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CN107623089A - Separation method of flexible OLED display and flexible OLED display - Google Patents

Separation method of flexible OLED display and flexible OLED display Download PDF

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CN107623089A
CN107623089A CN201710910923.4A CN201710910923A CN107623089A CN 107623089 A CN107623089 A CN 107623089A CN 201710910923 A CN201710910923 A CN 201710910923A CN 107623089 A CN107623089 A CN 107623089A
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oled display
flexible oled
flexible
separation method
hard substrate
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CN107623089B (en
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陶强
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Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Priority to PCT/CN2017/110851 priority patent/WO2019061719A1/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

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Abstract

本发明提供了一种柔性OLED显示器的分离方法,其包括步骤:利用真空吸附台真空吸附经激光剥离后的OLED显示组件,OLED显示组件包括被真空吸附台真空吸附的硬质基板以及形成于硬质基板上的柔性OLED显示器;使弹性网板面向柔性OLED显示器,弹性网板包括板本体以及设置于板本体内的至少两个滚轮;滚轮朝向柔性OLED显示器移动,以带动第一表面的部分向柔性OLED显示器移动并与柔性OLED显示器接触;滚轮彼此背向移动并保持对柔性OLED显示器的压力,以使柔性OLED显示器与硬质基板分离;板本体朝向柔性OLED显示器移动,以使第一表面真空吸附柔性OLED显示器;真空吸附台沿着远离柔性OLED显示器的方向移动。本发明的分离方法在节拍时间、良率以及保护柔性OLED显示器等方面具有良好的效果。

The invention provides a method for separating a flexible OLED display, which includes the steps of: using a vacuum adsorption table to vacuum absorb the OLED display assembly after laser stripping, the OLED display assembly includes a hard substrate vacuum-adsorbed by the vacuum adsorption table and formed on a hard substrate. A flexible OLED display on a solid substrate; make the elastic screen face to the flexible OLED display, the elastic screen includes a board body and at least two rollers arranged in the board body; the rollers move toward the flexible OLED display to drive a part of the first surface toward the The flexible OLED display moves and contacts the flexible OLED display; the rollers move away from each other and maintain pressure on the flexible OLED display to separate the flexible OLED display from the hard substrate; the plate body moves toward the flexible OLED display to vacuum the first surface Adsorb the flexible OLED display; the vacuum suction table moves in a direction away from the flexible OLED display. The separation method of the invention has good effects in takt time, yield rate, protection of flexible OLED displays and the like.

Description

柔性OLED显示器的分离方法及柔性OLED显示器Separation method of flexible OLED display and flexible OLED display

技术领域technical field

本发明属于显示器制作技术领域,具体地讲,涉及一种柔性OLED显示器的分离方法及柔性OLED显示器。The invention belongs to the technical field of display production, and in particular relates to a method for separating a flexible OLED display and the flexible OLED display.

背景技术Background technique

近年来,有机发光二极管(Organic Light-Emitting Diode,OLED)显示器成为国内外非常热门的新兴平面显示器产品,这是因为OLED显示器具有自发光、广视角、短反应时间、高发光效率、广色域、低工作电压、薄厚度、可制作大尺寸与可挠曲的显示器及制程简单等特性,而且它还具有低成本的潜力。In recent years, organic light-emitting diode (Organic Light-Emitting Diode, OLED) display has become a very popular emerging flat-panel display product at home and abroad, because OLED display has self-illumination, wide viewing angle, short response time, high luminous efficiency, wide color gamut , low operating voltage, thin thickness, large-size and flexible displays can be produced, and the manufacturing process is simple, and it also has the potential of low cost.

随着工业科技技术的发展,激光剥离(LLO)后的分离技术已经普遍的应用到柔性OLED显示领域。然而,针对现有的激光剥离后的柔性OLED显示器的分离技术,在节拍时间(tacktime)、良率等方面的效果均欠佳。With the development of industrial technology, the separation technology after laser lift-off (LLO) has been widely applied to the field of flexible OLED display. However, the existing separation technology for the flexible OLED display after laser lift-off has poor effects in terms of tack time and yield.

发明内容Contents of the invention

为了解决上述现有技术存在的问题,本发明的目的在于提供一种在节拍时间(tack time)和良率等方面具有良好效果的柔性OLED显示器的分离方法及柔性OLED显示器。In order to solve the above-mentioned problems in the prior art, the object of the present invention is to provide a method for separating a flexible OLED display and a flexible OLED display with good effects in terms of tack time and yield.

根据本发明的一方面,提供了一种柔性OLED显示器的分离方法,其包括步骤:利用真空吸附台真空吸附经激光剥离后的OLED显示组件;所述OLED显示组件包括被所述真空吸附台真空吸附的硬质基板以及形成于所述硬质基板上的柔性OLED显示器,所述柔性OLED显示器与所述硬质基板之间存在微小间隙和/或气泡;使弹性网板面向所述柔性OLED显示器;所述弹性网板包括板本体以及设置于所述板本体内的至少两个滚轮,所述滚轮靠近所述板本体的面向所述柔性OLED显示器的第一表面;所述滚轮朝向所述柔性OLED显示器移动,以带动所述第一表面的部分向所述柔性OLED显示器移动并与所述柔性OLED显示器接触;所述滚轮彼此背向移动并保持对所述柔性OLED显示器的压力,以使所述柔性OLED显示器与所述硬质基板之间的微小间隙和/或气泡向外排出,从而所述柔性OLED显示器与所述硬质基板分离;所述板本体朝向所述柔性OLED显示器移动,以使所述第一表面全部与所述柔性OLED显示器接触并真空吸附所述柔性OLED显示器;所述真空吸附台沿着远离所述柔性OLED显示器的方向移动,以使所述柔性OLED显示器与所述硬质基板彼此远离。According to one aspect of the present invention, a method for separating a flexible OLED display is provided, which includes the steps of: using a vacuum adsorption table to vacuum absorb the OLED display assembly after laser peeling; An adsorbed hard substrate and a flexible OLED display formed on the hard substrate, there are tiny gaps and/or air bubbles between the flexible OLED display and the hard substrate; making the elastic net plate face the flexible OLED display ; The elastic mesh panel includes a panel body and at least two rollers arranged in the panel body, the rollers are close to the first surface of the panel body facing the flexible OLED display; the OLED display moves to drive the portion of the first surface toward the flexible OLED display and contacts the flexible OLED display; the rollers move away from each other and maintain pressure on the flexible OLED display so that all The tiny gap between the flexible OLED display and the hard substrate and/or air bubbles are discharged outward, so that the flexible OLED display is separated from the hard substrate; the plate body moves toward the flexible OLED display to making the first surface all in contact with the flexible OLED display and vacuum absorbing the flexible OLED display; the vacuum adsorption table moves along a direction away from the flexible OLED display, so that the flexible OLED display is The hard substrates are away from each other.

进一步地,所述板本体在所述柔性OLED显示器上的投影完全位于所述柔性OLED显示器内。Further, the projection of the board body on the flexible OLED display is completely inside the flexible OLED display.

进一步地,所述板本体在所述柔性OLED显示器上的投影的第一边沿与其邻近的所述柔性OLED显示器的边沿之间的距离和所述板本体在所述柔性OLED显示器上的投影的第二边沿与其邻近的所述柔性OLED显示器的边沿之间的距离相等,所述第一边沿与所述第二边沿相对。Further, the distance between the first edge of the projection of the panel body on the flexible OLED display and the adjacent edge of the flexible OLED display and the first edge of the projection of the panel body on the flexible OLED display The distance between two edges and the adjacent edge of the flexible OLED display is equal, and the first edge is opposite to the second edge.

进一步地,所述至少两个滚轮相对于所述第一表面的中央部分。Further, the at least two rollers are relative to the central part of the first surface.

进一步地,所述硬质基板为玻璃基板。Further, the hard substrate is a glass substrate.

进一步地,所述板本体由聚对苯二甲酸乙二醇酯材料制成。Further, the board body is made of polyethylene terephthalate material.

进一步地,所述至少两个滚轮完全相同,所述滚轮由橡胶材料制成。Further, the at least two rollers are identical, and the rollers are made of rubber material.

进一步地,所述柔性OLED显示器包括:柔性基底,形成于所述硬质基板上;薄膜晶体管层,形成于所述柔性基底上;有机发光二极管层,形成于所述薄膜晶体管层上;薄膜封装层,形成于所述有机发光二极管层和所述薄膜晶体管层上,以封装所述有机发光二极管层。Further, the flexible OLED display includes: a flexible substrate formed on the hard substrate; a thin film transistor layer formed on the flexible substrate; an organic light emitting diode layer formed on the thin film transistor layer; a thin film encapsulation A layer is formed on the organic light emitting diode layer and the thin film transistor layer to encapsulate the organic light emitting diode layer.

进一步地,所述柔性基底由聚酰亚胺材料制成;当经激光剥离之后,所述柔性基底与所述硬质基板之间存在微小间隙和/或气泡。Further, the flexible substrate is made of polyimide material; after laser lift-off, there are tiny gaps and/or air bubbles between the flexible substrate and the hard substrate.

根据本发明的另一方面,还提供了一种由上述的分离方法分离形成的柔性OLED显示器。According to another aspect of the present invention, a flexible OLED display separated and formed by the above separation method is also provided.

本发明的有益效果:本发明的柔性OLED显示器的分离方法在节拍时间(tacktime)、良率以及保护柔性OLED显示器等方面具有良好的效果。Beneficial effects of the present invention: the separation method of the flexible OLED display of the present invention has good effects in terms of takt time (tacktime), yield rate and protection of the flexible OLED display.

附图说明Description of drawings

通过结合附图进行的以下描述,本发明的实施例的上述和其它方面、特点和优点将变得更加清楚,附图中:The above and other aspects, features and advantages of embodiments of the present invention will become more apparent through the following description in conjunction with the accompanying drawings, in which:

图1是根据本发明的实施例的柔性OLED显示器的分离方法的制程图;1 is a process diagram of a separation method of a flexible OLED display according to an embodiment of the present invention;

图2是根据本发明的弹性网板在柔性OLED显示器上的投影的示意图。Fig. 2 is a schematic diagram of the projection of an elastic mesh on a flexible OLED display according to the present invention.

具体实施方式detailed description

以下,将参照附图来详细描述本发明的实施例。然而,可以以许多不同的形式来实施本发明,并且本发明不应该被解释为限制于这里阐述的具体实施例。相反,提供这些实施例是为了解释本发明的原理及其实际应用,从而使本领域的其他技术人员能够理解本发明的各种实施例和适合于特定预期应用的各种修改。Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the specific embodiments set forth herein. Rather, the embodiments are provided to explain the principles of the invention and its practical application, thereby enabling others skilled in the art to understand the invention for various embodiments and with various modifications as are suited to particular intended uses.

在附图中,为了清楚器件,夸大了层和区域的厚度。相同的标号在整个说明书和附图中表示相同的元器件。In the drawings, the thicknesses of layers and regions are exaggerated for device clarity. Like reference numerals refer to like components throughout the specification and drawings.

图1是根据本发明的实施例的柔性OLED显示器的分离方法的制程图。FIG. 1 is a process diagram of a separation method of a flexible OLED display according to an embodiment of the present invention.

具体地,根据本发明的实施例的柔性OLED显示器的分离方法包括步骤一至步骤六。Specifically, the method for separating a flexible OLED display according to an embodiment of the present invention includes steps 1 to 6.

步骤一:参照图1中的(a)图,利用真空吸附台100真空吸附经激光剥离后的OLED显示组件200。Step 1: Referring to (a) in FIG. 1 , use a vacuum suction table 100 to vacuum absorb the OLED display assembly 200 after laser lift-off.

具体地,作为一种实施方式,OLED显示组件200可以包括被真空吸附台真空吸附的硬质基板210以及形成于硬质基板210上的柔性OLED显示器220。在经过激光剥离之后,硬质基板210与柔性OLED显示器220之间存在微小的间隙和/或气泡。Specifically, as an implementation, the OLED display assembly 200 may include a rigid substrate 210 vacuum-adsorbed by a vacuum adsorption table and a flexible OLED display 220 formed on the rigid substrate 210 . After laser lift-off, there are tiny gaps and/or bubbles between the rigid substrate 210 and the flexible OLED display 220 .

此外,需要说明的是,本实施例的硬质基板210可例如是玻璃基板,但本发明并不限制于此,例如也可以是硬质的树脂基板等。In addition, it should be noted that the hard substrate 210 in this embodiment may be, for example, a glass substrate, but the present invention is not limited thereto, and may also be, for example, a hard resin substrate.

进一步地,作为本发明的一种实施方式,柔性OLED显示器220可以包括:柔性基底221,形成于硬质基板210上;薄膜晶体管层222,形成于柔性基底221上;有机发光二极管层223,形成于薄膜晶体管层222上;薄膜封装层224,形成于有机发光二极管层223和薄膜晶体管层222上,以封装有机发光二极管层223。这里,柔性OLED显示器220的结构仅是一种示例,本发明的柔性OLED显示器的结构并不局限于此。Further, as an embodiment of the present invention, the flexible OLED display 220 may include: a flexible substrate 221 formed on the hard substrate 210; a thin film transistor layer 222 formed on the flexible substrate 221; an organic light emitting diode layer 223 formed On the thin film transistor layer 222 ; the thin film encapsulation layer 224 is formed on the organic light emitting diode layer 223 and the thin film transistor layer 222 to encapsulate the organic light emitting diode layer 223 . Here, the structure of the flexible OLED display 220 is just an example, and the structure of the flexible OLED display of the present invention is not limited thereto.

柔性基底221可以采用聚酰亚胺材料制成;但本发明并不限制于此。当经激光剥离之后,柔性基底221与硬质基板210之间存在微小间隙和/或气泡。The flexible base 221 can be made of polyimide; but the invention is not limited thereto. After laser lift-off, there are tiny gaps and/or air bubbles between the flexible substrate 221 and the rigid substrate 210 .

进行完步骤一之后,进行步骤二。After Step 1, go to Step 2.

步骤二:参照图1中的(b)图,使弹性网板300面向柔性OLED显示器220。Step 2: Referring to the diagram (b) in FIG. 1 , make the elastic mesh plate 300 face the flexible OLED display 220 .

具体地,作为一种实施方式,弹性网板300可以包括板本体310以及设置于板本体310内的两个滚轮320,两个滚轮320靠近板本体310的面向柔性OLED显示器220的第一表面(未示出)。这里,本实施例中的弹性网板300的结构仅是一种示例,本发明的弹性网板的结构并不局限于此。Specifically, as an implementation, the elastic mesh panel 300 may include a panel body 310 and two rollers 320 disposed in the panel body 310, and the two rollers 320 are close to the first surface of the panel body 310 facing the flexible OLED display 220 ( not shown). Here, the structure of the elastic mesh panel 300 in this embodiment is only an example, and the structure of the elastic mesh panel of the present invention is not limited thereto.

此外,本实施例中示出了两个滚轮320,但是本发明并不对滚轮320的数量作具体限定,可以根据实际需求对滚轮320的数量进行设置,但最少需要两个。In addition, this embodiment shows two rollers 320, but the present invention does not specifically limit the number of rollers 320, the number of rollers 320 can be set according to actual needs, but at least two are required.

进一步地,板本体310可以由聚对苯二甲酸乙二醇酯材料制成,但本发明并不限制于此,例如也可以采用其他的弹性材料制成。Further, the board body 310 may be made of polyethylene terephthalate material, but the present invention is not limited thereto, for example, it may also be made of other elastic materials.

此外,两个滚轮320可以完全相同,并且每个滚轮320可以由橡胶材料制成,但本发明并不限制于此,例如滚轮320的主体可以由钢材制成,在该主体之外覆盖橡胶等材料。In addition, the two rollers 320 can be exactly the same, and each roller 320 can be made of rubber material, but the present invention is not limited thereto, for example, the main body of the roller 320 can be made of steel, and the outside of the main body is covered with rubber, etc. Material.

此外,弹性网板300面向柔性OLED显示器220之后,弹性网板300在柔性OLED显示器220上的投影完全位于柔性OLED显示器220内。进一步地,如图2所示,弹性网板300在柔性OLED显示器220上的投影的第一边沿(即图2中的左侧边沿)与其邻近的柔性OLED显示器220的边沿(即图2中的左侧边沿)之间的距离和弹性网板300在柔性OLED显示器220上的投影的第二边沿(即图2中的右侧边沿)与其邻近的柔性OLED显示器220的边沿(即图2中的右侧边沿)之间的距离相等,这里所述第一边沿与所述第二边沿相对。In addition, after the elastic mesh 300 faces the flexible OLED display 220 , the projection of the elastic mesh 300 on the flexible OLED display 220 is completely inside the flexible OLED display 220 . Further, as shown in FIG. 2 , the first edge of the projection of the elastic mesh plate 300 on the flexible OLED display 220 (ie, the left edge in FIG. 2 ) is adjacent to the edge of the flexible OLED display 220 (ie, the left edge in FIG. 2 ). The distance between the left edge) and the second edge of the projection of the elastic mesh plate 300 on the flexible OLED display 220 (i.e. the right edge in FIG. right edge), where the first edge is opposite to the second edge.

进一步地,弹性网板300在柔性OLED显示器220上的投影的第三边沿(即图2中的上侧边沿)与其邻近的柔性OLED显示器220的边沿(即图2中的上侧边沿)之间的距离和弹性网板300在柔性OLED显示器220上的投影的第四边沿(即图2中的下侧边沿)与其邻近的柔性OLED显示器220的边沿(即图2中的下侧边沿)之间的距离相等,这里所述第三边沿与所述第四边沿相对。Further, between the third edge (ie, the upper edge in FIG. 2 ) of the projection of the elastic mesh plate 300 on the flexible OLED display 220 and the edge (ie, the upper edge in FIG. 2 ) of the adjacent flexible OLED display 220 The distance between the fourth edge (ie, the lower edge in FIG. 2 ) of the projection of the elastic mesh plate 300 on the flexible OLED display 220 and the edge of the adjacent flexible OLED display 220 (ie, the lower edge in FIG. 2 ) The distances are equal, where the third edge is opposite to the fourth edge.

此外,两个滚轮320彼此紧靠且相对于所述第一表面的中央部分。进一步地,两个滚轮320彼此紧靠且相对于柔性OLED显示器220的中央部分,但本发明并不限制于此。这样,可以使滚轮320施加均匀化的压力。Furthermore, the two rollers 320 abut against each other and with respect to the central portion of the first surface. Further, the two scroll wheels 320 are close to each other and relative to the central portion of the flexible OLED display 220, but the present invention is not limited thereto. In this way, the roller 320 can apply a uniform pressure.

进行完步骤二之后,进行步骤三。After Step 2, go to Step 3.

步骤三:参照图1中的(c)图,滚轮320朝向柔性OLED显示器220移动,以带动所述第一表面的部分向柔性OLED显示器220移动并与柔性OLED显示器220接触。Step 3: Referring to (c) in FIG. 1 , the scroll wheel 320 moves toward the flexible OLED display 220 to drive the part of the first surface to move toward the flexible OLED display 220 and make contact with the flexible OLED display 220 .

也就是说,在该步骤三中,板本体310不移动,仅移动滚轮320。由于板本体310具有弹性,因此滚轮320可以带动板本体310的部分接触柔性OLED显示器220,并对柔性OLED显示器220施加压力。That is to say, in the third step, the board body 310 does not move, but only the rollers 320 move. Since the board body 310 has elasticity, the roller 320 can drive a part of the board body 310 to contact the flexible OLED display 220 and exert pressure on the flexible OLED display 220 .

进行完步骤三之后,进行步骤四。After step three, go to step four.

步骤四:参照图1中的(d)图,两个滚轮320彼此背向移动并保持对柔性OLED显示器220的压力,以使柔性OLED显示器220与硬质基板210之间的微小间隙和/或气泡向外排出,从而柔性OLED显示器220与硬质基板210分离。Step 4: Referring to (d) in FIG. 1, the two rollers 320 move away from each other and maintain pressure on the flexible OLED display 220, so that the small gap and/or between the flexible OLED display 220 and the hard substrate 210 Bubbles are discharged outward, so that the flexible OLED display 220 is separated from the hard substrate 210 .

在该步骤四中,柔性OLED显示器220与硬质基板210之间的分离为极微小分离,即肉眼无法看出的分离。In the fourth step, the separation between the flexible OLED display 220 and the hard substrate 210 is a very small separation, that is, a separation that cannot be seen by naked eyes.

进行完步骤四之后,进行步骤五。After step four, go to step five.

步骤五:参照图1中的(e)图,板本体310朝向柔性OLED显示器220移动,以使板本体310的第一表面全部与柔性OLED显示器220接触并真空吸附柔性OLED显示器220。Step 5: Referring to (e) in FIG. 1 , the board body 310 moves toward the flexible OLED display 220 , so that the first surface of the board body 310 is all in contact with the flexible OLED display 220 and vacuum absorbs the flexible OLED display 220 .

在该步骤五中,板本体310的第一表面全部与柔性OLED显示器220接触并真空吸附柔性OLED显示器220的过程中,不会使柔性OLED显示器220与硬质基板210重新结合,即在这个过程中柔性OLED显示器220与硬质基板210之间依旧保持极微小分离。In the fifth step, the first surface of the board body 310 is all in contact with the flexible OLED display 220 and the flexible OLED display 220 is vacuum-adsorbed, so that the flexible OLED display 220 will not be recombined with the hard substrate 210, that is, in this process The separation between the medium flexible OLED display 220 and the rigid substrate 210 is still very small.

进行完步骤五之后,进行步骤六。After step five, go to step six.

步骤六:参照图1中的(f)图,真空吸附台100真空吸附着硬质基板210沿着远离柔性OLED显示器220的方向移动,以使柔性OLED显示器220与硬质基板210彼此远离。Step 6: Referring to (f) in FIG. 1 , the vacuum table 100 vacuum-adsorbs the rigid substrate 210 and moves away from the flexible OLED display 220 , so that the flexible OLED display 220 and the rigid substrate 210 are separated from each other.

经过步骤六之后,可以使柔性OLED显示器220与硬质基板210完全原理,从而完成柔性OLED显示器220的分离。After the sixth step, the flexible OLED display 220 and the rigid substrate 210 can be completely separated, thereby completing the separation of the flexible OLED display 220 .

综上所述,根据本发明的实施例的柔性OLED显示器的分离方法,在节拍时间(tacktime)、良率以及保护柔性OLED显示器等方面具有良好的效果。In summary, the method for separating flexible OLED displays according to the embodiments of the present invention has good effects in terms of tack time, yield, and protection of flexible OLED displays.

虽然已经参照特定实施例示出并描述了本发明,但是本领域的技术人员将理解:在不脱离由权利要求及其等同物限定的本发明的精神和范围的情况下,可在此进行形式和细节上的各种变化。While the invention has been shown and described with reference to particular embodiments, it will be understood by those skilled in the art that changes may be made in the form and scope thereof without departing from the spirit and scope of the invention as defined by the claims and their equivalents. Various changes in details.

Claims (10)

1. a kind of separation method of flexible OLED display, it is characterised in that including step:
Utilize OLED display module of the vacuum adsorption table vacuum suction after laser lift-off;The OLED display modules are included by institute The hard substrate of vacuum adsorption table vacuum suction and the flexible OLED display being formed on the hard substrate are stated, it is described soft Minim gap and/or bubble be present between property OLED display and the hard substrate;
Make elastic network(s) plate face to the flexible OLED display;The elastic web plate includes plate body and is arranged at the plate sheet At least two internal rollers, first surface towards the flexible OLED display of the roller close to the plate body;
The roller moves towards the flexible OLED display, to drive the part of the first surface to the flexible OLED Display is mobile and is contacted with the flexible OLED display;
The roller moves away from each other and keeps the pressure to the flexible OLED display, so that the flexible OLED is shown Minim gap and/or bubble between device and the hard substrate discharge, so as to the flexible OLED display with it is described Hard substrate separates;
The plate body moves towards the flexible OLED display, so that the first surface all shows with the flexible OLED Show device contact and flexible OLED display described in vacuum suction;
The vacuum adsorption table moves along the direction away from the flexible OLED display, so that the flexible OLED display With the hard substrate away from each other.
2. separation method according to claim 1, it is characterised in that the plate body is on the flexible OLED display Projection be fully located in the flexible OLED display.
3. separation method according to claim 2, it is characterised in that the plate body is on the flexible OLED display The distance between the edge of the first edge flexible OLED display adjacent thereto of projection and the plate body in institute State between the edge of the second edge flexible OLED display adjacent thereto of the projection on flexible OLED display away from From equal, first edge is relative with second edge.
4. according to the separation method described in any one of claims 1 to 3, it is characterised in that at least two roller relative to The middle body of the first surface.
5. separation method according to claim 1, it is characterised in that the hard substrate is glass substrate.
6. separation method according to claim 1, it is characterised in that the plate body is by polyethylene terephthalate Material is made.
7. separation method according to claim 1, it is characterised in that at least two roller is identical, the rolling Wheel is made up of elastomeric material.
8. separation method according to claim 1, it is characterised in that the flexible OLED display includes:
Flexible substrates, it is formed on the hard substrate;
Tft layer, it is formed in the flexible substrates;
Organic Light Emitting Diode layer, it is formed on the tft layer;
Thin-film encapsulation layer, it is formed on the Organic Light Emitting Diode layer and the tft layer, it is described organic to encapsulate LED layers.
9. separation method according to claim 7, it is characterised in that the flexible substrates are made up of polyimide material; After through laser lift-off, minim gap and/or bubble between the flexible substrates and the hard substrate be present.
10. a kind of separation method as described in any one of claim 1 to 9 separates the flexible OLED display formed.
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