CN107427743A - The degassing decision method for the treatment of fluid - Google Patents

Abstract

No matter species of gas etc. and the degassing degree for reliably judging the treatment fluid for handling the operation object that there is the fine pattern being made up of groove, hole on surface.The degassing decision method of the treatment fluid of the present invention is in the degassing process groove of the degassing of the gas included for handling the treatment fluid for the operation object for having the fine pattern being made up of groove, hole on surface, impregnate the simulation job object for possessing concavo-convex fine pattern in need on surface of the degassing degree for judging the above-mentioned treatment fluid in the degassing process groove, according to the time change of the surface state of the simulation job object, the degassing degree of above-mentioned treatment fluid is judged.

Description

Degassing Judgment Method of Treatment Liquid

technical field

The present invention relates to a method for judging the degassing of a treatment liquid for judging the degree of degassing of the treatment liquid when processing an object having a fine pattern of grooves and holes on its surface.

Background technique

In the processing of semiconductor circuit devices and multilayer circuit boards, etc., treatment using treatment liquids such as plating and etching is performed, and dissolved gases dissolved in the liquids of these treatment liquids are removed in order to improve the accuracy of fine processing. As a device for removing dissolved gas, a degassing device is used that inserts a degassing module into a liquid supply line, connects a vacuum suction line connected to a vacuum pump to the degassing module, and operates the vacuum pump. The degassing module has, for example, a structure in which a predetermined degassing is performed by placing the outside of a gas separation membrane using a hollow fiber in a vacuum state (see, for example, Patent Documents 1 and 2).

Patent Document 1: Japanese Patent No. 4043192

Patent Document 2: Japanese Patent Application Laid-Open No. 9-85012

In such a device equipped with a degassing device, it is known to have a dissolved oxygen concentration sensor arranged in the circulation path of the treatment liquid, and measure the oxygen concentration dissolved in the treatment liquid as the degree of degassing based on the value indicated by the dissolved oxygen concentration sensor. Mechanism device. However, for example, in the degassing device described in Patent Document 1, the position of the dissolved oxygen concentration sensor is on the path of the circulating treatment liquid, immediately before the degassing module, and does not measure the treatment liquid circulating and stagnant in the treatment tank. The dissolved oxygen concentration of itself is measured, and the dissolved oxygen concentration of the treatment liquid from the catch tank overflowing the tank itself is measured. Therefore, since the dissolved oxygen concentration of the treatment liquid was measured in a state where air bubbles were entangled in the trap tank, the actual dissolved gas concentration of the treatment liquid was not measured.

In addition, in the device described in Patent Document 2, although the position of the sensor of the dissolved gas concentration in the liquid is to arrange the sensor between the degasser and the degassed liquid processing unit, it is also branched from the liquid supply line. Sensors are arranged at positions, so only the indirect dissolved oxygen concentration is measured. For example, when the concentration of both oxygen and nitrogen is required for multiple types of gases, it is necessary to increase the number of sensors, and the measurement also has a time lag.

Contents of the invention

Therefore, the purpose of the degassing determination method of the processing liquid of the present invention is to provide a method for reliably determining the degree of degassing of the processing liquid for processing an object having a fine pattern of grooves and holes on the surface regardless of the type of gas. The degassing determination method of the treatment liquid.

In order to solve the above-mentioned technical problems, the method for judging degassing of a processing liquid according to the present invention is characterized in that the degassing of the gas contained in the processing liquid for processing an object having a fine pattern of grooves and holes on the surface is carried out. In the degassing treatment tank of gas, immerse a simulated work object having a fine pattern of concavity and convexity on the surface for judging the degree of degassing of the above-mentioned treatment liquid in the degassing treatment tank, according to the simulated work object The time change of the surface state is used to determine the degree of degassing of the treatment liquid.

According to the present invention, the simulated work object having a fine pattern of concavo-convexity is dipped in the degassing treatment tank for degassing the gas contained in the treatment liquid. The type of gas is used to measure the degree of degassing of the above-mentioned treatment liquid reliably without measurement time lag or the like.

Description of drawings

FIG. 1 is a schematic diagram showing a configuration example of a plating apparatus using a method for determining degassing of a treatment liquid according to a first embodiment of the present invention.

2 is a perspective view partially broken away showing main parts of an example of a simulated work object used in the method for determining degassing of a treatment liquid according to the first embodiment of the present invention.

FIG. 3 is a schematic diagram showing time changes during measurement of an outgassing degree of an example of the simulated work object shown in FIG. 2 .

4 is a graph showing the relationship between the dissolved oxygen concentration in the treatment liquid and the time until the simulated work object changes.

5 is a schematic diagram showing a configuration example of a plating apparatus using a method for determining degassing of a treatment liquid according to a second embodiment of the present invention.

6 is a schematic diagram showing a configuration example of a treatment device using a method for determining outgassing of a treatment liquid according to a third embodiment of the present invention.

detailed description

first embodiment

The degassing determination method of the treatment liquid according to the first embodiment of the present invention will be described with reference to the drawings. This embodiment is an example of degassing the pretreatment liquid in the electroplating process, and is a method of immersing a simulated object having a fine pattern of unevenness on the surface and making a reliable determination in a short time. In addition, the present invention is not limited to a pretreatment solution for electroplating as a treatment solution for treating an object having a fine pattern of grooves and holes on the surface, and can also be applied to various other treatments that require degassing. For example, of course, it can also be applied to developing solutions, rinsing solutions, photoresist solutions, cleaning solutions, etching solutions, resist removing solutions, electrolyte solutions, various Medicinal solution, etc.

FIG. 1 is a schematic diagram showing a configuration example of a plating apparatus using a method for determining degassing of a treatment liquid according to a first embodiment. The degassing treatment tank 10 serving as a pretreatment tank is configured to store the electroplating pretreatment liquid Q1 in circulation, and has _a size that can sufficiently immerse a semiconductor wafer with a diameter of 300 mm, for example. Around the degassing treatment tank 10, _a collection tank 12 for collecting the overflowed pretreatment liquid Q1 is provided. The pretreatment liquid Q ₁ from the catch tank 12 is sent to the filter 18 via the liquid delivery pump 14 and the temperature regulator 16, and the pretreatment liquid Q ₁ passed through the filter 18 is circulated to the Degassing tank 10.

The degassing device is composed of a degassing membrane module 26 and a vacuum pump 28 connected thereto. The degassing membrane module 26 uses a hollow fiber membrane and the outside of the membrane is vacuumed by the vacuum pump ₂₈ to degas the pretreatment liquid Q1. . By degassing the pretreatment liquid Q1, when the pretreatment liquid Q1 impregnates the work object W having _a fine pattern _of the desired unevenness on the surface, the surface of the work object W having the desired unevenness remains. Bubbles in the fine pattern dissolve into the pretreatment liquid Q ₁ , and as a result, the pretreatment liquid Q ₁ intrudes into the pattern. Thereafter, when the object W is immersed in the electroplating solution _Q2 , the pretreatment liquid Q1 having _a fine pattern of concavities and convexities that invades the object W is replaced with the electroplating solution, and the electroplating solution also sufficiently penetrates into the microscopic surface. The unevenness can prevent the occurrence of poor plating.

The device on the right side of Fig. 1 is the electroplating tank 40 that has accommodated the electroplating solution Q ₂ , is the same as the degassing treatment tank 10 as the pretreatment tank, and is provided with a trap for collecting the overflowing electroplating solution Q ₂ around the electroplating tank 40. Sump 42. The electroplating treatment solution Q ₂ from the catch tank 42 is sent to the filter 48 through the liquid delivery pump 44 and the temperature regulator 46 , and the electroplating treatment solution Q ₂ passing through the filter 48 is circulated to the electroplating tank 40 through the flow meter 54 . The object W held by the substrate holder 56 is immersed in the plating solution Q ₂ in the plating tank 40 , and the anode electrodes 58 are arranged to face the object W, and a voltage is applied between the anode electrodes 58 and the substrate holder 56 Perform electrolytic plating. In the case of treating with the overplating solution _Q2 after the treatment with the pretreatment solution Q1, the plating solution _Q2 penetrates into the surface _of the object W by replacement after the _pretreatment solution Q1 penetrates into the fine unevenness of the surface. , so it is possible to prevent the occurrence of poor plating.

In order to pretreat well, the dissolved gas concentration of the pretreatment liquid Q1 becomes _a problem, and it is desired to accurately measure the value _of the dissolved gas concentration of the pretreatment liquid Q1. In a device in which a sensor is placed in the circulation path of the pretreatment liquid Q1 as in _a conventional device, the gas concentration _of the pretreatment liquid Q1 after trapping, that is, the degree of degassing, cannot be prevented from entraining air bubbles at the time of trapping. , but cannot correctly measure the degree of degassing of the pretreatment liquid Q ₁ itself.

However, in the electroplating apparatus using the degassing determination method of the processing liquid of this embodiment, as shown in FIG. The degree of outgassing is measured based on the time until the air bubbles formed on the surface of the simulated work object 20 disappear. As shown in FIG. 2, the simulated work object 20 has, for example, a plate-shaped holding member 22 made of metal such as stainless steel, glass, or resin, and a porous material such as a foamed resin material such as a resin sponge material is formed on one side. The structure of the surface part 21 made of material. The air bubbles formed on the surface mean air bubbles that remain in the voids on the surface of the porous material and adhere to the surface in cooperation with impregnation. The surface part 21 is a part to be placed in a tank for degassing treatment, and to measure the degree of degassing based on the disappearance time of the air bubbles formed on the surface. Like the work object W, it has unevenness on the surface, and it is necessary even temporarily. Air bubbles remain on the surface. Therefore, instead of using a material having a relatively smooth surface, the surface portion 21 is formed of a porous material such as a foamed resin material such as a resin sponge material. The diameter of the fine voids formed by the porous structure of the surface portion 21 is desirably in the range of 0.01 mm to 2.0 mm, and more preferably has a diameter of the voids in the range of 0.1 mm to 2.0 mm. When the size of the void is too small, it is difficult to determine the disappearance of the bubbles. When the bubbles are too large, such as 3mm and 4mm, since the disappearance of each bubble occupies a large area, it is easy to cause errors in judgment. When immersing the dummy work object 20 in the degassing treatment tank 10 , the surface portion 21 held by the holding member 22 is immersed together with the holding member 22 .

In the present embodiment, a sheet-like resin sponge material is divided into rectangular shapes and attached to one surface of the holding member 22 . The shape of the surface portion 21 is not limited to the illustrated rectangular shape, and may be a square, another polygon, a circle, an ellipse, or the like. In addition, although the example in which one surface portion 21 is formed on one holding member 22 has been described, a plurality of sheets having different degrees of bubble generation may be arranged to form the surface portion 21 . In addition, the surface portion 21 can also be attached to the holding member 22 in a replaceable manner. The foamed resin constituting the surface portion 21 is not particularly limited as long as it can be foamed by heating or the like, and known thermoplastic resins can be used. Specifically, polystyrene-based resins, polyolefin-based resins, poly(meth)acrylic resins, polyphenylene ether-based resins, polycarbonate-based resins, polyester-based resins (for example, polylactic acid-based resins, PET, etc.) etc. These resin components may be used alone or in combination. In addition, (meth)acrylic acid means acrylic acid or methacrylic acid. In addition, a sponge sheet of silicone rubber, a sponge sheet of fluororubber, or the like can also be used as the foamed resin material constituting the surface portion 21 . The surface portion 21 is observed with the optical sensor 34 or visually as will be described later, so it is desirable to have a surface color different from the reflected light of the air bubbles so that it can be seen when the air bubbles are formed on the surface and when the air bubbles disappear from the surface. Surfaces reflect light differently. For example, if the surface color is a darker color, black, blue, orange, etc., it is easier to distinguish. It is also possible to apply desired coloring to the surface portion 21 within a range that does not damage minute unevenness on the surface.

Here, an example of a setting method for making the degassing condition of the simulated work object 20 close to the assumed work object W will be briefly described. For example, if the work object W processed in the degassing treatment tank 10 is a semiconductor wafer of Φ300 mm, then under the assumption that bubbles are largely generated in the semiconductor wafer, the effective diameter of the semiconductor wafer is Φ294 mm. , its effective area is 67852mm ² . In addition, the aperture ratio of the opening of the wafer and the groove of the pattern when used as wiring, etc. is 30%, and the depth of the hole and groove of the pattern is 0.1 mm. In this way, assuming that all patterns such as grooves and holes are filled with air bubbles, it can be calculated that the volume of the air bubbles is about 2036 mm ³ . On the other hand, if the structure of the surface portion 21 of the simulated work object 20 is four times the expansion rate and the original material thickness is 0.5 mm, its thickness is 2 mm, and if it is assumed to be 50 mm square, the effective area is 2500 mm ² , However, considering that the effective volume is from the surface in contact with the liquid to a depth of 1 mm, and the side wall part is in contact with the liquid at a depth of about 1 mm, the effective volume is roughly calculated to be about 2696 mm ³ . Here, it is assumed that bubbles enter the entire effective volume. If 3/4 of the effective volume is voids, the calculated volume is 2022 mm ³ , which is about the same as the calculated volume of bubbles in a semiconductor wafer of 2036 mm ³ . In other words, if the structure of the surface portion 21 is 2 mm thick and 50 mm square as the simulated work object 20, the amount of air bubbles at the same level can be expected compared with the case where the work object W is a Φ300 mm semiconductor wafer. The simulating disappearance of air bubbles in the work object 20 is close to measuring the disappearance of air bubbles contained in the work object W itself.

Here, the air bubbles on the surface portion 21 of the simulated work object 20 will be described. As schematically shown in FIG. The surface part 21B in a state where a few air bubbles have fallen off, and the time-dependent migration of the surface part 21C in which the air bubbles disappear from the surface and almost the entire surface of the surface shows the surface of the material itself. It can be seen from experiments that the same transitions 21A, 21B, and 21C are sequentially shown regardless of the degree of dissolved gas. It can be seen that if the amount of dissolved gas is different, although the order of transitions 21A, 21B, and 21C itself does not change, the transition from the surface portion 21A The time involved in the state change to the surface portion 21C changes.

For example, in the case where the dissolved oxygen concentration is in the range of 0.6 to 2.2 [0 mg/L], after 30 seconds, the surface portion 21A becomes in the state of air bubbles, and after passing through the state of the surface portion 21B, the air bubbles disappear from the surface after 5 minutes. On the other hand, almost the entire surface of the surface appears in the state of the surface portion 21C of the surface of the material itself. In addition, when the dissolved oxygen concentration is about 3.2 [Omg/L], after 30 seconds, the surface portion 21A will be in the state of air bubbles, and after passing through the state of the surface portion 21B, it will become the surface portion where the air bubbles disappear from the surface after 8 minutes. 21C status. When the dissolved oxygen concentration is about 4.5 [Omg/L], after 30 seconds, the place that becomes the bubble state of the surface portion 21A does not change, but the state of the surface portion 21B finally becomes bubbles from the surface after 15 minutes. The state of the disappearing surface portion 21C. In addition, when the dissolved oxygen concentration is about 5.5 [Omg/L], after 30 seconds, the place where the bubble state of the surface portion 21A does not change, but the state of the surface portion 21B does not change after 30 minutes. Finally, the surface portion 21C is in a state where air bubbles disappear from the surface. That is, the temporal change of the surface state of the simulated work object 20 can be largely visualized by measuring the time from the start of immersion to the disappearance of the air bubbles formed on the surface of the simulated work object 20 from the surface at the start, as shown in FIG. 4 The graph showing the change of the exponential function shows the relationship between the concentration of dissolved oxygen in such a treatment liquid and the time until the simulated work object changes.

The relationship between the dissolved oxygen concentration shown in FIG. 4 and the time until the change of the simulated work object depends on the state of the fine pattern of the work object W, the size of the degassing treatment tank 10, the performance of the degassing device, and the pretreatment liquid. The capacity _of the circulation system of Q1 varies, but each degassing system exhibits a time variation with inherent reproducibility for a certain constant work object W. Therefore, for example, according to the graph of FIG. 4 , it can be seen that if the target dissolved oxygen concentration is 3.2 [0 mg/L], the air bubbles disappear after 8 minutes. In the case of the work object W, it suffices to immerse in the pretreatment liquid Q1 for about ₈ minutes.

In addition, the graph of FIG. 4 shows the relationship between the dissolved oxygen concentration and the time until the change of the simulated work object, but it shows the data obtained by the experiment. If it is set as the generation of bubbles in the fine pattern of the work object W If the conditions are close to the bubble generation conditions of the simulated object 20 , the temporal change of the air bubbles on the surface portion 21 of the simulated object 20 is almost a simulation of the actual object W. Here, the bubble itself is usually air, and the air contains not only oxygen, but also nitrogen, water vapor and other components. According to the method for judging the outgassing of the treatment liquid in this embodiment, the residual degree of bubbles itself is directly measured, so instead of just judging the concentration of dissolved oxygen as in the past, it is possible to perform reliable degassing that also fully considers components such as nitrogen gas and water vapor. Judgment close to the actual situation. In other words, according to the degassing determination method of the treatment liquid according to this embodiment, it is possible to directly measure the change of the bubble itself without requiring sensors for each type of gas.

In the method for judging degassing of the processing liquid in this embodiment, the temporal change of the surface state of the surface portion 21 of the simulated work object 20 can be measured with an optical monitor or visually observed on the surface of the simulated work object 20. 21 bubble changes. In this embodiment, an optical sensor 34 capable of measuring the light reflection amount of the surface portion 21 of the pseudo-work object 20 is disposed facing the surface portion 21 of the pseudo-work object 21 inside the degassing treatment tank 10 . If the change of the air bubbles on the surface portion 21 of the simulated work object 21 is measured based on the electrical signal from the optical sensor 34, the timing of the disappearance of the air bubbles on the surface portion 21 can be estimated, and the state _of the dissolved gas in the pretreatment liquid Q1 can be determined. . In addition, in the degassing treatment tank 10, a window portion 24 shown by a dotted line in FIG. 1 can be formed on the side wall of the degassing treatment tank 10. At this time, the operator can visually judge the timing of the disappearance of the bubbles. In addition, if the angle of light for observation is adjusted and the surface portion 21 of the dummy work object 20 is arranged at an angle that can be viewed from the liquid surface side of the treatment liquid, the arrangement of a window or the like can also be unnecessary.

In addition, in the first embodiment, for example, pure water is used as the pretreatment liquid Q ₁ , but it is not limited thereto. As the pretreatment liquid Q ₁ , there are, for example, water added with a surfactant, (acidic) degreasing agent, dilute sulfuric acid, etc. , hydrochloric acid, and a pre-dip solution obtained by removing metal components from the plating solution (methanesulfonic acid solution for methanesulfonic acid solder plating solution, etc.). In addition, the combined use of ultrasonic waves and the like is also considered for degassing. In addition, in the first embodiment, the degassing treatment tank 10 which collects the overflowing treatment liquid by the collection tank 12 has been described, but the degassing determination method of the treatment liquid according to the present invention can also be applied to The tank is a degassing treatment tank that collects the overflowing treatment liquid.

second embodiment

This embodiment is an example of degassing the liquid for electroplating treatment, and is a method of dipping a simulated object 80 having a fine pattern with desired unevenness on the surface into the electroplating tank 60 and making a reliable judgment in a short time. . In this embodiment, the plating tank 60 itself functions as a degassing treatment tank.

As shown in FIG. ₅ , the electroplating apparatus related to the degassing determination method of the processing liquid in this embodiment is the same as the electroplating apparatus on the right side of FIG. A catch tank 62 for collecting the overflowing electroplating solution Q ₂ is arranged around it. The electroplating treatment solution Q ₂ from the catch tank 62 is sent to the filter 68 via the liquid delivery pump 64 and the temperature regulator 66, and the electroplating treatment solution Q ₂ that has passed through the filter 68 circulates through the degassing membrane module 70 and the flow meter 74 to plating tank 60. The degassing device is composed of a degassing membrane module 70 and a vacuum pump 72 connected thereto, and performs required degassing of the electroplating solution Q ₂ . The object W held by the substrate holding tool 76 is immersed in the plating solution _Q2 in the plating tank 60, and the anode electrodes 78 are arranged to face the object W, and a gap is applied between the anode electrodes 78 and the substrate holding tool 76. Voltage for electrolytic plating. In addition, although the example of electrolytic plating was given in this embodiment, it is also possible to remove electrodes etc. and perform electroless plating.

As shown in FIG. 5 , in such an electroplating tank 60 , a simulated work object 80 having a desired concave-convex fine pattern on the surface can be immersed, and the outgassing can be measured based on the time until the air bubbles formed on the surface of the simulated work object 80 disappear. degree. The dummy work object 80 is the same as the dummy work object 20 of the above-mentioned first embodiment. Time measures the degree of outgassing. In addition, the disappearance phenomenon of the air bubbles on the surface portion 81 of the simulated work object 80 is the same as the disappearance phenomenon of the air bubbles on the surface portion 21 of the simulated work object 20, and the air bubbles on the surface portion 81 of the simulated work object 80 can pass through An unillustrated optical sensor can be judged visually.

In the present embodiment, since the determination using the dummy object 80 is directly performed in the plating tank 60 where the plating process is performed, it is possible to reliably measure the degree of outgassing without a time lag regardless of the type of gas.

third embodiment

This embodiment is _an example of degassing the pretreatment liquid Q1, which is a liquid for pretreatment of electroplating, and it is the measuring tank 94 functioning as a measuring part directly connected to the degassing treatment tank 61. A method of dipping a dummy work object 90 having a fine pattern of concavities and convexities into the pretreatment liquid Q ₁ to make a reliable judgment in a short time. In addition, for each component of the pretreatment device related to the degassing determination method of the treatment liquid according to the third embodiment shown in FIG. The same reference numerals are used, and repeated explanations are omitted.

As shown in FIG. 6, in the apparatus for pretreatment of electroplating, it is configured to have a measurement tank 94 directly connected to the degassing treatment tank 61 via _a return flow path 95, and the pretreatment liquid Q1 stored in the degassing treatment tank 61 Part of it flows back into the measuring tank 94. A discharge path 96 is provided on the upper end side _of the measuring tank 94 so that the pretreatment liquid Q1 overflowing the measuring tank 94 is collected in the collecting tank 62 .

As shown in FIG. 6 , it is possible to immerse a simulated work object 90 having a fine pattern of desired concavities and convexities on the surface in such a measuring tank 94, and measure the degassing time according to the time until the air bubbles formed on the surface of the simulated work object 90 disappear. gas level. The dummy work object 90 is the same as the dummy work object 20 of the above-mentioned first embodiment, and has a structure in which the surface portion 91 is attached to one side of the holding member 92, and is formed by a process until air bubbles formed on the surface portion 91 disappear from the liquid. time to determine the degree of outgassing. The disappearance phenomenon of the air bubbles on the surface portion 91 of the simulated work object 90 is the same as the disappearance phenomenon of the air bubbles on the surface portion 21 of the simulated work object 20, and the air bubbles on the surface portion 91 of the simulated work object 90 can pass through The light sensor shown or by visual inspection.

In the present embodiment, since determination using the dummy work object 90 is directly performed in the measurement tank 94, the degree of outgassing can be reliably measured without a time lag regardless of the type of gas. And, even if it is difficult to install the sensor of the degassing treatment tank or to install the window for visual observation, the measurement in the measurement tank 94 can be carried out, so the degassing determination method of the treatment liquid of the present invention can be made Used in many degassing tanks.

The degassing determination method of the treatment liquid of the present invention is not limited to the pretreatment liquid for electroplating or the electroplating treatment liquid, but can also be applied For other processing fluids that need to be degassed. For example, the present invention can also be applied to developing solutions, rinsing solutions, photoresist solutions, cleaning solutions, etching solutions, resist removing solutions, electrolyte solutions, various Medicinal solution, etc.

Explanation of reference signs

10...Degassing treatment tank; 12...Catching tank; 14, 44, 64...Liquid delivery pump; 16, 46, 66...Temperature regulator; 18, 48, 68...Filter; 26, 70...Degassing membrane module ;30, 54, 74...flow meter; 20, 80, 90...simulation work object; 21, 81, 91...surface part; 22, 82, 92...holding part; 60...plating tank; 58, 78...anode electrode ; 94...measurement tank; W...work object; Q ₁ ...pretreatment solution; Q ₂ ...plating solution.

Claims (13)

1. A method for judging degassing of a treatment liquid, characterized in that, In a degassing treatment tank for degassing the gas contained in the treatment liquid for treating the working object having a fine pattern of grooves and holes on the surface, immerse the above-mentioned treatment for judging the inside of the degassing treatment tank The degree of degassing of the liquid is a simulated object with a fine pattern of unevenness on the surface, and the degree of degassing of the treatment liquid is determined based on the temporal change of the surface state of the simulated object. 2. The method for judging degassing of the treatment liquid according to claim 1, wherein: The above-mentioned treatment liquid is a liquid for pretreatment of electroplating or for electroplating treatment. 3. The degassing determination method of the treatment liquid according to claim 1, wherein: The dummy work object has a surface portion made of a porous material. 4. The degassing determination method of the treatment liquid according to claim 3, wherein: The said dummy work object has the said surface part which consists of a foamed resin material. 5. The method for judging degassing of the treatment liquid according to claim 3, wherein: The dummy work object has a holding member for holding the surface portion, and when the dummy work object is immersed in the degassing tank, the surface portion held by the holding member is immersed together with the holding member. 6. The method for judging degassing of the treatment liquid according to claim 4, wherein: The diameter of the fine voids formed in the foamed resin material constituting the surface portion is in the range of 0.01 mm to 2.0 mm. 7. The method for judging degassing of the treatment liquid according to claim 1, wherein: The change over time of the surface state of the dummy work object is measured from the start of immersion until the air bubbles formed on the surface of the dummy work object at the start disappear from the surface. 8. The method for judging degassing of the treatment liquid according to claim 1, wherein: Regarding the time change of the surface state of the pseudo-work object, the change of the air bubbles on the surface of the above-mentioned pseudo-work object is measured with an optical monitor or observed visually. 9. The method for judging degassing of a treatment liquid according to claim 1, wherein: The gas contained in the treatment liquid is air. 10. The method for judging degassing of the treatment liquid according to claim 1, wherein: A window is formed on a part of the side wall of the degassing treatment tank, and a temporal change in the surface state of the simulation work object is determined through the window. 11. A method for judging degassing of a treatment liquid, characterized in that, There is a degassing treatment tank for degassing the gas contained in the treatment liquid for treating an object having a fine pattern of grooves and holes on the surface, and the treatment liquid circulated in the degassing treatment tank is further circulated The measurement section dips a simulated object having a fine pattern of concavities and convexities on the surface into the above-mentioned processing liquid circulating in the above-mentioned measurement section, and judges the detachment of the above-mentioned processing liquid based on the time change of the surface state of the simulated object. gas level. 12. The method for judging degassing of a treatment liquid according to claim 11, wherein: The above-mentioned treatment liquid is a liquid for pretreatment of electroplating or for electroplating treatment. 13. The method for judging degassing of a treatment liquid according to claim 11, wherein: The dummy work object has a surface portion made of a porous material.