A kind of production method of the quartz glass cylindrical surface polishing disk based on gel base
Technical field
The present invention relates to hard brittle material chemical Mechanical Polishing Technique fields, and in particular to a kind of quartz based on gel base
The production method of glass cylinder face polishing disk.
Background technique
Polishing fluid is transmitted using polishing pad and is uniformly distributed in traditional chemically mechanical polishing, using polishing fluid ingredient and
Material surface generation chemical reaction is polished to generate the substance for being easier removal and polishing particles and be polished surface
Physical friction, achievees the purpose that polishing, but due to polishing pad be it is flat, plane polishing, and the price of polishing pad can only be carried out
It is higher, increase polishing cost;On the other hand, polishing process will also result in the waste of polishing fluid, generally use cerium oxide throwing at present
Light liquid, cerium oxide polishing slurry price is higher and toxic, generates pollution to environment.Chinese patent 201110231332.7 discloses one
Kind glass polishing disk and its manufacturing method, the polishing disk raw material include abrasive grain, filler, resin, curing agent, promotor composition, institute
State abrasive grain be alumina-cerium oxide core shell composite grain, or oxidation aluminium surface seep cerium abrasive grain, the filler include heat filling,
Active filler, pore creating material composition, resin is unsaturated polyester resin, but the polishing disk component is more, and preparation process is complicated.
Summary of the invention
The purpose of the present invention is to solve the above-mentioned problems and provides a kind of quartz glass cylinder based on gel base
The production method of face polishing disk.
The purpose of the present invention is achieved through the following technical solutions:
A kind of production method of the quartz glass cylindrical surface polishing disk based on gel base, specifically includes the following steps:
(1) according to the radius on the quartz glass cylindrical surface to be polished, the thickness of required gel base is determined, and really
Surely the die size of gel base is carried;
(2) it prepares gel sample: preparing the mixed aqueous solution of polyvinyl alcohol, sodium alginate and silica, will mix molten
Liquid pours into mold, and freezing, thaw cycles for several times, form gel, then the gel of generation is placed in cerium oxide polishing slurry repeatedly
It impregnates, finally wash with distilled water;
(3) gel made from step (2) is layered on mold, and with corresponding curvature mould support, freeze-day with constant temperature to constant weight,
Obtain quartz glass cylindrical surface polishing disk.
Mold described in step (1) is stainless steel mould, and the circular groove that die face is equipped with carrying gel base is held
Section, the back side are equipped with the bolt hole for installing connection.
The thickness equations of gel base described in step (1) are as follows: L=(r1-r2) * 4.5, wherein L is gel base
Thickness, r1For the radius for carrying gel base mold, r2For the quartz glass cylindrical surface material object radius to be polished, gel is done
4-5 times with a thickness of semidiameter for the gel base that thickness can reduce 4-5 times, therefore primarily determine after dry, preferably 4.5 times.
The weight ratio of polyvinyl alcohol described in step (2), sodium alginate and silica are as follows: 60-80:20-30:5-
10.When mixed aqueous solution configures, method particularly includes: granule of polyvinyl alcohol is placed in distilled water, heating water bath stirring and dissolving, is made
It is standby to be cooled to room temperature spare at clear polyvinyl alcohol water solution, sodium alginate powder is dissolved in distilled water, is stirred at room temperature molten
Solution, is made sodium alginate aqueous solution, adds SiO in polyvinyl alcohol water solution and sodium alginate aqueous solution2, stir evenly, make
For at mixed solution.
The temperature of step (2) freezing is -10 to -16 DEG C, and time 20-24h, thaw 1-2h at room temperature, and freezing is thawed and followed
Ring number is 3-4 times.
It is 2%CaCl that gel is placed in containing mass percent by step (2)2Cerium oxide polishing slurry in impregnate, time 20-
28h。
Step (3) is 37 DEG C in temperature, freeze-day with constant temperature in the baking oven that humidity is 10%, drying time 40-50h.
The cylindrical surface polishing disk obtained after drying is installed on polishing machine and polishes for the cylindrical surface of quartz glass, polishing disk
In room temperature humidity using being advisable in the environment of 8%-12%, without using the case where polishing disk is placed on to the ring of humidity 10%
It is saved in border.
Compared with prior art, the present invention is based on the throwings of the quartz glass cylindrical surface of polyvinyl alcohol and sodium alginate gel substrate
CD improves the intensity and elasticity of polishing layer, makes cylinder by the compound preparation of repetitive freezing thawing method and chemical crosslink technique
Face polishing layer after the drying will not be cracked, wraps up cerium rouge particle, meets the requirement of high-precision polishing, by micro-
Amount addition SiO2Improve the thickness of cylindrical surface polishing layer.Nanoscale cerium particle is wrapped up using the space net structure of gel,
At cylinder face mould after drying, for polishing quartzy glass cylinder face, meets polishing and require and reach saving polish abrasive, reduce ring
Border pollution, reduces the purpose of cost, has cost advantage and environment-friendly advantage.
Detailed description of the invention
Fig. 1 is the mold structure schematic diagram of present invention carrying gel base;
Fig. 2 is the die face structural schematic diagram of present invention carrying gel base;
Fig. 3 is freeze-day with constant temperature gel support structural schematic diagram of the present invention;
In figure: 1 bolt hole, 2 loading ends, 3 molds, 4 gel bases, 5 support frames, 6 curvature molds, 7 lifting platforms
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.
Embodiment 1
A kind of production method of the quartz glass cylindrical surface polishing disk based on gel base, specific steps are as follows:
(1) die size for determining carrying gel base, according to formula L=(r1-r2) * 4.5 calculating, wherein L is gel
The thickness of substrate, r1For the radius for carrying gel base mold, r2For the quartz glass cylindrical surface material object radius to be polished, mould
Tool is stainless steel mould, and such as Fig. 1,3 circular groove loading end 2 of the front equipped with carrying gel base of mold, the back side, which is equipped with, to be used
In the bolt hole 1 of installation connection.
(2) prepare gel sample: granule of polyvinyl alcohol is placed in distilled water, and heating stirring 6h is molten in 95 DEG C of water-bath
Solution is continuously replenished and evaporates reduced moisture, is finally prepared into clear polyvinyl alcohol water solution, be cooled to room temperature it is spare, simultaneously
It takes sodium alginate powder to be dissolved in distilled water, stirs 6h dissolution at room temperature, take polyvinyl alcohol and sodium alginate aqueous solution, and add
SiO2With cerium oxide solution at room temperature with blender stir 6h, be prepared into mixed solution, wherein polyvinyl alcohol, sodium alginate,
The weight ratio of silica are as follows: 70:25:5.
Mixed solution is poured into mold, repeatedly freezing, thaw cycles, forms gel, then gel is placed in containing 2%
CaCl2Cerium oxide polishing slurry in impregnate, the time is that for 24 hours, finally wash with distilled water, the temperature of freezing is -16 DEG C, and the time is
22h, thaw 2h at room temperature, and freezing, thaw cycles number are 4 times.
(3) gel base 4 made from step (2) is layered on mold 3, and with corresponding curvature mold 6, gently pressure is supported, and is such as schemed
Shown in 3, the mold 3 for having spread gel base 4 is placed on lifting platform 7, curvature mold 6 is placed on support frame 5, passes through adjusting
The height of lifting platform 7 resists gel base 4, prevents from gliding, and adjusts primary height every half an hour, and be 37 DEG C in temperature,
Freeze-day with constant temperature in the baking oven that humidity is 10%, drying time is 48h to get quartz glass cylindrical surface polishing disk is arrived, such as Fig. 2 institute
Show, gel base 4 is set on mold 3, and obtained cylindrical surface polishing disk is installed on the cylinder that quartz glass is used on polishing machine
Face polishing.
Embodiment 2
A kind of production method of the quartz glass cylindrical surface polishing disk based on gel base, specific steps are as follows:
(1) die size for determining carrying gel base, according to formula L=(r1-r2) * 4.5 calculating, wherein L is gel
The thickness of substrate, r1For the radius for carrying gel base mold, r2For the quartz glass cylindrical surface material object radius to be polished, mould
Tool is stainless steel mould, and such as Fig. 1,3 circular groove loading end 2 of the front equipped with carrying gel base of mold, the back side, which is equipped with, to be used
In the bolt hole 1 of installation connection.
(2) prepare gel sample: granule of polyvinyl alcohol is placed in distilled water, and heating stirring 6h is molten in 95 DEG C of water-bath
Solution is continuously replenished and evaporates reduced moisture, is finally prepared into clear polyvinyl alcohol water solution, be cooled to room temperature it is spare, simultaneously
It takes sodium alginate powder to be dissolved in distilled water, stirs 6h dissolution at room temperature, take polyvinyl alcohol and sodium alginate aqueous solution, and add
SiO2With cerium oxide solution at room temperature with blender stir 6h, be prepared into mixed solution, wherein polyvinyl alcohol, sodium alginate,
The weight ratio of silica are as follows: 60:20:5.
Mixed solution is poured into mold, repeatedly freezing, thaw cycles, forms gel, then gel is placed in containing 2%
CaCl2Cerium oxide polishing slurry in impregnate, time 20h, finally wash with distilled water, the temperature of freezing are -10 DEG C, and the time is
For 24 hours, thaw 1h at room temperature, and freezing, thaw cycles number are 3 times.
(3) gel base 4 made from step (2) is layered on mold 3, and with corresponding curvature mold 6, gently pressure is supported, and is such as schemed
Shown in 3, the mold 3 for having spread gel base 4 is placed on lifting platform 7, curvature mold 6 is placed on support frame 5, passes through adjusting
The height of lifting platform 7 resists gel base 4, prevents from gliding, and adjusts primary height every half an hour, and be 37 DEG C in temperature,
Humidity be 10% baking oven in freeze-day with constant temperature, drying time be 40h to get arrive quartz glass cylindrical surface polishing disk.
Embodiment 3
A kind of production method of the quartz glass cylindrical surface polishing disk based on gel base, specific steps are as follows:
(1) die size for determining carrying gel base, according to formula L=(r1-r2) * 4.5 calculating, wherein L is gel
The thickness of substrate, r1For the radius for carrying gel base mold, r2For the quartz glass cylindrical surface material object radius to be polished, mould
Tool is stainless steel mould, and such as Fig. 1,3 circular groove loading end 2 of the front equipped with carrying gel base of mold, the back side, which is equipped with, to be used
In the bolt hole 1 of installation connection.
(2) prepare gel sample: granule of polyvinyl alcohol is placed in distilled water, and heating stirring 6h is molten in 95 DEG C of water-bath
Solution is continuously replenished and evaporates reduced moisture, is finally prepared into clear polyvinyl alcohol water solution, be cooled to room temperature it is spare, simultaneously
It takes sodium alginate powder to be dissolved in distilled water, stirs 6h dissolution at room temperature, take polyvinyl alcohol and sodium alginate aqueous solution, and add
SiO2With cerium oxide solution at room temperature with blender stir 6h, be prepared into mixed solution, wherein polyvinyl alcohol, sodium alginate,
The weight ratio of silica are as follows: 80:30:10.
Mixed solution is poured into mold, repeatedly freezing, thaw cycles, forms gel, then gel is placed in containing 2%
CaCl2Cerium oxide polishing slurry in impregnate, time 28h, finally wash with distilled water, the temperature of freezing are -16 DEG C, and the time is
20h, thaw 2h at room temperature, and freezing, thaw cycles number are 4 times.
(3) gel base 4 made from step (2) is layered on mold 3, and with corresponding curvature mold 6, gently pressure is supported, and is such as schemed
Shown in 3, the mold 3 for having spread gel base 4 is placed on lifting platform 7, curvature mold 6 is placed on support frame 5, passes through adjusting
The height of lifting platform 7 resists gel base 4, prevents from gliding, and adjusts primary height every half an hour, and be 37 DEG C in temperature,
Humidity be 10% baking oven in freeze-day with constant temperature, drying time be 50h to get arrive quartz glass cylindrical surface polishing disk.