CN107579029B - Cassette positioning device, cassette loading and unloading system and semiconductor processing equipment - Google Patents
Cassette positioning device, cassette loading and unloading system and semiconductor processing equipment Download PDFInfo
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- CN107579029B CN107579029B CN201610522513.8A CN201610522513A CN107579029B CN 107579029 B CN107579029 B CN 107579029B CN 201610522513 A CN201610522513 A CN 201610522513A CN 107579029 B CN107579029 B CN 107579029B
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Abstract
The invention provides a wafer box positioning device which is used for positioning a wafer box and comprises a mounting plate, wherein one end of the mounting plate along a preset direction is provided with a positioning pin, and the other end of the mounting plate is provided with a positioning block; a first space and a second space are formed on the lower surface of the bottom wall of the film box, concave parts which correspond to the positioning pins one by one are arranged on the inner peripheral wall of the first space facing the inside of the film box, and the concave parts are used for limiting the positioning pins to be positioned in the concave parts so as to limit the film box to move towards the positioning blocks in the preset direction; the inner peripheral wall of the second space facing the inside of the wafer box is used for limiting the positioning block so as to limit the wafer box to move towards the positioning pin in the preset direction. The wafer box positioning device provided by the invention can avoid the phenomenon that the tray is in over-position collision with the inner wall of the cavity when being positioned, thereby avoiding the damage of the wafer box and the displacement of the wafer, prolonging the service life of the wafer box and improving the product yield.
Description
Technical Field
The invention belongs to the technical field of microelectronic processing, and particularly relates to a wafer cassette positioning device, a wafer cassette loading and unloading system and semiconductor processing equipment.
Background
A Cassette (Cassette) is a box-shaped device that can hold a plurality of wafers or trays simultaneously, generally in a single-row multi-layer structure with a capacity varying from several to tens of pieces, as shown in fig. 1, wherein a tray 10 generally serves as a carrier for a wafer 11 for carrying a plurality of wafers 11. In an automated LED etcher or other plasma equipment, it is necessary to fully automate loading or unloading of the tray 10 to improve production efficiency, and for this reason, a cassette lifting mechanism and a vacuum robot are required to cooperate to load or unload the tray 10 to the cassette 1, which greatly improves production efficiency.
Fig. 2 is a schematic structural diagram of a cassette automatic loading and unloading system of a conventional LED etching machine, please refer to fig. 2, and the cassette automatic loading and unloading system includes: the device comprises a film box 1, a film box lifting mechanism 2 and a vacuum chamber 3, wherein the film box 1 is detachably arranged in the vacuum chamber 3, and the film box lifting mechanism 2 is arranged below the vacuum chamber 3 and used for driving the film box 1 to lift so as to be matched with a mechanical arm to load and unload the tray; the specific working process is as follows: firstly, the cassette 1 filled with the tray is installed on a cassette positioning device (not shown in the figure) of the vacuum chamber 3, and then the cassette lifting mechanism 2 drives the cassette 1 to do specified lifting action so as to cooperate with a mechanical arm to complete automatic loading and unloading of the tray 10 in the cassette 1.
It should be noted that the cassette positioning device in the vacuum chamber 3, which determines the horizontal relative position between the tray 10 in the cassette 1 and the robot and is one of the key factors for ensuring the robot to accurately load and unload the tray 10, is a device that requires a human operation to position the cassette 1. Fig. 3 is a schematic structural view of a conventional cassette positioning device, please refer to fig. 3, the cassette positioning device includes: the device comprises a mounting plate 4 and a positioning block 5, wherein two positioning pins 6 are arranged on the upper surface of one end of the mounting plate 4, the positioning block 5 is fixed on the side wall of one end of the mounting plate 4, which is opposite to the end where the positioning pins 6 are located, by screws, and a wafer box lifting mechanism 2 is fixed on the lower surface of the mounting plate 4; two positioning grooves 7 corresponding to the positioning pins 6 one by one are arranged on the edge of the bottom wall of the wafer box 1, and openings are formed in the edges of the positioning grooves 7, so that the positioning pins 6 can be sleeved into the positioning grooves 7 through the openings, the positioning blocks 5 are used for limiting the position of the wafer box 1 on the z axis, and the space position of the wafer box can be determined.
Fig. 4 is a schematic diagram of a working state of the cassette positioning device shown in fig. 3, please refer to fig. 4, when the cassette positioning device shown in fig. 3 is used for positioning the cassette, firstly, the cassette 1 is held by hand to substantially swing to the right, then, one end (the left end in fig. 4) of the cassette 1 facing to the positioning block 5 is raised, and the cassette 1 is slightly over-positioned towards the inner side of the vacuum chamber 3, for example, an over-position distance L is generated in fig. 4, so that the positioning groove 7 is aligned with the positioning pin 6, the cassette 1 is moved rightwards and downwards so that the positioning pin 6 is sleeved in the positioning groove 7, then, the tilted left end of the cassette 1 is slowly laid flat, and finally, the cassette 1 is lightly pushed so.
However, in practical applications, the above-mentioned over-position distance L is difficult to control by manual operation, and the tray 10 at the lowest layer easily collides with the inner sidewall of the vacuum chamber 3, which not only causes wafer displacement and affects the quality of the process, but also easily damages the tray, especially the SiC tray with high brittleness and expensive material.
Therefore, a cassette positioning device is needed to solve the above problems.
Disclosure of Invention
The invention aims to at least solve one technical problem in the prior art, and provides a wafer cassette positioning device, a wafer cassette loading and unloading system and semiconductor processing equipment.
In order to solve one of the problems, the invention provides a wafer box positioning device which is used for positioning a wafer box and comprises a mounting plate, wherein one end of the mounting plate along a preset direction is provided with a positioning pin, and the other end of the mounting plate is provided with a positioning block; a first space and a second space are formed on the lower surface of the bottom wall of the wafer box, a concave part corresponding to the positioning pin in a one-to-one mode is arranged on the inner peripheral wall of the first space facing the inside of the wafer box, and the concave part is used for limiting the positioning pin to be located in the concave part so as to limit the wafer box to move towards the positioning block in the preset direction; the inner peripheral wall of the second space facing the inside of the wafer box is used for limiting the positioning block to limit the movement of the wafer box towards the positioning pin in the preset direction.
Preferably, the first space is a recess or an opening through the thickness of the bottom wall of the cassette.
Preferably, the second space is a recess or an opening through the thickness of the cassette bottom wall.
Preferably, the first space and the second space are independent spaces, or the first space and the second space are communicated.
Preferably, the second space and the positioning block are arranged in the following manner: the middle position of the wafer box corresponding to the direction vertical to the preset direction is arranged.
Preferably, a length of the positioning block in the preset direction is greater than a length of the recess in the preset direction.
Preferably, the number of the positioning pins is at least two, and the positions of at least two positioning pins in the preset direction are the same; at least two locating pins are arranged at intervals in the direction perpendicular to the preset direction.
Preferably, the number of the positioning blocks is at least two, and the positions of the at least two positioning blocks in the preset direction are the same and are arranged in parallel; and at least two positioning blocks are arranged at intervals in the direction vertical to the preset direction.
The invention also provides a film cassette loading and unloading system which comprises a film cassette positioning device, wherein the film cassette positioning device adopts the film cassette positioning device provided by the invention.
Preferably, the device further comprises a chamber and a cassette lifting mechanism; the film box positioning device is arranged in the cavity and used for fixing the film box; the film box lifting mechanism is used for driving the film box positioning device to lift so as to indirectly drive the film box to lift.
The invention also provides semiconductor processing equipment which comprises the wafer box loading and unloading system, wherein the wafer box loading and unloading system provided by the invention is adopted.
The invention has the following beneficial effects:
the invention provides a film box positioning device, which is characterized in that a first space and a second space are arranged on the bottom wall of a film box, the inner peripheral wall of the first space facing the inside of the film box is provided with a concave part corresponding to positioning pins one by one, and the concave part is used for limiting the positioning pins to be positioned in the concave part so as to limit the film box to move towards a positioning block in a preset direction; the inside inner perisporium of orientation spool box of second space is used for restricting the locating piece, restrict spool box and move towards the locating pin in preset orientation, can realize locating pin and locating piece along the inboard location of preset orientation at spool box, in the positioning process, spool box moves to the position that the good locating pin of preset was confirmed at most to the cavity inner wall, consequently, can avoid the tray to take place the off-position collision with the cavity inner wall when the location, thereby can avoid the damage of spool box and the aversion of wafer, the spool box life-span has been improved and the product yield has been improved.
The wafer box loading and unloading system provided by the invention adopts the wafer box positioning device provided by the invention, so that the service life can be prolonged, and the precision of the wafer loading and unloading process can be ensured.
The semiconductor processing equipment provided by the invention adopts the wafer box loading and unloading system provided by the invention, so that the process quality can be improved.
Drawings
FIG. 1 is a schematic diagram of a typical cassette;
FIG. 2 is a schematic structural diagram of a cassette automatic loading and unloading system of a conventional LED etching machine;
FIG. 3 is a schematic structural diagram of a conventional cassette positioning device;
FIG. 4 is a schematic view of the cassette positioning device shown in FIG. 3;
FIG. 5 is a schematic structural diagram of a cassette positioning device according to an embodiment of the present disclosure;
FIG. 6 is a schematic view of the cassette positioning device shown in FIG. 5;
figure 7 is another schematic view of the bottom wall of the cassette and mounting plate.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following describes the wafer cassette positioning device, the wafer cassette loading and unloading system, and the semiconductor processing apparatus provided by the present invention in detail with reference to the accompanying drawings.
FIG. 5 is a schematic structural diagram of a cassette positioning device according to an embodiment of the present disclosure; FIG. 6 is a schematic view of the cassette positioning device shown in FIG. 5; referring to fig. 5 and 6, a cassette positioning device according to an embodiment of the present invention is configured to position a cassette 1, and includes a mounting plate 4, where one end of the mounting plate 4 in a preset direction is provided with a positioning pin 6, and in fig. 5, the preset direction is an x-axis direction; the other end is provided with a positioning block 5; a first space 61 and a second space 51 are formed on the lower surface of the bottom wall of the cassette 1, the first space 61 faces the inner peripheral wall of the cassette 1 and is provided with a concave portion 611 corresponding to the positioning pin 6 one by one, the concave portion 611 is used for limiting the positioning pin 6 to be located in the concave portion to limit the cassette 1 to move towards the positioning block 5 in the preset direction, specifically, the first space is an opening penetrating the thickness of the bottom wall of the cassette 1, as shown in fig. 5 and 6, in fig. 5, the positioning pin 6 limits the cassette 1 to move towards the x-axis negative direction, and in fig. 6, the positioning pin 6 limits the cassette 1 to move towards the left direction. The inner peripheral wall of the second space 51 facing the inside of the magazine 1 is used for limiting the positioning block 5 to limit the movement of the magazine 1 in the preset direction to the positioning pin 6, and specifically, the second space 51 is an opening penetrating through the thickness of the bottom wall of the magazine 1. Specifically, in fig. 5, the positioning block 5 is used to restrict the movement of the cassette 1 in the positive direction of the x-axis, and in fig. 6, the positioning block 5 is used to restrict the movement of the cassette 1 in the right direction.
Preferably, the number of the positioning pins 6 is at least two, the positions of at least two positioning pins 6 in the preset direction are the same, and at least two positioning pins are arranged at intervals in the direction perpendicular to the preset direction, as shown in fig. 5, the number of the positioning pins 6 is two, and correspondingly, the number of the concave parts 611 is also two, and by means of the two positioning pins 6 and the corresponding concave parts 611, not only the rotation of the cassette 1 around the z-axis shown in fig. 5 can be limited, but also the cassette 1 can be further limited from moving towards the x-axis negative direction, so that the reliability of the cassette positioning device can be improved.
In practical applications, the first space 61 and the second space 51 may also be a recess that does not penetrate through the bottom wall of the cassette, as shown in fig. 7, and it should be noted that the depth of the first space 61 is greater than the height of the positioning pin 6, and the depth of the second space 51 is greater than the height of the positioning block 5, so as to ensure that the bottom wall of the cassette is placed on the mounting plate 4, thereby stably supporting the cassette by the mounting plate 4.
Preferably, the quantity of locating piece 5 is at least two, and at least two locating pieces 5 are in predetermine the ascending position in direction the same, at least two the locating piece with predetermine the ascending interval setting in the direction of the vertical direction, like this, can improve the restriction of locating piece 5 to the spool box to can improve spool box positioner's reliability.
From the above, the cassette 1 can be restricted on the xy plane by the at least two positioning pins 6 and the positioning block 5, and the movement and rotation do not occur. In addition, the mounting plate 4 is fixed on the cassette lifting mechanism 2, so that the gravity of the cassette 1 limits the cassette 1 to move in the z-axis direction, and finally, the 6 spatial degrees of freedom of the cassette 1 are all limited, thereby realizing the positioning of the cassette 1.
How the cassette positioning device according to the embodiment of the present invention is positioned will be described in detail with reference to fig. 6. Specifically, the method comprises the following steps: firstly, one end of the sheet box 1 corresponding to the positioning pin 6 is positioned on the mounting plate 4 and is positioned at the outer side of the positioning pin 6, and one end of the sheet box 1 corresponding to the positioning block 5 is lifted; then, aligning the positioning pin 6 and the recess 611, and dragging the sheet cassette 1 towards the inner wall of the left chamber 3 until the positioning pin 6 is located in the recess 611 (i.e. the positioning pin 6 is in contact with and positioned at the inner side of the sheet cassette 1); finally, the end of the magazine 1 corresponding to the positioning block 5 is put down, and the inner wall of the second space 51 facing the inside of the magazine 1 of the positioning block 5 is positioned in contact (i.e. the positioning block 5 is positioned in contact on the inner side of the magazine 1), thereby completing the positioning of the magazine 1.
Preferably, the length of the positioning block 5 in the preset direction is greater than the length of the recess 611 in the preset direction, so that one end of the cassette 1 corresponding to the positioning block 5 can be always placed on the positioning block 5 during the positioning process of the cassette 1 and before the positioning pin 6 is not located in the recess 611, and thus, an operator does not need to apply an acting force for lifting one end of the cassette 1, and labor can be saved as much as possible.
Preferably, in the present embodiment, the first space 61 and the second space 51 communicate, as shown in fig. 5. In practical applications, the first space 61 and the second space 51 may also be independent spaces.
It should be noted that the size of the first space 61 and the second space 51 is not limited in the present invention, as long as the positioning pin 6 is located in the recess 611 and the positioning block 5 can limit the movement of the magazine in the x-axis direction.
Preferably, the second space 51 and the positioning block 5 are arranged in the following manner: correspond spool box 1 with predetermine the position setting in the middle of the perpendicular direction of direction (the y axle direction in fig. 5 promptly), like this, can be through locating piece 5 at spool box 1's position restriction spool box 1 in the middle to can improve spool box positioner's location's stability and reliability.
Specifically, the positioning block 5 may be integrally formed with the mounting plate 4; and can also be fixed on the mounting plate 4 by adopting a thread fixing mode.
In summary, since the inner peripheral wall of the first space 61 facing the inside of the cassette 1 is provided with the recesses 611 corresponding to the positioning pins 6 one by one, and the inner peripheral wall of the second space 51 facing the inside of the cassette 1 is used for limiting the positioning block 5, the positioning pins 6 and the positioning block 5 need to be in contact with and positioned on the inner side of the cassette 1, as described above, comparing the positioning process of the present invention with the positioning process of the prior art, it can be known that, in the positioning process, the cassette 1 moves to the inner wall of the chamber 3 to the position determined by the preset positioning pins 6 at most, and therefore, the tray 10 can be prevented from being in an excessive collision with the inner wall of the chamber 3 during positioning, so that damage to the cassette and displacement of wafers can be avoided, the cassette life can be prolonged, and the product yield can be improved.
As another technical solution, an embodiment of the present invention further provides a magazine loading and unloading system, including a magazine positioning device, where the magazine positioning device provided in embodiment 1 of the present invention is adopted.
Specifically, the film box loading and unloading system further comprises a chamber and a film box lifting mechanism; the film box positioning device is arranged in the cavity and used for fixing the film box; the film box lifting mechanism is used for driving the film box positioning device to lift so as to indirectly drive the film box to lift. More specifically, the chamber is generally a vacuum chamber.
As another technical solution, an embodiment of the present invention further provides a semiconductor processing apparatus, including a cassette loading and unloading system, where the cassette loading and unloading system provided in the above embodiment of the present invention is adopted.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. A wafer box positioning device is used for positioning a wafer box and is characterized by comprising an installation plate, wherein one end of the installation plate along a preset direction is provided with a positioning pin, and the other end of the installation plate is provided with a positioning block;
a first space and a second space are formed on the lower surface of the bottom wall of the tablet box,
the inner peripheral wall of the first space facing the inside of the wafer box is provided with a concave part corresponding to the positioning pin one by one, and the concave part is used for limiting the positioning pin to be positioned in the concave part so as to limit the wafer box to move towards the positioning block in the preset direction;
the inner peripheral wall of the second space facing the inside of the wafer box is used for limiting the positioning block so as to limit the movement of the wafer box towards the positioning pin in the preset direction;
the length of the positioning block in the preset direction is greater than the length of the concave portion in the preset direction.
2. A cartridge positioning device of claim 1, wherein the first space is a recess or an opening through the thickness of the bottom wall of the cartridge.
3. A cartridge positioning device of claim 1, wherein the second space is a recess or an opening through the thickness of the bottom wall of the cartridge.
4. A cartridge positioning device according to claim 1, wherein the first space and the second space are independent spaces, or
The first space and the second space are communicated.
5. The cartridge positioning device of claim 1, wherein the second space and the positioning block are disposed in a manner that: the middle position of the wafer box corresponding to the direction vertical to the preset direction is arranged.
6. A cartridge positioning device of claim 1, wherein the number of the positioning pins is at least two, and the positions of at least two of the positioning pins in the preset direction are the same;
at least two locating pins are arranged at intervals in the direction perpendicular to the preset direction.
7. The cartridge positioning device of claim 1, wherein the number of the positioning blocks is at least two, and at least two of the positioning blocks have the same position in the preset direction and are arranged in parallel;
and at least two positioning blocks are arranged at intervals in the direction vertical to the preset direction.
8. A magazine loading and unloading system comprising a magazine positioning device, wherein the magazine positioning device is the magazine positioning device according to any one of claims 1 to 7.
9. The cassette loading and unloading system of claim 8, further comprising a chamber and a cassette lifting mechanism;
the film box positioning device is arranged in the cavity and used for fixing the film box;
the film box lifting mechanism is used for driving the film box positioning device to lift so as to indirectly drive the film box to lift.
10. A semiconductor processing apparatus comprising a cassette loading and unloading system, characterized in that the cassette loading and unloading system employs the cassette loading and unloading system of claim 8 or 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610522513.8A CN107579029B (en) | 2016-07-05 | 2016-07-05 | Cassette positioning device, cassette loading and unloading system and semiconductor processing equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610522513.8A CN107579029B (en) | 2016-07-05 | 2016-07-05 | Cassette positioning device, cassette loading and unloading system and semiconductor processing equipment |
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| Publication Number | Publication Date |
|---|---|
| CN107579029A CN107579029A (en) | 2018-01-12 |
| CN107579029B true CN107579029B (en) | 2021-04-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610522513.8A Active CN107579029B (en) | 2016-07-05 | 2016-07-05 | Cassette positioning device, cassette loading and unloading system and semiconductor processing equipment |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116387216A (en) * | 2020-11-20 | 2023-07-04 | 北京七星华创集成电路装备有限公司 | Storage box conveying device and storage box fixing assembly |
| CN114005768A (en) * | 2021-10-29 | 2022-02-01 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment, trays and cassettes |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003109997A (en) * | 2001-09-28 | 2003-04-11 | Hitachi Kokusai Electric Inc | Substrate processing equipment |
| CN1478046A (en) * | 2000-11-28 | 2004-02-25 | FIMS interface without alignment pins | |
| US20100068013A1 (en) * | 2006-11-07 | 2010-03-18 | Sinfonia Technology Co., Ltd | Conveyer system |
| CN104909101A (en) * | 2014-03-11 | 2015-09-16 | 株式会社大福 | Container Transport Facility |
-
2016
- 2016-07-05 CN CN201610522513.8A patent/CN107579029B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1478046A (en) * | 2000-11-28 | 2004-02-25 | FIMS interface without alignment pins | |
| JP2003109997A (en) * | 2001-09-28 | 2003-04-11 | Hitachi Kokusai Electric Inc | Substrate processing equipment |
| US20100068013A1 (en) * | 2006-11-07 | 2010-03-18 | Sinfonia Technology Co., Ltd | Conveyer system |
| CN104909101A (en) * | 2014-03-11 | 2015-09-16 | 株式会社大福 | Container Transport Facility |
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