CN107538231A - Multiple degrees of freedom points to vibration isolation unified platform and combination unit from precision is sensed - Google Patents

Abstract

The invention provides a multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform and a combined device, including: a load unloading device (1), a driving pole (2), a connecting base (3), and an upper platform (4) , locking device (5), positioning support tooling (6), lower platform (7); the load unloading device (1) is connected to the upper platform (4) and separated from the lower platform (7); fastened to the upper platform ( 4) The upper connecting base (3) is connected to the connecting base (3) fastened on the lower platform (7) through the drive pole (2); the locking device (5) is connected between the upper platform (4) and the lower platform (7). Between the lower platforms (7); the positioning supporting tooling (6) is arranged on the lower platform (7), and the driving strut (2) is obliquely embedded in the semi-arc groove of the supporting edge of the positioning supporting tooling (6). The invention integrates intelligent sensing, has the characteristics of multi-degree-of-freedom precise positioning, active and passive vibration isolation, safe locking, convenient assembly, and strong bearing capacity.

Description

Multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform and combined device

technical field

The invention relates to the technical field of precision drive and vibration control devices, in particular to a multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform.

Background technique

The pointing device is a device that can accurately adjust the target load according to the desired posture, and the vibration isolation device is usually used to reduce the negative impact of the vibration of complex parts on the target load. In aerospace, genetic engineering, biomedicine, optical engineering, ultra-precision machining, manufacturing and other fields, on the one hand, there are extremely strict requirements on the micro-nano level space pose of the target load, on the other hand, the impact of external vibration on the target load Interference is also strictly limited. However, the traditional mechanical device will seriously reduce the final output accuracy due to the complex transmission chain and the cumulative error of each transmission link; at the same time, the additional series vibration isolation device also limits its further application in related fields in terms of space volume and quality.

Contents of the invention

In view of the defects in the prior art, the object of the present invention is to provide a multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform and a combined device.

A multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform provided according to the present invention includes: a load unloading device, a driving pole, a connecting base, an upper platform, a locking device, a positioning support tool, and a lower platform;

The load unloading device is connected to the upper platform and separated from the lower platform;

The connecting base fastened on the upper platform and the connecting base fastened on the lower platform are connected through a driving strut;

The locking device is connected between the upper platform and the lower platform;

The positioning supporting tool is arranged on the lower platform, and the driving pole is obliquely embedded in the arc groove of the supporting edge of the positioning supporting tool.

Preferably, the driving strut includes: a flexible hinge, an upper circular pin, an integrated sensing device, a ring-rib driving outer sleeve, a lower circular pin, a flexible amplification mechanism, an output rod, a driving coil, and a giant magnetostrictive rod , magnetic yoke, safety support beam;

The flexible amplifying mechanism is fastened on one end of the ring rib drive outer sleeve, the input end of the flexible amplifying mechanism is inserted into the output rod and fastened by a square pin, the output end of the flexible amplifying mechanism is matched with one end of a flexible hinge through a screw rod, And locked by the upper round pin;

The other end of the flexible hinge is inserted into the first fine thread hole or the second fine thread hole of the connecting base provided on the upper platform through the shaft of one end screw rod and one end polished rod, and then tightened by bolts;

The safety support beam is firmly connected to one end of the ring rib drive outer sleeve, and the integrated sensing device is embedded in the middle beam groove of the safety support beam;

The output rod is inserted into the drive coil wrapped by the magnetic yoke, and is in contact with and pressed against the giant magnetostrictive rod wrapped in the drive coil; the giant magnetostrictive rod is in a pre-tightened state;

The other end of the outer sleeve driven by the ring rib is matched with one end of another flexible hinge through a screw rod, and locked by a lower round pin; Connect the first fine thread hole or the second fine thread hole of the base, and then tighten it with bolts.

Preferably, the load unloading device includes: a universal ball with a screw, an end cover with an annular groove, a support base, a linear bearing, and an unloading spring;

The upper end screw with screw universal ball is installed on the upper platform, and the lower end universal ball with screw universal ball is inserted into the circular groove of the end cover of the circular groove;

The unloading spring is loaded into the support base, the linear bearing is installed on the top of the support base through bolts, and the end cover of the circular groove is inserted into the axial bearing, and the unloading spring is compressed.

Preferably, the locking device includes: a horizontal screw micrometer with a mandrel lock, a support base, and a vertical screw micrometer with a mandrel lock;

The horizontal screw micrometer with mandrel lock and the vertical screw micrometer with mandrel lock are set on the support base;

The support base is firmly connected with the lower platform;

The horizontal screw micrometer with mandrel lock and the vertical screw micrometer with mandrel lock are respectively matched with the corresponding hole grooves of the upper platform;

By screwing in and out of the screw micrometer with mandrel lock horizontally and the screw micrometer with vertical mandrel lock, the corresponding mandrel can be extended and shortened, so as to realize the lock with the hole corresponding to the upper platform. Tighten or adjust the positioning.

Preferably, the connecting base includes: a first fine thread hole, a second fine thread hole, a first locking bolt hole, a second locking bolt hole, and a bottom end protrusion;

The first fine threaded hole and the second fine threaded hole respectively cooperate with the two ends of different driving rods, and are respectively inserted into the first locking bolt hole and the second locking bolt hole through locking bolts for locking;

The protrusion at the bottom is positioned in cooperation with the groove at the corresponding position of the lower platform or the upper platform.

Preferably, at the symmetrical triangle positions of the upper platform and the lower platform, connecting bases are fastened and installed, forming a total of six connecting bases;

Among the six connecting bases, a driving strut is connected between the circumferentially adjacent connecting bases, forming a total of six driving struts.

Preferably, the three sets of locking devices are arranged in an equilateral triangle.

According to a combination device provided by the present invention, it includes a plurality of the above-mentioned multi-degree-of-freedom self-sensing precision pointing vibration-isolation integrated platforms, and the multiple multi-degree-of-freedom self-sensing precision pointing vibration-isolation integrated platforms are in accordance with distributed in different directions.

Compared with prior art, the present invention has following advantage:

The present invention considers space drive positioning and vibration isolation at the same time, and abandons the traditional scheme of connecting a set of vibration isolation platforms in series before the positioning platform. High integration, small volume and mass, precise posture adjustment, high stroke magnification, safety locking, strong bearing capacity, self-sensing, intelligent and other advantages; the above characteristics are not only reflected in the structure of the device, installation and work In principle, it is also reflected in the following details:

1. The present invention can adopt a spatial cube layout, which can realize structural decoupling to the greatest extent, and can effectively reduce the difficulty of active control in the later stage.

2. The present invention proposes a design scheme of a one-dimensional driver (drive strut) with driving displacement amplification, vibration isolation, and self-sensing embedded at the same time. The one-dimensional driver is mainly composed of a flexible displacement amplification mechanism, a driving active element, a safety support beam, and a self-sensing module. When working, on the one hand, the self-sensing module detects the displacement signal of the output terminal in real time, uses the adaptive control algorithm to calculate the control amount, and performs closed-loop control by controlling the current signal (or voltage signal), thereby realizing precise pointing and low-frequency vibration suppression; on the other hand On the one hand, through the multi-objective optimization design, the flexible displacement amplifying mechanism can not only realize the corresponding displacement amplifying function, but also has the function of medium and high frequency vibration isolation. When the external vibration disturbance is transmitted to the flexible amplifying mechanism, the disturbance will be effectively reduced , thereby reducing the impact on pointing accuracy.

3. Multi-degree-of-freedom precision pointing and vibration isolation can be realized by combining different numbers of the driver (driving strut). For example, two-degree-of-freedom precision pointing and vibration isolation can be realized by using 2 drivers; using 3 drivers It can realize three-degree-of-freedom precision pointing and vibration isolation; six drivers can realize six-degree-of-freedom precision pointing and vibration isolation, etc.

4. Through the system integration design, it has its own sensor, which can effectively reduce the structural size of the device, and at the same time, the detection position is at the theoretical output position, which improves the measurement accuracy.

5. Existing mature technologies can be widely used in driving active components, such as giant magnetostrictive, piezoelectric, electromagnetic and other driving mechanisms, which improves the scope of application.

6. The outer wall design of the ring rib type driving mechanism can improve the heat dissipation performance of the driving mechanism, thus meeting the demand for long-term space pose positioning.

7. The flexible amplification mechanism in the transmission link adopts a multi-objective optimization design, no longer only considering the need for displacement output amplification, but on the basis of meeting the travel requirements, reducing stiffness and improving flexibility, so as to use this flexibility to achieve medium and high frequency vibration. vibration isolation.

8. The hinge of the transmission link adopts the flexible hinge technology, thereby reducing the gap error caused by the introduction of the traditional Hooke hinge, etc., and improving the accuracy of the space pose.

9. On the motion transmission chain, pin limit locking is set at the matching position of each component, so as to reduce the loosening phenomenon caused by long-term motion and vibration.

10. The magnetic circuit yoke of the driving mechanism is made of high magnetic permeability material, which can effectively reduce energy loss.

11. A safety support beam is designed at the symmetrical position of the flexible amplifying mechanism. On the one hand, it can replace the flexible amplifying mechanism to bear the risk when it is subjected to external impacts. On the other hand, an intelligent sensor device can be integrated in the groove at the center. In terms of sense, it can maintain the synchronization with the driving rod, making the measured data more accurate.

12. The designed load unloading device adopts the combination of universal ball with screw rod and end cover with circular groove, so the universal ball can make rolling contact with the groove surface within the movement stroke, reducing friction and at the same time acting as a limiter .

13. The connection base is processed in one piece, and the fine thread can ensure the tightness of the connection with the polished rods at both ends of the drive rod. At the same time, the bolt locking method can reduce the difficulty of later assembly.

14. The designed positioning support tooling can ensure the consistency of platform installation, thereby avoiding the problem of inconsistent system response caused by assembly errors of each strut, and improving the reliability of the platform; on the other hand, the introduction of supporting tooling simplifies the assembly process , which can effectively improve the assembly efficiency of the platform.

15. The designed positioning support tool has semi-arc grooves on the two mutually perpendicular sides, which is convenient for positioning the drive pole during initial assembly; after the platform is assembled, loosen the fastening screws, and the positioning The support tooling exits horizontally, so as not to affect the spatial posture of each support rod when the platform is working.

16. The multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform can carry out multi-objective optimization design of flexible mechanisms with different indicators for different load targets, and assemble different numbers of drive struts on the basis of using different drive components , so as to achieve the desired spatial degree of freedom pose adjustment.

17. While adjusting the position and posture of the space degree of freedom, it also takes into account the active and passive suppression of low, medium and high frequency vibrations. It has a wide range of applications and reliable performance. It is used in aerospace, biomedicine, optical engineering, ultra-precision processing, manufacturing and other fields. It has broad application prospects.

Description of drawings

Other characteristics, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:

Figure 1 is a schematic diagram of the overall structure of the present invention.

Fig. 2 is an alternative drive strut scheme of the present invention.

Fig. 3 is the scheme of the load unloading device of the present invention.

Fig. 4 is the scheme of the locking device of the present invention.

Fig. 5 is a schematic diagram of the structure of the connection base of the present invention.

In the figure: 1 is the load unloading device, 2 is the driving pole, 3 is the connecting base, 4 is the upper platform, 5 is the locking device, 6 is the positioning support tool, 7 is the lower platform, 201 is the flexible hinge, 202 is the upper Circular pin, 203 is the integrated sensing device, 204 is the ring rib drive outer sleeve, 205 is the lower circular pin, 206 is the flexible amplification mechanism, 207 is the output rod, 208 is the driving coil, 209 is the giant magnetostrictive rod , 210 is a magnetic yoke, 211 is a safety support beam, 301 is a universal ball with a screw, 302 is an end cover with a circular groove, 303 is a support base, 304 is a linear bearing, 305 is an unloading spring, 401 is a horizontal Screw micrometer with mandrel lock, 402 is the support base, 403 is the vertical screw micrometer with mandrel lock, 501 is the first fine thread hole, 503 is the second fine thread hole, 502 is the second A locking bolt hole, 504 is the second locking bolt hole, 505 is the bottom protrusion.

detailed description

The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

This embodiment provides a multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform and a combined device, especially a six-degree-of-freedom self-sensing precision pointing vibration isolation integrated device platform based on giant magnetostrictive drive. The present invention can utilize a variety of direct drive types, such as giant magnetostrictive drive, piezoelectric drive, electromagnetic drive and other active drive elements. Through the design of flexible amplification mechanism, it can not only realize the active amplification and adjustment of space pose, but also through the double control loop The control strategy has both active control of low-frequency vibrations, while the optimally designed flexible structure can realize passive control of medium- and high-frequency vibrations. The solution is a closed-loop system that integrates drive positioning, active and passive vibration isolation, sensing and control.

Hereinafter, the present embodiment will be further described by taking "six degrees of freedom" as an example in conjunction with the accompanying drawings.

As shown in Figure 1, the multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform provided by the present invention includes: three sets of load unloading devices 1, six driving struts 2, six connecting bases 3, and an upper platform 4 , Three sets of locking devices 5, three positioning support tooling 6, and one lower platform 7.

Specifically, multiple driving struts 2 are arranged in a cube, and are respectively supported between the upper platform 4 and the lower platform 7 to realize precise adjustment of spatial posture and active control of low-frequency vibration. The integrated sensing device 203 in the driving rod 2 is embedded in the output end of the driving rod 2, which can effectively monitor the output of each driving rod.

The locking device 5 is used to realize fine-tuning of theoretical posture during assembly, device locking and safety protection during transportation and movement;

The load unloading device 1 is used to reduce the negative impact of the target load on the flexible link including the flexible hinge 201 integrated in the driving strut 2;

The positioning support tool 6 is used to realize the positioning and protection of each driving strut 2 during the initial assembly, so as to speed up the installation process; the positioning support tool 6 is integrally processed, which is convenient for quick installation. The two supporting sides of the positioning support tool 6 are 90 degrees to each other in space, and the supporting sides have a semi-arc groove, which can withdraw horizontally after the driving strut 2 is installed, so that the driving strut 2 is released from the clamped state.

The connecting base 3 can facilitate the clamping and locking of each driving strut 2 and is precisely fixed on the upper platform 4 and the lower platform 7 at the same time. The upper platform 4 is formed by cutting the circular plate surface to effectively reduce the quality of the upper platform without affecting its overall rigidity and strength; at the symmetrical triangle positions of the upper platform 4 and the lower platform 7, there are installed Holes and limit slots are convenient for the installation of the connection base 3; the lower platform 7 is designed as a circular plate, and six symmetrical handle holes are opened on the edge for easy handling; the lower platform 7 is designed with locking devices 5 and load unloading Device 1, the mounting bosses for positioning and supporting tooling 6 and other components, and are designed with threaded mounting holes; the connecting base 3 is made of integrated processing, and the clamping block is cut out by wire cutting technology, and bolt holes are opened, which is convenient In the later stage, each support rod is installed and adjusted.

As shown in Figure 2, taking a single driving pole 2 as an example, the driving pole 2 mainly includes: two flexible hinges 201, an upper circular pin 202, an integrated sensing device 203, a ring rib driving outer Sleeve 204, a lower circular pin 205, a flexible amplification mechanism 206, an output rod 207, a driving coil 208, a giant magnetostrictive rod 209, three magnetically permeable yokes 210, and three safety support beams 211.

Wherein, the flexible amplifying mechanism 206 is fixed on the ring rib driving outer sleeve 204 by four bolts, and the input end of the flexible amplifying mechanism 206 is inserted into the output rod 207 and fastened by a square pin. The output end of the flexible amplifying mechanism 206 cooperates with one end of a flexible hinge 201 through a screw rod, and is locked by an upper circular pin 202 . The other end of the flexible hinge 201 is inserted into the first fine thread hole 501 connecting the base 3 through the shaft of a polished rod at one end, and then tightened by a bolt, wherein the screw rod of the shaft matches the first fine thread hole 501 and the bolt. . And the connection base 3 is tightened on the upper platform 4 by three bolts. The safety support beam 211 is fixed on the ring rib driving outer sleeve 204 as the flexible amplification mechanism 206, and the integrated sensing device 203 is embedded in the middle beam groove of the safety support beam 211. The output rod 207 is inserted into the driving coil 208 wrapped by the magnetically permeable yoke 210 , and is in contact with and pressed against the giant magnetostrictive rod 209 wrapped in the driving coil 208 . After the assembly is completed, the giant magnetostrictive rod 209 is in a pre-tensioned state.

Specifically, the flexible amplification mechanism 206 is designed through multi-objective optimization, which can not only achieve desired displacement amplification, but also have the function of vibration isolation above the target frequency. The flexible amplifying mechanism 206 is fastened to the driver by bolts and rectangular pins; wherein, the driver can be driven by a giant magnetostrictive rod 209, a piezoelectric, a voice coil motor, or the like. The safety support beam 211 and the flexible amplifying mechanism 206 are arranged in a 90-degree intersection, and the safety support beam 211 has a groove and a hole at the center, where the integrated sensor device 203 can be embedded; the ring rib drives the outer As the outer sleeve of the driver, the sleeve 204 is designed with heat dissipation ring ribs, which is helpful for heat dissipation driven by smart materials; the drive coil is designed without a skeleton to reduce the air gap and overall size; the flexible hinge 201 is processed by wire cutting Manufactured, abandoning the shortcomings of traditional hinges that have gaps, need lubrication, and low precision.

As shown in FIG. 3 , the load unloading device 1 provided by the present invention mainly includes: universal ball with screw 301 , end cap with circular groove 302 , support base 303 , linear bearing 304 , and unloading spring 305 . The upper end screw with screw rod universal ball 301 is installed on the upper platform 4, and the lower end universal ball with screw rod universal ball 301 is inserted in the annular groove of the annular groove end cover 302. The unloading spring 305 is loaded into the support base 303, the linear bearing 304 is installed on the top of the support base 303 by bolts, the ring groove end cover 302 is inserted into the axial bearing 304, and the unloading spring 305 is compressed. At this point, the load mass will be transferred to the unloading spring 305 . The universal ball 301 with screw rod and the end cover 302 with circular groove cooperate to leave a small gap, which limits the movement stroke to ensure safety; at the same time, the universal ball is in rolling contact with the groove surface to reduce frictional resistance.

As shown in Figure 4, the locking device 5 of the present invention is especially a precision fine-tuning locking device. Screw micrometer 403 with spindle lock. By screwing in and out the spiral micrometer 401 with the mandrel lock horizontally and the spiral micrometer 403 with the mandrel lock vertically, the corresponding mandrel is elongated and shortened, so that the hole corresponding to the upper platform 4 The slot realizes locking or fine-tuning positioning. The locking devices are arranged in three equilateral triangles. Each set is assembled from a support base and two spiral micrometers with mandrel locks arranged horizontally and vertically.

As shown in Figure 5, the connection base 3 provided by the present invention mainly includes: a first fine thread hole 501, a second fine thread hole 503, a first locking bolt hole 502, a second locking bolt hole 504, a bottom end raised 505 . The first fine thread hole 501 and the second fine thread hole 503 of the connecting base cooperate with the two ends of the driving rod 2 respectively, and the locking bolts are inserted into the first locking bolt holes 502 and the second locking bolt holes 504 for locking. . The bottom protrusion 505 is positioned in cooperation with the groove at the corresponding position of the lower platform 7 or the upper platform 4 .

In a preferred example, the three connection bases 3 positions corresponding to the upper platform 4 and the lower platform 7 are all provided with mounting bosses, and grooves for matching the connection base 3 are provided on the mounting bosses, so as to facilitate the connection of the base 3 positioning. At the same time, the upper platform 4 is also designed with a threaded hole for installing the compound unloading device with a screw universal ball, and horizontal and vertical holes for locking and fine-tuning. The flexible amplification mechanism 206 is designed through multi-objective optimization based on the two-stage lever amplification principle, and has both displacement amplification and vibration isolation capabilities. The flexible amplifying mechanism 206 is fixed to the output end of the magnetostrictive driver by four bolts, and its square input end is inserted into the output rod of the driver, and is fastened by a rectangular pin at the same time, which can effectively ensure the output accuracy. The output end of the flexible amplifying mechanism 206 is connected to the flexible hinge 201 through a double screw, and a hole is opened through a drilling process and a circular pin is embedded to ensure long-term movement and fastening in a vibration environment. The safety support beam 211 is also fixed to the output end of the driver by four bolts and arranged in a 90-degree intersection with the flexible amplification mechanism 206 . The safety support beam 211 has a groove in the center and keeps a certain distance from the flexible amplifying mechanism, so as not to affect the normal positioning stroke range, it can protect the flexible amplifying mechanism 206 by contacting the flexible hinge 201 to unload force when subjected to impact conditions. . At the same time, there is a groove at the center to facilitate the installation of the intelligent sensing device, and this position can ensure the accuracy of the collected and output data. Furthermore, the driver is a magnetostrictive driver, and the multi-objective optimization design is adopted, and the energy loss, magnetic field strength, and overall quality of the system are used as the optimized objective functions, and the coil and magnetic circuit of the driver are designed. The driver mainly includes an output rod, a driving coil, a giant magnetostrictive rod, a magnetically permeable yoke, a ring-ribbed driver shell, a driver base, a driver end cover with external threads, a pre-compressed disc spring, and a graphite copper sleeve. The magnetic yoke mainly includes a magnetic sleeve, a magnetic end cover, and a magnetic base. The magnetostrictive rod is assembled inside the drive coil, the magnetically conductive yoke wraps the coil and the magnetostrictive rod, and then the industrial pure iron output rod is inserted into the reserved magnetically conductive end cap and the compression disc is tightened through the drive end cap with external thread The spring thus remains preloaded with the magnetostrictive rod. In order to avoid the tilting of the output rod, the graphite copper sleeve is used to replace the linear bearing in a small space to realize the axial displacement output. Each driving strut 2 is assembled by inserting the polished rods at both ends into the fine threaded holes of the connection base, and then tightening them with bolts. Therefore, the difficulty brought about by adopting other assembly forms is reduced, and the assembly efficiency is improved. The screw with screw universal ball is screwed into the threaded hole reserved on the upper platform, and can be screwed up and down according to the weight of the load, so that the upper platform can always be adjusted at the designed theoretical position; while the universal ball ensures that the upper platform is Less frictional resistance during movement. At the same time, the end cover with ring groove can just put the universal ball into it and can move within the theoretical stroke. When it is greatly disturbed by the outside world, the universal ball will contact with the ring groove, thus playing the role of limit protection. According to the weight of the load, the unloading spring can also be adjusted in different stiffnesses and sizes. The locking device adopts the ingenious design of the support base, and at the same time, the corresponding hole slot is opened on the upper platform, and the screw micrometer with the mandrel lock is selected. During the initial assembly, when the three vertically arranged screw micrometers are screwed in, the corresponding mandrels protrude and insert into the corresponding hole slots, thereby jacking up the upper platform and adjusting its initial posture. After the assembly is completed, the mandrel of the spiral micrometer arranged vertically is screwed back according to the need, and the required distance is kept from the hole slot; at the same time, the three spiral micrometers arranged horizontally are screwed in so that the mandrel is inserted into the corresponding hole of the upper platform. In the hole slot, and keep the required distance, so that it can play the role of limit protection during the working process of the platform. During the handling process, first screw the mandrel of the spiral micrometer arranged horizontally into the hole of the upper platform completely and tighten the mandrel lock, then screw the mandrel of the micrometer arranged vertically until the upper platform is lifted up and the mandrel lock is tightened. The horizontal hole groove of the upper platform is in contact with the horizontally arranged screw micrometer mandrel and clamped, and the vertical mandrel lock is tightened to complete the locking process.

Further, the assembly method of the multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform is described as follows:

First fasten the three connection bases 3 on the lower platform 7, use the bottom protrusion 505 to cooperate with the groove of the lower platform 7, and then use three bolts to fasten each connection base 3;

Then fasten the three pieces of positioning support tooling 6 to the corresponding positions of the lower platform 7 with three bolts; then insert one end of the assembled six driving struts 2 into the first fine thread hole 501 of the connection base, the second In the fine-thread threaded hole 503, it is obliquely close to and embedded in the hypotenuse arc groove of the positioning support tooling 6;

Next, assemble three sets of load unloading devices 1 and locking devices 5 on the lower platform 7 respectively, adjust the distance and pose of the upper platform 4 through the locking device 5, reach the design theoretical position, and place the upper platform 4 . Subsequently, the other three connecting bases 3 are installed in the corresponding grooves of the upper platform 4, but not fastened. Then the polished rods at the upper ends of each driving strut 2 are respectively inserted into the first fine thread hole 501 and the second fine thread hole 503 of the connecting base, and then the locking bolts of the connecting base are tightened, so that each driving strut 2 is completely connected to the connecting base 3. Jam tight.

Finally, respectively tighten the three fixing bolts connecting the base 3 on the upper platform 4, and withdraw the three pieces of positioning support tooling 6 horizontally. At this point, the initial assembly of the device is complete.

Further, the multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform adjusts the unloading device according to the load requirements, and the adjustment method to achieve gravity balance is as follows:

First, loosen the three fixing bolts connecting the base 3 of the upper platform 4, and then extend the screw micrometer 401 with the spindle lock in the locking device 5 and insert it into the corresponding hole of the upper platform 4, the theoretical position There is a corresponding gap with the hole slot. Then place the load on the center position of the upper platform 4, keep the symmetry and fix the load with the reserved threaded hole, at this time the upper platform 4 sinks, and the hole groove contacts the locking shaft.

Then adjust the universal ball 301 with the screw of the load unloading device 1 to float the upper platform 4 and reach the theoretical design position by turning the screw. At this time, there is a corresponding gap between the locking shaft and the corresponding hole.

Finally, the upper platform 4 and each three bolts connecting the base 3 are fastened, and now the loaded device is assembled, and the device can enter the working state.

The working goal of the multi-degree-of-freedom self-sensing precision pointing vibration isolation integrated platform is to provide precise spatial position and posture positioning for precision loads, and at the same time suppress the external low, medium and high frequency vibrations suffered by the precision loads. Through the active movement of the six driving struts 2, the micro-nano-level positioning of the desired pose in space is realized. Due to the integration of integrated sensing devices, closed-loop control can be realized to achieve the desired goal. The designed dual-loop control strategy of the driving ring and the vibration isolation ring, on the one hand, realizes closed-loop tracking of a given desired target, and on the other hand, can realize active compensation for low-frequency external disturbances. According to the data detected by the sensor, it is controlled by the upper computer The current or voltage is fed back to the giant magnetostrictive driver in real time, thereby reducing the impact of low-frequency vibration on the space pose. In addition, since the designed flexible amplification mechanism 206 takes into account the need for passive vibration isolation in the later stage, at this time, the vibration of medium and high frequencies, after being transmitted from the lower platform 7 to the six driving poles 2, passes through the flexible amplification mechanism 206, and the vibration It will be effectively reduced, that is, the passive vibration isolation effect of the flexible mechanism is used. Therefore, the device can simultaneously realize precise drive positioning and vibration isolation of six degrees of freedom.

Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art may make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention. In the case of no conflict, the embodiments of the present application and the features in the embodiments can be combined with each other arbitrarily.

Claims (8)

1. a kind of multiple degrees of freedom points to vibration isolation unified platform from precision is sensed, it is characterised in that including：Load discharge mechanism (1) pole (2), connect base (3), upper mounting plate (4), locking device (5), positioning supporting tool (6), lower platform (7), are driven；

Load discharge mechanism (1) connection upper mounting plate (4) is simultaneously separated with lower platform (7)；

Be fastenedly connected connect base (3) on upper mounting plate (4) and the connect base (3) that is fastenedly connected on lower platform (7) it Between by drive pole (2) connect；

Locking device (5) is connected between upper mounting plate (4) and lower platform (7)；

Positioning supporting tool (6) is arranged on lower platform (7), and driving pole (2) tilts the branch for being embedded in positioning supporting tool (6) In the deep-slotted chip breaker for supportting side.

2. multiple degrees of freedom according to claim 1 points to vibration isolation unified platform from precision is sensed, it is characterised in that described Driving pole (2) includes：Flexible hinge (201), upper round pin (202), integral sensing device (203), ring rib driving overcoat Cylinder (204), lower round pin (205), flexible amplification mechanism (206), take-off lever (207), driving coil (208), huge magnetostriction Contracting rod (209), magnetic conduction yoke (210), safety supports beam (211)；

Flexible amplification mechanism (206) is fastened on one end of ring rib driving outer sleeve (204), flexible amplification mechanism (206) Input insertion take-off lever (207) and by square pin fastener, the output end of flexible amplification mechanism (206) by screw rod with The one end fits of one flexible hinge (201), and locked by upper round pin (202)；

The other end of one flexible hinge (201) inserts what upper mounting plate (4) was set by the axle of one end screw rod one end polished rod In the first fine thread hole (501) or the second fine thread hole (503) of connect base (3), then tightened by bolt；

Safety supports beam (211) is fastenedly connected on one end of ring rib driving outer sleeve (204), and integral sensing device (203) is embedding Enter in the intermediate beam groove of safety supports beam (211)；

In driving coil (208) of take-off lever (207) insertion by magnetic conduction yoke (210) parcel, and with being wrapped in driving coil (208) The giant magnetostrictive driver rod (209) wrapped up in is contacted and compressed；Giant magnetostrictive driver rod (209) is in Pre strained state；

The other end of ring rib driving outer sleeve (204) is passed through by screw rod and the one end fits of another flexible hinge (201) Lower round pin (205) locking；The other end of another flexible hinge (201) is inserted by the axle of one end screw rod one end polished rod In the first fine thread hole (501) or the second fine thread hole (503) for entering the connect base (3) of lower platform (7) setting, then Tightened by bolt.

3. multiple degrees of freedom according to claim 1 points to vibration isolation unified platform from precision is sensed, it is characterised in that described Load discharge mechanism (1) includes：Band screw rod multi-directional ball (301), band annular groove end cap (302), support pedestal (303), linear axis Hold (304), unloaded spring (305)；

Upper end screw rod with screw rod multi-directional ball (301) is arranged on upper mounting plate (4), and the lower end with screw rod multi-directional ball (301) is universal In the annular groove of ball insertion annular groove end cap (302)；

Unloaded spring (305) loads in support pedestal (303), and linear bearing (304) is installed on support pedestal (303) by bolt Top, annular groove end cap (302) insertion cod (304) is interior, and compresses unloaded spring (305).

4. multiple degrees of freedom according to claim 1 points to vibration isolation unified platform from precision is sensed, it is characterised in that described Locking device (5) includes：Spiral micrometer (401), support pedestal (402), the spiral shell of belt mandrel lock of horizontal stripes mandrel lock Revolve micrometer (403)；

Spiral micrometer (401), the spiral micrometer (403) of belt mandrel lock of horizontal stripes mandrel lock are arranged on support pedestal (402) on；

Support pedestal (402) is fastenedly connected with lower platform (7)；

Horizontal stripes mandrel lock spiral micrometer (401), belt mandrel lock spiral micrometer (403) respectively with upper mounting plate (4) hole slot corresponding to matches；

Revolved by spiral micrometer (401), the spiral micrometer (403) of belt mandrel lock locked to horizontal stripes mandrel Enter, revolve and move back, can extend and shorten corresponding mandrel, so as to which hole slot corresponding with upper mounting plate (4) realizes locking or adjustment positioning.

5. multiple degrees of freedom according to claim 1 points to vibration isolation unified platform from precision is sensed, it is characterised in that described Connect base (3) includes：First fine thread hole (501), the second fine thread hole (503), the first locking screw keyhole (502), Second locking screw keyhole (504), bottom are raised (505)；

First fine thread hole (501), the second fine thread hole (503) coordinate from the both ends of different driving poles (2) respectively, And inserted in the first locking screw keyhole (502), the second locking screw keyhole (504) lock by clamping screw respectively；

Bottom projection (505) coordinates with lower platform (7) or the groove of upper mounting plate (4) corresponding position to be positioned.

6. multiple degrees of freedom according to claim 1 points to vibration isolation unified platform from precision is sensed, it is characterised in that upper Platform (4) and lower platform (7) symmetrical triangle opening position, fastening are provided with connect base (3), form totally six connection bottoms Seat；

In this six connect bases, a driving pole (2) is connected between adjacent connect base in the circumferential, is formed altogether Six driving poles (2).

7. multiple degrees of freedom according to claim 1 points to vibration isolation unified platform from precision is sensed, it is characterised in that three sets Locking device uses to be arranged in equilateral triangle.

8. one kind combination unit, it is characterised in that including the multiple degrees of freedom autobiography any one of multiple claims 1 to 7 Sense is accurate to point to vibration isolation unified platform, multiple described multiple degrees of freedoms from sense it is accurate point between vibration isolation unified platform according to It is distributed according to different directions.