CN107354467A - A kind of environment-friendly metal removes liquid - Google Patents
A kind of environment-friendly metal removes liquid Download PDFInfo
- Publication number
- CN107354467A CN107354467A CN201710464633.1A CN201710464633A CN107354467A CN 107354467 A CN107354467 A CN 107354467A CN 201710464633 A CN201710464633 A CN 201710464633A CN 107354467 A CN107354467 A CN 107354467A
- Authority
- CN
- China
- Prior art keywords
- environment
- surfactant
- removes liquid
- friendly metal
- friendly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/04—Cleaning or pickling metallic material with solutions or molten salts with acid solutions using inhibitors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/08—Iron or steel
- C23G1/088—Iron or steel solutions containing organic acids
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
The present invention relates to a kind of environment-friendly metal to remove liquid, includes the composition acetic acid 40~65% of following mass percent, nitric acid 10~30%, surfactant 1~2%, corrosion inhibiter 0.1~2%, brightener 0.1~1%, surplus is pure water.Surfactant is selected from nonionic surface active agent and anionic surfactant compounding mixture.Corrosion inhibiter is selected from ANN aluminium nitrate nonahydrate, silver nitrate, ferric sulfate, and compares mixture according to certain quality.This, which takes off golden liquid, has that environment-friendly, system harmfulness is small, and stability is high, service life length, and corrosion metal effect is good；While effectively corrosion metal is carried out, also stainless steel substrate layer will not be caused to corrode with golden membranous layer.
Description
Technical field
The present invention relates to a kind of environment-friendly metal to remove liquid, belongs to micron Electric Chemical Reagent technical field.
Background technology
The present invention is that a kind of environment-friendly metal removes liquid, and technical problem to be solved is to be directed to the existing skill of microelectronic industry
Art provides a kind of metal removal liquid, can effectively remove the metal levels such as aluminium between stainless steel substrate and golden film, nickel, chromium so that
Golden film is easy to be recovered, while on stainless steel and golden film without influence.
The content of the invention
The technical problems to be solved by the invention are to provide a kind of de- golden liquid for above-mentioned prior art, can effectively be removed
The metal levels such as aluminium, nickel, chromium between stainless steel substrate and golden film, and for stainless steel, golden film without influence so that golden material is easy to
Recovery.
Technical scheme is used by the present invention solves the above problems：A kind of environment-friendly metal removes liquid, including following matter
Measure the composition of percentage
Acetic acid 40~65%,
Nitric acid 10~30%,
Surfactant 1~2%,
Corrosion inhibiter 0.1~2%,
Brightener 0.1~1%,
Surplus is pure water.
Preferably, the mass percent concentration of acetic acid raw material be 90~99.8%, the mass percent concentration of nitric acid material be
60~67%.
Preferably, surfactant is selected from nonionic surface active agent and anionic surfactant compounding mixing
Thing.Wherein, nonionic surfactant is OPEO.Anion surfactant polymerize for alkyl aryl ether
One or both of thing, Triton X-100.
Preferably, corrosion inhibiter is selected from ANN aluminium nitrate nonahydrate, silver nitrate, ferric sulfate, and compares mixture according to certain quality.Should
Corrosion inhibiter can be protected effectively in the case that golden film is not corrosion, the metal such as effective lateral erosion aluminium, nickel, chromium, so as to which gradually infiltration is rotten
Erosion forms hollow shape and causes golden film to come off, easily recovery.
Preferably, brightener is selected from Salzburg vitriol, effectively protects stainless base steel substrate.
Compared with prior art, the advantage of the invention is that：This, which takes off golden liquid, has that environment-friendly, system harmfulness is small, surely
Qualitative height, service life length, corrosion metal effect are good；, also will not be to stainless steel substrate while effectively corrosion metal is carried out
Layer causes to corrode with golden membranous layer.
Embodiment
The present invention is described in further detail with reference to embodiments.
Embodiment 1
The percentage by weight of metal removal liquid composition is respectively：
Acetic acid 65%,
Nitric acid 30%,
Surfactant 2%,
Corrosion inhibiter 2%,
Brightener 1%,
Surplus is pure water.
The mass percent concentration of wherein acetic acid is 99.8%, the mass percent concentration of nitric acid is 65%.Surfactant
Including nonionic surface active agent and anionic surfactant compounding mixture.Nonionic surfactant is octyl phenol
APEO.Anion surfactant is alkylaryl ether polymer, one kind in Triton X-100 or two
Kind.Corrosion inhibiter includes ANN aluminium nitrate nonahydrate, silver nitrate, ferric sulfate, and compares mixture according to certain quality.Brightener includes five water
Close copper sulphate.
Embodiment 2
The percentage by weight of metal removal liquid composition is respectively：
Acetic acid 40%,
Nitric acid 10%,
Surfactant 1%,
Corrosion inhibiter 0.1%,
Brightener 0.1%,
Surplus is pure water.
The mass percent concentration of wherein acetic acid is 99.8%, the mass percent concentration of nitric acid is 65%.Surfactant
Including nonionic surface active agent and anionic surfactant compounding mixture.Nonionic surfactant is octyl phenol
APEO.Anion surfactant is alkylaryl ether polymer, one kind in Triton X-100 or two
Kind.Corrosion inhibiter includes ANN aluminium nitrate nonahydrate, silver nitrate, ferric sulfate, and compares mixture according to certain quality.Brightener includes five water
Close copper sulphate.
Embodiment 3
The percentage by weight of metal removal liquid composition is respectively：
Acetic acid 45%,
Nitric acid 15%,
Surfactant 1%,
Corrosion inhibiter 1%,
Brightener 1%,
Surplus is pure water.
The mass percent concentration of wherein acetic acid is 99.8%, the mass percent concentration of nitric acid is 65%.Surfactant
Including nonionic surface active agent and anionic surfactant compounding mixture.Nonionic surfactant is octyl phenol
APEO.Anion surfactant is alkylaryl ether polymer, one kind in Triton X-100 or two
Kind.Corrosion inhibiter includes ANN aluminium nitrate nonahydrate, silver nitrate, ferric sulfate, and compares mixture according to certain quality.Brightener includes five water
Close copper sulphate.
In addition to the implementation, it is all to use equivalent transformation or equivalent replacement present invention additionally comprises there is other embodiment
The technical scheme that mode is formed, it all should fall within the scope of the hereto appended claims.
Claims (7)
1. a kind of environment-friendly metal removes liquid, include the composition of following mass percent
Acetic acid 40~65%,
Nitric acid 10~30%,
Surfactant 1~2%,
Corrosion inhibiter 0.1~2%,
Brightener 0.1~1%,
Surplus is pure water.
2. environment-friendly metal according to claim 1 removes liquid, it is characterised in that：The mass percent of the acetic acid raw material
Concentration is 90~99.8%, the mass percent concentration of nitric acid material is 60~67%.
3. environment-friendly metal according to claim 1 removes liquid, it is characterised in that：Surfactant is selected from nonionic table
Face activating agent and anionic surfactant compounding mixture.
4. environment-friendly metal according to claim 3 removes liquid, it is characterised in that：Nonionic surfactant is octyl phenol
APEO.
5. environment-friendly metal according to claim 3 removes liquid, it is characterised in that：Anion surfactant is alkyl virtue
One or both of base ether polymer, Triton X-100.
6. environment-friendly metal according to claim 1 removes liquid, it is characterised in that：Corrosion inhibiter be selected from ANN aluminium nitrate nonahydrate,
Silver nitrate, ferric sulfate, and compare mixture according to certain quality.
7. environment-friendly metal according to claim 1 removes liquid, it is characterised in that：Brightener is selected from Salzburg vitriol.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710464633.1A CN107354467A (en) | 2017-06-19 | 2017-06-19 | A kind of environment-friendly metal removes liquid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710464633.1A CN107354467A (en) | 2017-06-19 | 2017-06-19 | A kind of environment-friendly metal removes liquid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107354467A true CN107354467A (en) | 2017-11-17 |
Family
ID=60273888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710464633.1A Pending CN107354467A (en) | 2017-06-19 | 2017-06-19 | A kind of environment-friendly metal removes liquid |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107354467A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111334298A (en) * | 2020-02-26 | 2020-06-26 | 江阴润玛电子材料股份有限公司 | Molybdenum-aluminum-molybdenum and ITO/Ag/ITO compatible etching solution and preparation method thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020020833A1 (en) * | 1999-07-19 | 2002-02-21 | Fan Zhang | Composition for chemical mechanical planarization of copper, tantalum and tantalum nitride |
| CN102912350A (en) * | 2012-07-24 | 2013-02-06 | 友达光电股份有限公司 | etching solution and method for forming patterned multi-layer metal layer |
| CN104532267A (en) * | 2012-12-13 | 2015-04-22 | 吴小再 | Surface treatment method for electrode plate |
| CN105121705A (en) * | 2013-04-23 | 2015-12-02 | 三菱瓦斯化学株式会社 | Liquid composition used in etching multilayer film containing copper and molybdenum, manufacturing method of substrate using said liquid composition, and substrate manufactured by said manufacturing method |
| CN106283058A (en) * | 2015-05-29 | 2017-01-04 | 惠州市神头磁电有限公司惠阳光电分公司 | A kind of regulate and control molybdenum aluminum molybdenum etch profile etching solution |
| CN106337182A (en) * | 2015-07-09 | 2017-01-18 | 易安爱富科技有限公司 | Etchant composition for metal layer containing silver or silver alloy |
| CN108054176A (en) * | 2012-10-05 | 2018-05-18 | 三星显示有限公司 | A kind of combination of patterned plain conductor and substrate |
-
2017
- 2017-06-19 CN CN201710464633.1A patent/CN107354467A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020020833A1 (en) * | 1999-07-19 | 2002-02-21 | Fan Zhang | Composition for chemical mechanical planarization of copper, tantalum and tantalum nitride |
| CN102912350A (en) * | 2012-07-24 | 2013-02-06 | 友达光电股份有限公司 | etching solution and method for forming patterned multi-layer metal layer |
| CN108054176A (en) * | 2012-10-05 | 2018-05-18 | 三星显示有限公司 | A kind of combination of patterned plain conductor and substrate |
| CN104532267A (en) * | 2012-12-13 | 2015-04-22 | 吴小再 | Surface treatment method for electrode plate |
| CN105121705A (en) * | 2013-04-23 | 2015-12-02 | 三菱瓦斯化学株式会社 | Liquid composition used in etching multilayer film containing copper and molybdenum, manufacturing method of substrate using said liquid composition, and substrate manufactured by said manufacturing method |
| CN106283058A (en) * | 2015-05-29 | 2017-01-04 | 惠州市神头磁电有限公司惠阳光电分公司 | A kind of regulate and control molybdenum aluminum molybdenum etch profile etching solution |
| CN106337182A (en) * | 2015-07-09 | 2017-01-18 | 易安爱富科技有限公司 | Etchant composition for metal layer containing silver or silver alloy |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111334298A (en) * | 2020-02-26 | 2020-06-26 | 江阴润玛电子材料股份有限公司 | Molybdenum-aluminum-molybdenum and ITO/Ag/ITO compatible etching solution and preparation method thereof |
| CN111334298B (en) * | 2020-02-26 | 2021-10-01 | 江阴润玛电子材料股份有限公司 | Molybdenum-aluminum-molybdenum and ITO/Ag/ITO compatible etching solution and preparation method thereof |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171117 |
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| RJ01 | Rejection of invention patent application after publication |