CN107658275A - Stacked multi-package module and manufacturing method thereof - Google Patents
Stacked multi-package module and manufacturing method thereof Download PDFInfo
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
- H01L21/4814—Conductive parts
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- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
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- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
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- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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Abstract
本发明实施例提供一种堆叠式多封装模块及其制造方法,所述堆叠式多封装模块的制造方法包括将至少一第一电子元件装设于一基板上。将一导电层配置于一第一绝缘层之上。将该第一绝缘层覆盖于该第一电子元件以及局部覆盖于该基板表面上。将另至少一第一电子元件装设于该第一绝缘层上且与该导电层电性连接。以及将一第二绝缘层覆盖于该第一电子元件与该基板表面上。
The embodiment of the present invention provides a stacked multi-package module and a manufacturing method thereof, wherein the manufacturing method of the stacked multi-package module comprises installing at least one first electronic component on a substrate, disposing a conductive layer on a first insulating layer, covering the first electronic component and partially covering the surface of the substrate with the first insulating layer, installing at least one other first electronic component on the first insulating layer and electrically connecting with the conductive layer, and covering the first electronic component and the surface of the substrate with a second insulating layer.
Description
本发明是一件分案申请,原申请的申请日为2013年05月31日,申请号为201310214754.2,发明名称为:堆叠式多封装模块及其制造方法。The present invention is a divisional application, the filing date of the original application is May 31, 2013, the application number is 201310214754.2, and the title of the invention is: stacked multi-encapsulation module and its manufacturing method.
技术领域technical field
本发明有关于一种堆叠式多封装模块,且特别是有关于具有第一绝缘层的堆叠式多封装模块。The present invention relates to a stacked multi-package module, and in particular to a stacked multi-package module with a first insulating layer.
背景技术Background technique
目前常见的电子封装模块通常包括封装式堆叠结构(Package Stacking),而为了提高整体电子封装模块的堆叠密度以及减少封装的体积,通常电子封装模块是采用三维垂直堆叠(Vertically Integrated Circuits,VIC)的结合方式进行整合。The current common electronic packaging modules usually include package stacking structure (Package Stacking), and in order to improve the stacking density of the overall electronic packaging module and reduce the volume of the package, the electronic packaging module usually adopts three-dimensional vertically integrated circuits (VIC) Integrate in combination.
在遇到不同高度的电子元件电性连接于基板上时,为提高整体电子封装模块的堆叠密度,现有的三维垂直堆叠方法通常以模具先形成模封包覆电子元件,而后将高度较低的电子元件上方的模封材料以雷射挖出凹洞以作为电子元件的预先装设位置,接着于模封凹洞内制作出导电柱以及线路,而后在模封凹洞内摆放电子元件并且以填入另一封胶以填补模封凹洞。When electronic components of different heights are electrically connected to the substrate, in order to increase the stacking density of the overall electronic packaging module, the existing three-dimensional vertical stacking method usually uses a mold to first form a mold to encapsulate the electronic components, and then lower the height The molding material above the electronic components uses laser to dig out holes as the pre-installation positions of the electronic components, then make conductive columns and circuits in the molding holes, and then place the electronic components in the molding holes And to fill another sealant to fill the mold cavity.
一般来说,随着电子封装模块的微型化,电子元件的摆设方式以及制作流程也越趋复杂,制作难度也随之提升。此外,此种方法容易有外观颜色不同及平整性不佳等问题。Generally speaking, with the miniaturization of electronic packaging modules, the layout and production process of electronic components become more and more complicated, and the difficulty of production also increases accordingly. In addition, this method is prone to problems such as different appearance colors and poor flatness.
发明内容Contents of the invention
本发明提供一种堆叠式多封装模块,其所具有的绝缘层用以简化封装的流程,以及增加堆叠式多封装模块的内部堆叠空间利用率。The invention provides a stacked multi-encapsulation module, the insulation layer of which is used to simplify the packaging process and increase the utilization rate of the internal stacking space of the stacked multi-encapsulation module.
本发明的堆叠式多封装模块,包括基板、堆叠结构以及至少一第二电子元件;堆叠结构包括多个第一电子元件、至少一第一绝缘层以及至少一导电图案层,其中部分一些第一电子元件装设于基板上,而第一绝缘层覆盖于部分一些第一电子元件以及局部覆盖基板表面,导电图案层配置于第一绝缘层上,而另外一些第一电子元件装设于第一绝缘层上且与导电图案层电性连接;第二电子元件装设于基板上,而第二电子元件的高度大于该第一电子元件的高度。The stacked multi-package module of the present invention includes a substrate, a stacked structure, and at least one second electronic component; the stacked structure includes a plurality of first electronic components, at least one first insulating layer, and at least one conductive pattern layer, some of which are first The electronic components are installed on the substrate, and the first insulating layer covers some of the first electronic components and partially covers the surface of the substrate, the conductive pattern layer is arranged on the first insulating layer, and some other first electronic components are installed on the first The insulating layer is electrically connected with the conductive pattern layer; the second electronic component is installed on the substrate, and the height of the second electronic component is greater than that of the first electronic component.
本发明提供一种堆叠式多封装模块的制造方法,用以简化封装的流程以及增加堆叠式多封装模块的内部堆叠空间利用率。The invention provides a method for manufacturing a stacked multi-encapsulation module, which is used to simplify the packaging process and increase the utilization rate of the internal stacking space of the stacked multi-encapsulation module.
本发明的堆叠式多封装模块的制造方法,包括装设至少一第一电子元件以及至少一第二电子元件于基板上,且第一、第二电子元件与基板电性连接,而第二电子元件高度大于该第一电子元件的高度;将导电层配置于第一绝缘层之上之后,将第一绝缘层覆盖于第一电子元件以及局部覆盖于基板表面上。形成至少一穿透导电层以及第一绝缘层的导电柱,并且将导电层进行图案化处理,据以形成一导电图案层;将另至少一第一电子元件装设于第一绝缘层上且与导电图案层电性连接。The manufacturing method of the stacked multi-package module of the present invention includes installing at least one first electronic component and at least one second electronic component on the substrate, and the first and second electronic components are electrically connected to the substrate, and the second electronic component The height of the element is greater than that of the first electronic element; after disposing the conductive layer on the first insulating layer, the first insulating layer covers the first electronic element and partly covers the surface of the substrate. forming at least one conductive column penetrating the conductive layer and the first insulating layer, and patterning the conductive layer to form a conductive pattern layer; installing another at least one first electronic component on the first insulating layer and It is electrically connected with the conductive pattern layer.
综上所述,本发明的堆叠式多封装模块,其第二电子元件高度大于第一电子元件的高度,使得第一电子元件及第二电子元件之间会存有一高度差。其中一些第一电子元件及第二电子元件装设于基板上,而第一绝缘层贴附覆盖在其中一部分的第一电子元件以及部分的基板上。工艺较为简单,从而简化封装的流程。当第一绝缘层覆盖这些第一电子元件以及部分基板上时,这些第一电子元件上方将存有空间以容置其他第一电子元件。据此,不仅可以简化封装的流程且缩短信号线路径,从而使得线路损耗及干扰减少,产品电性更佳。此外,堆叠式多封装模块的封装平整性高且外观颜色均一,而堆叠式多封装模块的内部堆叠空间利用率得以增加。To sum up, in the stacked multi-package module of the present invention, the height of the second electronic component is greater than that of the first electronic component, so that there is a height difference between the first electronic component and the second electronic component. Some of the first electronic components and the second electronic components are installed on the substrate, and the first insulating layer is pasted and covered on a part of the first electronic components and a part of the substrate. The process is relatively simple, thereby simplifying the packaging process. When the first insulating layer covers the first electronic components and part of the substrate, there will be space above the first electronic components to accommodate other first electronic components. Accordingly, not only can the packaging process be simplified and the signal line path shortened, so that line loss and interference are reduced, and the electrical performance of the product is better. In addition, the package of the stacked multi-package module has high flatness and uniform appearance color, and the utilization rate of the internal stacking space of the stacked multi-package module is increased.
除此之外,本发明的堆叠式多封装模块的制造方法,其第二电子元件高度大于第一电子元件的高度,使得第一电子元件及第二电子元件之间会存有一高度差。通过贴附第一绝缘层覆盖在其中一部分的第一电子元件以及部分的基板上,再于这些第一电子元件上方的空间内容置其他第一电子元件。据此,不仅可以简化封装的流程且缩短信号线路径,从而使得线路损耗及干扰减少,产品电性更佳。此外,堆叠式多封装模块的封装平整性高且外观颜色均一,而堆叠式多封装模块的内部堆叠空间利用率得以增加。In addition, in the manufacturing method of the stacked multi-package module of the present invention, the height of the second electronic component is greater than that of the first electronic component, so that there is a height difference between the first electronic component and the second electronic component. By attaching the first insulating layer to cover a part of the first electronic components and a part of the substrate, and then arranging other first electronic components in the space above the first electronic components. Accordingly, not only can the packaging process be simplified and the signal line path shortened, so that line loss and interference are reduced, and the electrical performance of the product is better. In addition, the package of the stacked multi-package module has high flatness and uniform appearance color, and the utilization rate of the internal stacking space of the stacked multi-package module is increased.
为了能更进一步了解本发明为达成既定目的所采取的技术、方法及功效,请参阅以下有关本发明的详细说明、图式,相信本发明的目的、特征与特点,当可由此得以深入且具体的了解,然而所附图式与附件仅提供参考与说明用,并非用来对本发明加以限制者。In order to further understand the technology, method and effect adopted by the present invention to achieve the intended purpose, please refer to the following detailed description and drawings of the present invention, and believe that the purpose, characteristics and characteristics of the present invention can be deepened and concretely obtained from this However, the accompanying drawings and appendices are provided for reference and illustration only, and are not intended to limit the present invention.
附图说明Description of drawings
图1是本发明第一实施例的堆叠式多封装模块的结构示意图。FIG. 1 is a schematic structural diagram of a stacked multi-package module according to the first embodiment of the present invention.
图2是本发明第二实施例的堆叠式多封装模块的结构示意图。FIG. 2 is a schematic structural diagram of a stacked multi-package module according to a second embodiment of the present invention.
图3是本发明实施例的堆叠式多封装模块的制造方法的流程示意图。FIG. 3 is a schematic flowchart of a method for manufacturing a stacked multi-package module according to an embodiment of the present invention.
图4A~4F分别是本发明第一实施例的堆叠式封装模块的制造方法于各步骤所形成的半成品的示意图。4A-4F are schematic diagrams of semi-finished products formed in each step of the manufacturing method of the stacked package module according to the first embodiment of the present invention.
其中,附图标记说明如下:Wherein, the reference signs are explained as follows:
100、200 堆叠式多封装模块100, 200 stackable multi-package modules
110 基板110 Substrate
112 接地垫112 Ground pad
120、220 堆叠结构120, 220 stack structure
122、122'、122a、122b、122c、122a'、122b'122c' 第一电子元件122, 122', 122a, 122b, 122c, 122a', 122b', 122c' first electronic component
124、124' 第一绝缘层124, 124' first insulation layer
125 导电层125 conductive layer
126、126' 导电图案层126, 126' conductive pattern layer
127、127' 导孔127, 127' pilot hole
130 第二电子元件130 Second Electronic Components
140 第二绝缘层140 Second insulating layer
150 电磁遮蔽层150 electromagnetic shielding layer
D1 刀具D1 tool
S101~S106 步骤流程S101~S106 Step flow
具体实施方式Detailed ways
图1为本发明第一实施例的堆叠式多封装模块的结构示意图。请参阅图1,堆叠式多封装模块100包括基板110、堆叠结构120以及至少一第二电子元件130。堆叠结构120配置于基板110之上,而且第二电子元件130装设(mount)于基板110上。FIG. 1 is a schematic structural diagram of a stacked multi-package module according to a first embodiment of the present invention. Please refer to FIG. 1 , the stacked multi-package module 100 includes a substrate 110 , a stack structure 120 and at least one second electronic component 130 . The stack structure 120 is disposed on the substrate 110 , and the second electronic component 130 is mounted on the substrate 110 .
基板110上通常配置有接垫(boding pad)、接地垫(grounding pad)112以及线路(trace)(未绘示)。于实务上,基板110为电路及各种电子元件所配置的载板(carrier),而这些接垫及线路可依电性连接需要而设置。Boding pads, grounding pads 112 and traces (not shown) are generally disposed on the substrate 110 . In practice, the substrate 110 is a carrier on which circuits and various electronic components are arranged, and these pads and lines can be provided according to the electrical connection requirements.
堆叠结构120包括多个第一电子元件122、至少第一绝缘层124以及至少一导电图案层126。其中一些第一电子元件122装设于基板110上,而第一绝缘层124覆盖于其中一些第一电子元件122以及局部覆盖基板110表面,导电图案层126配置于第一绝缘层124上,而另外一些第一电子元件122装设于第一绝缘层124上且与导电图案层126电性连接。The stack structure 120 includes a plurality of first electronic components 122 , at least a first insulating layer 124 and at least one conductive pattern layer 126 . Some of the first electronic components 122 are installed on the substrate 110, and the first insulating layer 124 covers some of the first electronic components 122 and partially covers the surface of the substrate 110, and the conductive pattern layer 126 is disposed on the first insulating layer 124, and Other first electronic components 122 are disposed on the first insulating layer 124 and electrically connected to the conductive pattern layer 126 .
第一电子元件122可以包括各种类型,而且这些第一电子元件122的种类并不完全相同。例如第一电子元件122可以是主动元件或被动元件、芯片或离散元件(discretecomponent)等,如图1所绘示,第一电子元件122可以包括不同的种类,以第一电子元件122a、122b及122c表示。不过,本发明并不对第一电子元件122的种类加以限定。此外,第一电子元件122a、122b及122c可以是以多种方式与基板110电性连接,例如是打线方式(wirebonding)、覆晶方式(flip chip)或其他封装方法与基板110的接垫及/或线路电性连接。The first electronic components 122 may include various types, and the types of these first electronic components 122 are not all the same. For example, the first electronic component 122 can be an active component or a passive component, a chip or a discrete component (discretecomponent), etc., as shown in FIG. 122c said. However, the present invention does not limit the type of the first electronic component 122 . In addition, the first electronic components 122a, 122b, and 122c can be electrically connected to the substrate 110 in various ways, such as wire bonding, flip chip or other packaging methods and the pads of the substrate 110 And/or circuit electrical connection.
第一绝缘层124覆盖于其中一部分的第一电子元件122a、122b及122c,并且延伸覆盖到基板110局部的表面。第一绝缘层124用以避免第一电子元件122之间产生不必要的电性连接。详细而言,第一绝缘层124为一热固性片状胶材,在室温下即具有粘性,用以贴附且覆盖在其中一部分的第一电子元件122a、122b及122c上。由于第一绝缘层124为片状胶材,从而第一绝缘层124可以不需通过模具而能覆盖在其中一部分的第一电子元件122a、122b及122c上,也就是说,第一绝缘层124部分地成型于基板110上。在适当的温度下,第一绝缘层124得以更加黏附于第一电子元件122以及基板110上,而且不会随着加热而溶解。。值得说明的是,第一绝缘层124的材料包括环氧树脂(Epoxy resin)、无机纤维(inorganicfiller)等,例如第一绝缘层124的材料可以是热固性热熔胶胶材(Thermo-meltingsealant sheet)。The first insulating layer 124 covers a part of the first electronic components 122 a , 122 b and 122 c , and extends to cover a part of the surface of the substrate 110 . The first insulating layer 124 is used to avoid unnecessary electrical connection between the first electronic components 122 . In detail, the first insulating layer 124 is a thermosetting sheet-like adhesive material, which has adhesiveness at room temperature, and is used to attach and cover a part of the first electronic components 122a, 122b, and 122c. Since the first insulating layer 124 is a sheet-like adhesive material, the first insulating layer 124 can cover a part of the first electronic components 122a, 122b and 122c without passing through a mold, that is, the first insulating layer 124 Partially formed on the substrate 110 . At an appropriate temperature, the first insulating layer 124 can be more adhered to the first electronic component 122 and the substrate 110 , and will not dissolve with heating. . It is worth noting that the material of the first insulating layer 124 includes epoxy resin (Epoxy resin), inorganic fiber (inorganic filler), etc., for example, the material of the first insulating layer 124 may be a thermosetting hot-melt adhesive material (Thermo-meltingsealant sheet) .
在多个第一电子元件122a、122b及122c中,其中另外一部分的第一电子元件122a'、122b'及122c'装设于第一绝缘层124上,并且与导电图案层126电性连接。简单地说,其中一些第一电子元件122a、122b及122c位于第一绝缘层124之内。另外一部分的第一电子元件122a'、122b'及122c'位于第一绝缘层124之外,而且第一电子元件122'通过导电图案层126的线路设计而能够电性导通。Among the plurality of first electronic components 122 a , 122 b and 122 c , another part of the first electronic components 122 a ′, 122 b ′ and 122 c ′ are disposed on the first insulating layer 124 and electrically connected to the conductive pattern layer 126 . In short, some of the first electronic components 122 a , 122 b and 122 c are located inside the first insulating layer 124 . Another part of the first electronic components 122 a ′, 122 b ′ and 122 c ′ are located outside the first insulating layer 124 , and the first electronic components 122 ′ can be electrically connected through the circuit design of the conductive pattern layer 126 .
堆叠结构120还包括至少一个导电柱127,而导电柱127穿透第一绝缘层124。一般而言,导电柱127由导电图案层126往第一绝缘层124内贯穿延伸,并且根据不同的产品设计用以电性连接不同的第一电子元件122或基板线路。The stack structure 120 further includes at least one conductive pillar 127 , and the conductive pillar 127 penetrates the first insulating layer 124 . Generally speaking, the conductive pillars 127 extend from the conductive pattern layer 126 to the first insulating layer 124 , and are designed to electrically connect different first electronic components 122 or substrate circuits according to different product designs.
堆叠式多封装模块100包括至少一第二电子元件130,其中第二电子元件130装设于基板110上,而第二电子元件130高度大于第一电子元件122的高度。同样地,第二电子元件130亦可以包括各种类型,例如是主动元件或被动元件、芯片或离散元件等。而且第二电子元件130亦可以是以多种方式与基板110电性连接,例如是打线方式、覆晶方式或其他封装方法与基板110的接垫及/或线路电性连接。The stacked multi-package module 100 includes at least one second electronic component 130 , wherein the second electronic component 130 is mounted on the substrate 110 , and the height of the second electronic component 130 is greater than that of the first electronic component 122 . Likewise, the second electronic component 130 may also include various types, such as active components or passive components, chips or discrete components, and the like. Moreover, the second electronic component 130 can also be electrically connected to the substrate 110 in various ways, such as electrically connecting to the pads and/or lines of the substrate 110 by wire bonding, flip-chip or other packaging methods.
堆叠式多封装模块100还包括第二绝缘层140,第二绝缘层140覆盖于第二电子元件130、堆叠结构120以及基板110表面。第二绝缘层140用以降低湿气侵入而造成第二电子元件130、堆叠结构120或是线路的损害,而且第二绝缘层140还可以避免第二电子元件130之间产生不必要的电性连接。第二绝缘层140的材料可以与第一绝缘层124的材料相异,例如第二绝缘层140可以是一封胶层,而主要材料包括压模胶(molding compound),通过封胶工艺(encapsulation process)填入模穴(cavity)烘烤硬化成型。或者,第二绝缘层140的材料可以与第一绝缘层124的材料相同,皆是热固性片状胶材,以贴附的方式覆盖在第二电子元件130、堆叠结构120以及基板110表面。不过,本发明并不对第二绝缘层140的材料加以限定。The stacked multi-package module 100 further includes a second insulating layer 140 covering the surface of the second electronic component 130 , the stack structure 120 and the substrate 110 . The second insulating layer 140 is used to reduce the damage caused by moisture intrusion to the second electronic component 130 , the stacked structure 120 or the circuit, and the second insulating layer 140 can also prevent unnecessary electrical connection between the second electronic components 130 . The material of the second insulating layer 140 can be different from that of the first insulating layer 124. For example, the second insulating layer 140 can be a sealant layer, and the main material includes molding compound. process) filled into the cavity (cavity) bake hardening molding. Alternatively, the material of the second insulating layer 140 may be the same as that of the first insulating layer 124 , both of which are thermosetting sheet-like adhesive materials, covering the surfaces of the second electronic component 130 , the stacked structure 120 and the substrate 110 in an attached manner. However, the present invention does not limit the material of the second insulating layer 140 .
此外,为了产品的电磁遮蔽设计,堆叠式多封装模块100还包括电磁遮蔽层150,电磁遮蔽层150位于第二绝缘层140的外表面,而且与接地垫112电性连接。电磁遮蔽层150用以降低电子元件122以及第二电子元件130所产生的电磁干扰效应与射频干扰效应。一般而言,电磁遮蔽层150为导电材料所制成,例如是以金属材料、导电高分子材料或者是导电复合材料所制成。而电磁遮蔽层150可以是通过喷涂(Spray Coating)、离子镀(IonPlating)、溅镀(Sputter Deposition)或者是蒸镀(Evaporation Deposition)等方式沉积的导电薄膜,也可以是以金属盖覆罩于第二绝缘层140的外表面。In addition, for the electromagnetic shielding design of the product, the stacked multi-package module 100 further includes an electromagnetic shielding layer 150 . The electromagnetic shielding layer 150 is located on the outer surface of the second insulating layer 140 and is electrically connected to the ground pad 112 . The electromagnetic shielding layer 150 is used to reduce the electromagnetic interference effect and the radio frequency interference effect generated by the electronic component 122 and the second electronic component 130 . Generally speaking, the electromagnetic shielding layer 150 is made of conductive materials, such as metal materials, conductive polymer materials or conductive composite materials. The electromagnetic shielding layer 150 can be a conductive film deposited by means of spray coating (Spray Coating), ion plating (Ion Plating), sputtering (Sputter Deposition) or evaporation (Evaporation Deposition), and can also be covered with a metal cover The outer surface of the second insulating layer 140 .
图2为本发明第二实施例的堆叠式多封装模块的剖面示意图。第二实施例的堆叠式多封装模块200与第一实施例的堆叠式多封装模块100二者结构相似,功效相同,例如堆叠式多封装模块200与100同样都包括第一电子元件122。以下将仅介绍堆叠式多封装模块200与100二者的差异,而相同的特征则不再重复赘述。FIG. 2 is a schematic cross-sectional view of a stacked multi-package module according to a second embodiment of the present invention. The stacked multi-package module 200 of the second embodiment is similar in structure to the stacked multi-package module 100 of the first embodiment, and has the same function. For example, the stacked multi-package modules 200 and 100 also include the first electronic component 122 . Only the differences between the stacked multi-package modules 200 and 100 will be introduced below, and the same features will not be repeated here.
请参阅图2,第二实施例的堆叠式多封装模块200包括基板110、堆叠结构220以及至少一第二电子元件130。堆叠结构220配置于基板110之上,而且第二电子元件130装设(mount)于基板110上。Referring to FIG. 2 , the stacked multi-package module 200 of the second embodiment includes a substrate 110 , a stack structure 220 and at least one second electronic component 130 . The stack structure 220 is disposed on the substrate 110 , and the second electronic component 130 is mounted on the substrate 110 .
堆叠结构220包括多个第一电子元件122、多个第一绝缘层124以及多个导电图案层126。值得说明的是,堆叠结构220是由多个第一电子元件122、多个第一绝缘层124以及多个导电图案层126所堆叠而成。The stack structure 220 includes a plurality of first electronic components 122 , a plurality of first insulating layers 124 and a plurality of conductive pattern layers 126 . It should be noted that the stack structure 220 is formed by stacking a plurality of first electronic components 122 , a plurality of first insulating layers 124 and a plurality of conductive pattern layers 126 .
详细而言,其中部分的第一电子元件122a、122b及122c装设于基板110上,而其中一第一绝缘层124覆盖于这些第一电子元件122a、122b及122c以及局部覆盖基板110表面上,而其中一导电图案层126配置于此第一绝缘层124上,而另外一部分的第一电子元件122a、122b及122c装设于此第一绝缘层124上且与此导电图案层126电性连接。另一第一绝缘层124'在覆盖于第一电子元件122以及导电图案层126上,而另一导电图案层126'在覆盖于第一绝缘层124'上,而另外一部分的第一电子元件122a'、122b'及122c'装设于第一绝缘层124'上且与导电图案层126'电性连接。Specifically, some of the first electronic components 122a, 122b, and 122c are mounted on the substrate 110, and one of the first insulating layers 124 covers these first electronic components 122a, 122b, and 122c and partially covers the surface of the substrate 110. , and one of the conductive pattern layers 126 is disposed on the first insulating layer 124, and the other part of the first electronic components 122a, 122b, and 122c are mounted on the first insulating layer 124 and electrically connected to the conductive pattern layer 126. connect. Another first insulating layer 124' covers the first electronic component 122 and the conductive pattern layer 126, while another conductive pattern layer 126' covers the first insulating layer 124', and another part of the first electronic component 122a', 122b' and 122c' are disposed on the first insulating layer 124' and electrically connected to the conductive pattern layer 126'.
简单地说,堆叠结构220可以是多层结构,其中一些第一电子元件122装设于基板110上且位于第一绝缘层124之内,另外一些第一电子元件122位于第一绝缘层124之上,而第一电子元件122'位于第一绝缘层124'之外。导电图案层126、126'位于第一绝缘层124、124'之上。In short, the stack structure 220 may be a multi-layer structure, in which some first electronic components 122 are mounted on the substrate 110 and located within the first insulating layer 124 , and some other first electronic components 122 are located between the first insulating layer 124 on, and the first electronic component 122' is located outside the first insulating layer 124'. The conductive pattern layer 126, 126' is located on the first insulating layer 124, 124'.
值得说明的是,于本实施例中,堆叠结构220为两层结构。不过,于其它实施例中,依据不同的电性连接设计的考量,堆叠结构220可以是两层以上的结构。不过,本发明并不对此加以限定。It should be noted that, in this embodiment, the stack structure 220 is a two-layer structure. However, in other embodiments, the stacked structure 220 may be a structure of more than two layers according to considerations of different electrical connection designs. However, the present invention is not limited thereto.
图3是本发明实施例的堆叠式多封装模块的制造方法的流程示意图。图4A~4F分别是本发明第一实施例的堆叠式多封装模块的制造方法于各步骤所形成的半成品的示意图。请参阅图3以及依序配合参照图4A~4F。FIG. 3 is a schematic flowchart of a method for manufacturing a stacked multi-package module according to an embodiment of the present invention. 4A-4F are schematic diagrams of semi-finished products formed in each step of the manufacturing method of the stacked multi-package module according to the first embodiment of the present invention. Please refer to FIG. 3 and refer to FIGS. 4A-4F sequentially.
于步骤101中,请参阅图4A,将至少一第一电子元件122以及至少一第二电子元件130装设于基板110上,并且第一电子元件122与第二电子元件130皆与基板110电性连接,而第二电子元件130高度大于第一电子元件122的高度。值得说明的是,于此,高度定义为装设后的第一电子元件122以及第二电子元件130的底面至顶面的垂直延伸距离。由于第二电子元件130高度大于第一电子元件122的高度,因此,在第一电子元件122及第二电子元件130之间会存有一高度差。In step 101, referring to FIG. 4A, at least one first electronic component 122 and at least one second electronic component 130 are installed on the substrate 110, and both the first electronic component 122 and the second electronic component 130 are electrically connected to the substrate 110. connection, and the height of the second electronic component 130 is greater than that of the first electronic component 122 . It should be noted that, here, the height is defined as the vertical extension distance from the bottom surface to the top surface of the mounted first electronic component 122 and the second electronic component 130 . Since the height of the second electronic component 130 is greater than that of the first electronic component 122 , there is a height difference between the first electronic component 122 and the second electronic component 130 .
详细而言,提供基板110,基板110可以是电路联板(circuit substrate panel或circuit substrate strip)(图4A仅绘示基板110的一部分)。在基板110上装设至少一第一电子元件122以及至少一第二电子元件130,于本实施例中,提供多个第一电子元件122a、122b及122c以及多个第二电子元件130,其中第一电子元件122以及第二电子元件130可以是主动元件或被动元件、芯片或离散元件等,而且可以多种方式与基板110电性连接,例如是打线方式(wire bonding)、覆晶方式(flip chip)或其他封装方法与基板的接垫及/或线路电性连接。In detail, a substrate 110 is provided, and the substrate 110 may be a circuit substrate panel or a circuit substrate strip (only a part of the substrate 110 is shown in FIG. 4A ). Install at least one first electronic component 122 and at least one second electronic component 130 on the substrate 110. In this embodiment, a plurality of first electronic components 122a, 122b and 122c and a plurality of second electronic components 130 are provided, wherein the first An electronic component 122 and a second electronic component 130 may be active components or passive components, chips or discrete components, etc., and may be electrically connected to the substrate 110 in various ways, such as wire bonding, flip-chip ( flip chip) or other packaging methods are electrically connected to the pads and/or lines of the substrate.
于步骤102中,请参阅图4B,将导电层125配置于第一绝缘层124之上。导电层125可以通过喷涂(Spray Coating)、离子镀(Ion Plating)、溅镀(Sputter Deposition)或者是蒸镀(Evaporation Deposition)等方式将金属材料或导电材料形成于第一绝缘层124的上表面。In step 102 , referring to FIG. 4B , a conductive layer 125 is disposed on the first insulating layer 124 . The conductive layer 125 can be formed on the upper surface of the first insulating layer 124 by means of spray coating (Spray Coating), ion plating (Ion Plating), sputtering (Sputter Deposition) or evaporation (Evaporation Deposition) .
于步骤103中,请参阅图4C,在导电层125配置于第一绝缘层124上之后,将第一绝缘层124覆盖于第一电子元件122以及局部覆盖于基板110表面上。值得说明的是,第一绝缘层124为一热固性片状胶材,于本实施例中,第一绝缘层124的材料可以是热固性热熔胶胶材,通过贴附的方式覆盖在其中一部分的第一电子元件122以及部分的基板110上,也就是说,第一绝缘层124部分地成型于基板110上。In step 103 , please refer to FIG. 4C , after the conductive layer 125 is disposed on the first insulating layer 124 , the first insulating layer 124 covers the first electronic component 122 and partially covers the surface of the substrate 110 . It is worth noting that the first insulating layer 124 is a thermosetting sheet adhesive material. In this embodiment, the material of the first insulating layer 124 can be a thermosetting hot-melt adhesive material. On the first electronic component 122 and part of the substrate 110 , that is to say, the first insulating layer 124 is partially formed on the substrate 110 .
于步骤104中,请参阅图4D,形成至少一穿透导电层125以及第一绝缘层124的导电柱127,并且将导电层125进行图案化处理,据以形成导电图案层126。详细而言,使用雷射对导电层125以及第一绝缘层124进行钻孔,以使第一绝缘层124形成至少一中空通孔,接着,形成导电材料于中空通孔内据以形成导电柱127,导电柱127由导电层125往第一绝缘层124内贯穿延伸。值得说明的是,可以依据不同的电性连接需求而自行设计每一个导电柱127的形状、数量以分布位置。接着,对导电层125进行图案化处理,以形成导电图案层126。详细而言,可以使用雷射烧蚀导电层,以使导电层125形成导电图案。In step 104 , referring to FIG. 4D , at least one conductive column 127 penetrating through the conductive layer 125 and the first insulating layer 124 is formed, and the conductive layer 125 is patterned to form a conductive pattern layer 126 . In detail, laser is used to drill the conductive layer 125 and the first insulating layer 124, so that the first insulating layer 124 forms at least one hollow via hole, and then, a conductive material is formed in the hollow via hole to form a conductive column 127 , the conductive column 127 penetrates and extends from the conductive layer 125 into the first insulating layer 124 . It is worth noting that the shape, quantity and distribution position of each conductive column 127 can be designed according to different electrical connection requirements. Next, patterning is performed on the conductive layer 125 to form a conductive pattern layer 126 . In detail, a laser may be used to ablate the conductive layer so that the conductive layer 125 forms a conductive pattern.
此外,须说明的是,为了工艺上的考量,形成导电柱127以及对导电层125进行图案化处理的步骤顺序可以是同时或是顺序对调。本发明并不对此加以限定。In addition, it should be noted that, for technological considerations, the order of the steps of forming the conductive pillars 127 and patterning the conductive layer 125 may be reversed simultaneously or in sequence. The present invention is not limited thereto.
于步骤105中,请参阅图4E,将另至少一第一电子元件122'装设于第一绝缘层124上且与导电图案层126电性连接。于本实施例中,提供多个第一电子元件122a'、122b'及122c',而这些装设于第一绝缘层124上的第一电子元件122a'、122b'及122c'可以通过导电图案层126以及导电柱127而与装设于基板110上的第一电子元件122或者第二电子元件130电性连接。In step 105 , referring to FIG. 4E , another at least one first electronic component 122 ′ is mounted on the first insulating layer 124 and electrically connected to the conductive pattern layer 126 . In this embodiment, a plurality of first electronic components 122a', 122b' and 122c' are provided, and these first electronic components 122a', 122b' and 122c' mounted on the first insulating layer 124 can pass through the conductive pattern The layer 126 and the conductive pillar 127 are electrically connected to the first electronic component 122 or the second electronic component 130 mounted on the substrate 110 .
值得说明的是,由于第一电子元件122及第二电子元件130之间存有高度差,因此当其中一些第一电子元件122及第二电子元件130装设于基板110上时,这些第一电子元件122上方将存有空间以容置其他第一电子元件122。It is worth noting that, due to the height difference between the first electronic components 122 and the second electronic components 130, when some of the first electronic components 122 and the second electronic components 130 are mounted on the substrate 110, these first electronic components There will be a space above the electronic component 122 to accommodate other first electronic components 122 .
为了降低湿气侵入而造成第二电子元件130、堆叠结构120或是线路的损害以及保护第二电子元件130之间产生不必要的电性连接,堆叠式多封装模块100的制造方法还包括将第二绝缘层140覆盖于堆叠结构120、第二电子元件130与基板110表面上。In order to reduce the damage of the second electronic component 130, the stacked structure 120 or the wiring caused by moisture intrusion and protect unnecessary electrical connections between the second electronic component 130, the manufacturing method of the stacked multi-package module 100 further includes The second insulating layer 140 covers the stacked structure 120 , the second electronic component 130 and the surface of the substrate 110 .
于步骤106中,请参阅图4F,将第二绝缘层140覆盖于堆叠结构120与基板110表面上。一般而言,第二绝缘层140可以是一封胶层,主要材料包括压模胶。通过封胶工艺,将第二绝缘层140材料填入模穴中,经由挤胶、注胶后再烘烤硬化成型。此外,于其它实施例中,第二绝缘层140的材料也可以与第一绝缘层124的材料相同,亦即,第二绝缘层140的材料是热固性片状胶材,而且以贴附的方式覆盖在第二电子元件130、堆叠结构120以及基板110表面。本发明实际应用上亦可不需要制作第二绝缘层140。In step 106 , referring to FIG. 4F , the second insulating layer 140 is covered on the stacked structure 120 and the surface of the substrate 110 . Generally speaking, the second insulating layer 140 may be an adhesive layer, and its main material includes molding adhesive. Through the glue sealing process, the material of the second insulating layer 140 is filled into the mold cavity, and then baked and hardened to form after extrusion and injection of glue. In addition, in other embodiments, the material of the second insulating layer 140 can also be the same as the material of the first insulating layer 124, that is, the material of the second insulating layer 140 is a thermosetting sheet adhesive, and the covering the surface of the second electronic component 130 , the stack structure 120 and the substrate 110 . In the practical application of the present invention, the second insulating layer 140 may not be required.
随后,通过刀具D1或是使用雷射将基板110切割成多个单元。此切割可以是半切,亦即没有将模封单元130与基板110全部切断,而于最后步骤时再将半切的基板110全部切断。或者,切割可以是全切,即一次将基板110全部切断。Subsequently, the substrate 110 is cut into a plurality of units by a cutter D1 or using a laser. The cutting can be a half cut, that is, the molding unit 130 and the substrate 110 are not completely cut off, and the half-cut substrate 110 is completely cut off in the last step. Alternatively, the cutting can be a full cut, that is, the entire substrate 110 is cut off at one time.
请再次参阅图1,为了产品的电磁遮蔽设计,堆叠式多封装模块100的制造方法还包括形成电磁遮蔽层150于第二绝缘层140的外表面,而且与接地垫112电性连接。电磁遮蔽层150可以是通过喷涂、离子镀、溅镀或者是蒸镀等方式沉积导电材料所制成的导电薄膜。或者,电磁遮蔽层150也可以是以金属盖覆罩于第二绝缘层140的外表面。经由上述步骤,堆叠式封装模块100基本上已形成Please refer to FIG. 1 again. For the electromagnetic shielding design of the product, the manufacturing method of the stacked multi-package module 100 further includes forming an electromagnetic shielding layer 150 on the outer surface of the second insulating layer 140 and electrically connecting to the ground pad 112 . The electromagnetic shielding layer 150 may be a conductive film made by depositing conductive materials by means of spraying, ion plating, sputtering or evaporation. Alternatively, the electromagnetic shielding layer 150 may also be covered on the outer surface of the second insulating layer 140 with a metal cover. Through the above steps, the stacked package module 100 has basically been formed
综上所述,本发明实施例提供一种堆叠式多封装模块,其第二电子元件高度大于第一电子元件的高度,使得第一电子元件及第二电子元件之间会存有一高度差。其中一些第一电子元件及第二电子元件装设于基板上,而第一绝缘层为热固性片状胶材,不需通过模具而贴附覆盖在其中一部分的第一电子元件以及部分的基板上。因此,工艺较为简单,从而简化封装的流程。当第一绝缘层覆盖这些第一电子元件以及部分基板上时,这些第一电子元件上方将存有空间以容置其他第一电子元件。据此,不仅可以简化封装的流程且缩短信号线路径,从而使得线路损耗及干扰减少,产品电性更佳。此外,堆叠式多封装模块的封装平整性高且外观颜色均一,而堆叠式多封装模块的内部堆叠空间利用率得以增加。To sum up, the embodiment of the present invention provides a stacked multi-package module, in which the height of the second electronic component is greater than that of the first electronic component, so that there is a height difference between the first electronic component and the second electronic component. Some of the first electronic components and the second electronic components are installed on the substrate, and the first insulating layer is a thermosetting sheet adhesive material, which is attached and covered on a part of the first electronic components and a part of the substrate without a mold . Therefore, the process is relatively simple, thereby simplifying the packaging process. When the first insulating layer covers the first electronic components and part of the substrate, there will be space above the first electronic components to accommodate other first electronic components. Accordingly, not only can the packaging process be simplified and the signal line path shortened, so that line loss and interference are reduced, and the electrical performance of the product is better. In addition, the package of the stacked multi-package module has high flatness and uniform appearance color, and the utilization rate of the internal stacking space of the stacked multi-package module is increased.
除此之外,本发明实施例提供堆叠式多封装模块的制造方法,其第二电子元件高度大于第一电子元件的高度,使得第一电子元件及第二电子元件之间会存有一高度差。通过贴附第一绝缘层覆盖在其中一部分的第一电子元件以及部分的基板上,再于这些第一电子元件上方的空间内容置其他第一电子元件。据此,不仅可以简化封装的流程且缩短信号线路径,从而使得线路损耗及干扰减少,产品电性更佳。此外,堆叠式多封装模块的封装平整性高且外观颜色均一,而堆叠式多封装模块的内部堆叠空间利用率得以增加。In addition, an embodiment of the present invention provides a method for manufacturing a stacked multi-package module, the height of the second electronic component is greater than the height of the first electronic component, so that there is a height difference between the first electronic component and the second electronic component . By attaching the first insulating layer to cover a part of the first electronic components and a part of the substrate, and then arranging other first electronic components in the space above the first electronic components. Accordingly, not only can the packaging process be simplified and the signal line path shortened, so that line loss and interference are reduced, and the electrical performance of the product is better. In addition, the package of the stacked multi-package module has high flatness and uniform appearance color, and the utilization rate of the internal stacking space of the stacked multi-package module is increased.
以上所述仅为本发明的实施例,其并非用以限定本发明的权利要求保护范围。任何本领域技术人员,在不脱离本发明的精神与范围内,所作的更动及润饰的等效替换,仍为本发明的权利要求保护范围内。The above descriptions are only examples of the present invention, and are not intended to limit the protection scope of the claims of the present invention. Any modifications and equivalent replacements made by those skilled in the art without departing from the spirit and scope of the present invention are still within the protection scope of the claims of the present invention.
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