Summary of the invention
In view of this, the present invention provides a kind of unsteady cavity single-frequency laser output device, it is reflective in the prior art to solve
The positive branch pseudo confocal unsteady resonator of export structure exports the more inconvenient problem of solid beam design near field optic.
To achieve the above object, the invention provides the following technical scheme:
A kind of unsteady cavity single-frequency laser output device, comprising:
The oblique injected system of seed laser and laser resonator system;
The oblique injected system of seed laser includes: waveguide laser, the first beam splitter, beam quality analysis instrument,
One reflecting mirror, the second reflecting mirror and beam expander;
The laser resonator system includes: the first electrode and second electrode being oppositely arranged, be located at the first electrode and
The second electrode two sides, and the concave mirror and concavo-convex portion reflecting mirror being oppositely arranged;
The central axes of the first electrode and the second electrode and the concave mirror and the concavo-convex portion reflect
The optical axis of mirror is located along the same line;
Wherein, the light beam of waveguide laser outgoing is divided into the first light beam and the second of reflection of transmission by the first beam splitter
Light beam, second light beam are incident to the beam quality analysis instrument, and the beam quality analysis instrument is for monitoring described second
The zlasing mode of light beam;
First light beam is expanded by the beam expander, and by first reflecting mirror and the second reflection microscope group
At periscope structure, it is oblique to be incident upon the first electrode;
After the oblique light for being incident upon the first electrode is scattered by the first electrode, by the concave mirror and described
The multiple reflections of concavo-convex portion reflecting mirror, and be emitted by the concavo-convex portion reflecting mirror, single-frequency laser is obtained, the single-frequency swashs
Light is solid hot spot.
Preferably, unsteady cavity single-frequency laser output device further include single-frequency laser output detection system, the second beam splitter and
Third beam splitter;
Second beam splitter is used to for second light beam being divided into the third light beam of reflection and the 4th light beam of transmission, institute
It states the 4th light beam and is incident to the beam quality analysis instrument, the third light beam is as the single-frequency laser output detection system
Reference beam;
The third beam splitter is used to the single-frequency laser being emitted by the concavo-convex portion reflecting mirror being divided into the 5th of transmission
6th light beam of light beam and reflection, the 5th light beam are defeated as the effective energy of the unsteady cavity single-frequency laser output device
Out, the 6th light beam is input to the single-frequency laser detection system, detects for laser pulse frequency;
Wherein, the single-frequency laser output detection system is used to detect the frequency of the single-frequency laser.
Preferably, the single-frequency laser output detection system includes: polarizer, the 4th beam splitter, controllable attenuator group, light
Electric explorer and oscillograph;
6th light beam is transmitted through the photodetector by the 4th beam splitter after the polarizer;
The third light beam is after the controllable attenuator group through the 4th beam splitter reflection to the photodetection
Device;
The output end of the photodetector is connected with the input terminal of the oscillograph, and the oscillograph is for exporting pulse
Waveform.
Preferably, the transflection ratio of first beam splitter is 4:1.
Preferably, the beam expander is 5 times of beam expanders.
Preferably, the reflectivity of the concave mirror is higher than 99%.
Preferably, the reflectivity of the concavo-convex portion reflecting mirror is 70%.
Preferably, the transflection ratio of the third beam splitter is 9:1.
Preferably, the waveguide laser is waveguide CO2Laser.
It can be seen via above technical scheme that in unsteady cavity single-frequency laser output device provided by the invention, laser resonance
The reflecting mirror of the outgoing beam of system is concavo-convex portion reflecting mirror, i.e., the positive branch pseudo confocal unsteady resonator in the present invention is transmission output
Mode realizes the solid hot spot output near field so as to be emitted solid hot spot;On the other hand, it is incident to the light beam of first electrode
For the oblique injection mode in end face, injection locking is carried out using electrode the reflected beams, single-frequency laser output can be obtained, and certain
The adjustment of injection seeded light path design and optoisolated complexity are reduced in degree, are conducive to improve system stability.
Specific embodiment
Just as described in the background section, the design of traditional positive branch pseudo confocal unsteady resonator is mainly using reflection in the prior art
Formula export structure, as shown in Figure 1, for positive branch pseudo confocal unsteady resonator traditional in the prior art, the positive branch pseudo confocal unsteady resonator
Including first electrode 01, second electrode 02 and positioned at first reflecting mirror 03 and second at 02 both ends of first electrode 01 and second electrode
Reflecting mirror 04, wherein size of the size of the second reflecting mirror 04 less than the first reflecting mirror 03, thus when final light beam output, it can
It is emitted from the edge of the second reflecting mirror 04, also therefore, the hot spot of traditional positive branch pseudo confocal unsteady resonator output is hollow light spot, such as
Shown in Fig. 1.Although diffraction becomes central solid light beam or can be obtained by central light beam reconstruct solid after about 20m
Light beam, but near field optic transmitting and relay system design, it is still more inconvenient.
Based on this, the present invention provides a kind of unsteady cavity single-frequency laser output device, comprising:
The oblique injected system of seed laser and laser resonator system;
The oblique injected system of seed laser includes: waveguide laser, the first beam splitter, beam quality analysis instrument,
One reflecting mirror, the second reflecting mirror and beam expander;
The laser resonator system includes: the first electrode and second electrode being oppositely arranged, be located at the first electrode and
The second electrode two sides, and the concave mirror and concavo-convex portion reflecting mirror being oppositely arranged;
The central axes of the first electrode and the second electrode and the concave mirror and the concavo-convex portion reflect
The optical axis of mirror is located along the same line;
Wherein, the light beam of waveguide laser outgoing is divided into the first light beam and the second of reflection of transmission by the first beam splitter
Light beam, second light beam are incident to the beam quality analysis instrument, and the beam quality analysis instrument is for monitoring described second
The zlasing mode of light beam;
First light beam is expanded by the beam expander, and by first reflecting mirror and the second reflection microscope group
At periscope structure, it is oblique to be incident upon the first electrode;
After the oblique light for being incident upon the first electrode is scattered by the first electrode, by the concave mirror and described
It is solid hot spot that concavo-convex portion reflecting mirror, which states single-frequency laser,.
In unsteady cavity single-frequency laser output device provided by the invention, the reflecting mirror of the outgoing beam of laser resonator system is
Concavo-convex portion reflecting mirror, i.e. positive branch pseudo confocal unsteady resonator in the present invention are the transmission way of output, so as to be emitted solid light
Spot realizes the solid hot spot output near field;On the other hand, the light beam for being incident to first electrode is the oblique injection mode in end face, is utilized
Electrode the reflected beams carry out injection locking, can obtain single-frequency laser output, and reduce injection seeded light to a certain extent
Road design adjustment and optoisolated complexity, are conducive to improve system stability.
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Specifically, referring to Fig. 2, Fig. 2 is a kind of unsteady cavity single-frequency laser output device knot provided in an embodiment of the present invention
Structure schematic diagram, the unsteady cavity single-frequency laser output device, comprising: the oblique injected system 100 of seed laser and laser resonance system
System 200;The oblique injected system of seed laser includes: that waveguide laser 1, the first beam splitter 2, beam quality analysis instrument 5, first are anti-
Penetrate mirror 8, the second reflecting mirror 9 and beam expander 7;Laser resonator system includes: the first electrode and second electrode being oppositely arranged, and is located at
First electrode and second electrode two sides, and the concave mirror 10 and concavo-convex portion reflecting mirror 14 being oppositely arranged;First electrode and
The central axes of second electrode and the optical axis of concave mirror 10 and concavo-convex portion reflecting mirror 14 are located along the same line;Wherein, wave
The light beam for leading the outgoing of laser 1 divides the first light beam for transmission and the second light beam of reflection, the second light beam by the first beam splitter 2
It is incident to beam quality analysis instrument 5, beam quality analysis instrument 5 is used to monitor the zlasing mode of the second light beam;First light beam passes through
Beam expander 7 expands, and the periscope structure formed by the first reflecting mirror 8 and the second reflecting mirror 9, oblique to be incident upon first electrode;
After the oblique light for being incident upon first electrode is scattered by first electrode, by the multiple of concave mirror 10 and concavo-convex portion reflecting mirror 14
Reflection, and be emitted by concavo-convex portion reflecting mirror 14, single-frequency laser is obtained, single-frequency laser is solid hot spot.
It should be noted that in Fig. 2, in the oblique injected system 100 of seed laser, in addition to the second reflecting mirror 9, other yuan
Part all in same level, and, the axis of first electrode and second electrode in the horizontal plane and laser resonator system 200
Line, i.e., dotted line shown in Fig. 2 are located in the same horizontal plane.The section of laser resonator system 200 shown in Fig. 2 be perpendicular to
The cross section structure schematic diagram of the horizontal plane.Namely the oblique injected system 100 of seed laser shown in Fig. 2 and laser resonance system
System 200 is located in two orthogonal planes.Wherein, the periscope knot of the first reflecting mirror 8 and the second reflecting mirror 9 composition
The light beam of horizontal plane where the central axes for being located at first electrode and second electrode is raised to by structure to realize the lifting of optical path
Higher than concave mirror 10, so as to from the oblique sealed window for being incident upon laser resonator system in the edge of concave mirror 10
11, and then sealed window relative to laser resonator system is oblique is incident upon in first electrode 12.
Not limiting first electrode in the present embodiment is top electrode or lower electrode, but seed source and is swashed in practical optical path arrangement
Light device is both secured on stabilized baseplate, and region of discharge is shorter apart from substrate vertical range, and injection light beam is incident on from bottom to top
Light-guide space is insufficient when electrode.Therefore, in the present embodiment, optionally, first electrode is lower electrode.That is 12 be the first electricity in Fig. 2
Pole, 13 be second electrode.
The oblique injection mode in end face is used in the present embodiment, is avoided and is injected along the central axes of first electrode and second electrode
The light beam isolating problem of introducing.
It is concavo-convex portion reflecting mirror 14, therefore, light by the reflecting mirror of laser resonator system exit direction in this present embodiment
Beam can directly pass through, and be not necessarily to as in the prior art, needing the edge by reflecting mirror to be emitted, solid so as to obtain
Light beam.
In unsteady cavity single-frequency laser output device provided in this embodiment, the reflecting mirror of the outgoing beam of laser resonator system
For concavo-convex portion reflecting mirror, i.e., positive branch pseudo confocal unsteady resonator is the transmission way of output, so as to be emitted solid hot spot, is realized close
The solid hot spot output in field;On the other hand, the light beam for being incident to first electrode is the oblique injection mode in end face, utilizes electrode reflected light
Shu Jinhang injection locking, can obtain single-frequency laser output, and reduce the adjustment of injection seeded light path design to a certain extent
And optoisolated complexity, be conducive to improve system stability.
The embodiment of the present invention also provides a kind of unsteady cavity single-frequency laser output device, as shown in figure 3, in a upper embodiment
On the basis of, further includes: single-frequency laser output detection system 300, the second beam splitter 4 and third beam splitter 15;Wherein, single-frequency laser
Output detection system 300 is used to detect the frequency of single-frequency laser.Second beam splitter 4 is used to for the second light beam being divided into the third of reflection
4th light beam of light beam and transmission, the 4th light beam are incident to beam quality analysis instrument 5, and third light beam is exported as single-frequency laser and examined
The reference beam of examining system 300;Third beam splitter 15 is for the single-frequency laser being emitted by concavo-convex portion reflecting mirror 14 to be divided into
6th light beam of the 5th light beam and reflection penetrated, the 5th light beam are defeated as the effective energy of unsteady cavity single-frequency laser output device
Out, the 6th light beam is input to single-frequency laser detection system 300, detects for laser pulse frequency.
Single-frequency laser output detection system 300 specifically includes in the present embodiment: polarizer 16, the 4th beam splitter 17, controllable
Attenuator group 18, photodetector 19 and oscillograph 20;6th light beam transmits after polarizer 16 by the 4th beam splitter 17
To photodetector 19;Third light beam reflexes to photodetector 19 through the 4th beam splitter 17 after controllable attenuator group 18;
The output end of photodetector 19 is connected with the input terminal of oscillograph 20, and oscillograph 20 is used for output pulse waveform.
The oblique injected system 100 of seed laser further includes third reflecting mirror 3 and the 4th reflecting mirror 6 in the present embodiment, certainly,
When optical path direction needs to change, the use of reflecting mirror can also be increased or decreased, is not limited this in the present embodiment.
Specifically, the specific working principle is as follows for the unsteady cavity single-frequency laser output device provided in the embodiment of the present invention:
The unsteady cavity single-frequency laser output device is that transmission-type exports positive branch pseudo confocal unsteady resonator single-frequency laser device, such as
It include three component parts, each partial function is relatively independent, to realize that the solid hot spot of high power single frequency laser is defeated shown in Fig. 3
Out, it is provided simultaneously with and frequency characteristic detection function is carried out to output facula.
Wherein, waveguide CO21 output power of laser emits laser beam and divides through the first beam splitter 2 for transflection than 4 close to 3W:
1 two beam laser, reflected light (the second light beam) after third reflecting mirror 3 and the second beam splitter 4, pass through by transmitted light (the 4th light beam)
Beam quality analysis instrument 5 is used as seed laser mode monitoring, is used as frequency by the reflected light (third light beam) of the second beam splitter 4
The reference beam of detection.Transmitted light (the first light beam) through the first beam splitter 2 is anti-through 6,5 times of beam expanders 7, first of the 4th reflecting mirror
Penetrate after mirror 8 and the second reflecting mirror 9, into laser resonator system, wherein the effect of beam expander 7 mainly realize seed laser with
The pattern match of output single transverse mode laser, pattern match effect directly determine injection seeded in pulse TEA laser resonator system
Height and the stability quality of probability of lock.
Seed laser by the reflection of the second reflecting mirror 9 is incident under TEA laser resonator system by sealed window 11
12 surface of electrode, wherein lower electrode 12 and top electrode 13 form 19kV~26kV discharge electrode pair, lower 12 surface of electrode is polishing
Metal covering, incident laser will scatter, and cause the light beam for deviateing laser generation axis to be unable to fully utilize, but due to note
It is higher to enter power, as long as some seed laser can inhibit spontaneous radiation in laser resonator system, just can form injection locking.
Entire laser resonator system is made of concave mirror 10 (reflectivity is higher than 99%) and concavo-convex portion reflecting mirror 14, wherein recessed
The convex surface of convex portion reflecting mirror 14 is 70% reflectivity reflecting surfaces, and concavo-convex portion reflecting mirror 14 is used as output coupling optical element,
Solid hot spot output can be obtained, beam divergence angle is divided into two parts after third beam splitter 15 close to 1mrad, output beam,
Wherein transmitted light beam (the 5th light beam) is exported as laser effective energy, and the reflected beams (the 6th light beam) are used as laser pulse frequency
Detect light beam.
It is incident by the reflected beams of third beam splitter 15 (transflection ratio 9:1) after polarizer 16 and the 4th beam splitter 17
Into 19 surface of photodetector, wherein after the seed laser of the second beam splitter 4 reflection enters controllable attenuator group 18, then pass through
Enter photodetector 19 after the reflection of 4th beam splitter 17, photodetector 19 exports electric signal and enters the realization output of oscillograph 20
Impulse waveform observation and frequency stability detection.
Wherein, the smooth degree of impulse waveform directly reacts the single-frequency characteristic of laser output, if it exists more longitudinal mode oscillations, then
To occur using longitudinal mode spacing frequency as the harmonic oscillation of baseband signal in beat frequency waveform, and the frequency transform function of oscillograph can
The short-term or long-term frequency stability characteristics of real time inversion laser.
Remote laser coherent detection is higher to light source frequency stability requirement, in real application systems, it is also desirable to introduce
Frequency detection system carries frequency detection system function in the unsteady cavity single-frequency laser output device provided in an embodiment of the present invention
Can, subsequent frequencies testing process can be simplified.
It should be noted that the transflection ratio of each beam splitter and specifically expanding again for beam expander are not limited in the present embodiment
Number.Wherein, it is humorous to be necessary to ensure that seed laser major part power transmission is injected into TEA laser later for the transflection ratio of the first beam splitter 2
In vibrating system, to obtain better mode suppression effect.And the multiple of beam expander 7 is the angle of divergence and TEA according to seed laser
The distribution of Laser Output Beam mode determines that, if laser resonator system Parameters variation, expanding multiple can also change, to obtain
Better pattern match.Therefore, the transflection ratio of beam splitter and beam expander specifically expand multiple can according to actual needs into
Row is selected.
The unsteady cavity single-frequency laser output device provided in the present embodiment consists of three parts, respectively seed laser
Oblique injected system, laser resonator system, single-frequency laser output detection system.The laser resonator system is TEACO2Laser is humorous
Vibrating system, the oblique injected system of seed laser utilize continuous waveguide CO2The single-frequency laser of output is infused after beam mode matches
Enter laser resonator system lower electrode surface, realizes the inhibition to other non-selection modes using electrode reflection signal.TEACO2Swash
Optical resonance system realizes that the transmission-type of unsteady cavity exports and obtains solid hot spot distribution in the way of concave-convex arrangement of mirrors.It is single
Frequency laser output detection system is mixed as local vibration source with TEA pulse using transmitting seed laser, to obtain stable bat
Frequency signal, in this, as the frequency characteristic detection means of laser single-frequency operation.
Unsteady cavity single-frequency laser output device provided in an embodiment of the present invention can be realized the even more big energy of joule magnitude
Single Frequency C O2Laser output, and can realize that the solid hot spot output of laser is easy to use, the oblique injection mode in end face effectively prevents
Inject optical path isolating problem.In addition, the device can change output pulse length by changing gas mixing ratio, while replaceable
Laser medium is CO2Isotope gas reduces decaying multiplying power of the output laser in propagation in atmosphere.Index specifically can be achieved such as
Under: output energy is greater than 1J, pulse recurrence frequency and is better than 2MHz, single-frequency laser frequency locker up to 30Hz, single-frequency laser breadth of spectrum line
Probability is determined better than 90%.
It should be noted that all the embodiments in this specification are described in a progressive manner, each embodiment weight
Point explanation is the difference from other embodiments, and the same or similar parts between the embodiments can be referred to each other.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.