CN107511841A - It is applicable to the robot clamping jaw of various sizes of wafer carrying basket - Google Patents

Abstract

The present invention is a robot gripper applicable to wafer carrying baskets of different sizes, comprising a base frame and a pair of clamping arms connected to the base frame in a relatively swingable manner, and each clamping arm is respectively provided with at least two Hanging rods arranged up and down; the robot grippers of the present invention adjust the distance between the two gripping arms through relatively swingable gripping arms, and enable wafer carrying baskets of different sizes to be hung on corresponding hanging rods with corresponding distances In order to achieve the effect that a single gripper can hang wafer carrier baskets of different sizes, saving the trouble of replacing robot grippers.

Description

Robotic grippers for different sized wafer carriers

technical field

The invention relates to a robot with a clamping function, in particular to a robot gripper applicable to wafer carrying baskets of different sizes.

Background technique

Due to the evolution of automation technology, robots have been introduced in many high-tech factories as the main means of transporting or delivering a large number of items. Taking the existing wafer production equipment 50 in FIG. The driving assembly 51 is equipped with a clamping jaw 52 for clamping a carrier basket 60 carrying a wafer. Since the size of the carrier basket 60 is 8", the existing clamping jaw 52 only has a corresponding position of the carrier basket 60 Designed with a single size, and there is another 12” carrying basket design in the existing market, so that the existing jaws 52 cannot be gripped in response to the size change of the carrying basket, and need to be replaced or designed with different sizes of grippers Any way to deal with it will increase the cost of production. In view of this, the inventor believes that the existing robot gripper still needs to be improved.

Contents of the invention

In order to solve the problem that existing wafer carrying baskets have designs of different sizes, and the grippers used by the robot can only be limited to a single size of grasping, the main purpose of the present invention is to provide a wafer carrying basket that is applicable to different sizes The robot gripper has a relatively swingable gripper arm and upper and lower hanging rods, which can correspondingly grab wafer carrying baskets of different sizes.

The technical means used in the present invention is to provide a robot gripper applicable to wafer carrying baskets of different sizes, which is characterized in that it includes:

a pair of pedestals, each of which extends horizontally and is arranged parallel to each other;

A pair of clamping arms, each clamping arm is respectively connected to each base frame and can swing relative to each other, and is respectively provided with at least two hanging rods arranged up and down.

Preferably, the robot grippers applicable to wafer carrying baskets of different sizes, wherein each pair of gripper arms are mutually symmetrical U-shaped rods.

Preferably, the robot gripper applicable to wafer carrying baskets of different sizes, wherein each pair of gripper arms is connected to each base frame through bearings.

Preferably, in the robot gripper applicable to wafer carrying baskets of different sizes, one end of the pair of base frames is connected to a driving assembly capable of lifting up and down.

The present invention utilizes the robot gripper jaws that are applicable to wafer carrying baskets of different sizes, and the effect that can be obtained is that the present invention adopts a pair of swingable gripper arms, and sets more than two grippers on each gripper arm. Hanging rod, so that the pair of clamping arms can swing relative to each other and change the distance between them, so as to adjust and hold wafer carrying baskets of different sizes, so that wafer carrying baskets of different sizes can be hung in different positions above or below , without additional replacement or design of jaws of different sizes, thereby achieving the effect of saving production costs.

Description of drawings

Fig. 1 is a front view of a preferred embodiment of the present invention.

Fig. 2 is a partial right side view of a preferred embodiment of the present invention.

Fig. 3 is a front view of a preferred embodiment of the present invention grabbing wafer carrier baskets of different sizes.

Fig. 4 is a partial right side view of a preferred embodiment of the present invention grabbing wafer carrier baskets of different sizes.

Figure 5 is a front view of an existing robotic gripper grasping an 8" wafer carrier basket.

detailed description

The technical means adopted by the present invention to achieve the intended invention purpose are further described below in conjunction with the drawings and preferred embodiments of the present invention.

In order to be able to understand the technical characteristics and practical effects of the present invention in detail, and to implement them according to the contents of the specification, the preferred embodiment shown in the accompanying drawings is further described in detail below, please refer to Figure 2 and Figure 2 A robotic gripper applicable to wafer carrying baskets of different sizes includes a driving assembly 10 , a pair of base frames 20 and a pair of clamping arms 30 .

The driving assembly 10 includes a body 11, a connecting rod 12 that can move up and down relative to the body 11, and a driving unit 13 arranged on the top of the connecting rod 12. The driving unit 13 can be driven by a motor and a belt, Driving modes such as air cylinder or servo motor act, because this driving unit 13 is not the key point of this case creation, do not illustrate here.

The pair of base frames 20 are connected to the driving unit 13 of the driving assembly 10 and extend horizontally relative to the driving unit 13 , and the base frames 20 are arranged parallel to each other.

The pair of clamping arms 30 are respectively connected to each base frame 20 and can swing relative to the pair of base frames 20. Each clamping arm 30 is a U-shaped bar body symmetrical to each other, and is connected to each base frame 20 through a bearing at the top respectively. 30 are respectively provided with two hanging rods 31 arranged up and down and parallel to each other, which can be used for hanging the wafer carrying basket.

The embodiment of the present invention is shown in Fig. 1 and Fig. 2, and it is used for grabbing a wafer carrier basket 40A that size is 8 ". , so that the distance between the two clamp arms 30 is approximately equal to the outer diameter of the wafer carrying basket 40A, and the wafer carrying basket 40A is suspended on each hanging rod 31 located below the pair of clamping arms 30 on both sides Above, when the pair of clamping arms 30 has firmly grasped the wafer carrier basket 40A, the pair of pedestals 20 and the driving assembly 10 can move up and down to achieve the purpose of transportation or processing.

As shown in Figures 3 and 4, the robot gripper of the present invention can also be used to grab a wafer carrier basket 40B with a size of 12 ". When the robot gripper of the present invention grabs, the pair of gripper arms 30 Relatively far away, the distance between the two clamping arms 30 is approximately equal to the outer diameter of the wafer carrying basket 40B for grabbing, and the two sides of the wafer carrying basket 40B are respectively hung on the pair of clamping arms 30 above Each hanging rod 31 of.

Therefore, the two clamp arms 30 of the present invention can swing relative to the pair of pedestals 20. By changing the distance between the two clamp arms 30 and hanging them at different positions of each clamp arm 30, it is possible to be applicable to different sizes. Therefore, using the robot grippers of the present invention for grabbing does not require additional replacement or design of grippers of different sizes, and can quickly switch and grab wafer carrying baskets of different sizes, which can improve on-site production efficiency.

The above descriptions are only preferred embodiments of the present invention, and do not limit the present invention in any form. Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any skilled person familiar with the profession, Within the scope of not departing from the technical solution of the present invention, when the technical content disclosed above can be used to make some changes or be modified into equivalent embodiments with equivalent changes, but all the content that does not depart from the technical solution of the present invention, according to the technical content of the present invention In essence, any simple modifications, equivalent changes and modifications made to the above embodiments still fall within the scope of the technical solution of the present invention.

Claims (4)

1. A kind of 1. robot clamping jaw for being applicable to various sizes of wafer carrying basket, it is characterised in that including：

   A pair of pedestals, each pedestal extend horizontally and are disposed in parallel relation to one another；

   A pair of jig arm, each jig arm be connected to each pedestal and can opposing oscillatory, and be respectively arranged with least two rows of going to upper and lower The peg of row.
2. 2. the robot clamping jaw of various sizes of wafer carrying basket is applicable to as claimed in claim 1, it is characterised in that each It is the mutually symmetrical with U-shaped body of rod to jig arm.
3. 3. the robot clamping jaw of various sizes of wafer carrying basket is applicable to as claimed in claim 2, it is characterised in that each To jig arm with each pedestal to be connected by bearing.
4. 4. the robot clamping jaw of various sizes of wafer carrying basket is applicable to as claimed any one in claims 1 to 3, its It is characterised by, this is connected to one to pedestal with one end can carry out the drive component of upper and lower lifting start.