CN107195517A - Flied emission X-ray tube with high vacuum - Google Patents
Flied emission X-ray tube with high vacuum Download PDFInfo
- Publication number
- CN107195517A CN107195517A CN201710406634.0A CN201710406634A CN107195517A CN 107195517 A CN107195517 A CN 107195517A CN 201710406634 A CN201710406634 A CN 201710406634A CN 107195517 A CN107195517 A CN 107195517A
- Authority
- CN
- China
- Prior art keywords
- flied emission
- emitting module
- ray tube
- field emitting
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims abstract description 36
- 238000010521 absorption reaction Methods 0.000 claims abstract description 31
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 18
- 239000002086 nanomaterial Substances 0.000 claims abstract description 18
- 239000003463 adsorbent Substances 0.000 claims abstract description 4
- 239000010409 thin film Substances 0.000 claims abstract description 4
- 239000002905 metal composite material Substances 0.000 claims description 6
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 37
- 238000004821 distillation Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- -1 aqueous vapor Substances 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/20—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of Flied emission X-ray tube with high vacuum.The Flied emission X-ray tube with high vacuum includes the gentle body adsorbent thin film of vacuum cover body, one end in the vacuum (-tight) housing body is provided with cathodic field emitting module, the other end of the vacuum cover body is provided with plate target, the carbon nanomaterial for Flied emission is provided with the cathodic field emitting module, the carbon nanomaterial is electrically connected with the cathodic field emitting module, the gas absorption film is located at cathodic field emitting module surface and/or anode target surface, the cathodic field emitting module and plate target are equipped with stitch, it is external that the pin portion of the cathodic field emitting module and plate target is located at vacuum (-tight) housing.Flied emission X-ray tube service life of the present invention with high vacuum is long.
Description
Technical field
The present invention relates to Flied emission X-ray tube technical field, more particularly to a kind of Flied emission X-ray with high vacuum
Pipe.
Background technology
In the carbon nanomaterial Flied emission X-ray tube course of work, negative electrode Flied emission is launched largely under the auxiliary of electric field
Electronics, via the acceleration of high voltage electric field, electronics is with high-speed impact by anode target metal because material is in the electricity of high-energy
Under son bombardment, the energy of electronics can be given to target atom, and wherein most energy is converted into heat energy, makes the temperature of target regional area
Degree is improved, and only fraction energy is converted into X-ray.If electric current is too big, or pipe ball transmitting working time accumulation heat is high,
Plate target material can be made directly to go to gas (distillation) from solid,
The purity of this rapid reduction tube interior ultrahigh vacuum of evaporation.Ultrahigh vacuum, which loses pure result, to be caused to be X-ray
Pipe is not able to take high voltage differential between cathode stream and plate target.X-ray tube starts short circuit, or occurs electric arc, Jin Erzheng
Send out gas more, more vacuum purity are reduced successively, and ultimately result in X-ray tube to rerun.Received additionally, due to carbon
Rice material may have substantial amounts of hydrogen, aqueous vapor, oxygen etc., gradually be discharged in the pipe ball of high vacuum in growing up
These gases, cause vacuum to decline.So the distillation of anode target material stores the release of gas with negative electrode nano material, it can all drop
The vacuum and service life of low X-ray tube.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of Flied emission X-ray with high vacuum of service life length
Pipe.
To solve the above problems, the present invention provides a kind of Flied emission X-ray tube with high vacuum, including vacuum cover body with
One end in gas absorption film, the vacuum (-tight) housing body is provided with cathodic field emitting module, and the other end of the vacuum cover body is provided with
The carbon nanomaterial for Flied emission, the carbon nanomaterial and described the moon are provided with plate target, the cathodic field emitting module
Pole Flied emission component is electrically connected with, and the gas absorption film is located at cathodic field emitting module surface and/or anode target surface, institute
State cathodic field emitting module and plate target is equipped with stitch, the pin portion of the cathodic field emitting module and plate target is located at very
Outside empty cover body.
Further, the gas absorption film is metal composite film.
Further, the gas absorption film is the metal composite film containing Ni or Zr.
Further, the thickness of the gas absorption film is 0.1um --- 100um.
Further, the cathodic field emitting module is cathode block.
Further, the cathodic field emitting module includes cathode block and cathode shield, and the cathode shield is located at cathode block
On, the carbon nanomaterial is located on cathode block, and the cathode block is electrically connected with the carbon nanomaterial, the gas absorption
Film is located at the poly- lid surface of the negative electrode.
Further, the gas absorption film set by sputtering way be coated in cathodic field emitting module surface and/or
Anode target surface.
The present invention have high vacuum Flied emission X-ray tube, inside set gas absorption film, to absorb target distillation,
The gas that glass tube walls, electrode assemblie, carbon nanomaterial are discharged, improves the vacuum in vacuum (-tight) housing body, extends X-ray tube
Service life.Without excessive parts, space is saved.
Brief description of the drawings
Fig. 1 is the structural representation of the better embodiment of Flied emission X-ray tube of the present invention with high vacuum.
Fig. 2 is the structural representation of another better embodiment of Flied emission X-ray tube of the present invention with high vacuum.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings.
Embodiment 1
As shown in figure 1, the better embodiment of Flied emission X-ray tube of the present invention with high vacuum includes vacuum cover body 1
With gas adsorbent thin film 2, one end in the vacuum cover body 1 is provided with cathodic field emitting module, the other end of the vacuum cover body 1
Provided with plate target 4, the cathodic field emitting module and plate target 4 are equipped with stitch, the cathodic field emitting module and plate target 4
Pin portion be located at vacuum cover body 1 outside.The carbon nanomaterial 5 for Flied emission, institute are provided with the cathodic field emitting module
State carbon nanomaterial 5 to be electrically connected with the cathodic field emitting module, the gas absorption film 2 is located at cathodic field emitting module
Surface and the surface of plate target 4.The cathodic field emitting module is that cathode block 3, i.e. gas absorption film 2 are located at the table of cathode block 3
Face.
The gas absorption film 2 be metal composite film, so can effectively absorb the target of plate target 4 distillation,
The gas that vacuum cover body 1, electrode assemblie, carbon nanomaterial 5 are discharged, the metal composite film contains Ni or Zr, improves
To hydrogen and the adsorption capacity of aqueous vapor.The thickness of the gas absorption film 2 is 0.1um --- 100um, is easy to control cost；
Gas is absorbed because gas absorption film 2 relies primarily on its surface, therefore gas absorption film 2 too not obvious enough, the gas of thin effect
Adsorbent thin film 2 is too thick can not effectively to absorb more gases.The gas absorption film 2 is coated in the moon by way of sputter
On the surface of electrode seat 3 and the surface of plate target 4, the surface area of increase gas absorption film 2 can absorb more gases.
When gas molecule collision is to gas absorption film, gas passes through Van der Waals force (physical absorption) and residual valence force
(chemisorbed) is adsorbed on the surface of gas absorption film；Then the gas of adsorption, with larger surface migration
Rate, it promptly can spread apart on the whole surface.With the progress of diffusion into the surface, under certain conditions, surface is inhaled
Attached gas will be further to progress body diffusion inside getter metals, and its principal mode is embodied in：1. metal surface depression is goed deep into
Or damage location；2. between immersion crystal boundary；3. among the defect for being diffused into crystallization itself；4. with metal compound into intermetallic
Thing；5. with metal formation solid solution, so that stable absorption is on film.
Embodiment 2
The present embodiment difference from Example 1 is：Cathodic field emitting module structure difference and gas absorption film 2
It has been located on cathodic field emitting module.
The cathodic field emitting module includes cathode block 3 and cathode shield 6, and the cathode shield 6 is located on cathode block 3, institute
State carbon nanomaterial 5 to be located on cathode block 3, the cathode block 3 is electrically connected with the carbon nanomaterial 5, the gas absorption
Film 2 is located at the poly- lid surface of negative electrode.Cathode shield 6 is used for the flatness for increasing negative electrode and with the effect focused on.
In other embodiments, also gas absorption film 2 only can be set on the surface of plate target 4, can also be in anode
Gas absorption film 2 is set on the end face relative with cathodic field emitting module of target 4.
Embodiments of the present invention are these are only, are not intended to limit the scope of the invention, it is every to utilize the present invention
The equivalent structure that specification and accompanying drawing content are made, is directly or indirectly used in other related technical fields, similarly at this
Within the scope of patent protection of invention.
Claims (7)
1. a kind of Flied emission X-ray tube with high vacuum, it is characterised in that：Including the gentle body adsorbent thin film of vacuum cover body, institute
State one end in vacuum (-tight) housing body and be provided with cathodic field emitting module, the other end of the vacuum cover body is provided with plate target, the negative electrode
The carbon nanomaterial for Flied emission is provided with Flied emission component, the carbon nanomaterial and the cathodic field emitting module are electrical
Connection, the gas absorption film is located at cathodic field emitting module surface and/or anode target surface, the cathodic field emitting module
Stitch is equipped with plate target, the pin portion of the cathodic field emitting module and plate target is external positioned at vacuum (-tight) housing.
2. there is the Flied emission X-ray tube of high vacuum as claimed in claim 1, it is characterised in that：The gas absorption film
For metal composite film.
3. there is the Flied emission X-ray tube of high vacuum as claimed in claim 2, it is characterised in that：The gas absorption film
For the metal composite film containing Ni or Zr.
4. there is the Flied emission X-ray tube of high vacuum as claimed in claim 1, it is characterised in that：The gas absorption film
Thickness be 0.1um --- 100um.
5. there is the Flied emission X-ray tube of high vacuum as claimed in claim 1, it is characterised in that：The negative electrode Flied emission group
Part is cathode block.
6. there is the Flied emission X-ray tube of high vacuum as claimed in claim 1, it is characterised in that：The negative electrode Flied emission group
Part includes cathode block and cathode shield, and the negative electrode is located on cathode block, and the carbon nanomaterial is located on cathode block, described the moon
Electrode seat is electrically connected with the carbon nanomaterial, and the gas absorption film is located at the poly- lid surface of the negative electrode.
7. there is the Flied emission X-ray tube of high vacuum as claimed in claim 1, it is characterised in that：The gas absorption film
If being coated in cathodic field emitting module surface and/or anode target surface by sputtering way.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710406634.0A CN107195517A (en) | 2017-06-02 | 2017-06-02 | Flied emission X-ray tube with high vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710406634.0A CN107195517A (en) | 2017-06-02 | 2017-06-02 | Flied emission X-ray tube with high vacuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107195517A true CN107195517A (en) | 2017-09-22 |
Family
ID=59876944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710406634.0A Pending CN107195517A (en) | 2017-06-02 | 2017-06-02 | Flied emission X-ray tube with high vacuum |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107195517A (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103765546A (en) * | 2011-08-31 | 2014-04-30 | 佳能株式会社 | Target structure and x-ray generating apparatus |
| CN103824740A (en) * | 2012-11-16 | 2014-05-28 | 上海联影医疗科技有限公司 | X-ray tube having adsorption film |
| CN103843103A (en) * | 2011-10-14 | 2014-06-04 | 工程吸气公司 | Non-evaporable getter compositions which can be reactivated at low temperature after exposure to reactive gases at a higher temperature |
| US20140211919A1 (en) * | 2011-08-31 | 2014-07-31 | Canon Kabushiki Kaisha | X-ray generator and x-ray imaging apparatus |
| US20140321619A1 (en) * | 2011-11-28 | 2014-10-30 | Koninklijke Philips N.V. | X-ray tube with heatable field emission electron emitter and method for operating same |
| CN204257584U (en) * | 2014-12-16 | 2015-04-08 | 南京康众光电科技有限公司 | A kind of cold cathode X-ray tube negative electrode |
| CN204441244U (en) * | 2014-12-31 | 2015-07-01 | 西门子爱克斯射线真空技术(无锡)有限公司 | Cathode assembly, ray tube and imaging device |
| CN104889519A (en) * | 2015-04-24 | 2015-09-09 | 黄石上方检测设备有限公司 | Highly-efficient, energy-saving and environmentally-friendly manufacturing method of metal ceramic X ray tube |
| CN105575744A (en) * | 2016-01-14 | 2016-05-11 | 黄石上方检测设备有限公司 | Preparation method of carbon nanometer cold cathode X-ray tube |
| CN205508763U (en) * | 2016-01-14 | 2016-08-24 | 黄石上方检测设备有限公司 | Loop type carbon nanometer cold cathode X -ray tube |
-
2017
- 2017-06-02 CN CN201710406634.0A patent/CN107195517A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103765546A (en) * | 2011-08-31 | 2014-04-30 | 佳能株式会社 | Target structure and x-ray generating apparatus |
| US20140211919A1 (en) * | 2011-08-31 | 2014-07-31 | Canon Kabushiki Kaisha | X-ray generator and x-ray imaging apparatus |
| CN103843103A (en) * | 2011-10-14 | 2014-06-04 | 工程吸气公司 | Non-evaporable getter compositions which can be reactivated at low temperature after exposure to reactive gases at a higher temperature |
| US20140321619A1 (en) * | 2011-11-28 | 2014-10-30 | Koninklijke Philips N.V. | X-ray tube with heatable field emission electron emitter and method for operating same |
| CN103824740A (en) * | 2012-11-16 | 2014-05-28 | 上海联影医疗科技有限公司 | X-ray tube having adsorption film |
| CN204257584U (en) * | 2014-12-16 | 2015-04-08 | 南京康众光电科技有限公司 | A kind of cold cathode X-ray tube negative electrode |
| CN204441244U (en) * | 2014-12-31 | 2015-07-01 | 西门子爱克斯射线真空技术(无锡)有限公司 | Cathode assembly, ray tube and imaging device |
| CN104889519A (en) * | 2015-04-24 | 2015-09-09 | 黄石上方检测设备有限公司 | Highly-efficient, energy-saving and environmentally-friendly manufacturing method of metal ceramic X ray tube |
| CN105575744A (en) * | 2016-01-14 | 2016-05-11 | 黄石上方检测设备有限公司 | Preparation method of carbon nanometer cold cathode X-ray tube |
| CN205508763U (en) * | 2016-01-14 | 2016-08-24 | 黄石上方检测设备有限公司 | Loop type carbon nanometer cold cathode X -ray tube |
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| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170922 |