CN107192854A - The Z scanner and probe unit and probe unit erector of AFM - Google Patents

Abstract

The Z scanner, the probe device and the probe device installer of the atomic force microscope are equipped with a Z scanner and a probe device connected under the Z scanner. The electric ceramic sheet and the ring magnet, the ring iron sheet, the ring piezoelectric ceramic sheet and the ring magnet are coaxially arranged, and the inner circumference together forms a light hole; the probe device has a probe clamping structure for magnetically connecting with the ring iron sheet, A cantilever beam probe embedded in the probe clamping structure and a spring pressure piece that fixes the cantilever beam probe on the probe clamping structure by screws. The probe device mounter of the probe device has a rectangular opening formed at one end of the main body of the mounter, countersunk threaded holes for connecting the probe device through countersunk screws are formed on both sides and the bottom of the rectangular opening, and the main body of the installer is away from The rectangular opening part is formed with a countersunk through hole for connecting an external device. The invention can be applied to atomic force microscopes with various functions and multiple scanning modes.

Description

Z Scanner and Probe Unit for Atomic Force Microscope and Probe Unit Mounter

technical field

The invention relates to a human probe clamping device for an atomic force microscope. In particular, it relates to a Z scanner, a probe device and a probe device installer of an atomic force microscope.

Background technique

In 1986, Binning and others invented the first atomic force microscope. Since then, many scientific and technological workers have continuously improved and improved on this basis, and broadened its application fields, thus deriving various types of atomic force microscopes, which can not only carry out electron Properties, magnetism, nanolithography, and bioactive molecular properties analysis are more widely used to explore microscopic physical properties (light, force, electricity, and magnetism) at the nanometer scale. The functions have far exceeded the previous microscope technology and brought humans into the world. nano age.

According to different test requirements, researchers from various countries have made various improvements in the structure of the atomic force microscope, but most of them still use the cantilever beam probe as the sensing element, use the optical lever detection method, and combine different scanner structures for scanning. According to the different movement modes of the scanner, the structure of the atomic force microscope can be divided into up-scanning, down-scanning and hybrid scanning structures. The so-called up-scanning structure means that the sample is stationary, and the probe is driven by the XYZ scanner to scan relative to the sample; Down scanning means that the probe is stationary, and the sample is scanned relative to the probe under the drive of the XYZ scanner; mixed scanning means that both the probe and the sample perform scanning motion, which can be divided into different types according to the position of the XYZ scanner. scanning mechanism.

The different structures of XYZ scanners will lead to great differences in the scanning movement modes, but the scanning modes are roughly the same. Currently commonly used scanning modes include contact scanning, tapping scanning, and peak force tapping scanning, etc. According to different scanning modes, the motion state of the probe will be different. During contact scanning, the probe is stationary, and by detecting the deformation information of the probe, the movement of the Z scanner is controlled to track the change of the surface topography of the sample; during tap scanning, the probe oscillates at its resonant frequency, and by detecting the probe’s Oscillation amplitude to drive the movement of the Z scanner; in the peak force tapping mode, the Z scanner drives the probe to oscillate at a frequency lower than the resonance frequency of the probe, drives the probe to do high-speed force curve movement, and controls the peak force at each scanning point constant, the position information of the Z scanner is the characteristic topography information.

When using the upper scanner and the hybrid scanner (the Z scanner is on the measuring head), the installation structure design of the Z scanner and the probe needs to be considered. How to quickly and effectively install and replace the cantilever beam probe is a problem that needs to be solved.

Contents of the invention

The technical problem to be solved by the present invention is to provide a Z scanner, a probe device and a probe device mounter of an atomic force microscope with better versatility.

The technical solution adopted in the present invention is: a Z scanner and a probe device for an atomic force microscope, including a Z scanner and a probe device connected below the Z scanner, and the Z scanner includes : An annular iron sheet, an annular piezoelectric ceramic sheet and an annular magnet arranged sequentially from bottom to top, the annular iron sheet, annular piezoelectric ceramic sheet and annular magnet are coaxially arranged, and the inner circumference together constitutes a light hole; the probe The device includes: a probe clamping structure for magnetically connecting with the annular iron sheet, a cantilever beam probe embedded in the probe clamping structure and fixing the cantilever beam probe on the Spring pressure tab on the probe holding structure.

The inner diameter of the ring magnet is larger than the inner diameter of the ring piezoelectric ceramic sheet.

The ring-shaped iron sheet, the ring-shaped piezoelectric ceramic sheet and the ring magnet are fixedly connected by epoxy resin glue, wherein the lower end surface of the ring iron sheet is connected to the probe holder, and the upper end surface of the ring magnet is Mounted on the Y scanner of an atomic force microscope.

The probe clamping structure includes a clamping body, the lower end surface of the clamping body is integrally formed with a flat portion and an inclined portion, and a hole corresponding to the light through hole is formed on the flat portion and adjacent to the inclined portion. Corresponding up and down through the light-through window and the mounting hole for connecting the external probe device installer located around the light-through window, on the slope part near the side of the light-through window is formed a cantilever For the groove of the probe, a screw hole for fixing the spring pressing piece by a screw is formed on the side corresponding to the groove on the slope part, and one end of the spring pressing piece is pressed on the cantilever beam probe; the clamping The upper end surface of the main body is embedded with three magnetic blocks for connecting with the annular iron sheet on the Z scanner through magnetic force.

The spring pressing piece is formed with an adjustment groove along the length direction for adjusting the amount of the spring pressing piece pressing on the cantilever beam probe, and the screw passes through the adjustment groove and is threadedly connected with the screw hole.

The inclined surface part is an inclined surface with an included angle of 10-12° with the horizontal plane.

The depth of the groove for embedding the cantilever beam probe is 0.2-0.3mm.

A probe device mounter for a Z scanner and a probe device of an atomic force microscope, characterized in that it includes a mounter body, one end of the mounter body is formed with a rectangular opening, and the two sides of the rectangular opening are There are 4 countersunk threaded holes for connecting probe devices through countersunk screws distributed on the bottom and bottom, and the part of the installer body away from the rectangular opening is formed with countersunk through holes for connecting external devices.

The Z scanner, the probe device and the probe device installer of the atomic force microscope of the present invention have a simple structure and can be applied to atomic force microscopes with various functions and multiple scanning modes. Has the following beneficial effects:

1. For a variety of scanning methods and modes, the applicability of the structure can be guaranteed, and it has good versatility;

2. Using magnetic attraction to provide the pre-tightening force of piezoelectric ceramics, the structure is simple;

3. The design of the installation structure of the probe holder has a simple structure, which is convenient for the installation and position adjustment of the cantilever beam probe.

Description of drawings

Fig. 1 is the overall structure schematic diagram of the Z scanner and the probe device that the present invention is used for atomic force microscope;

Fig. 2 is the bottom view of Fig. 1;

Fig. 3 is a schematic diagram of the overall structure of the Z scanner in the present invention;

4 is a schematic diagram of the overall structure of the probe device in the present invention;

5 is a schematic diagram of the overall structure of the probe clamping structure in the present invention;

Fig. 6 is the bottom view of Fig. 5;

Fig. 7 is the right view of Fig. 5;

Fig. 8 is the back view of Fig. 5;

9 is a schematic diagram of the overall structure of the probe device installer in the present invention;

Fig. 10 is a structural schematic view of the probe device placed on the probe device mounter in the present invention;

Fig. 11 is the bottom view of Fig. 10;

FIG. 12 is a schematic diagram of the probe device installer installing the probe device on the Z scanner in the present invention.

in the picture

1: Z scanner 11: Ring iron sheet

12: Ring piezoelectric ceramic sheet 13: Ring magnet

14: Clear hole 2: Probe device

21: Probe clamping structure 211: Clamping body

212: Horizontal section 213: Inclined section

214: Light-through window 215: Mounting hole

216: groove 217: screw hole

218: Magnetic Block 22: Cantilever Beam Probe

23: Spring pressing piece 231: Adjustment groove

24: Screw 3: Probe Unit Mounter

31: Mounter body 32: Rectangular opening

33: Countersunk threaded hole 34: Countersunk through hole

4: Countersunk screw 5: Incident laser beam

6: Reflected laser beam

detailed description

The Z scanner, the probe device and the probe device installer of the atomic force microscope of the present invention will be described in detail below with reference to the embodiments and the accompanying drawings.

The Z scanner and probe device used in the atomic force microscope of the present invention use magnetic attraction to realize the fixation of the probe device, which is beneficial to the adjustment of the position of the probe. Preload to ensure the motion performance of piezoelectric ceramics.

The Z scanner and probe device for atomic force microscope of the present invention are installed on the atomic force microscope. The specific structure of the atomic force microscope refers to the patent number 2015100890154, and the patent titled "An atomic force microscope suitable for high-speed scanning".

As shown in FIG. 1 and FIG. 2 , the Z scanner and probe device for an atomic force microscope of the present invention includes a Z scanner 1 and a probe device 2 connected below the Z scanner 1 .

As shown in Figure 3, the described Z scanner 1 includes: an annular iron sheet 11, an annular piezoelectric ceramic sheet 12 and an annular magnet 13 arranged in sequence from bottom to top, the annular iron sheet 11, the annular piezoelectric ceramic sheet 12 It is arranged coaxially with the ring magnet 13 and the inner periphery together forms the light through hole 14 . The inner diameter of the ring magnet 13 is larger than the inner diameter of the ring piezoelectric ceramic sheet 12 . The annular iron sheet 11, the annular piezoelectric ceramic sheet 12 and the annular magnet 13 are fixedly connected by epoxy resin glue, which has high rigidity and can meet the measurement requirements. Wherein, the lower end surface of the annular iron sheet 11 is connected to the probe holder 2, and the upper end surface of the annular magnet 13 is installed on the Y scanner of the atomic force microscope. The ring magnet 13 and the ring iron sheet 11 are respectively fixed on the upper and lower surfaces of the ring piezoelectric ceramic sheet 12 to provide pre-tightening force for the ring piezoelectric ceramic sheet 12 .

In the atomic force microscope, the laser beam needs to be focused on the cantilever beam probe. In the optical path designed by the atomic force microscope, the reflected laser beam needs to pass through the Z scanner again and return to the aspheric lens. In the embodiment of the present invention, the Z scanner The piezoelectric ceramic sheet has a ring structure with an outer diameter of 12mm, an inner diameter of 6mm, and a thickness of 2mm. The inner diameter size can meet the incident and reflected laser beams passing through at the same time. The inner diameter required by the ring magnet is larger than the inner diameter of the annular piezoelectric ceramic sheet. The magnet has an inner diameter of 7mm and a thickness of 1mm.

As shown in Figure 4, the probe device 2 includes: a probe clamping structure 21 for magnetically connecting with the annular iron sheet 11, a cantilever probe embedded in the probe clamping structure 21 The needle 22 and the spring pressing piece 23 that fixes the cantilever beam probe 22 on the probe clamping structure 21 by screws 24 .

As shown in Fig. 4, Fig. 5, Fig. 6, Fig. 7 and Fig. 8, the probe clamping structure 21 includes a clamping body 211, and the lower end surface of the clamping body 211 is integrally formed with a horizontal portion 212 and a slope Part 213, the slope part 213 is an inclined surface with an included angle of 10-12° with the horizontal plane. On the horizontal part 212 and adjacent to the slope part 213, a light-through window 214 penetrating up and down corresponding to the light-through hole 14 and a probe device mounter located around the light-through window 214 for connecting to the outside are formed. 3, a groove 216 for embedding the cantilever beam probe 22 is formed on the side of the slope portion 213 near the light-through window 214, and the groove 216 for embedding the cantilever beam probe 22 is formed. The depth of 216 is 0.2-0.4mm, and the best choice is 0.3mm. On the side of the slope portion 213 corresponding to the groove 216, a screw hole 217 is formed for fixing the spring pressing piece 23 by a screw 24, and one end of the spring pressing piece 23 is pressed on the installation cantilever beam probe 22; Three magnetic blocks 218 are embedded in the upper end surface of the holding body 211 for magnetically connecting with the annular iron piece 11 on the Z scanner 1 , so as to realize the fixing of the cantilever beam probe on the Z scanner 1 . There is a magnetic attraction force between the magnetic block 218 and the annular iron sheet on the Z scanner, which can realize the attraction between the magnetic surface of the probe clamping structure 21 and the Z scanner.

As shown in Figure 4, the spring pressing piece 23 is formed with an adjustment groove 231 along the length direction for adjusting the amount of the spring pressing piece 23 pressing on the cantilever beam probe 22, and the screw 24 passes through the adjustment groove 231 is threadedly connected with the screw hole 217.

The probe device 2 is fixed on the annular iron sheet 11 of the Z scanner 1 through magnetic attraction, so as to ensure that the cantilever beam probe 22 follows the movement of the Z scanner 1. The ring magnet 13 in the Z scanner 1 is fixed on the patent No. 2015100890154, an invention In the structure of the atomic force microscope named "an atomic force microscope suitable for high-speed scanning". The present invention replaces the Z-direction scanner and the probe device therein. The light window 214 of the probe device in the present invention and the light hole of the Z scanner ensure that the incident laser beam can be focused on the cantilever probe, and the reflected laser beam reflected by the cantilever probe can pass through the Z scan device and eventually returns to the aspheric lens to become a parallel beam output. In order to ensure the normal passage of the laser beam, the inner diameter of the ring magnet in the Z scanner is larger than the inner diameter of the ring piezoelectric ceramic sheet, as shown by the dotted line in Figure 2.

As shown in FIG. 9 , the probe device mounter for the Z scanner and probe device of the atomic force microscope of the present invention includes a mounter body 31, and one end of the mounter body 31 is formed with a rectangular opening 32, so The two sides and the bottom of the rectangular opening 32 are distributed with four countersunk threaded holes 33 for connecting the probe device 2 through the countersunk screw 4. The part of the installer body 31 away from the rectangular opening 32 forms a useful The counterbore hole 34 for connecting external devices.

As shown in Fig. 10 and Fig. 11, the probe device 2 is placed on the probe device mounter 3 before it is attracted to the Z scanner 1, and the installation of the probe device 2 and the probe device mounter 3 The upper surface of the device main body 31 is attached, and four countersunk screws 4 pass through the mounting holes 215 on the probe device 2 to ensure that the position of the probe device 2 is fixed. In order to ensure that the cantilever beam probe is not damaged when the probe device 2 is placed, A rectangular opening 32 is designed on the mounter body 31 . There are four countersunk through holes at the end of the installer main body 31, which are used to fix the installer main body 31 on a three-dimensional translation platform (not shown in the figure), and this three-dimensional translation platform is used to adjust the position of the probe device 2 , to install and adjust the position of the cantilever beam probe.

As shown in Fig. 4, Fig. 10, Fig. 11 and Fig. 12, when the cantilever beam probe needs to be installed, firstly, the cantilever beam probe is fixed in the groove 216 on the clamping body 211 by using the spring pressing piece 23 and the screw 24, Constitute the probe device 2; then place the probe device 2 upside down on the probe device mounter 3, the placement surface of the probe device 2 coincides with the upper surface of the probe device mounter 3, and the probe device mounter 3 The four countersunk screws 4 are respectively inserted into the mounting holes 215 of the probe device at the corresponding positions. At this time, the probe device installer 3 is far away from the Z scanner, and the magnetic block 217 on the probe device 2 is connected with the ring-shaped iron piece on the Z scanner. The attraction force between 11 is small; when the probe device installer 3 brings the probe device 2 close to the Z scanner, the attraction force between the magnetic block 218 and the annular iron sheet 11 will attract the probe device 2 to the Z scanner 1, at this time, the magnetic surface of the probe device 2 is attracted to the annular iron sheet 11 of the Z scanner 1, and the four countersunk screws 4 in the probe device installer 3 are still in the adjustment holes of the probe device 2, Therefore, the probe device 2 can be driven to move in the plane on the annular iron sheet 11 of the Z scanner, thereby adjusting the position of the cantilever beam probe; after the position of the cantilever beam probe is adjusted, remove the probe device installer 3 , so far the installation of the cantilever beam probe is completed, and the atomic force microscope can perform scanning work. When the cantilever beam probe is worn out during the working process and needs to be replaced, the probe device 2 only needs to be manually removed, and the above-mentioned process can be repeated to achieve the purpose of replacing the cantilever beam probe.

Claims (8)

1. a kind of Z scanner and probe unit for AFM, includes Z scanner (1) and is connected to the Z and sweep Retouch the probe unit (2) of device (1) below, it is characterised in that described Z scanner (1) includes：The ring set gradually from the bottom to top Shape iron plate (11), ring-shaped piezo ceramic piece (12) and annular magnet (13), the annular iron plate (11), ring-shaped piezo ceramic piece (12) it is coaxially disposed with annular magnet (13), inner circumferential collectively forms light hole (14)；The probe unit (2) includes：For with The probe clamp structure (21) that described annular iron plate (11) is connected by magnetic force, is embedded on the probe clamp structure (21) Socle beam probe (22) and described socle beam probe (22) is fixed on by the probe clamp structure by screw (24) (21) spring pressuring plate (23) on.

2. the Z scanner according to claim 1 for AFM, it is characterised in that described annular magnet (13) internal diameter is more than the internal diameter of ring-shaped piezo ceramic piece (12).

3. the Z scanner according to claim 1 for AFM, it is characterised in that described annular iron plate (11), between ring-shaped piezo ceramic piece (12) and annular magnet (13) it is fixedly connected by epoxide-resin glue, wherein, it is described Annular iron plate (11) lower surface linking probe clamper (2), the upper surface of the annular magnet (13) is arranged on atomic force microscopy On the Y scan device of mirror.

4. the Z scanner according to claim 1 for AFM, it is characterised in that described probe clamping Structure (21) includes holder body (211), and the lower surface of the holder body (211) is formed with flat part (212) and oblique Face part (213), is formed with and described light hole (14) phase on the flat part (212) and adjacent to chamfered portion (213) The thang-kng window (214) of corresponding up/down perforation and the probe unit for being used to connect outside positioned at thang-kng window (214) periphery The mounting hole (215) of erector (3), the side that the thang-kng window (214) is closed on chamfered portion (213) is formed with and is used for The groove (216) of the embedded socle beam probe (22), respective slot (216) side is formed with use on chamfered portion (213) In the screw (217) by the fixed spring pressuring plate (23) of screw (24), one end of the spring pressuring plate (23) is pressed in the installation On socle beam probe (22)；The upper surface of the holder body (211) be embedded with three be used for in the Z scanner (1) The magnetic patch (218) that annular iron plate (11) is connected by magnetic force.

5. the Z scanner according to claim 4 for AFM, it is characterised in that described spring pressuring plate (23) regulating tank for adjusting the amount that spring pressuring plate (23) is pressed on the socle beam probe (22) is formed with along its length (231), the screw (24) is threadedly coupled through the regulating tank (231) with described screw (217).

6. the Z scanner according to claim 4 for AFM, it is characterised in that described chamfered portion (213) it with horizontal plane angle is 10-12 ° of inclined plane to be.

7. the Z scanner according to claim 4 for AFM, it is characterised in that described to be used for embedded hang Groove (216) depth of arm beam probe (22) is 0.2~0.3mm.

8. the Z scanner and the probe unit erector of probe unit of a kind of AFM for described in claim 1, It is characterised in that it includes there is erector main body (31), one end of the erector main body (31) is formed with rectangular aperture (32), institute State the both sides of rectangular aperture (32) and the formation of bottom distribution have 4 be used for pass through sunk screw (4) linking probe device (2) Countersunk head screwed hole (33), the part of the remote rectangular aperture (32) of the erector main body (31) is formed with for connecting outside The countersunk head through hole (34) of device.