CN107565061B - Laser package system and packaging method - Google Patents
Laser package system and packaging method Download PDFInfo
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- CN107565061B CN107565061B CN201610510447.2A CN201610510447A CN107565061B CN 107565061 B CN107565061 B CN 107565061B CN 201610510447 A CN201610510447 A CN 201610510447A CN 107565061 B CN107565061 B CN 107565061B
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Abstract
The invention proposes a kind of laser package system and packaging methods, first plumb joint and the second plumb joint are installed on the mobile device, and the first plumb joint and the second plumb joint can be moved along the track of packaging line, to realize that two plumb joints are packaged packaging line, encapsulation yield is improved, the waste of energy is reduced.
Description
Technical field
The present invention relates to encapsulation field more particularly to a kind of laser package systems and packaging method.
Background technique
In recent years, OLED (Organic Light Emitting Diode, Organic Light-Emitting Diode) is with its self-luminous, knot
Structure is simple, ultra-thin, and response speed is wide, color contrast is high, wide viewing angle, low-power and the excellent spy such as can realize Flexible Displays
Property, it has also become an important development direction of FPD and lighting area.OLED device mainly includes transparent substrate glass,
TFT (thin film transistor (TFT)) active control array, motor layer, organic luminous layer and encapsulated layer etc..However, current OLED display screen
Used luminous organic material and electrode to the vapor and oxygen extreme sensitivity in its ambient enviroment, and because its interaction
So that its deterioration is caused dim spot, and seriously affects its service life.For this reason, it may be necessary to carry out extremely harsh air-tight packaging: H to OLED2O
<10-6g/m2/ day, O2<10-4cc/m2/day/atm.The frit encapsulation technology of laser assisted is airtight with its excellent encapsulation
Property, cryogenic selective and packaging technology maturity and adaptability have become the preferred encapsulation work of current OLED glass-encapsulated
Skill.
Currently, the LTS of South Korea possesses absolute technical advantage in the field in terms of OLED laser package equipment patent,
Its patent numbers possessed is the summation of the Samsung of second place healthy and free from worry (Corning) and third.It is special in equipment aspect to make a general survey of it
Benefit layout, lay special stress on protecting equipment packages scheme be sequence contour scan or mask assist type sequence contour scanning, this also with
Its commercialized product design scheme is consistent.The advantages of sequence contour scans is that its encapsulation track is flexible, can be applicable in
The encapsulation of arbitrary dimension, arbitrary shape CELL (unit) profile traces, and blocked by mask auxiliary, it can further improve encapsulation
Track consistency, it is accurate to control heat affected area range, adapt to the fashion trend of narrow side design.But, the cause of sequence contour scanning
Life disadvantage be that its narrow process window causes its typical package speed to be only 20mm/s, this mean that packaging time with
The contour line perimeter linear increase of packaged glass glue (FRIT) causes equipment yield to become and restricts advanced lines (such as 5.5 generations) encapsulation
The technical bottleneck of equipment Key Performance Indicator.Meanwhile in traditional sequence contour scanning, it is scanned using single hot spot,
In general, the laser energy of single hot spot is much not up to the gross energy of laser output, energy dissipation is thus caused, is dropped
Low capacity usage ratio.And be scanned using more hot spots and usually will increase kinematic axis system, control is more complicated, and in cost
It increases again.
Summary of the invention
The purpose of the present invention is to provide a kind of laser package system and packaging methods, using two hot spot contour scanning lasers
Encapsulation can not increase movement shafting and achieve the purpose that improve yield and capacity usage ratio.
To achieve the goals above, the invention proposes a kind of laser package systems, comprising: portal frame, mobile device,
One plumb joint and the second plumb joint；Wherein, the mobile device is mounted on the portal frame, and as the portal frame is
One direction is mobile；First plumb joint and the second plumb joint are mounted in the mobile device, first plumb joint and
Two plumb joints can be moved upwards along second party on the mobile device, what first plumb joint and the second plumb joint were launched
Laser facula is radiated on packaging line, and is moved with the movement of the first plumb joint and the second plumb joint.
Further, in the laser package system, the mobile device is Bidirectional-screw, and half is left-handed spiral shell
Line, the other half is right-handed thread.
Further, in the laser package system, first plumb joint is located at the left hand thread, and described
Two plumb joints are located at the right-handed thread.
Further, in the laser package system, the mobile device includes a unidirectional screw rod, the first connection
Bar, the second connecting rod and sliding block, wherein the first connecting rod and the second connecting rod pass through the sliding block and be mounted on the list
To the two sides of lead screw.
Further, in the laser package system, first plumb joint and the second plumb joint include combination
Mirror module, for laser facula to be exposed to packaging line.
Further, the laser facula that first plumb joint and the second plumb joint are launched has on the packaging line
The scanning route of identical beginning and end and mirror symmetry.
It further, further include a driving motor in the laser package system, described in the driving motor connection
Mobile device.
Further, in the laser package system, the driving motor drives the mobile dress by shaft coupling
Set rotation.
Further, in the laser package system, first plumb joint and the second plumb joint are separately connected one
Beam splitter and attenuator.
Further, in the laser package system, the portal frame is equipped with multiple parallel mobile devices.
Also, in the present invention, it is proposed that a kind of packaging method, using laser package system as described above, including step
It is rapid:
The laser facula for launching the first plumb joint and the second plumb joint overlaps the midpoint on the first side of packaging line；
It keeps first plumb joint and the first direction of the second plumb joint on the gantry static, makes first welding
Head and the second plumb joint make counter motion along lead screw in a second direction, seal laser facula to the first side of packaging line
Dress；
It controls first plumb joint and the second plumb joint in the first direction and a second direction while moving, make described
One plumb joint and the second plumb joint are respectively by packaging line first when entering the second of packaging line and third side；
First plumb joint and the second plumb joint respectively enter the second of packaging line while and when third after, keep first
Plumb joint and the second plumb joint are static in a second direction, and the mobile portal frame welds first plumb joint and second
Head in a first direction respectively to the second of packaging line while and when third be packaged；
Control first plumb joint and the second plumb joint in a first direction with second direction while moving, make described first
Plumb joint and the second plumb joint respectively by packaging line second while and when third enter the 4th side of packaging line；
After first plumb joint and the second plumb joint enter the 4th side of packaging line, portal frame is kept in a first direction
It is static, so that first plumb joint and the second plumb joint is made counter motion in a second direction along lead screw, makes laser facula pair
4th side of packaging line is packaged, until laser facula is overlapped again.
Further, in the packaging method, the optical power of first plumb joint and the second plumb joint is independently controlled
System.
Further, in the packaging method, first plumb joint and the second plumb joint are separately connected a light splitting
Element and attenuator obtain the optical power of preliminary ratio using the beam splitter, and the attenuator is recycled to obtain final institute
The optical power needed.
Further, in the packaging method, when the first plumb joint and the second plumb joint are in a first direction with second
When moving simultaneously on direction, the optical power of first plumb joint and the second plumb joint is changed according to motion profile.
Further, in the packaging method, when the first plumb joint and the second plumb joint in a first direction or second
When side moves upwards, the optical power of first plumb joint and the second plumb joint does not change.
Compared with prior art, the beneficial effects are mainly reflected as follows: the first plumb joint is installed on the mobile device
With the second plumb joint, and the first plumb joint and the second plumb joint can be moved along the track of packaging line, to realize two
Plumb joint is packaged packaging line, improves encapsulation yield, reduces the waste of energy.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of laser package system in the embodiment of the present invention one；
Fig. 2 is the top view of packaging line in the embodiment of the present invention one；
Fig. 3 is the top view of laser package system in the embodiment of the present invention one；
Fig. 4 is the structural schematic diagram of laser package system in the embodiment of the present invention two.
Specific embodiment
Laser package system of the invention and packaging method are described in more detail below in conjunction with schematic diagram, wherein
Illustrating the preferred embodiment of the present invention, it should be appreciated that those skilled in the art can modify invention described herein, and still
So realize advantageous effects of the invention.Therefore, following description should be understood as the widely known of those skilled in the art,
And it is not intended as limitation of the present invention.
For clarity, not describing whole features of practical embodiments.In the following description, it is not described in detail well known function
And structure, because they can make the present invention chaotic due to unnecessary details.It will be understood that opening in any practical embodiments
In hair, it is necessary to make a large amount of implementation details to realize the specific objective of developer, such as according to related system or related business
Limitation, changes into another embodiment by one embodiment.Additionally, it should think that this development may be complicated and expend
Time, but to those skilled in the art it is only routine work.
The present invention is more specifically described by way of example referring to attached drawing in the following passage.It is wanted according to following explanation and right
Book is sought, advantages and features of the invention will become apparent from.It should be noted that attached drawing is all made of very simplified form and using non-
Accurately ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Embodiment one
Referring to FIG. 1, in the present embodiment, proposing a kind of laser package system, comprising: portal frame 101, mobile device
104, the first plumb joint 102 and the second plumb joint 103；Wherein, the mobile device 104 is mounted on the portal frame 101, and
As the portal frame 101 moves in a first direction；First plumb joint 102 and the second plumb joint 103 are mounted on the shifting
On dynamic device 104, first plumb joint 102 and the second plumb joint 103 can be in mobile devices 104 along in second direction
Movement, the laser facula 106 that first plumb joint 102 and the second plumb joint 103 are launched are radiated on packaging line 105, and
It is moved with the movement of the first plumb joint 102 and the second plumb joint 103.
In the present embodiment, the mobile device 104 is Bidirectional-screw, and half is left hand thread, the other half is dextrorotation spiral shell
Line.First plumb joint 102 is located at the left hand thread, and second plumb joint 103 is located at the right-handed thread.It is described to swash
Light package system further includes a driving motor 107, and the driving motor 107 drives the mobile device 104 to revolve by shaft coupling
Turn.In addition, first plumb joint 102 and the second plumb joint 103 are separately connected a beam splitter and attenuator (not shown go out).
Specifically, the portal frame 101 is that the first plumb joint 102 and the second plumb joint 103 provide the scanning of Y direction,
The axis is defined as first axle.First plumb joint 102 and the second plumb joint 103 for being expanded to laser beam, shaping and poly-
Coke, and finally focus on laser facula 106 on the midpoint on 105 certain one side of packaging line of device to be packaged (CELL).
The mobile device 104 is two-way lead screw, and with left-handed and two kinds of screw threads of dextrorotation, the first plumb joint 102 is located at a left side
Revolve screw thread, the second plumb joint 103 is located at right-handed thread, when mobile device 104 rotates forward along clockwise direction or counter clockwise direction instead
When turning, the second plumb joint 103 can make mirror image fortune in X-direction with identical speed, opposite direction relative to the first plumb joint 102
Dynamic, corresponding focal beam spot is also in this way, 104 place axis of mobile device is defined as the second axis.When 101 edge of portal frame
Y-direction movement, the first plumb joint 102 being in together in mobile device 104 and the second plumb joint 103 can be with identical speed along first axle
Make movement in the same direction in direction.It should be pointed out that mobile device 104 needs to keep good with portal frame 101 when installing fixed
The depth of parallelism can obtain preferable motion profile.
In the present embodiment, it is also proposed that a kind of packaging method, using light package system as described above, including step
It is rapid:
S100: the laser facula for launching the first plumb joint and the second plumb joint overlaps in the first side of packaging line
At point；
S200: keeping first plumb joint and the first direction of the second plumb joint on the gantry static, makes described the
One plumb joint and the second plumb joint make counter motion along lead screw in a second direction, make laser facula to the first side of packaging line
It is packaged；
S300: control first plumb joint and the second plumb joint move simultaneously in the first direction and a second direction, make
First plumb joint and the second plumb joint are respectively by packaging line first when entering the second of packaging line and third side；
S400: first plumb joint and the second plumb joint respectively enter the second of packaging line while and when third after, protect
It holds the first plumb joint and the second plumb joint is static in a second direction, the mobile portal frame makes first plumb joint and the
Two plumb joints in a first direction respectively to the second of packaging line while and when third be packaged；
S500: control first plumb joint and the second plumb joint are moved with second direction simultaneously in a first direction, make institute
State the first plumb joint and the second plumb joint respectively by packaging line second while and when third enter the 4th side of packaging line；
S600: after first plumb joint and the second plumb joint enter the 4th side of packaging line, keep portal frame the
One direction is static, so that first plumb joint and the second plumb joint is made counter motion in a second direction along lead screw, makes laser
Hot spot is packaged the 4th side of packaging line, until laser facula is overlapped again.
In the present embodiment, the laser facula that first plumb joint 102 and the second plumb joint 103 are launched is in the envelope
The scanning route of beginning and end having the same and mirror symmetry on wiring.Incorporated by reference to Fig. 2, specifically, A point is packaging line
105 starting point, B point is the terminating point of packaging line 105, and A point and B point are all located at the midpoint (reality on respectively place side
The two does not have essential distinction, all can be used as the beginning and end of scanning), A point place is defined while for first, and side where B point is
4th side, first at the 4th between lower section when being defined as second, first at the 4th between top side definition
For third side.
Laser facula 1 and laser facula 2 are all from A point, and laser facula 1 moves in the counterclockwise direction, 2 edge of laser facula
It moves clockwise, the two finally converges at B point.In motion process, when two laser faculas are all at the first side, mobile device
104 rotations drive laser facula 1 and laser facula 2 to make mirror movements in opposite direction with identical speed, and the second axis moves, and first
Axis is static.First is moved to while with second when laser facula 1 moves to the first fillet and laser facula 2 while with third
Fillet when, also setting in motion, the second axis continue to rotate first axle, move two laser faculas along fillet.When two swash
Light hot spot respectively enter second while and when third, the second axis stops operating, and first axle continues to move, and two laser faculas are with identical
Speed and identical direction respectively on the second side and third Bian Shangzuo parallel motion.When laser facula 1 enters third side and the
Four while fillet and laser facula 2 enter second while and the 4th side fillet when, the second axis starts turning again, and first axle is after reforwarding
Dynamic, until two laser faculas enter the 4th side, first axle stop motion, the second axis continues to move, and drives two laser faculas with phase
Mirror movements are made in speed together, opposite direction, until two laser faculas all reach B point position, based on two-way movement shafting
The encapsulation of two hot spot contour scanning lasers is completed.
The two-axle interlocking of the synchronously control of first axle and the second axis, really laser facula at motion profile fillet is opposite
For single axial movement of the laser facula in track straightway, the not synchronization of real meaning, in common two-dimension moving platform
In, it is a kind of common technological means that fillet track, which is realized by way of circular interpolation, two-axle interlocking, therefore herein not
It is described in detail.
The optical power independent control of first plumb joint 102 and the second plumb joint 103.When single energy of lasers abundance, utilize
The beam splitter of certain splitting ratio tentatively obtains corresponding proportion optical power, then is utilized respectively attenuator or other light power controllers
The first plumb joint 102 and the second plumb joint 103 respectively final required optical power are obtained, energy of lasers is made full use of.Single laser
When device energy deficiency, optical power needed for the first plumb joint 102 and the second plumb joint 103 is set separately using two lasers.
The size of optical power is determined by the coordinate system that the movement shafting of both direction is constituted, by a little setting in A and B two o'clock
For co-ordinate zero point, another point is set as coordinate terminal, when reading laser facula and being located at zero point or final position, according to practical need
It asks and increases or reduces optical power.When reading in coordinate data X or Y the two, (laser facula is located at when any one is remained unchanged
On straightway), optical power is invariable.When reading coordinate data X and Y and both changing, (laser facula is located at circle
In linea angulata section), according to actual needs, the trend increasedd or decreased according to coordinate value changes optical power size.
As shown in figure 3, the both ends frame body of portal frame 101 is parallel to each other, and perpendicular with mobile device 104, and position respectively
In 104 both ends of mobile device.Packaging line 105 is located at the middle position of portal frame 101, and packaging line 105 and portal frame 101 are flat
Row；Packaging line 105 is located at 104 lower section of mobile device simultaneously, and packaging line 105 is parallel with mobile device 104.
Referring to FIG. 3, the portal frame 101 is equipped with multiple parallel mobile devices.Wherein, 101 be portal frame, 102,
103,202,203,302,303,402 and 403 be plumb joint, and 104,204,304 and 404 be two-way lead screw, 105,205,
305 and 405 be line to be packaged, and portal frame 101 extends in the length of Y-direction, so that it is more double to arrange between portal frame 101
To lead screw, plumb joint and line to be packaged, to guarantee the realization of multimachine structure processing, specific mechanism quantity is by portal frame 101 along Y
To length determine.
Vertical control problem (being directed to large scale CELL), when carrying out large scale CELL encapsulation according to scanning galvanometer, really
It needs to expand scanning area by increasing vertical height.But technical solution 1 is using two-way lead screw and two plumb joints
Combination, as long as guaranteeing that length of the length not less than large scale CELL of two-way lead screw achieves that the encapsulation of large scale CELL.
According to prior art condition, the length of two-way lead screw is worked into the length more than or equal to large scale CELL and is asked there is no any
Topic.
This reality technical solution list it is a kind of based on two-way lead screw two hot spot contours scanning laser package system and side
Method.This programme is achieved that two light of single CELL using only a set of two dimensional motion control system by simple mechanical structure
The scanning of spot contour, improves production efficiency.
Embodiment two
Referring to Fig.4, in the present embodiment, the laser package system proposed and unanimous on the whole in embodiment one, difference
, the mobile device includes a unidirectional screw rod 211, first connecting rod 213, the second connecting rod 214 and sliding block 212, wherein
The first connecting rod 213 and the second connecting rod 214 are mounted on the two sides of the unidirectional lead screw 211 by the sliding block 202.
First plumb joint and the second plumb joint include combined lens module 215, for laser facula to be exposed to packaging line 105
On.The driving motor 107 drives the mobile device to rotate by shaft coupling.
Specifically, portal frame 101 is used to fix the unidirectional screw rod 211 of Z-direction installation, and provide the scanning of Y direction.Driving
Motor 107, which powers on, drives unidirectional screw rod 211 to rotate, and the unidirectional rotation of screw rod 211 band movable slider 212 moves up and down along Z-direction, sliding block
212 drive first connecting rod 213 and the second connecting rod 214 to move up and down.Combined lens module 215 and first connecting rod 213 and the
Two connecting rods 214 are connected, and first connecting rod 213 and the second connecting rod 214 can move along Z-direction and drive combined lens module 215
Movement, combined lens module 215 move in the X-axis direction, then the laser facula for focusing output also moves in the X-axis direction.It is combined in Fig. 4
Mirror module 215 each side installs one, then the motion profile of corresponding output laser facula and Fig. 2 in technical solution 1
Movement of two hot spots on the first side is consistent, makees the opposite mirror movements of speed equal direction.And two laser faculas are along Y rail direction
Scan track, also as technical solution 1, make the identical mirror movements of speed equal direction namely X-axis it is static (keep Z axis not
It is dynamic to realize), make the scanning of Y direction by portal frame 101, equally may be implemented only to make by the system structure of technical solution 2
Shafting is moved with two to make two hot spots make the effect of contour scanning.
To sum up, in laser package system provided in an embodiment of the present invention and packaging method, is installed on the mobile device
One plumb joint and the second plumb joint, and the first plumb joint and the second plumb joint can be moved along the track of packaging line, thus
It realizes that two plumb joints are packaged packaging line, improves encapsulation yield, reduce the waste of energy.
The above is only a preferred embodiment of the present invention, does not play the role of any restrictions to the present invention.Belonging to any
Those skilled in the art, in the range of not departing from technical solution of the present invention, to the invention discloses technical solution and
Technology contents make the variation such as any type of equivalent replacement or modification, belong to the content without departing from technical solution of the present invention, still
Within belonging to the scope of protection of the present invention.
Claims (13)
1. a kind of laser package system characterized by comprising portal frame, mobile device, the first plumb joint and the second welding
Head；Wherein, the mobile device is mounted on the portal frame, and as the portal frame moves in a first direction；Described
One plumb joint and the second plumb joint are mounted in the mobile device, and first plumb joint and the second plumb joint can be in movements
For linear motion along second direction on device, the laser facula that first plumb joint and the second plumb joint are launched is radiated at
On packaging line, and moved, first plumb joint and the second plumb joint with the movement of the first plumb joint and the second plumb joint
It include combined lens module, for laser facula to be exposed to packaging line, first plumb joint and the transmitting of the second plumb joint
The scanning route of beginning and end having the same and mirror symmetry on the packaging line of laser facula out.
2. laser package system as described in claim 1, which is characterized in that the mobile device is Bidirectional-screw, and half is
Left hand thread, the other half is right-handed thread.
3. laser package system as claimed in claim 2, which is characterized in that first plumb joint is located at the left-handed spiral shell
Line, second plumb joint are located at the right-handed thread.
4. laser package system as described in claim 1, which is characterized in that the mobile device further include a unidirectional screw rod,
First connecting rod, the second connecting rod and sliding block, wherein the first connecting rod and the second connecting rod pass through the sliding block and install
In the two sides of the unidirectional lead screw, the combined lens module is respectively arranged in the first connecting rod and second connecting rod is remote
One end from the sliding block.
5. laser package system as described in claim 1, which is characterized in that further include a driving motor, the driving motor
Connect the mobile device.
6. laser package system as claimed in claim 5, which is characterized in that the driving motor passes through described in shaft coupling drive
Mobile device rotation.
7. laser package system as described in claim 1, which is characterized in that first plumb joint and the second plumb joint difference
Connect a beam splitter and attenuator.
8. laser package system as described in claim 1, which is characterized in that the portal frame is equipped with multiple parallel movements
Device.
9. a kind of packaging method, using laser package system such as of any of claims 1-8, which is characterized in that packet
Include step:
The laser facula for launching the first plumb joint and the second plumb joint overlaps the midpoint on the first side of packaging line；
Keep first plumb joint and the first direction of the second plumb joint on the gantry static, make first plumb joint and
Second plumb joint makees counter motion along lead screw in a second direction, is packaged laser facula to the first side of packaging line；
It controls first plumb joint and the second plumb joint in the first direction and a second direction while moving, make first weldering
Connector and the second plumb joint are respectively by packaging line first when entering the second of packaging line and third side；
First plumb joint and the second plumb joint respectively enter the second of packaging line while and when third after, keep the first welding
Head and the second plumb joint are static in a second direction, and the mobile portal frame makes first plumb joint and the second plumb joint exist
On first direction respectively to the second of packaging line while and when third be packaged；
Control first plumb joint and the second plumb joint in a first direction with second direction while moving, make first welding
Head and the second plumb joint respectively by packaging line second while and when third enter the 4th side of packaging line；
After first plumb joint and the second plumb joint enter the 4th side of packaging line, keep portal frame quiet in a first direction
Only, so that first plumb joint and the second plumb joint is made counter motion in a second direction along lead screw, make laser facula to envelope
4th side of wiring is packaged, until laser facula is overlapped again.
10. packaging method as claimed in claim 9, which is characterized in that the light function of first plumb joint and the second plumb joint
Rate independent control.
11. packaging method as claimed in claim 10, which is characterized in that first plumb joint and the second plumb joint connect respectively
A beam splitter and attenuator are connect, the optical power of preliminary ratio is obtained using the beam splitter, the attenuator is recycled to obtain
Obtain finally required optical power.
12. packaging method as claimed in claim 9, which is characterized in that when the first plumb joint and the second plumb joint are in first party
When to moving simultaneously in second direction, the optical power of first plumb joint and the second plumb joint is changed according to motion profile
Become.
13. packaging method as claimed in claim 9, which is characterized in that when the first plumb joint and the second plumb joint are in first party
To or second party move upwards when, the optical power of first plumb joint and the second plumb joint does not change.
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| CN201610510447.2A CN107565061B (en) | 2016-06-30 | 2016-06-30 | Laser package system and packaging method |
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| CN108188576B (en) * | 2018-01-16 | 2019-08-27 | 京东方科技集团股份有限公司 | A kind of laser sintering method and laser sintering equipment |
| CN111400989B (en) * | 2018-12-29 | 2022-06-17 | 上海微电子装备（集团）股份有限公司 | Laser packaging path obtaining method, laser packaging method and laser packaging system |
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