CN107504895B - Zero-point fine-tuning device for grating-type micro-nano positioning platform - Google Patents

Abstract

The invention discloses a zero-point fine-tuning device for a grating-type micro-nano positioning platform, including a platform body and a moving part; the invention increases the degree of freedom of the grating reading head in the actual application process by means of the cooperation of the base and the return spring, and introduces The micrometer head and the wedge block realize the fine adjustment of the movement of the base with the help of the inclined plane transmission, and the fine adjustment displacement can be directly read by the reading of the micrometer head, which improves the operability of the user. At the same time, in the technical solution, the positioning bar structure is introduced on the side where the moving part cooperates with the grating ruler, which realizes the positioning accuracy of the grating ruler. In actual assembly, the high-precision assembly of the grating ruler can be realized without special fixtures, which meets the requirements of the present invention. Requirements for the accuracy of the zero point position of the grating ruler.

Description

Zero-point fine-tuning device for grating-type micro-nano positioning platform

technical field

The invention relates to a zero-point marking means in the process of micro-nano operation, in particular to a zero-point fine-tuning device for a grating-type micro-nano positioning platform, belonging to the field of micro-nano operation.

Background technique

With the development of nanotechnology, the research fields and horizons of natural sciences such as physics, chemistry, and biology have been effectively broadened, and even new disciplines have been born. Especially since the beginning of the 21st century, the rapid development of nanotechnology has greatly improved people's understanding of the microscopic world, and on this basis, it has produced technical means that can support human beings to explore the principles of matter at the microscopic scale, and provide information for microelectronics. New breakthroughs in the industry in the post-Moore era, improvements in scale, precision and speed of equipment manufacturing in the field of defense and aerospace, and innovations in micro-nano manufacturing equipment have brought development opportunities. Among them, the micro-nano positioning platform, as the carrier of nanotechnology, has received continuous attention and research at home and abroad. Gratings are widely used as displacement sensors in micro-nano positioning platforms. Since the working stroke of the platform is usually about 100 microns, the initial position of the platform movement is generally used as the zero point, which causes the problem of inconsistency in zero points during repeated movements.

Contents of the invention

Aiming at the problem that the grating-type micro-nano positioning platform disclosed in the existing literature has no fixed zero mark and the zero point is inconsistent during repeated movements, the present invention provides a zero-point fine-tuning device for the grating-type micro-nano positioning platform. Zero trimming.

The technical scheme that the present invention takes is:

Zero-point fine-tuning device for grating-type micro-nano positioning platform, including platform body, moving part, grating reading head, grating ruler, wedge block, differential head, base and return spring;

The platform body is a square structure, and there is a moving part at the center of the platform body; grating rulers are installed on two adjacent side elevations of the moving part, and there is a gap between the two side elevations and the platform body. There is a cavity for accommodating the reading head of the grating ruler. The reading head of the grating ruler is installed on a base. The cross section of the base is a right-angled trapezoidal structure. A circular blind hole, one end of the return spring is inserted into the blind hole, and the other end is inserted on the inner wall of the cavity in a compressed state; a wedge-shaped block is installed on the side of the hypotenuse structure of the base, and the slope of the wedge-shaped block is in line with the The side of the hypotenuse structure is matched, and a concave surface is provided in the wedge block, and one end of the differential head is matched with the concave surface, and the other end of the differential head is provided with threads, which are installed in the threaded hole of the platform body; by rotating the differential head Realize the front and rear sliding of the base.

Further, the platform body is a square aluminum alloy block structure, and the moving part is formed by wire-cutting the whole platform body.

Further, the bottom surface of the cavity is provided with two threaded holes that cooperate with the fastening screws, and the base is installed on the corresponding hole on the platform body through the cooperation of the two fastening screws and the two threaded holes on the bottom surface of the square cavity. In the square cavity, annular gaskets are fitted between the two fastening screws and the base respectively.

Further, a vertical square column is respectively provided at both ends of the long side of the top surface of the base, and the vertical direction column is respectively provided with threaded holes for fastening screws, and the grating reading head It is installed on the base through the cooperation of fastening screws and vertical square columns.

Further, two elliptical elongated holes are provided on the short side of the top surface of the trapezoidal block at the bottom of the base, and the elliptical elongated holes are in clearance fit with the fastening screws, and the center position of the elliptical elongated holes corresponds to the platform The center of the two threaded holes on the bottom surface of the square cavity of the body, which are matched with the fastening screws.

Further, the grating ruler is pasted on the side elevation of the moving part through back glue, and a zero-point reticle is provided at the center of the working surface of the grating ruler.

Further, the outer wall of the square cavity containing the grating reading head on the platform body is provided with a threaded hole for matching with the external thread of the differential head, and the end of the differential head is a hemispherical head structure.

Further, positioning strips are provided on the bottom and side of the sides where the moving part cooperates with the grating ruler, and the positioning strips and the moving part are integrally formed by wire cutting.

Further, the section of the wedge-shaped block is a right-angled trapezoid, the slope of the wedge-shaped block matches the base, the slope of the wedge-shaped block is polished, and the center of the side of the wide side of the wedge-shaped block is provided with a hemisphere that matches the end ball of the differential head. concave.

Further, the blind hole and the return spring are clearance fit, and the free length of the return spring is greater than the depth of the blind hole. For clearance fits.

The beneficial effect that the present invention obtains:

Because the present invention adopts the above-mentioned technical scheme, wherein, the degree of freedom of the grating reading head in the actual application process is increased by the cooperation of the base and the return spring, and the differential head and the wedge block are introduced at the same time, and the fine adjustment of the motion of the base is realized by means of the inclined plane transmission, while The fine-tuning displacement can be read directly by means of the differential head reading, which improves the user's operability. At the same time, in the technical solution, the positioning bar structure is introduced on the side where the moving part cooperates with the grating ruler, which realizes the positioning accuracy of the grating ruler. In actual assembly, the high-precision assembly of the grating ruler can be realized without special fixtures, which meets the requirements of the present invention. Requirements for the accuracy of the zero point position of the grating ruler.

The basic principles and main features of the present invention and the advantages of the present invention have been shown and described above. Those skilled in the industry should understand that the present invention is not limited by the above-mentioned embodiments. What are described in the above-mentioned embodiments and the description only illustrate the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention will also have Variations and improvements are possible, which fall within the scope of the claimed invention. The protection scope of the present invention is defined by the appended claims and their equivalents.

Description of drawings

The accompanying drawings constituting a part of the present application are used to provide further understanding of the present application, and the schematic embodiments and descriptions of the present application are used to explain the present application, and do not constitute improper limitations to the present application.

Fig. 1 is the overall structure diagram of the present invention.

Fig. 2 is a sectional view of a partial structure of the present invention.

Figure 3 is an exploded view of the present invention.

Fig. 4 is a structural diagram of parts of the present invention.

In the figure: 1-platform body, 2-moving part, 3-grating reading head, 4-grating ruler, 5-fastening screw, 6-wedge block, 7-differential head, 8-base, 8-1 the right angle of the base Side structure side, 8-2 hypotenuse structure side, 9-return spring, 10-ring gasket.

Detailed ways

It should be pointed out that the following detailed description is exemplary and intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and/or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and/or combinations thereof.

Terminology explanation part: "the side of the right-angled side structure of the base" described in the present invention is the surface formed by vertical stretching of the right-angled side of the right-angled trapezoid; the "side of the hypotenuse structure" described in the present invention is the hypotenuse of the right-angled trapezoid Faces formed by vertical extrusion.

The present invention will be further described below in conjunction with specific embodiments. The exemplary embodiments and descriptions of the present invention are used to explain the present invention, but not as a limitation to the present invention.

The zero-point fine-tuning device facing the grating-type micro-nano positioning platform in the present invention is a zero-point marking means in the micro-nano operation process, and specifically relates to the zero-point fine-tuning device facing the grating-type micro-nano positioning platform, which belongs to the field of micro-nano operation. The cooperation with the return spring increases the degree of freedom of the grating reading head in the actual application process. At the same time, the differential head and the wedge block are introduced, and the fine adjustment of the base movement is realized by means of the inclined plane transmission, and the fine adjustment displacement can be directly read by the reading of the differential head, which improves the use. operability of the operator. At the same time, in the technical solution, the positioning bar structure is introduced on the side where the moving part cooperates with the grating ruler, which realizes the positioning accuracy of the grating ruler. In actual assembly, the high-precision assembly of the grating ruler can be realized without special fixtures, which meets the requirements of the present invention. Requirements for the accuracy of the zero point position of the grating ruler; the specific structure is as follows:

As shown in Figures 1, 2, and 3, it includes: platform body 1, moving part 2, grating reading head 3, grating ruler 4, fastening screw 5, wedge block 6, differential head 7, base 8, return spring 9, ring Gasket 10;

The platform body 1 is a square aluminum alloy block structure. The center of the platform body 1 is the moving part 2. The moving part 2 is formed by wire cutting the whole platform body 1. The moving part 2 and the platform body 1 are connected by a flexible hinge. The platform body 1 on the side of the moving part 2 is provided with a square cavity for accommodating the grating reading head 3, and the bottom surface of the square cavity is provided with two threaded holes that cooperate with the fastening screws 5, and the base 8 is connected with the square through the two fastening screws 5. The cooperation of the two threaded holes on the bottom surface of the cavity is installed in the corresponding square cavity on the platform body 1. Ring gaskets 10 are fitted between the two fastening screws 5 and the base 8 respectively. The bottom end of the base 8 is provided with a section of Right-angled trapezoidal trapezoidal block structure, one end of the trapezoidal block structure is a slope, the slope is polished, the other end of the trapezoidal block structure is a straight-edge structure, and the center of the side of the straight-edge structure is provided with a circular blind hole for accommodating the return spring 9, the base 8 A vertical square column is respectively provided at both ends of the top long side of the trapezoidal block at the bottom end, and threaded holes that cooperate with the fastening screws 5 are respectively provided on the vertical direction columns, and the grating reading head 3 passes through the fastening screws 5 The cooperation with the vertical square column is installed on the base 8, and the short side of the top surface of the trapezoidal block at the bottom of the base 8 is provided with two elliptical elongated holes. The center position of the shaped hole corresponds to the center of the two threaded holes on the bottom surface of the square cavity of the platform body 1 that cooperate with the fastening screw 5. The grating ruler 4 is pasted on the side elevation of the moving part 2 through adhesive, and the center position of the working surface of the grating ruler 4 is There is a zero reticle, and the outer wall of the square cavity containing the grating reading head 3 on the platform body 1 is provided with a threaded hole for matching with the external thread of the differential head 7, and the end of the differential head 7 is a hemispherical head structure.

Positioning strips are respectively provided on the bottom and side of the sides where the moving part 2 cooperates with the grating ruler 4. The positioning strips and the moving part 2 are integrally formed by wire cutting.

The inclined plane at one end of the trapezoidal block at the bottom of the base 8 cooperates with the wedge-shaped block 6. The cross-section of the wedge-shaped block 6 is a right-angled trapezoid, and the inclined-plane of the wedge-shaped block 6 cooperates with the base 8. A hemispherical concave surface matched with the ball head at the end of the differential head 7 is provided at the central position of one side.

The circular blind hole accommodating the return spring 9 provided at the center of the straight side of the trapezoidal block at the bottom of the base 8 is clearance fit with the return spring 9, and the free length of the return spring 9 is greater than the depth of the blind hole. There is a clearance fit between the trapezoidal block at the bottom of the base 8 and the outer sidewall of the square cavity on the platform body 1 that accommodates the grating reading head 3 .

As shown in Figure 4, it is a structural diagram of the base 8, which includes a trapezoidal column and two vertical square columns arranged on the trapezoidal column; the right-angled side structure side of the base represented by 8-1 in the figure, and the one represented by 8-2 is the side of the hypotenuse structure.

The invention increases the degree of freedom of the grating reading head in the actual application process by means of the cooperation of the base and the return spring, and at the same time introduces the differential head and the wedge block, and realizes the fine adjustment of the base movement by means of the inclined plane transmission, and the fine adjustment displacement can be directly read by means of the differential head reading The operability of the user is improved. At the same time, in the technical solution, the positioning bar structure is introduced on the side where the moving part cooperates with the grating ruler, which realizes the positioning accuracy of the grating ruler. In actual assembly, the high-precision assembly of the grating ruler can be realized without special fixtures, which meets the requirements of the present invention. Requirements for the accuracy of the zero point position of the grating ruler.

In actual application, the specific installation and usage methods are as follows:

First, the grating reading head 3 is installed on the vertical square columns at both ends of the top surface of the trapezoidal block at the bottom of the base 8 by means of fastening screws 5;

Then, one end of the return spring 9 is inserted into the circular blind hole that accommodates the return spring 9 at the center of the side of the straight edge of the trapezoidal block at the bottom of the base 8, and then the base 8 is put into the platform body 1 to accommodate the grating reading head 3, the outer end of the return spring 9 needs to be artificially pressed against the inner wall of the square cavity during the placement process. At this time, the inclined plane of the wedge-shaped block 6 faces the inclined plane of the trapezoidal block at the bottom of the base 8 and then vertically Put it into the square cavity, at this time, the center position of the side of the wide side of the wedge block 6 is provided with a hemispherical concave surface facing the outer surface of the square cavity, and the differential head 7 is screwed into the platform body 1 to accommodate the grating reading head 3, the outer wall of the square cavity is provided with a threaded hole that cooperates with the external thread of the differential head 7. By rotating the differential head 7, the end ball head is matched with the hemispherical concave surface of the wedge block 6, and the sides of the grating scale 4 are respectively connected to the moving part 2. The positioning strips on the side are matched and glued with the back glue, the size of the grating ruler 4 and the initial position of the zero mark need to ensure that the zero point is within the effective monitoring range of the grating reading head 3 .

After the assembly is completed, the front and rear sliding of the base 8 is realized by rotating the differential head 7, and the zero point position is observed in real time with the help of the zero point monitoring indicator light attached to the grating scale 4. When the zero point position enters the monitoring range of the grating reading head 3 from one side, the grating scale The zero point monitoring indicator light of 4 will be on, and the zero point fine-tuning operation can be completed at this time, and the invention can also fine-tune the specific position of the zero point according to different requirements in the micro-nano positioning platform.

Although the specific implementation of the present invention has been described above in conjunction with the accompanying drawings, it does not limit the protection scope of the present invention. Those skilled in the art should understand that on the basis of the technical solution of the present invention, those skilled in the art do not need to pay creative work Various modifications or variations that can be made are still within the protection scope of the present invention.

Claims (10)

1. the zero point micromatic setting towards grating type micro-nano locating platform, which is characterized in that including platform body, motion parts, Grating reading head, grating scale, wedge block, differential head, pedestal and returning spring；

The platform body is square structure, is motion parts in the platform body center；The motion parts Two adjacent side elevations grating scale is installed, the side elevation of motion parts and grating scale cooperation introduces positioning strip structure respectively, The positioning accuracy for realizing grating scale, special fixtures are not needed in practical set can be realized the high-precision assembly of grating scale, And the cavity of a receiving grating ruler reading head, the grating ruler reading head are equipped between the two side elevations and platform body It is mounted on a pedestal, the cross section of the pedestal is ladder structure of right angle, the right-angle side texture edge centre bit of pedestal The blind round hole for accommodating returning spring is installed, returning spring one end is inserted into the blind hole, and the other end is inserted on cavity inner wall In compressive state；The bevel edge texture edge of the pedestal is equipped with a wedge block, and the inclined-plane of the wedge block is oblique with this Texture edge cooperation in side is equipped with a concave surface in the wedge block, and one end and the concave surface of the differential head cooperate, differential head The other end is equipped with screw thread, is mounted in the threaded hole of platform body；The front and back sliding of pedestal, differential are realized by rotation differential head Head and wedge block are driven the fine tuning for realizing base motions by inclined-plane.

2. the zero point micromatic setting as described in claim 1 towards grating type micro-nano locating platform, which is characterized in that described Platform body is rectangular Al alloy block structure, and the motion parts are that the wire cutting of platform body entirety forms.

3. the zero point micromatic setting as described in claim 1 towards grating type micro-nano locating platform, which is characterized in that described Cavity floor is set there are two the threaded hole with fastening screw cooperation, and the pedestal passes through two fastening screws and square cavity bottom surface Two threaded holes be fitted on platform body in corresponding square cavity, between described two fastening screws and pedestal It has been respectively cooperating with annular gasket.

4. the zero point micromatic setting as described in claim 1 towards grating type micro-nano locating platform, which is characterized in that described The both ends of the top surface long side side of pedestal are respectively equipped with a vertical type square column, are respectively equipped with and fasten on the vertical type square column The threaded hole of screw cooperation, the grating reading head are fitted on pedestal by fastening screw and vertical type square column.

5. the zero point micromatic setting as described in claim 1 towards grating type micro-nano locating platform, which is characterized in that the bottom The top surface short side side of seat bottom end trapezoid block is set there are two oval elongated hole, and the ellipse elongated hole and fastening screw are matched for gap It closes, the ellipse elongated hole center corresponds to two of platform body square cavity bottom surface and the threaded hole of fastening screw cooperation Center.

6. the zero point micromatic setting as described in claim 1 towards grating type micro-nano locating platform, which is characterized in that described Grating scale is pasted on motion parts side elevation by gum, and grating scale center of working face position is equipped with zero point groove.

7. the zero point micromatic setting as described in claim 1 towards grating type micro-nano locating platform, which is characterized in that described flat The square cavity lateral wall that grating reading head is accommodated on playscript with stage directions body is equipped with the threaded hole cooperated with differential head external screw thread, the differential Head end is hemisphere head dummy structure.

8. the zero point micromatic setting as described in claim 1 towards grating type micro-nano locating platform, which is characterized in that the fortune Dynamic part is respectively equipped with positioning strip with the side elevation bottom of grating scale cooperation and side, and the positioning strip is integrated with motion parts Formula structure is integrally cut through wire cutting.

9. the zero point micromatic setting as described in claim 1 towards grating type micro-nano locating platform, which is characterized in that the wedge Shape block section is right-angled trapezium, and the inclined-plane and base engagement of wedge block, by polishing treatment, wedge block is wide on the wedge block inclined-plane The center side position of side side is equipped with half spherical-concave-surface cooperated with differential head end bulb.

10. the zero point micromatic setting as described in claim 1 towards grating type micro-nano locating platform, which is characterized in that described Blind hole and returning spring be clearance fit, the returning spring drift is greater than the blind hole hole depth, and pedestal bottom end is trapezoidal Being accommodated between the square cavity lateral wall of grating reading head on block and platform body is clearance fit.