CN107561874A - A kind of liquid insulating device based on Peltier effect - Google Patents
A kind of liquid insulating device based on Peltier effect Download PDFInfo
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- CN107561874A CN107561874A CN201710791028.5A CN201710791028A CN107561874A CN 107561874 A CN107561874 A CN 107561874A CN 201710791028 A CN201710791028 A CN 201710791028A CN 107561874 A CN107561874 A CN 107561874A
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- Prior art keywords
- semiconductor chilling
- chilling plate
- liquid
- chip microcomputer
- heat
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
A kind of liquid insulating device based on Peltier effect, including：Semiconductor chilling plate, semiconductor chilling plate be arranged on equipped with liquid container outer wall on, between scribble heat-conducting silicone grease；Temperature measuring equipment, temperature measuring equipment measure the temperature of liquid in container；Single-chip microcomputer, single-chip microcomputer are connected with the power supply and temperature measuring equipment of semiconductor chilling plate, and single-chip microcomputer can control the cathode and anode directions that power supply is connected with semiconductor chilling plate, and the change of the sense of current can cause semiconductor chilling plate to be changed between heat absorption and heat release two states.Single-chip microcomputer is quick, accurately the quick response of control and semiconductor chilling plate can make the system that liquid be heated or absorbed heat in time, improves temperature controlled speed and precision.
Description
Technical field
The present invention relates to heat preservation technology, and in particular to a kind of liquid insulating device based on Peltier effect.
Background technology
With the development in epoch, the made rapid progress of information technology, the integrated level more and more higher of chip, the bar of semiconductor manufacturing
Part is also increasingly harsher.Photoetching process is most important in semiconductor fabrication process, and its cost account for almost 1/3rd.Development
It is a committed step in photoetching process, developing process will control the temperature of developer solution to make it in claimed range.
With the continuous reduction of chip feature sizes so that people require higher to the condition of each link of technique, including aobvious
The temperature of shadow liquid.Traditional water heat-insulation system occupancy volume is larger, and temperature control speed is limited.Peltier effect, i.e., ought have
During the loop that electric current is made up of different conductor, in addition to irreversible Joule heat is produced, the joint of different conductor with
The different of the sense of current can occur heat absorption, exothermic phenomenon respectively.Heat-insulation system based on Peltier effect can faster more quasi- control
Developer temperatur processed, so as to improve the quality of photoetching process.
The content of the invention
In view of the development step of photoetching process needs faster more accurate and small volume a heat-insulation system；The present invention provides
A kind of liquid insulating method based on Peltier effect, it is by single-chip microcomputer according to the temperature signal measured to semiconductor chilling plate
The sense of current enter line translation, its heat release or heat absorption is controlled developer temperatur.Because semiconductor chilling plate response is fast and body
Product is small, and this method can improve the control effect of developer temperatur.
To achieve these goals, the present invention uses following technical scheme.
A kind of liquid insulating device based on Peltier effect, including：
Pass through heat conduction between one or more semiconductor chilling plates, the semiconductor chilling plate and container outer wall equipped with liquid
Silicone grease contacts；
Temperature measuring equipment, the temperature measuring equipment measure the temperature of liquid in container, and are connected with single-chip microcomputer, and temperature signal is sent
To single-chip microcomputer；
Single-chip microcomputer, the cathode and anode directions that single-chip microcomputer control power supply is connected with semiconductor chilling plate are anti-according to temperature measuring equipment
The temperature signal of feedback changes the sense of current by semiconductor chilling plate, semiconductor chilling plate is changed between heat absorption and heat release,
Heat conducts between semiconductor chilling plate, container and liquid, realizes the temperature control to liquid.
As a preferred embodiment, the semiconductor chilling plate is shaped as cuboid, size length × width x thickness for (10~
50mm) × (10~50mm) × (1~5mm), power are 20~200w.
The beneficial technique effect of the present invention is：
The attemperator can realize quick, the accurate control of fluid temperature in spraying process, and the body of semiconductor chilling plate
Product is smaller, can be advantageously mounted on pipeline or outer nozzle wall.
Brief description of the drawings
Fig. 1 is the system structure diagram of the present invention.
Embodiment
In order that objects and advantages of the present invention are more clearly understood, one is more entered to the present invention with reference to embodiments
Step describes in detail.It should be appreciated that specific embodiment described herein is used only for explaining the present invention, it is not used to limit this hair
It is bright.
Reference picture 1, heat-insulation system embodiment mainly include semiconductor chilling plate 10, heat-conducting silicone grease 20, temperature measuring equipment 30, list
Piece machine 40, power supply 50, liquid container 60 and liquid 70.
Semiconductor chilling plate 10 is contacted with the outer wall of liquid container 60 by heat-conducting silicone grease 20, and heat-conducting silicone grease 20 can be accelerated partly to lead
Heat transfer between body cooling piece 10 and liquid container 60.
Temperature measuring equipment 30 is used for measuring the real time temperature of liquid 70 and temperature signal is passed to single-chip microcomputer 40.
Single-chip microcomputer 40 controls the connection cathode and anode directions of power supply 50 and semiconductor chilling plate 10, is fed back according to temperature measuring equipment 30
Temperature signal change by the sense of current of semiconductor chilling plate 10, semiconductor chilling plate 10 is turned between heat absorption and heat release
Change, heat conducts between semiconductor chilling plate 10, liquid container 60 and liquid 70, realizes the temperature control to liquid 70.
The present invention is described in detail above by specific embodiment, these specific descriptions must not believe that the present invention
It is only limited to the content of these embodiments.Those skilled in the art according to present inventive concept, these describe and combine this area public affairs
Know any improvement, equivalents that general knowledge makes, should be included in the protection domain of the claims in the present invention.
Claims (2)
- A kind of 1. liquid insulating device based on Peltier effect, it is characterised in that including：One or more semiconductor chilling plates (10), the semiconductor chilling plate and equipped with liquid (70) container (60) outer wall between Contacted by heat-conducting silicone grease (20)；Temperature measuring equipment (30), the temperature measuring equipment (30) measurement container (60) interior liquid (70) temperature, and with single-chip microcomputer (40) phase Even, temperature signal is sent to single-chip microcomputer (40)；Single-chip microcomputer (40), the cathode and anode directions that single-chip microcomputer control power supply (50) is connected with semiconductor chilling plate (10), according to survey The temperature signal of warm device (30) feedback changes the sense of current by semiconductor chilling plate (10), makes semiconductor chilling plate (10) Changed between heat absorption and heat release, heat conducts between semiconductor chilling plate (10), container (60) and liquid (70), realizes to liquid (70) temperature control.
- 2. the liquid insulating device according to claim 1 based on Peltier effect, it is characterised in that the semiconductor system Cold (10) are shaped as cuboid, and size length × width x thickness is (10~50mm) × (10~50mm) × (1~5mm), power For 20~200w.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710791028.5A CN107561874A (en) | 2017-09-05 | 2017-09-05 | A kind of liquid insulating device based on Peltier effect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710791028.5A CN107561874A (en) | 2017-09-05 | 2017-09-05 | A kind of liquid insulating device based on Peltier effect |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107561874A true CN107561874A (en) | 2018-01-09 |
Family
ID=60978068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710791028.5A Pending CN107561874A (en) | 2017-09-05 | 2017-09-05 | A kind of liquid insulating device based on Peltier effect |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107561874A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1113316A (en) * | 1994-03-21 | 1995-12-13 | Lg电子株式会社 | Brewing control device of refrigerator for brewing |
| CN103781550A (en) * | 2011-07-08 | 2014-05-07 | 维也纳科技大学 | Cooling/heating device |
| CN206113396U (en) * | 2016-10-19 | 2017-04-19 | 深圳华大基因股份有限公司 | Ambient temperature preparation facilities |
-
2017
- 2017-09-05 CN CN201710791028.5A patent/CN107561874A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1113316A (en) * | 1994-03-21 | 1995-12-13 | Lg电子株式会社 | Brewing control device of refrigerator for brewing |
| CN103781550A (en) * | 2011-07-08 | 2014-05-07 | 维也纳科技大学 | Cooling/heating device |
| CN206113396U (en) * | 2016-10-19 | 2017-04-19 | 深圳华大基因股份有限公司 | Ambient temperature preparation facilities |
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| Date | Code | Title | Description |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180109 |