CN107314852B - A kind of wrist sensor - Google Patents
A kind of wrist sensor Download PDFInfo
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- CN107314852B CN107314852B CN201610264812.6A CN201610264812A CN107314852B CN 107314852 B CN107314852 B CN 107314852B CN 201610264812 A CN201610264812 A CN 201610264812A CN 107314852 B CN107314852 B CN 107314852B
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- 210000000707 wrist Anatomy 0.000 title claims abstract description 16
- 238000001514 detection method Methods 0.000 claims abstract description 240
- 238000006073 displacement reaction Methods 0.000 claims abstract description 10
- 238000009434 installation Methods 0.000 claims description 11
- 238000005452 bending Methods 0.000 claims description 10
- 230000006698 induction Effects 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 3
- 238000011897 real-time detection Methods 0.000 abstract description 3
- 238000007689 inspection Methods 0.000 description 6
- 230000005489 elastic deformation Effects 0.000 description 5
- 238000010276 construction Methods 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
A kind of wrist sensor, including support ring, detection beam, mounting blocks and detection sensing chip；Support ring is fixed at detection beam both ends, and detection sensing chip is installed on detection beam；Mounting blocks are installed on detection beam；Support ring is respectively arranged in the two different components that can generate displacement from mounting blocks, when two different components generate relative displacement, it detects beam and generates deformation, make to detect the deformation that sensing chip incudes the detection beam, the sensor can simultaneously quickly in real-time detection XYZ three-dimensional orthogonal coordinate system each change in coordinate axis direction power and power or torque in the torque of each reference axis, about at least one axis.
Description
Technical field
The present invention relates to force snesor fields, more particularly to applied to the force snesor at joint of robot position.
Background technique
With the continuous development of robot, the interaction of robot and the mankind are more and more closer, and robot starts to move towards the mankind
Life and amusement aspect, and be not simply as production equipment and be set in factory to be engaged in processing, so robot
Development trend can further high-intelligentization and High precision.
Robot is realized according to bionic principle, motion mimics human by joint, in order to allow robot can precisely flexibly
Movement, and the movement of robot, industrial machinery is controlled convenient for manipulator, various types of force snesors are utilized,
It especially at joint of robot, generally requires and does multivariant work, stress is complicated, if the detection data to power cannot
Real-time Feedback, or the stress data of feedback are inaccurate, and cental system is not just accurately referring to data, so that manipulator cannot
Robot is manipulated accordingly accurately, and is highly detrimental to the operation and maintenance of robot, results even in machine
People's damage.
In the prior art, small-sized force snesor is loaded into the man-machine interface as electronic equipment input device.In order to realize
It minimizes and simplifies the structure, it is also necessary to independently detect the power about each reference axis in three-dimensional space, often structure
The generally combination of cyclic annular, sheet or both is formed in the way of nested or superposition, such as Japanese Unexamined Patent Publication 2004-325367 public affairs
Report (No. 7219561 bulletins of U.S. Patent No.), Japanese Unexamined Patent Publication 2004-354049 bulletin (No. 6915709 public affairs of U.S. Patent No.
Report) in disclose electrostatic capacitance multi-axis force transducer, static capacitor elements formula force snesor constitutes capacitor by a pair of electrodes
Element, and the displacement generated on a wherein electrode by the power acted on is detected according to the electrostatic capacitance value of capacity cell, it is such
The thickness in mechanical structure portion all inevitably increases, and device is integrally difficult to be thinned, it is difficult to which widespread adoption is led in robot
Domain.
Above-mentioned one kind sensor there are the problem of be also current more common problem in the prior art, sensor is answered
Height setting is limited, and often not comprehensive in structure, installation and practical three factors, the simple sensor of structure is not durable, resistance to
Sensor structure is again more complicated, and complicated sensor needs more energy in installation.
Summary of the invention
In view of the foregoing drawbacks, it is an object of the invention to propose that a kind of observation point is more, and overall structure is conducive to improve
The wrist sensor of detection accuracy, the device accurately can detect active force suffered by each dimension simultaneously, and in multiple sides
The size of power and torque in the size and single direction of upward power.
To achieve this purpose, the present invention adopts the following technical scheme: a kind of wrist sensor, including support ring, detection beam, peace
Fill block and detection sensing chip；The support ring is fixed at the detection beam both ends, and the detection sensing chip is installed on the detection
Beam；The mounting blocks are installed on the detection beam；The support ring and the mounting blocks, which are respectively arranged in, can generate the two of displacement
A difference component, when two difference components generate relative displacement, detection beam generates deformation, makes to detect the sensing chip induction inspection
Survey the deformation of beam.
Preferably, using XY axis as plane, centered on Z axis, two detection beams are respectively with X there are two the detection beams
Axis and Y direction setting, two detection beams are in cross-shaped setting；Two detection beams are in same plane, institute
It states detection beam center and is equipped with groove, mutually avoided between the detection beam by the groove.
Preferably, the support ring inner ring is divided into four installation regions by the detection beam；Pacify in the installation region
Equipped with the mounting blocks, there are four the mounting blocks；The mounting blocks are installed on the detection beam.
Preferably, the detection beam includes detection section and groove, thick both ends are thin in the middle part of the detection section；The detection Liang Bao
Two end to end compositions of linkage section are included, the groove is opened in the detection beam center；It is equipped in the middle part of the detection section
Twisting part, the detection section two sides are mounted on the twisting part, and the twisting part is for installing the mounting blocks, the twisting
Part is fine strip shape elastic component.
Further, bending member is mounted between the detection beam end and the support ring, the bending member is convenient for
The detection beam generates deformation relative to the support ring.
Preferably, the bending member is the arc-shaped through-hole for being set to the detection beam end, the arc-shaped through-hole makes described
It detects and forms two panels flake interconnecting piece between beam end and the support ring.
Further, the mounting blocks are equipped with upper installing hole, and the support ring is equipped with lower mounting hole；The upper installing hole with
The mode of annular array is opened in the support ring, and the lower mounting hole is opened between the arc-shaped through-hole.
Further, detection sensing chip is equipped in the detection back portion, bottom, two sides and groove.
Preferably, the detection beam is equipped with detection sensing chip；Between X-direction detection soffit in the detection beam etc.
Sensing chip, the 12nd detection sensing chip and the 13rd detection sensing chip are detected away from being equipped with the 11st；The X-axis detects beam and two
The contact portion of the twisting part is respectively equipped with the 11st detection sensing chip and the 13rd detection sensing chip；Positioned at described
Groove side be equidistantly equipped with it is described 8th detection sensing chip, the 9th detection sensing chip and the tenth detection sensing chip, the described 9th
Sensing chip heart line in the grooves is detected, the X-axis detection beam and two twisting part contact portions are respectively equipped with the described 8th
Detect sensing chip and the tenth detection sensing chip；Groove both ends highest point is equipped with the 5th detection sensing chip and the 6th detection sense
Piece is answered, the groove center lowest part is equipped with the 7th detection sensing chip；Using X-axis and Z axis as plane, centered on Y-axis, the X-axis
Detection section and the support ring connecting portion are equipped with the 16th detection sensing chip and the 15th detection one on the other on the left of detection beam
Sensing chip；Detection section and the support ring connecting portion are equipped with the 14th detection one on the other and incude on the right side of the X-axis detection beam
Piece and the 17th detection sensing chip；The Y direction detection top surface of the beam is located at the groove center line equipped with the first detection induction
Piece, the Y-axis detection beam is located at the groove center line two sides and detects sensing chip equipped with the second detection sensing chip and the 4th, described
Groove center is equipped with third and detects sensing chip.
The present invention proposes that a kind of wrist sensor, the device include the support ring of integrated setting, inspection according to above content
Beam and mounting blocks are surveyed, the detection beam is equipped with detection sensing chip.The support ring is equivalent to pedestal, when the sensor is pacified
After dress is fixed, the mounting blocks and the support ring are used for attaching equipment, and mounting blocks described in the detection beam are for receiving outside
Active force, when the mounting blocks are by the applied external force, the mounting blocks drive the detection beam, the detection beam by
After power, certain elastic deformation can occur for the detection beam itself, in this case, the detection sensing chip of corresponding position be arranged in
Can to the sensor, stress condition is detected in X-axis, Y-axis, Z-direction respectively, and then by the sensor detect feel
The case where answering piece to set stress or torque is detected and is exported with numeric form.Because the sensor in this programme uses right-angled intersection
Structure, but between intersection construction and be not attached to, to be easier to distinguish each component, in addition, the type sensor should put more, energy
Simultaneously quickly in real-time detection XYZ three-dimensional orthogonal coordinate system the power of each change in coordinate axis direction and in the torque of each reference axis, close
In the power or torque of at least one axis.
Detailed description of the invention
Fig. 1 is the overlooking structure diagram of one embodiment of the present of invention；
Fig. 2 is that embodiment incudes chip arrays schematic diagram in A-A plane in Fig. 1；
Fig. 3 is the X-direction detection beam top view of one embodiment；
Fig. 4 is the X-direction detection beam side view of one embodiment.
Wherein: support ring 100, arc-shaped through-hole 110, lower mounting hole 120, detection beam 200, groove 230, detection section 240, peace
It fills block 300, twisting part 310, upper installing hole 320, first and detects sensing chip S1, the second detection sensing chip S2, third detection induction
Piece S3, the 4th detection sensing chip S4, the 5th detection sensing chip S5, the 6th detection sensing chip S6, the 7th detection sensing chip S7, the 8th
Detect sensing chip S8, the 9th detection sensing chip S9, the tenth detection sensing chip S10, the 11st detection sensing chip S11, the 12nd inspection
Survey sensing chip S12, the 13rd detection sensing chip S13, the 14th detection sensing chip S14, the 15th detection sensing chip S15, the tenth
Six detection sensing chip S16, the 17th detection sensing chip S17.
Specific embodiment
To further illustrate the technical scheme of the present invention below with reference to the accompanying drawings and specific embodiments.
It is described picture 1-4, a kind of wrist sensor, including support ring 100, detection beam 200, mounting blocks 300 and detection sense
Answer piece；The support ring 100 is fixed at 200 both ends of detection beam, and the detection sensing chip is installed on the detection beam 200；
The mounting blocks 300 are installed on the detection beam 200；The support ring 100 is respectively arranged in and can generate with the mounting blocks 300
The different components of two of displacement, when two different components generate relative displacement, detection beam 200 generates deformation, incudes detection
Piece incudes the deformation of the detection beam 200；As illustrated in fig. 1 and 2, pass through detection beam 200 between support ring 100 and mounting blocks 300
Connection, wherein support ring 100 is respectively arranged in different components from mounting blocks 300, and mounting blocks 300 are pacified convenient for component installation
It is more accurate that the position of dress block 300 is conducive to detection data；The detection sensing chip is electrically connected with the detection circuit, when two not
When same component generates relative displacement, drive the detection beam 200 that its is made to generate flexible deformation, the detection circuit is according to
The testing result of sensing chip is detected, exports the power of the defined change in coordinate axis direction acted on the detection beam 200 or around defined
The detected value of the torque of reference axis.
Wherein, there are two the detection beams 200, using XY axis as plane, centered on Z axis, two detection beams 200 are distinguished
It is arranged with X-axis and Y direction, two detection beams 200 are in cross-shaped setting；Two detection beams are in same flat
Face, the detection beam center are equipped with groove, are mutually avoided between the detection beam by the groove；Detecting beam 200 includes Y-axis
It detects beam 210 and X-axis detects beam 220, two detection beams 200 are arranged in the disjunct mode of right-angled intersection, and this mode is more conducive to
The stress of the stress and moment inspecting of multi-angle, two detection beams 200 is not interfere with each other mutually, to keep the data examined more accurate, more
Easily distinguishable and each component of resolution.
In addition, 100 inner ring of support ring is divided into four installation regions by the detection beam 200；The installation region
In the mounting blocks 300 are installed, there are four the mounting blocks 300；The mounting blocks 300 are installed on the detection beam 200.
Mounting blocks 300 are installed on two disjunct detection beams 200, and mounting blocks have 4, this mounting means for
The detection of each component and torque is sensitiveer and fine, when the component actuation for being installed on mounting blocks 300, then will drive detection beam,
Multiple mounting blocks drive detection beam to be able to detect that more data are analyzed, to obtain more accurate result.
Wherein, the detection beam 200 includes detection section 240 and groove 230, and the thick both ends in 240 middle part of detection section are thin；Institute
Stating detection beam 200 includes two end to end compositions of the linkage section 240, and the groove 230 is opened in the detection beam 200
The heart；Twisting part 310 is equipped in the middle part of the detection section 240,240 two sides of detection section are mounted on the twisting part 310, described
Twisting part 310 is fine strip shape elastic component for installing the mounting blocks 300, the twisting part 310；Between attachment beam and mounting blocks
Equipped with twisting part 310, the effect of twisting part 310 is to keep detection device sensitiveer, likewise, the shape of detection section 240 makes to detect
Elastic deformation is more prone to produce between beam 220 and support ring, both of which is to be readily detected smaller power, is further mentioned
The detection accuracy of sensor entirety is risen.
In addition, being mounted on bending member between 200 end of detection beam and the support ring 100, the bending member is just
Deformation is generated relative to the support ring 100 in the detection beam 200；The effect of bending member is to make to detect beam 200 and branch
It is easy to produce elastic deformation between pushing out ring 100, to enable detection sensing chip to sense the subtle deformation of detection beam 200, such as
This just can detect subtleer dynamics data, keep testing result more accurate.
The bending member is the arc-shaped through-hole for being set to detection 200 end of beam, and the arc-shaped through-hole makes the detection
Two panels flake interconnecting piece is formed between 200 end of beam and the support ring 100；The setting of arc-shaped through-hole 110 is to be conducive to detection
The elastic deformation of beam 200, relative to the support ring 100 of entity, support ring provided with arc-shaped through-hole 110 and detection beam 200 it
Between be more prone to produce elastic deformation, it is easier to generate elastically-deformable purpose be exactly make detect sensing chip be able to detect that it is more tiny
Power, from keeping testing result more accurate.
The mounting blocks 300 are equipped with upper installing hole 320, and the support ring 100 is equipped with lower mounting hole 120；The upper installation
Hole 320 is opened in the support ring 100 in a manner of annular array, and the lower mounting hole 120 is opened in the arc-shaped through-hole
Between 110；The set-up mode of upper installing hole 320 and lower mounting hole 120 is conducive to the installation of other component, and the row of mounting hole
Column mode is conducive to neutralize transmission for the collection of component and torque, to be conducive to the detection of component and torque.
Detection sensing chip is equipped in the detection back portion, bottom, two sides and groove；The position of sensing chip is set to inspection
Each position of beam is surveyed, it further includes the side for detecting beam that these positions, which include the top and bottom for detecting beam, makes sensing chip side entirely
Position is set to detection beam, and the data that two detection beams detect do not interfere with each other, and detects X, Y, Z axis aspect so as to three-dimensional
Component or torque data.
The detection beam 200 is equipped with detection sensing chip；200 bottom surface of detection beam of the X-direction is equidistantly equipped with
11 detection sensing chip S11, the 12nd detection sensing chip S12 and the 13rd detection sensing chip S13；X-axis detection beam 200 with
The contact portion of two twisting parts 310 is respectively equipped with the 11st detection sensing chip S11 and the 13rd detection incudes
Piece S13；The 8th detection sensing chip S8, the 9th detection sensing chip S9 and the are equidistantly equipped with positioned at 230 side of groove
Ten detection sensing chip S10, the 9th detection sensing chip S9 are located at 230 center line of groove, and the X-axis detects beam 200 and two
310 contact portion of twisting part is respectively equipped with the 8th detection sensing chip S8 and the tenth detection sensing chip S10；The groove
230 both ends highest points are equipped with the 5th detection sensing chip S5 and the 6th detection sensing chip S6, and the 230 center lowest part of groove is equipped with
7th detection sensing chip S7；Using X-axis and Z axis as plane, centered on Y-axis, section 240 and institute are detected on the left of the X-axis detection beam 220
It states 100 connecting portion of support ring and is equipped with the 16th detection sensing chip S16 and the 15th detection sensing chip S15 one on the other；The X
Section 240 is detected on the right side of shaft detection beam 220 and 100 connecting portion of support ring is equipped with the 14th detection sensing chip one on the other
The detection of S14 and the 17th sensing chip S17；The Y direction detection top surface of the beam is located at the groove center line equipped with the first detection
Sensing chip S1, the Y-axis detection beam are located at the groove center line two sides equipped with the second detection sensing chip S2 and the 4th detection sense
Piece S4 is answered, the groove center is equipped with third and detects sensing chip S3；As shown in Fig. 2, measuring point number of the invention increases than similar product
Added many, modern computer digital animation ability has greatly improved, established in middle big data it is more efficient on model,
Foil gauge is also cheaper, therefore multiple spot dynamometry is a developing direction, so corresponding to each component and torsional forces has
10 or more force-detecting positions mainly measure numerical value and the direction of its power, keep the measurement of power more acurrate.
As shown in Figure 1, a kind of wrist sensor, is equipped with support ring 100, detection beam 200 and mounting blocks 300, the inspection
It surveys beam 200 and is equipped with detection sensing chip；The support ring 100 is equivalent to pedestal, after the sensor, which is installed, to be fixed, the peace
Dress block 300 is respectively arranged in two different components from the detection beam 200, and the detection beam 200 is for receiving external action
Power, when the mounting blocks 300 are by the applied external force, the mounting blocks 300 drive the detection beam 200, the inspection
After surveying 200 stress of beam, relative to the support ring 100 change in shape can occur for the detection beam 200, in this case, setting
Corresponding position detection sensing chip can to the sensor, stress condition be detected in X-axis, Y-axis, Z-direction respectively,
And then the case where sensor detection sensing chip is set stress or torque, is detected and is exported with numeric form.Because in this programme
Sensor use criss-cross construction, but between intersection construction and be not attached to, to be easier to distinguish each component, this
Outside, which should put more, can simultaneously quickly in real-time detection XYZ three-dimensional orthogonal coordinate system each change in coordinate axis direction power with
And power or torque in the torque of each reference axis, about at least one axis, 200 material of detection beam are elastic material；Institute
Support ring 100 is stated with certain rigidity, since sensor is the component part of mechanical hand transmitting load, so support ring 100
Be conducive to improve the service life of equipment using rigid material production.
The technical principle of the invention is described above in combination with a specific embodiment.These descriptions are intended merely to explain of the invention
Principle, and shall not be construed in any way as a limitation of the scope of protection of the invention.Based on the explanation herein, the technology of this field
Personnel can associate with other specific embodiments of the invention without creative labor, these modes are fallen within
Within protection scope of the present invention.
Claims (8)
1. a kind of wrist sensor, it is characterised in that: including support ring, detection beam, mounting blocks and detection sensing chip；
The support ring is fixed at the detection beam both ends, and the detection sensing chip is installed on the detection beam；
The mounting blocks are installed on the detection beam；
The support ring is respectively arranged in the two different components that can generate displacement from the mounting blocks, when two different components produce
When raw relative displacement, detection beam generates deformation, makes to detect the deformation that sensing chip incudes the detection beam；
There are two the detection beams, and using XY axis as plane, centered on Z axis, two detection beams are respectively with X-axis and Y direction
Setting, two detection beams are in cross-shaped setting；
Two detection beams are in same plane, and the detection beam center is equipped with groove, passes through between the detection beam described
Groove is mutually avoided.
2. wrist sensor according to claim 1, it is characterised in that: the detection beam separates the support ring inner ring
For four installation regions；
The mounting blocks are installed, there are four the mounting blocks in the installation region；The mounting blocks are installed on the detection
Beam.
3. wrist sensor according to claim 2, it is characterised in that: the detection beam includes detection section and groove, institute
It is thin to state thick both ends in the middle part of detection section；
The detection beam includes two end to end compositions of linkage section, and the groove is opened in the detection beam center；
Twisting part is equipped in the middle part of the detection section, the detection section two sides are mounted on the twisting part, and the twisting part is used for
The mounting blocks are installed, the twisting part is fine strip shape elastic component.
4. wrist sensor according to claim 3, it is characterised in that: between the detection beam end and the support ring
It is mounted on bending member, the bending member generates deformation relative to the support ring convenient for the detection beam.
5. wrist sensor according to claim 4, it is characterised in that: the bending member is to be set to the detection beam-ends
The arc-shaped through-hole in portion, the arc-shaped through-hole make to form the connection of two panels flake between the detection beam end and the support ring
Portion.
6. wrist sensor according to claim 5, it is characterised in that: the mounting blocks are equipped with upper installing hole, the branch
Pushing out ring is equipped with lower mounting hole；
The upper installing hole is opened in the support ring in a manner of annular array, and the lower mounting hole is opened in the arc
Between through-hole.
7. wrist sensor according to claim 6, it is characterised in that: the detection back portion, bottom, two sides and groove
In be equipped with detection sensing chip.
8. wrist sensor according to claim 7, it is characterised in that: the detection beam is equipped with detection sensing chip；
X-direction detection soffit in the detection beam is equidistantly equipped with the 11st detection sensing chip, the 12nd detection induction
Piece and the 13rd detection sensing chip；The contact portion of the X-axis detection beam and two twisting parts is respectively equipped with the described 11st
Detect sensing chip and the 13rd detection sensing chip；
It is equidistantly equipped with the 8th detection sensing chip, the 9th detection sensing chip and the tenth detection sensing chip positioned at the groove side,
Heart line, the X-axis detection beam are respectively equipped with the 9th detection sensing chip with two twisting part contact portions in the grooves
The 8th detection sensing chip and the tenth detection induction；
Groove both ends highest point is equipped with the 5th detection sensing chip and the 6th detection sensing chip, and the groove center lowest part is set
There is the 7th detection sensing chip；
Using X-axis and Z axis as plane, centered on Y-axis, detection section and the support ring connecting portion one on the left of the X-axis detection beam
Upper one has the 16th detection sensing chip and the 15th detection sensing chip；Detection section and the branch on the right side of the X-axis detection beam
Pushing out ring connecting portion is equipped with the 14th detection sensing chip and the 17th detection sensing chip one on the other；
The Y direction detection top surface of the beam is located at the groove center line equipped with the first detection sensing chip, and the Y-axis detects beam position
It is equipped with the second detection sensing chip and the 4th detection sensing chip in the groove center line two sides, the groove center is examined equipped with third
Survey sensing chip.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610264812.6A CN107314852B (en) | 2016-04-26 | 2016-04-26 | A kind of wrist sensor |
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| CN201610264812.6A CN107314852B (en) | 2016-04-26 | 2016-04-26 | A kind of wrist sensor |
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| CN107314852B true CN107314852B (en) | 2019-10-11 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111426421B (en) * | 2018-12-20 | 2022-01-04 | 财团法人工业技术研究院 | Multi-axis force sensing device |
| TWI716789B (en) | 2018-12-20 | 2021-01-21 | 財團法人工業技術研究院 | Multi-axis force sensor |
| CN112611497B (en) * | 2019-09-18 | 2022-01-28 | 马洪文 | Multi-dimensional force sensor structure of parallel rod system |
| US20230332964A1 (en) * | 2020-09-04 | 2023-10-19 | Shenzhen New Degree Technology Co., Ltd. | Beam pressure sensor, pressure sensing device and electronic apparatus |
| CN112129449B (en) * | 2020-09-29 | 2025-01-24 | 河南大学 | A multi-dimensional force sensing device and method for robot fingers based on fiber grating |
| CN112945441A (en) * | 2021-03-03 | 2021-06-11 | 广西安博特智能科技有限公司 | Capacitance type torque sensor with optimized deformation beam structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US5969268A (en) * | 1997-07-15 | 1999-10-19 | Mts Systems Corporation | Multi-axis load cell |
| JP4907050B2 (en) * | 2003-03-31 | 2012-03-28 | 株式会社ワコー | Force detection device |
| JP4387691B2 (en) * | 2003-04-28 | 2009-12-16 | 株式会社ワコー | Force detection device |
| CN102323000B (en) * | 2011-05-30 | 2012-12-12 | 哈尔滨工业大学 | Safe force-coupling-free six-dimensional force sensor |
| CN202720078U (en) * | 2012-05-29 | 2013-02-06 | 宁波柯力传感科技股份有限公司 | Strain type six-dimensional force sensor |
| CN103076131B (en) * | 2012-12-31 | 2014-12-17 | 东南大学 | Six-dimensional force and torque sensor for measuring large force and small torque of large mechanical arm |
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