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CN107234241B - A kind of micron-scale porous tungsten and preparation method thereof - Google Patents

A kind of micron-scale porous tungsten and preparation method thereof Download PDF

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CN107234241B
CN107234241B CN201710413422.5A CN201710413422A CN107234241B CN 107234241 B CN107234241 B CN 107234241B CN 201710413422 A CN201710413422 A CN 201710413422A CN 107234241 B CN107234241 B CN 107234241B
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porous tungsten
tungsten
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CN107234241A (en
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张建
周东清
罗国强
沈强
张联盟
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Wuhan University of Technology WUT
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10Sintering only
    • B22F3/11Making porous workpieces or articles
    • B22F3/1121Making porous workpieces or articles by using decomposable, meltable or sublimatable fillers
    • B22F3/1134Inorganic fillers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/10Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
    • B22F1/107Metallic powder containing lubricating or binding agents; Metallic powder containing organic material containing organic material comprising solvents, e.g. for slip casting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/22Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces for producing castings from a slip

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Abstract

The present invention is a kind of micrometer level porous tungsten and preparation method thereof, belong to porous metal material technical field, its preparation step is: using the micron order pore creating material NaCl obtained through ball mill crushing, tungsten powder and organic additive be added in organic solvent carry out ball milling obtain curtain coating slurry, slurry is cast to form strip after be cut into specific shape;It is put into mold after lamination, carries out Low Temperature Heat Treatment dumping in a vacuum, low temperature hot-press sintering in a vacuum after dumping obtains green compact;Green compact are placed in the deionized water of flowing and remove pore creating material, are dried in a vacuum drying oven, obtain POROUS TUNGSTEN green compact, POROUS TUNGSTEN green compact high temperature sintering under an ar atmosphere obtains the POROUS TUNGSTEN.POROUS TUNGSTEN consistency prepared by the present invention is 35%-90%, and macropore diameter is 3-6 μm, and small aperture is 0.1 μm -0.7 μm, has the advantages of pore size distribution is uniform, pore size is controllable, and porosity change range is big, sintering temperature is substantially reduced.

Description

一种微米级多孔钨及其制备方法A kind of micron-scale porous tungsten and preparation method thereof

技术领域technical field

本发明涉及多孔金属材料技术领域,具体涉及一种微米级多孔钨及其制备方法。The invention relates to the technical field of porous metal materials, in particular to a micron-scale porous tungsten and a preparation method thereof.

背景技术Background technique

钨是难熔有色金属,其熔点、沸点及密度均是所有金属中最高的,其化学性质也极其稳定,常温下能耐所有酸碱侵蚀,同时,钨优良的热学性能、力学性能也令它具有极为重要的用途。因而,钨被广泛用于当代通讯技术、电子计算机、宇航开发、医药卫生、感光材料、光电材料、能源材料和催化剂材料等,特别是其多孔体或多孔基体材料可广泛用作高电流密度的多孔阴极、离子发动机中冲入电子发射材料的发射体、汞离子火箭发动机中汞气液分离的汽化器、高温流体过滤器及电子封装材料等。Tungsten is a refractory non-ferrous metal. Its melting point, boiling point and density are the highest among all metals. Its chemical properties are also extremely stable. It can resist all acid and alkali erosion at room temperature. extremely important use. Therefore, tungsten is widely used in contemporary communication technology, electronic computers, aerospace development, medicine and health, photosensitive materials, optoelectronic materials, energy materials and catalyst materials, especially its porous body or porous matrix material can be widely used as high current density. Porous cathodes, emitters into which electron-emitting materials are flushed into ion engines, vaporizers for mercury-gas-liquid separation in mercury-ion rocket engines, high-temperature fluid filters, and electronic packaging materials, etc.

然而,钨极高的熔点和极大的密度等特点使得多孔钨的制备存在一定的困难,如需要很高的加热温度,很难挑选适合的造孔剂等。就目前常见的传统烧结法和有机基体浸浆干燥烧结法而言,有以下明显的缺点:传统烧结法的烧结温度极高,孔隙率较低,孔隙分布不均匀;有机基体浸浆干燥烧结法虽然操作简单孔径分布均匀,烧结温度仍然很高,生产效率低下。However, the extremely high melting point and high density of tungsten make the preparation of porous tungsten difficult. As far as the traditional sintering method and the organic matrix impregnation drying sintering method are concerned, there are the following obvious shortcomings: the sintering temperature of the traditional sintering method is extremely high, the porosity is low, and the pore distribution is uneven; the organic matrix impregnation drying sintering method Although the operation is simple and the pore size distribution is uniform, the sintering temperature is still high and the production efficiency is low.

通过查阅国内外专利与文献可发现,为改进传统方法的缺点,有很多学者采用了新的方法制备多孔钨。专利CN103774184A公开了一种电解制备多孔钨的方法,该方法利用钨在熔盐溶液中受到电化学作用被电解的特点,采用交流电源和直流电源对处于含添加剂的NaOH溶液中的钨金属进行电解制备多孔钨,该方法制得的多孔钨虽然孔径分布均匀,但是孔径大小不可控,孔隙率低。文献《Reactive sintering of porous tungsten:A costeffective sustainable technique for the manufacturing of high current densitycathodes to be used in flashlamps》公开了一种以铝作为造孔剂及烧结助剂的反应活化烧结制备多孔钨的方法,该方法采用铝与预氧化的钨粉混料冷压成型,再将成型坯体在还原气体下无压烧结的技术路线,由于铝与氧化钨的自蔓延反应提供了大量能量,其烧结温度明显降低,硬度分布均匀,但是该方法制备的多孔钨孔隙率较低,孔径大小和形貌不可控。总而言之,多孔钨的制备处于不停的探索和不断的完善过程中。当前的研究现状也表明,目前国内外采取造孔剂法制备多孔钨的相关报道都无法同时实现造孔剂成本低廉、造孔效果良好、孔径大小可控、孔形貌规则、孔隙率范围变化大。By consulting domestic and foreign patents and literature, it can be found that in order to improve the shortcomings of traditional methods, many scholars have adopted new methods to prepare porous tungsten. Patent CN103774184A discloses a method for preparing porous tungsten by electrolysis. The method utilizes the characteristics of tungsten being electrolyzed by electrochemical action in molten salt solution, and uses alternating current power supply and direct current power supply to electrolyze tungsten metal in NaOH solution containing additives. Porous tungsten is prepared. Although the porous tungsten prepared by this method has a uniform pore size distribution, the pore size is uncontrollable and the porosity is low. The document "Reactive sintering of porous tungsten: A costeffective sustainable technique for the manufacturing of high current density cathodes to be used in flashlamps" discloses a method for preparing porous tungsten by reactive activation sintering using aluminum as pore-forming agent and sintering aid. The method adopts the technical route of cold pressing of aluminum and pre-oxidized tungsten powder mixture, and then pressureless sintering of the molded body under reducing gas. Since the self-propagating reaction of aluminum and tungsten oxide provides a lot of energy, the sintering temperature is significantly reduced. , the hardness distribution is uniform, but the porous tungsten prepared by this method has low porosity and uncontrollable pore size and morphology. All in all, the preparation of porous tungsten is in the process of continuous exploration and continuous improvement. The current research status also shows that the current domestic and foreign reports on the preparation of porous tungsten by the pore-forming agent method cannot simultaneously realize the low cost of the pore-forming agent, the good pore-forming effect, the controllable pore size, the regular pore morphology, and the change of the porosity range. big.

发明内容SUMMARY OF THE INVENTION

本发明所要解决的技术问题是:针对现有制备工艺的不足,提供一种在流延料浆中添加造孔剂,以流延成型结合热压或无压烧结得到的微米级多孔钨及其制备方法。此方法设备简单、可连续操作、生产效率高、自动化水平高、工艺稳定,获得的流延膜片性能均一,膜片厚度可控,制得的多孔钨孔形貌规则、孔径分布均匀、孔大小可调,并且,流延料浆残留的微量C元素可使烧结温度明显降低。The technical problem to be solved by the present invention is: aiming at the deficiencies of the existing preparation technology, there is provided a micron-scale porous tungsten obtained by adding a pore-forming agent in the casting slurry, and combining the casting molding with hot pressing or pressureless sintering, and the same. Preparation. The method has the advantages of simple equipment, continuous operation, high production efficiency, high automation level and stable process. The size is adjustable, and the trace C element remaining in the casting slurry can significantly reduce the sintering temperature.

本发明解决其技术问题采用以下的技术方案:The present invention solves its technical problem and adopts following technical scheme:

一种微米级多孔钨的制备方法,包括以下步骤:A preparation method of micron-scale porous tungsten, comprising the following steps:

1)将原料NaCl、乙醇以及球磨介质进行球磨,然后干燥得到NaCl粉末;1) Ball milling raw material NaCl, ethanol and ball milling medium, and then drying to obtain NaCl powder;

2)备料:按照质量百分比为50-60%的钨粉、0%-8.5%的NaCl粉末、32.6-38.4%的有机溶剂以及5.3-7.4%的有机添加剂备料,其中有机添加剂包括2.5%-3.5%的聚乙烯醇缩丁醛、0.8%-1.2%的Hypermer KD-1以及2.0%-2.7%的甘油;2) Material preparation: prepare materials according to the mass percentage of 50-60% tungsten powder, 0%-8.5% NaCl powder, 32.6-38.4% organic solvent and 5.3-7.4% organic additives, wherein the organic additives include 2.5%-3.5% % polyvinyl butyral, 0.8%-1.2% Hypermer KD-1 and 2.0%-2.7% glycerin;

3)流延料浆的制备:将NaCl粉末和钨粉以及有机添加剂加入到有机溶剂中进行球磨得到流延料浆;3) preparation of casting slurry: NaCl powder, tungsten powder and organic additive are added into organic solvent and ball-milled to obtain casting slurry;

4)流延薄带的处理:将步骤3)得到的流延料浆在流延机中流延烘干定形,得到流延薄带,将流延薄带裁剪成特定形状,将预定层数的薄带叠层,叠层后的薄带在真空条件下保温排胶,然后再在相同真空度下保温烧结,进行热压烧结,获得生坯;4) Treatment of the casting thin strip: the casting slurry obtained in step 3) is cast, dried and shaped in a casting machine to obtain a casting thin strip, and the casting thin strip is cut into a specific shape. Thin strips are laminated, and the laminated strips are kept under vacuum for thermal insulation and debinding, and then thermally sintered under the same vacuum degree for hot pressing and sintering to obtain green bodies;

5)烧结获得多孔钨:生坯置于流动的水中冲洗,然后干燥得到多孔钨生坯,多孔钨生坯在惰性气氛下高温烧结,得到所述的多孔钨。5) Sintering to obtain porous tungsten: the green body is rinsed in flowing water, and then dried to obtain a porous tungsten green body, and the porous tungsten green body is sintered at high temperature in an inert atmosphere to obtain the porous tungsten.

上述方案中,所述步骤3)中的具体加料顺序为:先将钨粉和NaCl与Hypermer KD-1加入到有机溶剂中球磨,再加入聚乙烯醇缩丁醛和甘油,球磨得到流延料浆。In the above scheme, the specific feeding sequence in the step 3) is: first add tungsten powder, NaCl and Hypermer KD-1 to the organic solvent for ball milling, then add polyvinyl butyral and glycerin, and ball mill to obtain a casting material. pulp.

上述方案中,所述步骤1)中的NaCl粉末的粒径为3-6μm。In the above scheme, the particle size of the NaCl powder in the step 1) is 3-6 μm.

上述方案中,所述步骤1)中的有机溶剂为质量比按1:1混合的乙醇和丁酮。In the above-mentioned scheme, the organic solvent in the described step 1) is ethanol and butanone mixed by mass ratio of 1:1.

上述方案中,所述步骤2)中的钨粉的纯度为99.9%,粒径为0.5-5μm。In the above scheme, the purity of the tungsten powder in the step 2) is 99.9%, and the particle size is 0.5-5 μm.

上述方案中,所述步骤5)中的高温烧结的烧结温度为1300-1700℃,保温时间为1-3h,烧结压力为0-10MPa。In the above scheme, the sintering temperature of the high-temperature sintering in the step 5) is 1300-1700° C., the holding time is 1-3 h, and the sintering pressure is 0-10 MPa.

上述方案中,所述步骤4)中的真空条件为优于9.9×10-3Pa的真空度,保温温度为780℃,保温时间为2h,烧结压力为10-30MPa。In the above scheme, the vacuum condition in the step 4) is a vacuum degree better than 9.9×10 -3 Pa, the holding temperature is 780°C, the holding time is 2h, and the sintering pressure is 10-30MPa.

上述方案中,所述步骤5)中的干燥为真空干燥,干燥温度为80度,干燥时间为12小时。In the above scheme, the drying in the step 5) is vacuum drying, the drying temperature is 80 degrees, and the drying time is 12 hours.

上述方案中,所述步骤1)中的原料NaCl的纯度为99.9%,过60目筛。In the above scheme, the purity of the raw material NaCl in the step 1) is 99.9%, and it passes through a 60-mesh sieve.

所述的微米级多孔钨的制备方法制备得到的微米级多孔钨,所述多孔钨的大孔孔径为3-6μm,小孔孔径为0.1μm-0.7μm,致密度范围为35%-90%。The micro-scale porous tungsten prepared by the method for preparing micro-scale porous tungsten has a macro-pore diameter of 3-6 μm, a small-pore diameter of 0.1 μm-0.7 μm, and a density range of 35%-90%. .

本发明获得的多孔钨与现有技术相比具有以下明显的优点:Compared with the prior art, the porous tungsten obtained by the present invention has the following obvious advantages:

其一,利用流延技术使得膜带组分均匀,进而使获得的多孔材料孔分布均匀。同时流延技术也有工艺设备简单、可连续操作、生产效率高、自动化水平高、工艺稳定的优点。First, using the casting technology to make the composition of the membrane tape uniform, and then to make the obtained porous material evenly distributed. At the same time, the casting technology also has the advantages of simple process equipment, continuous operation, high production efficiency, high automation level and stable process.

其二,造孔剂NaCl成本低廉,大小和形貌均可通过简单的工艺控制,同时,流延料浆是稳定的复相料浆,可解决造孔剂NaCl与W密度差异大导致的沉降稳定,实现多孔W孔隙率大范围的精确控制。Second, the cost of the pore-forming agent NaCl is low, and the size and morphology can be controlled by a simple process. At the same time, the casting slurry is a stable multi-phase slurry, which can solve the settlement caused by the large difference in the density of the pore-forming agent NaCl and W. Stable, enabling precise control over a wide range of porous W porosity.

其三,流延技术引入的有机物在排胶中会残留极少量的不定形C,有利于W的扩散传质,明显降低了W烧结的温度,本发明将超过2000℃的传统W无压烧结温度降低至1400-1700℃。Third, the organic matter introduced by the casting technology will leave a very small amount of amorphous C in the debinding process, which is beneficial to the diffusion and mass transfer of W, and significantly reduces the temperature of W sintering. The temperature is lowered to 1400-1700°C.

附图说明Description of drawings

图1为多孔钨的制备工艺流程图。FIG. 1 is a flow chart of the preparation process of porous tungsten.

图2为本发明实施例5中球磨24h得到的NaCl粉末SEM图谱。Fig. 2 is the SEM spectrum of the NaCl powder obtained by ball milling for 24h in Example 5 of the present invention.

图3为本发明实施例5中的生坯SEM图谱。FIG. 3 is the SEM spectrum of the green body in Example 5 of the present invention.

图4为本发明实施例5中的多孔钨生坯SEM图谱。FIG. 4 is a SEM image of the porous tungsten green body in Example 5 of the present invention.

图5为本发明实施例5中的多孔钨SEM图谱。FIG. 5 is the SEM spectrum of porous tungsten in Example 5 of the present invention.

具体实施方式Detailed ways

SEM图谱由Quanta FEG 250(美国,FEI公司)场发射扫描电子显微镜获得。SEM patterns were obtained by a Quanta FEG 250 (FEI, USA) field emission scanning electron microscope.

密度由阿基米德排水法测得,测试前先用一层非常薄的凡士林将样品密封,致密度为实测密度与理论密度(19.30g/cm3)之比。The density was measured by the Archimedes drainage method. The sample was sealed with a very thin layer of Vaseline before the test, and the density was the ratio of the measured density to the theoretical density (19.30 g/cm 3 ).

本发明采用的流延成型结合高温烧结制备多孔钨的工艺具体为:The process for preparing porous tungsten by tape casting combined with high temperature sintering adopted in the present invention is as follows:

一种微米级多孔钨的制备方法,包括以下步骤:A preparation method of micron-scale porous tungsten, comprising the following steps:

1)将原料NaCl、乙醇以及球磨介质进行球磨,然后在60℃下真空干燥12h得到NaCl粉末;1) Ball milling raw material NaCl, ethanol and ball milling medium, and then vacuum drying at 60°C for 12 hours to obtain NaCl powder;

2)备料:按照质量百分比为50-60%的钨粉、0%-8.5%的NaCl粉末、32.6-38.4%的有机溶剂以及5.3-7.4%的有机添加剂备料,其中有机添加剂包括2.5%-3.5%的聚乙烯醇缩丁醛、0.8%-1.2%的Hypermer KD-1以及2.0%-2.7%的甘油;2) Material preparation: prepare materials according to the mass percentage of 50-60% tungsten powder, 0%-8.5% NaCl powder, 32.6-38.4% organic solvent and 5.3-7.4% organic additives, wherein the organic additives include 2.5%-3.5% % polyvinyl butyral, 0.8%-1.2% Hypermer KD-1 and 2.0%-2.7% glycerin;

3)流延料浆的制备:将NaCl粉末和钨粉以及有机添加剂加入到有机溶剂中进行球磨得到流延料浆;3) preparation of casting slurry: NaCl powder, tungsten powder and organic additive are added into organic solvent and ball-milled to obtain casting slurry;

4)流延薄带的处理:将步骤3)得到的流延料浆在流延机中流延烘干定形,得到流延薄带,将流延薄带裁剪成特定形状,将预定层数的薄带叠层。叠层后的薄带在优于9.9×10-3Pa的真空度下,780℃保温2h,进行排胶,将有机物裂解排出,再在相同真空度下780℃保温2h,烧结压力为10-30MPa,进行热压烧结,获得生坯;4) Treatment of the casting thin strip: the casting slurry obtained in step 3) is cast, dried and shaped in a casting machine to obtain a casting thin strip, and the casting thin strip is cut into a specific shape. Thin tape stacks. The laminated ribbons were kept at 780℃ for 2h under the vacuum degree better than 9.9×10 -3 Pa, degummed, and the organic matter was cracked and discharged, and then kept at 780℃ for 2h under the same vacuum degree, and the sintering pressure was 10- 30MPa, hot-press sintering to obtain green body;

5)烧结获得多孔钨:生坯置于流动的去离子水中冲洗12h,再置于80℃真空干燥箱中12h,得到多孔钨生坯。多孔钨生坯在Ar气氛下高温烧结,得到所述的多孔钨,高温烧结的烧结温度为1300-1700℃,保温时间为1-3h,烧结压力为0-10MPa。5) Sintering to obtain porous tungsten: the green body is rinsed in flowing deionized water for 12 hours, and then placed in a vacuum drying oven at 80° C. for 12 hours to obtain a green porous tungsten body. The porous tungsten green body is sintered at a high temperature in an Ar atmosphere to obtain the porous tungsten.

实施例1:Example 1:

本实施例提供一种微米级多孔钨的制备方法,包括以下步骤:The present embodiment provides a preparation method of micron-scale porous tungsten, comprising the following steps:

A.流延料浆的制备:将100gNaCl、50g乙醇加入尼龙罐中,在行星球磨机中球磨36h,其中NaCl原料纯度为99.9%,过60目筛,球磨转速为250rpm。将获得的悬浮液倒入烧杯中,在真空干燥箱中常温静置1h,倒出上层液体,烧杯中剩余物质在真空干燥箱中60℃下真空干燥12h,取NaCl粉末2.4g和56g粒径为5μm的W粉,0.9g的Hypermer KD-1(分析纯),加入18.3g的无水乙醇(分析纯)和18.3g的丁酮(分析纯)溶剂中,在高能混料机中球磨3h,球磨介质为不锈钢球,钢球质量为100g。再加入2.6g的聚乙烯醇缩丁醛(分析纯)、2.1g的甘油(分析纯),球磨3h,获得流延料浆。A. Preparation of casting slurry: 100g NaCl and 50g ethanol were added to a nylon tank, and ball milled in a planetary ball mill for 36 hours, wherein the NaCl raw material purity was 99.9%, passed through a 60 mesh sieve, and the ball milling speed was 250 rpm. Pour the obtained suspension into a beaker, let it stand at room temperature for 1 hour in a vacuum drying oven, pour out the upper liquid, and vacuum dry the remaining material in the beaker at 60 °C for 12 hours in a vacuum drying oven, and take 2.4 g of NaCl powder and 56 g of particle size. It is 5μm W powder, 0.9g of Hypermer KD-1 (analytical grade), added 18.3g of absolute ethanol (analytical grade) and 18.3g of butanone (analytical grade) solvent, and ball-milled in a high-energy mixer for 3h , the ball milling medium is stainless steel ball, and the mass of the steel ball is 100g. Then 2.6 g of polyvinyl butyral (analytical grade) and 2.1 g of glycerol (analytical grade) were added, and ball milled for 3 hours to obtain a casting slurry.

B.流延薄带的处理:将步骤A中得到的流延料浆在流延机中流延烘干定形,得到流延薄带,将流延薄带裁剪成直径为20mm的圆片,将100层小圆片叠层。叠层后的薄带在真空度为优于9.9×10-3Pa的环境中,780℃保温2h进行热处理排胶;随后进行一次烧结获得生坯,烧结温度为780℃,保温2h,温度在750℃之下时施加30MPa压力,温度在750℃之上时无压。B. the treatment of the casting thin strip: the casting slurry obtained in the step A is cast, dried and shaped in a casting machine to obtain the casting thin strip, and the casting thin strip is cut into a disc with a diameter of 20 mm, and the 100-layer wafer stack. The laminated ribbons were heat-treated and debonded at 780°C for 2h in an environment where the vacuum degree was better than 9.9×10 -3 Pa; and then a green body was obtained by sintering at a temperature of 780°C for 2h at a temperature of When the temperature is below 750°C, a pressure of 30MPa is applied, and when the temperature is above 750°C, there is no pressure.

C.烧结获得多孔钨:将步骤B中获得的生坯置于流动的去离子水中冲洗12h后,取出生坯,置于真空干燥箱中80℃烘干12h,得到多孔钨生坯。多孔钨生坯在Ar气氛下烧结,烧结制度为10℃/min升温至1100℃,5℃/min升至1400℃,保温时间为3h,10℃/min降至1100℃,20℃/min将至室温,烧结全程施加10MPa压力,得到所述的多孔钨。C. Sintering to obtain porous tungsten: After washing the green body obtained in step B in flowing deionized water for 12 hours, the green body was taken out and dried in a vacuum drying oven at 80°C for 12 hours to obtain a porous tungsten green body. The porous tungsten green body was sintered in an Ar atmosphere. The sintering system was 10°C/min to 1100°C, 5°C/min to 1400°C, holding time for 3h, 10°C/min to 1100°C, 20°C/min to increase the temperature to 1100°C. At room temperature, a pressure of 10 MPa was applied throughout the sintering process to obtain the porous tungsten.

采用阿基米德排水方法测得该多孔钨的致密度为82.0%,孔分布均匀,大孔孔径为3-5μm,小孔孔径为0.2μm-0.7μm。The density of the porous tungsten measured by the Archimedes drainage method is 82.0%, the pore distribution is uniform, the pore diameter of the large pores is 3-5 μm, and the pore diameter of the small pores is 0.2 μm-0.7 μm.

实施例2:Example 2:

本实施例提供一种微米级多孔钨的制备方法,包括以下步骤:The present embodiment provides a preparation method of micron-scale porous tungsten, comprising the following steps:

A.流延料浆的制备:取60g粒径为0.5μm的W粉、1.2g的Hypermer KD-1(分析纯),加入16.3g的无水乙醇(分析纯)和16.3g的丁酮(分析纯)溶剂中,在高能混料机中球磨3h,再加入3.5g的聚乙烯醇缩丁醛(分析纯)、2.7g的甘油(分析纯),球磨3h,获得流延料浆。A. Preparation of casting slurry: take 60g of W powder with a particle size of 0.5μm, 1.2g of Hypermer KD-1 (analytical grade), add 16.3g of absolute ethanol (analytical grade) and 16.3g of butanone ( analytically pure) solvent, ball-milled in a high-energy mixer for 3 hours, then added 3.5 g of polyvinyl butyral (analytical pure), 2.7 g of glycerol (analytical pure), and ball-milled for 3 hours to obtain a casting slurry.

B.流延薄带的处理:将步骤A中得到的流延料浆在流延机中流延烘干定形,得到流延薄带,将流延薄带裁剪成直径为20mm的圆片,将100层小圆片叠层。叠层后的薄带在真空度为优于9.9×10-3Pa的环境中,780℃保温2h进行热处理排胶;随后进行一次烧结获得生坯,烧结温度为780℃,保温2h,温度在750℃之下时施加30MPa压力,温度在750℃之上时无压。B. the treatment of the casting thin strip: the casting slurry obtained in the step A is cast, dried and shaped in a casting machine to obtain the casting thin strip, and the casting thin strip is cut into a disc with a diameter of 20 mm, and the 100-layer wafer stack. The laminated ribbons were heat-treated and debonded at 780°C for 2h in an environment where the vacuum degree was better than 9.9×10 -3 Pa; and then a green body was obtained by sintering at a temperature of 780°C for 2h at a temperature of When the temperature is below 750°C, a pressure of 30MPa is applied, and when the temperature is above 750°C, there is no pressure.

C.烧结获得多孔钨:将步骤B中获得的生坯置于流动的去离子水中冲洗12h后,取出生坯,置于真空干燥箱中80℃烘干12h,得到多孔钨生坯。多孔钨生坯在Ar气氛下烧结,烧结制度为10℃/min升温至1100℃,5℃/min升至1700℃,保温时间为1h,10℃/min降至1100℃,20℃/min将至室温,烧结全程施加10MPa压力,得到所述的多孔钨。C. Sintering to obtain porous tungsten: After washing the green body obtained in step B in flowing deionized water for 12 hours, the green body was taken out and dried in a vacuum drying oven at 80°C for 12 hours to obtain a porous tungsten green body. The porous tungsten green body was sintered in an Ar atmosphere. The sintering regime was 10°C/min to 1100°C, 5°C/min to 1700°C, holding time for 1h, 10°C/min to 1100°C, 20°C/min to increase At room temperature, a pressure of 10 MPa was applied throughout the sintering process to obtain the porous tungsten.

采用阿基米德排水方法测得该多孔钨的致密度为90%,孔分布均匀,小孔孔径为0.1μm-0.6μm。The density of the porous tungsten measured by the Archimedes drainage method is 90%, the pore distribution is uniform, and the pore diameter of the pores is 0.1 μm-0.6 μm.

实施例3:Example 3:

本实施例提供一种微米级多孔钨的制备方法,包括以下步骤:The present embodiment provides a preparation method of micron-scale porous tungsten, comprising the following steps:

A.流延料浆的制备:将100gNaCl、50g乙醇加入尼龙罐中,在行星球磨机中球磨24h,其中NaCl原料纯度为99.9%,过60目筛,球磨转速为250rpm。将获得的悬浮液倒入烧杯中,在真空干燥箱中常温静置1h,倒出上层液体,烧杯中剩余物质在真空干燥箱中60℃下真空干燥12h,取NaCl粉末2.4g和50g粒径为1μm的W粉、0.8g的Hypermer KD-1(分析纯),加入22.15g的无水乙醇(分析纯)和22.15g的丁酮(分析纯)溶剂中,在高能混料机中球磨3h,球磨介质为不锈钢球,钢球质量为100g。再加入2.5g的聚乙烯醇缩丁醛(分析纯)、2.0g的甘油(分析纯),球磨3h,获得流延料浆。A. Preparation of casting slurry: 100g NaCl and 50g ethanol were added to a nylon tank, and ball milled in a planetary ball mill for 24 hours, wherein the NaCl raw material purity was 99.9%, passed through a 60 mesh sieve, and the ball milling speed was 250 rpm. Pour the obtained suspension into a beaker, let it stand at room temperature for 1 hour in a vacuum drying oven, pour out the upper liquid, and vacuum dry the remaining material in the beaker at 60 °C for 12 hours in a vacuum drying oven, and take 2.4 g of NaCl powder and 50 g of particle size. W powder of 1 μm, 0.8g of Hypermer KD-1 (analytical grade), added 22.15g of absolute ethanol (analytical grade) and 22.15g of butanone (analytical grade) solvent, ball milled in a high-energy mixer for 3h , the ball milling medium is stainless steel ball, and the mass of the steel ball is 100g. Then 2.5 g of polyvinyl butyral (analytical grade) and 2.0 g of glycerol (analytical grade) were added, and ball-milled for 3 hours to obtain a casting slurry.

B.流延薄带的处理:将步骤A中得到的流延料浆在流延机中流延烘干定形,得到流延薄带,将流延薄带裁剪成直径为20mm的圆片,将100层小圆片叠层。叠层后的薄带在真空度为优于9.9×10-3Pa的环境中,780℃保温2h进行热处理排胶;随后进行一次烧结获得生坯,烧结温度为780℃,保温2h,温度在750℃之下时施加30MPa压力,温度在750℃之上时无压。B. the treatment of the casting thin strip: the casting slurry obtained in the step A is cast, dried and shaped in a casting machine to obtain the casting thin strip, and the casting thin strip is cut into a disc with a diameter of 20 mm, and the 100-layer wafer stack. The laminated ribbons were heat-treated and debonded at 780°C for 2h in an environment where the vacuum degree was better than 9.9×10 -3 Pa; and then a green body was obtained by sintering at a temperature of 780°C for 2h at a temperature of When the temperature is below 750°C, a pressure of 30MPa is applied, and when the temperature is above 750°C, there is no pressure.

C.烧结获得多孔钨:将步骤B中获得的生坯置于流动的去离子水中冲洗12h后,取出生坯,置于真空干燥箱中80℃烘干12h,得到多孔钨生坯。多孔钨生坯在Ar气氛下烧结,烧结制度为10℃/min升温至1100℃,5℃/min升至1500℃,保温时间为3h,10℃/min降至1100℃,20℃/min将至室温,烧结全程无压,得到所述的多孔钨。C. Sintering to obtain porous tungsten: After washing the green body obtained in step B in flowing deionized water for 12 hours, the green body was taken out and dried in a vacuum drying oven at 80°C for 12 hours to obtain a porous tungsten green body. The porous tungsten green body was sintered in an Ar atmosphere. The sintering regime was 10°C/min to 1100°C, 5°C/min to 1500°C, holding time for 3h, 10°C/min to 1100°C, 20°C/min to increase When the temperature reaches room temperature, the whole process of sintering is pressureless, and the porous tungsten is obtained.

采用阿基米德排水方法测得该多孔钨的致密度为74.4%,孔分布均匀,大孔孔径为4-6μm,小孔孔径为0.1μm-0.5μm。The density of the porous tungsten measured by the Archimedes drainage method is 74.4%, the pore distribution is uniform, the pore diameter of the large pores is 4-6 μm, and the pore diameter of the small pores is 0.1 μm-0.5 μm.

实施例4:Example 4:

本实施例提供一种微米级多孔钨的制备方法,包括以下步骤:The present embodiment provides a preparation method of micron-scale porous tungsten, comprising the following steps:

A.流延料浆的制备:将100gNaCl、50g乙醇加入尼龙罐中,在行星球磨机中球磨24h,其中NaCl原料纯度为99.9%,过60目筛,球磨转速为250rpm。将获得的悬浮液倒入烧杯中,在真空干燥箱中常温静置1h,倒出上层液体,烧杯中剩余物质在真空干燥箱中60℃下真空干燥12h,取NaCl粉末8.2g和50g粒径为1μm的W粉、1g的Hypermer KD-1(分析纯),加入16.2g的无水乙醇(分析纯)和16.2g的丁酮(分析纯)溶剂中,在高能混料机中球磨3h,球磨介质为不锈钢球,钢球质量为100g。再加入3g的聚乙烯醇缩丁醛(分析纯)、2.4g的甘油(分析纯),球磨3h,获得流延料浆。A. Preparation of casting slurry: 100g NaCl and 50g ethanol were added to a nylon tank, and ball milled in a planetary ball mill for 24 hours, wherein the NaCl raw material purity was 99.9%, passed through a 60 mesh sieve, and the ball milling speed was 250 rpm. Pour the obtained suspension into a beaker, let it stand at room temperature for 1 hour in a vacuum drying oven, pour out the upper liquid, and vacuum dry the remaining material in the beaker at 60 °C for 12 hours in a vacuum drying oven, and take 8.2 g of NaCl powder and 50 g of particle size. It is 1μm W powder, 1g of Hypermer KD-1 (analytical grade), added 16.2g of absolute ethanol (analytical grade) and 16.2g of butanone (analytical grade) solvent, ball milled in a high-energy mixer for 3h, The ball milling medium is stainless steel ball, and the mass of the steel ball is 100g. Then 3 g of polyvinyl butyral (analytical grade) and 2.4 g of glycerol (analytical grade) were added, and ball-milled for 3 h to obtain a casting slurry.

B.流延薄带的处理:将步骤A中得到的流延料浆在流延机中流延烘干定形,得到流延薄带,将流延薄带裁剪成直径为20mm的圆片,将100层小圆片叠层。叠层后的薄带在真空度为优于9.9×10-3Pa的环境中,780℃保温2h进行热处理排胶;随后进行一次烧结获得生坯,烧结温度为780℃,保温2h,温度在750℃之下时施加10MPa压力,温度在750℃之上时无压。B. the treatment of the casting thin strip: the casting slurry obtained in the step A is cast, dried and shaped in a casting machine to obtain the casting thin strip, and the casting thin strip is cut into a disc with a diameter of 20 mm, and the 100-layer wafer stack. The laminated ribbons were heat-treated and debonded at 780°C for 2h in an environment where the vacuum degree was better than 9.9×10 -3 Pa; and then a green body was obtained by sintering at a temperature of 780°C for 2h at a temperature of When the temperature is below 750°C, a pressure of 10MPa is applied, and when the temperature is above 750°C, there is no pressure.

C.烧结获得多孔钨:将步骤B中获得的生坯置于流动的去离子水中冲洗12h后,取出生坯,置于真空干燥箱中80℃烘干12h,得到多孔钨生坯。多孔钨生坯在Ar气氛下烧结,烧结制度为10℃/min升温至1100℃,5℃/min升至1300℃,保温时间为3h,10℃/min降至1100℃,20℃/min将至室温,烧结全程无压,得到所述的多孔钨。C. Sintering to obtain porous tungsten: After washing the green body obtained in step B in flowing deionized water for 12 hours, the green body was taken out and dried in a vacuum drying oven at 80°C for 12 hours to obtain a porous tungsten green body. The porous tungsten green body was sintered in an Ar atmosphere. The sintering regime was 10°C/min to 1100°C, 5°C/min to 1300°C, holding time for 3h, 10°C/min to 1100°C, 20°C/min to increase When the temperature reaches room temperature, the whole process of sintering is pressureless, and the porous tungsten is obtained.

采用阿基米德排水方法测得该多孔钨的致密度为35%,孔分布均匀,大孔孔径为4-6μm,小孔孔径为0.2μm-0.7μm。The density of the porous tungsten measured by the Archimedes drainage method is 35%, the pore distribution is uniform, the pore diameter of the large pores is 4-6 μm, and the pore diameter of the small pores is 0.2 μm-0.7 μm.

实施例5:Example 5:

本实施例提供一种微米级多孔钨的制备方法,包括以下步骤:The present embodiment provides a preparation method of micron-scale porous tungsten, comprising the following steps:

A.流延料浆的制备:将100gNaCl、50g乙醇加入尼龙罐中,在行星球磨机中球磨24h,其中NaCl原料纯度为99.9%,过60目筛,球磨转速为250rpm。将获得的悬浮液倒入烧杯中,在真空干燥箱中常温静置1h,倒出上层液体,烧杯中剩余物质在真空干燥箱中60℃下真空干燥12h,取NaCl粉末5.6g和50g粒径为1μm的W粉、1g的Hypermer KD-1(分析纯),加入19.2g的无水乙醇(分析纯)和19.2g的丁酮(分析纯)溶剂中,在高能混料机中球磨3h,球磨介质为不锈钢球,钢球质量为100g。再加入2.7g的聚乙烯醇缩丁醛(分析纯)、2.3g的甘油(分析纯),球磨3h,获得流延料浆。A. Preparation of casting slurry: 100g NaCl and 50g ethanol were added to a nylon tank, and ball milled in a planetary ball mill for 24 hours, wherein the NaCl raw material purity was 99.9%, passed through a 60 mesh sieve, and the ball milling speed was 250 rpm. Pour the obtained suspension into a beaker, let it stand at room temperature for 1 hour in a vacuum drying oven, pour out the upper liquid, and vacuum dry the remaining material in the beaker at 60 °C for 12 hours in a vacuum drying oven, and take 5.6 g of NaCl powder and 50 g of particle size. It is 1μm W powder, 1g of Hypermer KD-1 (analytical grade), added to 19.2g of absolute ethanol (analytical grade) and 19.2g of butanone (analytical grade) solvent, and ball-milled in a high-energy mixer for 3h, The ball milling medium is stainless steel ball, and the mass of the steel ball is 100g. Then 2.7 g of polyvinyl butyral (analytical grade) and 2.3 g of glycerol (analytical grade) were added, and ball-milled for 3 hours to obtain a casting slurry.

B.流延薄带的处理:将步骤A中得到的流延料浆在流延机中流延烘干定形,得到流延薄带,将流延薄带裁剪成直径为20mm的圆片,将100层小圆片叠层。叠层后的薄带在真空度为优于9.9×10-3Pa的环境中,780℃保温2h进行热处理排胶;随后进行一次烧结获得生坯,烧结温度为780℃,保温2h,温度在750℃之下时施加10MPa压力,温度在750℃之上时无压。B. the treatment of the casting thin strip: the casting slurry obtained in the step A is cast, dried and shaped in a casting machine to obtain the casting thin strip, and the casting thin strip is cut into a disc with a diameter of 20 mm, and the 100-layer wafer stack. The laminated ribbons were heat-treated and debonded at 780°C for 2h in an environment where the vacuum degree was better than 9.9×10 -3 Pa; and then a green body was obtained by sintering at a temperature of 780°C for 2h at a temperature of When the temperature is below 750°C, a pressure of 10MPa is applied, and when the temperature is above 750°C, there is no pressure.

C.烧结获得多孔钨:将步骤B中获得的生坯置于流动的去离子水中冲洗12h后,取出生坯,置于真空干燥箱中80℃烘干12h,得到多孔钨生坯。多孔钨生坯在Ar气氛下烧结,烧结制度为10℃/min升温至1100℃,5℃/min升至1400℃,保温时间为3h,10℃/min降至1100℃,20℃/min将至室温,烧结全程无压,得到所述的多孔钨。C. Sintering to obtain porous tungsten: After washing the green body obtained in step B in flowing deionized water for 12 hours, the green body was taken out and dried in a vacuum drying oven at 80°C for 12 hours to obtain a porous tungsten green body. The porous tungsten green body was sintered in an Ar atmosphere. The sintering system was 10°C/min to 1100°C, 5°C/min to 1400°C, holding time for 3h, 10°C/min to 1100°C, 20°C/min to increase the temperature to 1100°C. When the temperature reaches room temperature, the whole process of sintering is pressureless, and the porous tungsten is obtained.

采用阿基米德排水方法测得该多孔钨的致密度为44.1%,孔分布均匀,大孔孔径为4-6μm,小孔孔径为0.2μm-0.7μm。The density of the porous tungsten measured by the Archimedes drainage method is 44.1%, the pore distribution is uniform, the pore diameter of the large pores is 4-6 μm, and the pore diameter of the small pores is 0.2 μm-0.7 μm.

以上所述实施例仅表达了本发明的几种实施方式,其描述较为详尽,但并不能因此而理解为对本发明专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以作出若干变形和改进,这些都属于本发明的保护范围。因此本发明专利的保护范围应以所附权利要求为准。The above-mentioned embodiments only represent several embodiments of the present invention, and the descriptions thereof are relatively detailed, but should not be construed as a limitation on the scope of the patent of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can be made, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.

Claims (10)

1.一种微米级多孔钨的制备方法,其特征在于,包括以下步骤:1. a preparation method of micron-level porous tungsten, is characterized in that, comprises the following steps: 1)将原料NaCl、乙醇以及球磨介质进行球磨,然后干燥得到NaCl粉末;1) Ball milling raw material NaCl, ethanol and ball milling medium, and then drying to obtain NaCl powder; 2)备料:按照质量百分比为50-60%的钨粉、0%-8.5%的NaCl粉末、32.6-38.4%的有机溶剂以及5.3-7.4%的有机添加剂备料,其中有机添加剂包括2.5%-3.5%的聚乙烯醇缩丁醛、0.8%-1.2%的Hypermer KD-1以及2.0%-2.7%的甘油;2) Material preparation: prepare materials according to the mass percentage of 50-60% tungsten powder, 0%-8.5% NaCl powder, 32.6-38.4% organic solvent and 5.3-7.4% organic additives, wherein the organic additives include 2.5%-3.5% % polyvinyl butyral, 0.8%-1.2% Hypermer KD-1 and 2.0%-2.7% glycerin; 3)流延料浆的制备:将NaCl粉末和钨粉以及有机添加剂加入到有机溶剂中进行球磨得到流延料浆;3) preparation of casting slurry: NaCl powder, tungsten powder and organic additive are added into organic solvent and ball-milled to obtain casting slurry; 4)流延薄带的处理:将步骤3)得到的流延料浆在流延机中流延烘干定形,得到流延薄带,将流延薄带裁剪成特定形状,将预定层数的薄带叠层,叠层后的薄带在真空条件下保温排胶,然后再在相同真空度下保温烧结,进行热压烧结,获得生坯;4) Treatment of the casting thin strip: the casting slurry obtained in step 3) is cast, dried and shaped in a casting machine to obtain a casting thin strip, and the casting thin strip is cut into a specific shape. Thin strips are laminated, and the laminated strips are kept under vacuum for thermal insulation and debinding, and then thermally sintered under the same vacuum degree for hot pressing and sintering to obtain green bodies; 5)烧结获得多孔钨:生坯置于流动的水中冲洗,然后干燥得到多孔钨生坯,多孔钨生坯在惰性气氛下高温烧结,得到所述的多孔钨。5) Sintering to obtain porous tungsten: the green body is rinsed in flowing water, and then dried to obtain a porous tungsten green body, and the porous tungsten green body is sintered at high temperature in an inert atmosphere to obtain the porous tungsten. 2.如权利要求1所述的微米级多孔钨的制备方法,其特征在于,所述步骤3)中的具体加料顺序为:先将钨粉和NaCl与Hypermer KD-1加入到有机溶剂中球磨,再加入聚乙烯醇缩丁醛和甘油,球磨得到流延料浆。2. the preparation method of micron-level porous tungsten as claimed in claim 1, is characterized in that, the concrete feeding sequence in described step 3) is: first join tungsten powder and NaCl and Hypermer KD-1 in organic solvent for ball milling , and then add polyvinyl butyral and glycerin, and ball mill to obtain a casting slurry. 3.如权利要求1所述的微米级多孔钨的制备方法,其特征在于,所述步骤1)中的NaCl粉末的粒径为3-6μm。3 . The method for preparing micron-sized porous tungsten according to claim 1 , wherein the particle size of the NaCl powder in the step 1) is 3-6 μm. 4 . 4.如权利要求1所述的微米级多孔钨的制备方法,其特征在于,所述步骤1)中的有机溶剂为质量比按1:1混合的乙醇和丁酮。4. The preparation method of micron-scale porous tungsten according to claim 1, wherein the organic solvent in the step 1) is ethanol and butanone mixed in a mass ratio of 1:1. 5.如权利要求1所述的微米级多孔钨的制备方法,其特征在于,所述步骤2)中的钨粉的纯度为99.9%,粒径为0.5-5μm。5 . The method for preparing micron-sized porous tungsten according to claim 1 , wherein the tungsten powder in the step 2) has a purity of 99.9% and a particle size of 0.5-5 μm. 6 . 6.如权利要求1所述的微米级多孔钨的制备方法,其特征在于,所述步骤5)中的高温烧结的烧结温度为1300-1700℃,保温时间为1-3h,烧结压力为0-10MPa。6. The preparation method of micron-scale porous tungsten according to claim 1, wherein the sintering temperature of the high-temperature sintering in the step 5) is 1300-1700 DEG C, the holding time is 1-3h, and the sintering pressure is 0 -10MPa. 7.如权利要求1所述的微米级多孔钨的制备方法,其特征在于,所述步骤4)中的真空条件为优于9.9×10-3Pa的真空度,保温温度为780℃,保温时间为2h,烧结压力为10-30MPa。7. The preparation method of micron-scale porous tungsten according to claim 1, wherein the vacuum condition in the step 4) is a vacuum degree better than 9.9× 10-3 Pa, the holding temperature is 780°C, and the holding temperature is 780°C. The time is 2h, and the sintering pressure is 10-30MPa. 8.如权利要求1所述的微米级多孔钨的制备方法,其特征在于,所述步骤5)中的干燥为真空干燥,干燥温度为80度,干燥时间为12小时。8 . The method for preparing micron-sized porous tungsten according to claim 1 , wherein the drying in the step 5) is vacuum drying, the drying temperature is 80 degrees, and the drying time is 12 hours. 9 . 9.如权利要求1所述的微米级多孔钨的制备方法,其特征在于,所述步骤1)中的原料NaCl的纯度为99.9%,过60目筛。9 . The method for preparing micron-sized porous tungsten according to claim 1 , wherein the raw material NaCl in the step 1) has a purity of 99.9% and passes through a 60-mesh sieve. 10 . 10.如权利要求1所述的微米级多孔钨的制备方法制备得到的微米级多孔钨,其特征在于,所述多孔钨的大孔孔径为3-6μm,小孔孔径为0.1μm-0.7μm,致密度范围为35%-90%。10. The micron-sized porous tungsten prepared by the method for preparing micron-sized porous tungsten according to claim 1, wherein the macropore diameter of the porous tungsten is 3-6 μm, and the small pore diameter is 0.1 μm-0.7 μm , the density range is 35%-90%.
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