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CN107322178A - A kind of new solder for power device package - Google Patents

A kind of new solder for power device package Download PDF

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Publication number
CN107322178A
CN107322178A CN201710484680.2A CN201710484680A CN107322178A CN 107322178 A CN107322178 A CN 107322178A CN 201710484680 A CN201710484680 A CN 201710484680A CN 107322178 A CN107322178 A CN 107322178A
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Prior art keywords
solder
alloy
power device
contents
device package
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CN201710484680.2A
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Chinese (zh)
Inventor
孙凤莲
韩帮耀
班高放
刘洋
樊嘉杰
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Harbin University of Science and Technology
Changzhou Wujin Semiconductor Lighting Application Technology Institute
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Harbin University of Science and Technology
Changzhou Wujin Semiconductor Lighting Application Technology Institute
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Priority to CN201710484680.2A priority Critical patent/CN107322178A/en
Publication of CN107322178A publication Critical patent/CN107322178A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/26Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
    • B23K35/262Sn as the principal constituent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

一种用于功率器件封装的复合钎料,本发明涉及一种新型复合钎料的成分设计并对新型钎料进行初选和优选,本发明要解决目前功率器件封装中应用80Au‑20Sn钎料成本过高的问题,在相对较低温度可以替代80Au‑20Sn,新型钎料成本比80Au‑20Sn降低99.9%以上,其主要特点是比常用SAC305耐高温性能好,本钎料由0.10%~0.50%的Ag、0.10%~2.00%的Cu、0.10%~0.50%的Ni、2.00%~5.00%的Sb和余量的Sn组成,本发明以Sn‑Sb合金为基体,通过添加合金元素(Cu,Ag,Ni),采用熔炼的方法制得钎料,本钎料熔点为237℃~244℃,焊接性和力学性能良好,本发明制备的复合钎料可用于表面镀金、镀镍铜盘之间的焊接。

A composite solder used for power device packaging. The invention relates to the composition design of a new composite solder and the preliminary selection and optimization of the new solder. The invention aims to solve the problem of using 80Au-20Sn solder in the current power device package The problem of high cost can replace 80Au-20Sn at a relatively low temperature. The cost of the new solder is more than 99.9% lower than that of 80Au-20Sn. Its main feature is that it has better high temperature resistance than the commonly used SAC305. % of Ag, 0.10% to 2.00% of Cu, 0.10% to 0.50% of Ni, 2.00% to 5.00% of Sb and the rest of Sn. The present invention uses Sn-Sb alloy as the matrix, and by adding alloy elements (Cu , Ag, Ni), the brazing filler metal is prepared by smelting, the melting point of the brazing filler metal is 237 ° C ~ 244 ° C, and the weldability and mechanical properties are good. The composite solder filler metal prepared by the invention can be used for gold-plated and nickel-plated copper plates on the surface. Welding between.

Description

一种用于功率器件封装的新型钎料A new type of solder for power device packaging

技术领域technical field

本发明涉及几种新型复合钎料的成分设计。The invention relates to the composition design of several novel composite solders.

背景技术Background technique

以Si和GaAs为代表的传统半导体材料的发展推动了光电子、微电子的迅猛发展,然而由于材料性能的局限性,第一代、第二代半导体材料不足以满足现代电子技术发展对高温、高频、高压以及抗辐射等材料性能提出的新要求,而以SiC、GaN为代表的第三代半导体具有禁带宽度大、击穿电压高、热导率大、电子饱和漂移速率高及抗辐射能力强等性能,使其在光电器件、高频大功率、高温电子器件等方面倍受青睐。The development of traditional semiconductor materials represented by Si and GaAs has promoted the rapid development of optoelectronics and microelectronics. However, due to the limitations of material properties, the first and second generation semiconductor materials are not enough to meet the requirements of modern electronic technology development for high temperature and high temperature. However, the third-generation semiconductors represented by SiC and GaN have large band gap, high breakdown voltage, high thermal conductivity, high electron saturation drift rate and radiation resistance. Strong ability and other performances make it popular in optoelectronic devices, high-frequency high-power, high-temperature electronic devices, etc.

80Au-20Sn钎料是人们研究较早的高温钎料。80Au-20Sn合金为二元共晶成分,共晶点为280℃。钎焊温度比较适中,满足高温钎料的熔化温度要求。Au基合金强度高、导电和导热性优良,耐蚀性强,焊接时可以不需要助焊剂,保证芯片的清洁。但Au基合金较硬、抗拉强度高、伸长率较低、可加工性差,难以加工成线材或带材。而且互连接头在较高温度下服役时,由于硬度高使其接头难以发生塑性变形,易使接头产生的热应力直接传递到芯片等电子元件上,严重时可导致芯片等元件的失效。最为重要的是Au基合金成本太高,因此适用场合极为有限。名称为“锡-锑-银-镍合金态箔状钎料及其制备方法(专利申请号:CN201010623783.0,申请日:2010.12.31)”的专利提出了一种用于集成电路的气密性封装焊料,其组成及质量百分比为:锑,8-11%、银,3-20%;名称为“高温无铅焊料合金 (专利申请号:CN201280007265.3,申请日:2012.08.08)”的专利提出了一种高温无铅封装焊料,其组成及质量百分比为:锑,35-40%、银,13-18%、Cu,6-8%、锡,余量。该钎料的熔点高达299-337℃,在280℃钎料的固相率为100%。但该焊料脆性高适用场合有限。名称为“一种SnAgCuNi系无铅焊锡合金(中国专利号:CN200710041687.3,申请日:2007.6.6)”的专利提出了一种SnAgCuNi系无铅焊锡合金,其组成及质量百分比为:1.5-2.5%的Ag、0.1-0.8%的Cu、0.01-0.5%的Ni、0.001-0.1%的P、0-0.01%的Bi,该钎料中熔点为220℃左右,不能满足第三代半导体功率器件封装的温度要求。80Au-20Sn solder is a high-temperature solder that was studied earlier. The 80Au-20Sn alloy is a binary eutectic composition with a eutectic point of 280°C. The brazing temperature is relatively moderate, which meets the melting temperature requirements of high-temperature solder. The Au-based alloy has high strength, excellent electrical and thermal conductivity, and strong corrosion resistance. It does not require flux during welding to ensure the cleanliness of the chip. However, Au-based alloys are hard, have high tensile strength, low elongation, and poor machinability, making it difficult to process them into wires or strips. Moreover, when the interconnection joint is in service at a higher temperature, due to its high hardness, it is difficult for the joint to undergo plastic deformation, and the thermal stress generated by the joint is easily transmitted directly to electronic components such as chips, which may lead to failure of components such as chips in severe cases. The most important thing is that the cost of Au-based alloys is too high, so the applicable occasions are extremely limited. The patent titled "Tin-antimony-silver-nickel alloy foil-shaped solder and its preparation method (patent application number: CN201010623783.0, application date: 2010.12.31)" proposes a hermetic sealant for integrated circuits Packaging solder, its composition and mass percentage are: antimony, 8-11%, silver, 3-20%; the name is "high temperature lead-free solder alloy (patent application number: CN201280007265.3, application date: 2012.08.08)" The patent proposes a high-temperature lead-free packaging solder, whose composition and mass percentage are: antimony, 35-40%, silver, 13-18%, Cu, 6-8%, tin, and the balance. The melting point of the solder is as high as 299-337°C, and the solid phase rate of the solder is 100% at 280°C. However, the solder with high brittleness has limited application occasions. The patent titled "A SnAgCuNi-based lead-free solder alloy (Chinese patent number: CN200710041687.3, application date: 2007.6.6)" proposes a SnAgCuNi-based lead-free solder alloy, whose composition and mass percentage are: 1.5- 2.5% Ag, 0.1-0.8% Cu, 0.01-0.5% Ni, 0.001-0.1% P, 0-0.01% Bi, the melting point of this solder is about 220°C, which cannot meet the third-generation semiconductor power requirements. The temperature requirements of the device package.

发展替代或部分替代Au基钎料的新型钎料及其他互连工艺已成为业界的迫切需要并具有重要的现实意义。Sn-Sb系合金由于Sn-Sb(Sb≦10%)合金熔化区间较窄(232~243℃),并且与现有焊料兼容性良好、力学性能优良,而成本大大低于Au-Sn合金,因而作为高温无铅候选材料备受关注。为进一步提高钎料性能,通过添加其他的金属元素,对Sn-Sb系合金进行改性,使其焊点在服役过程中具有较高的可靠性。The development of new solders and other interconnection processes that replace or partially replace Au-based solders has become an urgent need in the industry and has important practical significance. Sn-Sb alloys have a narrow melting range (232-243°C) for Sn-Sb (Sb≦10%) alloys, good compatibility with existing solders, excellent mechanical properties, and much lower cost than Au-Sn alloys. Therefore, it has attracted much attention as a high-temperature lead-free candidate material. In order to further improve the performance of the solder, the Sn-Sb alloy is modified by adding other metal elements, so that the solder joints have higher reliability during service.

发明内容Contents of the invention

本发明目的是为了解决现有功率器件连接高温钎料可加工差,成本过高的问题,而提供一种在相对较低温度可以替代现有Au基合金钎料的新型钎料。新钎料成本仅为SAC305钎料成本的一半左右,Au80Sn20钎料成本的0.1%以下。The purpose of the present invention is to solve the problems of poor processability and high cost of connecting high-temperature solders for existing power devices, and provide a new type of solder that can replace the existing Au-based alloy solders at relatively low temperatures. The cost of new solder is only about half of the cost of SAC305 solder, and less than 0.1% of the cost of Au80Sn20 solder.

新型钎料以Sn-Sb合金为基体,通过添加合金元素制成。实验采用 Sn-Sb、SnCu、Sn-Ag、Sn-Ni 中间合金的形式进行熔炼.本发明的高温钎料按照质量百分比由以下成分组成Sb含量为2~5%、Cu含量为0.1~2%、Ni含量为0.1~0.5%、Ag含量为0.1~0.5%,其余为Sn。The new type of solder is based on Sn-Sb alloy and made by adding alloy elements. The experiment adopts the form of Sn-Sb, SnCu, Sn-Ag, Sn-Ni master alloy for smelting. The high-temperature solder of the present invention is composed of the following components according to the mass percentage: the Sb content is 2-5%, and the Cu content is 0.1-2%. , Ni content is 0.1-0.5%, Ag content is 0.1-0.5%, and the rest is Sn.

本发明钎料是由原料在石英管中在氩气的保护气氛下经高频感应加热仪加热熔炼而成,熔炼成的块体合金可以经线切割制成片状钎料,也可以制成粉料或者焊膏。The brazing filler metal of the present invention is formed by heating and smelting raw materials in a quartz tube under an argon protective atmosphere through a high-frequency induction heater, and the smelted block alloy can be cut into sheet brazing filler metal or powder material or solder paste.

本发明是由以下技术方案实现的:一种用于功率器件焊接的无铅钎料,钎料的成分百分比为:Sb含量为2~5%;Cu含量为0.1~2%;Ni含量为0.1~0.5%;余量为锡(Sn)。上述方案优化了Cu,Ag,Ni的组分,得到了润湿性良好,剪切强度较高的高温钎料。The present invention is achieved by the following technical solutions: a lead-free solder for power device welding, the composition percentage of the solder is: Sb content is 2-5%; Cu content is 0.1-2%; Ni content is 0.1% ~0.5%; the balance is tin (Sn). The above scheme optimizes the components of Cu, Ag and Ni, and obtains a high-temperature solder with good wettability and high shear strength.

本发明的机理是:添加Ag和Cu能明显改善钎料的润湿性,提高导热性,导电性。添加Sb可以提高钎料的熔点。添加Ni细化焊点体钎料的微观组织,提高焊点的综合力学性能。The mechanism of the invention is: adding Ag and Cu can significantly improve the wettability of solder, improve thermal conductivity and electrical conductivity. Adding Sb can increase the melting point of the solder. Adding Ni refines the microstructure of solder joints and improves the comprehensive mechanical properties of solder joints.

本发明可以采用常规生产钎料的冶炼方法得到,本发明优先采用的方法是:根据设计的成分配比按照Sn锭和Sn-Sb合金、Sn-Cu和Sn-Ag、Sn-Ni合金的顺序依次加入,在高纯氩气的保护气氛中熔炼,熔炼结束后倒在铝制模具上冷却。The present invention can adopt the smelting method of conventional production solder to obtain, and the method that the present invention preferably adopts is: according to the order of Sn ingot and Sn-Sb alloy, Sn-Cu and Sn-Ag, Sn-Ni alloy according to the composition distribution ratio of design Add in sequence, melt in a protective atmosphere of high-purity argon, and pour it on an aluminum mold to cool after melting.

本发明的优点:钎料成本低,强度高,焊接性优良。The invention has the advantages of low solder cost, high strength and excellent weldability.

附图说明Description of drawings

图 1:表1不同实施例(1、2、3、4)的基本性能。Figure 1: Basic properties of different examples (1, 2, 3, 4) in Table 1.

图2:具体实施例1 钎料Sn-3Sb-0.5Cu-0.1Ni-0.1Ag/Cu 焊点界面 IMC 的线扫描EDX 分析。Fig. 2: Line-scan EDX analysis of IMC of solder joint interface IMC of specific example 1 solder Sn-3Sb-0.5Cu-0.1Ni-0.1Ag/Cu.

图3:为表1中不同实施例(1、2、3、4)的铺展率。Fig. 3: is the spreading rate of different examples (1, 2, 3, 4) in table 1.

图4:为表1中不同实施例(1、2、3、4)的剪切强度。Fig. 4: is the shear strength of different examples (1, 2, 3, 4) in table 1.

下面结合附图1-4通过4个实施例进一步对本发明进行阐述。The present invention will be further elaborated below through 4 embodiments in conjunction with accompanying drawings 1-4.

下述4个实施例所使用的材料均为Sn锭、Sn-Cu中间合金、Sn-Ag中间合金,方法为根据设计的成分配比按照Sn锭和Sn-Sb合金、Sn-Cu和Sn-Ag、Sn-Ni合金的顺序依次加入,在高纯氩气的保护气氛中熔炼,熔炼结束后倒在铝制模具上冷却。通过挤压、拉拔即得到所需要的钎料丝材,也可将新钎料制备成焊膏使用。The materials used in the following 4 examples are Sn ingots, Sn-Cu master alloys, and Sn-Ag master alloys. The method is to follow the Sn ingots and Sn-Sb alloys, Sn-Cu and Sn- Ag and Sn-Ni alloys are added sequentially, smelted in a protective atmosphere of high-purity argon, and poured on an aluminum mold to cool after smelting. The required solder wire can be obtained by extrusion and drawing, and the new solder can also be prepared into solder paste for use.

实施例1Example 1

用于功率器件焊接的无铅钎料的成分及重量百分比为:Sb3%,Cu0.5%,Ni0.1%,Ag0.1%,余量为Sn。The composition and weight percentage of the lead-free solder used for power device welding are: Sb3%, Cu0.5%, Ni0.1%, Ag0.1%, and the balance is Sn.

钎料性能检测:固相线温度229.67℃,液相线温度在240.55℃(考虑了试验误差),铺展率66.618%,剪切强度72.2Mpa。Solder performance testing: the solidus temperature is 229.67°C, the liquidus temperature is 240.55°C (taking into account the experimental error), the spreading rate is 66.618%, and the shear strength is 72.2Mpa.

实施例2Example 2

用于功率器件焊接的无铅钎料的成分及重量百分比为:Sb3%,Cu1%,Ni0.3%,Ag0.3%,余量为Sn。The composition and weight percentage of the lead-free solder used for power device welding are: Sb3%, Cu1%, Ni0.3%, Ag0.3%, and the balance is Sn.

钎料性能检测:固相线温度220.03℃,液相线温度在238.48℃(考虑了试验误差),铺展率67.652%,剪切强度74.07Mpa。 Solder performance testing: the solidus temperature is 220.03°C, the liquidus temperature is 238.48°C (test error is considered), the spreading rate is 67.652%, and the shear strength is 74.07Mpa.

实施例3Example 3

用于功率器件焊接的无铅钎料的成分及重量百分比为:Sb3%,Cu2%,Ni0.5%,Ag0.5%,余量为Sn。The composition and weight percentage of the lead-free solder used for power device welding are: Sb3%, Cu2%, Ni0.5%, Ag0.5%, and the balance is Sn.

钎料性能检测:固相线温度220.62℃,液相线温度在237.51℃(考虑了试验误差),铺展率68.750%,剪切强度75.349Mpa。Solder performance testing: the solidus temperature is 220.62°C, the liquidus temperature is 237.51°C (taking into account the experimental error), the spreading rate is 68.750%, and the shear strength is 75.349Mpa.

实施例4Example 4

用于功率器件焊接的无铅钎料的成分及重量百分比为:Sb5%,Cu1%,Ni0.1%,Ag0.5%,余量为Sn。The composition and weight percentage of the lead-free solder used for power device welding are: Sb5%, Cu1%, Ni0.1%, Ag0.5%, and the balance is Sn.

钎料性能检测:固相线温度222.27℃,液相线温度在240.55℃(考虑了试验误差),铺展率69.185%,剪切强度77.34Mpa。Solder performance testing: the solidus temperature is 222.27°C, the liquidus temperature is 240.55°C (taking into account the experimental error), the spreading rate is 69.185%, and the shear strength is 77.34Mpa.

本实施方式得到的钎料采用功率补偿式差示扫描量热法,利用美国PerkinElmer~Pyris Diamond DSC功率补偿型差示扫描量热仪来测定钎料合金的熔化温度,钎料质量为5~10mg,本测试过程采用升温速率为10℃/min,升温范围为180~300℃,试验过程中采用高纯氮气保护样品。 The brazing material obtained in this embodiment adopts power compensation differential scanning calorimetry, and uses the American PerkinElmer~Pyris Diamond DSC power compensation differential scanning calorimeter to measure the melting temperature of the solder alloy, and the quality of the solder is 5-10mg , In this test process, the heating rate is 10°C/min, and the temperature range is 180-300°C. During the test, high-purity nitrogen gas is used to protect the sample.

采用GB/T11364-2008标准测试润湿性,标准试样为40×40×1 mm的单面覆铜板试片,钎料试样的质量0.25g。加热设备为R340C型八温区无铅回流焊炉,峰值温度为280℃,利用它们在Cu基板上的铺展率来评价其润湿性。 Wettability was tested using the GB/T11364-2008 standard. The standard sample is a single-sided copper-clad laminate test piece of 40×40×1 mm, and the mass of the solder sample is 0.25g. The heating equipment is an R340C eight-zone lead-free reflow oven with a peak temperature of 280°C, and their wettability is evaluated by their spreading rate on the Cu substrate.

采用日本PTR-1101接合强度试验机对用本实施方式钎料制备的微焊点的剪切强度进行测试,剪切速度0.5mm/s,剪切距离1mm,定位距离175µm,小球的尺寸为700µm。各实施例钎料基本性能如图1所示。Adopt Japan PTR-1101 bonding strength testing machine to test the shear strength of the micro-solder joint prepared with the solder of this embodiment, the shear speed is 0.5mm/s, the shear distance is 1mm, the positioning distance is 175μm, and the size of the ball is 700µm. The basic properties of the brazing material in each embodiment are shown in Figure 1.

Claims (3)

1. a kind of high-temp solder for power device package, it is characterised in that solder is by five kinds of composition Sn, Sb, Cu, Ag, Ni groups Into wherein Sb contents are that 2~5%, Cu contents are that 0.1~2%, Ni contents are that 0.1~0.5%, Ag contents are 0.1~0.5% surplus For tin(Sn).
2. the new type high temperature solder described in claim 1, it is characterised in that using Sn-Sb alloys as matrix, by adding alloy member Element is made, and experiment carries out melting in the form of intermediate alloy, devises orthogonal test and component content has been carried out preferably, this hair Bright solder is that raw material is formed in quartz ampoule under the protective atmosphere of argon gas through the heating melting of high-frequency induction heating instrument, is smelted into Block alloy can be cut into sheet solder with warp, and powder or soldering paste can also be made.
It is the addition alloy in the form of intermediate alloy 3. being used for the high-temp solder of power device package as claimed in claim 2 Element, wherein Sb:Sn-30Sb、Cu: Sn-10Cu、 Ag:Sn-20Ag、Ni: Sn-1Ni.
CN201710484680.2A 2017-06-23 2017-06-23 A kind of new solder for power device package Pending CN107322178A (en)

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CN113042932A (en) * 2021-03-23 2021-06-29 无锡日联科技股份有限公司 TU1 oxygen-free copper vacuum brazing solder and application thereof

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Application publication date: 20171107