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CN107354431A - TiMoCN梯度复合涂层刀具及其制备方法 - Google Patents

TiMoCN梯度复合涂层刀具及其制备方法 Download PDF

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CN107354431A
CN107354431A CN201710532839.3A CN201710532839A CN107354431A CN 107354431 A CN107354431 A CN 107354431A CN 201710532839 A CN201710532839 A CN 201710532839A CN 107354431 A CN107354431 A CN 107354431A
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宋文龙
马育栋
王首军
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Abstract

本发明属于机械制造切削刀具领域，涉及一种TiMoCN梯度复合涂层刀具及其制备方法，该涂层采用中频磁控溅射和电弧镀的复合镀膜方法制备的TiMoCN梯度涂层刀具，涂层刀具由内至外依次为刀具基体、Ti过渡层、TiMoC过渡层和氮含量梯度渐变的TiMoCN梯度复合涂层。该TiMoCN超硬碳氮化合物涂层由于在涂层中同时增加了Ti、Mo两种金属，且涂层结构成分氮含量梯度渐变，可提高刀具的切削加工性能。该涂层刀具具有很高的硬度和强度，较低的表面摩擦系数，良好的抗扩散磨损性能和优异的摩擦磨损特性。切削过程中该刀具可减小干切削过程中的摩擦和切屑粘结，降低切削力和切削温度30％以上，提高刀具使用寿命和耐用度50％以上。

Description

TiMoCN梯度复合涂层刀具及其制备方法
技术领域
本发明属于机械制造金属切削刀具领域，特别是涉及一种TiMoCN梯度复合涂层刀具及其制备方法。
背景技术
现代金属切削加工要求刀具具有高切削速度、高进给量、长寿命、高精度等优良特性。高速钢或硬质合金作为传统的刀具材料，越来越难以满足现代机械加工业的发展需要。因此，刀具表面涂层技术应运而生。刀具表面涂层技术是近几十年发展起来的材料表面处理技术。在适当的工艺技术条件下，涂层具有很高的硬度，较低的摩擦系数，并且与基体材料有良好的结合力，因此可以大大提高金属切削刀具的使用寿命。目前工业发达国家的涂层刀具使用量已占刀具总数的80％以上，数控机床上所用的刀具90％以上是涂层刀具。TiCN是目前最广泛使用的三元碳氮化合物涂层，TiCN涂层由于兼具TiC的高硬度和TiN的良好韧性，显著提高了其摩擦磨损性能(Jinlong Li,Shihong Zhang,Mingxi Li.Influenceofthe C2H2flow rate on gradient TiCN films deposited by multi-arc ion plating[J].Applied Surface Science,2013(283):134-144.)，已广泛应用于铣削、攻牙、冲压、成型及滚齿的加工，在高速切削时比普通硬质合金刀具的耐磨性高5-8倍。中国专利“汽轮机转子轮槽铣刀表面TiCN多层复合涂层制备方法”(专利号201510564738.5)利用Ti、氮气(N2)与乙炔气体(C2H2)在450℃沉积温度下合成了TiCN涂层铣刀，解决了26NiCrMov145材料转子加工难题。
TiCN涂层虽然具有高硬度、低摩擦系数的优点，但同时因其热稳定性和红硬性较差，仅适合应用于低速切削或具有良好冷却条件的场合，需要对传统TiCN涂层结构和制备方法进行改进。目前，多元化是材料改善力学性能、耐蚀性和耐磨性的有效途径，通过制备多元复合涂层，既可提高涂层与基体的结合强度，又兼顾多种单涂层的综合性能，显著提高涂层刀具的性能。
目前TiCN等碳氮化合物主要通过化学气相沉积技术(CVD)等技术制备，即通过TiCl4(或Ti靶)、CH4(或C2H2)以及N2等气体反应生成，沉积温度通常超过400-500℃，对基体产生不利影响，同时气体碳源容易对涂层设备造成污染，制约了其广泛应用。
发明内容
本发明的目的在于克服目前现有碳氮化合物涂层刀具性能及制备方法的不足，结合多元复合涂层结构的优点提供一种TiMoCN梯度复合涂层刀具及其制备方法。该刀具采用中频磁控溅射+电弧镀的复合镀膜方法，直接采用TiMoC复合靶提供碳源，且沉积温度控制在300℃以下，可在更为广泛的刀具或工具基体上制备。该涂层结构为涂层刀具表面为氮含量梯度渐变的TiMoCN梯度复合涂层，刀具基体与涂层间依次为Ti过渡层和TiMoC过渡层。该梯度复合涂层刀具中的Ti元素改善了涂层硬度和抗磨损性能，Mo元素提高了涂层的硬度和强度，改善涂层的抗高温氧化能力，降低了涂层的摩擦系数，可显著提高刀具的切削寿命和加工效率。同时该多层梯度结构能够减缓涂层与基体之间的热膨胀系数和弹性模量差异，改善结构和性能上的匹配性，增大涂层与基体的结合力和涂层的耐冲击性能。
为了实现上述发明目的，本发明采用的技术方案为：。
本发明TiMoCN梯度复合涂层刀具，刀具基体材料为高速钢、工具钢、模具钢、硬质合金、陶瓷或立方氮化硼中的一种，涂层刀具由内至外依次为刀具基体、Ti过渡层、TiMoC过渡层和氮含量梯度渐变的TiMoCN梯度复合涂层。
本发明所述的TiMoCN梯度复合涂层刀具的制备方法，沉积方式采用中频磁控溅射和电弧镀的复合镀膜方法，沉积时使用2个中频磁控溅射TiMoC复合靶，2个电弧镀Ti靶，首先采用电弧镀沉积Ti过渡层，然后采用中频磁控溅射方法沉积TiMoC过渡层和氮含量梯度渐变的TiMoCN梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各20min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至5.0×10-3Pa，加热至270℃，保温20～25min；
(2)离子清洗：通Ar气，其压力为1.3Pa，开启偏压电源，电压600V，占空比0.3，辉光放电清洗25min；降低偏压至400V，占空比0.2，开启离子源离子清洗30min，开启电弧镀Ti靶电源，Ti靶电流50A，偏压300V，离子轰击2～3min；
(3)沉积Ti过渡层：Ar气压0.8～0.9Pa，偏压降至220V，Ti靶电流75A，沉积温度220℃，电弧镀Ti过渡层4～5min；
(4)沉积TiMoC过渡层：Ar气压0.6～0.7Pa，偏压调至200V，关闭电弧镀Ti靶电源，开启中频磁控溅射TiMoC靶电流40A，沉积TiMoC过渡层4～5min；
(5)沉积TiMoCN梯度复合层：开启N2，N2气压为0.8Pa，Ar气压0.7～0.8Pa，偏压200V，TiMoC靶电流45A，沉积温度200℃，沉积TiMoCN复合层9～10min，其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积TiMoCN复合层9～10min，直至N2气压升至1.5Pa，再沉积TiMoCN复合层9～10min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
与现有技术相比，本发明的优点在于：通过上述工艺制备的TiMoCN梯度复合涂层刀具，刀具表面为氮含量梯度渐变的TiMoCN梯度复合涂层，刀具基体与涂层间依次为Ti过渡层和TiMoC过渡层，以减小残余应力，增加涂层与刀具基体间的结合强度。该梯度复合涂层刀具中的Ti元素改善了涂层硬度和抗磨损性能，Mo元素提高了涂层的硬度和强度，改善涂层的抗高温氧化能力，降低了涂层的摩擦系数，且涂层结构成分氮含量梯度渐变，可改善传统碳氮化合物涂层刀具的物理机械性能。同时该多层梯度结构能够减缓涂层与基体之间的热膨胀系数和弹性模量差异，改善结构和性能上的匹配性，增大涂层与基体的结合力和涂层的耐冲击性能。
该TiMoCN梯度复合涂层刀具具有很高的硬度和强度，较低的表面摩擦系数，良好的抗扩散磨损性能和优异的摩擦磨损特性。该复合涂层刀具切削过程中可减小刀具表面的摩擦和切屑的粘结，降低切削力和切削温度30％以上，提高刀具使用寿命和耐用度50％以上，该TiMoCN梯度复合涂层刀具可广泛应用各种黑色金属及有色金属的干切削和高速加工。
附图说明
图1为本发明的TiMoCN梯度复合涂层刀具的截面示意图；
图中：1为刀具基体、2为Ti过渡层、3为TiMoC过渡层、4为TiMoCN梯度复合涂层。
具体实施方式：
下面给出本发明的二个最佳实施例：
实施例1：
本发明TiMoCN梯度复合涂层刀具及其制备方法，该刀具为普通的铣刀片，其基体材料为：硬质合金M05，涂层刀具由内至外依次为刀具基体、Ti过渡层、TiMoC过渡层和氮含量梯度渐变的TiMoCN梯度复合涂层。沉积方式采用中频磁控溅射和电弧镀的复合镀膜方法，沉积时使用2个中频磁控溅射TiMoC复合靶，2个电弧镀Ti靶，首先采用电弧镀沉积Ti过渡层，然后采用中频磁控溅射方法沉积TiMoC过渡层和氮含量梯度渐变的TiMoCN梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各20min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至5.0×10-3Pa，加热至270℃，保温25min；
(2)离子清洗：通Ar气，其压力为1.3Pa，开启偏压电源，电压600V，占空比0.3，辉光放电清洗25min；降低偏压至400V，占空比0.2，开启离子源离子清洗30min，开启电弧镀Ti靶电源，Ti靶电流50A，偏压300V，离子轰击3min；
(3)沉积Ti过渡层：Ar气压0.9Pa，偏压降至220V，Ti靶电流75A，沉积温度220℃，电弧镀Ti过渡层5min；
(4)沉积TiMoC过渡层：Ar气压0.7Pa，偏压调至200V，关闭电弧镀Ti靶电源，开启中频磁控溅射TiMoC靶电流40A，沉积TiMoC过渡层5min；
(5)沉积TiMoCN梯度复合层：开启N2，N2气压为0.8Pa，Ar气压0.8Pa，偏压200V，TiMoC靶电流45A，沉积温度200℃，沉积TiMoCN复合层10min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积TiMoCN复合层10min，直至N2气压升至1.5Pa，再沉积TiMoCN复合层10min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
实施例2：
本发明TiMoCN梯度复合涂层刀具及其制备方法，该刀具为圆周铣刀，其刀具基体材料为：高速钢W18Cr4V，涂层刀具由内至外依次为刀具基体、Ti过渡层、TiMoC过渡层和氮含量梯度渐变的TiMoCN梯度复合涂层。沉积方式采用中频磁控溅射和电弧镀的复合镀膜方法，沉积时使用2个中频磁控溅射TiMoC复合靶，2个电弧镀Ti靶。首先采用电弧镀沉积Ti过渡层，然后采用中频磁控溅射方法沉积TiMoC过渡层和氮含量梯度渐变的TiMoCN梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各20min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至5.0×10-3Pa，加热至270℃，保温20min；
(2)离子清洗：通Ar气，其压力为1.3Pa，开启偏压电源，电压600V，占空比0.3，辉光放电清洗25min；降低偏压至400V，占空比0.2，开启离子源离子清洗30min，开启电弧镀Ti靶电源，Ti靶电流50A，偏压300V，离子轰击2min；
(3)沉积Ti过渡层：Ar气压0.8Pa，偏压降至220V，Ti靶电流75A，沉积温度220℃，电弧镀Ti过渡层4min；
(4)沉积TiMoC过渡层：Ar气压0.6Pa，偏压调至200V，关闭电弧镀Ti靶电源，开启中频磁控溅射TiMoC靶电流40A，沉积TiMoC过渡层4min；
(5)沉积TiMoCN梯度复合层：开启N2，N2气压为0.8Pa，Ar气压0.8Pa，偏压200V，TiMoC靶电流45A，沉积温度200℃，沉积TiMoCN复合层9min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积TiMoCN复合层9min，直至N2气压升至1.5Pa，再沉积TiMoCN复合层9min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。

Claims (2)

1.一种TiMoCN梯度复合涂层刀具，刀具基体材料为高速钢、工具钢、模具钢、硬质合金、陶瓷或立方氮化硼中的一种，其特征在于，涂层刀具由内至外依次为刀具基体、Ti过渡层、TiMoC过渡层和氮含量梯度渐变的TiMoCN梯度复合涂层。
2.一种权利要求1所述的TiMoCN梯度复合涂层刀具的制备方法，其特征在于，沉积方式采用中频磁控溅射和电弧镀的复合镀膜方法，沉积时使用2个中频磁控溅射TiMoC复合靶，2个电弧镀Ti靶，首先采用电弧镀沉积Ti过渡层，然后采用中频磁控溅射方法沉积TiMoC过渡层和氮含量梯度渐变的TiMoCN梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各20min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至5.0×10-3Pa，加热至270℃，保温20～25min；
(2)离子清洗：通Ar气，其压力为1.3Pa，开启偏压电源，电压600V，占空比0.3，辉光放电清洗25min；降低偏压至400V，占空比0.2，开启离子源离子清洗30min，开启电弧镀Ti靶电源，Ti靶电流50A，偏压300V，离子轰击2～3min；
(3)沉积Ti过渡层：Ar气压0.8～0.9Pa，偏压降至220V，Ti靶电流75A，沉积温度220℃，电弧镀Ti过渡层4～5min；
(4)沉积TiMoC过渡层：Ar气压0.6～0.7Pa，偏压调至200V，关闭电弧镀Ti靶电源，开启中频磁控溅射TiMoC靶电流40A，沉积TiMoC过渡层层4～5min；
(5)沉积TiMoCN梯度复合层：开启N2，N2气压为0.8Pa，Ar气压0.7～0.8Pa，偏压200V，TiMoC靶电流45A，沉积温度200℃，沉积TiMoCN复合层9～10min，其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积TiMoCN复合层9～10min，直至N2气压升至1.5Pa，再沉积TiMoCN复合层9～10min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111534803A (zh) * 2020-06-16 2020-08-14 西安稀有金属材料研究院有限公司 一种Mo-V-C-N复合涂层的制备方法
CN111778485A (zh) * 2020-06-16 2020-10-16 广东正德材料表面科技有限公司 一种涂层及其制备方法
WO2023019549A1 (zh) * 2021-08-20 2023-02-23 湖南泰嘉新材料科技股份有限公司 一种带锯条铣齿用自润滑涂层滚铣刀及其制备方法和应用

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103097579A (zh) * 2010-09-21 2013-05-08 西铁城控股株式会社 白色硬质装饰构件
CN105063554A (zh) * 2015-07-31 2015-11-18 山东大学 ZrSiCN纳米复合梯度涂层刀具及其制备工艺

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103097579A (zh) * 2010-09-21 2013-05-08 西铁城控股株式会社 白色硬质装饰构件
CN105063554A (zh) * 2015-07-31 2015-11-18 山东大学 ZrSiCN纳米复合梯度涂层刀具及其制备工艺

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111534803A (zh) * 2020-06-16 2020-08-14 西安稀有金属材料研究院有限公司 一种Mo-V-C-N复合涂层的制备方法
CN111778485A (zh) * 2020-06-16 2020-10-16 广东正德材料表面科技有限公司 一种涂层及其制备方法
CN111534803B (zh) * 2020-06-16 2022-06-03 西安稀有金属材料研究院有限公司 一种Mo-V-C-N复合涂层的制备方法
CN111778485B (zh) * 2020-06-16 2023-03-10 广东正德材料表面科技有限公司 一种涂层及其制备方法
WO2023019549A1 (zh) * 2021-08-20 2023-02-23 湖南泰嘉新材料科技股份有限公司 一种带锯条铣齿用自润滑涂层滚铣刀及其制备方法和应用

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