CN107272351A - Bogey and the exposure sources with the bogey - Google Patents
Bogey and the exposure sources with the bogey Download PDFInfo
- Publication number
- CN107272351A CN107272351A CN201710627974.6A CN201710627974A CN107272351A CN 107272351 A CN107272351 A CN 107272351A CN 201710627974 A CN201710627974 A CN 201710627974A CN 107272351 A CN107272351 A CN 107272351A
- Authority
- CN
- China
- Prior art keywords
- area
- support pin
- bogey
- corresponding support
- height
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The invention provides a kind of bogey, it includes：Loading plate, multiple support pins and multiple breather pipes, the loading plate includes multiple portions of area, the portion of area has multiple pin through holes and multiple vent holes, the support pin is corresponded with the pin through hole, the portion of area is corresponded with the breather pipe, and the breather pipe is used to convey gas by multiple vent holes in its corresponding portion of area or extracts gas.Present invention also offers a kind of exposure sources with the bogey.The present invention can be such that vacuum between substrate and loading plate is abolished uniformly and thoroughly, so as to avoid the appearance of fragmentation phenomenon during vacuum breaker.
Description
Technical field
The present invention relates to a kind of bogey and the exposure sources with the bogey.
Background technology
In the equipment that existing exposure sources, roasting plant etc. have bogey, bogey fragmentation influences always
The mobility of equipment, (mobility referred to shared by the time that equipment takes within the time that can be provided for the creation of value
Proportion, or refer to the ratio of the actual production quantity of an equipment and possible production quantity), so as to be caused to each manufacturer
Greatly perplex.
The reason for studying carefully the easy fragmentation of its bogey, wherein the substrate vacuum breaker carried to bogey is not exclusively most main
The reason for wanting.
The content of the invention
, can be in vacuum breaker it is an object of the invention to provide one kind in order to solve the problem of above-mentioned prior art is present
Avoid the bogey of fragmentation and the exposure sources with the bogey.
According to an aspect of the present invention there is provided a kind of bogey, it includes：Loading plate, multiple support pins and many
Individual breather pipe, the loading plate includes multiple portions of area, and the portion of area has multiple pin through holes and multiple vent holes, the support pin
Corresponded with the pin through hole, the portion of area is corresponded with the breather pipe, the breather pipe is used for corresponding by its
Multiple vent holes conveying gas in the portion of area extracts gas.
Further, the multiple breather pipe be used for simultaneously convey gas or extract gas, and the multiple breather pipe that
This is exploited separately for conveying gas or extracts gas.
Further, the bogey also includes：Multiple connecting tubes corresponding with the portion of area, the multiple connecting tube
The breather pipe connection corresponding with the portion of area, the connecting tube and the vent hole in the portion of area are corresponded.
Further, the multiple portion of area includes：First portion of area；Surround portion of firstth area and positioned at portion of firstth area
The second portion of area in addition；Surround portion of secondth area and the 3rd portion of area beyond portion of secondth area；It is respectively arranged at institute
State the 4th portion of area of the opposite sides in the 3rd portion of area；And be respectively arranged at the 3rd portion of area other opposite sides the 5th
Portion of area.
Further, the multiple portion of area includes：First portion of area；Surround portion of firstth area and positioned at portion of firstth area
The second portion of area in addition；Surround portion of secondth area and the 3rd portion of area beyond portion of secondth area；Surround the described 3rd
Portion of area and the 4th portion of area beyond the 3rd portion of area；And surround the 4th portion of area and positioned at the 4th portion of area with
The 5th outer portion of area.
Further, the height of the corresponding support pin in portion of firstth area, the height of the corresponding support pin in portion of secondth area
Degree, the height of the corresponding support pin in the 3rd portion of area, the height of the corresponding support pin in the 4th portion of area and the 5th area
The height of the corresponding support pin in portion increases successively.
Further, when rising the substrate of jack-up carrying, the 5th portion of area is corresponding to support pin, the 4th portion of area
The corresponding support pin in corresponding support pin, the 3rd portion of area, the height of the corresponding support pin in portion of secondth area and described
The corresponding support pin in first portion of area sequentially rises substrate described in jack-up.
According to another aspect of the present invention, a kind of bogey is additionally provided, it includes：Loading plate and multiple supports
Pin, the loading plate includes N number of portion of area, and portion of i-th of area includes portion of the i-th -1 area and beyond portion of the i-th -1 area, Mei Gequ
Portion has multiple pin through holes and a multiple vent holes, each one support pin of pin through hole correspondence, the corresponding support in the 1st portion of area
The height of pin to the height of the corresponding support pin in portion of the n-th area increases successively, wherein, 2≤i≤N.
Further, when rising the substrate of jack-up carrying, the corresponding support pin in portion of the n-th area is to described 1st
The corresponding support pin in portion of area sequentially rises substrate described in jack-up.
According to another aspect of the invention, a kind of exposure sources are provided again, and it includes above-mentioned bogey.
Beneficial effects of the present invention：The bogey of the present invention can be such that the vacuum between substrate and loading plate is thoroughly broken
Remove, so as to avoid the appearance of fragmentation phenomenon during vacuum breaker.
Brief description of the drawings
Pass through the following description carried out with reference to accompanying drawing, above and other aspect, feature and the advantage of embodiments of the invention
It will become clearer, in accompanying drawing：
Fig. 1 is the schematic top plan view of the bogey for exposure sources according to the first embodiment of the present invention；
Fig. 2 is the schematic side view of the bogey for exposure sources according to the first embodiment of the present invention；
Fig. 3 is the schematic top plan view of the bogey for exposure sources according to the second embodiment of the present invention.
Embodiment
Hereinafter, with reference to the accompanying drawings to embodiments of the invention are described in detail.However, it is possible to come real in many different forms
Apply the present invention, and the specific embodiment of the invention that should not be construed as limited to illustrate here.It is opposite that there is provided these implementations
Example is in order to explain the principle and its practical application of the present invention, so that others skilled in the art are it will be appreciated that the present invention
Various embodiments and be suitable for the various modifications of specific intended application.
In the accompanying drawings, in order to understand device, layer and the thickness in region are exaggerated.Identical label is in entire disclosure and attached
Identical component is represented in figure.
Fig. 1 is the schematic top plan view of the bogey for exposure sources according to the first embodiment of the present invention.Fig. 2 is
According to the schematic side view of the bogey for exposure sources of the first embodiment of the present invention.
Referring to Figures 1 and 2, included according to the bogey of the first embodiment of the present invention：Loading plate 100, multiple supports
Pin 200 and multiple breather pipes 300.
Specifically, loading plate 100 includes multiple portions of area.There is multiple pin through holes 120 and multiple vent holes in portion of each area
130.One correspondence of pin through hole 120, one support pin 200, support pin 200 can be in pin through hole 120 above and below freedom, to rise
On base plate carrying to the loading plate 100 that the processed substrate (not shown) of jack-up or lower general who has surrendered are processed.Portion of one area correspondence
One breather pipe 300, that is to say, that the corresponding breather pipe 300 in the portion of an area connects multiple gas in the portion of an area
Through hole 130.Each breather pipe be used for by multiple vent holes 130 in its corresponding portion of area transmit gas (convey gas or
Extract gas).In the present embodiment, the gas can be the dry air of compression.
In addition, in the present embodiment, the top of each breather pipe 300 can install pressure regulator valve 400, so multiple breather pipes
300 transmit gas to each self-corresponding portion of area respectively, so as to ensure that the air demand of whole loading plate 100 is uniform, Jin Erke
To avoid the phenomenon of fragmentation during vacuum breaker.
Further, in the present embodiment, multiple breather pipes 300 are used to convey gas simultaneously or extract gas, and multiple
Breather pipe 300 is used to convey gas independently of one another or extracts gas, but the present invention is not restricted to this.In addition, each logical
Tracheae 300 can individually control gas conveying capacity.
In order that each 110 corresponding one, region breather pipe 300 and multiple vent holes 130 in each region 110
Connection, in the present embodiment, bogey also includes：Multiple connecting tubes 400 corresponding with each portion of area, each portion of area is corresponding
Multiple connecting tubes 400 are connected with each 110 corresponding breather pipes 300 in region, the corresponding connecting tube in each region 110
400 connect with the one-to-one corresponding of vent hole 130 in each region 110.
Multiple portions of area include：First portion of area 110A；Surround the first portion of area 110A and beyond the first portion of area 110A the
Two portion of area 110B；Surround the second portion of area 110B and the 3rd portion of the area 110C beyond the second portion of area 110B；It is respectively arranged at
4th portion of area 110D of three portion of area 110C opposite sides；And be respectively arranged at the 3rd portion of area 110C other opposite sides
5th portion of area 110E.It should be appreciated that loading plate 100 is divided into a kind of embodiment party that portion of five areas is the present invention here
Formula, the present invention is not restricted to this.
Fig. 3 is the schematic top plan view of the bogey for exposure sources according to the second embodiment of the present invention.
In the second embodiment of the present invention, it will not be repeated here with the something in common of the first embodiment of the present invention, only
Description and the difference of the first embodiment of the present invention.Reference picture 3, in the second embodiment of the present invention, multiple portion of area bags
Include：First portion of area 110A；Surround the first portion of area 110A and the second portion of area 110B beyond the first portion of area 110A；Surround second
Portion of area 110B and the 3rd portion of the area 110C beyond the second portion of area 110B；Surround the 3rd portion of area 110C ' and positioned at the 3rd portion of area
The 4th portion of area 110D beyond 110C；And surround the 4th portion of area 110D and the 5th portion of area beyond the 4th portion of area 110D
110E.It should be appreciated that it is one embodiment of the present invention, this hair that loading plate 100 is divided into portion of five areas here
It is bright to be not restricted to this.
Further, the height of the corresponding support pins 200 of the first portion of area 110A, the corresponding support pins of the second portion of area 110B
Height, the height of the corresponding support pins 200 of the 4th portion of area 110D of the corresponding support pin 200 of 200 height, the 3rd portion of area 110C
And the 5th portion of area 110E it is corresponding support pin 200 height increase successively.That is, the corresponding support pins of the first portion of area 110A
The height of the corresponding support pins 200 of portion of the area 110C of height ＜ the 3rd of the 200 corresponding support pins 200 of the secondth areas of height ＜ portion 110B
Spend the height of the corresponding support pins 200 of portion of the area 110E of height ＜ the 5th of the corresponding support pins 200 of portion of the area 110D of ＜ the 4th.Specifically
Ground, the height of the height support pin 200 more corresponding than the second portion of area 110B of the corresponding support pins 200 of the first portion of area 110A is small
The height of the height support pin 200 more corresponding than the 3rd portion of area 110C of the corresponding support pin 200 of 0.5mm, the second portion of area 110B is small
The height of the height support pin 200 more corresponding than the 4th portion of area 110D of the corresponding support pin 200 of 0.5mm, the 3rd portion of area 110C is small
The height of the height support pin 200 more corresponding than the 5th portion of area 110E of the corresponding support pin 200 of 0.5mm, the 4th portion of area 110D is small
0.5mm。
When needing to rise the substrate of jack-up carrying, vent hole 130 transmits gas first, so as to first be carried out to substrate broken true
Sky, then the 5th portion of area 110E is corresponding supports the corresponding support pin 200 of pin 200, the 4th portion of area 110D, the 3rd 110C pairs of portion of area
The corresponding support pins 200 of corresponding support pin 200 and first portion of the area 110A of support pin 200, the second portion of area 110B answered are sequentially
Rise substrate described in jack-up.So, outermost support pin 200 is first by substrate jack-up, then air meeting first enter substrate from outside
Edge, when the jack-up substrate again of support pin 200 of inner side, then air moves inward again, until most interior support pin 200 is pushed up
Rise.Such benefit is：The vacuum between substrate and loading plate 100 is thoroughly discharged, prevent from making because parital vacuum is not abolished
Into fragmentation phenomenon.
In addition, also from unlike the first embodiment of the present invention：In a second embodiment, all vent holes in each portion of area
130 can correspond to a breather pipe 300, i.e., passed using a breather pipe 300 by vent hole 130 all on loading plate 100
Supply gas body.However, it is to be understood that can also by the way of multiple breather pipes 300 of first embodiment.
In summary, according to the bogey of various embodiments of the present invention, the vacuum between substrate and loading plate can be made
Thoroughly abolished, so as to avoid the appearance of fragmentation phenomenon during vacuum breaker.
Although the present invention has shown and described with reference to specific embodiment, it should be appreciated by those skilled in the art that：
In the case where not departing from the spirit and scope of the present invention limited by claim and its equivalent, can carry out herein form and
Various change in details.
Claims (10)
1. a kind of bogey, it is characterised in that including：Loading plate, multiple support pins and multiple breather pipes, the loading plate
Including multiple portions of area, the portion of area has multiple pin through holes and a multiple vent holes, a pair of the support pin and the pin through hole 1
Should, the portion of area is corresponded with the breather pipe, and the breather pipe is used to lead to by multiple gas in its corresponding portion of area
Hole conveys gas or extracts gas.
2. bogey according to claim 1, it is characterised in that the multiple breather pipe be used to conveying simultaneously gas or
Gas is extracted, and the multiple breather pipe is used to convey gas independently of one another or extracts gas.
3. bogey according to claim 2, it is characterised in that the bogey also includes：With the portion of area phase
The multiple connecting tubes answered, the breather pipe connection corresponding with the portion of area of the multiple connecting tube, the connecting tube with it is described
The vent hole in portion of area is corresponded.
4. bogey according to claim 1, it is characterised in that the multiple portion of area includes：
First portion of area；
Surround portion of firstth area and the second portion of area beyond portion of firstth area；
Surround portion of secondth area and the 3rd portion of area beyond portion of secondth area；
It is respectively arranged at the 4th portion of area of the opposite sides in the 3rd portion of area；And
It is respectively arranged at the 5th portion of area of the other opposite sides in the 3rd portion of area.
5. bogey according to claim 1, it is characterised in that the multiple portion of area includes：
First portion of area；
Surround portion of firstth area and the second portion of area beyond portion of firstth area；
Surround portion of secondth area and the 3rd portion of area beyond portion of secondth area；
Surround the 3rd portion of area and the 4th portion of area beyond the 3rd portion of area；And
Surround the 4th portion of area and the 5th portion of area beyond the 4th portion of area.
6. bogey according to claim 5, it is characterised in that the height of the corresponding support pin in portion of firstth area,
The height of the corresponding support pin in portion of secondth area, the height of the corresponding support pin in the 3rd portion of area, the 4th portion pair of area
The height of the corresponding support pin of the height for the support pin answered and the 5th portion of area increases successively.
7. bogey according to claim 6, it is characterised in that when rising the substrate of jack-up carrying, the described 5th
The corresponding support pin in portion of area, the corresponding support pin in the 4th portion of area, the corresponding support pin in the 3rd portion of area, secondth area
The corresponding support pin of height and portion of firstth area of the corresponding support pin in portion sequentially rises substrate described in jack-up.
8. a kind of bogey, it is characterised in that including：Loading plate and multiple support pins, the loading plate include N number of area
Portion, portion of i-th of area includes portion of the i-th -1 area and beyond portion of the i-th -1 area, and each portion of area has multiple pin through holes and multiple
Vent hole, one support pin of each pin through hole correspondence, the height of the corresponding support pin in the 1st portion of area to the n-th area
The height of the corresponding support pin in portion increases successively, wherein, 2≤i≤N.
9. bogey according to claim 7, it is characterised in that when rising the substrate of jack-up carrying, the n-th
The corresponding support pin in portion of area to the corresponding support pin in the 1st portion of area sequentially rises substrate described in jack-up.
10. a kind of exposure sources, it is characterised in that including the bogey described in any one of claim 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710627974.6A CN107272351A (en) | 2017-07-28 | 2017-07-28 | Bogey and the exposure sources with the bogey |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710627974.6A CN107272351A (en) | 2017-07-28 | 2017-07-28 | Bogey and the exposure sources with the bogey |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107272351A true CN107272351A (en) | 2017-10-20 |
Family
ID=60075157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710627974.6A Pending CN107272351A (en) | 2017-07-28 | 2017-07-28 | Bogey and the exposure sources with the bogey |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107272351A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05304071A (en) * | 1992-04-27 | 1993-11-16 | Nec Kyushu Ltd | Stage of light exposure device |
| TW498482B (en) * | 2001-07-11 | 2002-08-11 | Applied Materials Inc | Method and apparatus for dechucking a substrate |
| CN1629733A (en) * | 2003-12-15 | 2005-06-22 | Asml荷兰有限公司 | Lithographic apparatus and device manufacturing method |
| CN1965389A (en) * | 2004-06-09 | 2007-05-16 | 尼康股份有限公司 | Substrate holding device, exposure device having the same, exposure method, method for producing device, and liquid repellent plate |
| JP2009010085A (en) * | 2007-06-27 | 2009-01-15 | Dainippon Screen Mfg Co Ltd | Decompression-drying device |
| CN101738869A (en) * | 2008-11-20 | 2010-06-16 | 上海华虹Nec电子有限公司 | Silicon wafer bearing table for photoetching machine and use method thereof |
| CN102203677A (en) * | 2009-11-25 | 2011-09-28 | 日本精工株式会社 | Exposure unit and method for exposing substrate |
| CN203117640U (en) * | 2013-03-19 | 2013-08-07 | 深圳市华星光电技术有限公司 | Glass substrate support mechanism for exposure machine |
| CN204720426U (en) * | 2015-07-02 | 2015-10-21 | 江苏长电科技股份有限公司 | A kind of thimble cap |
-
2017
- 2017-07-28 CN CN201710627974.6A patent/CN107272351A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05304071A (en) * | 1992-04-27 | 1993-11-16 | Nec Kyushu Ltd | Stage of light exposure device |
| TW498482B (en) * | 2001-07-11 | 2002-08-11 | Applied Materials Inc | Method and apparatus for dechucking a substrate |
| CN1629733A (en) * | 2003-12-15 | 2005-06-22 | Asml荷兰有限公司 | Lithographic apparatus and device manufacturing method |
| CN1965389A (en) * | 2004-06-09 | 2007-05-16 | 尼康股份有限公司 | Substrate holding device, exposure device having the same, exposure method, method for producing device, and liquid repellent plate |
| JP2009010085A (en) * | 2007-06-27 | 2009-01-15 | Dainippon Screen Mfg Co Ltd | Decompression-drying device |
| CN101738869A (en) * | 2008-11-20 | 2010-06-16 | 上海华虹Nec电子有限公司 | Silicon wafer bearing table for photoetching machine and use method thereof |
| CN102203677A (en) * | 2009-11-25 | 2011-09-28 | 日本精工株式会社 | Exposure unit and method for exposing substrate |
| CN203117640U (en) * | 2013-03-19 | 2013-08-07 | 深圳市华星光电技术有限公司 | Glass substrate support mechanism for exposure machine |
| CN204720426U (en) * | 2015-07-02 | 2015-10-21 | 江苏长电科技股份有限公司 | A kind of thimble cap |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20171020 |