is rotated to set angle, starts to check work；
S2:The angle of camera corresponding with glass substrate edge to the edge with glass substrate hangs down in adjustment camera group
Directly, shoot the photo of glass substrate edge, to glass substrate carry out edge the defects of inspection；
S3：The angle of camera in camera group is adjusted, by the light color of setting sequential transformations lamp source, is at the same time clapped
The photo taken the photograph at the diverse location of glass substrate side, side aberration inspection is carried out, closes lamp source afterwards；
S4：One of fluorescent tube in light tube group is opened, the angle of camera in camera group is adjusted, drives expansion link
The light tube group and camera the group slide rail corresponding to are synchronized with the movement, while the camera continuously shot images pair in camera group
Glass substrate is checked comprehensively, is then switched off the fluorescent tube, opens other fluorescent tubes, adjusts the angle of camera in camera group,
Repeat comprehensive checking step；
S5：The spectral discrimination inspection result shot according to camera, check device is removed if result is unqualified, otherwise logical
Cross conveyer and be transported to rotation microscope carrier, rotated horizontally 90 degree by rotating microscope carrier, be then sent to by transmission device
On another frame-type microscope carrier, and repeat step S1~S4, to obtain the final inspection result of glass substrate.
Further, in the step S2/S3/S4, in addition to when camera photographs foreign matter, porous gas blow pipe is opened
Purged.
Further, in the step S4, in addition to, pass through the height of expansion link regulation light tube group and camera group
Degree, while the angle of camera is adjusted, until photographing clearly defect image.
Further, in the step S4, the angle for adjusting camera in the camera group is specially：Make camera pair
The lighting position of the accurate fluorescent tube.
Further, in the step S4, the fluorescent tube and the camera slide rail corresponding to are synchronized with the movement specially：It is described
The light edge that the focus of camera follows fluorescent tube to send in camera group moves.
Further, in the step S5, judge that inspection result is specially：By being contrasted to the gray scale of different images
Draw inspection result.
The present invention also provides a kind of inspection method of full-automatic open defect check device, comprises the following steps：
S1：Glass substrate is placed on frame-type microscope carrier, opens the lamp source above frame-type microscope carrier, microscope carrier support drives frame
Posture microscope carrier is rotated to set angle, starts to check work；
S2:Adjust shooting corresponding with glass substrate edge in camera group of the frame-type microscope carrier wherein in a line
The angle of head is to the edge-perpendicular with glass substrate, by the photo of camera shooting glass substrate edge, to glass substrate
The defects of carrying out edge inspection；
S3：Adjust the angle of camera in camera group on this side, by setting sequential transformations lamp source light color, with
This shoots the photo at the diverse location of glass substrate side simultaneously, carries out side aberration inspection, closes lamp source afterwards；
S4：One of fluorescent tube in light tube group on this side is opened, expansion link drives the light tube group and camera group
The slide rail corresponding to is synchronized with the movement, while the camera continuously shot images in camera group are examined comprehensively to glass substrate
Look into, be then switched off the fluorescent tube, open other fluorescent tubes, adjust the angle of camera in camera group, repeat comprehensive checking step；
S5：The spectral discrimination inspection result shot according to camera on this side, removed if result is unqualified and check dress
Put, otherwise open one of fluorescent tube in another vertical edges in light tube group, and repeat step S4 operation, to obtain glass
The final inspection result of substrate.
Further, in the step S2/S3/S4, in addition to when camera photographs foreign matter, porous gas blow pipe is opened
Purged.
Further, in the step S4, in addition to, the height of fluorescent tube and camera is adjusted by the expansion link, together
When adjust the height of the camera, until the defects of photographing image clearly is visible.
Further, in the step S4, the angle for adjusting camera in the camera group is specially：Make camera pair
The lighting position of the accurate fluorescent tube.
Further, in the step S4, the light tube group and camera the group slide rail corresponding to are synchronized with the movement specially：
The light edge that the focus of camera follows fluorescent tube to send in the camera group moves.
Further, in the step S5, judge that inspection result is specially：By being contrasted to the gray scale of different images
Draw inspection result.
The invention provides a kind of full-automatic open defect check device and method, defect is set to examine on frame-type microscope carrier
Mechanism is looked into, the light of different colours is sent by lamp source, using the camera of adjustable angle to the edge and side of glass substrate
Carry out aberration inspection；Then the light tube group and camera the group slide rail corresponding to is driven to be synchronized with the movement by expansion link, not
Under irradiation with the fluorescent tube of color, glass substrate is checked comprehensively by camera serialograph, and pass through contrast
The method of the gray scale of image obtains inspection result, reliable and stable.The present invention improves production without relying on manual operation and judgement
Efficiency, cost of labor is saved, improved the automaticity and product quality of producing line.
Brief description of the drawings
Fig. 1 is the structural representation that existing open defect checks equipment；
Fig. 2 is the structural representation of full-automatic open defect check device in the embodiment of the present invention 1；
Fig. 3 is the center posture microscope carrier of the embodiment of the present invention 1 and defect inspection mechanism main structure figure；
Fig. 4 is the center posture microscope carrier of the embodiment of the present invention 2 and the structural representation of defect inspection mechanism；
Fig. 5 is the center posture microscope carrier of the embodiment of the present invention 5 and the structural representation of defect inspection mechanism.
Shown in Fig. 1：1 ', microscope carrier support；2 ', frame-type microscope carrier；3 ', fixed inspecting lamp；4 ', inspecting lamp is held；
Shown in Fig. 2-5：1st, microscope carrier support；2nd, frame-type microscope carrier；3rd, lamp source；4th, defect inspection mechanism；41st, slide rail；42、
Expansion link；43rd, camera group；44th, porous gas blow pipe；45th, light tube group；46th, cross bar；5th, microscope carrier is rotated；6th, transport mechanism.
Embodiment
The present invention is described in detail below in conjunction with the accompanying drawings.
Embodiment 1
As Figure 2-3, a kind of full-automatic open defect check device of the present invention, including microscope carrier support 1, located at the load
The frame-type microscope carrier 2 and the lamp source 3 above the frame-type microscope carrier 2, lamp source 3 of the top of platform support 1 can be become by setting order
Light color is changed, the frame-type microscope carrier 2 is provided with least one set of defect inspection mechanism 4, and the defect inspection mechanism 4 includes setting
Slide rail 41 in the edge of frame-type microscope carrier 2, the expansion link 42 being vertical on the slide rail 41, and it is horizontal located at described
Camera group 43, porous gas blow pipe 44 (not marked in Fig. 2-3) and light tube group 45 on expansion link 42, in the camera group 43
The adjustable angle of camera.Specifically, expansion link 42 can along the horizontal movement of slide rail 41, so as to drive camera group 43 thereon,
Porous gas blow pipe 44 and light tube group 45 are moved horizontally, and several cameras are provided with camera group 43, and the light tube group 45 includes
The different fluorescent tube of at least two colors, the present embodiment includes white light fluorescent tube and green glow fluorescent tube, arranged in parallel, in lamp source 3
Under irradiation with light tube group 45, camera shoots photo to be checked it comprehensively to glass substrate from different perspectives.
Preferably, the frame-type microscope carrier 2 is provided with two, corresponding with two microscope carrier supports 1 respectively, i.e. two frameworks
Formula microscope carrier 2 is respectively arranged on the top of two microscope carrier supports 1, be additionally provided between two frame-type microscope carriers 2 a rotation microscope carrier 5 and with
Transport mechanism 6 corresponding to the rotation microscope carrier 5.Preferably, the transport mechanism 6 is manipulator, located at the rotation microscope carrier 5
Side.Checked specifically, glass substrate initially enters one of frame-type microscope carrier 2, after inspection terminates, pass through transmission
Mechanism 6 is sent to rotation microscope carrier 5 and is rotated by 90 ° and then is sent to by transport mechanism 6 on another frame-type microscope carrier 2 and carry out
Check, the direction vertical from two is checked glass substrate comprehensively, improves the reliability of inspection result.
Preferably, each top of frame-type microscope carrier 2 is provided with one group of defect inspection mechanism 4, the defect inspection mechanism 4
In slide rail 41 be provided with two, be divided on two relative sides of the frame-type microscope carrier 2, the camera group 43 and porous blow
Tracheae 44 is located therein corresponding to a slide rail 41 on expansion link 42, and the light tube group 45 is stretched located at corresponding to another slide rail 41
On contracting bar 42.
Preferably, the camera group 43 and porous gas blow pipe 44 are on same root expansion link 42, i.e. two slide rails 41
On expansion link 42 be equipped with one, and be additionally provided with expansion link 42 corresponding with the camera group 43 and porous gas blow pipe 44
Cross bar 46, the camera group 43 and porous gas blow pipe 44 are arranged on the cross bar 46, and are respectively arranged on the cross bar 46
The both sides of length direction, length direction of some cameras along the cross bar 46 in the camera group 43 are horizontally disposed with, i.e.,
Camera is horizontal above glass substrate along cross bar 46, coverage can cover glass substrate length direction and width side
To.
The present invention also provides a kind of full-automatic appearance inspection method, comprises the following steps：
S1：Glass substrate is placed in one on a frame-type microscope carrier 2, opens the lamp source 3 of the top of frame-type microscope carrier 2, is carried
Platform support 1 is rotated to set angle with dynamic frame tye microscope carrier 2, starts to check work；
S2:The angle of camera corresponding with the edge of glass substrate in camera group 43 is adjusted, makes itself and glass substrate
Edge-perpendicular, and shoot the photo of glass substrate edge, the defects of edge is carried out to glass substrate inspection, including for crackle
Or the inspection of the major defect such as defect, when camera photographs foreign matter, open porous gas blow pipe 44 and purged, avoid foreign matter
Defect inspection is impacted.
S3：The angle of camera in camera group 43 is adjusted, by the light color of setting sequential transformations lamp source, at the same time
The photo at the diverse location of glass substrate side is shot, side aberration inspection is carried out, closes lamp source afterwards；Equally when camera is clapped
When taking the photograph foreign matter, open porous gas blow pipe 44 and purged, avoid foreign matter from impacting defect inspection.
S4：One of fluorescent tube in light tube group 43 is opened, the angle of camera in camera group 43 is adjusted, makes expansion link
42 drive light tube group 43 and camera the group slide rail 42 corresponding to be synchronized with the movement, while the camera in camera group 43 connects
Continuous shooting image is checked glass substrate comprehensively, is then switched off the fluorescent tube, opens other fluorescent tubes, is adjusted in camera group 43
The angle of camera, repeat comprehensive checking step；In the present embodiment, light group 45 includes white light fluorescent tube and green glow fluorescent tube, first
First individually open white light fluorescent tube once check comprehensively, then individually open green glow fluorescent tube and once check comprehensively, ensure
The reliability of inspection result.The angle for wherein adjusting camera in the camera group 43 is specially：Make described in camera alignment
The lighting position of fluorescent tube, specially illuminates most bright position, and the light tube group 45 and camera group 43 are synchronous along corresponding slide rail
Motion is specially：The light edge that the focus of camera follows fluorescent tube to send in camera group 43 moves, specially most bright
Light.When run into defect image it is unintelligible when, the height that the expansion link 42 adjusts light tube group 45 and camera group 43 can be passed through
Degree, while the angle of camera is adjusted, until the defects of photographing image clearly is visible, i.e., expansion link 42 can carry fluorescent tube and exist
Moved up and down above defect to strengthen and weaken intensity of illumination, meanwhile, camera adjusts different in certain angle scope internal rotation
Angle, both continuous actions coordinate lower shooting to obtain the most clear picture of defect image.Equally when camera photographs foreign matter,
Open porous gas blow pipe 44 to be purged, avoid foreign matter from impacting defect inspection.
S5：The spectral discrimination inspection result shot according to camera, it is specially：By being carried out to the gray scale of different images pair
Than drawing inspection result, check device is removed if result is unqualified, otherwise rotation microscope carrier 5 is transported to by conveyer 6, is led to
Overwinding reprints platform and is rotated horizontally 90 degree, is then sent to by transmission device 6 on another frame-type microscope carrier 2, and repeats
Step S1~S4, to obtain the final inspection result of glass substrate.The transport mechanism 6 is manipulator, is carried located at the rotation
The side of platform 5, for by glass substrate therefrom a frame-type microscope carrier 2 be sent to rotation microscope carrier 5 rotated after transmit again
To another frame-type microscope carrier 2, realize and glass substrate is checked comprehensively from two vertical directions, improve inspection result
Reliability.
Embodiment 2
As shown in figure 4, the camera group 43 and porous gas blow pipe are set as different from Example 1, in the present embodiment
44 expansion link 42 is provided with two, respectively positioned at the both sides for the expansion link 42 for setting the light tube group, i.e., with camera group 43 and
Slide rail 41 corresponding to porous gas blow pipe 44 is provided with two expansion links 42, and a camera group 43 is equipped with every expansion link 42
With a porous gas blow pipe 44, another slide rail 41 is provided with an expansion link 42, which is provided with light tube group 45, and the light tube group
Expansion link 42 corresponding to 45 is located at the centre of two expansion links 42 of opposite side, so that two groups of camera groups 43 are located at fluorescent tube respectively
The both sides of group 45, in the present embodiment, two camera groups 43 are symmetrical arranged along light tube group 45, are clapped simultaneously after adjustment angle
Take the photograph photo.
Embodiment 3
Unlike above-described embodiment 1 and embodiment 2, each top of frame-type microscope carrier 2 is provided with the present embodiment
One group of defect inspection mechanism 4, the slide rail 41 in the defect inspection mechanism 4 is provided with one, positioned at its of the frame-type microscope carrier 2
In middle a line.The slide rail 41 is provided with two expansion links 42, and the camera group 43 and porous gas blow pipe 44 are located therein
On a piece expansion link 42, the light tube group 45 is located on another expansion link 42, i.e. camera group 43, porous gas blow pipe 44 and lamp
Pipe group 45 is set in the same direction, can be synchronized with the movement under the drive of expansion link 42.
Embodiment 4
Unlike above-described embodiment 3, slide rail 41 described in the present embodiment is provided with three expansion links 42, the fluorescent tube
Group 45 is equipped with the camera group 43 and porous air blowing on a middle expansion link 42 on the expansion link 42 of both sides
Pipe 44.That is two groups of camera groups 43 are located at the both sides of light tube group 45 respectively, and in the present embodiment, two camera groups 43 are along light tube group
45 are symmetrical arranged, and shooting photo is carried out simultaneously after adjustment angle.
Embodiment 5
As shown in figure 5, unlike above-described embodiment 1-4, in the present embodiment, the microscope carrier support 1 and frame-type carry
Platform 2 is respectively equipped with one, and the frame-type microscope carrier 2 is provided with Liang Zu defect inspections mechanism 4, is respectively arranged on the frame-type microscope carrier
On 2 two orthogonal sides, glass substrate is checked comprehensively from two vertical directions respectively.In the present embodiment,
Wherein the defects of frame-type microscope carrier 2 inspection body 4 is not drawn carefully.
Preferably, the slide rail 41 in the defect inspection mechanism 4 is provided with one, and the slide rail 41 is provided with two expansion links
42, the camera group 43 and porous gas blow pipe 44 are located therein on an expansion link 42, and the light tube group is stretched located at another
On contracting bar 42, i.e., camera group 43, porous gas blow pipe 44 and light tube group 45 are set in the same direction, can be synchronous under the drive of expansion link 42
Motion.
Preferably, the slide rail 41 is provided with three expansion links 42, and the light tube group 43 is described flexible located at middle one
On bar 42, the camera group 43 and porous gas blow pipe 44 are equipped with the expansion link 42 of both sides.I.e. two groups of camera groups 43 are divided
Not Wei Yu light tube group 45 both sides, in the present embodiment, two camera groups 43 are symmetrical arranged along light tube group 45, after adjustment angle
Carry out shooting photo simultaneously.
The present embodiment also provides a kind of full-automatic external appearance defect examination method, comprises the following steps：
S1：Glass substrate is placed on frame-type microscope carrier 2, opens the lamp source 3 of the top of frame-type microscope carrier 2, the band of microscope carrier support 1
Dynamic frame tye microscope carrier 2 is rotated to set angle, starts to check work；
S2:Adjust corresponding with the edge of glass substrate in camera group 43 of the frame-type microscope carrier 2 wherein in a line
Camera angle to edge-perpendicular with glass substrate, the photo of glass substrate edge is shot by the camera, to glass
Glass substrate carries out the inspection of the defects of edge；Including the inspection for major defects such as crackle or defects, when camera photograph it is different
During thing, open porous gas blow pipe 44 and purged, avoid foreign matter from impacting defect inspection.
S3：The angle of camera in camera group 43 on this side is adjusted, by the light face of setting sequential transformations lamp source 3
Color, the photo at the diverse location of glass substrate side is at the same time shot, side aberration inspection is carried out, closes lamp source afterwards；Together
Sample is opened porous gas blow pipe 44 and purged, avoid foreign matter from impacting defect inspection when camera photographs foreign matter.
S4：One of fluorescent tube in light tube group 45 on this side is opened, expansion link 42 drives the light tube group 45 and taken the photograph
As head group 43 is synchronized with the movement along corresponding slide rail 41, while the camera continuously shot images in camera group 43 are to glass substrate
Checked comprehensively, be then switched off the fluorescent tube, open other fluorescent tubes, adjust the angle of camera in camera group 43, repeating should
Comprehensive checking step；In the present embodiment, light group 45 includes white light fluorescent tube and green glow fluorescent tube, individually opens white light fluorescent tube first and enters
Row once checks comprehensively, then individually opens green glow fluorescent tube and once check comprehensively, ensures the reliability of inspection result.Wherein
The angle for adjusting camera in the camera group 43 is specially：Camera is directed at the lighting position of the fluorescent tube, be specially
The most bright position of illumination, the light tube group 45 and camera group 43 are synchronized with the movement specially along corresponding slide rail：Camera group 43
The light edge that the focus of middle camera follows fluorescent tube to send moves, specially most bright light.When running into defect image
When unintelligible, the height of light tube group 45 and camera group 43 can be adjusted by the expansion link 42, while adjust the angle of camera
Degree, until the defects of photographing image clearly is visible, i.e., expansion link 42 can carry fluorescent tube and be moved up and down above defect to increase
Strong and decrease intensity of illumination, meanwhile, camera adjusts different angle in certain angle scope internal rotation, and both continuous actions coordinate
Lower shooting obtains the most clear picture of defect image.Equally when camera photographs foreign matter, open porous gas blow pipe 44 and carry out
Purging, avoids foreign matter from impacting defect inspection.
S5：The spectral discrimination inspection result shot according to camera on this side, it is specially：Pass through the ash to different images
Degree carries out contrast and draws inspection result, and check device is removed if result is unqualified, otherwise opens fluorescent tube in another vertical edges
One of fluorescent tube in group 45, and repeat step S4 operation, to obtain the final inspection result of glass substrate, i.e., from two
Vertical direction is checked glass substrate comprehensively.
In summary, the invention provides a kind of full-automatic open defect check device and method, on frame-type microscope carrier 2
Defect inspection mechanism 4 is set, the light of different colours is sent by lamp source 3, using the camera of adjustable angle to glass substrate
Edge and side carry out aberration inspection；Then the light tube group 45 and camera group 43 are driven along corresponding by expansion link 42
Slide rail 41 is synchronized with the movement, and under the irradiation of the fluorescent tube of different colours, glass substrate is carried out by camera serialograph
Check comprehensively, and the method for the gray scale for passing through contrast images obtains inspection result, it is reliable and stable.The present invention need not be by artificial behaviour
Make and judge, improve production efficiency, saved cost of labor, improve the automaticity and product quality of producing line.
Although embodiments of the present invention are illustrated in specification, these embodiments are intended only as prompting,
It should not limit protection scope of the present invention.It is equal that various omission, substitution, and alteration are carried out without departing from the spirit and scope of the present invention
It should include within the scope of the present invention.
Claims (26)
1. a kind of full-automatic open defect check device, including microscope carrier support, the frame-type above the microscope carrier support carry
Platform and the lamp source above the frame-type microscope carrier, it is characterised in that the frame-type microscope carrier is provided with least one set of defect
Inspection body, the defect inspection mechanism include the slide rail located at the frame-type microscope carrier edge, are vertical on the slide rail
Expansion link, and horizontal camera group, porous gas blow pipe and light tube group on the expansion link, in the camera group
The adjustable angle of camera.
2. full-automatic open defect check device according to claim 1, it is characterised in that the frame-type microscope carrier is provided with
It is two, corresponding with two microscope carrier supports respectively, be additionally provided between two frame-type microscope carriers a rotation microscope carrier and with institute
State transport mechanism corresponding to rotation microscope carrier.
3. full-automatic open defect check device according to claim 2, it is characterised in that in the defect inspection mechanism
Slide rail be provided with two, be divided on two relative sides of the frame-type microscope carrier, the camera group and porous gas blow pipe are set
In on expansion link, the light tube group is located at corresponding to another slide rail on expansion link wherein corresponding to a slide rail.
4. the full-automatic open defect check device stated according to claim 3, it is characterised in that the camera group and porous blow
Tracheae is on same root expansion link.
5. the full-automatic open defect check device stated according to claim 3, it is characterised in that the camera group and is set more
The expansion link of hole gas blow pipe is provided with two, respectively positioned at the both sides for the expansion link for setting the light tube group.
6. full-automatic open defect check device according to claim 2, it is characterised in that in the defect inspection mechanism
Slide rail be provided with one, located at the frame-type microscope carrier wherein in a line.
7. full-automatic open defect check device according to claim 6, it is characterised in that the slide rail is provided with two
Expansion link, the camera group and porous gas blow pipe are located therein on an expansion link, and the light tube group is flexible located at another
On bar.
8. full-automatic open defect check device according to claim 6, it is characterised in that the slide rail is provided with three
Expansion link, the light tube group are located on a middle expansion link, be equipped with the expansion link of both sides the camera group and
Porous gas blow pipe.
9. full-automatic open defect check device according to claim 2, it is characterised in that the transport mechanism is machinery
Hand, located at the side of the rotation microscope carrier.
10. full-automatic open defect check device according to claim 1, it is characterised in that the microscope carrier support and frame
Posture microscope carrier is respectively equipped with one, and the frame-type microscope carrier is provided with Liang Zu defect inspections mechanism, is respectively arranged on the frame-type
On two orthogonal sides of microscope carrier.
11. full-automatic open defect check device according to claim 10, it is characterised in that the defect inspection mechanism
In slide rail be provided with one, the slide rail is provided with two expansion links, and the camera group and porous gas blow pipe are located therein one
On root expansion link, the light tube group is on another expansion link.
12. full-automatic open defect check device according to claim 10, it is characterised in that the slide rail is provided with three
Root expansion link, the light tube group are located on a middle expansion link, and the camera group is equipped with the expansion link of both sides
With porous gas blow pipe.
13. the full-automatic open defect check device according to claim 4 or 5 or 7 or 8 or 11 or 12, it is characterised in that
Cross bar, the camera group and porous gas blow pipe point are additionally provided with expansion link corresponding with the camera group and porous gas blow pipe
Not She Yu the cross bar length direction both sides, length direction water of some cameras along the cross bar in the camera group
It is flat to set.
14. full-automatic open defect check device according to claim 1, it is characterised in that the light tube group is included extremely
The different fluorescent tube of few two kinds of colors.
15. a kind of full-automatic external appearance defect examination method, it is characterised in that comprise the following steps：
S1：Glass substrate is placed in one on a frame-type microscope carrier, opens the lamp source above frame-type microscope carrier, microscope carrier supporting band
Dynamic frame tye microscope carrier is rotated to set angle, starts to check work；
S2:Edge-perpendicular of the angle of camera corresponding with glass substrate edge in camera group extremely with glass substrate is adjusted,
Shoot glass substrate edge photo, to glass substrate carry out edge the defects of inspection；
S3：The angle of camera in camera group is adjusted, by the light color of setting sequential transformations lamp source, at the same time shoots glass
Photo at glass substrate side surfaces diverse location, side aberration inspection is carried out, closes lamp source afterwards；
S4：One of fluorescent tube in light tube group is opened, adjusts the angle of camera in camera group, is made described in expansion link drive
Light tube group and camera the group slide rail corresponding to are synchronized with the movement, while the camera continuously shot images in camera group are to glass
Substrate is checked comprehensively, is then switched off the fluorescent tube, opens other fluorescent tubes, adjusts the angle of camera in camera group, is repeated
Comprehensive checking step；
S5：The spectral discrimination inspection result shot according to camera, check device is removed if result is unqualified, otherwise passes through biography
Send device to be transported to rotation microscope carrier, rotated horizontally 90 degree by rotating microscope carrier, be then sent to by transmission device another
On individual frame-type microscope carrier, and repeat step S1~S4, to obtain the final inspection result of glass substrate.
16. inspection method according to claim 15, it is characterised in that in the step S2/S3/S4, in addition to work as and take the photograph
When photographing foreign matter as head, open porous gas blow pipe and purged.
17. inspection method according to claim 15, it is characterised in that in the step S4, in addition to, stretched by described
Contracting bar adjusts the height of light tube group and camera group, while adjusts the angle of camera, until photographing clearly defect image.
18. inspection method according to claim 17, it is characterised in that in the step S4, adjust the camera group
The angle of middle camera is specially：Camera is set to be directed at the lighting position of the fluorescent tube.
19. inspection method according to claim 15, it is characterised in that in the step S4, the fluorescent tube and camera
The slide rail corresponding to is synchronized with the movement specially：The light edge that the focus of camera follows fluorescent tube to send in the camera group enters
Row movement.
20. inspection method according to claim 15, it is characterised in that in the step S5, judge that inspection result is specific
For：Inspection result is drawn by carrying out contrast to the gray scale of different images.
21. a kind of full-automatic external appearance defect examination method, it is characterised in that comprise the following steps：
S1：Glass substrate is placed on frame-type microscope carrier, opens the lamp source above frame-type microscope carrier, microscope carrier supporting band dynamic frame tye
Microscope carrier is rotated to set angle, starts to check work；
S2:Adjust camera corresponding with glass substrate edge in camera group of the frame-type microscope carrier wherein in a line
Angle is shot the photo of glass substrate edge by the camera, glass substrate is carried out to the edge-perpendicular with glass substrate
The defects of edge, checks；
S3：The angle of camera in camera group on this side is adjusted, it is same with this by the light color of setting sequential transformations lamp source
When shoot photo at the diverse location of glass substrate side, carry out side aberration inspection, close lamp source afterwards；
S4：Open one of fluorescent tube in light tube group on this side, expansion link drives the light tube group and camera group along right
The slide rail answered is synchronized with the movement, while the camera continuously shot images in camera group are checked glass substrate comprehensively, are connect
And close the fluorescent tube, open other fluorescent tubes, adjust the angle of camera in camera group, repeat comprehensive checking step；
S5：The spectral discrimination inspection result shot according to camera on this side, removes check device, instead if result is unqualified
Another vertical edges of opening on one of fluorescent tube in light tube group, and repeat step S4 operation, to obtain glass substrate
Final inspection result.
22. inspection method according to claim 21, it is characterised in that in the step S2/S3/S4, in addition to work as and take the photograph
When photographing foreign matter as head, open porous gas blow pipe and purged.
23. inspection method according to claim 21, it is characterised in that in the step S4, in addition to, stretched by described
Contracting bar adjusts the height of fluorescent tube and camera, while adjusts the height of the camera, until the defects of photographing image clearly
It can be seen that.
24. inspection method according to claim 23, it is characterised in that in the step S4, adjust the camera group
The angle of middle camera is specially：Camera is set to be directed at the lighting position of the fluorescent tube.
25. inspection method according to claim 21, it is characterised in that in the step S4, the light tube group and shooting
Head group is synchronized with the movement specially along corresponding slide rail：The focus of camera follows the light side that fluorescent tube is sent in the camera group
Edge moves.
26. inspection method according to claim 21, it is characterised in that in the step S5, judge that inspection result is specific
For：Inspection result is drawn by carrying out contrast to the gray scale of different images.
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| CN201610608413.7A CN107664646A (en) | 2016-07-29 | 2016-07-29 | A kind of full-automatic open defect check device and method |
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