CN107655625A - Thick film ceramic pressure sensor zero-point voltage on-line debugging method - Google Patents
Thick film ceramic pressure sensor zero-point voltage on-line debugging method Download PDFInfo
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- CN107655625A CN107655625A CN201710864897.6A CN201710864897A CN107655625A CN 107655625 A CN107655625 A CN 107655625A CN 201710864897 A CN201710864897 A CN 201710864897A CN 107655625 A CN107655625 A CN 107655625A
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- pressure sensor
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- 239000000919 ceramic Substances 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 21
- 239000000523 sample Substances 0.000 claims description 8
- 238000013461 design Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 5
- 238000001467 acupuncture Methods 0.000 claims description 2
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- 241000208340 Araliaceae Species 0.000 claims 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 claims 1
- 235000003140 Panax quinquefolius Nutrition 0.000 claims 1
- 235000008434 ginseng Nutrition 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 238000004458 analytical method Methods 0.000 abstract description 2
- 238000013480 data collection Methods 0.000 abstract description 2
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 101150064138 MAP1 gene Proteins 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
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- 238000001914 filtration Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
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- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a kind of thick film ceramic pressure sensor zero-point voltage on-line debugging method, using multi-element array operation table top, pass through function control switch, sensor zero point measurement apparatus is repaiied into resistance machine with laser to be combined together, a kind of thick film ceramic pressure sensor zero-point voltage on-line debugging system of suitable production in enormous quantities is formed, realizes that zero-point voltage On-line funchon is debugged using the software that trims especially worked out.It is good that there is on-line debugging method of the present invention simple to operate, zero point to debug indicator consilience；Debugging efficiency can be effectively improved by employing multi-element array debugging, be adapted to thick film ceramic pressure sensor to produce in enormous quantities；Debugging result is easy to Data Collection, analysis, monitoring and retrospect and effective mass to monitor.
Description
Technical field
The invention belongs to thick film ceramic pressure sensor zero-point voltage debugging technique field, more particularly, to a kind of thick
Film ceramic pressure sensor zero point debugging technique method and device.
Background technology
Sensor technology is one of high-tech technology that the world today attracts people's attention, and the one of contemporary science and technology development
Individual important symbol, it is with the communication technology, three big pillars of computer technology configuration information industry.Sensor industry is as domestic and international
The generally acknowledged high-tech industry with development prospect, so that its is with high content of technology, good in economic efficiency, penetrating power is strong, market prospects
The features such as wide is to catch people's attention.
Thick film ceramic pressure sensor has that function admirable, operating temperature range are wide, creep is small, can directly be contacted in use
Corrosive gas or liquid, without the conversion and isolation by stainless steel diaphragm and silicone oil, simple in construction, synthesis precision is high and valency
The features such as lattice are low.Its application field expands year by year, is widely used in the fields such as modern industry, agricultural, medical treatment.
Thick film ceramic pressure sensor does not have the transmission of liquid, and pressure acts directly on the preceding surface of ceramic diaphragm, makes film
Piece produces small deformation, and thick-film resistor is printed on the back side of ceramic diaphragm, connects into a Wheatstone bridge (closing bridge), due to
The piezoresistive effect of strain resistor, electric bridge is produced one and be directly proportional to the pressure, also the highly linear directly proportional to driving voltage
Voltage signal.Therefore, the equilibrium response for the Wheatstone bridge being made up of strain resistor determine sensor zero stability and
Thermal drift characteristic.Because thick-film resistor printing initial value can only achieve the 50%~100% of nominal value in thick film circuit, then in electricity
Reach the nominal value of circuit function requirements in the state of the open loop of road by laser trimming.But thick film ceramic pressure drag type pressure senses
The sensor circuit of device is a closed loop resistance network, using traditional thick-film circuit resistor laser trimming method, it is difficult to meet favour
Stone bridge balance trims requirement and product stability requirement, it is necessary to trim technology using bridge circuit ratio is closed.Therefore, thick film is made pottery
Porcelain pressure sensor zero-point voltage on-line debugging technical method and device have urgent actual demand for batch production.
The content of the invention
It is an object of the invention to provide a kind of thick film ceramic pressure sensor zero-point voltage on-line debugging method.This method is grasped
Make simple, good, the suitable thick film ceramic pressure sensor of zero point debugging indicator consilience to produce in enormous quantities；Debugging result is easy to data
Collect, analyze, monitor and trace and effective mass monitors.
Realizing the technical scheme of the object of the invention is：A kind of thick film ceramic pressure sensor zero-point voltage on-line debugging side
Method, it is characterized in that
Product to be trimmed is placed in multi-element array operation table top, the multi-element array operation table top for loading product is embedding
Enter laser and repair resistance machine operation table top, electric contact probe card is in contact with the product on multi-element array operation table top, loading zero
Point measuring system, Start-up and Adjustment software, first the automatic closed loop resistance that carries out trims during debugging, electric bridge is reached rough balance state,
Debugging mode is switched to by zero-point voltage by function control switch again and trims state, each sensor is debugged and expires
The zero-point voltage value of prestige, after reaching accurate adjustment parameter setting target, zero-point voltage, which trims process, to be terminated, and system shows final debugging
As a result, and the particular location of unqualified unit is identified effectively to reject unqualified unit.
Wherein multi-element array operation table top, 4 × 4 multi-element array operation table tops designed according to product design feature,
Each product that can be accurately positioned on multi-element array.Table top combines with laser machine microscope carrier, can carry out 16 products simultaneously
Online zero-point voltage debugging, operating efficiency are high.
Function control switch, it is the function switch of the coarse adjustment of sensor zero point voltage and accurate adjustment.During debugging, laser repaiies resistance
First automatic progress coarse adjustment is that closed loop resistance trims to machine, electric bridge is reached rough balance state, then will be adjusted by function switch
Examination state is switched to accurate adjustment i.e. zero-point voltage and trims state, each sensor is debugged desired zero-point voltage value.
Zero point measuring system, including the electric contact that high-precision electric bridge driving source and pins of products terminal are electrically connected are visited
Pin card, and the data acquisition of faint zero-point voltage and detection means during responsible accurate adjustment.
Laser repaiies resistance machine, according to the special programmed instruction for trimming software and sending, sends laser with specified unit path, repaiies
Thick-film resistor length and width dimensions are carved, Wheatstone bridge is reached the poised state of design.
It is special to trim software, it is responsible for coordination, control system each several part hardware is pressed and specifies target action, completion goal task.
This thick film ceramic pressure sensor zero-point voltage on-line debugging method provided by the invention have it is simple to operate, zero
Point debugging indicator consilience is good；Debugging efficiency can be effectively improved by employing multi-element array debugging, be adapted to thick film ceramic pressure to pass
Sensor is produced in enormous quantities；Debugging result is easy to Data Collection, analysis, monitoring and retrospect and effective mass to monitor.
Brief description of the drawings
Fig. 1 is the multi-element array operation post facial contour schematic diagram of the present invention.
Fig. 2 is the function control switch schematic diagram of the present invention.
Fig. 3 is the zero-point voltage measuring system schematic diagram of the present invention.
Fig. 4 is technical solution of the present invention hardware elementary diagram.
Embodiment
The specific implementation method of the present invention is described further below in conjunction with the accompanying drawings.
As shown in figure 4, a kind of thick film ceramic pressure sensor zero-point voltage on-line debugging device, including multi-element array are made
Industry table top, function control switch, zero point measuring system and power-supply system, laser repair resistance machine.
Fig. 1 is multi-element array table top appearance schematic diagram, 4 × 4 multi-element array platforms designed according to product design feature
Face, each product that can be accurately positioned on multi-element array.16 units that table top is arranged by 4 rows 4 form, and are carried according to Fig. 4
The debugging apparatus technical scheme of confession, by the multi-element array table top of product load map 1 one by one, then the table top is loaded into laser machine and made
Industry table top, you can be ready for the zero-point voltage on-line debugging of 16 products, operating efficiency is high.
Function control switch part shown in Fig. 2, it is the function switch of sensor zero point coarse adjustment and accurate adjustment.It is first during debugging
The automatic closed loop resistance that carries out trims, and electric bridge is reached rough balance state, then switch debugging mode by function switch
State is trimmed to zero-point voltage, each sensor is debugged desired zero-point voltage value.
Power-supply system provides primary power source for test system each several part, and test system each several part carries out secondary steady as needed
Pressure, filtering, to reduce ripple interference, improve the stability of power supply precision, accuracy of detection and system.
Zero point measuring system shown in Fig. 3, including high-precision electric bridge driving source, the electric contact that is connected with pins of products terminal are visited
Pin card, and data acquisition and the detection means of faint zero-point voltage are measured during responsible accurate adjustment.Because target voltage is very faint (several
Ten to hundreds of microvolt levels), therefore system is carried out using the bridge excitation source of high-precision and high-stability with pins of products terminal
The probe card of electrical connection uses the acupuncture needle of low contact resistance.Special array probe card is made up of 16 probes with clamp, by sequence number
The positive and negative exciting electrode of product with 4 units of every a line and positive and negative output electrode reliable electric contact respectively, are realized to each list
The excitation and output detection of the electric bridge of first product.
Laser repaiies resistance machine, according to the special programmed instruction for trimming software and sending, sends laser with specified unit path, repaiies
Thick-film resistor length and width dimensions are carved, Wheatstone bridge is reached the poised state of design.
It is special to trim software, it is responsible for coordination, control system each several part hardware is pressed and specifies target action, completion goal task.
Adjustment method is：Product to be trimmed is positioned over multi-element array operation table top, will load the multi-element array of product
Operation table top is loaded into laser machine operation table top, and electric contact probe card is in contact with the product on multi-element array operation table top,
Zero-point voltage measuring system, Start-up and Adjustment software are loaded, system performs zero point coarse tuning process, reaches coarse adjustment parameter setting mesh automatically
After mark, function control switch action, switching system to zero-point voltage accurate adjustment state, after reaching accurate adjustment parameter setting target, system
Test result is shown, and identifies the particular location of unqualified unit effectively to reject unqualified unit.
Claims (3)
1. a kind of thick film ceramic pressure sensor zero-point voltage on-line debugging method, it is characterized in that：Product to be trimmed is placed in
Multi-element array operation table top, the multi-element array operation table top insertion laser for loading product is repaiied into resistance machine operation table top, electricity touches
Point probe card is in contact with the product on multi-element array operation table top, loads zero point measuring system, Start-up and Adjustment software, adjusts
First the automatic closed loop resistance that carries out trims during examination, electric bridge is reached rough balance state, then will debug shape by function control switch
State is switched to zero-point voltage and trims state, each sensor is debugged desired zero-point voltage value, reaches accurate adjustment ginseng
After number sets target, zero-point voltage, which trims process, to be terminated, and system shows final debugging result, and identifies unqualified unit
Particular location effectively to reject unqualified unit.
2. thick film ceramic pressure sensor zero-point voltage on-line debugging method as claimed in claim 1, it is characterized in that
Multi-element array operation table top, each product that can be accurately positioned on multi-element array, operation table top repair resistance with laser
Machine combines, and can carry out On-line Product zero-point voltage debugging simultaneously, and operating efficiency is high；
Function control switch, is the function switch of the coarse adjustment of sensor zero point voltage and accurate adjustment, and during debugging, laser repaiies resistance machine elder generation
Automatic progress coarse adjustment is that closed loop resistance trims, and electric bridge is reached rough balance state, then will debug shape by function switch
State is switched to accurate adjustment i.e. zero-point voltage and trims state, each sensor is debugged desired zero-point voltage value；
Zero point measuring system, including the electric contact probe card that high-precision electric bridge driving source and pins of products terminal are electrically connected,
And the data acquisition of faint zero-point voltage and detection means during responsible accurate adjustment；
Laser repaiies resistance machine, and according to the special programmed instruction for trimming software and sending, laser is sent with specified unit path, and it is thick to repair quarter
Film resistance length and width dimensions, Wheatstone bridge is set to reach the poised state of design.
3. thick film ceramic pressure sensor zero-point voltage on-line debugging method as claimed in claim 1, it is characterized in that electric contact
Probe card uses the acupuncture needle of low contact resistance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710864897.6A CN107655625A (en) | 2017-09-22 | 2017-09-22 | Thick film ceramic pressure sensor zero-point voltage on-line debugging method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710864897.6A CN107655625A (en) | 2017-09-22 | 2017-09-22 | Thick film ceramic pressure sensor zero-point voltage on-line debugging method |
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| CN107655625A true CN107655625A (en) | 2018-02-02 |
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| CN201710864897.6A Pending CN107655625A (en) | 2017-09-22 | 2017-09-22 | Thick film ceramic pressure sensor zero-point voltage on-line debugging method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108362438A (en) * | 2018-04-16 | 2018-08-03 | 无锡盛赛传感科技有限公司 | A kind of ceramic pressure sensor signal detection cubing |
| CN111338395A (en) * | 2020-03-25 | 2020-06-26 | 淮阴工学院 | Automatic water seal water level stabilizing and failure early warning system of U-shaped water trap |
| CN116191352A (en) * | 2022-12-30 | 2023-05-30 | 湖南防灾科技有限公司 | Human body electric shock quick cutting device |
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| US20100141290A1 (en) * | 2008-12-08 | 2010-06-10 | Formfactor, Inc. | Microspring array having reduced pitch contact elements |
| CN101862905A (en) * | 2010-05-04 | 2010-10-20 | 南京双环电器制造有限公司 | Laser trimming method of zeropoint resistor of pressure chip of ceramic pressure sensor |
| CN101997546A (en) * | 2010-11-10 | 2011-03-30 | 中国兵器工业集团第二一四研究所苏州研发中心 | High-accuracy fine adjustment method for zero position and measuring range parameters of digital-to-analogue conversion circuit |
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2017
- 2017-09-22 CN CN201710864897.6A patent/CN107655625A/en active Pending
Patent Citations (6)
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|---|---|---|---|---|
| US20100141290A1 (en) * | 2008-12-08 | 2010-06-10 | Formfactor, Inc. | Microspring array having reduced pitch contact elements |
| CN101862905A (en) * | 2010-05-04 | 2010-10-20 | 南京双环电器制造有限公司 | Laser trimming method of zeropoint resistor of pressure chip of ceramic pressure sensor |
| CN101997546A (en) * | 2010-11-10 | 2011-03-30 | 中国兵器工业集团第二一四研究所苏州研发中心 | High-accuracy fine adjustment method for zero position and measuring range parameters of digital-to-analogue conversion circuit |
| CN103557969A (en) * | 2013-11-07 | 2014-02-05 | 南京环科电子技术有限公司 | Ceramic pressure sensor chip capable of accurately correcting and adjusting temperature drift error, correcting and adjusting system and correcting and adjusting method |
| US9546925B2 (en) * | 2014-12-05 | 2017-01-17 | Nxp Usa, Inc. | Packaged sensor with integrated offset calibration |
| CN204903746U (en) * | 2015-09-11 | 2015-12-23 | 新余市天恩电子技术有限公司 | Ring -opening formula electricity level sensor debugs device with output zero point |
Non-Patent Citations (1)
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108362438A (en) * | 2018-04-16 | 2018-08-03 | 无锡盛赛传感科技有限公司 | A kind of ceramic pressure sensor signal detection cubing |
| CN111338395A (en) * | 2020-03-25 | 2020-06-26 | 淮阴工学院 | Automatic water seal water level stabilizing and failure early warning system of U-shaped water trap |
| CN116191352A (en) * | 2022-12-30 | 2023-05-30 | 湖南防灾科技有限公司 | Human body electric shock quick cutting device |
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Application publication date: 20180202 |
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