CN107469476A - Fluid treating device - Google Patents
Fluid treating device Download PDFInfo
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- CN107469476A CN107469476A CN201610398435.5A CN201610398435A CN107469476A CN 107469476 A CN107469476 A CN 107469476A CN 201610398435 A CN201610398435 A CN 201610398435A CN 107469476 A CN107469476 A CN 107469476A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
- B01D46/0028—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions provided with antibacterial or antifungal means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0001—Making filtering elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/8668—Removing organic compounds not provided for in B01D53/8603 - B01D53/8665
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/30—Treatment of water, waste water, or sewage by irradiation
- C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/50—Treatment of water, waste water, or sewage by addition or application of a germicide or by oligodynamic treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/80—Type of catalytic reaction
- B01D2255/802—Photocatalytic
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2303/00—Specific treatment goals
- C02F2303/04—Disinfection
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2305/00—Use of specific compounds during water treatment
- C02F2305/10—Photocatalysts
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Hydrology & Water Resources (AREA)
- Water Supply & Treatment (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
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- Physical Or Chemical Processes And Apparatus (AREA)
- Catalysts (AREA)
Abstract
This application discloses a kind of fluid treating device, including：Matrix with fluid passage, and the aggregation of complex root nemutogen, to flow through the fluid passage, be contaminated with the fluid of selected particle and handle；The aggregation is distributed in the fluid passage, and has loose structure, and the diameter of the loose structure inside aperture is more than 0 but less than the particle diameter of the selected particle.Preferably, the nemutogen is nano wire (nanotube), and inwall of its one end with the fluid passage is fixedly connected, and the other end radially extends along the fluid passage.The fluid treating device of the application has the characteristics that flux is big, flow resistance is small, energy high-efficient cleaning removes micro-/ nano grade particles in fluid, reusable, service life length, and produces in enormous quantities suitable for scale.
Description
Technical field
The application is more particularly to a kind of device that purified treatment is carried out to the fluid containing particulate matter.
Background technology
Daily life, work in, people for remove fluid in particle and make fluid be purified have extensively
Demand.For example, be directed to low-quality air, dust therein, molecule etc. need to be removed, to ensure the health of human body.Again
For example, for water, oil (edible oil, gasoline, diesel oil etc.), particulate matter therein need to be removed, to realize the purifying of water, oil.Example again
Such as, for fields such as biological medicines, it need to remove or screen cell in blood and body fluid, virus, bacterium etc..
Traditional fluid treating device (such as mouth mask, air purifier etc.) has that flux is low, volume is big, using the longevity mostly
Order the defects of short, and it is low for the elimination effect of fine particle in fluid.
In recent years, with the development of micro-nano process technology, researcher has also been proposed some streams based on porous membrane
Body processing equipment, i.e. go out micron or nano level numerous holes by etching (corrosion) on film, make it can apply to clearly
Except the particle in fluid, especially molecule, its size can be precisely controlled.But there is flux and mechanical strength in this device
Between contradiction, flux is big, often mechanical structure is fragile, and mechanical strength is big, flux again very little.This is due to that it processes skill
The limitation of art, if hole is smaller, film thickness just needs thinner, and this also make it that the mechanical support performance of porous membrane is further
Deterioration, can not adapt to adverse circumstances, and service life is also very limited, so so far can't be practical.
Currently there is researcher to utilize sacrificial layer technology, realize the fluid treating device comprising transverse flow channels and (refer to
Shown in Fig. 1), the aperture of these transverse flow channels can be controlled in several nanometers, therefore be beneficial to remove the fine particle in fluid,
But its flux is too small.
The content of the invention
The main purpose of the application is to provide a kind of fluid treating device of improvement, with overcome it is of the prior art not
Foot.
To realize aforementioned invention purpose, the technical scheme that the application uses includes：
The embodiment of the present application provides a kind of fluid treating device, and it includes：
Matrix with fluid passage, and
The aggregation of complex root nemutogen, to flow through the fluid passage, be contaminated with the fluid of selected particle and enter
Row processing；
The aggregation is distributed in the fluid passage, and has loose structure, the loose structure inside aperture it is straight
Footpath is more than 0 but less than the particle diameter of the selected particle.
In some embodiments, the complex root nemutogen intersects or is interlaced with one another to form the loose structure.
In some embodiments, the complex root nemutogen is intervally installed and parallel arrangement forms the porous knot
Structure.
In certain embodiments, the nemutogen is selected from nano wire or nanotube.
Than prior art, the fluid treating device that the application provides is at least with flux is big, flow resistance is small, energy high-efficient cleaning removes
In fluid the features such as micro-/ nano grade particles, thicker matrix can be also used, high mechanical strength can (ultrasound) cleaning and repeatedly
Use, service life length, and preferably there is self-cleaning function, while its preparation technology is simply controllable, suitable for scale high-volume
Prepare.
Brief description of the drawings
, below will be to embodiment or existing in order to illustrate more clearly of the embodiment of the present application or technical scheme of the prior art
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments described in application, for those of ordinary skill in the art, on the premise of not paying creative work,
Other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is a kind of sectional view of the fluid treating device comprising transverse flow channels in the prior art；
Fig. 2 is a kind of top view of fluid treating device in the embodiment of the application one；
Fig. 3 is a kind of partial sectional view of fluid treating device in the embodiment of the application one；
Fig. 4 is a kind of preparation technology flow chart of fluid treating device in the embodiment of the application one.
Embodiment
In view of deficiency of the prior art, inventor is able to propose the application's through studying for a long period of time and largely putting into practice
Technical scheme.The technical scheme, its implementation process and principle etc. will be further explained as follows.
A kind of fluid treating device that the one side of the embodiment of the present application provides includes：
Matrix with fluid passage, and
The aggregation of complex root nemutogen, to flow through the fluid passage, be contaminated with the fluid of selected particle and enter
Row processing；
The aggregation is distributed in the fluid passage, and has loose structure, the loose structure inside aperture it is straight
Footpath is more than 0 but less than the particle diameter of the selected particle.
Wherein, described matrix can be various forms, such as cuboid shape, sheet, polyhedral, hemispherical, spherical
Or other irregular forms.Therefore, described " first surface " can be any one unspecific conjunction in described matrix
Suitable plane or curved surface.
Wherein, the fluid passage can be the through hole of any form, and its fluid intake can be distributed in described matrix table
Face, such as a surface of described matrix, it may be defined as first surface, and its fluid issuing can both be distributed in described matrix
Another surfaces different from the first surface on (for example, another surface can be adjacent, opposite with the first surface
It is right), can also be distributed on described first surface (certainly in this case, should have fluid barrier on described first surface
Mechanism, pending fluid is set not flow directly to the fluid outlet on the first surface.In some cases,
The fluid issuing of the fluid passage is also to be distributed in inside described matrix, for example, exist in the described matrix to
When receiving the cavity of the fluid after processing.
Wherein, described pending fluid can be gas phase or liquid phase, such as empty gas and water, oils, in some situations
The set of particulate matter lower or in flow-like, or molten state of Cucumber etc..
Wherein, described " particle " is primarily referred to as solid phase particles, but in some cases, can also be and the fluid
(particularly liquid phase fluid) incompatible drop etc..
Wherein, described " plural number " means two or more.
Wherein, described nemutogen can be linear, curved, preferably linear, it is beneficial to prepare, and can
Make the hole size in the loose structure to be formed etc. more controllable.And described nemutogen can be solid or hollow, example
Such as nanoscale or micron-sized line, pipe, but not limited to this.
Wherein, the cross section structure of the nemutogen radially can be rule or irregular shape, such as can be more
Side shape (triangle, quadrangle or other), circle, ellipse, star etc..
In some embodiments, inwall of the described nemutogen one end with the fluid passage is fixedly connected, the other end
Along radially extending for the fluid passage.
In certain embodiments, the complex root nemutogen intersects or is interlaced with one another to form the loose structure.
In certain embodiments, the complex root nemutogen is intervally installed and parallel arrangement forms the porous knot
Structure.
It is more preferable, catalysis material or anti-biotic material is also extremely distributed with less than the nemutogen surface.Particularly, institute
State linear body integrally can be made up of catalysis material or anti-biotic material.
Wherein, a diameter of 1nm~500 μm of the nemutogen, preferably 1nm~50 μm.
Preferably, foregoing linear body can use nano wire, and its diameter is smaller, can be less to form aperture with dense distribution
Hole, and then be able to can also be realized to comprising compared with small particle (micron or even nanoscale while high fluid flux is kept
The fluid of particle not) is handled.
Preferably, the nemutogen can use micro wire (pipe), particularly nano wire (pipe), the latter, by these nano wires
The array that (pipe) is formed can have super-hydrophobic or superoleophobic structure, and then cause the fluid treating device to have automatically cleaning work(
Energy.
Preferably, the partially or fully table on the partially or fully surface of the linear body and described matrix can also be passed through
Face sets the coating that the suitable low-surface energy substance as known to industry is formed, or is directly formed using hydrophobic material described linear
Body, matrix, so as to make it have ultra-hydrophobicity, self-cleaning performance etc..
For example, described nemutogen can preferably be selected from carbon nanocoils, CNT, ZnO nano-wire, GaN nano wire, TiO2
Nano wire, Ag nano wires, Au nano wires etc., and not limited to this.
Wherein, described nemutogen can by the external world transfer, growth in situ (such as chemically grown, electrochemical growth) or
The modes such as deposition (such as physics, chemical vapor deposition, electro-deposition) are fixed on described matrix surface or in described matrix surface
Growth is formed.
Wherein, the fluid intake of the fluid passage has rule or irregular shape, such as polygon (rectangle, rhombus
Or it is other), circular or ellipse etc., it can simply be adjusted according to the demand of practical application.
In some embodiments, described matrix have mutually back to first surface and second surface, the fluid passage
Fluid intake be distributed in the first surface of described matrix.
In some embodiments, the complex root upright lines being intervally installed also are distributed with the first surface of described matrix
Body, the complex root are erect nemutogen and set around the fluid passage.
In some embodiments, described fluid treating device may also include flow impedance portion, the flow impedance portion
The surface (it is the 3rd surface that can name it) being oppositely arranged with the first surface with described matrix, and the complex root is erect
Nemutogen one end is fixedly installed on the first surface of described matrix, and company is fixed on the other end and the 3rd surface in the flow impedance portion
Connect, wherein adjacent the distance between nemutogen of erectting is more than 0 but less than the particle diameter of the selected particle.
Wherein, the flow impedance portion can be variform, such as can be sheet, shell shape, cuboid shape, more
Face body shape etc..Preferably, the complex root is erect and cooperatively forms a fluid passage between nemutogen, flow impedance portion and matrix,
The fluid for the fluid passage that pending fluid only can enter the first surface for being distributed in described matrix via the fluid passage enters
Mouthful, the first time processing of convection body is realized, is entered back into afterwards in the fluid passage being distributed on matrix, and by foregoing linear body
Aggregation carries out second and handled.
Wherein, the setting form in the flow impedance portion can also be it is various, for example, it can entirety and described matrix
But it is arranged at intervals, locally can be also connected with described matrix, or even in some cases, is also integrally machined shape with described matrix
Into.
In certain embodiments, the fluid intake of the fluid passage and complex root erect nemutogen and are distributed in the fluid
Stop part is in the orthographic projection of the first surface of described matrix.
More preferable, the draw ratio for erectting nemutogen is 4：1~200000：1.
More preferable, adjacent the distance between nemutogen and the ratio of the length of the setting nemutogen erect is 1：4
~1：200000.
It is more preferable, the setting nemutogen can have with aforementioned linear body identical material, structure etc..
Wherein, the material selection range of each several part is various in the fluid treating device, can be inorganic material,
It can be organic material.For example, metal, silicon chip, ceramics, polymer etc. can be selected from, and not limited to this.When these parts are all selected
Select when using inorganic material, the fluid treating device also has the characteristic of resistance to temperature change, can handle high temperature and low temperature stream
Body.
In some more preferred embodiment, the first surface on described matrix surface, particularly described matrix is also set
Function material layer is equipped with, the material of the function material layer includes catalysis material, anti-biotic material etc., and not limited to this.Example
Such as, more typical catalysis material can be titanium dioxide etc., in the fluid treating device convection current comprising this kind of function material
When body is handled, if being aided with ultraviolet lighting etc., some organic pollutions that can also be in convection body etc. carry out photocatalytic degradation, real
The multiple purifying of existing convection body., can be with by it in another example more typical anti-biotic material can be the noble metals such as Au, Ag
In the processing procedure of fluid, bacterium in fluid, virus etc. are synchronously killed.
Further, for the benefit of light penetrates, and the members or all components in the fluid treating device can be by
Transparent material is made.
A kind of method for preparing the fluid treating device that the other side of the embodiment of the present application proposes includes：
There is provided with mutually back to first surface and second surface substrate；
The substrate is processed, so as to form more than one fluid passage, the fluid passage over the substrate
With fluid intake and fluid issuing, the fluid intake of the fluid passage is distributed in the first surface of the substrate；
The Seed Layer for growing the nemutogen is covered on less than the inwall of the fluid passage；
Grown based on the Seed Layer in the fluid passage and form complex root nemutogen, the complex root nemutogen gathers
Collective has loose structure, to flow through the fluid passage, be contaminated with the fluid of selected particle and handle, and institute
The diameter for stating loose structure inside aperture is more than 0 but less than the particle diameter of the selected particle.
In some more specifically embodiment, the preparation method may also include：
The kind for growing the nemutogen is covered on the first surface of the substrate and the inwall of the fluid passage
Sublayer；
Complex root is formed in the first surface of the substrate and the fluid passage grown on interior walls based on the Seed Layer
Nemutogen.
Preferably, the preparation method includes：Formed again in the fluid passage grown on interior walls based on the Seed Layer
Several nemutogens radially extended, the complex root nemutogen intersect to form described loose structure.
Preferably, the preparation method includes：Grow to be formed again in the first surface of the substrate based on the Seed Layer
The nemutogen of several settings, the complex root are erect nemutogen and are intervally installed, and the distance between adjacent setting nemutogen is big
In 0 but less than the selected particle particle diameter.
More preferable, the nemutogen, setting nemutogen can have and aforementioned linear body identical material, structure
Deng.
The technical scheme of the application is further described below with reference to accompanying drawing and some embodiments.
Refer to shown in Fig. 2, in the embodiment of the application, a kind of fluid treating device is mainly to being contaminated with selecting
The fluid for determining particle is handled, and it includes matrix 1, described matrix 1 have mutually back to first surface 101 and second surface
102, and some through holes 103 as fluid passage are distributed with described matrix 1.Be distributed with any through hole 103 it is some it is micro-/
Nano wire/pipe 2 (i.e. any of micro wire, micron tube, nano wire, nanotube or a variety of), especially nano wire/pipe (is received
Rice noodles and/or nanotube).The micro-/ nano line/one end of pipe 2 is fixed on the hole wall of the through hole 103, and the other end is described in
Through hole radially extends.These micro-/ nano line/pipes 2 are assembled in the form of cross one another turns into loose structure.The loose structure
The diameter of inside aperture is more than 0 but less than the particle diameter of the selected particle.
Again referring to Fig. 3, the loose structure is using the view overlooked as the grid knot that is distributed in the through hole 103
Structure.
Wherein, because foregoing micro-/ nano line/pipe 2 has larger ratio of height to diameter (or draw ratio) so that these micro-/ nanos
Line/pipe 2 can be densely arranged in the through hole, and distribution density, length by adjusting these micro-/ nano line/pipes 2 etc., i.e.,
Processing can be purged by the particle of different-grain diameter scope in convection body 3, particularly, when use be nano wire/pipe when, pass through
By the hole pore size control that these nano wire/pipes intersect to form in nanoscale, atomic small in fluid can be not only removed
Grain, and because nano wire/pipe diameter itself is minimum, it is controlled in very low level, and shape for the resistance of fluid
Into very big fluid flux, far superior to existing perforated membrane, fluid treating device based on transverse flow channels etc..
Wherein, described matrix 1 can have larger thickness, and nationality is to further enhance the machinery of the fluid treating device
Intensity, make the pressure-resistant fluid treating device, resistant to bending, impact resistant, impact resistance, and then it is applied in a variety of environment
And will not damage, such as can apply to handle high pressure, high-velocity fluid, this function is that existing perforated membrane etc. can not
Reach.
Particularly, because described micro-/ nano line/pipe 2 is distributed in the through hole 103 so that these micro-/ nano lines/
Pipe 2 is substantially subjected to the protection of matrix 1, and then, even if the fluid treating device is under pressure, will not also make this slightly/
Nano wire/pipe 2 is damaged.
Wherein, the material selection range of the fluid treating device each several part (101,102,103) is various, Ke Yishi
Inorganic material or organic material, such as can be metal, ceramics, polymer, etc..When these parts all select to make
During with inorganic material, the fluid treating device also has the characteristic of resistance to temperature change, can handle high temperature and cryogen.
Using previous designs fluid treating device can (ultrasound) cleaning, be used for multiple times, and remain on good stream
Body disposal ability.
When being handled using described fluid treating device convection body, the fluid containing impurity particle is stated before entry
During loose structure, wherein particle diameter is more than particle (or some drops incompatible with fluid, such as the water in air of certain numerical value
Water droplet in drop or oil) it is blocked in outside previous porous structure, fluid flows out from through hole 103 afterwards, realizes convection body
Purification and/or the enriching and recovering to required particle (drop).
In some concrete application schemes of the embodiment, the diameter of foregoing micro-/ nano line/pipe 2 can be the μ of 1nm~500
m。
In some concrete application schemes of the embodiment, the aperture of aforementioned through-hole 103 can be 1 μm~1mm.
In some concrete application schemes of the embodiment, the thickness of aforementioned substrates can be more than 1 μm.
The lateral cross section structure of foregoing nano wire can be rule or irregular shape, such as can be polygon (three
Angular, quadrangle is other), circular, ellipse, star etc..
Foregoing micro-/ nano line/pipe 2 can be regular or irregular, uniform or heterogeneous is distributed in the through hole 103.
Foregoing micro-/ nano line/pipe 2 can preferably be selected from carbon nanocoils, CNT, ZnO nano-wire, GaN nano wire,
TiO2Nano wire, Ag nano wires, Au nano wires etc., and not limited to this.
Foregoing micro-/ nano line/pipe 2 can by the external world transfer, growth in situ (such as chemically grown, electrochemical growth) or
The modes such as deposition (such as physics, chemical vapor deposition, electro-deposition) are formed in growth in situ on the inwall of through hole 103.
The shape shape of lateral cross section (particularly) of aforementioned through-hole 103 can be various, such as can be circular, just
Square, rectangle, rhombus, polygon or Else Rule or irregular shape.
In some concrete application schemes of the embodiment, foregoing micro-/ nano line/pipe 2 can be by catalysis material or tool
The material for having antibacterial, sterilizing function is formed, or, foregoing micro-/ nano line/pipe 2 can also be surface covered with catalysis material
Or the coating that the material with sterilization, antibacterial functions is formed.
For example, foregoing micro-/ nano line/pipe 2 can use ZnO nano-wire, GaN nano wire, TiO2 nano wires etc. to be urged with light
The nano wire of the property of change, under light auxiliary irradiation, the organic matter in the fluid that can degrade.
For example, foregoing micro-/ nano line/pipe 2 can use Ag nano wires, Au nano wires etc., to kill the bacterium in fluid, disease
Poison, microorganism.
In some concrete application schemes of the embodiment, the surface of described matrix 1, particularly on its first surface 101
It is also provided with layers of photo-catalytic material or anti-biotic material layer etc..
When being handled with the fluid treating device convection body comprising layers of photo-catalytic material, if being aided with ultraviolet lighting etc.,
Some organic pollutions that can also be in convection body etc. carry out photocatalytic degradation, realize the multiple purifying of convection body.
Wherein, for the benefit of light penetrates, members in the fluid treating device or all can be by
Transparent material is made.
Wherein, more typical catalysis material can be titanium dioxide etc., but not limited to this.
Wherein, to form the layers of photo-catalytic material, those skilled in the art can use various ways known to industry,
Such as (spin coating, spraying, printing etc.) is coated with, is physically or chemically vapor-deposited (such as MOCVD, PECVD, ald), splashes
Penetrate etc., and not limited to this.
Wherein, the thickness of the layers of photo-catalytic material can be controlled in nanoscale, to reduce it to the fluid as far as possible
The influence of the fluid flux of processing unit.
And when being handled with the fluid treating device convection body comprising anti-biotic material layer, can be in the treated of fluid
Cheng Zhong, bacterium in fluid, virus etc. are synchronously killed, realize the multiple purifying of convection body.
Wherein, more typical anti-biotic material can be noble metals such as Au, Ag etc., but not limited to this.
Wherein, to form the anti-biotic material layer, those skilled in the art can use various ways, example known to industry
Such as it is coated with (spin coating, spraying, printing), is physically or chemically vapor-deposited (such as MOCVD, PECVD, ald), sputtering
Etc., and not limited to this.
Wherein, the thickness of the anti-biotic material layer can be controlled in nanoscale, with as far as possible reduce its to the fluid at
Manage the influence of the fluid flux of device.
One of preferred embodiment as the embodiment, it can also set and be spaced in the first surface of described matrix
More setting nano wires, these nano wires can surround as fluid passage aforementioned through-hole setting.
More preferable, these draw ratios for erectting nano wire are 4：1~200000：1, it is adjacent setting nano wire between
The ratio of distance and the length of the setting nano wire is 1：4~1：200000.
By using this structure and the setting nano wire of distributional pattern, multiple setting nano wires can be made intensive can to arrange
(proportion is few certainly in unit area for lug boss), is handled, while also assign beneficial to the molecule in convection body
The larger fluid flux of the fluid treating device (erects the hole between nano wire than setting nano wire own vol more
Greatly).
More preferable, the setting nano wire can have and the foregoing identical material of micro-/ nano line/pipe 2, size, knot
Structure etc..
Particularly, if with reference to known to industry scheme, the carry out such as the arrangement density of foregoing setting nano wire is suitable
Design, is allowed to form nano-wire array, can also be allowed to form super-drainage structure, superoleophobic structure, can not only remove in fluid
Particle, and can also be by automatic cleaning action, the particle for making to be blocked can not gather on the fluid treating device surface.
Wherein, because described matrix can have larger thickness so that foregoing setting nano wire can obtain preferable support.
One of preferred embodiment as the embodiment, also on these foregoing setting nano wires fluid can be set to hinder
Stopper, the flow impedance portion can (it be the 3rd table that can name it with the surface that the first surface with described matrix is oppositely arranged
Face), and the complex root erects the first surface that nemutogen one end is fixedly installed on described matrix, the other end and the fluid
3rd surface of stop part is fixedly connected, wherein the distance between adjacent setting nemutogen is more than 0 but is less than the selected particle
Particle diameter.
Wherein, the flow impedance portion can be variform, such as can be sheet, shell shape, cuboid shape, more
Face body shape etc..
Preferably, these foregoing are erect and cooperatively form a fluid passage between nano wire, flow impedance portion and matrix, treat
The fluid of processing can only enter the fluid passage (through hole 103) for the first surface for being distributed in described matrix via the fluid passage
Fluid intake, the first time processing of convection body is realized, is entered back into afterwards in the fluid passage being distributed on matrix, and by foregoing
The aggregation of micro-/ nano line/pipe 2 carries out second and handled, and can so realize the multi task process of convection body.
Wherein, by carrying out certain design to these foregoing spacing for erectting nano wire, it is allowed to and foregoing micro-/ nano
The aperture of the hole that line/pipe 2 intersects to form is different, particularly make to be more than the spacing between the setting nano wire it is described it is micro-/
The aperture for the hole that nano wire/pipe 2 intersects to form, it can also realize the classification processing of different size particle in convection body.
Wherein, the setting form in the flow impedance portion can also be it is various, for example, it can entirety and described matrix
But it is arranged at intervals, locally can be also connected with described matrix, or even in some cases, is also integrally machined shape with described matrix
Into.
Wherein, the fluid intake of the fluid passage (through hole 103) and more setting nano wires can be distributed in the fluid
Stop part is in the orthographic projection of the first surface of described matrix.
The shape of aforesaid fluid stop part can be various, such as can be circular, square, rectangle or other shapes
Shape.
The material of aforesaid fluid stop part can be selected from metal, nonmetallic, organic material, inorganic material etc., such as silicon chip,
Polymer, ceramics etc., and not limited to this.
More preferable, foregoing catalysis material, sterilization material etc. can be also distributed with aforesaid fluid stop part surface, or
Person, aforesaid fluid stop part surface integrally can be also made up of foregoing catalysis material, sterilization material etc..
More preferable, aforesaid fluid stop part can also have local transparent structure, or overall is transparent, with for example
Light is injected.
The fluid treating device of the application can prepare by physics, chemical method, such as can be chemically grown
Method, Physical Processing method etc., particularly MEMS (MEMS, Microelectromechanical Systems) method etc..
For example, referring to shown in Fig. 4, in this embodiment, a kind of preparation technology of fluid treating device can be included such as
Lower step：
S1：Patterned photoresist mask is set in the first surface of substrate (such as silicon chip), it includes and makes micro-nano by lithography
The lines of metrical scale；
S2：The first surface of the substrate is performed etching using the photoresist mask, so as to be formed through the lining
Bottom first surface and with the first surface mutually back to second surface some through holes, to as fluid passage；
S3：The kind for micro-/ nano line/pipe growth is deposited on the inwall of fluid passage and the first surface of the substrate
Sublayer；
S4：Growth forms more micro-/ nano line/pipes in the Seed Layer, controls the growth conditions of micro-/ nano line/pipe,
So as to grow to form more be spaced setting micro-/ nano line/pipes in the first surface of the substrate, and lead in the fluid
Growth forms some micro-/ nano line/pipes radially extended in road, the more micro-/ nano lines in the fluid passage/manage that
This intersects, and forms the intersection grid of micro-nano-scale；
S5：Remove the micro-/ nano line/pipe (can also retain) for the first surface for being distributed in the substrate；
S6：Scribing, encapsulation, fluid treating device is made.
The lithographic method used in These steps can be photoetching, Mechanical lithography, dry etching, wet etching etc..
For example, in abovementioned steps, forming the method for the photoresist mask of graphical (nano graph) includes：Photoetching skill
Art, nanometer bead mask technique, nanometer (metal) particle mask technology etc., and not limited to this.
For example, in abovementioned steps, can be rotten by mode known to industry, such as RIE, ICP, wet etching, electrochemistry
Erosion etc. etches fluid passage etc..
Obviously, the preparation technology of the application fluid treating device is simple controllable, is adapted to mass large-scale production.
It should be appreciated that above-described embodiment is only the technical concepts and features for illustrating the application, its object is to allow be familiar with this
The personage of item technology can understand present context and implement according to this, and the protection domain of the application can not be limited with this.It is all
The equivalent change or modification made according to the application Spirit Essence, it should all cover within the protection domain of the application.
Claims (10)
- A kind of 1. fluid treating device, it is characterised in that including：Matrix with fluid passage, andThe aggregation of complex root nemutogen, to flow through the fluid passage, be contaminated with the fluid of selected particle Reason；The aggregation is distributed in the fluid passage, and has loose structure, and the diameter of the loose structure inside aperture is big In 0 but less than the selected particle particle diameter.
- 2. fluid treating device according to claim 1, it is characterised in that：Described nemutogen one end leads to the fluid The inwall in road is fixedly connected, and the other end radially extends along the fluid passage；And/or the complex root nemutogen is mutually handed over Pitch or be interlaced with one another to form the loose structure；Or the complex root nemutogen is intervally installed and parallel arrangement is formed The loose structure.
- 3. fluid treating device according to claim 1, it is characterised in that：Described matrix have mutually back to first surface And second surface, the fluid intake of the fluid passage are distributed in the first surface of described matrix.
- 4. fluid treating device according to claim 3, it is characterised in that：That are also distributed with the first surface of described matrix This spaced complex root erects nemutogen, and the complex root is erect nemutogen and set around the fluid passage.
- 5. fluid treating device according to claim 4, it is characterised in that also including flow impedance portion, the flow impedance Portion has the 3rd surface that the first surface with described matrix is oppositely arranged, and the complex root is erect nemutogen one end and fixed The first surface of described matrix is arranged at, the other end is fixedly connected with the 3rd surface in the flow impedance portion, wherein adjacent perpendicular The distance between vertical nemutogen is more than 0 but less than the particle diameter of the selected particle.
- 6. fluid treating device according to claim 5, it is characterised in that：The fluid intake and plural number of the fluid passage Root erects nemutogen and is distributed in the flow impedance portion in the orthographic projection of the first surface of described matrix.
- 7. fluid treating device according to claim 4, it is characterised in that：The draw ratio for erectting nemutogen is 4：1 ~200000：1；And/or adjacent the distance between nemutogen and the ratio of the length of the setting nemutogen erect is 1：4~ 1：200000；And/or a diameter of 1nm~500 μm of the nemutogen.
- 8. fluid treating device according to claim 1, it is characterised in that：The nemutogen is selected from nano wire or nanometer Pipe.
- 9. according to the fluid treating device any one of claim 1-8, it is characterised in that：Extremely it is less than the linear body surface Catalysis material or anti-biotic material is also distributed with face；And/or the nemutogen includes carbon nanocoils, CNT, ZnO nano Line, GaN nano wire, TiO2Any of nano wire, Ag nano wires, Au nano wires or two or more combinations.
- 10. according to the fluid treating device any one of claim 1-8, it is characterised in that：First table of described matrix Face is additionally provided with function material layer, and the material of the function material layer includes catalysis material or anti-biotic material；It is and/or described At least part component in fluid treating device has transparent configuration；And/or the fluid intake of the fluid passage has rule Or irregular shape, the regular shape include polygon, circle or ellipse；And/or the aperture of the fluid passage is 1 μ M~1mm；And/or the thickness of described matrix is more than 1 μm.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610398435.5A CN107469476A (en) | 2016-06-07 | 2016-06-07 | Fluid treating device |
| CN202310697963.0A CN116747615B (en) | 2016-06-07 | 2016-06-07 | Fluid treatment device and preparation process thereof |
| PCT/CN2017/086780 WO2017211215A1 (en) | 2016-06-07 | 2017-06-01 | Fluid processing device and preparation method therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610398435.5A CN107469476A (en) | 2016-06-07 | 2016-06-07 | Fluid treating device |
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| CN202310697963.0A Division CN116747615B (en) | 2016-06-07 | 2016-06-07 | Fluid treatment device and preparation process thereof |
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| CN1658972A (en) * | 2002-06-07 | 2005-08-24 | 阿米克股份公司 | Micro fluidic structures |
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| US7385231B2 (en) * | 2005-08-31 | 2008-06-10 | Fujifilmcorporation | Porous thin-film-deposition substrate, electron emitting element, methods of producing them, and switching element and display element |
| MY190580A (en) * | 2010-04-23 | 2022-04-27 | Mimos Berhad | Silicon nanowire based filter and method of fabricating thereof |
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| CN1658972A (en) * | 2002-06-07 | 2005-08-24 | 阿米克股份公司 | Micro fluidic structures |
| US20040262636A1 (en) * | 2002-12-09 | 2004-12-30 | The Regents Of The University Of California | Fluidic nanotubes and devices |
| US20070190880A1 (en) * | 2004-02-02 | 2007-08-16 | Nanosys, Inc. | Porous substrates, articles, systems and compositions comprising nanofibers and methods of their use and production |
| CN101124659A (en) * | 2004-07-07 | 2008-02-13 | 纳米系统公司 | Systems and methods for harvesting and integrating nanowires |
| US20060285996A1 (en) * | 2005-06-20 | 2006-12-21 | Amic Ab | Method and means for creating fluid transport |
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| CN206881318U (en) * | 2016-06-08 | 2018-01-16 | 杨国勇 | Fluid treating device |
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| CN116747615A (en) | 2023-09-15 |
| CN116747615B (en) | 2024-09-03 |
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