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CN107302034B - Solar cell with surface plasmon enhanced nano microcavity structure - Google Patents

Solar cell with surface plasmon enhanced nano microcavity structure Download PDF

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CN107302034B
CN107302034B CN201710174398.4A CN201710174398A CN107302034B CN 107302034 B CN107302034 B CN 107302034B CN 201710174398 A CN201710174398 A CN 201710174398A CN 107302034 B CN107302034 B CN 107302034B
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solar cell
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surface plasmon
film solar
microcavity
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CN107302034A (en
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黄茜
仝玉鹏
张晓丹
赵颖
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Nankai University
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/70Surface textures, e.g. pyramid structures
    • H10F77/707Surface textures, e.g. pyramid structures of the substrates or of layers on substrates, e.g. textured ITO layer on a glass substrate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/17Photovoltaic cells having only PIN junction potential barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
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Abstract

一种表面等离子激元增强型纳米微腔结构的太阳电池,包括一个具有表面等离子激元增强特性的复合三维纳米微腔和一个PIN或NIP型薄膜太阳电池。其中具有表面等离子激元增强特性的复合三维纳米微腔由氧化物三维纳米结构与金属纳米颗粒构成;其中薄膜太阳电池包括无机薄膜太阳电池、有机薄膜太阳电池及由以上两种中至少一种构成的叠层太阳电池。本发明有益效果是:将金属纳米颗粒的表面等离子激元作用引入三维纳米微腔陷光结构中,获得具有定域化高能电场的纳米微腔结构,以增强光程拓展、提升光子剪裁与调制效果,获得良好陷光效果,并优化电荷收集性能,该结构能够获得提高电池有效光学吸收效率及降低光生载流子复合几率的良好效果,可应用于各类薄膜太阳电池中,利于电池光学及电学特性的同步提升。

Figure 201710174398

A surface plasmon-enhanced nano-microcavity structure solar cell includes a composite three-dimensional nano-microcavity with surface plasmon-enhancing properties and a PIN or NIP type thin-film solar cell. The composite three-dimensional nano-microcavity with surface plasmon enhancement properties is composed of oxide three-dimensional nanostructures and metal nanoparticles; the thin-film solar cells include inorganic thin-film solar cells, organic thin-film solar cells, and at least one of the above two types. tandem solar cells. The beneficial effects of the invention are as follows: the surface plasmon effect of metal nanoparticles is introduced into the three-dimensional nano-microcavity light trapping structure to obtain a nano-microcavity structure with a localized high-energy electric field, so as to enhance the optical path expansion, and improve the photon tailoring and modulation. It can achieve good light trapping effect and optimize charge collection performance. This structure can achieve good effects of improving the effective optical absorption efficiency of the battery and reducing the recombination probability of photogenerated carriers. Synchronized improvement of electrical characteristics.

Figure 201710174398

Description

一种表面等离子激元增强型纳米微腔结构的太阳电池A surface plasmon-enhanced solar cell with nano-microcavity structure

技术领域technical field

本发明属于薄膜太阳电池领域,尤其是一种表面等离子激元增强型纳米微腔结构的太阳电池。The invention belongs to the field of thin film solar cells, in particular to a solar cell with a surface plasmon enhancement type nano-micro cavity structure.

背景技术Background technique

太阳电池要成为未来主力能源形式,必须实现高效与低成本,其中薄层化一直是非常重要的发展趋势之一。此外,对于非晶硅薄膜电池,有源层厚度的降低,还有利于降低光致衰退效应,提升器件稳定性。而对于铜铟镓硒、碲化镉等化合物太阳电池,厚度的降低,可减少有毒及微量元素的使用量,同样有利于提升产业竞争力。然而材料的减薄,因其有限吸收系数(特别在带隙附近),则必须借助于高效的光管理结构,以薄的“物理厚度”获得厚的“光学厚度”,实现对太阳光子的有效吸收。In order for solar cells to become the main form of energy in the future, high efficiency and low cost must be achieved, of which thinning has always been one of the most important development trends. In addition, for amorphous silicon thin-film cells, the reduction in the thickness of the active layer is also conducive to reducing the photo-induced degradation effect and improving the stability of the device. For compound solar cells such as copper indium gallium selenide and cadmium telluride, the reduction in thickness can reduce the use of toxic and trace elements, which is also conducive to enhancing industrial competitiveness. However, the thinning of the material, due to its limited absorption coefficient (especially near the band gap), must rely on efficient light management structures to obtain a thick "optical thickness" with a thin "physical thickness" to achieve effective solar photons. absorb.

随着对太阳电池研究的深入,人们逐渐认识到高效光管理结构的重要性。近年来基于三维纳米微腔结构的太阳电池因其优异的性能,受到越来越多的关注。入射光子可在三维纳米微腔结构界面处实现多重散射,为光子提供了多重入射路径,大大降低了有源层吸收特性与入射角分布间的束缚关联,可在宽光谱范围内获得高吸收性能,参见文献:M.D. Kelzenberg, S. W. Boettcher, J. A. Petykiewicz, et al, Nature Mater. 9(2010) 239-44、J.Y. Jung, Z. Guo, S.W. Jee, et al, A strong antireflectivesolar cell prepared by tapering silicon nanowires, Opt. Express 18(2010)A286-92。此外,纳米尺度的金属结构,其表面大量的自由电子能够与光子相互作用产生持续的共有化振荡,将形成一种称之为表面等离子激元 (Surface Plasmon Polariton:SPP)的自由电子和光子的混合激发态,具有显著的远场与近场光电特性。一方面,利用纳米金属结构表面等离子激元的远场光学特性,通过与光子的远场耦合作用,激发出光子的光波导传输模式,已经获得薄膜太阳电池中的良好陷光特性,实现吸收限附件光子吸收的显著增强;另一方面,利用纳米金属结构的近场电学特性,激发的表面等离子激元能够改变周围空间的电磁场分布特性,从而获得有机太阳电池中电子传输层功函数的有效调控,实现电荷的高效输运,参见文献:H. A. Atwater, A. Polman Nature Materials 9 (2010)205-213、S. Trost, T. Becker, K. Zilberberg, et al, Scientific Reports 5(2015)7765。With the deepening of research on solar cells, people gradually realize the importance of efficient light management structures. In recent years, solar cells based on three-dimensional nano-microcavity structures have received more and more attention due to their excellent performance. The incident photons can achieve multiple scattering at the interface of the three-dimensional nano-microcavity structure, providing multiple incident paths for photons, greatly reducing the binding correlation between the absorption characteristics of the active layer and the incidence angle distribution, and obtaining high absorption performance in a wide spectral range. , see literature: MD Kelzenberg, SW Boettcher, JA Petykiewicz, et al, Nature Mater. 9(2010) 239-44, JY Jung, Z. Guo, SW Jee, et al, A strong antireflectivesolar cell prepared by tapering silicon nanowires, Opt. Express 18 (2010) A286-92. In addition, a large number of free electrons on the surface of nano-scale metal structures can interact with photons to generate continuous shared oscillations, which will form a kind of free electron and photon interaction called surface plasmon polariton (SPP). Mixed excited states with remarkable far-field and near-field optoelectronic properties. On the one hand, using the far-field optical properties of surface plasmons of nano-metal structures, through the far-field coupling with photons, the optical waveguide transmission mode of photons is excited, and good light trapping properties in thin-film solar cells have been obtained. Significant enhancement of the photon absorption of accessories; on the other hand, utilizing the near-field electrical properties of the nano-metal structure, the excited surface plasmons can change the electromagnetic field distribution properties of the surrounding space, thereby obtaining effective regulation of the work function of the electron transport layer in organic solar cells , to achieve efficient charge transport, see literature: HA Atwater, A. Polman Nature Materials 9 (2010) 205-213, S. Trost, T. Becker, K. Zilberberg, et al, Scientific Reports 5 (2015) 7765.

基于此,本发明提出一种表面等离子激元增强型纳米微腔结构的太阳电池,提出将金属纳米颗粒的表面等离子激元作用引入三维纳米微腔陷光结构中,获得具有定域化高能电场的纳米微腔结构,以增强光程拓展、提升光子剪裁与调制效果,获得良好陷光效果,并优化电荷收集性能,该结构能够获得提高电池有效光学吸收效率及降低光生载流子复合几率的良好效果,可应用于各类太阳电池中,利于电池光学及电学特性的同步提高。Based on this, the present invention proposes a solar cell with a surface plasmon-enhanced nano-microcavity structure, and proposes to introduce the surface plasmon effect of metal nanoparticles into a three-dimensional nano-microcavity light trapping structure to obtain a localized high-energy electric field. The nano-microcavity structure can enhance the optical path expansion, improve the photon tailoring and modulation effect, obtain a good light trapping effect, and optimize the charge collection performance. The good effect can be applied to various solar cells, which is beneficial to the simultaneous improvement of the optical and electrical properties of the cells.

发明内容SUMMARY OF THE INVENTION

本发明目的旨在进一步提升太阳电池性能,提出一种表面等离子激元增强型纳米微腔结构的太阳电池,将纳米颗粒的表面等离子激元作用引入三维纳米微腔陷光结构,获得具有定域化高能电场的纳米微腔结构的太阳电池,该结构能够获得提高电池有效光学吸收效率及降低光生载流子复合几率的良好效果,可应用于各类薄膜太阳电池中,利于薄膜电池的光学及电学特性的同步提高。The purpose of the present invention is to further improve the performance of solar cells, and propose a solar cell with a surface plasmon enhanced nano-microcavity structure, which introduces the surface plasmon effect of nanoparticles into a three-dimensional nano-microcavity light trapping structure to obtain a localized light-trapping structure. A solar cell with a nano-microcavity structure with a high-energy electric field, this structure can achieve good effects of improving the effective optical absorption efficiency of the cell and reducing the recombination probability of photogenerated carriers, and can be applied to various thin-film solar cells. Synchronized improvement of electrical characteristics.

本发明的技术方案:Technical scheme of the present invention:

一种表面等离子激元增强型纳米微腔结构的太阳电池,包括一个具有表面等离子激元增强特性的复合纳米结构和一个PIN或NIP型薄膜太阳电池,其特征在于:所述薄膜太阳电池直接沉积于复合纳米结构之上,构成三维纳米微腔结构;所述表面等离子激元增强型纳米微腔太阳电池具有显著的光吸收增强效果。A solar cell with a surface plasmon enhancement type nano-microcavity structure, comprising a composite nanostructure with surface plasmon enhancement properties and a PIN or NIP type thin film solar cell, characterized in that: the thin film solar cell is directly deposited A three-dimensional nano-micro-cavity structure is formed on the composite nano-structure; the surface plasmon-enhanced nano-micro-cavity solar cell has a remarkable light absorption enhancement effect.

所述具有表面等离子激元增强特性的复合纳米结构由氧化物三维纳米阵列与金属纳米颗粒构成,其中三维纳米阵列包括纳米柱、纳米锥、纳米球阵列中的至少一种,其中金属纳米颗粒包括金纳米颗粒、银纳米颗粒、铝纳米颗粒中至少一种材料。The composite nanostructure with surface plasmon enhancement properties is composed of oxide three-dimensional nanoarrays and metal nanoparticles, wherein the three-dimensional nanoarrays include at least one of nanopillars, nanocones, and nanosphere arrays, wherein the metal nanoparticles include At least one material among gold nanoparticles, silver nanoparticles, and aluminum nanoparticles.

所述表面等离子激元增强特性的复合纳米结构具有导电特性,可以实现电子或空穴的有效传输。The composite nanostructure with enhanced surface plasmon properties has conductive properties and can achieve efficient transport of electrons or holes.

所述薄膜太阳电池包括无机薄膜太阳电池、有机薄膜太阳电池及由以上两种中至少一种构成的叠层太阳电池。The thin film solar cells include inorganic thin film solar cells, organic thin film solar cells and stacked solar cells composed of at least one of the above two.

【附图说明】【Description of drawings】

图1为表面等离子激元增强型纳米微腔结构太阳电池结构示意图。FIG. 1 is a schematic diagram of the structure of a surface plasmon-enhanced nano-microcavity solar cell.

图2为实施例1中表面等离子激元增强型纳米微腔结构非晶硅薄膜太阳电池外量子效率测试曲线。FIG. 2 is a test curve of external quantum efficiency of a surface plasmon-enhanced nano-microcavity structure amorphous silicon thin film solar cell in Example 1. FIG.

【具体实施方式】【Detailed ways】

实施例1:Embodiment 1:

一种表面等离子激元增强型纳米微腔结构的太阳电池,结构如下:A solar cell with a surface plasmon-enhanced nano-microcavity structure, the structure is as follows:

1)在透明玻璃衬底之上制备一层粒径为300 nm的单分散性SiO2小球,并在SiO2小球之上附着粒径为20 nm的纳米Ag颗粒,随后沉积一层厚度为500 nm的透明导电ZnO:Al作为前电极,使得整体结构的方块电阻达15 Ω/□。以上三种材料构成表面等离子增强型复合纳米结构。1) A layer of monodisperse SiO 2 spheres with a particle size of 300 nm was prepared on a transparent glass substrate, and nano-Ag particles with a particle size of 20 nm were attached on the SiO 2 spheres, and then a layer of thickness was deposited The transparent conductive ZnO:Al of 500 nm is used as the front electrode, which makes the sheet resistance of the overall structure reach 15 Ω/□. The above three materials constitute a surface plasmon-enhanced composite nanostructure.

2)在SiO2 NS/Ag NPs/ZnO:Al复合纳米结构之上依次沉积p/i/n型a-Si:H材料,构成PIN型非晶硅薄膜太阳电池,厚度分别为15 nm / 250 nm / 15 nm。2) The p/i/n-type a-Si:H materials were sequentially deposited on the SiO 2 NS/Ag NPs/ZnO:Al composite nanostructure to form a PIN-type amorphous silicon thin-film solar cell with a thickness of 15 nm / 250 nm, respectively. nm / 15 nm.

3)在n型a-Si:H之上制备ZnO / Ag背电极。3) Fabrication of ZnO/Ag back electrode on top of n-type a-Si:H.

应用结果显示:与仅具有平面ZnO:Al前电极的非晶硅薄膜电池相比,表面等离子激元增强型纳米微腔结构非晶硅薄膜太阳电池在350 nm - 800 nm波长范围内积分电流由11.64 mA/cm2提升至14.07 mA/cm2,外量子效率提高20.87%,具有明显的光吸收及载流子收集增强效果。The application results show that compared with the amorphous silicon thin-film solar cells with only planar ZnO:Al front electrodes, the surface plasmon-enhanced nano-microcavity structured amorphous silicon thin-film solar cells can integrate current in the wavelength range from 350 nm to 800 nm by From 11.64 mA/cm 2 to 14.07 mA/cm 2 , the external quantum efficiency is increased by 20.87%, and it has obvious enhancement effects of light absorption and carrier collection.

以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到的变化或替换,都应涵盖在本发明的保护范围之内。The above description is only a preferred embodiment of the present invention, but the protection scope of the present invention is not limited to this. Substitutions should be covered within the protection scope of the present invention.

Claims (3)

1.一种表面等离子激元增强型纳米微腔结构的太阳电池,包括一个具有表面等离子激元增强特性的复合纳米结构和一个PIN或NIP型薄膜太阳电池,其特征在于:所述薄膜太阳电池直接沉积于复合纳米结构之上,构成三维纳米微腔结构;所述表面等离子激元增强型纳米微腔的太阳电池具有显著的光吸收增强效果;复合纳米结构由氧化物三维纳米阵列与金属纳米颗粒构成,其中三维纳米阵列包括纳米柱、纳米锥、纳米球阵列中的至少一种,其中金属纳米颗粒包括金纳米颗粒、银纳米颗粒、铝纳米颗粒中至少一种材料;其制备方法为:在透明玻璃衬底上制备一层单分散性SiO2小球,并在SiO2小球上附着纳米Ag颗粒,随后沉积一层透明导电ZnO:Al作为前电极,从而构成表面等离子增强型SiO2 NS/Ag NPs/ZnO:Al复合纳米结构,在SiO2 NS/Ag NPs/ZnO:Al复合纳米结构之上依次沉积p/i/n型功能薄膜材料,构成PIN型非晶硅薄膜太阳电池,在n型功能层上制备ZnO/Ag背电极。1. a solar cell with a surface plasmon enhanced nano-microcavity structure, comprising a composite nanostructure with surface plasmon enhanced properties and a PIN or NIP type thin-film solar cell, characterized in that: the thin-film solar cell It is directly deposited on the composite nanostructure to form a three-dimensional nano-microcavity structure; the solar cell of the surface plasmon enhanced nano-microcavity has a significant light absorption enhancement effect; the composite nanostructure is composed of oxide three-dimensional nanoarrays and metal nanometers. The particle composition, wherein the three-dimensional nano-array includes at least one of nano-pillars, nano-cones, and nano-sphere arrays, wherein the metal nanoparticles include at least one material among gold nanoparticles, silver nanoparticles, and aluminum nanoparticles; the preparation method is: A layer of monodisperse SiO2 pellets was prepared on a transparent glass substrate, and nano Ag particles were attached on the SiO2 pellets, and then a layer of transparent conductive ZnO:Al was deposited as the front electrode to form a surface plasmon-enhanced SiO2 NS/Ag NPs/ZnO:Al composite nanostructure, p/i/n type functional thin film materials are sequentially deposited on the SiO 2 NS/Ag NPs/ZnO:Al composite nanostructure to form a PIN type amorphous silicon thin film solar cell, The ZnO/Ag back electrode was fabricated on the n-type functional layer. 2.根据权利要求1所述的表面等离子激元增强型纳米微腔结构的太阳电池,其中所述具有表面等离子激元增强特性的复合纳米结构有导电特性,能够实现电子或空穴的有效传输。2. The solar cell of claim 1, wherein the composite nanostructure with surface plasmon enhancement properties has electrical conductivity and can realize the effective transport of electrons or holes . 3.根据权利要求1所述的表面等离子激元增强型纳米微腔结构的太阳电池,其中所述薄膜太阳电池包括无机薄膜太阳电池、有机薄膜太阳电池及由以上两种中至少一种构成的叠层太阳电池。3. The solar cell with a surface plasmon enhanced nano-microcavity structure according to claim 1, wherein the thin film solar cell comprises an inorganic thin film solar cell, an organic thin film solar cell and a solar cell composed of at least one of the above two. Laminated solar cells.
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CN102560676A (en) * 2012-01-18 2012-07-11 山东大学 Method for performing GaN single crystal growth by using thinned and bonded structure
CN102569444A (en) * 2012-02-10 2012-07-11 中国科学院半导体研究所 Solar cell structure with wide spectrum high absorption and manufacturing method thereof
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