CN107640970A - The AgNb of low frequency low-dielectric loss is co-doped with titania-based dielectric ceramic material and preparation method thereof - Google Patents
The AgNb of low frequency low-dielectric loss is co-doped with titania-based dielectric ceramic material and preparation method thereof Download PDFInfo
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Abstract
Description
技术领域technical field
本发明属于陶瓷材料技术领域,具体涉及一种高介电常数、低介电损耗的二氧化钛基介电陶瓷材料及其制备方法。The invention belongs to the technical field of ceramic materials, and in particular relates to a titanium dioxide-based dielectric ceramic material with high dielectric constant and low dielectric loss and a preparation method thereof.
背景技术Background technique
高速发展的信息时代给电子产业带来了日新月异的新局面,目前微电子工业毫无疑问已经成为全世界最大的产业之一,而电容器作为电子设备中大批量使用的主要元件之一,无论是在我们日常生活中用到的手机、电脑、家电、汽车,还是在工业仪器仪表、农业、国防部门甚至航空航天领域,都扮演着非常重要的角色。The rapid development of the information age has brought a new situation to the electronics industry. At present, the microelectronics industry has undoubtedly become one of the largest industries in the world, and capacitors are one of the main components used in large quantities in electronic equipment. Whether it is Mobile phones, computers, home appliances, and automobiles that we use in our daily lives play a very important role in industrial instrumentation, agriculture, defense departments, and even aerospace.
介电材料作为重要的功能材料,被广泛应于电容器、存储器、微电子元器件等诸多领域。随着制造工艺不断发展,集成电路的特征尺寸不断缩小,电子元器件的集成化、小型化、高速化已经成为现代信息领域一个重要的研究课题。常用的介电材料钛酸锶钡系、锆钛酸铅系等多为铁电材料,由于铁电材料在居里温度会发生铁电-顺电相转变,使得铁电材料的介电常数随温度的变化明显,从而导致器件的温度稳定性变差,限制其应用范围。对于铅基材料,由于体系含有铅元素,而铅元素是一种环境不友好的金属元素。因此,研发一种无铅且具有高介电常数、低介电损耗、频率温度稳定性良好的介电材料迫在眉睫。Dielectric materials, as important functional materials, are widely used in many fields such as capacitors, memories, and microelectronic components. With the continuous development of manufacturing technology and the continuous reduction of the feature size of integrated circuits, the integration, miniaturization and high-speed of electronic components have become an important research topic in the field of modern information. Commonly used dielectric materials such as strontium barium titanate and lead zirconate titanate are mostly ferroelectric materials. Since ferroelectric materials undergo ferroelectric-paraelectric phase transition at the Curie temperature, the dielectric constant of ferroelectric materials varies with temperature. The change is obvious, which leads to the deterioration of the temperature stability of the device and limits its application range. For lead-based materials, since the system contains lead element, lead element is an environmentally unfriendly metal element. Therefore, it is imminent to develop a lead-free dielectric material with high dielectric constant, low dielectric loss, and good frequency and temperature stability.
由于二氧化钛基陶瓷在简单化合物中具有相对较高的介电常数,因此引起了研究者的广泛关注。近年来,不论是单掺,还是二五价、三五价共掺的二氧化钛基陶瓷材料的研究层出不群,但大部分材料却不能同时满足高介电常数、低介电损耗的要求,尤其是单掺杂的二氧化钛基陶瓷材料。例如铌单掺的二氧化钛基陶瓷具有相对较高的介电常数(>104),但其低频的介电损耗较大(>1),不能满足低介电损耗的要求。TiO2-based ceramics have attracted much attention from researchers due to their relatively high dielectric constant among simple compounds. In recent years, no matter whether it is single-doped, or two-pentavalent, three-pentavalent co-doped titanium dioxide-based ceramic materials have emerged in an endless stream, but most of the materials cannot meet the requirements of high dielectric constant and low dielectric loss at the same time. Especially single-doped titania-based ceramic materials. For example, niobium-doped titania-based ceramics have a relatively high dielectric constant (>10 4 ), but their low-frequency dielectric loss is relatively large (>1), which cannot meet the requirement of low dielectric loss.
发明内容Contents of the invention
本发明所要解决的技术问题在于提供一种具有高介电常数、低介电损耗(特别是低频低介电损耗)、频率温度稳定性良好、实用性强、易于生产的AgNb共掺二氧化钛基介电陶瓷材料,并为该陶瓷材料提供一种制备方法。The technical problem to be solved by the present invention is to provide an AgNb co-doped titanium dioxide-based dielectric with high dielectric constant, low dielectric loss (especially low dielectric loss at low frequency), good frequency temperature stability, strong practicability, and easy production. An electric ceramic material, and a preparation method for the ceramic material is provided.
解决上述技术问题所采用的陶瓷材料的通式为(Ag1/4Nb3/4)xTi1-xO2,其中x表示摩尔分数,x的取值为0.005~0.01。The general formula of the ceramic material used to solve the above technical problems is (Ag 1/4 Nb 3/4 ) x Ti 1-x O 2 , where x represents the mole fraction, and the value of x is 0.005-0.01.
上述AgNb共掺二氧化钛基介电陶瓷材料的制备方法如下:The preparation method of the above-mentioned AgNb co-doped titania-based dielectric ceramic material is as follows:
1、按照(Ag1/4Nb3/4)xTi1-XO2的化学计量分别称取纯度为99.5%以上的原料Ag2O、Nb2O5和TiO2,充分混合球磨16~24小时,在80~100℃下干燥12~24小时,得到原料混合物。1. According to the stoichiometry of (Ag 1/4 Nb 3/4 ) x Ti 1-X O 2 , weigh the raw materials Ag 2 O, Nb 2 O 5 and TiO 2 with a purity of more than 99.5%, and mix them thoroughly by ball milling for 16~ 24 hours, drying at 80-100° C. for 12-24 hours to obtain a raw material mixture.
2、将原料混合物在1000~1200℃预烧2~4小时,得到预烧粉。2. Pre-calcining the raw material mixture at 1000-1200° C. for 2-4 hours to obtain calcined powder.
3、将预烧粉经二次球磨、造粒、压片、排胶后,在1400~1450℃烧结5~10小时,得到AgNb共掺二氧化钛基介电陶瓷材料。3. Sintering the calcined powder at 1400-1450° C. for 5-10 hours after secondary ball milling, granulation, tableting and debinding, to obtain AgNb co-doped titanium dioxide-based dielectric ceramic material.
上述步骤2中,优选将原料混合物在1100℃预烧3小时。In the above step 2, the raw material mixture is preferably pre-calcined at 1100° C. for 3 hours.
上述步骤3中,优选将预烧粉经二次球磨、造粒、压片、排胶后,在1450℃烧结10小时。In the above step 3, it is preferable to sinter the calcined powder at 1450° C. for 10 hours after secondary ball milling, granulation, tableting, and debinding.
本发明通过在Nb单掺的二氧化钛基陶瓷材料中引入金属元素Ag,使陶瓷材料在兼具高介电常数的情况下,显著降低了陶瓷材料的低频介电损耗,在40~103Hz频率范围内介电损耗始终保持在0.06以下,同时具有优异的频率及温度稳定性,保持在-10%~10Z%之间。The present invention introduces the metal element Ag into the Nb single-doped titanium dioxide-based ceramic material, so that the ceramic material has a high dielectric constant, and significantly reduces the low - frequency dielectric loss of the ceramic material. The dielectric loss within the range is always kept below 0.06, and it has excellent frequency and temperature stability, which is kept between -10% and 10Z%.
本发明陶瓷材料的制备方法简单、重复性好、成品率高、实用性强、易于生产。The preparation method of the ceramic material of the invention is simple, good in repeatability, high in yield, strong in practicability and easy in production.
附图说明Description of drawings
图1是实施例1~2制备的陶瓷材料的XRD图。Fig. 1 is the XRD pattern of the ceramic material prepared in Examples 1-2.
图2是实施例1~6制备的陶瓷材料的介电常数随测试频率的变化关系图。Fig. 2 is a graph showing the relationship between the dielectric constant of the ceramic materials prepared in Examples 1-6 and the test frequency.
图3是实施例1~6制备的陶瓷材料的介电损耗随测试频率的变化关系图。Fig. 3 is a graph showing the relationship between dielectric loss and test frequency of ceramic materials prepared in Examples 1-6.
图4是实施例1制备的陶瓷材料的介电常数随测试温度变化及温度稳定性关系图。FIG. 4 is a graph showing the relationship between the dielectric constant of the ceramic material prepared in Example 1 and the temperature stability as a function of the test temperature.
图5是实施例2制备的陶瓷材料的介电常数随测试温度变化及温度稳定性关系图。Fig. 5 is a diagram showing the relationship between the dielectric constant of the ceramic material prepared in Example 2 and the variation of the test temperature and the temperature stability.
具体实施方式detailed description
下面结合附图和实施例对本发明进一步详细说明,但本发明的保护范围不仅限于这些实施例。The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention is not limited to these embodiments.
实施例1Example 1
1、按照(Ag1/4Nb3/4)0.005Ti0.995O2的化学计量分别称取原料Ag2O(纯度99.7%)0.0361g、Nb2O5(纯度99.99%)0.1237g、TiO2(纯度99.5%)19.8401g,并装入尼龙罐中,以锆球为磨球、无水乙醇为球磨介质,无水乙醇与原料混合物的质量比为1:1.2,用球磨机401转/分钟球磨24小时,分离锆球,将原料混合物在80℃下干燥24小时,用研钵研磨30分钟,得到原料混合物。1. According to the stoichiometry of (Ag 1/4 Nb 3/4 ) 0.005 Ti 0.995 O 2 , weigh the raw materials Ag 2 O (99.7% purity) 0.0361g, Nb 2 O 5 (99.99% purity) 0.1237g, TiO 2 (purity 99.5%) 19.8401g, and pack in the nylon jar, be ball milling medium with zirconium ball, dehydrated alcohol, the mass ratio of dehydrated alcohol and raw material mixture is 1:1.2, ball mills with ball mill 401 revolutions per minute After 24 hours, the zirconium balls were separated, the raw material mixture was dried at 80° C. for 24 hours, and ground with a mortar for 30 minutes to obtain a raw material mixture.
2、将原料混合物置于氧化铝坩埚内,加盖,以3℃/分钟的升温速率升温至1100℃保温3小时,自然冷却至室温,出炉,用研钵研磨5分钟,得到预烧粉。2. Put the raw material mixture in an alumina crucible, cover it, heat it up to 1100°C at a heating rate of 3°C/min and keep it warm for 3 hours, cool it down to room temperature naturally, take it out of the furnace, and grind it with a mortar for 5 minutes to obtain a calcined powder.
3、将预烧粉装入尼龙罐中,以锆球为磨球、无水乙醇为球磨介质,无水乙醇与预烧粉的质量比为1:1.2,充分混合球磨20小时,分离锆球,将预烧粉在80℃下干燥24小时,用研钵研磨,得到二次球磨的预烧粉;再向其中加入质量分数为5%的聚乙烯醇水溶液,聚乙烯醇水溶液的加入量为二次球磨后的预烧粉质量的50%,造粒,过120目筛,制成球状粉粒,将球状粉粒放入直径为11.5mm的不锈钢模具内,用粉末压片机在6MPa的压力下将其压制成厚度为1.5mm的圆柱状坯件;将圆柱状坯件放在氧化锆平板上,将氧化锆平板置于氧化铝瓷舟中,先在马弗炉中用380分钟升温至500℃,保温2小时,随炉自然冷却至室温,然后在管式炉中先以100分钟升温至1000℃,再以2℃/分钟的升温速率升温至1450℃,保温10小时,随炉自然冷却至室温,得到低频低介电损耗的AgNb共掺二氧化钛基介电陶瓷材料。3. Put the calcined powder into a nylon tank, use zirconium balls as grinding balls, and absolute ethanol as the ball milling medium. The mass ratio of absolute ethanol to calcined powder is 1:1.2, mix and ball mill for 20 hours, and separate the zirconium balls , dry the calcined powder at 80°C for 24 hours, and grind it with a mortar to obtain the calcined powder of the second ball mill; then add a polyvinyl alcohol aqueous solution with a mass fraction of 5%, and the addition amount of the polyvinyl alcohol aqueous solution is 50% of the mass of the calcined powder after the secondary ball milling, granulation, passing through a 120 mesh sieve to make spherical powder, and putting the spherical powder into a stainless steel mold with a diameter of 11.5mm, using a powder tablet press at 6MPa Press it into a cylindrical blank with a thickness of 1.5mm under pressure; put the cylindrical blank on a zirconia flat plate, place the zirconia flat plate in an alumina porcelain boat, and heat up in a muffle furnace for 380 minutes to 500°C, keep warm for 2 hours, cool down to room temperature naturally with the furnace, then raise the temperature to 1000°C in a tube furnace for 100 minutes, then raise the temperature to 1450°C at a heating rate of 2°C/min, hold for 10 hours, Naturally cooled to room temperature, the AgNb co-doped titania-based dielectric ceramic material with low frequency and low dielectric loss was obtained.
实施例2Example 2
本实施例中,按照(Ag1/4Nb3/4)0.01Ti0.99O2的化学计量分别称取原料Ag2O(99.7%)0.0719g、Nb2O5(99.99%)0.2468g、TiO2(99.5%)19.6813g,其他步骤与实施例1相同,得到低频低介电损耗的AgNb共掺二氧化钛基介电陶瓷材料。In this example , the raw materials Ag 2 O (99.7%) 0.0719g , Nb 2 O 5 ( 99.99%) 0.2468g , TiO 2 (99.5%) 19.6813g, and the other steps were the same as in Example 1 to obtain an AgNb co-doped titania-based dielectric ceramic material with low frequency and low dielectric loss.
实施例3Example 3
本实施例中,在管式炉中先以100分钟升温至1000℃,再以2℃/分钟的升温速率升温至1410℃,保温10小时,其他步骤与实施例1相同,得到低频低介电损耗的AgNb共掺二氧化钛基介电陶瓷材料。In this example, the tube furnace is first heated to 1000°C in 100 minutes, then raised to 1410°C at a heating rate of 2°C/min, and kept for 10 hours. The other steps are the same as in Example 1 to obtain low-frequency and low-dielectric Lossy AgNb co-doped TiO2-based dielectric ceramic materials.
实施例4Example 4
本实施例中,在管式炉中先以100分钟升温至1000℃,再以2℃/分钟的升温速率升温至1410℃,保温10小时,其他步骤与实施例2相同,得到低频低介电损耗的AgNb共掺二氧化钛基介电陶瓷材料。In this example, in the tube furnace, the temperature is raised to 1000°C in 100 minutes, then raised to 1410°C at a rate of 2°C/min, and kept for 10 hours. Other steps are the same as in Example 2 to obtain a low-frequency low-dielectric Lossy AgNb co-doped TiO2-based dielectric ceramic materials.
实施例5Example 5
本实施例中,在管式炉中先以100分钟升温至1000℃,再以2℃/分钟的升温速率升温至1450℃,保温5小时,其他步骤与实施例1相同,得到低频低介电损耗的AgNb共掺二氧化钛基介电陶瓷材料。In this example, in the tube furnace, the temperature is raised to 1000°C in 100 minutes, then to 1450°C at a rate of 2°C/min, and kept for 5 hours. Other steps are the same as in Example 1 to obtain low-frequency and low-dielectric Lossy AgNb co-doped TiO2-based dielectric ceramic materials.
实施例6Example 6
本实施例中,在管式炉中先以100分钟升温至1000℃,再以2℃/分钟的升温速率升温至1450℃,保温5小时,其他步骤与实施例2相同,得到低频低介电损耗的AgNb共掺二氧化钛基介电陶瓷材料。In this example, the tube furnace is first heated to 1000°C in 100 minutes, then raised to 1450°C at a heating rate of 2°C/min, and kept for 5 hours. The other steps are the same as in Example 2 to obtain low-frequency and low-dielectric Lossy AgNb co-doped TiO2-based dielectric ceramic materials.
上述实施例1和2制备的陶瓷材料分别采用D/max-2200X型射线衍射仪(由日本理学公司生产)进行XRD测试,结果见图1。由图1可见,实施例1和2制备的陶瓷材料均为纯的类钙钛矿结构,无第二相生成。The ceramic materials prepared in the above Examples 1 and 2 were respectively subjected to XRD tests using a D/max-2200 X-ray diffractometer (manufactured by Rigaku Corporation of Japan), and the results are shown in FIG. 1 . It can be seen from Figure 1 that the ceramic materials prepared in Examples 1 and 2 are all pure perovskite-like structures without the formation of a second phase.
将实施例1~6制备的陶瓷材料表面依次用320目、800目、1500目砂纸抛光至0.5~0.6mm厚,然后在陶瓷上下表面涂覆厚度为0.01~0.03mm的银浆,置于电阻炉中840℃保温30分钟。采用Agilient4294A型精密阻抗分析仪和E4980A型LCR测试仪分别对陶瓷的介电性能进行测试,结果见图2~5。由图2和3可见,1kHz时,实施例1~6制备的陶瓷材料的相对介电常数依次为9409、17252、9345、17150、9259、16234,介电损耗依次为0.036、0.044、0.057、0.060、0.043、0.059,而频率在40~103Hz范围内的介电损耗始终保持在0.06以下。由图4可见,实施例1制备的陶瓷材料在不同频率时-55~150℃范围内的介电常数普遍集中在9000左右,温度变化率为-1.5%~7%。由图5可见,实施例2制备的陶瓷材料在不同频率时-55~150℃范围内的介电常数主要集中在14000~16000之间,其温度变化率为-8.6%~10%。由此可见,本发明的陶瓷材料具有高介电常数、低介电损耗,并且温度稳定性始终保持在-10%~10%之间,满足材料的应用要求。Polish the surface of the ceramic material prepared in Examples 1 to 6 with 320 mesh, 800 mesh, and 1500 mesh sandpaper in sequence to a thickness of 0.5 to 0.6 mm, then coat the upper and lower surfaces of the ceramic with silver paste with a thickness of 0.01 to 0.03 mm, and place it in a resistor Heat at 840°C for 30 minutes in the furnace. Agilent4294A precision impedance analyzer and E4980A LCR tester were used to test the dielectric properties of ceramics, and the results are shown in Figures 2-5. It can be seen from Figures 2 and 3 that at 1 kHz, the relative permittivity of the ceramic materials prepared in Examples 1 to 6 is 9409, 17252, 9345, 17150, 9259, 16234, and the dielectric loss is 0.036, 0.044, 0.057, 0.060 , 0.043, 0.059, and the dielectric loss in the frequency range of 40-10 3 Hz is always kept below 0.06. It can be seen from Fig. 4 that the dielectric constant of the ceramic material prepared in Example 1 is generally concentrated at about 9000 at different frequencies in the range of -55 to 150°C, and the temperature change rate is -1.5% to 7%. It can be seen from Fig. 5 that the dielectric constant of the ceramic material prepared in Example 2 is mainly concentrated between 14000 and 16000 at different frequencies in the range of -55 to 150 °C, and the temperature change rate is -8.6% to 10%. It can be seen that the ceramic material of the present invention has high dielectric constant and low dielectric loss, and the temperature stability is always maintained between -10% and 10%, which meets the application requirements of the material.
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CN109133914B (en) * | 2018-11-23 | 2021-07-06 | 陕西师范大学 | A kind of titanium dioxide-based ceramic material with high thermal stability and preparation method thereof |
CN111205085A (en) * | 2020-02-03 | 2020-05-29 | 河南理工大学 | Preparation method of titanium dioxide-based ceramic with ultrahigh dielectric constant and low dielectric loss |
CN111205085B (en) * | 2020-02-03 | 2021-07-27 | 河南理工大学 | A kind of preparation method of titanium dioxide-based ceramics with ultra-high dielectric constant and low dielectric loss |
CN113788673A (en) * | 2021-09-29 | 2021-12-14 | 陕西师范大学 | Medium-low frequency ultra-low dielectric loss and high dielectric constant titanium dioxide-based ceramic material and preparation method |
CN117105660A (en) * | 2023-08-25 | 2023-11-24 | 陕西师范大学 | High dielectric, low loss, temperature stability, tri- and hexavalent ions co-doped rutile titanium dioxide ceramic material and preparation method thereof |
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