CN107315022A - A kind of X-ray collimation location adjusting device and system - Google Patents

Abstract

The present invention provides a kind of X-ray collimation location adjusting device and system, including seal cavity, beam path alignment governor motion, horizontal drive structure and vertical driving structure；Beam path alignment governor motion includes upper lead flake and lower lead flake, also include can under the driving of horizontal drive structure the upper XY mobile stations of relative motion and lower XY mobile stations, upper XY mobile stations and lower XY mobile stations are respectively equipped with through hole and lower through-hole, upper lead flake is installed on the upper open end of through hole, lower lead flake is installed on the lower open end of lower through-hole, the light hole passed through for X-ray is offered at the geometric center of upper lead flake and lower lead flake, the aperture of the light hole of lower lead flake is less than the aperture of the light hole of upper lead flake, vertical driving structure is acted and X-ray collimation location adjusting device moves up and down.By the relative motion of upper XY mobile stations and lower XY mobile stations, to change the aligned relationship between upper through hole and lower through-hole, and then the luminous flux of regulation X-ray is realized, to improve resolution ratio.

Description

An X-ray collimation and positioning adjustment device and system

technical field

The invention relates to the technical field of X-ray collimation and positioning, in particular to an X-ray collimation and positioning adjustment device and system.

Background technique

The X-rays emitted from the X-ray tube are generally emitted in a conical shape at a relatively large angle. Before irradiating the object to be analyzed, the shape of the light often needs to be adjusted, and this is the function of the X-ray collimator. In medical equipment, such as CT machines, in order to reduce the irradiation area and reduce possible radiation damage, it is necessary to adjust the X-ray collimation. In Chinese patent CN201310715096, through holes are formed on the first board and the second board, the conical X-rays are transformed into parallel beams. Sometimes the function of the collimator is limited to adjusting the size of the optical path, such as Chinese patent CN200510086456, by setting the positions of the four directions of up and down, left and right, the shape of the X-ray optical path can be changed, but it has no effect on the direction of X-ray irradiation. It is noted that Chinese patent CN201410113078 proposes a method of improving the alignment accuracy of the through holes through the shape design of the stopper. At present, the design of the X-ray collimator mainly considers the change of the shape of the wire beam to meet the needs of medical devices.

XRD (X-Ray Diffraction, X-ray Diffraction) is an instrument that uses the diffraction phenomenon of X-rays to analyze the composition and structure of substances. When a beam of X-rays is irradiated on the powder sample, an imaging plate is placed on the reflected or transmitted light path of the light, and the diffraction pattern can be observed on the imaging plate. The imaging law of the diffraction pattern is related to the crystal structure of the measured powder sample. Therefore, the material structure information of the sample to be tested can be obtained by analyzing the characteristic information of the diffraction pattern. XRD is widely used in materials, metallurgy, cement, minerals and other fields.

At present, the XRD analysis instrument mainly works in the indoor environment, and its basic structure includes an X-ray source, an optical filter, a stage, a detector and a goniometer. Generally, the detector adopts a high-sensitivity semiconductor detector, such as lithium-drifted silicon or lithium-drifted germanium. These detectors are one-dimensional detectors that can only detect diffracted photons in a fixed-angle reflected or transmitted light path. XRD analysis needs to obtain diffraction information at different reflection angles or transmission angles, which requires the cooperation of goniometers. When the XRD analysis instrument is working, the detector rotates according to a certain step angle under the control of the goniometer, so that the complete spectral information required for XRD analysis can be obtained. The goniometer is a precise mechanical device, the angle of the rotation step can be set very small, the obtained map information is large, and the resolution of the instrument is high. However, XRD analysis instruments used indoors are bulky and heavy, and are not suitable for on-site applications.

Contents of the invention

In view of this, the embodiments of the present invention provide an X-ray collimation and positioning adjustment device and system that can adjust the X-ray luminous flux and are suitable for on-site application.

An embodiment of the present invention provides an X-ray collimation and positioning adjustment device, including a sealed cavity, an optical path collimation adjustment mechanism installed in the sealed cavity, and a device connecting the sealed cavity and the optical path alignment adjustment mechanism. Horizontal drive structure and vertical drive structure; the top wall of the sealed cavity is a fixed plate, and the optical path collimation adjustment mechanism includes an upper lead sheet and a lower lead sheet separately arranged in the vertical direction, and also includes upper and lower lead sheets. And the upper XY mobile platform and the lower XY mobile platform that can move relatively under the driving of the horizontal driving structure, the upper XY mobile platform and the lower XY mobile platform are respectively provided with an upper through hole and a lower through hole that penetrate up and down. hole, the upper lead sheet is installed on the upper opening end of the upper through hole and is between the upper XY moving table and the fixed plate, and the lower lead sheet is installed on the lower opening end of the lower through hole And between the lower XY mobile table and the bottom plate of the sealed cavity, the geometric centers of the upper lead sheet and the lower lead sheet are provided with light holes for X-rays to pass through, and the lower lead sheet The aperture of the light hole of the sheet is smaller than the aperture of the light hole of the upper lead sheet, the vertical driving structure moves and the X-ray collimation positioning adjustment device moves up and down.

Further, the optical path collimation adjustment mechanism further includes a shutter installed on the upper plane of the fixed plate for controlling opening or closing of the X-ray optical path, and the shutter is located above the upper through hole.

Further, the shutter includes a bracket mounted on the fixing plate, a gate mounted on the bracket and a driver connected to the gate to drive the gate to open or close, and the gate can prevent X Constructed of radiolucent stainless steel, including several blades.

Further, the sealed cavity includes a cylindrical or frame-shaped casing connecting the fixed plate and the bottom plate, and the horizontal driving structure includes an X-direction adjustment rod and a Y-direction adjustment rod arranged perpendicularly to each other, and the X direction One end of the adjusting rod and the Y adjusting rod are both connected to the lower XY moving table, and the other ends extend outward and pass through the housing to connect with the X adjusting handle and the Y adjusting handle respectively.

Further, scales are provided on the X-direction adjustment rod and the Y-direction adjustment rod.

Further, the housing is provided with handle adjustment holes through which the X-direction adjustment rod and the Y-direction adjustment rod respectively pass, and the X-direction adjustment rod and the Y-direction adjustment rod and the corresponding A sealing cover is provided between the adjustment holes of the handle to prevent the emission of X-rays.

Further, the vertical driving structure is four symmetrically arranged screw rods, one end of each screw rod is located in the sealed cavity, and the other end extends upwards and passes through the fixing plate to be fixed by a fastener .

Further, a sealing ring is provided at the edge of the upper lead sheet, the fixed plate and the upper XY moving table are connected by upper fastening screws to clamp the upper lead sheet, and the lower lead sheet is clamped by the lower lead sheet. Fasten the screw and fix it on the lower XY mobile stage.

An embodiment of the present invention provides an X-ray collimation positioning adjustment system, including an X-ray source, a primary filter for adjusting the divergence angle and photon energy of the rays emitted by the X-ray source, and a primary filter located at the primary filter Then the above-mentioned X-ray collimation and positioning adjustment device, the CCD photosensitive device for detecting X-rays behind the X-ray collimation and positioning adjustment device, and the spectrum acquisition and processing device connected with the CCD photosensitive device, the spectrum The collection and processing device is connected with the shutter to control the opening or closing of the shutter to control the exposure time.

The beneficial effect brought by the technical solution provided by the embodiments of the present invention is: in order to obtain a clear diffraction pattern, it is necessary to strictly control the number of photons captured by the CCD photosensitive device per unit time, and the X-ray collimation positioning adjustment device of the present invention And the system, through the horizontal driving structure, the upper XY moving table and the lower XY moving table are relatively moved to change the relative position of the upper through hole and the lower through hole, and then change the upper lead sheet and the effective aperture through which the X-rays are allowed to pass through by the lower lead sheet, so as to realize the adjustment of the X-ray luminous flux, that is, to realize strict control of the number of photons captured by the CCD photosensitive device per unit time. The CCD photosensitive device is a two-dimensional detector. After using the CCD photosensitive device, it is not necessary to use a goniometer with a large volume and a heavy weight, which is convenient for on-site use.

Description of drawings

Fig. 1 is the front view of the X-ray collimation positioning adjustment device of the present invention;

Fig. 2 is the internal structure diagram of Fig. 1;

Fig. 3 is a schematic diagram of the X-ray collimation and positioning adjustment system of the present invention.

detailed description

In order to make the purpose, technical solution and advantages of the present invention clearer, the embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

Please refer to Fig. 1, Fig. 2 and Fig. 3, the embodiment of the present invention provides an X-ray collimation positioning adjustment device 16, which is suitable for portable XRD analysis instruments, including a sealed cavity 20, installed in the sealed cavity 20 The optical path collimation adjustment mechanism, the horizontal drive structure and the vertical drive structure connecting the sealed cavity 20 and the optical path collimation adjustment mechanism.

Please refer to Fig. 2, the optical path collimation adjustment mechanism includes an upper lead sheet 9 and a lower lead sheet 13 arranged separately in the vertical direction, and also includes an upper and lower lead sheet that can move relative to each other under the drive of the horizontal drive structure. The upper XY mobile station 11 and the lower XY mobile station 12. The upper XY mobile platform 11 is a fixed platform, and its central area offers an upper through hole that runs through the upper and lower surfaces of the upper XY mobile platform. The upper lead sheet 9 is located on the upper surface of the upper XY mobile platform 11 and covers At the upper opening end of the upper through hole, a light through hole is opened at the geometric center of the upper lead sheet 9, and the light through hole is a circular hole with a diameter of about 400 microns. The lower XY mobile platform 12 is a movable platform, and its central area offers a lower through hole that runs through the upper and lower surfaces of the lower XY mobile platform 12, and the lower lead sheet 13 is located on the lower surface of the lower XY mobile platform 12. And cover the lower opening end of the lower through hole, the geometric center of the lower lead sheet 13 also offers a light through hole, the aperture of the light through hole of the lower lead sheet 9 is smaller than that of the upper lead sheet 9 The purpose of the aperture of the light hole is to block the passage of reflected light and scattered light of X-rays that are not parallel to the X-ray optical path, so as to reduce the interference of reflected light and scattered light of X-rays on the incident light of X-rays.

Please refer to FIG. 1 and FIG. 2 , the optical path collimation adjustment mechanism further includes a shutter 8 for controlling the opening or closing of the X-ray optical path to control the X-ray exposure time. The shutter 8 is located above the upper through hole and includes a bracket, a gate located on the bracket and a driver connected to the gate to drive the gate to open or close. The gate can prevent X The gate is made of radiation-penetrating stainless steel and includes several blades. By changing the positions of the several blades, the gate can be opened or closed, thereby allowing X-rays to pass or blocking X-rays to pass through.

The sealed cavity 20 includes a top wall 6 at the upper end, a bottom plate 7 at the lower end, and a housing 2 connecting the top wall 6 and the bottom plate 7, the housing 2 is cylindrical or framed, The top wall of the sealed cavity 20 is a fixed plate 6, the support of the shutter 8 is installed on the upper plane of the fixed plate 6, the thickness of the upper lead sheet 9 is thinner, the thin lead sheet is cut into the When the lead sheet 9 is on, the edge of the upper lead sheet 9 is prone to deformation, and when the light hole is opened at the geometric center of the upper lead sheet 9, it is also easy to cause the edge deformation of the light hole, and these deformations will It has a great influence on the collimation of the X-ray optical path. Therefore, in installation, the upper lead sheet 9 is located between the fixed plate 6 and the upper XY moving stage 11, and the fixed plate 6 and the upper XY moving stage 11 are connected and clamped by the upper fastening screw 10. Tighten and flatten the upper lead sheet 9, and the edge of the upper lead sheet 9 is provided with a sealing ring, by tightening the upper fastening screw 10, the reflected light and scattered light of X-rays can be prevented from emitting from above The upper XY mobile stage 11. The lower lead sheet 13 is installed at the lower opening end of the lower through hole and between the lower XY moving table 12 and the bottom plate 7 of the sealed cavity 20, and the lower lead sheet 13 is fastened by the lower Screws 14 are fixed to the lower XY moving stage 12 .

Please refer to FIG. 1 and FIG. 2 , the horizontal drive structure includes an X-direction adjustment rod (not shown) and a Y-direction adjustment rod 22 arranged perpendicular to each other, one end of the X-direction adjustment rod and the Y-direction adjustment rod 22 Both are connected to the lower XY moving table 12 , and the other ends extend outward and pass through the housing 2 to connect with the X-direction adjustment handle 4 and the Y-direction adjustment handle 5 respectively. The housing 2 is provided with handle adjustment holes through which the X-direction adjustment rod and the Y-direction adjustment rod 22 respectively pass, and the X-direction adjustment rod and the Y-direction adjustment rod 22 and the corresponding A sealing cover 21 is provided between the handle adjustment holes to prevent X-ray emission. When using the X-ray collimation and positioning adjustment device 16 of the present invention, the sealing cover 21 is removed to expose the X-direction adjustment handle 4 and the Y-direction adjustment handle 5, the X-direction adjustment handle 4 and the Y-direction adjustment handle 5 are provided with scales, which are convenient for quantitative regulation. After using the X-ray collimation and positioning adjustment device 16 of the present invention, , put the sealing cover 21 on, and the sealing cover 21 can prevent the residual X-ray radiation from being emitted from the sealing cavity 20 . By manually operating the X-direction adjustment handle 4 and the Y-direction adjustment handle 5 to adjust the X-direction adjustment rod and the Y-direction adjustment rod 22, the lower XY moving table 12 can be driven in the X direction and/or Or move upwards Y perpendicular to the X direction, so that the positional relationship between the lower XY moving table 12 and the upper XY moving table 11 is changed, and the upper lead sheet 9 and the lower lead sheet can be changed. The positional relationship between the light holes of 13 makes the centerlines of the light holes of the upper lead sheet 9 and the lower lead sheet 13 overlap or stagger, thereby changing the effective light hole diameter of X-rays and realizing the luminous flux The adjustment and simplified structure reduce the requirements for the processing technology of each component, and overcome the influence of the deformation of the light hole caused by the thinner lead sheet thickness on the optical path. At the same time, the manual adjustment mode is adopted instead of the electric mode, which avoids the Due to the obvious cost increase caused by the adoption of a high-precision drive structure, the requirements for installation space are reduced, and the requirements for portable equipment are met.

The vertical driving structure is four symmetrically arranged screw rods 1, one end of each of the screw rods 1 is located in the sealed cavity 20, and the other end extends upward and passes through the fixed plate 6 and is fastened by a Item 3 is fixed. The vertical driving structure moves while the X-ray collimating and positioning adjusting device 16 moves up and down. The direction of the up and down movement is the Z direction, the Z direction, the X direction and the Y direction are perpendicular to each other, and the Z direction is parallel to the X-ray optical path direction. By adjusting the vertical driving structure, the X-ray collimation and positioning adjustment device 16 of the present invention moves in the Z direction as a whole.

After the incident X-ray passes through the light passage hole of the shutter 8, the upper lead sheet 9 and the lower lead sheet 13, the direction and luminous flux of the output X-ray are determined by the upper lead sheet 9 It is determined by the size and relative position of the light aperture of the lower lead sheet 13, which meets the collimation requirements of the portable XRD analysis instrument for the optical path. The upper lead sheet 9 and the lower lead sheet 13 are respectively installed on the upper XY mobile table 11 and the lower XY mobile table 12, which reduces the requirements for the processing technology of each component and overcomes the problem of the thinner lead sheet thickness. The resulting deformation of the light hole affects the optical path.

Please refer to Fig. 3, an embodiment of the present invention provides an X-ray collimation positioning adjustment system, which is a portable XRD analysis instrument, including an X-ray source, used to adjust the divergence angle and photons of the rays emitted by the X-ray source Energy primary filter 15, the above-mentioned X-ray collimation and positioning adjustment device 16 behind the primary filter 15, and a CCD photosensitive device 17 for detecting X-rays behind the X-ray collimation and positioning adjustment device 16 And a spectrum collection and processing device 23 connected to the CCD photosensitive device 17, the spectrum collection and processing device 23 is connected to the shutter 8 to control the opening or closing of the shutter 8 to control the exposure time.

The incident X-ray emitted from the X-ray source undergoes two changes under the action of the primary filter 15: one is that the divergence angle of the incident X-ray becomes smaller; the other is the energy of the incident X-ray photon is limited to a smaller range. After the X-ray passes through the X-ray collimation and positioning adjustment device 16 of the present invention, in the vacuum cavity of the CCD photosensitive device 17, the CCD photosensitive device 17 converts photon energy into electric charge, and the stronger the energy of the photon or the photon The greater the amount of , the greater the amount of charges produced after conversion. The spectrum collector 18 in the spectrum collection and processing device 23 adjusts the exposure time by controlling the opening and closing of the shutter 8 . In one collection period, the spectrum collector 18 reads out the charge of each pixel in the CCD photosensitive device 17 and transmits it to the spectrum processor 19 in the spectrum collection and processing device 23 . The spectrum processor 19 calculates the diameter and the center of the brightest light spot according to the spectral image received: (1) when the brightest light spot does not exist, it is referred to as the no-bright spot mode, which represents the light-through hole and the light-through hole of the upper lead sheet 9. The geometrical centerline between the lower lead sheet 13 light apertures and the incident X-ray center calibration deviation is larger, in this case, directly replace the lower lead sheet 13, so that the light aperture of the lower lead sheet after replacement The aperture is greater than the aperture of the light-through hole of the lower lead sheet 13 before replacement, until an obvious light spot can be observed; (2) when the diameter of the brightest light spot is less than the aperture of the light-through hole of the lower lead sheet 13, Coarse adjustment mode for short, calculate the offset between the spot center and the ideal spot reference point, and then rotate the X-direction adjustment lever and the Y-direction adjustment lever 22 to realize position compensation; repeat the above steps until the obtained spot diameter is greater than or Equal to the aperture of the clear hole of described lower lead sheet 13; It is already close to the ideal spot reference point, and the manual adjustment accuracy of the upper XY moving stage 11 and the lower XY moving stage 12 is generally 10 microns. When the offset has not been improved after two consecutive adjustments, stop the operation, and it can be considered that the optical path collimation adjustment has been completed.

The beneficial effect brought by the technical solution provided by the embodiments of the present invention is: in order to obtain a clear diffraction pattern, it is necessary to strictly control the number of photons captured by the CCD photosensitive device per unit time, and the X-ray collimation positioning adjustment device of the present invention 16 and the system, the upper XY moving table 11 and the lower XY moving table 12 are relatively moved through the horizontal driving structure to change the relative position of the upper through hole and the lower through hole, and then change the The upper lead sheet 9 and the lower lead sheet 13 allow X-rays to pass through effective apertures to realize the adjustment of the X-ray luminous flux, that is, to strictly control the number of photons captured by the CCD photosensitive device 17 per unit time. The CCD photosensitive device 17 is a two-dimensional detector. After using the CCD photosensitive device, it is not necessary to use a goniometer with a large volume and a heavy weight, which is convenient for on-site use.

In this article, the orientation words such as front, rear, upper, and lower involved are defined by the parts in the drawings and the positions between the parts in the drawings, just for the clarity and convenience of expressing the technical solution. It should be understood that the use of the location words should not limit the scope of protection claimed in this application.

In the case of no conflict, the above-mentioned embodiments and features in the embodiments herein may be combined with each other.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection of the present invention. within range.

Claims (9)

1. An X-ray collimation and positioning adjustment device, characterized in that: comprising a sealed cavity, an optical path collimation adjustment mechanism installed in the sealed cavity, a device connecting the sealed cavity and the optical path alignment adjustment mechanism Horizontal drive structure and vertical drive structure; the top wall of the sealed cavity is a fixed plate, and the optical path collimation adjustment mechanism includes an upper lead sheet and a lower lead sheet separately arranged in the vertical direction, and also includes upper and lower lead sheets. And the upper XY mobile platform and the lower XY mobile platform that can move relatively under the driving of the horizontal driving structure, the upper XY mobile platform and the lower XY mobile platform are respectively provided with an upper through hole and a lower through hole that penetrate up and down. hole, the upper lead sheet is installed on the upper opening end of the upper through hole and is between the upper XY moving table and the fixed plate, and the lower lead sheet is installed on the lower opening end of the lower through hole And between the lower XY mobile table and the bottom plate of the sealed cavity, the geometric centers of the upper lead sheet and the lower lead sheet are provided with light holes for X-rays to pass through, and the lower lead sheet The aperture of the light hole of the sheet is smaller than the aperture of the light hole of the upper lead sheet, the vertical driving structure moves and the X-ray collimation positioning adjustment device moves up and down. 2. The X-ray collimation positioning adjustment device according to claim 1, characterized in that: the optical path collimation adjustment mechanism also includes a device installed on the upper plane of the fixed plate for controlling the opening or closing of the X-ray optical path. The shutter is located above the upper through hole. 3. The X-ray collimation and positioning adjustment device according to claim 2, wherein the shutter comprises a bracket mounted on the fixed plate, a gate arranged on the bracket, and a gate connected to the gate. A driver for driving the gate to open or close, the gate is made of stainless steel that can prevent X-rays from penetrating, and includes several blades. 4. The X-ray collimation and positioning adjustment device according to claim 1, characterized in that: the sealed cavity includes a cylindrical or frame-shaped housing connecting the fixed plate and the bottom plate, and the horizontal driving structure It includes an X-direction adjustment rod and a Y-direction adjustment rod arranged perpendicular to each other, one end of the X-direction adjustment rod and the Y-direction adjustment rod are connected to the lower XY moving table, and the other ends extend outward and pass through The housing is respectively connected with the X-direction adjustment handle and the Y-direction adjustment handle. 5. The X-ray collimation and positioning adjustment device according to claim 4, characterized in that: the X-direction adjustment rod and the Y-direction adjustment rod are provided with scales. 6. The X-ray collimation and positioning adjustment device according to claim 4, characterized in that: the housing is provided with handle adjustment holes through which the X-direction adjustment rod and the Y-direction adjustment rod respectively pass, A sealing cover is provided between the X-direction adjustment rod, the Y-direction adjustment rod and the corresponding handle adjustment hole to prevent X-rays from emitting. 7. The X-ray collimation and positioning adjustment device according to claim 1, characterized in that: the vertical drive structure is four symmetrically arranged screw rods, one end of each of the screw rods is located in the sealed cavity, The other end extends upwards and passes through the fixing plate to be fixed by a fastener. 8. The X-ray collimation and positioning adjustment device according to claim 1, characterized in that: a sealing ring is provided at the edge of the upper lead sheet, and the fixed plate and the upper XY moving table are fixed by upper fastening screws connected to clamp the upper lead sheet, and the lower lead sheet is fixed to the lower XY moving stage by the lower fastening screw. 9. An X-ray collimation and positioning adjustment system, characterized in that: it includes an X-ray source, a primary filter for adjusting the divergence angle and photon energy of the rays emitted by the X-ray source, and a primary filter located at the primary filter Thereafter, the X-ray collimation and positioning adjustment device according to any one of claims 1 to 8, the CCD photosensitive device for detecting X-rays behind the X-ray collimation and positioning adjustment device, and the CCD with the CCD A spectrum acquisition and processing device connected to the photosensitive device, and the spectrum acquisition and processing device is connected to the shutter to control the opening or closing of the shutter to control the exposure time.